CN116053918A - GHz high-frequency femtosecond laser pulse generating device and method - Google Patents
GHz high-frequency femtosecond laser pulse generating device and method Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
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- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1106—Mode locking
- H01S3/1112—Passive mode locking
- H01S3/1115—Passive mode locking using intracavity saturable absorbers
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Abstract
The invention discloses a GHz high-frequency femtosecond laser pulse generating device and a method thereof, wherein at least two frequency doubling units are sequentially arranged on an output optical path of a low-frequency femtosecond pulse generator; the frequency doubling unit I comprises a beam splitter I, an attenuator I, a delay I and a beam combiner I, wherein low-frequency femtosecond pulses generated by the low-frequency femtosecond pulse generator enter the beam splitter I and are divided into two paths, one path enters the beam combiner I through the attenuator I, and the other path enters the beam combiner I through the delay I to combine beams, and the frequency of the femtosecond pulses is doubled; the frequency doubling unit II comprises a beam splitter II, an attenuator II, a delay II and a beam combiner II, wherein the femtosecond pulse output by the beam combiner I of the frequency doubling unit I enters the beam splitter II and is divided into two paths, one path enters the beam combiner II through the attenuator II, the other path enters the beam combiner II through the delay II to combine beams, and the frequency of the femtosecond pulse is doubled again. And realizing GHz pulse output through more than two times of frequency doubling units.
Description
Technical Field
The invention relates to a GHz high-frequency femtosecond laser pulse generating device and a GHz high-frequency femtosecond laser pulse generating method.
Background
Femtosecond lasers are widely applied in the fields of material fine and fine machining, semiconductor industry, solar photovoltaic, scientific research and the like by extremely high peak power and narrow pulse width. One of the most important features of femtosecond laser machining is that ultra-high precision micro-nano machining can be realized by suppressing a heat affected zone. The slower processing speed of the femtosecond laser is a bottleneck limiting the industrial application, and the processing efficiency can be obviously improved without reducing the processing quality by adopting the GHz femtosecond laser and working in a pulse train mode, so that the bottleneck of the femtosecond processing can be overcome.
The main method for obtaining stable GHz femtosecond pulse is passive mode locking, the cavity length of the mode locking laser depends on the pulse repetition frequency, so the cavity length of the GHz femtosecond resonant cavity is very short (< 150 mm), and if the GHz output is realized by adopting a fiber laser, the cavity length needs to be controlled within 100 mm. The GHz femtosecond pulse acquisition can adopt a solid mode locking laser and an optical fiber mode locking laser. Patent publication number CN112864785B discloses a femtosecond laser generating system with high power GHz repetition frequency, and a solid laser is used to obtain GHz femtosecond pulse, and the solid laser is easy to realize passive mode locking in a 150 mm cavity length, but because the problem of optical fiber coupling is difficult to amplify by adopting an optical fiber amplifier, the laser needs to amplify by adopting a solid, and cannot realize full optical fiber. The mode-locked fiber laser has the advantages that the welding length of a plurality of fiber devices (wavelength division coupler, gain fiber, grating and the like) in the cavity is difficult to control the cavity length to be within 150 mm, and meanwhile, the short cavity is difficult to realize the dispersion compensation in the cavity, so that stable GHz femtosecond pulse laser is difficult to directly generate by the fiber laser.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides a GHz high-frequency femtosecond laser pulse generating device and a GHz high-frequency femtosecond laser pulse generating method.
The aim of the invention is achieved by the following technical scheme:
GHz high frequency femtosecond laser pulse generating device, its characterized in that: at least two frequency doubling units are sequentially arranged on an output optical path of the low-frequency femtosecond pulse generator;
the frequency doubling unit I comprises a beam splitter I, an attenuator I, a delay I and a beam combiner I, wherein low-frequency femtosecond pulses generated by the low-frequency femtosecond pulse generator enter the beam splitter I and are divided into two paths, one path enters the beam combiner I through the attenuator I, and the other path enters the beam combiner I through the delay I to combine beams, and the frequency of the femtosecond pulses is doubled;
the frequency doubling unit II comprises a beam splitter II, an attenuator II, a delay II and a beam combiner II, wherein the femtosecond pulse output by the beam combiner I of the frequency doubling unit I enters the beam splitter II and is divided into two paths, one path enters the beam combiner II through the attenuator II, the other path enters the beam combiner II through the delay II to combine beams, and the frequency of the femtosecond pulse is doubled again.
Further, the GHz high-frequency femtosecond laser pulse generating device described above, wherein the low-frequency femtosecond pulse generator comprises a pump source, a wavelength division multiplexer, a grating, a gain fiber and a saturable absorber mirror, the pump source is connected with the wavelength division multiplexer, the wavelength division multiplexer is connected with the grating, the grating is connected with the gain fiber, the gain fiber is connected with the saturable absorber mirror, and pump light output by the pump source enters a laser cavity formed by the grating, the gain fiber and the saturable absorber mirror through the wavelength division multiplexer, so that the femtosecond laser pulse is generated by passive mode locking.
Further, in the GHz high-frequency femtosecond laser pulse generating apparatus, the low-frequency femtosecond pulse generator is a femtosecond pulse generator with an output wavelength of 1030nm to 1064nm, an output power frequency of 50MHz to 500MHz, an output power of 1mW to 1W, and a pulse width of 100fs to 10 ps.
Further, in the GHz high-frequency femtosecond laser pulse generating device, the first beam splitter and the second beam splitter are optical fiber couplers with a beam splitting ratio of 40% -60%.
Further, in the GHz high-frequency femtosecond laser pulse generating device, the first attenuator and the second attenuator are optical fiber attenuators with attenuation ratio of 10% -90%.
Further, in the GHz high-frequency femtosecond laser pulse generating device, the first and second retarders are single-mode fibers with a fiber mode field diameter of 6 um-15 um.
The invention relates to a GHz high-frequency femtosecond laser pulse generating device, a low-frequency femtosecond pulse generator passively locks a mode through a saturable absorber mirror to generate low-frequency femtosecond pulses, the low-frequency femtosecond pulses enter a beam splitter I and are divided into two paths, one path of the low-frequency femtosecond pulses enters a beam combiner I through an attenuator I, the other path of the low-frequency femtosecond pulses enter the beam combiner I through a retarder I, the delay time introduced by the retarder I is a pulse period corresponding to the pulse frequency doubling, the attenuator I adjusts the pulse amplitude of light, so that the light pulse heights are consistent after beam combination, the pulses are stable, and the beam combiner I doubles the frequency of the femtosecond pulses by combining the two paths of laser beams;
the femtosecond pulse output by the beam combiner enters the beam splitter II and then is divided into two paths, one path enters the beam combiner II through the attenuator II, the other path enters the beam combiner II through the delay II, the delay time introduced by the delay II is a corresponding pulse period after pulse frequency doubling, the attenuator II adjusts the pulse amplitude of light, so that the light pulse height after beam combination is consistent, the pulse is stable, and the beam combiner II combines two paths of laser beams to realize the repetition of the femtosecond pulse frequency.
Compared with the prior art, the invention has remarkable advantages and beneficial effects, and is specifically embodied in the following aspects:
(1) the invention adopts a low-frequency femtosecond pulse laser generator based on the passive mode locking of a saturable absorber mirror, and the low-frequency femtosecond pulse passes through a frequency multiplication unit for more than two times to realize GHz pulse output; the low-frequency femtosecond pulse generator is 250MHz, and the pulse frequency is changed into 500MHz after passing through the first frequency doubling unit; the working principle of the frequency doubling unit II is the same as that of the frequency doubling unit I, so that 1GHz femtosecond pulse output is realized through the two frequency doubling units;
(2) by increasing the number of frequency doubling units, a higher frequency output can be achieved, while in order to obtain a frequency of 1GHz, a lower frequency femtosecond pulse generator can be used; the attenuator can realize the consistent pulse height after beam combination and ensure the pulse stability; the GHz femtosecond laser pulse is realized through two or more frequency doubling units, and then high-power output is realized through amplification by adopting an optical fiber amplifier, so that the full-fiber of the high-power GHz femtosecond laser is realized;
(3) the invention solves the problems of fusion welding, intracavity dispersion control and difficult starting of the laser under high frequency caused by the control of the length of the optical fiber in the direct generation of the femtosecond GHz pulse of the optical fiber laser, realizes the full fiber of the GHz laser, and is more stable compared with a solid femtosecond GHz laser.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be apparent from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention may be realized and attained by the structure particularly pointed out in the written description and drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1: the structure of the device is schematically shown.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by a person skilled in the art without making any inventive effort, are intended to be within the scope of the present invention.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures. Meanwhile, in the description of the present invention, directional terms, order terms, etc. are used only for distinguishing the description, and are not to be construed as indicating or implying relative importance.
As shown in fig. 1, in the GHz high-frequency femtosecond laser pulse generating device, a frequency multiplication unit one 2 and a frequency multiplication unit two 3 are sequentially arranged on an output optical path of the low-frequency femtosecond pulse generator 1; the frequency doubling unit I2 comprises a beam splitter I201, an attenuator I202, a delay I204 and a beam combiner I203, wherein the low-frequency femtosecond pulse generated by the low-frequency femtosecond pulse generator 1 enters the beam splitter I201 and is divided into two paths, one path enters the beam combiner I203 through the attenuator I202, the other path enters the beam combiner I203 through the delay I204 for beam combination, and the femtosecond pulse frequency is doubled;
the second frequency doubling unit 3 comprises a second beam splitter 301, a second attenuator 302, a second delay 304 and a second beam combiner 303, wherein the femtosecond pulse output by the first beam combiner 203 of the first frequency doubling unit 2 enters the second beam splitter 301 and is divided into two paths, one path enters the second beam combiner 303 through the second attenuator 302, the other path enters the second beam combiner 303 through the second delay 304 to combine beams, and the frequency of the femtosecond pulse is doubled again.
The low-frequency femtosecond pulse generator 1 comprises a pump source 101, a wavelength division multiplexer 102, a grating 103, a gain optical fiber 104 and a saturable absorber mirror 105, wherein the pump source 101 is connected with the wavelength division multiplexer 102, the wavelength division multiplexer 102 is connected with the grating 103, the grating 103 is connected with the gain optical fiber 104, the gain optical fiber 104 is connected with the saturable absorber mirror 105, pump light output by the pump source 101 enters a laser cavity formed by the grating 103, the gain optical fiber 104 and the saturable absorber mirror 105 through the wavelength division multiplexer 102, and the femtosecond laser pulse is generated by passive mode locking.
The low-frequency femtosecond pulse generator 1 is a femtosecond pulse generator with output wavelength of 1030 nm-1064 nm, output power frequency of 50 MHz-500 MHz, output power of 1 mW-1W and pulse width of 100 fs-10 ps.
The first beam splitter 201 and the second beam splitter 301 are fiber couplers with a beam splitting ratio of 40% -60%. The first attenuator 202 and the second attenuator 302 are optical fiber attenuators with attenuation ratios of 10-90%. The first delay 204 and the second delay 304 are single mode fibers with the mode field diameters of 6 um-15 um.
In specific application, the low-frequency femtosecond pulse generator 1 passively locks a mode through a saturable absorber mirror to generate low-frequency femtosecond pulses, the low-frequency femtosecond pulses enter the first beam splitter 201 and are divided into two paths, one path enters the first beam combiner 203 through the first attenuator 202, the other path enters the first beam combiner 203 through the first retarder 204, delay time introduced by the first retarder 204 (a length single mode fiber) is a pulse period corresponding to the pulse period after pulse frequency doubling, the first attenuator 202 adjusts the pulse amplitude of light, so that the heights of the light pulses after beam combination are consistent, the pulses are stable, and the first beam combiner 203 combines the two paths of laser to realize the doubling of the femtosecond pulse frequency;
the femtosecond pulse output by the beam combiner I203 enters the beam splitter II 301 and is divided into two paths, one path enters the beam combiner II 303 through the attenuator II 302, the other path enters the beam combiner II 303 through the retarder II 304, the delay time introduced by the retarder II 304 is a corresponding pulse period after pulse frequency doubling, the attenuator II 302 adjusts the pulse amplitude of light, so that the light pulse height after beam combination is consistent, the pulse is stable, and the beam combiner II 303 enables the two paths of laser beams to combine to realize the doubling of the femtosecond pulse frequency again.
The low-frequency femtosecond pulse passes through the frequency multiplication unit for more than two times to realize GHz pulse output by adopting the low-frequency femtosecond pulse laser generator based on the passive mode locking of the saturable absorber mirror. The low-frequency femtosecond pulse generator is 250MHz, and the pulse frequency is changed into 500MHz after passing through the first 2 frequency doubling units; the working principle of the frequency doubling unit II 3 is the same as that of the frequency doubling unit I2, so that 1GHz femtosecond pulse output is realized through the two frequency doubling units. By increasing the number of frequency doubling units, a higher frequency output can be achieved, while in order to obtain a frequency of 1GHz, a lower frequency femtosecond pulse generator can be used. The attenuator can realize the consistent pulse height after beam combination and ensure the pulse stability. The GHz femtosecond laser pulse is realized through two or more frequency doubling units, and then high-power output is realized through amplification by adopting an optical fiber amplifier, so that the full-fiber of the high-power GHz femtosecond laser is realized.
The invention solves the problems of fusion welding, intracavity dispersion control and difficult starting of the laser under high frequency caused by the control of the length of the optical fiber in the direct generation of the femtosecond GHz pulse of the optical fiber laser, realizes the full fiber of the GHz laser, and is more stable compared with a solid femtosecond GHz laser.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention. It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily appreciate variations or alternatives within the scope of the present invention.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
Claims (7)
- The utility model provides a GHz high frequency femtosecond laser pulse generation device which characterized in that: at least two frequency doubling units are sequentially arranged on an output optical path of the low-frequency femtosecond pulse generator (1);the frequency doubling unit I (2) comprises a beam splitter I (201), an attenuator I (202), a delay I (204) and a beam combiner I (203), wherein low-frequency femtosecond pulses generated by the low-frequency femtosecond pulse generator (1) enter the beam splitter I (201) and are divided into two paths, one path enters the beam combiner I (203) through the attenuator I (202), and the other path enters the beam combiner I (203) through the delay I (204) to combine beams, and the femtosecond pulse frequency is doubled;the frequency doubling unit II (3) comprises a beam splitter II (301), an attenuator II (302), a delay II (304) and a beam combiner II (303), wherein the femtosecond pulse output by the beam combiner I (203) of the frequency doubling unit I (2) enters the beam splitter II (301) and is divided into two paths, one path enters the beam combiner II (303) through the attenuator II (302), the other path enters the beam combiner II (303) through the delay II (304), beam combination is carried out, and the femtosecond pulse frequency is doubled again.
- 2. The GHz high frequency femtosecond laser pulse generation apparatus as set forth in claim 1, wherein: the low-frequency femtosecond pulse generator (1) comprises a pump source (101), a wavelength division multiplexer (102), a grating (103), a gain optical fiber (104) and a saturable absorber mirror (105), wherein the pump source (101) is connected with the wavelength division multiplexer (102), the wavelength division multiplexer (102) is connected with the grating (103), the grating (103) is connected with the gain optical fiber (104), the gain optical fiber (104) is connected with the saturable absorber mirror (105), and pump light output by the pump source (101) passes through the wavelength division multiplexer (102) and enters a laser cavity formed by the grating (103), the gain optical fiber (104) and the saturable absorber mirror (105), so that the femtosecond laser pulse is generated by passive mode locking.
- 3. The GHz high-frequency femtosecond laser pulse generation apparatus according to claim 1 or 2, wherein: the low-frequency femtosecond pulse generator (1) is a femtosecond pulse generator with output wavelength of 1030 nm-1064 nm, output power frequency of 50 MHz-500 MHz, output power of 1 mW-1W and pulse width of 100 fs-10 ps.
- 4. The GHz high frequency femtosecond laser pulse generation apparatus as set forth in claim 1, wherein: the first beam splitter (201) and the second beam splitter (301) are fiber couplers with a beam splitting ratio of 40% -60%.
- 5. The GHz high frequency femtosecond laser pulse generation apparatus as set forth in claim 1, wherein: the first attenuator (202) and the second attenuator (302) are optical fiber attenuators with attenuation ratio of 10% -90%.
- 6. The GHz high frequency femtosecond laser pulse generation apparatus as set forth in claim 1, wherein: the first delay device (204) and the second delay device (304) are single-mode fibers with the mode field diameters of 6 um-15 um.
- 7. The apparatus of claim 1 implements a GHz high frequency femtosecond laser pulse generation method, characterized by: the low-frequency femtosecond pulse generator (1) generates low-frequency femtosecond pulses through passive mode locking of a saturable absorber mirror, the low-frequency femtosecond pulses enter a beam splitter I (201) and are divided into two paths, one path enters a beam combiner I (203) through an attenuator I (202), the other path enters the beam combiner I (203) through a retarder I (204), delay time introduced by the retarder I (204) is a pulse period corresponding to pulse frequency doubling, the attenuator I (202) adjusts the pulse amplitude of light to ensure that the light pulses after beam combination are consistent in height and stable in pulse, and the beam combiner I (203) doubles the femtosecond pulse frequency by combining two paths of laser beams;the femtosecond pulse output by the beam combiner (203) enters the beam splitter II (301) and then is divided into two paths, one path enters the beam combiner II (303) through the attenuator II (302), the other path enters the beam combiner II (303) through the retarder II (304), the delay time introduced by the retarder II (304) is a corresponding pulse period after pulse frequency doubling, the attenuator II (302) adjusts the pulse amplitude of light, so that the light pulse height after beam combination is consistent, the pulse is stable, and the beam combiner II (303) combines two paths of laser to realize the repetition of the femtosecond pulse frequency.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211589745.7A CN116053918A (en) | 2022-12-12 | 2022-12-12 | GHz high-frequency femtosecond laser pulse generating device and method |
| PCT/CN2023/113337 WO2024124934A1 (en) | 2022-12-12 | 2023-08-16 | Ghz high-frequency femtosecond laser pulse generation device and method thereof |
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| CN202211589745.7A CN116053918A (en) | 2022-12-12 | 2022-12-12 | GHz high-frequency femtosecond laser pulse generating device and method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2024124934A1 (en) * | 2022-12-12 | 2024-06-20 | 苏州德龙激光股份有限公司 | Ghz high-frequency femtosecond laser pulse generation device and method thereof |
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- 2022-12-12 CN CN202211589745.7A patent/CN116053918A/en active Pending
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| CN104541198A (en) * | 2012-06-01 | 2015-04-22 | Nkt光子学有限公司 | A supercontinuum light source, a system and a method of measuring |
| CN104538832A (en) * | 2014-11-19 | 2015-04-22 | 中国科学院光电研究院 | Pulse laser time domain frequency doubling device |
| WO2022203618A1 (en) * | 2021-03-24 | 2022-09-29 | Lumos Lazer Anoni̇m Şi̇rketi̇ | Variable repetition rate multiplier based on polarization rotation |
| CN219041032U (en) * | 2022-12-12 | 2023-05-16 | 苏州贝林激光有限公司 | GHz high-frequency femtosecond laser pulse generating device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2024124934A1 (en) * | 2022-12-12 | 2024-06-20 | 苏州德龙激光股份有限公司 | Ghz high-frequency femtosecond laser pulse generation device and method thereof |
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