CN116056263A - Heating and temperature measuring integrated non-magnetic electric heating plate processing method, electric heating plate and system - Google Patents
Heating and temperature measuring integrated non-magnetic electric heating plate processing method, electric heating plate and system Download PDFInfo
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 407
- 238000005485 electric heating Methods 0.000 title claims abstract description 41
- 238000003672 processing method Methods 0.000 title claims abstract description 20
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 17
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- 238000012545 processing Methods 0.000 claims description 13
- 239000004642 Polyimide Substances 0.000 claims description 9
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- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
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Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/58—Turn-sensitive devices without moving masses
- G01C19/60—Electronic or nuclear magnetic resonance gyrometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/14—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
- G01K7/183—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer characterised by the use of the resistive element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
- G01K7/20—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer in a specially-adapted circuit, e.g. bridge circuit
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/02—Details
- H05B3/06—Heater elements structurally combined with coupling elements or holders
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/16—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor the conductor being mounted on an insulating base
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/34—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater flexible, e.g. heating nets or webs
Abstract
The invention provides a processing method of a heating and temperature measuring integrated magneto-less heating plate, an electric heating plate and a system, comprising the following steps: depositing a first heating metal layer on a first surface of the flexible substrate, and depositing a second heating metal layer on a second surface of the flexible substrate; etching the first heating metal layer to form a first heating resistor layer and etching the second heating metal layer to form a second heating resistor layer respectively, wherein the energizing currents of the first heating resistor layer and the second heating resistor layer are opposite; depositing a temperature measuring metal layer on the first surface of the flexible substrate; etching the temperature-measuring metal layer to form a temperature-measuring resistor layer, wherein the first heating resistor layer is positioned at the periphery of the temperature-measuring resistor layer; and spin-coating a first insulating layer on the temperature measuring resistor layer and the first heating resistor layer, and spin-coating a second insulating layer on the second heating resistor layer. By applying the technical scheme of the invention, the technical problems that the mounting of an additional temperature sensor in the prior art can influence the ventilation path of the air chamber and interfere with the mounting of the optical element are solved.
Description
Technical Field
The invention relates to the technical field of nuclear magnetic resonance gyroscopes, in particular to a processing method of a heating and temperature measuring integrated magneto-less heating plate, an electric heating plate and a system.
Background
The non-magnetoelectric heating plate provides the required temperature for nuclear magnetic resonance gyro and atomic magnetometer air chambers, and the temperature of the air chambers is required to be monitored due to the heating of the ordinary air chambers, so that temperature sensors are required to be installed around the air chambers. While the installation of additional temperature sensors can affect the plenum light path and interfere with the installation of the optical components.
Disclosure of Invention
The invention provides a processing method of a heating and temperature measuring integrated magneto-less heating plate, an electric heating plate and a system, which can solve the technical problems that the installation of an additional temperature sensor in the prior art can influence the ventilation path of an air chamber and interfere with the installation of an optical element.
According to an aspect of the invention, there is provided a processing method of a heating and temperature measuring integrated magneto-less heating sheet, the processing method of the heating and temperature measuring integrated magneto-less heating sheet comprising: depositing a first heating metal layer on a first surface of the flexible substrate, and depositing a second heating metal layer on a second surface of the flexible substrate; etching the first heating metal layer according to a preset heating resistance value to form a first heating resistance layer and etching the second heating metal layer to form a second heating resistance layer, wherein the structures of the first heating resistance layer and the second heating resistance layer are the same and are symmetrically arranged relative to the flexible substrate, and the energizing currents of the first heating resistance layer and the second heating resistance layer are opposite; protecting the first heating resistor layer, and depositing a temperature measuring metal layer on the first surface of the flexible substrate; etching the temperature-measuring metal layer according to a preset temperature-measuring resistance value to form a temperature-measuring resistance layer, wherein the first heating resistance layer is positioned at the periphery of the temperature-measuring resistance layer; and spin-coating a first insulating layer on the temperature measuring resistor layer and the first heating resistor layer, and spin-coating a second insulating layer on the second heating resistor layer.
Further, the material of the temperature measuring resistor layer comprises PT platinum metal.
Further, the materials of the first heating resistor layer and the second heating resistor layer comprise gold, platinum, copper, aluminum or titanium.
Further, the flexible substrate comprises polyimide.
Further, the materials of the first insulating layer and the second insulating layer comprise polyimide or epoxy glue.
According to another aspect of the invention, a heating and temperature measuring integrated non-magnetic electric heating sheet is provided, and the heating and temperature measuring integrated non-magnetic electric heating sheet is processed by using the heating and temperature measuring integrated non-magnetic electric heating sheet processing method.
Further, the integrative no magnetoelectric heating plate of heating temperature measurement includes: a flexible substrate; the first heating resistor layer and the second heating resistor layer have the same structure, the first heating resistor layer is arranged on the first surface of the flexible substrate, the second heating resistor layer is arranged on the second surface of the flexible substrate, the first heating resistor layer and the second heating resistor layer are symmetrically arranged relative to the flexible substrate, and the energizing currents of the first heating resistor layer and the second heating resistor layer are opposite; the temperature measuring resistor layer is arranged on the first surface of the flexible substrate, and the first heating resistor layer is arranged on the periphery of the temperature measuring resistor layer; the first insulating layer and the second insulating layer, first insulating layer setting is on temperature measurement resistance layer and first heating resistance layer, and the second insulating layer setting is on the second heating resistance layer.
Further, the first heating resistance layer and the second heating resistance layer comprise a first heating resistance wire section and a second heating resistance wire section, the first heating resistance wire section and the second heating resistance wire section are symmetrically arranged relative to the central line of the heating and temperature measuring integrated magneto-free heating sheet, the first heating resistance wire section comprises a first lead bonding pad, a first vertical heating section, a first horizontal heating section, a second vertical heating section, a second horizontal heating section, a third vertical heating section, a third horizontal heating section, a fourth vertical heating section, a fourth horizontal heating section, a fifth vertical heating section and a fifth horizontal heating section which are sequentially connected, the first horizontal heating section, the second horizontal heating section, the third horizontal heating section, the fourth horizontal heating section and the fifth horizontal heating section are mutually parallel, and any horizontal heating section is vertically arranged with any vertical heating section; the second heating resistance wire section comprises a second lead bonding pad, a sixth vertical heating section, a sixth horizontal heating section, a seventh vertical heating section, a seventh horizontal heating section, an eighth vertical heating section, an eighth horizontal heating section, a ninth vertical heating section, a ninth horizontal heating section, a tenth vertical heating section and a tenth horizontal heating section which are sequentially connected, the sixth horizontal heating section, the seventh horizontal heating section, the eighth horizontal heating section, the ninth horizontal heating section and the tenth horizontal heating section are mutually parallel, any horizontal heating section is perpendicular to any vertical heating section, and the fifth horizontal heating section is connected with the tenth horizontal heating section.
Further, the temperature measuring resistance layer comprises a first temperature measuring resistance wire section and a second temperature measuring resistance wire section, the first temperature measuring resistance wire section and the second temperature measuring resistance wire section are symmetrically arranged relative to the central line of the heating and temperature measuring integrated magneto-electric heating sheet, the first temperature measuring resistance wire section comprises a third lead bonding pad, a first vertical temperature measuring section, a first horizontal temperature measuring section, a second vertical temperature measuring section, a second horizontal temperature measuring section, a third vertical temperature measuring section, a third horizontal temperature measuring section, a fourth vertical temperature measuring section, a fourth horizontal temperature measuring section, a fifth vertical temperature measuring section and a fifth horizontal temperature measuring section which are sequentially connected, the first horizontal temperature measuring section, the second horizontal temperature measuring section, the third horizontal temperature measuring section, the fourth horizontal temperature measuring section and the fifth horizontal temperature measuring section are mutually parallel, and any horizontal temperature measuring section is vertically arranged with any vertical temperature measuring section; the second temperature measuring resistance wire section comprises a fourth lead bonding pad, a sixth vertical temperature measuring section, a sixth horizontal temperature measuring section, a seventh vertical temperature measuring section, a seventh horizontal temperature measuring section, an eighth vertical temperature measuring section, an eighth horizontal temperature measuring section, a ninth vertical temperature measuring section, a ninth horizontal temperature measuring section, a tenth vertical temperature measuring section and a tenth horizontal temperature measuring section which are sequentially connected, the sixth horizontal temperature measuring section, the seventh horizontal temperature measuring section, the eighth horizontal temperature measuring section, the ninth horizontal temperature measuring section and the tenth horizontal temperature measuring section are mutually parallel, any one of the horizontal temperature measuring sections is perpendicular to any one of the vertical temperature measuring sections, and the fifth horizontal temperature measuring section is connected with the tenth horizontal temperature measuring section.
According to still another aspect of the present invention, there is provided a heating and temperature-measuring integrated non-magnetic electric heating system, including a heating and temperature-measuring integrated non-magnetic electric heating sheet and a processor, the processor is configured to calculate and obtain a temperature of an object to be measured according to a resistance value of a temperature-measuring resistance layer, and the heating and temperature-measuring integrated non-magnetic electric heating sheet is the heating and temperature-measuring integrated non-magnetic electric heating sheet as described above.
By applying the technical scheme of the invention, the invention provides a processing method of a heating and temperature measuring integrated non-magnetoelectric heating sheet, which realizes a non-magnetoelectric heating function by designing and processing a double-layer heating resistor layer, and the energizing currents of a first heating resistor layer 20 and a second heating resistor layer 30 are opposite, so that generated magnetic fields can be counteracted; and a temperature measuring resistance layer with a temperature measuring function is processed in the middle area of the non-magnetoelectric heating part, so that temperature measurement can be realized. Compared with the prior art, the method avoids the adoption of an additional temperature sensor for temperature measurement in the heating process of the air chamber, reduces the types of devices and the use surface of the air chamber, and reduces the risk of the bonding process; the heating resistance layer and the temperature measuring resistance layer are processed on the surface of the same substrate, and the volume of heating and temperature measuring of the air chamber is effectively reduced, so that the heating and temperature measuring integrated magneto-less heating sheet processing method provided by the invention can be used for heating the air chamber and monitoring the temperature of the air chamber, and does not influence the light-transmitting path of the air chamber and interfere with the installation of optical elements.
Drawings
The accompanying drawings, which are included to provide a further understanding of embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention. It is evident that the drawings in the following description are only some embodiments of the present invention and that other drawings may be obtained from these drawings without inventive effort for a person of ordinary skill in the art.
FIG. 1 shows a schematic structural diagram of a heating and temperature measuring integrated magneto-less heating plate provided according to an embodiment of the present invention;
FIG. 2 illustrates a cross-sectional view of a heating and temperature measuring integrated magneto-less heater chip provided in accordance with a specific embodiment of the invention;
fig. 3 is a schematic view showing the structure of a first (second) heating resistor layer provided according to an embodiment of the present invention;
fig. 4 shows a schematic structural diagram of a temperature measuring resistor layer according to an embodiment of the present invention.
Wherein the above figures include the following reference numerals:
10. a flexible substrate; 20. a first heating resistor layer; 21. a first heating resistance wire segment; 211. a first lead pad; 212. a first vertical heating section; 213. a first horizontal heating section; 214. a second vertical heating section; 215. a second horizontal heating section; 216. a third vertical heating section; 217. a third horizontal heating section; 218. a fourth vertical heating section; 219. a fourth horizontal heating section; 220. a fifth vertical heating section; 221. a fifth horizontal heating section; 31. a second heating resistance wire segment; 311. a second lead pad; 312. a sixth vertical heating section; 313. a sixth horizontal heating section; 314. a seventh vertical heating section; 315. a seventh horizontal heating section; 316. an eighth vertical heating section; 317. an eighth horizontal heating section; 318. a ninth vertical heating section; 319. a ninth horizontal heating section; 320. a tenth vertical heating section; 321. a tenth horizontal heating section; 30. a second heating resistor layer; 40. a temperature measuring resistor layer; 41. a first temperature measuring resistance wire section; 411. a third lead pad; 412. a first vertical temperature measurement section; 413. a first horizontal temperature measurement section; 414. a second vertical temperature measurement section; 415. a second horizontal temperature measuring section; 416. a third vertical temperature measurement section; 417. a third horizontal temperature measuring section; 418. a fourth vertical temperature measurement section; 419. a fourth horizontal temperature measuring section; 420. a fifth vertical temperature measurement section; 421. a fifth horizontal temperature measuring section; 51. a second temperature measuring resistance wire section; 511. a fourth lead pad; 512. a sixth vertical temperature measuring section; 513. a sixth horizontal temperature measuring section; 514. a seventh vertical temperature measurement section; 515. a seventh horizontal temperature measuring section; 516. an eighth vertical temperature measuring section; 517. an eighth horizontal temperature measuring section; 518. a ninth vertical temperature measurement section; 519. a ninth horizontal temperature measuring section; 520. a tenth vertical temperature measurement section; 521. a tenth horizontal temperature measuring section; 50. a first insulating layer; 60. and a second insulating layer.
Detailed Description
It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other. The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. The following description of at least one exemplary embodiment is merely exemplary in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
The relative arrangement of the components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless it is specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective parts shown in the drawings are not drawn in actual scale for convenience of description. Techniques, methods, and apparatus known to one of ordinary skill in the relevant art may not be discussed in detail, but should be considered part of the specification where appropriate. In all examples shown and discussed herein, any specific values should be construed as merely illustrative, and not a limitation. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further discussion thereof is necessary in subsequent figures.
As shown in fig. 1 to 4, according to an embodiment of the present invention, there is provided a heating and temperature measuring integrated magneto-less electric heating sheet processing method, including: depositing a first heated metal layer on a first surface of the flexible substrate 10 and depositing a second heated metal layer on a second surface of the flexible substrate 10; etching the first heating metal layer according to a preset heating resistance value to form a first heating resistance layer 20 and etching the second heating metal layer to form a second heating resistance layer 30, wherein the structures of the first heating resistance layer 20 and the second heating resistance layer 30 are the same and are symmetrically arranged relative to the flexible substrate 10, and the energizing currents of the first heating resistance layer 20 and the second heating resistance layer 30 are opposite; protecting the first heating resistor layer 20, and depositing a temperature measuring metal layer on the first surface of the flexible substrate 10; etching the temperature-measuring metal layer according to a preset temperature-measuring resistance value to form a temperature-measuring resistance layer 40, wherein the first heating resistance layer 20 is positioned at the periphery of the temperature-measuring resistance layer 40; a first insulating layer 50 is spin-coated on the temperature sensing resistive layer 40 and the first heating resistive layer 20, and a second insulating layer 60 is spin-coated on the second heating resistive layer 30.
By applying the configuration mode, the processing method of the heating and temperature measuring integrated non-magnetoelectric heating sheet is provided, and realizes the non-magnetoelectric heating function by designing and processing the double-layer heating resistor layer, and the energizing currents of the first heating resistor layer 20 and the second heating resistor layer 30 are opposite, so that the generated magnetic fields can be counteracted; and a temperature measuring resistance layer with a temperature measuring function is processed in the middle area of the non-magnetoelectric heating part, so that temperature measurement can be realized. Compared with the prior art, the method avoids the adoption of an additional temperature sensor for temperature measurement in the heating process of the air chamber, reduces the types of devices and the use surface of the air chamber, and reduces the risk of the bonding process; the heating resistance layer and the temperature measuring resistance layer are processed on the surface of the same substrate, and the volume of heating and temperature measuring of the air chamber is effectively reduced, so that the heating and temperature measuring integrated magneto-less heating sheet processing method provided by the invention can be used for heating the air chamber and monitoring the temperature of the air chamber, and does not influence the light-transmitting path of the air chamber and interfere with the installation of optical elements.
As an embodiment of the present invention, considering the temperature measurement accuracy and the difficulty of material acquisition, the material of the temperature measuring resistor layer 40 may be configured to include PT platinum metal.
Further, in order to implement the heat treatment of the atomic gas chamber, the materials of the first heating resistor layer 20 and the second heating resistor layer 30 may be configured to include gold, platinum, copper, aluminum, or titanium.
In the present invention, in order to avoid shorting between metals, the material of the flexible substrate 10 may be configured to include polyimide, and the materials of the first insulating layer 50 and the second insulating layer 60 may each include polyimide or epoxy.
According to another aspect of the present invention, there is provided a heating and temperature-measuring integrated non-magnetic electric heating sheet which is processed using the heating and temperature-measuring integrated non-magnetic electric heating sheet processing method as described above.
By applying the configuration mode, the heating and temperature measurement integrated magneto-free heating sheet is provided, the magneto-free heating sheet realizes the magneto-free heating function by designing and processing the double-layer heating resistor layers, and the energizing currents of the first heating resistor layer 20 and the second heating resistor layer 30 are opposite, so that the generated magnetic fields can be counteracted; and a temperature measuring resistance layer with a temperature measuring function is processed in the middle area of the non-magnetoelectric heating part, so that temperature measurement can be realized. Compared with the prior art, the method avoids the adoption of an additional temperature sensor for temperature measurement in the heating process of the air chamber, reduces the types of devices and the use surface of the air chamber, and reduces the risk of the bonding process; the heating resistance layer and the temperature measuring resistance layer are processed on the surface of the same substrate, so that the heating and temperature measuring volume of the air chamber is effectively reduced, and the heating and temperature measuring integrated magneto-less heating sheet provided by the invention can be used for heating the air chamber and monitoring the temperature of the air chamber.
Further, in the present invention, as shown in fig. 1 and 2, the heating and temperature measuring integrated magneto-less heating sheet includes a flexible substrate 10, a first heating resistor layer 20, a second heating resistor layer 30, a temperature measuring resistor layer 40, a first insulating layer 50 and a second insulating layer 60, the first heating resistor layer 20 and the second heating resistor layer 30 have the same structure, the first heating resistor layer 20 is disposed on a first surface of the flexible substrate 10, the second heating resistor layer 30 is disposed on a second surface of the flexible substrate 10, the first heating resistor layer 20 and the second heating resistor layer 30 are symmetrically disposed with respect to the flexible substrate 10, the energizing currents of the first heating resistor layer 20 and the second heating resistor layer 30 are opposite, the temperature measuring resistor layer 40 is disposed on a first surface of the flexible substrate 10, the first heating resistor layer 20 is disposed at a periphery of the temperature measuring resistor layer 40, the first insulating layer 50 is disposed on the temperature measuring resistor layer 40 and the first heating resistor layer 20, and the second insulating layer 60 is disposed on the second heating resistor layer 30.
Under this configuration mode, the heating resistor is formed by processing upper and lower layers of metal, and the positions of the upper and lower layers of metal wire patterns are kept consistent, and the directions of the two layers of current are opposite when the current is applied, so that the generated magnetic fields are cancelled. The temperature measuring resistor is formed by processing a layer of PT metal, and the heating resistor layer is positioned around the temperature measuring resistor layer, so that the accuracy of the temperature measuring resistor on the temperature measurement of the air chamber is ensured.
In the present invention, in order to further eliminate the magnetic field generated by the heating resistor, the first heating resistor layer 20 and the second heating resistor layer 30 may be configured to include a first heating resistor wire segment 21 and a second heating resistor wire segment 31, where the first heating resistor wire segment 21 and the second heating resistor wire segment 31 are symmetrically disposed with respect to the central line of the heating temperature measurement integrated magneto-less electric heating sheet, the first heating resistor wire segment 21 includes a first lead pad 211, a first vertical heating segment 212, a first horizontal heating segment 213, a second vertical heating segment 214, a second horizontal heating segment 215, a third vertical heating segment 216, a third horizontal heating segment 217, a fourth vertical heating segment 218, a fourth horizontal heating segment 219, a fifth vertical heating segment 220 and a fifth horizontal heating segment 221, which are sequentially connected, and the first horizontal heating segment 213, the second horizontal heating segment 215, the third horizontal heating segment 217, the fourth horizontal heating segment 219 and the fifth horizontal heating segment 221 are disposed in parallel with each other, and any one of the horizontal heating segments is disposed vertically to any one of the vertical heating segments; the second heating resistance wire section 31 includes a second lead pad 311, a sixth vertical heating section 312, a sixth horizontal heating section 313, a seventh vertical heating section 314, a seventh horizontal heating section 315, an eighth vertical heating section 316, an eighth horizontal heating section 317, a ninth vertical heating section 318, a ninth horizontal heating section 319, a tenth vertical heating section 320, and a tenth horizontal heating section 321, which are sequentially connected, the sixth horizontal heating section 313, the seventh horizontal heating section 315, the eighth horizontal heating section 317, the ninth horizontal heating section 319, and the tenth horizontal heating section 321 are disposed parallel to each other, any one of the horizontal heating sections is disposed vertically to any one of the vertical heating sections, and the fifth horizontal heating section 221 is connected to the tenth horizontal heating section 321. As other embodiments of the present invention, the first heating resistor layer 20 and the second heating resistor layer 30 may take other forms, and may be selected according to practical situations.
In the present invention, in order to further eliminate the magnetic field generated by the temperature measuring resistor, the temperature measuring resistor layer 40 may be configured to include a first temperature measuring resistor wire section 41 and a second temperature measuring resistor wire section 51, where the first temperature measuring resistor wire section 41 and the second temperature measuring resistor wire section 51 are symmetrically disposed with respect to the central line of the heating and temperature measuring integrated magneto-less electric heating sheet, the first temperature measuring resistor wire section 41 includes a third lead pad 411, a first vertical temperature measuring section 412, a first horizontal temperature measuring section 413, a second vertical temperature measuring section 414, a second horizontal temperature measuring section 415, a third vertical temperature measuring section 416, a third horizontal temperature measuring section 417, a fourth vertical temperature measuring section 418, a fourth horizontal temperature measuring section 419, a fifth vertical temperature measuring section 420 and a fifth horizontal temperature measuring section 421, where the first horizontal temperature measuring section 413, the second horizontal temperature measuring section 415, the third horizontal temperature measuring section 417, the fourth horizontal temperature measuring section 419 and the fifth horizontal temperature measuring section 421 are sequentially connected, and any one of the horizontal temperature measuring sections is vertically disposed with any one of the vertical temperature measuring sections; the second temperature measuring resistance wire section 51 includes a fourth lead pad 511, a sixth vertical temperature measuring section 512, a sixth horizontal temperature measuring section 513, a seventh vertical temperature measuring section 514, a seventh horizontal temperature measuring section 515, an eighth vertical temperature measuring section 516, an eighth horizontal temperature measuring section 517, a ninth vertical temperature measuring section 518, a ninth horizontal temperature measuring section 519, a tenth vertical temperature measuring section 520, and a tenth horizontal temperature measuring section 521, which are sequentially connected, the sixth horizontal temperature measuring section 513, the seventh horizontal temperature measuring section 515, the eighth horizontal temperature measuring section 517, the ninth horizontal temperature measuring section 519, and the tenth horizontal temperature measuring section 521 are arranged parallel to each other, any one of the horizontal temperature measuring sections is arranged vertically to any one of the vertical temperature measuring sections, and the fifth horizontal temperature measuring section 421 is connected to the tenth horizontal temperature measuring section 521. As other embodiments of the present invention, the temperature measuring resistor layer 40 may take other forms, and may be selected according to practical situations.
According to still another aspect of the present invention, there is provided a heating and temperature-measuring integrated non-magnetic electric heating system including a heating and temperature-measuring integrated non-magnetic electric heating sheet and a processor for obtaining a temperature of an object to be measured according to a resistance value calculation of a temperature-measuring resistance layer 40, the heating and temperature-measuring integrated non-magnetic electric heating sheet being the heating and temperature-measuring integrated non-magnetic electric heating sheet as described above.
By applying the configuration mode, the heating and temperature measurement integrated non-magnetoelectric heating system is provided, and comprises the heating and temperature measurement integrated non-magnetoelectric heating sheet, and because the non-magnetoelectric heating sheet provided by the invention realizes the non-magnetoelectric heating function by designing and processing the double-layer heating resistor layers, the energizing currents of the first heating resistor layer 20 and the second heating resistor layer 30 are opposite, so that the generated magnetic fields can be counteracted; and a temperature measuring resistance layer with a temperature measuring function is processed in the middle area of the non-magnetoelectric heating part, so that temperature measurement can be realized. Compared with the prior art, the method avoids the adoption of an additional temperature sensor for temperature measurement in the heating process of the air chamber, reduces the types of devices and the use surface of the air chamber, and reduces the risk of the bonding process; the heating resistance layer and the temperature measuring resistance layer are processed on the surface of the same substrate, so that the heating and temperature measuring volume of the air chamber is effectively reduced, and the heating and temperature measuring integrated non-magnetoelectric heating sheet provided by the invention is used in a non-magnetoelectric heating system, and the working performance of the non-magnetoelectric heating system can be greatly improved.
In order to further understand the present invention, the following describes the heating and temperature measuring integrated non-magnetic electric heating sheet and the processing method provided by the present invention in detail with reference to fig. 1 to 4.
As shown in fig. 1 to 4, according to an embodiment of the present invention, there is provided a heating and temperature measuring integrated magneto-less electric heating sheet and a processing method, wherein a main body portion of the heating and temperature measuring integrated magneto-less electric heating sheet is mainly composed of a first heating resistor layer 20, a second heating resistor layer 30 and a temperature measuring resistor layer 40. The heating resistor and the temperature measuring resistor are realized through different process steps, including metal deposition and metal etching (metal patterning). The heating resistor is formed by processing upper and lower layers of metal, the positions of the patterns of the upper and lower layers of metal wires are kept consistent, and the directions of the two layers of current are opposite when the current is electrified, so that the generated magnetic fields are cancelled. The temperature measuring resistor is formed by processing a layer of PT metal.
As shown in fig. 2, the heating and temperature measuring integrated non-magnetic electric heating plate mainly comprises three layers of metal and a middle flexible substrate (a prefabricated film of polyimide material) and an insulating layer (formed by polyimide spin coating) on the surface.
As shown in fig. 1, the heating resistor layer and the temperature measuring resistor layer are led out through respective lead pads so as to be electrically connected. The heating resistor is arranged around the temperature measuring resistor, so that the accuracy of the temperature measuring resistor on the temperature measurement of the air chamber is ensured.
As shown in fig. 2, an insulating layer is formed on the surface of the metal wire so as to ensure that the metal layer is not damaged and leaked.
The manufacturing process of the invention is as follows:
in a first step, a layer of metal is deposited on the upper and lower surfaces of the flexible substrate, such metal including, but not limited to, gold/platinum/copper/aluminum/titanium, etc.
And secondly, calculating the pattern size required by the resistance according to the resistance required by the use, and patterning the heating metal by a corrosion or etching method so as to realize the resistance meeting the heating requirement.
And thirdly, depositing another layer of metal on the surface of the flexible substrate as a temperature measuring resistor, wherein the metal comprises, but is not limited to, platinum/nickel/gold and the like, and protecting the surface of the metal in the first step before deposition so as to avoid two layers of metal shorting.
And fourthly, corroding or etching the temperature-measuring metal so as to realize the resistance value meeting the temperature-measuring requirement.
And fifthly, spin-coating a layer of insulating protective glue on the patterned metal surface with a certain resistance value, wherein the glue comprises and is not limited to polyimide, epoxy glue and other high-temperature resistant insulating glue.
The non-magnetoelectric heating part realizes the non-magnetoelectric heating function through the designed and processed double-layer heating resistance wire, and the middle area of the non-magnetoelectric heating sheet is processed with a metal resistor with a temperature measuring function.
The non-magnetic electric heating sheet is made of platinum/gold/chromium metal wires which are processed on the upper surface and the lower surface of the flexible substrate completely in a consistent manner.
The metal resistor with the temperature measuring function is formed by processing a platinum resistance wire with a larger temperature coefficient, so that the resistance changes along with the temperature change.
The invention has the advantages that the temperature measurement by adopting an additional temperature sensor in the heating process of the air chamber is avoided, the types of devices and the using surface of the air chamber are reduced, and the risk of the bonding process is reduced.
The invention has the other advantage that the electric heating wire and the temperature measuring resistor are processed on the surface of the same substrate, so that the heating and temperature measuring volume of the air chamber is effectively reduced.
In summary, the present invention provides a processing method of heating and temperature measuring integrated non-magnetoelectric heating sheet, which realizes a non-magnetoelectric heating function by designing and processing a double-layer heating resistor layer, and the current of the first heating resistor layer 20 and the current of the second heating resistor layer 30 are opposite, so that the generated magnetic fields can be offset; and a temperature measuring resistance layer with a temperature measuring function is processed in the middle area of the non-magnetoelectric heating part, so that temperature measurement can be realized. Compared with the prior art, the method avoids the adoption of an additional temperature sensor for temperature measurement in the heating process of the air chamber, reduces the types of devices and the use surface of the air chamber, and reduces the risk of the bonding process; the heating resistance layer and the temperature measuring resistance layer are processed on the surface of the same substrate, so that the heating and temperature measuring volume of the air chamber is effectively reduced, and the heating and temperature measuring integrated magneto-less heating sheet processing method provided by the invention can be used for heating the air chamber and monitoring the temperature of the air chamber.
Spatially relative terms, such as "above … …," "above … …," "upper surface at … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial location relative to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "over" other devices or structures would then be oriented "below" or "beneath" the other devices or structures. Thus, the exemplary term "above … …" may include both orientations of "above … …" and "below … …". The device may also be positioned in other different ways (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
In addition, the terms "first", "second", etc. are used to define the components, and are only for convenience of distinguishing the corresponding components, and the terms have no special meaning unless otherwise stated, and therefore should not be construed as limiting the scope of the present invention.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The processing method of the heating and temperature measuring integrated non-magnetoelectric heating sheet is characterized by comprising the following steps of:
depositing a first heated metal layer on a first surface of a flexible substrate (10), and depositing a second heated metal layer on a second surface of the flexible substrate (10);
etching the first heating metal layer according to a preset heating resistance value to form a first heating resistance layer (20) and etching the second heating metal layer to form a second heating resistance layer (30), wherein the first heating resistance layer (20) and the second heating resistance layer (30) have the same structure and are symmetrically arranged relative to the flexible substrate (10), and the energizing currents of the first heating resistance layer (20) and the second heating resistance layer (30) are opposite;
protecting the first heating resistor layer (20), and depositing a temperature measuring metal layer on the first surface of the flexible substrate (10);
etching the temperature-measuring metal layer according to a preset temperature-measuring resistance value to form a temperature-measuring resistance layer (40), wherein the first heating resistance layer (20) is positioned at the periphery of the temperature-measuring resistance layer (40);
a first insulating layer (50) is spin-coated on the temperature-measuring resistive layer (40) and the first heating resistive layer (20), and a second insulating layer (60) is spin-coated on the second heating resistive layer (30).
2. The method for processing the heating and temperature measuring integrated magneto-less heating sheet according to claim 1, wherein the material of the temperature measuring resistor layer (40) comprises PT platinum metal.
3. The method for processing the heating and temperature measuring integrated magneto-less heating sheet according to claim 1, wherein the materials of the first heating resistor layer (20) and the second heating resistor layer (30) comprise gold, platinum, copper, aluminum or titanium.
4. A method of processing a heating and temperature measuring integrated magneto-less heating plate according to claim 3, wherein the material of the flexible substrate (10) comprises polyimide.
5. The method for manufacturing a heating and temperature measuring integrated magneto-less heating plate according to claim 4, wherein the materials of the first insulating layer (50) and the second insulating layer (60) comprise polyimide or epoxy glue.
6. A heating and temperature-measuring integrated non-magnetic electric heating sheet, characterized in that the heating and temperature-measuring integrated non-magnetic electric heating sheet is processed using the heating and temperature-measuring integrated non-magnetic electric heating sheet processing method according to any one of claims 1 to 5.
7. The heating and temperature measuring integrated magneto-less electric heating plate of claim 6, wherein the heating and temperature measuring integrated magneto-less electric heating plate comprises:
a flexible substrate (10);
the structure of the first heating resistor layer (20) and the structure of the second heating resistor layer (30) are the same, the first heating resistor layer (20) is arranged on the first surface of the flexible substrate (10), the second heating resistor layer (30) is arranged on the second surface of the flexible substrate (10), the first heating resistor layer (20) and the second heating resistor layer (30) are symmetrically arranged relative to the flexible substrate (10), and the energizing currents of the first heating resistor layer (20) and the second heating resistor layer (30) are opposite;
a temperature-measuring resistor layer (40), wherein the temperature-measuring resistor layer (40) is arranged on the first surface of the flexible substrate (10), and the first heating resistor layer (20) is positioned at the periphery of the temperature-measuring resistor layer (40);
a first insulating layer (50) and a second insulating layer (60), wherein the first insulating layer (50) is arranged on the temperature measuring resistance layer (40) and the first heating resistance layer (20), and the second insulating layer (60) is arranged on the second heating resistance layer (30).
8. The heating and temperature measurement integrated magneto-less electric heating plate according to claim 7, wherein the first heating resistance layer (20) and the second heating resistance layer (30) each comprise a first heating resistance wire section (21) and a second heating resistance wire section (31), the first heating resistance wire section (21) and the second heating resistance wire section (31) are symmetrically arranged relative to a central line of the heating and temperature measurement integrated magneto-less electric heating plate, the first heating resistance wire section (21) comprises a first lead pad (211), a first vertical heating section (212), a first horizontal heating section (213), a second vertical heating section (214), a second horizontal heating section (215), a third vertical heating section (216), a third horizontal heating section (217), a fourth vertical heating section (218), a fourth horizontal heating section (219), a fifth vertical heating section (220) and a fifth horizontal heating section (221), the first horizontal heating section (213), the second horizontal heating section (215), the third horizontal heating section (217), the fourth horizontal heating section (219) and the fifth horizontal heating section (219) are vertically arranged in parallel with each other; the second heating resistance wire section (31) comprises a second lead bonding pad (311), a sixth vertical heating section (312), a sixth horizontal heating section (313), a seventh vertical heating section (314), a seventh horizontal heating section (315), an eighth vertical heating section (316), an eighth horizontal heating section (317), a ninth vertical heating section (318), a ninth horizontal heating section (319), a tenth vertical heating section (320) and a tenth horizontal heating section (321), wherein the sixth horizontal heating section (313), the seventh horizontal heating section (315), the eighth horizontal heating section (317), the ninth horizontal heating section (319) and the tenth horizontal heating section (321) are arranged in parallel, any one of the horizontal heating sections is vertically arranged with any one of the vertical heating sections, and the fifth horizontal heating section (221) is connected with the tenth horizontal heating section (321).
9. The heating and temperature measurement integrated magneto-free heating sheet according to claim 8, wherein the temperature measurement resistance layer (40) comprises a first temperature measurement resistance wire section (41) and a second temperature measurement resistance wire section (51), the first temperature measurement resistance wire section (41) and the second temperature measurement resistance wire section (51) are symmetrically arranged relative to a central line of the heating and temperature measurement integrated magneto-free heating sheet, the first temperature measurement resistance wire section (41) comprises a third lead pad (411), a first vertical temperature measurement section (412), a first horizontal temperature measurement section (413), a second vertical temperature measurement section (414), a second horizontal temperature measurement section (415), a third vertical temperature measurement section (416), a third horizontal temperature measurement section (417), a fourth vertical temperature measurement section (418), a fourth horizontal temperature measurement section (419), a fifth vertical temperature measurement section (420) and a fifth horizontal temperature measurement section (421), the first horizontal temperature section (413), the second horizontal temperature section (415), the third horizontal temperature measurement section (417), the fourth horizontal temperature section (419) and the fifth horizontal temperature measurement section (421) are arranged in parallel to each other; the second temperature measuring resistance wire section (51) comprises a fourth lead bonding pad (511), a sixth vertical temperature measuring section (512), a sixth horizontal temperature measuring section (513), a seventh vertical temperature measuring section (514), a seventh horizontal temperature measuring section (515), an eighth vertical temperature measuring section (516), an eighth horizontal temperature measuring section (517), a ninth vertical temperature measuring section (518), a ninth horizontal temperature measuring section (519), a tenth vertical temperature measuring section (520) and a tenth horizontal temperature measuring section (521), wherein the sixth horizontal temperature measuring section (513), the seventh horizontal temperature measuring section (515), the eighth horizontal temperature measuring section (517), the ninth horizontal temperature measuring section (519) and the tenth horizontal temperature measuring section (521) are sequentially connected and are arranged in parallel, any one of the horizontal temperature measuring sections is perpendicular to any one of the vertical temperature measuring sections, and the fifth horizontal temperature measuring section (421) is connected with the tenth horizontal temperature measuring section (521).
10. The heating and temperature measurement integrated magneto-less electric heating system is characterized by comprising a heating and temperature measurement integrated magneto-less electric heating sheet and a processor, wherein the processor is used for calculating and acquiring the temperature of an object to be measured according to the resistance value of the temperature measurement resistance layer (40), and the heating and temperature measurement integrated magneto-less electric heating sheet is the heating and temperature measurement integrated magneto-less electric heating sheet according to any one of claims 6 to 9.
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| JP2015088660A (en) * | 2013-10-31 | 2015-05-07 | 京セラ株式会社 | Package and electronic device |
| CN103596304A (en) * | 2013-11-07 | 2014-02-19 | 上海大学 | Embedded self-temperature-testing type mini heating stage and manufacturing method thereof |
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