CN116065228B - Device for preventing crystal bar from shaking - Google Patents
Device for preventing crystal bar from shaking Download PDFInfo
- Publication number
- CN116065228B CN116065228B CN202211734922.6A CN202211734922A CN116065228B CN 116065228 B CN116065228 B CN 116065228B CN 202211734922 A CN202211734922 A CN 202211734922A CN 116065228 B CN116065228 B CN 116065228B
- Authority
- CN
- China
- Prior art keywords
- bar
- crystal
- crystal bar
- horizontal pole
- heat shield
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000013078 crystal Substances 0.000 title claims abstract description 66
- 238000001816 cooling Methods 0.000 claims abstract description 19
- 230000002265 prevention Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 19
- 239000004568 cement Substances 0.000 abstract description 5
- NMFHJNAPXOMSRX-PUPDPRJKSA-N [(1r)-3-(3,4-dimethoxyphenyl)-1-[3-(2-morpholin-4-ylethoxy)phenyl]propyl] (2s)-1-[(2s)-2-(3,4,5-trimethoxyphenyl)butanoyl]piperidine-2-carboxylate Chemical compound C([C@@H](OC(=O)[C@@H]1CCCCN1C(=O)[C@@H](CC)C=1C=C(OC)C(OC)=C(OC)C=1)C=1C=C(OCCN2CCOCC2)C=CC=1)CC1=CC=C(OC)C(OC)=C1 NMFHJNAPXOMSRX-PUPDPRJKSA-N 0.000 description 10
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides a device for preventing crystal bars from shaking, which comprises three cross bars, wherein bolt holes are formed in two sides of each cross bar, two adjacent cross bars are connected through the bolt holes through extension springs, two ends of each cross bar are evenly distributed and positioned on the inner wall of a water-cooling heat shield through a position adjusting device, strip-shaped open holes are formed in the cross bars, and sliding wheel sets are arranged in the strip-shaped open holes; the cross rod, the extension spring and the sliding wheel set are mutually matched, so that the crystal bar is supported in an auxiliary mode while rotation and lifting of the production link of the crystal bar are not affected, the crystal bar is prevented from shaking (arcing) in the whole production link, the technical problem that the crystal bar cannot be produced normally due to shaking caused by factors such as vibration sources, cement base settlement of a single crystal furnace table, airflow vortex in the single crystal furnace and the like in the environment is effectively solved, and the production efficiency and the production quality of the crystal bar are improved.
Description
Technical Field
The invention relates to the technical field of pulling single crystals by light Fu Zhi, in particular to a device for preventing crystal bars from shaking.
Background
In the single crystal silicon rod drawing link, vibration (arcing) of the produced (drawn) crystal rod is caused by factors such as vibration sources, cement base settlement of a single crystal furnace table, airflow vortex in the single crystal furnace and the like in the environment, the normal production is easily disabled due to the arcing of the crystal rod, and the vacuum high-temperature environment in the furnace in the crystal rod production link cannot be assisted by external force to enable the crystal rod to stop swinging.
Disclosure of Invention
In order to solve the technical problem of shaking (arcing) in the production link of the crystal bar, the invention provides a device for preventing the crystal bar from shaking, which comprises the following specific technical scheme: the utility model provides a device that prevention crystal bar rocked, includes three horizontal poles, the horizontal pole both sides are equipped with the bolt hole, pass the bolt hole through extension spring between two adjacent horizontal poles and connect, the both ends of horizontal pole pass through position control device evenly distributed location on the water-cooling heat shield inner wall, be equipped with the bar trompil on the horizontal pole, be equipped with the slip wheelset in the bar trompil.
Preferably, the three cross bars are arranged at the same height.
Preferably, the cross bar is trapezoidal, the horizontal plane of the cross bar is positioned on the upper side, the inclined plane is positioned on the lower side, and the strip-shaped opening is parallel to the inclined plane in the length direction.
Further, the included angle between the horizontal plane on the upper side of the cross rod and the lower side inclined plane is 7 degrees.
Preferably, the position adjusting device comprises a telescopic positioning mechanism and a positioning block, and the telescopic positioning mechanism is arranged at the end part of the cross rod and is fixedly connected with the positioning block.
Further, the positioning block is of a triangular block structure.
Furthermore, one edge of the positioning block is in contact connection with the inner wall of the water-cooling heat shield.
Preferably, the water-cooling heat shield is of a cone-shaped structure with a large opening at the upper end and a small opening at the lower end.
Preferably, the tension spring is in a compressed state when the cross bar is positioned in the water-cooled heat shield.
The invention has the beneficial effects that:
according to the invention, the cross rod, the extension spring and the sliding wheel set are matched with each other, so that the crystal bar is supported in an auxiliary manner while rotation and lifting of the production link of the crystal bar are not affected, the crystal bar is prevented from shaking (arcing) in the whole production link, the technical problem that the crystal bar cannot be produced normally due to shaking caused by factors such as vibration sources, cement base settlement of a single crystal furnace table, airflow vortex in the single crystal furnace and the like in the environment in the production process of the crystal bar is effectively solved, and the production efficiency and the production quality of the crystal bar are improved.
Drawings
FIG. 1 is a top view of an apparatus for preventing crystal boules according to the present invention.
Fig. 2 is a front view of the water-cooled heat shield according to the present invention.
Fig. 3 is a side view of the cross bar of the present invention.
In the figure: 1. a water-cooling heat shield; 2. a cross bar; 3. a positioning block; 4. a tension spring; 5. a sliding wheel set; 6. bolt holes.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be connected, detachably connected, or adult, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements.
The apparatus for preventing crystal rod wobble disclosed in the present invention will be briefly described with reference to fig. 1 to 3,
specifically as shown in fig. 1 and fig. 2, a device for preventing crystal bar from shaking comprises three cross bars 2 positioned at the same height, bolt holes 6 are formed in two sides of each cross bar, two adjacent cross bars 2 are connected through the corresponding bolt holes 6 through extension springs 4, two ends of each cross bar 2 are evenly distributed and positioned on the inner wall of a water-cooling heat shield 1 through a position adjusting device, and the head and the tail of each cross bar 2 are connected through the corresponding extension spring 4 and used for limiting the position of a stretched crystal bar. The cross bar is provided with a bar-shaped opening, and a sliding wheel set 5 is arranged in the bar-shaped opening.
The cross bar 5 is trapezoidal, the horizontal plane of the cross bar is positioned on the upper side, the inclined plane is positioned on the lower side, and the strip-shaped open hole is parallel to the inclined plane in the length direction. The included angle between the horizontal plane on the upper side of the cross rod 5 and the lower inclined angle is 7 degrees. The setting of inclination to the rotatory promotion of adaptation crystal bar, when carrying out the tensile promotion of crystal bar, slip wheelset 5 cooperation crystal bar is rotatory promotes, in order to reduce frictional resistance and to the damage on crystal bar surface.
The position adjusting device comprises a telescopic positioning mechanism and a positioning block 6 with a triangular block structure, and the telescopic positioning mechanism is arranged at the end part of the cross rod 5 and is fixedly connected with the positioning block 6. The telescopic positioning mechanism can stretch and retract relative to the cross rod 2 and limit the position, and one edge of the positioning block 3 is in contact connection with the inner wall of the water-cooling heat shield 1. The single side of the positioning block 3 is abutted with the inner wall of the water-cooling heat shield 1, so that the positioning is more firm. When the cross rod 2 is positioned in the water-cooling heat shield 1, the extension spring 4 is in a compressed state, so that the end part of the cross rod 2 can always receive outward thrust, and then the positioning block is continuously abutted on the inner wall of the water-cooling heat shield 1.
The water-cooling heat shield 1 is of a cone-shaped structure with a large upper end opening and a small lower end opening, and the bottom opening of the water-cooling heat shield can be arranged according to the size of a crystal bar or be additionally provided with accessories meeting the requirements. The position of horizontal pole 2 and water-cooling heat shield 1 inner wall can use position control device to adjust, but locating piece 3 can remove according to scalable positioning mechanism promptly, when the crystal bar size of pulling up is great, scalable positioning mechanism outwards removes, make horizontal pole 2 location in the higher position of water-cooling heat shield 1 inner wall, when the crystal bar size of pulling up is less, scalable positioning mechanism inwards removes, make horizontal pole 2 location in the lower position of water-cooling heat shield 1 inner wall, ensure that the crystal bar of pulling up can hug closely slip wheelset 5 setting, and then realize avoiding leading to the condition that the crystal bar rocks (the arc of drawing) because of factors such as the environment exists the focus, single crystal furnace platform cement base subsides, the air current vortex in the single crystal furnace produces, in order to improve product quality.
Working principle: before the crystal bar is pulled, the production condition of pulling the crystal bar and the diameter of the produced crystal bar are determined, the position adjusting device 3 is arranged on the inner side of the water-cooling heat shield 1 to adapt to the determined crystal bar diameter, in the crystal bar pulling production process, the crystal bar is pulled and lifted while rotating anticlockwise, the crystal bar is contacted with the sliding wheel set 5, the position of the crystal bar is limited by the sliding wheel set 5 in three directions, the crystal bar drives the sliding wheel set 5 to rotate anticlockwise, the anticlockwise rotation of the crystal bar is not influenced while the position is limited, the sliding wheel set 5 and the upper edge line of the side face of the cross bar 2 form an included angle of 7 degrees, and the friction force born in the crystal bar lifting process is reduced.
According to the invention, the cross rod 2, the extension spring 4 and the sliding wheel set 5 are matched with each other, so that the crystal bar is supported in an auxiliary manner while the rotation and lifting of the production link of the crystal bar are not affected, the crystal bar is prevented from shaking (arcing) in the whole production link, the technical problem that the crystal bar cannot be produced normally due to shaking caused by factors such as vibration sources, cement base settlement of a single crystal furnace table, airflow vortex in the single crystal furnace and the like in the environment in the production process of the crystal bar is effectively solved, and the production efficiency and the production quality of the crystal bar are improved.
The foregoing description of the preferred embodiments of the invention has been presented for purposes of illustration and description, but is not to be construed as limiting the scope of the invention, it being understood that various modifications and changes may be made therein without departing from the spirit of the invention.
Claims (3)
1. The utility model provides a device that prevention crystal bar rocked, its characterized in that includes three horizontal pole, three the horizontal pole sets up at same height, the horizontal pole is trapezoidal, and its horizontal plane is located the upside, and the inclined plane is located the downside, the horizontal pole both sides are equipped with the bolt hole, pass the bolt hole through extension spring between two adjacent horizontal poles and connect, the both ends of horizontal pole pass through position control device evenly distributed location on the water-cooling heat shield inner wall, extension spring is in compressed state, position control device includes scalable positioning mechanism and locating piece, scalable positioning mechanism installs the tip at the horizontal pole to with locating piece fixed connection, the locating piece is triangle-shaped massive structure, a arris and the water-cooling heat shield inner wall contact of locating piece are connected, be equipped with the bar trompil on the horizontal pole, be equipped with the slip wheelset in the bar trompil, the bar trompil is parallel with the inclined plane on length direction.
2. The apparatus for preventing crystal rod sway according to claim 1, characterized in that the angle between the horizontal plane of the upper side of the cross rod and the lower side inclined is 7 °.
3. The apparatus for preventing crystal rod sway according to claim 1, characterized in that the water-cooling heat shield is of a conical barrel structure with a large upper end opening and a small lower end opening.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211734922.6A CN116065228B (en) | 2022-12-30 | 2022-12-30 | Device for preventing crystal bar from shaking |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211734922.6A CN116065228B (en) | 2022-12-30 | 2022-12-30 | Device for preventing crystal bar from shaking |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116065228A CN116065228A (en) | 2023-05-05 |
| CN116065228B true CN116065228B (en) | 2024-01-23 |
Family
ID=86171002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211734922.6A Active CN116065228B (en) | 2022-12-30 | 2022-12-30 | Device for preventing crystal bar from shaking |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116065228B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117144474A (en) * | 2023-08-31 | 2023-12-01 | 清电光伏科技有限公司 | Spacing subassembly and have its single crystal growing furnace |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5968267A (en) * | 1996-01-25 | 1999-10-19 | General Signal Technology Corporation | Antivibration support for Czochralski crystal growing systems |
| CN101560689A (en) * | 2009-05-27 | 2009-10-21 | 芜湖升阳光电科技有限公司 | CZ Czochralski method mono-crystal furnace |
| CN215517730U (en) * | 2021-06-28 | 2022-01-14 | 内蒙古华耀光电科技有限公司 | Rod falling prevention device for crystal pulling of single crystal furnace |
| CN217709754U (en) * | 2022-07-18 | 2022-11-01 | 包头美科硅能源有限公司 | Portable prevents that crystal bar from rocking and gets excellent auxiliary device |
-
2022
- 2022-12-30 CN CN202211734922.6A patent/CN116065228B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5968267A (en) * | 1996-01-25 | 1999-10-19 | General Signal Technology Corporation | Antivibration support for Czochralski crystal growing systems |
| CN101560689A (en) * | 2009-05-27 | 2009-10-21 | 芜湖升阳光电科技有限公司 | CZ Czochralski method mono-crystal furnace |
| CN215517730U (en) * | 2021-06-28 | 2022-01-14 | 内蒙古华耀光电科技有限公司 | Rod falling prevention device for crystal pulling of single crystal furnace |
| CN217709754U (en) * | 2022-07-18 | 2022-11-01 | 包头美科硅能源有限公司 | Portable prevents that crystal bar from rocking and gets excellent auxiliary device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116065228A (en) | 2023-05-05 |
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