CN116067970A

CN116067970A - Detection method, detection device, detection system, and computer-readable storage medium

Info

Publication number: CN116067970A
Application number: CN202211722103.XA
Authority: CN
Inventors: 吴鹿杰
Original assignee: Suzhou Lingyunguang Industrial Intelligent Technology Co Ltd
Current assignee: Suzhou Lingyunguang Industrial Intelligent Technology Co Ltd
Priority date: 2022-12-30
Filing date: 2022-12-30
Publication date: 2023-05-05

Abstract

The application discloses a detection method, a detection device, a detection system and a non-volatile computer readable storage medium. The detection method comprises the steps of controlling a first light source to irradiate a piece to be detected, wherein the first light source is a bright field light source, a light outlet of the first light source is provided with a light blocking sheet, and the light blocking sheet is used for blocking part of the light outlet; collecting a detection image of the piece to be detected; and detecting defects of the detection image to output defect information. Therefore, by adopting a bright field light source irradiation mode and setting a light blocking sheet at a light outlet to block a part of the light outlet, the three-dimensional defect sensitivity generated on the surface of the to-be-detected member can be remarkably improved when the detection image of the to-be-detected member is acquired, and the three-dimensional form of the unobvious defect on the surface of the to-be-detected member can be displayed, so that the problem that the black point-like defect and black abnormal background are easily mixed and overspected when the acquired detection image is detected due to a single normally-bright front lighting mode is solved.

Description

Detection method, detection device, detection system, and computer-readable storage medium

Technical Field

The present application relates to the field of detection technology, and more particularly, to a detection method, a detection apparatus, a detection system, and a non-volatile computer-readable storage medium.

Background

After the product is produced by a factory, the defect detection is required to be carried out on the produced product, and if the detected defect exceeds the defect standard, the product is not qualified. The detection method adopted frequently in detection mainly adopts a single normal-brightness front lighting mode by arranging a light source above a product and detects defects of the product by arranging a camera to collect images of the product irradiated by the light source, but the light source lighting mode of the detection method can cause the defects in the images collected by the camera to be represented as black spots, so that the problem that the black spots and black abnormal-color background dishes are easily mixed in the detection process is caused.

Disclosure of Invention

The embodiment of the application provides a detection method, a detection device, a detection system and a non-volatile computer readable storage medium.

The detection method of the embodiment of the application comprises the steps of controlling a first light source to irradiate a piece to be detected, wherein the first light source is a bright field light source, and a light outlet of the first light source is provided with a light blocking sheet which is used for blocking a part of the light outlet; collecting a detection image of the piece to be detected; and detecting defects of the detection image to output defect information.

The detection device of the embodiment of the application comprises a first control module, an acquisition module and a detection module. The first control module is used for controlling a first light source to irradiate the piece to be detected, the first light source is a bright field light source, a light outlet of the first light source is provided with a light blocking sheet, and the light blocking sheet is used for blocking a part of the light outlet; the acquisition module is used for acquiring detection images of the to-be-detected piece; and a detection module for detecting defects of the detection image to output defect information

The detection system of an embodiment of the present application includes a first light source, a camera, and a processor. The first light source is used for irradiating the piece to be detected, the first light source is a bright field light source, a light outlet of the first light source is provided with a light blocking sheet, and the light blocking sheet is used for blocking a part of the light outlet; the camera is used for collecting detection images of the to-be-detected piece; the processor is used for detecting the defect of the detection image so as to output defect information.

The non-transitory computer readable storage medium of the embodiments of the present application includes a computer program that, when executed by a processor, causes the processor to execute the detection method. The detection method comprises the steps of controlling a first light source to irradiate a piece to be detected, wherein the first light source is a bright field light source, a light outlet of the first light source is provided with a light blocking sheet, and the light blocking sheet is used for blocking a part of the light outlet; collecting a detection image of the piece to be detected; and detecting defects of the detection image to output defect information.

The detection method, the detection device, the detection system and the nonvolatile computer readable storage medium 5 of the embodiment of the application irradiate the piece to be detected by adopting the first light source which is the bright field light source, and the light-blocking sheet is arranged at the light outlet of the first light source to block

And a part of the light outlet is used for detecting the defects of the to-be-detected piece based on the acquired detection image of the to-be-detected piece and outputting defect information according to the detected defects of the to-be-detected piece. Therefore, by adopting the bright field light source irradiation mode and setting the light blocking sheet at the light outlet to block a part of the light outlet, the collected image to be detected of the workpiece to be detected can be remarkably lifted

The three-dimensional defect sensitivity generated on the surface of the measured piece can display 0 three-dimensional form of the unobvious defect on the surface of the measured piece, so that the problem that black spots are easy to be generated when a single normal-brightness front lighting mode is adopted to detect the acquired detection image is solved

Defects and black background mix to cause the problem of overdry.

Additional aspects and advantages of embodiments of the application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of embodiments of the application.

Drawings

The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, in which:

FIG. 1 is a flow diagram of a detection method according to certain embodiments of the present application;

FIG. 2 is a schematic illustration of a scenario of a detection method of certain embodiments of the present application;

FIG. 3 is a flow chart of a detection method according to certain embodiments of the present application;

FIG. 4 is a flow chart of a detection method according to certain embodiments of the present application;

FIG. 5 is a schematic diagram of an example of a detection method according to certain embodiments of the present application;

FIG. 6 is a schematic diagram of an example of a detection method according to certain embodiments of the present application;

FIG. 7 is a flow chart of a detection method according to certain embodiments of the present application;

FIG. 8 is a flow chart of a detection method according to certain embodiments of the present application;

FIG. 9 is a flow chart of a detection method according to certain embodiments of the present application;

FIG. 10 is a flow chart of a detection method according to certain embodiments of the present application;

FIG. 11 is a flow chart of a detection method according to certain embodiments of the present application;

FIG. 12 is a flow chart of a detection method according to certain embodiments of the present application;

FIG. 13 is a block diagram of a detection device according to certain embodiments of the present application;

fig. 14 is a schematic diagram of a connection state of a non-volatile computer readable storage medium and a processor according to some embodiments of the present application.

Detailed Description

Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only for explaining the embodiments of the present application and are not to be construed as limiting the embodiments of the present application.

Referring to fig. 1 and 2, an embodiment of the present application provides a detection method, where the detection method includes:

step 011: the first light source 210 is controlled to irradiate the workpiece 100, the first light source 210 is a bright field light source, the light outlet 211 of the first light source 210 is provided with a light blocking sheet 212, and the light blocking sheet 212 is used for blocking a part of the light outlet 211.

The workpiece 100 may be a graphite sheet, or may be a battery pole piece or the like, which needs to be irradiated by a light source to detect a physical defect.

Specifically, the first light source 210 is provided, and the light blocking piece 212 is provided at the light outlet 211 of the first light source 210. The light blocking sheet 212 is used for blocking a part of the light outlet 211, and controlling the first light source 210 to irradiate the workpiece 100 when the workpiece 100 needs to be detected. Note that, the light blocking sheet 212 provided at the light outlet 211 may be a light blocking sheet 212 which does not transmit light, or may be a light blocking sheet 212 having a certain light transmittance; the first light source 210 used at this time is a bright field light source.

Step 012: a detection image of the part 100 to be measured is acquired.

Wherein the detection image may be acquired by the camera 230.

Specifically, the camera 230 is disposed above the part 100 to be measured. The inspection image of the DUT 100 is collected by the camera 230 while the first light source 210 irradiates the DUT 100 for detecting defects of the DUT 100 by the inspection image.

Step 013: defects of the inspection image are detected to output defect information.

Wherein, the defects may include scratch defects generated on the surface of the workpiece 100 due to foreign matters or slipping on the surface of the guide roller during the process of producing the workpiece 100; pock defects formed by impurities during rolling; bump defects are generated on the surface of the to-be-measured piece 100 due to foreign matters on the roller or bubbles in the rolling process; due to breakage (edge defect) of the part 100 to be tested during transportation.

Specifically, after the camera 230 captures a detection image of the part under test 100, the defect of the part under test 100 is determined by detecting the detection image, and the detected defect information is output. If the bump defect and the pit defect are detected in the to-be-detected device 100 by detecting the detection image, then defect information is generated according to the detected bump defect and pit defect, and the generated defect information is output. It can be understood that the defect information generated at this time includes defect information of the bump defect and defect information of the pit defect of the test piece 100.

According to the detection method, the first light source 210 serving as a bright field light source is adopted to irradiate the to-be-detected piece 100, the light-blocking piece 212 is arranged at the light-emitting opening 211 of the first light source 210, a part of the light-emitting opening 211 is blocked, the defect of the to-be-detected piece 100 is detected based on the acquired detection image of the to-be-detected piece 100, and defect information is output according to the detected defect of the to-be-detected piece 100. Therefore, by adopting the bright field light source irradiation mode and setting the light blocking piece 212 at the light outlet 211 to block a part of the light outlet 211, the three-dimensional defect sensitivity generated on the surface of the acquired to-be-detected piece 100 can be remarkably improved when the detection image of the to-be-detected piece 100 is acquired, and the three-dimensional forms of the salient point defect and the pit defect which are not obvious on the surface of the to-be-detected piece 100 can be better presented, so that the problem that the black punctiform defect and the black heterochromatic background are easily mixed when the acquired detection image is detected in a single normal bright front light irradiation mode is solved.

Referring to fig. 3, in some embodiments, the detection method further includes:

step 014: the second light source 220 is controlled to irradiate the workpiece 100, and the second light source 220 is a dark field light source.

Wherein, the second light source 220 is different from the first light source 210, and the second light source 220 is a dark field light source.

Specifically, in addition to the first light source 210 being disposed above the workpiece 100 to irradiate the workpiece 100, the second light source 220 may be disposed above the workpiece 100 to irradiate the workpiece 100. When the test piece 100 needs to be tested, the second light source 220 is controlled to irradiate the test piece 100.

Referring again to fig. 3, in some embodiments, the detected image includes a first image and a second image, step 012: collecting a detection image of the part 100 to be detected, including:

step 0121: light reflected by the first light source 210 by the dut 100 is received to generate a first image.

The first image refers to an image generated by the camera 230 by receiving the light of the first light source 210 reflected by the dut 100.

Specifically, after the first light source 210 is controlled to irradiate the dut 100, the surface of the dut 100 reflects the light of the first light source 210 to the camera 230, and the camera 230 generates the first image according to the received light of the first light source 210 reflected by the dut 100.

Step 0122: light reflected by the workpiece 100 from the second light source 220 is received to generate a second image.

The second image refers to an image generated by the camera 230 by receiving the light of the second light source 220 reflected by the dut 100.

Specifically, after the second light source 220 is controlled to irradiate the dut 100, the surface of the dut 100 reflects the light of the second light source 220 to the camera 230, and the camera 230 generates the second image according to the received light of the second light source 220 reflected by the dut 100.

In this way, the lighting mode of the dark field light source is added in addition to the lighting mode of the bright field light source. Illuminating the part 100 to be measured by adding a dark field light source can increase the light entering the camera 230, so that the pock defect and impurity defect of the part 100 to be measured appear as bright white spots with overexposed pixels in the image to be measured, thereby combining bright field imaging and dark field imaging for detection, and improving the detection accuracy.

Referring to fig. 4, in some embodiments, the detection method further includes:

step 015: the first light source 210 is controlled to emit light according to the first control signal.

The first control signal refers to a signal for controlling the first light source 210 to emit light.

Specifically, the light emission timing of the first light source 210 may be controlled by a controller (the controller may be a time-sharing line sweep flash controller). When the first light source 210 is required to irradiate the part to be measured 100, a first control signal is sent to the controller, so that the controller controls the first light source 210 to emit light according to the first control signal.

Step 016: the second light source 220 is controlled to emit light according to the second control signal such that the first light source 210 and the second light source 220 alternately emit light.

The second control signal refers to a signal for controlling the second light source 220 to emit light.

Specifically, the light emission timing of the second light source 220 is the same as that of the first light source 210 and can be controlled by the controller. When the second light source 220 is required to illuminate the part 100 to be tested, a second control signal is sent to the controller, so that the controller controls the second light source 220 to emit light according to the second control signal. It should be noted that the first light source 210 and the second light source 220 are alternately operated when the first light source 210 emits light, that is, the second light source 220 does not emit light when the first light source 210 emits light, and similarly, the first light source 210 does not emit light when the second light source 220 emits light, so as to prevent the first light source and the second light source from interfering with each other.

Step 012: collecting a detection image of the part 100 to be detected, including:

step 0123: the exposure of the camera 230 is controlled according to the third control signal to alternately receive the light reflected by the first light source 210 and the light reflected by the second light source 220 by the workpiece 100, so as to generate a first image and a second image respectively.

The third control signal refers to a signal for controlling exposure of the camera 230.

Specifically, the exposure time of the camera 230 may be controlled by a third control signal. When the exposure of the camera 230 is required, the exposure time of the camera 230 can be controlled according to the transmitted third control signal, so that the camera 230 alternately receives the light of the first light source 210 reflected by the surface of the workpiece 100 and the light of the second light source 220 reflected by the surface of the workpiece 100, and generates a first image and a second image according to the reflected light of the first light source 210 and the reflected light of the second light source 220. It should be noted that, the exposure time of the camera 230 is less than or equal to the sum of the light emitting time of the first light source 210 and the second light source 220.

For example, the operation is represented when the first light source 210, the second light source 220, and the camera 230 are at a high level; the first light source 210, the second light source 220, and the camera 230 are not illustrated when they are at a low level.

Specifically, as shown in fig. 5, when the first light source 210 is at a high level, the first light source 210 emits light, and when the second light source 220 is at a low level, the second light source 220 does not emit light. When the first light source 210 changes from the high level to the low level, the second light source 220 changes from the low level to the high level, at which time the second light source 220 starts to emit light, and the first light source 210 stops emitting light. At this time, the camera 230 starts to be at the high level for the first time from the first light source 210, and the camera 230 is always at the high level, that is, the camera 230 is always exposed. At this time, the exposure time of the camera 230 is equal to the sum of the times of the light emission of the first light source 210 and the second light source 220.

For example, the operation is also represented when the first light source 210, the second light source 220, and the camera 230 are high; the first light source 210, the second light source 220, and the camera 230 are not illustrated when they are at a low level.

Specifically, as shown in fig. 6, when the first light source 210 is at a high level, the first light source 210 emits light, and when the second light source 220 is at a low level, the second light source 220 does not emit light. When the first light source 210 changes from the high level to the low level, the second light source 220 changes from the low level to the high level, at which time the second light source 220 starts to emit light, and the first light source 210 stops emitting light. When the second light source 220 changes from high to low, the first light source 210 at this time still keeps a short time low level, and then changes from low to high, i.e. neither the first light source 210 nor the second light source 220 emits light at this time, and the camera 230 also changes to high (i.e. the camera 230 is exposed) when the first light source 210 starts to high for the first time, until the second light source 220 changes from high to low, the camera 230 changes from high to low when the first light source 210 also changes to low, the camera 230 stops exposing, when the first light source 210 changes from low to high, the first light source 210 starts to emit light, and the camera 230 also changes from low to high when the first light source 210 starts to emit light, and the camera 230 starts to expose. I.e. the exposure time of the camera 230 is less than the sum of the times of each lighting of the first light source 210 and the second light source 220. In this way, by setting the exposure time of the camera 230 equal to the sum of the times of the light emission of the first light source 210 and the second light source 220, it is ensured that the camera 230 does not collect a detection image without the light source irradiation.

It should be further noted that the light emitting brightness and the light emitting time of the first light source 210 and the second light source 220 are preset, and are related to the value of the background gray value. If the preset background gray value (DN) is 60DN and 80DN, the light-emitting brightness and light-emitting time of the first light source 210 corresponding to 60DN are respectively weak light and 0.05 seconds(s), and the light-emitting brightness and light-emitting time of the second light source 220 corresponding to 60DN are respectively strong light and 0.05 seconds; the light-emitting brightness and the light-emitting time of the first light source 210 corresponding to the 80DN are strong light and 0.05 seconds(s), respectively, and the light-emitting brightness and the light-emitting time of the second light source 220 corresponding to the 80DN are strong light and 0.05 seconds, respectively. If the background gray value of the workpiece 100 is 80DN at this time, it can be known that the luminous intensity and the luminous time of the first light source 210 are respectively strong light and 0.05s, and the luminous intensity and the luminous time of the second light source 220 are respectively strong light and 0.05s according to the relationship between the luminous intensities and the luminous time of the first light source 210 and the second light source 220 corresponding to the preset background gray value. In this way, by presetting the light emitting time and the light emitting intensity of the corresponding first light source 210 and the second light source 220 according to the background gray value, a technician does not need to adjust the light emitting time and the light emitting intensity of the light source according to the background gray value according to his own experience in practical application, so as to ensure the light emitting accuracy of the light source and improve the imaging quality of the first image and the second image.

Referring to fig. 2, in some embodiments, a first angle 214 between an optical axis 213 of the first light source 210 and the vertical direction 110 and a second angle 232 between an optical axis 231 of the camera 230 and the vertical direction 110 are equal; the third angle 222 between the optical axis 221 of the second light source 220 and the vertical direction 110 is larger than the second angle 232.

Specifically, if the first included angle 214 between the optical axis 213 of the first light source 210 and the vertical direction 110 is set to be 10 °, the included angle between the optical axis of the second light source 220 and the vertical direction 110 is set to be 10 °, i.e. the first included angle 214 of the first light source 210 is equal to the second included angle 232 of the second light source 230, and the third included angle 222 between the optical axis 221 of the second light source 220 and the vertical direction 110 is set to be 45 °, i.e. the third included angle 222 of the second light source 220 is larger than the second included angle 232 of the second light source 230. It should be noted that, the first included angle 214 of the first light source 210 may be between 10 ° and 30 °, the third included angle 222 of the second light source 220 may be between 45 ° and 60 °, and the shooting distance between the center of the light emitting surface of the first light source 210 and the camera 230 is within the range of 65±10 millimeters (mm), when the shooting position distance between the center of the light emitting surface of the second light source 220 and the camera 230 is within the range of 110±10mm, the detected image of the workpiece 100 acquired by the camera 230 is the clearest, that is, the defect of the workpiece 100 detected according to the detected image is more accurate. It can be understood that the first light source 210 adopts an equiangular lighting mode, and the second light source 220 adopts a non-equiangular lighting mode. Thus, the defect of the device under test 100 can be better presented in the image under test.

Referring to fig. 2 and 7, in some embodiments, the part under test 100 includes a plurality of parts under test 120, step 012: collecting a detection image of the part 100 to be detected, including:

step 0124: the camera 230 is controlled to expose according to the third control signal to alternately receive the light reflected by the portion under test 120 from the first light source 210 and the light reflected by the second light source 220, so as to generate a third image and a fourth image of the portion under test 120, respectively.

The portion 120 refers to a portion of the part 100 to be tested, and the part 100 may include a plurality of portions 120 to be tested.

Specifically, the camera 230 is taken as an example of a line scan camera at this time. The exposure time of the line scan camera may be controlled according to the transmitted third control signal, so that the line scan camera alternately receives the light of the first light source 210 reflected by the surface of the portion to be measured 120 and the light of the second light source 220 reflected by the surface of the device to be measured 100, and generates the third image of the portion to be measured 120 and the fourth image of the portion to be measured 120 according to the reflected light of the first light source 210 and the reflected light of the second light source 220.

Step 0125: the part under test 100 is controlled to move relative to the camera 230 to acquire a third image and a fourth image of each part under test 120.

Specifically, the wire sweep camera is enabled to acquire the third image and the fourth image of each part 120 under test of the part 100 under test by controlling the movement of the part 100 under test relative to the wire sweep camera. The control of the movement of the workpiece 100 relative to the line scan camera may be: controlling the movement of the workpiece 100 to be measured; it is also possible that: a movable platform may be provided, on which the first light source 210, the second light source 220, and the camera 230 are fixedly disposed, and the part under test 100 is not moved at this time, and the movable platform is controlled to move relative to the part under test 100, so that the part under test 100 moves relative to the camera 230, thereby acquiring the third image and the fourth image of each part under test 120 of the part under test 100.

Step 0126: the first image is generated from the plurality of third images.

Specifically, based on the acquired third images of the plurality of parts under test 120, a first image of the part under test 100 is generated. If the workpiece 100 is divided into 3 portions 120 to be measured, namely, a portion A1 to be measured, a portion A2 to be measured and a portion A3 to be measured, at this time, a line scanning camera is used to obtain a third image A1 corresponding to the portion A1 to be measured, a third image A2 corresponding to the portion A2 to be measured and a third image A3 corresponding to the portion A3 to be measured. At this time, a first image of the part under test 100 may be generated based on the third image a1, the third image a2, and the third image a3. Such as stitching the third image a1, the third image a2, and the third image a3 to generate a first image of the part under test 100.

Step 0127: a second image is generated from the plurality of fourth images.

Specifically, based on the acquired fourth images of the plurality of parts under test 120, a second image of the part under test 100 is generated. If the workpiece 100 is divided into 3 portions 120 to be measured, namely, a portion B1 to be measured, a portion B2 to be measured and a portion B3 to be measured, at this time, a fourth image B1 corresponding to the portion B1 to be measured, a fourth image B2 corresponding to the portion B2 to be measured and a fourth image B3 corresponding to the portion B3 to be measured are obtained by a line scanning camera. At this time, a second image of the part 100 to be measured may be generated based on the fourth image b1, the fourth image b2, and the fourth image b3. Such as stitching the fourth image b1, the fourth image b2, and the fourth image b3 to generate a second image of the part under test 100.

In this manner, by dividing the part under test 100 into the plurality of parts under test 120, and receiving the light of the first light source 210 and the second light reflected by the second light source 220 reflected by each part under test 120 by the line scan camera 230, the third image and the fourth image of the part under test 120 are generated, respectively, and the first image and the second image of the part under test 100 are generated based on the acquired plurality of third images and the plurality of fourth images, respectively, so that the image of the entire area of the part under test 100 can be completely acquired.

Referring to fig. 8, in some embodiments, the defects include a first defect, step 013: detecting defects of the inspection image to output defect information, comprising:

step 0131: a first defect of the first image and the second image is detected.

The first defect may include a bump defect, a pit defect, and a scratch defect.

Specifically, in the case where the camera 230 collects the first image and the second image of the part under test 100, the first defect of the part under test 100 is detected according to the first image and the second image.

Step 0132: and determining the first defects with the same defect information in the first image and the second image as target defects.

Specifically, when the first image and the second image are detected, the first defect in which the defect information is the same in the first image and the second image is determined as the same first defect, and is taken as the target defect. The first defects as detected at the time of detecting the first image are the first defect C1 and the first defect C2, respectively; the first defects detected when the second image is detected are the first defect D1 and the first defect D2, respectively. If the defect information of the first defect C1 is the same as the defect information of the first defect D1, the first defect C1 and the first defect D1 are determined to be the same first defect, i.e., the first defect C1 or the first defect D1 is determined to be the target defect. It can be understood that the first defect having the same defect information in different images is the same defect of the dut 100.

Step 0133: and outputting defect information of the target defect.

The defect information may be a bump defect of the to-be-measured device 100, a pit defect of the to-be-measured device 100, or a scratch defect of the to-be-measured device 100.

Specifically, defect information of the target defect is output according to the determined target defect. If it is determined that the first defect E1 in the first image and the first defect F1 in the second image are the same first defect as the defect information, that is, the target defect is determined, at this time, the defect information of the first defect E1 or the first defect F1 is output as the defect information of the output target defect. Therefore, the first defects with the same defect information in the first image and the second image are determined by combining the acquired first image and the acquired second image during detection, so that the detected defects are more accurate, and the condition of false detection is avoided.

Referring to fig. 9, in certain embodiments, step 013: detecting defects of the inspection image to output defect information, comprising:

step 0134: outputting the defect information of the target defect and the first defect outside the target defect.

The defect information of the first defect except the target defect refers to the first defect with different defect information in the first image and the second image when the first image and the second image are detected.

Specifically, defect information of a first defect other than the target defect in the first image and the second image is output while defect information of the target defect is output. The first defects as detected at the time of detecting the first image are the first defect G1, the first defect G2, and the first defect G3, respectively. The first defects detected at the time of detecting the second image are the first defect H1 and the first defect H2, respectively. The first defect G2 in the first image and the first defect H2 in the second image are identical in defect information, and are determined to be target defects. And determining the first defect G1, the first defect G3 and the first defect H1 as first defects except the target defect if the defect information of the first defect G1, the first defect G3 and the first defect H1 is different, and outputting the defect information of the target defect and the first defects except the target defect after determining the target defect and the first defects except the target defect. By outputting the information of the target defect and outputting the defect information of the first defect except the target defect in the first image and the second image, the recall ratio in detecting the defect of the to-be-detected piece 100 can be ensured, and the defect omission condition can not occur.

Referring to fig. 10, in some embodiments, the detection method further includes:

step 017: the third light source 240 is controlled to irradiate the back surface of the workpiece 100, the first light source 210 and the second light source 220 irradiate the front surface of the workpiece 100, and the field of view of the third light source 240 coincides with the back surface of the workpiece 100.

The front surface of the workpiece 100 refers to the surface irradiated by the first light source 210 and the second light source 220, and the back surface of the workpiece 100 is opposite to the front surface of the workpiece 100.

Specifically, the first light source 210 and the second light source 220 are disposed on the front surface of the dut 100, and the third light source 240 is disposed on the back surface of the dut 100. When it is required to detect a defect of the dut 100, the first light source 210 and the second light source 220 are controlled to illuminate the front surface of the dut 100, and the third light source 240 is controlled to illuminate the back surface of the dut 100. Further, when the third light source 240 is disposed on the back surface of the dut 100, the field of view of the third light source 240 needs to coincide with the back surface of the dut 100. In one embodiment, as shown in fig. 2, the optical axis 241 of the third light source 240 is perpendicular to the back surface of the part under test 100, and the third light source coincides with the back surface of one part under test. Therefore, the detection of the edge defect can be accurately realized.

Referring to fig. 11, in some embodiments, the defect includes a second defect, step 013: detecting defects of the inspection image to output defect information, comprising:

step 0135: and detecting the overexposed region in the detected image as a second defect and outputting defect information.

The overexposure area refers to an area in which the pixel value in the detected image is larger than a preset value; the second defect may be a defect of the test piece 100.

Specifically, in the case where the detection image of the device under test 100 is acquired, the overexposed region in the detection image of the device under test 100 is detected to take the overexposed region in the detection image as the second defect, and defect information of the second defect is output. It can be understood that the overexposure region in the detected image is caused by the fact that when the third light source 240 irradiates the back surface of the workpiece 100, the edge of the workpiece 100 is cut, so that the light of the third light source 240 directly enters the camera 230, and the overexposure region appears in the detected image collected by the camera 230. In this way, by adding the third light source 240 while setting the first light source 210 and the second light source 220, the first defect of the workpiece 100 can be detected, and the second defect of the workpiece 100 can be detected, so that the defect of the workpiece 100 can be detected more comprehensively, and the unqualified workpiece 100 can be prevented from flowing into the market.

Referring to fig. 12, in some embodiments, the defect information includes a location, a type, and a size of the defect, and the detecting method further includes:

step 018: and sending out prompt information or stopping detection under the condition that the total area of all defects is larger than the preset area, or the number of all defects reaches the preset number, or the second defects exist.

Specifically, when the total area of all the detected defects is close to the preset area or the number of all the defects is close to the preset number, a prompt message is sent out, so that a worker can timely grasp the detection condition of the workpiece 100 to be detected. When the total area of all the detected defects is larger than the preset area, or the number of all the defects is larger than the preset number, or the second defect exists in the to-be-detected piece 100, the detection is automatically stopped. It should be noted that the prompt information may include the location of the defect, the type of the defect (the type of the defect may be pit defect, or bump defect), and the size of the defect.

The preset number and the preset number are experience values and are used for defining whether the to-be-detected piece is good or not. If the preset number is 15, 20, etc., the pieces to be tested 100 are of preset length (such as 3 meters, 4 meters, etc.), the number of defects in the detected pieces to be tested 3m is 13 at this time, that is, the detected number of defects is close to the preset number, no prompt message needs to be sent at this time, and the pieces to be tested 100 meet the standard of good products. For example, the preset area is 15 square centimeters, and the total area of all defects of the detected piece to be detected 100 is 18 square centimeters, that is, the total area of all defects of the detected piece to be detected 100 is larger than the preset area, and the piece to be detected 100 does not meet the standard of good products, and prompt information is sent or detection is stopped automatically.

Since the defect of the edge defect is serious, the to-be-tested piece 100 with the defect of the edge defect can be directly determined as a defective product. When the second defect (edge defect) of the to-be-detected piece 100 is detected, that is, the to-be-detected piece 100 has the edge defect, a prompt message is sent out or the detection is automatically stopped.

Referring to fig. 13, in order to better implement the detection method according to the embodiment of the present application, the embodiment of the present application further provides a detection device 10. The detection device 10 may include:

the first control module 11 is configured to control the first light source 210 to irradiate the workpiece 100 to be measured, the first light source 210 is a bright field light source, the light outlet 211 of the first light source 210 is provided with a light blocking piece 212, and the light blocking piece 212 is configured to block a part of the light outlet 211.

The acquisition module 12 is configured to acquire a detection image of the part 100 to be detected.

The collection module 12 is specifically further configured to receive light reflected by the part under test 100 from the first light source 210, so as to generate a first image; receiving light reflected by the workpiece 100 from the second light source 220 to generate a second image; controlling the exposure of the camera 230 according to the third control signal to alternately receive the light reflected by the first light source 210 and the light reflected by the second light source 220 by the workpiece 100 to generate a first image and a second image respectively; controlling the exposure of the camera 230 according to the third control signal to alternately receive the light reflected by the portion to be measured 120 by the first light source 210 and the light reflected by the second light source 220, so as to generate a third image and a fourth image of the portion to be measured 120 respectively; controlling the part under test 100 to move relative to the camera 230 to acquire a third image and a fourth image of each part under test 120; generating a first image from the plurality of third images; generating a second image from the plurality of fourth images;

and a detection module 13 for detecting a defect of the detected image to output defect information.

The detection module 13 is specifically further configured to detect a first defect of the first image and the second image; determining a first defect with the same defect information in the first image and the second image as a target defect; outputting defect information of the target defect; outputting defect information of the target defect and the first defect except the target defect; and detecting the overexposed region in the detected image as a second defect and outputting defect information.

The detection device 10 may further include:

the second control module 14 is configured to control the second light source 220 to illuminate the workpiece 100, where the second light source 220 is a dark field light source.

The third control module 15 is configured to control the first light source 210 to emit light according to the first control signal.

The fourth control module 16 is configured to control the second light source 220 to emit light according to the second control signal, so that the first light source 210 and the second light source 220 emit light alternately.

The fifth control module 17 is configured to control the third light source 240 to illuminate the back surface of the workpiece 100, the first light source 210 and the second light source 220 illuminate the front surface of the workpiece 100, and the field of view of the third light source 240 coincides with the back surface of the workpiece 100.

And an issuing module 18, configured to issue a prompt message or stop detection when the total area of all defects is greater than the preset area, or the number of all defects reaches the preset number, or a second defect exists.

Referring again to fig. 2, the detection system 200 of the embodiment of the present application includes a first light source 210, a camera 230, and a processor 250. The first light source 210 is used for irradiating the to-be-measured piece 100, the first light source 210 is a bright field light source, the light outlet 211 of the first light source 210 is provided with a light blocking piece 212, and the light blocking piece 212 is used for blocking a part of the light outlet 211; the camera 230 is used for collecting a detection image of the part 100 to be detected; the processor 250 is used for detecting defects of the inspection image to output defect information.

In certain embodiments, the detection system 200 further comprises a second light source 220. The second light source 220 is used for illuminating the to-be-measured piece 100, and the second light source 220 is a dark field light source; the camera 230 is further configured to receive light reflected by the dut 100 from the first light source 210 to generate a first image; and receiving the light reflected by the test piece 100 from the second light source 220 to generate a second image.

In certain embodiments, the detection system 200 further comprises a third light source 240. The third light source 240 is used for illuminating the back surface of the workpiece 100, the first light source 210 and the second light source 220 illuminate the front surface of the workpiece 100, and the field of view of the third light source 240 coincides with the back surface of the workpiece 100.

Optionally, the processor 250 may be further configured to perform the detection method of any of the above embodiments, which is not described herein for brevity.

Referring to fig. 14, the embodiment of the present application further provides a non-volatile computer readable storage medium 300, on which a computer program 310 is stored, where the computer program 310, when executed by the processor 250, implements the steps of the detection method of any of the foregoing embodiments, which is not described herein for brevity.

In the description of the present specification, reference to the terms "certain embodiments," "in one example," "illustratively," and the like, means that a particular feature, structure, material, or characteristic described in connection with the embodiments or examples is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.

Any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more executable instructions for implementing specific logical functions or steps of the process, and further implementations are included within the scope of the preferred embodiment of the present application in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the embodiments of the present application.

While embodiments of the present application have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the present application, and that variations, modifications, alternatives, and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the present application.

Claims

1. A method of detection comprising:

controlling a first light source to irradiate a piece to be detected, wherein the first light source is a bright field light source, a light outlet of the first light source is provided with a light blocking sheet, and the light blocking sheet is used for blocking part of the light outlet;

collecting a detection image of the piece to be detected; a kind of electronic device with high-pressure air-conditioning system

And detecting defects of the detection image to output defect information.

2. The method of detecting according to claim 1, further comprising:

controlling a second light source to irradiate the piece to be detected, wherein the second light source is a dark field light source;

the detection image comprises a first image and a second image, and the acquisition of the detection image of the to-be-detected piece comprises the following steps:

receiving the light reflected by the to-be-detected piece from the first light source to generate the first image; a kind of electronic device with high-pressure air-conditioning system

And receiving the light rays of the second light source reflected by the to-be-detected piece so as to generate the second image.

3. The method of detection according to claim 2, wherein the method of detection further comprises:

controlling the first light source to emit light according to a first control signal;

controlling the second light source to emit light according to a second control signal so that the first light source and the second light source emit light alternately;

the collecting the detection image of the to-be-detected piece comprises the following steps:

and controlling the camera exposure according to a third control signal so as to alternately receive the light reflected by the to-be-detected piece by the first light source and the light reflected by the second light source, so as to respectively generate the first image and the second image.

4. The method according to claim 3, wherein a first angle between an optical axis of the first light source and a vertical direction is equal to a second angle between an optical axis of the camera and the vertical direction; and a third included angle between the optical axis of the second light source and the vertical direction is larger than the second included angle.

5. The inspection method of claim 3, wherein the part to be inspected includes a plurality of parts to be inspected, and the acquiring the inspection image of the part to be inspected includes:

controlling the exposure of the camera according to the third control signal so as to alternately receive the light reflected by the to-be-detected part by the first light source and the light reflected by the second light source, and respectively generating a third image and a fourth image of the to-be-detected part;

controlling the to-be-measured piece to move relative to the camera so as to acquire the third image and the fourth image of each to-be-measured part;

generating the first image from a plurality of the third images; a kind of electronic device with high-pressure air-conditioning system

The second image is generated according to a plurality of the fourth images.

6. The method according to claim 2, wherein the defect includes a first defect, the detecting the defect of the detection image to output defect information, comprising:

detecting the first defect of the first image and the second image;

determining the first defects with the same defect information in the first image and the second image as target defects;

outputting defect information of the target defect; or alternatively, the process may be performed,

and outputting defect information of the target defect and the first defect except the target defect.

7. The method of detecting according to claim 2, further comprising:

and controlling a third light source to irradiate the back surface of the to-be-detected piece, wherein the first light source and the second light source irradiate the front surface of the to-be-detected piece, and the field of view range of the third light source coincides with the back surface of the to-be-detected piece.

8. The method according to claim 7, wherein the defect includes a second defect, the detecting the defect of the detection image to output defect information, comprising:

and detecting an overexposed region in the detection image to serve as the second defect, and outputting defect information.

9. The inspection method of claim 8, wherein the defect information includes a location, a type, and a size of the defect, the inspection method further comprising:

and sending out prompt information or stopping detection under the condition that the total area of all the defects is larger than a preset area, or the number of all the defects reaches a preset number, or the second defects exist.

10. A detection apparatus, characterized by comprising:

the first control module is used for controlling a first light source to irradiate the piece to be detected, the first light source is a bright field light source, a light outlet of the first light source is provided with a light blocking sheet, and the light blocking sheet is used for blocking a part of the light outlet;

the acquisition module is used for acquiring detection images of the to-be-detected piece; a kind of electronic device with high-pressure air-conditioning system

And the detection module is used for detecting the defects of the detection image so as to output defect information.

11. The detection system is characterized by comprising a first light source, a camera and a processor, wherein the first light source is used for irradiating a piece to be detected, the first light source is a bright field light source, a light outlet of the first light source is provided with a light blocking sheet, and the light blocking sheet is used for blocking part of the light outlet; the camera is used for collecting detection images of the to-be-detected piece; the processor is used for detecting the defect of the detection image so as to output defect information.

12. The inspection system of claim 11 further comprising a second light source for illuminating the part under test, the second light source being a dark field light source; the camera is also used for receiving the light rays of the first light source reflected by the to-be-detected piece so as to generate a first image; and receiving the light reflected by the to-be-detected piece from the second light source so as to generate a second image.

13. The inspection system of claim 12 further comprising a third light source for illuminating the back side of the part under inspection, the first and second light sources illuminating the front side of the part under inspection, the third light source having a field of view that coincides with the back side of the part under inspection.

14. A non-transitory computer readable storage medium containing a computer program which, when executed by a processor, causes the processor to perform the detection method of any of claims 1-9.