CN116047738A - Catadioptric non-obscuration optical device for laser collimation and beam measurement - Google Patents
Catadioptric non-obscuration optical device for laser collimation and beam measurement Download PDFInfo
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- CN116047738A CN116047738A CN202211665455.6A CN202211665455A CN116047738A CN 116047738 A CN116047738 A CN 116047738A CN 202211665455 A CN202211665455 A CN 202211665455A CN 116047738 A CN116047738 A CN 116047738A
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- 238000005859 coupling reaction Methods 0.000 claims abstract description 29
- 230000005540 biological transmission Effects 0.000 claims abstract description 17
- 230000004075 alteration Effects 0.000 description 15
- 238000002310 reflectometry Methods 0.000 description 5
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- 239000000758 substrate Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
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- 229910052709 silver Inorganic materials 0.000 description 3
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0411—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using focussing or collimating elements, i.e. lenses or mirrors; Aberration correction
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G02B17/0804—Catadioptric systems using two curved mirrors
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G02B17/0864—Catadioptric systems having non-imaging properties
- G02B17/0868—Catadioptric systems having non-imaging properties for light condensing, e.g. for use with a light emitter
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G02B17/0864—Catadioptric systems having non-imaging properties
- G02B17/0876—Catadioptric systems having non-imaging properties for light collecting, e.g. for use with a detector
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/40—Optical focusing aids
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Abstract
The invention belongs to the technical field of optical application, and particularly relates to a refraction and reflection non-obscuration optical device for laser collimation and beam measurement. The technical proposal is as follows: a refraction and reflection non-obscuration optical device for laser collimation and beam measurement comprises a main spectroscope, a concave main reflector, a turning reflector, a plane spectroscope, a far-field detector, a small hole, a focusing mirror and a laser coupling component; when the far-field measurement is performed, laser sequentially passes through the main spectroscope transmission, the concave main reflecting mirror reflection, the main spectroscope reflection, the turning emitting mirror reflection and the plane spectroscope transmission and then reaches the far-field detector; when the multi-wavelength collimated laser is output, a plurality of laser beams with different wavelengths are sequentially coupled by the laser coupling assembly, focused by the focusing mirror to the small hole, reflected by the plane spectroscope, reflected by the concave main reflector, reflected by the main spectroscope, reflected by the concave main reflector and transmitted by the main spectroscope. The invention provides a catadioptric unobstructed optical device for laser collimation and beam measurement.
Description
Technical Field
The invention belongs to the technical field of optical application, and particularly relates to a refraction and reflection non-obscuration optical device for laser collimation and beam measurement.
Background
In the field of precision laser equipment assembly and detection, a plurality of laser parallel light pipes with different wavelengths are generally required to be used as calibration equipment, and the optical axes of a plurality of lasers are required to be strictly consistent, and the deviation is in the micro-arc measurement level. In laser applications, it is often desirable to measure the optical axis uniformity, far field, etc. of a multi-wavelength laser, requiring that the laser beam measurement device itself have good optical quality and no chromatic aberration or chromatic aberration be on the order of micro radians. The light path structure generally adopted by the current laser collimation and measurement optical system mainly comprises a transmission type optical structure, a reflection type optical structure with obscuration and an off-axis reflection type optical structure. The transmission type optical system is difficult to completely eliminate chromatic aberration, residual chromatic aberration exists in the design and processing stages, and the consistency measurement precision of the multi-wavelength optical axis is difficult to reach micro radian level. The range of applications of reflective optical structures with obscuration is greatly limited due to the presence of obscuration, which does not match the shape of the laser beam. The off-axis reflective optical structure has no chromatic aberration, can realize small volume and large caliber, but has the defects of higher processing difficulty, high cost and the like.
Disclosure of Invention
In order to solve the above problems in the prior art, it is an object of the present invention to provide a catadioptric unobstructed optical device for laser collimation and beam measurement.
The technical scheme adopted by the invention is as follows:
a refraction and reflection non-obscuration optical device for laser collimation and beam measurement comprises a main spectroscope, a concave main reflector, a turning reflector, a plane spectroscope, a far-field detector, a small hole, a focusing mirror and a laser coupling component; when the far-field measurement is performed, laser sequentially passes through the main spectroscope transmission, the concave main reflecting mirror reflection, the main spectroscope reflection, the turning emitting mirror reflection and the plane spectroscope transmission and then reaches the far-field detector; when the multi-wavelength collimated laser is output, a plurality of laser beams with different wavelengths are sequentially coupled by the laser coupling assembly, focused by the focusing mirror to the small hole, reflected by the plane spectroscope, reflected by the concave main reflector, reflected by the main spectroscope, reflected by the concave main reflector and transmitted by the main spectroscope.
The main spectroscope, the concave main reflecting mirror, the turning reflecting mirror, the plane spectroscope and the far-field detector form a light beam measuring light path, and the far-field light beam quality, the multi-wavelength light beam optical axis consistency and the like of incident laser are measured. The main spectroscope, the concave main reflecting mirror, the turning reflecting mirror, the plane spectroscope, the focusing mirror, the small hole and the laser coupling component form a multi-wavelength laser collimation light path, and the multi-wavelength laser is subjected to beam expansion and collimation output to obtain a plurality of parallel lasers with consistent optical axes and good collimation.
When the far-field measurement of the laser is carried out, the laser is transmitted by the main spectroscope, reflected by the concave main reflecting mirror and reflected by the main spectroscope; when the multi-wavelength collimated laser is output, the light beam is reflected by the main spectroscope, reflected by the concave main reflector and transmitted by the main spectroscope. The main spectroscope realizes light splitting and light path folding, not only plays a role in simplifying the light path, but also avoids the situation that the reflecting mirror blocks the light path when the reflecting mirror and the transmitting mirror are separated. In the absence of shielding, the shape of the laser beam is matched, so that the unobstructed reflective optical structure of the invention has wider application range.
The light beam measuring light path of the invention only has two transmission elements of the main spectroscope and the plane spectroscope, and the main spectroscope and the plane spectroscope are plane mirrors, and the curved lens is not adopted, so the total chromatic aberration of the measuring light path is small. And the total chromatic aberration of the measuring light path can be further reduced by controlling the inclination angles of the main spectroscope and the plane spectroscope.
As a preferred scheme of the invention, the laser coupling component comprises an A wavelength laser, a B wavelength laser, a C wavelength laser, an A wavelength dichroic mirror, a C wavelength dichroic mirror, a first total reflecting mirror, a second total reflecting mirror, a third total reflecting mirror and a fourth total reflecting mirror; the laser emitted by the wavelength A laser and the laser emitted by the wavelength B laser and reflected by the fourth total reflection mirror are coupled into coupling laser at the wavelength A dichroic mirror, the coupling laser and the laser emitted by the wavelength C laser and reflected by the third total reflection mirror are coupled into coupling laser at the wavelength C dichroic mirror, and the coupling laser reaches the focusing mirror after being reflected by the second total reflection mirror and the first total reflection mirror.
As a preferable scheme of the invention, the focal plane of the focusing mirror is coincident with the focal plane of the concave main reflector, and the small hole is positioned on the coincident focal plane of the focusing mirror and the concave main reflector. The small hole is positioned on the coincident focal plane of the focusing mirror and the concave main reflecting mirror, and in the laser collimation light path, the stability of the laser optical axis of each wavelength is ensured, and the parallelism detection of the emergent laser is assisted.
As a preferable scheme of the invention, the total inclination angle of the main spectroscope and the plane spectroscope is not more than 60 angular seconds, so that the total chromatic aberration of a measuring light path in visible and short infrared bands is not more than 1 angular second.
As a preferable scheme of the invention, the included angle between the normal line of the main spectroscope and the transmitted light beam of the main spectroscope is 2-6 degrees, and the center distance between the main spectroscope and the concave main reflecting mirror is 1680-1880 mm. By setting the included angle between the main spectroscope and the main optical axis and the center distance between the main spectroscope and the main reflecting mirror, the light beams emitted by the main reflecting mirror can be ensured to pass through the main reflecting mirror.
As the preferable scheme of the invention, the transmission surface of the main spectroscope is plated with a 500-1100 nm wave band broadband antireflection film, and the spectroscopic surface of the main spectroscope is plated with a 500-1100 nm wave band broadband spectroscopic film.
As a preferable mode of the present invention, the radius of curvature of the concave main mirror is 2400 to 2600mm.
As the preferable scheme of the invention, the included angle between the normal line of the planar spectroscope and the incident light beam of the planar spectroscope is 10-14 degrees, the transmission surface of the planar spectroscope is plated with a broadband antireflection film with 500-1100 nm wave band, and the light splitting surface of the planar spectroscope is plated with a broadband light splitting film with 500-1100 nm wave band.
As a preferable mode of the invention, the diameter of the small hole is 18-20 μm.
The beneficial effects of the invention are as follows:
1. the main spectroscope of the invention realizes light splitting and light path folding, not only plays a role in simplifying the light path, but also avoids the situation that the reflecting mirror blocks the light path when the reflecting mirror and the transmitting mirror are separated. In the absence of shielding, the shape of the laser beam is matched, so that the unobstructed reflective optical structure of the invention has wider application range.
2. The light beam measuring light path of the invention only has two transmission elements of the main spectroscope and the plane spectroscope, and the main spectroscope and the plane spectroscope are plane mirrors, and the curved lens is not adopted, so the total chromatic aberration of the measuring light path is small. And the total chromatic aberration of the measuring light path can be further reduced by controlling the inclination angles of the main spectroscope and the plane spectroscope.
Drawings
Fig. 1 is a schematic structural view of the present invention.
In the figure: 1-a main spectroscope; 2-a concave primary mirror; 3-turning a mirror; 4-plane spectroscope; a 5-far field detector; 6-small holes; 7-focusing mirror; 8-a first total reflection mirror; 9-a second total reflection mirror; 10-a third total reflection mirror; 11-a fourth total reflection mirror; a 12-C wavelength dichroic mirror; 13-a wavelength dichroic mirror; a 14-A wavelength laser; a 15-B wavelength laser; 16-C wavelength laser.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention. It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other.
As shown in FIG. 1, the refraction and reflection non-obscuration optical device for laser collimation and beam measurement of the embodiment has an effective optical aperture phi of 300mm, comprises a laser collimation light source with three wavelengths, and can measure parameters such as laser far field and optical axis consistency in a 500-1100 nm wave band. The optical device comprises a main spectroscope 1, a concave main reflecting mirror 2, a turning reflecting mirror 3, a plane spectroscope 4, a far-field detector 5, a small hole 6, a focusing mirror 7 and a laser coupling component; when in far-field measurement of laser, the laser sequentially passes through the main spectroscope 1 to transmit, the concave main reflecting mirror 2 to reflect, the main spectroscope 1 to reflect, the turning transmitting mirror to reflect and the plane spectroscope 4 to transmit and then reaches the far-field detector 5; when the multi-wavelength collimated laser is output, a plurality of laser beams with different wavelengths are coupled by a laser coupling component, focused by a focusing mirror 7 to a small hole 6, reflected by a plane spectroscope 4, reflected by a concave main reflecting mirror 2, reflected by a main spectroscope 1, reflected by the concave main reflecting mirror 2 and transmitted by the main spectroscope 1.
The laser coupling component comprises an A wavelength laser 14, a B wavelength laser 15, a C wavelength laser 16, an A wavelength dichroic mirror 13, a C wavelength dichroic mirror 12, a first total reflecting mirror 8, a second total reflecting mirror 9, a third total reflecting mirror 10 and a fourth total reflecting mirror 11; the laser beam emitted by the a-wavelength laser 14 and the laser beam emitted by the B-wavelength laser 15 and reflected by the fourth total reflection mirror 11 are coupled into coupling laser beams by the a-wavelength dichroic mirror 13, the coupling laser beams are coupled into coupling laser beams by the C-wavelength dichroic mirror 12 by the laser beam emitted by the C-wavelength laser 16 and reflected by the third total reflection mirror 10, and the coupling laser beams are reflected by the second total reflection mirror 9 and the first total reflection mirror 8, and then reach the focusing mirror 7.
The main spectroscope 1, the concave main reflecting mirror 2, the turning reflecting mirror 3, the plane spectroscope 4 and the far-field detector 5 form a light beam measuring light path, and the far-field light beam quality, the multi-wavelength light beam optical axis consistency and the like of incident laser are measured. The main spectroscope 1, the concave main reflecting mirror 2, the turning reflecting mirror 3, the plane spectroscope 4, the focusing mirror 7, the small hole 6 and the laser coupling component form a multi-wavelength laser collimation light path, and the multi-wavelength laser is subjected to beam expansion and collimation output to obtain a plurality of parallel lasers with consistent optical axes and good collimation.
When the far-field measurement of the laser is carried out, the laser is transmitted through the main spectroscope 1, reflected by the concave main reflecting mirror 2 and reflected by the main spectroscope 1; when the multi-wavelength collimated laser is output, the light beam is reflected by the main spectroscope 1, reflected by the concave main reflecting mirror 2 and transmitted by the main spectroscope 1. The main spectroscope 1 realizes light splitting and light path folding, not only plays a role in simplifying the light path, but also avoids the situation that the reflecting mirror blocks the light path when the reflecting mirror and the transmitting mirror are separated. In the absence of shielding, the shape of the laser beam is matched, so that the unobstructed reflective optical structure of the invention has wider application range.
In the light beam measuring light path, only two transmission elements of the main spectroscope 1 and the plane spectroscope 4 are arranged, and the main spectroscope 1 and the plane spectroscope 4 are plane mirrors, and a curved lens is not adopted, so that the total chromatic aberration of the measuring light path is small. And, the total chromatic aberration of the measuring light path can be further reduced by controlling the tilt angles of the main beam splitter 1 and the plane beam splitter 4. In this embodiment, in order to reduce the total chromatic aberration, the total tilt angle of the main beam splitter 1 and the plane beam splitter 4 is not greater than 60 ° seconds, so that the total chromatic aberration of the measurement light path in the visible and short infrared bands is not greater than 1 ° seconds.
A certain included angle exists between the normal line of the main spectroscope 1 and the optical axis of the system, one surface of the main spectroscope facing the concave surface 2 is plated with a broadband light-splitting film, and the other surface is plated with a broadband antireflection film. The main spectroscope 1 is used for keeping the light path symmetry of the device, and simultaneously deviating the light beam from the incident optical axis, so that the purposes of folding the light path and enabling the system structure to be more compact are achieved, and the light beam is not blocked. In the embodiment, the caliber of the main spectroscope 1 is phi 320mm, the substrate is made of optical fused quartz material, the included angle between the substrate and the main optical axis is 4 degrees, the transmission surface is plated with a broadband antireflection film with 500-1100 nm wave band, the average residual reflectivity is not more than 1%, the spectroscopic surface is plated with a broadband spectroscopic film with 500-1100 nm wave band, and the surface average reflectivity is 40% -60%. The center-to-center distance between the main spectroscope 1 and the concave main reflector 2 is 1780mm.
The surface of the concave main reflector 2 is plated with a broadband reflecting film, and the broadband reflecting film is used for focusing or collimating light beams, and focusing the light beams transmitted from the main spectroscope 1 into a far-field detector 5 in a light beam measuring light path; the laser emitted by the laser is collimated into a large-caliber parallel beam in a laser collimation light path, and is emitted from the main spectroscope 1. The focal length of the concave main reflector 2 is the focal length of the beam measuring light path, and the surface of the concave main reflector is usually spherical, so that the system volume can be shortened, and the concave main reflector can also be other aspheric surfaces. In the embodiment, the surface of the concave main reflector 2 is a spherical surface, the curvature radius is 2500mm, and the surface is plated with a metal silver plus medium protective film.
The turning reflector 3 is a plane reflector, and the surface is plated with a metal silver and medium protective film.
The plane spectroscope 4 has a certain included angle with the optical axis, one side facing the far-field detector 5 is plated with a wide-band antireflection film, the other side is plated with a wide-band spectroscope, most of laser energy is reflected, and a small part of laser energy is transmitted, so that a beam measuring light path is separated from a laser collimation light path, and a small amount of laser is transmitted to the far-field detector 5. In this embodiment, the included angle between the normal line of the planar spectroscope 4 and the incident beam of the planar spectroscope 4 is 12 °, the substrate is made of optical fused quartz material, the transmission surface is plated with a broadband antireflection film with 500-1100 nm band, the average residual reflectivity is not more than 1%, the light-splitting surface is plated with a broadband light-splitting film with 500-1100 nm band, and the surface average reflectivity is 85% -95%.
The far-field detector 5 is used for measuring parameters such as far-field light spots of incident light beams, consistency of multi-wavelength optical axes and the like.
The focal plane of the focusing mirror 7 coincides with the focal plane of the concave primary mirror 2, and the aperture 6 is located at the coincident focal plane of the focusing mirror 7 and the concave primary mirror 2. The small hole 6 is positioned on the coincident focal plane of the focusing mirror 7 and the concave main reflecting mirror 2, and in the laser collimation light path, the stability of the laser optical axis of each wavelength is ensured, and the detection of the parallelism of the emergent laser is assisted. In this embodiment, the small hole 66 has a hole diameter of 20. Mu.m.
The focusing mirror 7 is a lens group, the focusing mirror 7 achromates the A, B, C-wavelength laser, the focusing point position coincides with the focal point position of the concave main reflector 2, the focusing mirror is used for focusing the multi-wavelength laser, and the focusing mirror and the concave main reflector 2 together form a beam expanding system for collimating and expanding the laser.
In order to ensure that the two surfaces of the optical element do not generate self interference, all the light splitting elements comprise a main spectroscope 1, a plane spectroscope 4, a C wavelength dichroic mirror 12 and an A wavelength dichroic mirror 13, wherein one surface is plated with an antireflection film using wavelength, the other surface is plated with a light splitting film or a color splitting film, and the difference of residual reflectivities of the two surfaces is more than ten times.
In this embodiment, one side of the a-wavelength dichroic mirror 13 is coated with a wide-band antireflection film, and the other side is coated with a dichroic film. The A wavelength light beam is highly transparent, and the B wavelength light beam is highly reflective, and the function is to couple the A wavelength and the B wavelength into a coaxial light beam. One side of the C-wavelength dichroic mirror 12 is coated with a wide-band antireflection film, and the other side is coated with a dichroic film. The A wavelength and the B wavelength are high in transmittance, and the C wavelength is high in reflection, so that the A wavelength, the B wavelength and the C wavelength are coupled into coaxial beams.
The a-wavelength dichroic mirror 13 is used to couple the laser light of the a-wavelength laser 14 and the B-wavelength laser 15 into a coaxial beam. The incidence angle of the light beam of the wavelength A dichroic mirror 13 is 45 degrees, one side is coated with a wavelength A antireflection film, the other side is coated with a dichroic film, the transmittance of the wavelength A is more than 95%, and the reflectance of the wavelength B is more than 95%. The C-wavelength dichroic mirror 12 is used to couple the laser light of the C-wavelength laser 16 with the laser light of the a-wavelength laser 14 and the B-wavelength laser 15 into coaxial beams. The incidence angle of the light beam of the wavelength-C dichroic mirror 12 is 45 degrees, one side is coated with an A and wavelength antireflection film, the other side is coated with a dichroic film, the transmittance of the A wavelength and the B wavelength is more than 95%, and the reflectance of the C wavelength is more than 95%.
The A wavelength laser 1414 has a wavelength of 532nm, the B wavelength laser 1515 has a wavelength of 633nm, and the C wavelength laser 1616 has a wavelength of 1064nm.
The surfaces of the first total reflecting mirror 8, the second total reflecting mirror 9, the third total reflecting mirror 10 and the fourth total reflecting mirror 11 are plated with metal silver and medium protective films for turning the light path.
The invention relates to an unobscured catadioptric optical device for multi-wavelength laser collimation and beam measurement, which has the following basic principle:
when the input laser beam is measured, the incident beam passes through the main beam splitter 1, is focused by the concave main reflecting mirror 2, and is incident on the beam splitting surface of the main beam splitter 1 again. The light beam reflected by the beam splitting surface is incident on the turning mirror 3, and the laser reflected by the turning mirror 3 is incident on the light sensing surface of the far-field detector 5 after passing through the plane beam splitter 4. The light sensitive surface of the far field detector 5 is positioned on the focal surface of the concave main reflecting mirror 2.
When the multi-wavelength laser is collimated, the A wavelength laser 14 and the B wavelength laser 15 are coupled into a beam of laser through the A wavelength dichroic mirror 13, and then the coaxial coupling of the laser with three wavelengths is realized through the C wavelength dichroic mirror 12, and the laser with three wavelengths is reflected by the total reflection mirror and then is incident on the focusing mirror 7. The focusing mirror 7 and the concave main reflecting mirror 2 share the focal plane, and form a Newton telescopic system, so that the laser is expanded and collimated, and is transmitted and output from the main spectroscope 1. In the laser collimation light path, each wavelength laser is coupled into a beam of laser beam with excellent optical axis consistency through a dichroic mirror, and then is collimated and emitted through a beam expanding system formed by a focusing mirror 7 and a concave main reflecting mirror 2, and the output laser type and the output laser quantity can be changed or increased and decreased according to the needs. Since both the incident and the outgoing light rays need to pass through the light-splitting plane of the main beam splitter 1 twice, the optical efficiency of the whole device is not more than 25%.
The concave main reflector 2 of the device is a spherical reflector, and the rest elements are mostly plane elements, so that the device has the characteristics of no chromatic aberration, simple processing and high processing quality, and the element substrate material is easy to ensure when in large-caliber application. Compared with a coaxial double-reflection optical system, the device is free of obscuration and has better universality in the aspects of laser measurement and collimation application. Compared with an off-axis reflection type optical system, the device adopts a spherical system, has a larger optical view field and wider system tolerance, is easy to control the optical processing quality, and is easy to assemble an optical system with good quality. In terms of the current technical level, the device reduces the difficulty in optical materials, processing and assembly, and is an optical device with good comprehensive performance which can meet various use requirements.
The invention is not limited to the above-described alternative embodiments, and any person who may derive other various forms of products in the light of the present invention, however, any changes in shape or structure thereof, all falling within the technical solutions defined in the scope of the claims of the present invention, fall within the scope of protection of the present invention.
Claims (9)
1. A catadioptric non-obscuration optical device for laser collimation and beam measurement, characterized by: the device comprises a main spectroscope (1), a concave main reflecting mirror (2), a turning reflecting mirror (3), a plane spectroscope (4), a far-field detector (5), a small hole (6), a focusing mirror (7) and a laser coupling component; when in far-field measurement of laser, the laser sequentially passes through the main spectroscope (1) for transmission, the concave main reflecting mirror (2) for reflection, the main spectroscope (1) for reflection, the turning emitting mirror for reflection and the plane spectroscope (4) for transmission and then reaches the far-field detector (5); when multi-wavelength collimated laser is output, a plurality of laser beams with different wavelengths are sequentially coupled through a laser coupling assembly, focused by a focusing mirror (7) to a small hole (6), reflected by a plane spectroscope (4), reflected by a concave main reflecting mirror (2), reflected by a main spectroscope (1), reflected by the concave main reflecting mirror (2) and transmitted by the main spectroscope (1).
2. A catadioptric non-obscuration optical device for laser collimation and beam measurement according to claim 1, characterised in that: the laser coupling component comprises an A wavelength laser (14), a B wavelength laser (15), a C wavelength laser (16), an A wavelength dichroic mirror (13), a C wavelength dichroic mirror (12), a first total reflection mirror (8), a second total reflection mirror (9), a third total reflection mirror (10) and a fourth total reflection mirror (11); the laser emitted by the A wavelength laser (14) and the laser emitted by the B wavelength laser (15) and reflected by the fourth total reflection mirror (11) are coupled into coupling laser in the coupling component of the A wavelength dichroic mirror (13), the coupling laser is coupled into coupling laser in the coupling component of the C wavelength dichroic mirror (12) by the coupling laser emitted by the C wavelength laser (16) and reflected by the third total reflection mirror (10), and the coupling laser reaches the focusing mirror (7) after being reflected by the second total reflection mirror (9) and the first total reflection mirror (8).
3. A catadioptric non-obscuration optical device for laser collimation and beam measurement according to claim 1, characterised in that: the focal plane of the focusing mirror (7) is coincident with the focal plane of the concave main reflector (2), and the small hole (6) is positioned on the coincident focal plane of the focusing mirror (7) and the concave main reflector (2).
4. A catadioptric non-obscuration optical device for laser collimation and beam measurement according to claim 1, characterised in that: the total inclination angle of the main spectroscope (1) and the plane spectroscope (4) is not more than 60 angular seconds.
5. A catadioptric non-obscuration optical device for laser collimation and beam measurement according to claim 1, characterised in that: the included angle between the normal line of the main spectroscope (1) and the normal line of the main spectroscope (1) is 2-6 degrees, and the center distance between the main spectroscope (1) and the concave main reflecting mirror (2) is 1680-1880 mm.
6. A catadioptric non-obscuration optical device for laser collimation and beam measurement according to claim 1, characterised in that: the transmission surface of the main spectroscope (1) is plated with a 500-1100 nm band broadband antireflection film, and the spectroscopic surface of the main spectroscope (1) is plated with a 500-1100 nm band broadband spectroscopic film.
7. A catadioptric non-obscuration optical device for laser collimation and beam measurement according to claim 1, characterised in that: the curvature radius of the concave main reflector (2) is 2400-2600 mm.
8. A catadioptric non-obscuration optical device for laser collimation and beam measurement according to claim 1, characterised in that: the included angle between the normal line of the plane spectroscope (4) and the incident light beam of the plane spectroscope (4) is 10-14 degrees, the transmission surface of the plane spectroscope (4) is plated with a broadband antireflection film with the wave band of 500-1100 nm, and the light splitting surface of the plane spectroscope (4) is plated with a broadband light splitting film with the wave band of 500-1100 nm.
9. A catadioptric non-obscuration optical device for laser collimation and beam measurement according to claim 1, characterised in that: the diameter of the small hole (6) is 18-20 mu m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211665455.6A CN116047738A (en) | 2022-12-23 | 2022-12-23 | Catadioptric non-obscuration optical device for laser collimation and beam measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211665455.6A CN116047738A (en) | 2022-12-23 | 2022-12-23 | Catadioptric non-obscuration optical device for laser collimation and beam measurement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116047738A true CN116047738A (en) | 2023-05-02 |
Family
ID=86117330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211665455.6A Pending CN116047738A (en) | 2022-12-23 | 2022-12-23 | Catadioptric non-obscuration optical device for laser collimation and beam measurement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116047738A (en) |
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2022
- 2022-12-23 CN CN202211665455.6A patent/CN116047738A/en active Pending
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