CN116047793B - Dual-channel thermo-optical phase shifter and optical chip - Google Patents
Dual-channel thermo-optical phase shifter and optical chip Download PDFInfo
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- CN116047793B CN116047793B CN202310345160.9A CN202310345160A CN116047793B CN 116047793 B CN116047793 B CN 116047793B CN 202310345160 A CN202310345160 A CN 202310345160A CN 116047793 B CN116047793 B CN 116047793B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
Abstract
The invention relates to a double-channel thermo-optical phase shifter and an optical chip, wherein one end of an optical beam splitter (2) of the thermo-optical phase shifter is connected with an input optical port (1), and the other end of the optical beam splitter is connected with input ports of a first optical waveguide (3) and a second optical waveguide (8) respectively; one end of the beam combiner (13) is respectively connected with the output ports of the first optical waveguide (3) and the second optical waveguide (8), and the other end is connected with the output optical port (14); the first hot electrode (6) is arranged on the first optical waveguide (3), and the second hot electrode (11) is arranged on the second optical waveguide (8); the two ends of the first thermal electrode (6) are respectively provided with a first metal electrode (5) and a second metal electrode (7), the two ends of the second thermal electrode (11) are respectively provided with a third metal electrode (10) and a fourth metal electrode (12), and the first metal electrode (5) is electrically connected with the third metal electrode (10). The optical chip comprises the thermo-optical phase shifter provided by the invention. The thermo-optic phase shifter has the advantages of sensitive adjustment, low power consumption, large adjustment range and the like.
Description
Technical Field
The invention relates to the technical field of optical chips, in particular to a double-channel thermo-optical phase shifter and an optical chip.
Background
In the field of integrated photonics, optoelectronic technology is one of the important research directions. The thermo-optic phase shifter is an important device of an optoelectronic chip, and the control of the phase of light waves is realized by changing the refractive index of a waveguide, so that the regulation and control of the chip function are realized. The thermal phase shifter mainly uses the thermo-optical effect of the optical waveguide material to change the phase of the light wave in the optical waveguide.
Conventionally, the prior art employs a single thermal phase shifter to adjust the phase of an optical waveguide, in which the phase change of the optical waveguide is proportional to the electrical power (voltage square) applied to the thermal phase shifter, and the phase change is faster and faster with increasing voltage, thereby increasing the difficulty and accuracy of circuit control. Meanwhile, under the condition of applying voltage, the phase change of the single thermal phase shifter is proportional to
The efficiency is lower, and the control flexibility is insufficient.
Disclosure of Invention
Aiming at the technical problems of low circuit adjustment precision, high difficulty, high power consumption and inflexibility of a single thermal phase shifter in the prior art, the invention provides a double-channel thermal optical phase shifter and an optical chip.
First aspect
The invention provides a double-channel thermo-optic phase shifter, comprising: the optical splitter comprises an input optical port, an optical beam splitter, a first optical waveguide, a second optical waveguide, an optical combiner, an output optical port, a first hot electrode and a second hot electrode;
one end of the optical beam splitter is connected with the input optical port, and the other end of the optical beam splitter is connected with the input ports of the first optical waveguide and the second optical waveguide respectively;
one end of the optical combiner is connected with the output ports of the first optical waveguide and the second optical waveguide respectively, and the other end of the optical combiner is connected with the output optical port;
the first thermode is arranged on the first optical waveguide, and the second thermode is arranged on the second optical waveguide;
the first hot electrode is provided with a first metal electrode and a second metal electrode at two ends respectively, the second hot electrode is provided with a third metal electrode and a fourth metal electrode at two ends respectively, and the first metal electrode and the third metal electrode are electrically connected.
Specifically, the primary concept of the invention is to improve the flexibility of phase adjustment and expand the adjustment range by using the thermo-optic phase shifting channel in combination. Meanwhile, the concept of the invention also lies in that the optical beam splitter is used for enabling the consistency of the optical waves entering the first thermo-optical phase shifting channel and the second thermo-optical phase shifting channel, so that the consistency of the common adjustment of the thermo-optical phase shifting channels which are used in parallel and jointly is ensured. In addition, the invention also uses the structures and connection designs of the first metal electrode, the second metal electrode, the third metal electrode and the fourth metal electrode, so that the simultaneous adjustment of the first thermo-optical phase shifting channel and the second thermo-optical phase shifting channel can be realized through the adjustment of the voltages at the first metal electrode and the third metal electrode, thereby improving the flexibility and the simplicity of the adjustment. The optical beam splitter is used for splitting light, the optical beam splitter is used for coupling light, and the first optical waveguide and the second optical waveguide are used for transmitting light. The first metal electrode, the second metal electrode, the third metal electrode and the fourth metal electrode are used for voltage input. It is understood that the first metal electrode and the third metal electrode may be regarded as the same metal electrode due to the electrical coupling treatment.
In some possible embodiments, a first fixed voltage V is applied to the second metal electrode 1 Applying a second fixed voltage V to the fourth metal electrode 2 Applying a first variable voltage V to the first or third metal electrode x ；
The first variable voltage V x Can be at V 2 ≤V x ≤V 1 And (5) adjusting the position.
In particular, in order to further explain the working principle of the thermo-optic phase shifter, the invention applies a first variable voltage V to the first metal electrode or the third metal electrode x And a first fixed voltage V applied to the second metal electrode 1 A second fixed voltage V applied to the fourth metal electrode 2 The flexibility and the simplicity of the phase adjustment of the thermo-optical phase shifting instrument provided by the invention are improved. It is easy to understand that when the first variable voltage V is applied x After the adjustment, the voltage difference between the first metal electrode and the second metal electrode and the voltage difference between the third metal electrode and the fourth metal electrode are synchronously changed, so that the electric power is improved, and the adjustment of the phase is realized under the action of a thermo-optical effect.
The first fixed voltage V 1 Belonging to high voltage, the second fixed voltage V 2 Belonging to low voltage, i.e. V 1 ＞V 2 . In addition, V 1 And V 2 The value of (2) can be adjusted according to the phase amplitude and range to be adjusted.
In some embodiments, the resistance values of the first and second heat electrodes are R, and the electric power of the first heat electrode is
The electric power of the second thermode is +.>
The first lightThe phase difference between the waveguide and the second optical waveguide is +.>
I.e. when said first variable voltage V x At V 2 ≤V x ≤V 1 During the adjustment, the phase difference of the whole light output port is +.>
At->
And (5) adjusting the position.
In particular, the concept of the invention is to formulate further for the adjustable range of the phase. Compared with the adjusting mode of the Shan Re phase shifter, the same first fixed voltage V is applied 1 In the case of (a), the adjustment range of the phase difference is
Between them. Therefore, after the thermo-optic phase shifter provided by the invention is adopted, the phase adjusting range is larger, and the power consumption of phase adjustment is lower. Where K is the conversion coefficient of the electric power to the optical waveguide phase.
In some embodiments, the second fixed voltage V 2 =0。
In particular, the invention is further conceived to pass through a second fixed voltage V 2 The setting mode of=0 simplifies the phase adjustment, reduces the difficulty of circuit control and improves the precision of circuit control. At this time, the first thermode electric power is
The electric power of the second thermode is +.>
The phase difference of the first thermo-optic phase shifting channel and the second thermo-optic phase shifting channel is
I.e. when said first variable voltage V x V is 0.ltoreq.V x ≤V 1 During the adjustment, the phase difference is->
At the position of
And (5) adjusting the position. Thus, the phase difference change rate of the optical waveguide is proportional to +.>
Further, the phase of the optical waveguide is changed and a first variable voltage V is applied x In a linear proportional relationship (when V 2 When the phase difference is not 0, the relation is still established, and the phase difference change rate is proportional to +>
) Therefore, the control difficulty of the control circuit can be reduced, and the control precision is improved.
In some embodiments, the first optical waveguide is integrated with a first modulation region and the second optical waveguide is integrated with a second modulation region.
Specifically, the first modulation region can modulate light transmitted in the first optical waveguide, and the second modulation region can modulate light transmitted in the second optical waveguide. Meanwhile, the first modulation area and the second modulation area are respectively built in the first optical waveguide and the second optical waveguide in an integrated mode.
In some embodiments, the first metal electrode and the third metal electrode are constructed as a unitary structure.
Specifically, based on the principle of the circuit of the present invention, the first metal electrode and the third metal electrode are actually used for applying the same first variable voltage V to the first thermo-optic phase shifting channel and the second thermo-optic phase shifting channel x This is accomplished by using a metal electrode instead of a metal electrode to reduce the power consumption.
In some embodiments, the first and second thermodes are suspended over a substrate material.
Specifically, the invention further contemplates that by utilizing the suspended arrangement of the first and second thermal electrodes, the heat input to the substrate material is reduced, so that the substrate material can be selected from materials with lower thermal conductivity. In addition, the first hot electrode and the second hot electrode which are arranged in the air are blocked, so that the thermal crosstalk between the hot electrodes and the heat dissipation of the hot electrodes can be reduced, and the thermal efficiency of the hot electrodes is improved.
Further, the first and second thermodes are made of silicon-based materials, or III-V materials, or lithium niobate materials.
Specifically, the silicon-based material comprises silicon, silicon dioxide or lightly doped silicon nitride material and the like, and the silicon-based material and the copper-based material can well realize thermo-optical efficiency and have high thermo-optical coefficient.
Further, the first optical waveguide and the second optical waveguide are made of silicon, silicon nitride, silicon dioxide or other silicon-based materials.
Second aspect
The present invention provides an optical chip comprising a dual channel thermo-optic phase shifter as described in any of the embodiments of the first aspect above.
Particularly, the research on the thermo-optical phase shifter is mainly applied to the technical fields of optical communication and integrated optical chips.
In summary, the present invention provides a dual-channel thermo-optical phase shifter and an optical chip, which have at least the following advantages: 1. according to the thermo-optic phase shifter provided by the invention, under the condition of consuming the same power consumption, the phase adjustment range is larger, so that the heat adjustment efficiency of the device is improved, and the power consumption of a chip is reduced; 2. compared with the traditional single thermal phase shifter, the thermal-optical phase shifter provided by the invention has the advantages that the phase change and the applied first variable voltage are in a linear relation, the difficulty of circuit control is lower, and the precision of phase adjustment is higher; 3. the thermo-optic phase shifter provided by the invention has the advantages that the phase change rate and the first variable voltage Vx form a linear relation
) Thus making the phase adjustment more flexible.
Drawings
The invention will be described in further detail below in connection with the drawings and the preferred embodiments, but it will be appreciated by those skilled in the art that these drawings are drawn for the purpose of illustrating the preferred embodiments only and thus should not be taken as limiting the scope of the invention. Moreover, unless specifically indicated otherwise, the drawings are merely schematic representations, not necessarily to scale, of the compositions or constructions of the described objects and may include exaggerated representations.
FIG. 1 is a schematic structural diagram of a dual-channel thermo-optic phase shifter according to an embodiment of the present invention;
1. an input light port; 2. a beam splitter; 3. a first optical waveguide; 4. a first modulation region; 5. a first metal electrode; 6. a first thermode; 7. a second metal electrode; 8. a second optical waveguide; 9. a second modulation region; 10. a third metal electrode; 11. a second thermode; 12. a fourth metal electrode; 13. a beam combiner; 14. and an output light port.
Description of the embodiments
The present invention will be described in detail with reference to fig. 1.
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Referring to fig. 1, a schematic structural diagram of a dual-channel thermo-optic phase shifter according to an embodiment of the present invention is shown in fig. 1.
Specifically, the thermo-optic phase shifter provided by the invention comprises an input optical port 1, an optical beam splitter 2, a first optical waveguide 3, a first modulation region 4, a first metal electrode 5, a first thermal electrode 6, a second metal electrode 7, a second optical waveguide 8, a second modulation region 9, a third metal electrode 10, a second thermal electrode 11, a fourth metal electrode 12, an optical beam combiner 13 and an output optical port 14. The first optical waveguide 3 and the second optical waveguide are arranged in a side-by-side manner.
The light wave enters the optical beam splitter 2 through the input optical port 1, and the optical beam splitter 2 splits the light wave into two parts, namely a first light wave and a second light wave with the same phase. The first light wave passes through the first optical waveguide 3, is modulated in the first modulation region 4, and is phase-shifted under the action of the first thermode 6; the second light wave passes through the second light waveguide 8, is modulated in the second modulation region 9, and is phase-shifted by the first thermode 11. Wherein the first metal electrode 5 and the second metal electrode 7 are used for providing voltage for the first hot electrode 6, and the third metal electrode 10 and the fourth metal electrode 12 are used for providing voltage for the second hot electrode 11. Thus, the first light wave and the second light wave are coupled under the action of the beam combiner 13, so that the whole phase shift of the light waves is completed, and the light waves are output through the output light port 14.
In some embodiments, the dual-channel thermo-optic phase shifter provided by the invention can be applied to Mach-Zehnder modulators, michelson interferometric modulator modulators and the like.
Further, based on the thermo-optic effect, although the first metal electrode 5 and the third metal electrode 10 are applied with the same first variable voltage Vx, since the first fixed voltage V1 and the second fixed voltage V2 are respectively applied at the second metal electrode 7 and the fourth metal electrode 12, different voltage differences are made at the first thermal electrode 6 and the second thermal electrode 11, thereby realizing a large adjustment of the phase difference of the optical wave in the case of adjusting the variable voltage Vx only once. That is, when the resistance values of the first heat electrode 6 and the second heat electrode 11 are R, the electric power of the first heat electrode 6 is
The second thermode 11 has an electrical power of +.>
The phase difference of the first thermo-optic phase shifting channel and the second thermo-optic phase shifting channel is
That is, when the first variable voltage Vx is adjusted between V2.ltoreq.Vx.ltoreq.V1, the phase difference +.>
At->
Inter-regulation. Thus, the invention providesAccording to the technical scheme, the phase difference can be quickly adjusted in a one-time voltage adjusting mode, and meanwhile, the phase difference adjusting range is larger in the same voltage range.
For further simplification of the scheme, the second fixed voltage v2=0. At this time, the first thermode 6 has an electric power of
The second thermode 11 has an electrical power of +.>
Phase difference of the first thermo-optic phase shifting channel and the second thermo-optic phase shifting channel
That is, when the first variable voltage Vx is adjusted between 0.ltoreq.Vx.ltoreq.V1, the phase difference is
And (5) adjusting the position. Thus, the phase difference change rate of the optical waveguide is proportional to +.>
Further, the phase change of the optical waveguide is linearly proportional to the applied first variable voltage Vx (when V2 is not 0, the relationship is still true, the phase difference change rate is proportional to +.>
) Therefore, the control difficulty of the control circuit can be reduced, and the control precision is improved.
In some embodiments, the first metal electrode 5 and the third metal electrode 10 are actually used to apply the same first variable voltage Vx on the first thermo-optic phase shifting channel and the second thermo-optic phase shifting channel, so that one metal electrode can be used instead to reduce the power consumption.
In some embodiments, the suspended arrangement of the first and second thermal electrodes 6, 11 reduces the heat input to the substrate material, so that the substrate material may be a material with a lower thermal conductivity.
In practice, the second thermode 6 and the second thermode 11 are arranged on the first optical waveguide 3 and the second optical waveguide 8, respectively, for realising the thermo-optical effect in particular. While the first thermode 6 and the second thermode 11 are preferably suspended.
The invention also provides an optical chip, which is applied to the technical fields of optical communication and integrated optical chips.
The foregoing has outlined rather broadly the more detailed description of the invention in order that the detailed description of the invention that follows may be better understood, and in order that the present invention may be better understood. It should be noted that it will be apparent to those skilled in the art that various modifications and adaptations of the invention can be made without departing from the principles of the invention and these modifications and adaptations are intended to be within the scope of the invention as defined in the following claims.
Claims (9)
1. A two-channel thermo-optic phase shifter, comprising: an input optical port (1), an optical beam splitter (2), a first optical waveguide (3), a second optical waveguide (8), an optical beam combiner (13), an output optical port (14), a first thermode (6) and a second thermode (11);
one end of the optical beam splitter (2) is connected with the input optical port (1), and the other end of the optical beam splitter is connected with input ports of the first optical waveguide (3) and the second optical waveguide (8) respectively;
one end of the optical combiner (13) is connected with the output ports of the first optical waveguide (3) and the second optical waveguide (8) respectively, and the other end of the optical combiner is connected with the output optical port (14);
the first thermode (6) is arranged on the first optical waveguide (3), and the second thermode (11) is arranged on the second optical waveguide (8);
a first metal electrode (5) and a second metal electrode (7) are respectively arranged at two ends of the first thermal electrode (6), a third metal electrode (10) and a fourth metal electrode (12) are respectively arranged at two ends of the second thermal electrode (11), and the first metal electrode (5) and the third metal electrode (10) are electrically connected;
applying a first fixing to the second metal electrode (7)Voltage V 1 Applying a second fixed voltage V to the fourth metal electrode (12) 2 Applying a first variable voltage V to the first metal electrode (5) or the third metal electrode (10) x ；
The first variable voltage V x Can be at V 2 ≤V x ≤V 1 And (5) adjusting the position.
2. The dual-channel thermo-optic phase shifter according to claim 1, wherein the resistance values of the first and second thermo-electrodes (6, 11) are R, and the electric power of the first thermo-electrode (6) is
The second thermode (11) has an electric power of +.>
I.e. when said first variable voltage V x At V 2 ≤V x ≤V 1 During the adjustment, the phase difference is->
At the position of
And (5) adjusting the position.
3. The dual channel thermo-optic phase shifter according to claim 2, wherein the second fixed voltage V 2 =0。
4. A two-channel thermo-optical phase shifter according to claim 1, characterized in that the first optical waveguide (3) is integrated with a first modulation region (4) and the second optical waveguide (8) is integrated with a second modulation region (9).
5. A two-channel thermo-optical phase shifter according to claim 1, characterized in that the first metal electrode (5) and the third metal electrode (10) are constructed as a unitary structure.
6. A two-channel thermo-optic phase shifter according to claim 1, characterized in that the first thermo-electrode (6) and the second thermo-electrode (11) are suspended in the substrate material.
7. The dual-channel thermo-optic phase shifter according to claim 6, wherein the first thermo-electrode (6) and the second thermo-electrode (11) are made of silicon-based material, or a group iii-v material, or a lithium niobate material.
8. A two-channel thermo-optical phase shifter according to claim 1, characterized in that the first optical waveguide (3) and the second optical waveguide (8) are silicon, or silicon nitride, or silicon dioxide.
9. An optical chip comprising a dual channel thermo-optic phase shifter according to any one of claims 1-8.
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