CN116026849A - Cleanliness detection system - Google Patents

Cleanliness detection system Download PDF

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Publication number
CN116026849A
CN116026849A CN202310112074.3A CN202310112074A CN116026849A CN 116026849 A CN116026849 A CN 116026849A CN 202310112074 A CN202310112074 A CN 202310112074A CN 116026849 A CN116026849 A CN 116026849A
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lens
detection system
microfluidic chip
cleanliness detection
focal length
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CN202310112074.3A
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CN116026849B (en
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陈龙超
梁倩
王谷丰
赵陆洋
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Shenzhen Sailu Medical Technology Co ltd
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Shenzhen Sailu Medical Technology Co ltd
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Abstract

The invention provides a cleanliness detection system, which is used for detecting a microfluidic chip and comprises a lighting module; the object stage is arranged on the light path of the lighting module and comprises an object carrying surface, and the object carrying surface is used for carrying the microfluidic chip; and the imaging module comprises a lens and an area array camera, the imaging module is used for imaging the light rays emitted by the illumination module and scattered by the microfluidic chip, and the optical axis of the lens is obliquely arranged relative to the object carrying plane. According to the cleanliness detection system, the lens and the area-array camera are arranged, and the optical axis of the lens is obliquely arranged relative to the objective table, namely the microfluidic chip, so that the cleanliness of the microfluidic chip can be detected while the microfluidic chip is cleaned, the microfluidic chip does not need to be repeatedly taken down for cleaning after the microfluidic chip is scanned, and the efficiency is improved.

Description

Cleanliness detection system
Technical Field
The invention relates to a gene sequencer, in particular to a cleanliness detection system of a gene sequencer.
Background
The second generation gene sequencer adopts sequencing-by-synthesis-sequencing (SBS) biochemical reaction process to be completed in a microfluidic chip. After the biochemical reaction is completed, the cleanliness detection system is matched with an electric control displacement table to complete photographing of the DNA clusters in the whole microfluidic chip. In the sequencing process, the surface cleanliness of the microfluidic chip has a remarkable influence on the imaging quality, so that the sequencing result is influenced. The micro-fluidic chip surface cannot be directly distinguished by naked eyes to be polluted by fine dust particles, grease and the like, so that cleanliness is required to be detected through an optical imaging system after cleaning, and the detection is required to be repeated after re-cleaning under the condition that the cleanliness is not satisfied, and the efficiency is low.
Disclosure of Invention
In view of the foregoing, embodiments of the present invention provide a cleanliness detection system.
The embodiment of the invention provides a cleanliness detection system for detecting a micro-fluidic chip, which comprises:
a lighting module;
the object stage is arranged on the light path of the lighting module and comprises an object carrying surface, and the object carrying surface is used for carrying the microfluidic chip; and
the imaging module comprises a lens and an area array camera, the imaging module is used for imaging light rays which are emitted by the illumination module and scattered by the microfluidic chip, and an optical axis of the lens is obliquely arranged relative to the object carrying plane.
In some embodiments, the area camera includes a detection surface, and the optical axis of the lens is disposed obliquely with respect to the detection surface.
In some embodiments, the optical axis of the lens is at the same angle relative to the object plane as the optical axis of the lens is at the detection plane.
In some embodiments, the optical axis of the lens is disposed at an angle of 45 ° with respect to the object plane.
In some embodiments, the lens includes, in order from an object side to an image side, a first lens of positive power, a second lens of positive power, and a third lens of negative power.
In certain embodiments, the ratio of the focal length of the first lens to the focal length of the lens ranges from 0.75 to 0.83.
In certain embodiments, the ratio of the focal length of the second lens to the focal length of the lens ranges from 19.3 to 21.4.
In some embodiments, the ratio of the focal length of the third lens to the focal length of the lens ranges from-1.73 to-1.56.
In some embodiments, the first lens includes a first face toward the object side and a second face toward the image side;
the second lens includes a third face toward the object side and a fourth face toward the image side;
the third lens includes a fifth surface facing the object side and a sixth surface facing the image side.
In some embodiments, the illumination module includes a laser, a beam shaping lens, and an optical fiber connecting the laser and the beam shaping lens.
According to the cleanliness detection system, the lens and the area-array camera are arranged, and the optical axis of the lens is obliquely arranged relative to the objective table, namely the microfluidic chip, so that the cleanliness of the microfluidic chip can be detected while the microfluidic chip is cleaned, the microfluidic chip does not need to be repeatedly taken down for cleaning after the microfluidic chip is scanned, and the efficiency is improved.
Additional aspects and advantages of embodiments of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The foregoing and/or additional aspects and advantages of the invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, in which:
FIG. 1 is a schematic diagram of a cleanliness detection system according to some embodiments of the present invention;
FIG. 2 is an imaging schematic of an imaging module according to some embodiments of the invention;
FIG. 3 is a partial schematic view of FIG. 2;
FIG. 4 is a schematic diagram of the mating of an imaging module and stage according to some embodiments of the invention;
fig. 5 is a lens image quality star map of some embodiments of the invention.
Description of main reference numerals:
the system comprises a cleanliness detection system 100, an illumination module 10, a laser 11, a beam shaping lens 12, an optical fiber 13, a stage 20, a microfluidic chip 21, a carrier surface 22, an imaging module 30, a lens 31, a first lens L1, a first surface 311, a second surface 312, a second lens L2, a third surface 313, a fourth surface 314, a third lens L3, a fifth surface 315, a sixth surface 316, an area array camera 32 and a detection surface 321.
Detailed Description
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only for explaining the present invention and are not to be construed as limiting the present invention.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more of the described features. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically connected, electrically connected or can be communicated with each other; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
The following disclosure provides many different embodiments, or examples, for implementing different features of the invention. In order to simplify the present disclosure, components and arrangements of specific examples are described below. They are, of course, merely examples and are not intended to limit the invention. Furthermore, the present invention may repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, and which do not themselves indicate the relationship between the various embodiments and/or arrangements discussed. In addition, the present invention provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the application of other processes and/or the use of other materials.
In the prior art, an optical fiber guides light emitted by a laser into a beam shaping lens, and the beam shaping lens shapes laser emitted by the optical fiber into linear light spots converged on the surface of a microfluidic chip. The optical axis of the imaging module formed by the camera, the optical filter and the imaging lens is placed at an angle of 45 degrees with the normal line of the surface of the chip, and dark field imaging of the whole surface of the chip is realized in a line scanning mode. Therefore, the chip cleaning is inconvenient to be carried out synchronously by the cooperation of staff, the chip can be taken down for cleaning after the chip is completely scanned in actual operation, and the dirt condition on the surface of the chip can not be observed in real time during cleaning, and the chip can be determined by being put back into the system for scanning imaging.
In view of this, referring to fig. 1, the present invention provides a cleanliness detection system 100, wherein the cleanliness detection system 100 is used for detecting a microfluidic chip 21, and the cleanliness detection system 100 includes an illumination module 10, a stage 20 and an imaging module 30.
Specifically, the cleanliness detection system 100 is used for detecting the cleanliness of the surface of the microfluidic chip 21, where the lighting module 10 is used for emitting surface excitation light, the lighting module 10 includes a laser 11, a beam shaping lens 12 and an optical fiber 13, the laser 11 is used for emitting laser light, the optical fiber 13 is respectively connected with the laser 11 and the beam shaping lens 12, the optical fiber 13 can transmit the laser light emitted by the laser 11 to the beam shaping lens 12, the beam shaping lens 12 is used for changing the shape of the laser output, that is, the beam shaping lens 12 can shape the laser light into regular or irregular shapes such as round, rectangular, etc., and the beam shaping lens 12 of the present invention is preferred to shape the laser light generated by the laser 11 into round surface excitation light.
The objective table 20 is disposed on the optical path of the lighting module 10, the objective table 20 includes an object carrying surface 22, the microfluidic chip 21 is disposed on the object carrying surface 22, the surface excitation light emitted by the lighting module 10 irradiates the object carrying surface 22, that is, the surface excitation light emitted by the lighting module 10 irradiates the microfluidic chip 21, and the surface of the microfluidic chip 21 forms a surface light spot.
The imaging module 30 includes a lens 31 and an area camera 32, and the imaging module 30 is configured to refract and focus scattered light scattered by the microfluidic chip 21 on the object carrier 22 onto the area camera 32 to form an image. The lens 31 is used for refracting and focusing the scattered light, and an optical axis of the lens 31 is obliquely arranged relative to the object-carrying plane 22. The area camera 32 is used for imaging, and the area camera 32 can generate an area image from scattered light of the area excitation light.
In some examples, the lighting module 10 is disposed directly above the stage 20, the lighting module 10 emits surface excitation light toward the object carrying surface 22 of the stage 20, the micro-fluidic chip 21 is disposed on the object carrying surface 22, the lighting module 10 can emit surface excitation light in a circular area to the micro-fluidic chip 21, the micro-fluidic chip 21 scatters the excitation light to the lens 31, after refraction and focusing by the lens 31, an image is formed on the area array camera 32, and a worker can observe the surface dirt condition of the micro-fluidic chip 21 according to real-time imaging of the area array camera 32 and perform cleaning according to imaging of the area array camera 32.
According to the cleanliness detection system 100, the lens 31 and the area array camera 32 are arranged, and the optical axis of the lens 31 is obliquely arranged relative to the objective table 20, namely the micro-fluidic chip 21, so that the cleanliness of the micro-fluidic chip 21 can be detected while the micro-fluidic chip 21 is cleaned, the micro-fluidic chip 21 does not need to be repeatedly taken down for cleaning after finishing scanning, and the efficiency is improved.
Referring to fig. 1, in some embodiments, the area camera 32 includes a detection surface 321, and an optical axis of the lens 31 is disposed obliquely with respect to the detection surface 321.
Specifically, the detection surface 321 of the area camera 32 is used to acquire scattered light passing through the lens 31 and form an image of the microfluidic chip 21. The optical axis of the lens 31 is disposed obliquely with respect to the detection surface 321 of the area camera 32, and the angle of the optical axis of the lens 31 with respect to the carrier surface 22 is substantially the same as the angle of the optical axis of the lens 31 with respect to the detection surface 321, wherein the angle of the optical axis of the lens 31 with respect to the carrier surface 22 is set at 45 °, that is, the angle of the optical axis of the lens 31 with respect to the carrier surface 22 may be 45 °.
Referring to fig. 2 and 3, in some embodiments, by obliquely setting the optical axis of the lens 31 with respect to the detection surface 321, and making the angle of the optical axis of the lens 31 with respect to the detection surface 321 substantially the same as the angle of the optical axis of the lens 31 with respect to the object-carrying surface 22, the defocus of the image plane with a large field of view due to the inclination of the optical axis of the lens 31 with respect to the object-carrying surface 22 is compensated, so that the light rays with different fields of view can be better focused on the detection surface 321, and the cleanliness detection system 100 has a clear imaging condition with a full field of view.
Referring to fig. 4, in some embodiments, the lens 31 includes a first lens L1, a second lens L2, and a third lens L3.
Specifically, the lens 31 includes, in order from the object side to the image side, a first lens L1, a second lens L2, and a third lens L3, that is, the first lens L1 is disposed close to the object plane 22, and the third lens L3 is disposed close to the detection plane 321. The first lens L1, the second lens L2, and the third lens L3 may be made of glass, resin, or the like, wherein the first lens L1 has positive optical power, the second lens L2 has positive optical power, and the third lens L3 has negative optical power. Note that the focal power (focal power) is equal to the difference between the image Fang Guangshu convergence and the object beam convergence, which characterizes the ability of the lens to deflect light.
Further, the surface excitation light emitted by the illumination module 10 irradiates the surface of the microfluidic chip 21, and the scattered light scattered by the microfluidic chip 21 can sequentially pass through the first lens L1, the second lens L2 and the third lens L3 and then be transmitted to the detection surface 321, and an image of the microfluidic chip 21 is formed on the detection surface 321. Wherein, the ratio of the focal length of the first lens L1 to the focal length of the lens 31 ranges from 0.75 to 0.83, that is, the first lens L1 satisfies the conditional expression: 0.75< fl1/f <0.83, fl1 being the focal length of the first lens L1 and f being the focal length of the lens 31. The ratio of the focal length of the second lens L2 to the focal length of the lens 31 ranges from 19.3 to 21.4, that is, the second lens L2 satisfies the conditional expression: 19.3< fl2/f <21.4, fl2 being the focal length of the second lens L2. The ratio of the focal length of the third lens L3 to the focal length of the lens 31 ranges from-1.73 to-1.56, that is, the third lens L3 satisfies the conditional expression: -1.73< fl3/f < -1.56, fl3 being the focal length of the third lens L3.
It should be noted that the first lens L1 and the second lens L2 have positive optical power, that is, the first lens L1 and the second lens L2 are convex lenses, and thus, the ratio of the focal length of the first lens L1 to the focal length of the lens 31 and the ratio of the focal length of the second lens L2 to the focal length of the lens 31 are positive numbers. The third lens L3 has negative optical power, that is, the third lens L3 is a concave lens, and thus, the ratio of the focal length of the third lens L3 to the focal length of the lens 31 is negative.
In this way, by arranging the first lens L1, the second lens L2 and the third lens L3, the lens 31 can enable the scattered light scattered by the microfluidic chip 21 to sequentially pass through the first lens L1, the second lens L2 and the third lens L3, and then form an image of the microfluidic chip 21 on the detection surface 321, and by limiting the ratio of the focal lengths of the first lens L1, the second lens L2 and the third lens L3 to the focal length of the lens 31, the total length of the lens 31 can be effectively shortened, and excessively serious on-axis and off-axis aberrations can be avoided, thereby improving the imaging quality.
In certain embodiments, the first lens L1 comprises a first face 311 facing the carrier face 22 and a second face 312 facing the detection face 321, the second lens L2 comprises a third face 313 facing the carrier face 22 and a fourth face 314 facing the detection face 321, and the third lens L3 comprises a fifth face 315 facing the carrier face 22 and a sixth face 316 facing the detection face 321.
The design parameters of the lens 31 of the present invention can be as shown in table one:
sequence number Radius of curvature/mm Thickness/mm Refractive index Abbe number
1 149.868
2 89.96 15 2.02 21
3 -425.311 4.856
4 -44.666 14.619 1.89 38.07
5 -50.212 63.07
6 -32.587 5 1.69 31.25
7 -50.694 99.369
List one
Referring to fig. 4 and table one, the distance between the center of the first surface 311 and the center of the stage 20 is 149.868mm. The first surface 311 and the second surface 312 are convex, the radius of curvature of the first surface 311 is 89.96mm, the radius of curvature of the second surface 312 is-425.311 mm, and the distance between the first surface 311 and the second surface 312 is 15mm, that is, the thickness of the first lens L1 is 15mm. The third surface 313 is concave, the radius of curvature of the third surface 313 is-44.666 mm, the fourth surface 314 is convex, the radius of curvature of the fourth surface 314 is-50.212 mm, and the distance between the third surface 313 and the fourth surface 314 is 14.619mm, that is, the thickness of the second lens L2 is 14.619mm. The fifth surface 315 is concave, the radius of curvature of the fifth surface 315 is-32.587 mm, the sixth surface 316 is convex, the radius of curvature of the sixth surface 316 is-50.694 mm, and the interval between the fifth surface 315 and the sixth surface 316 is 5mm, that is, the thickness of the third lens L3 is 5mm. The spacing between the center of the sixth face 316 and the center of the detection face 321 is 99.369mm.
Further, the distance between the first lens L1 and the second lens L2 is 4.856mm, and the distance between the second lens L2 and the third lens L3 is 63.07mm. The refractive index of the first lens L1 may be 2.02, and the refractive index refers to a ratio of a propagation speed of light in vacuum to a propagation speed of light in the medium, and the higher the refractive index, the higher the ability to refract incident light. The abbe number of the first lens L1 may be 21, which is commonly used in the field of lenses, and is used to measure the dispersive power of the lens. The refractive index of the second lens L2 may be 1.89, and the abbe number of the second lens L2 may be 38.07. The refractive index of the third lens L3 may be 1.69, and the abbe number of the third lens L3 may be 31.25.
It should be noted that, the design parameters related to the lens 31 in the above embodiment are preferred embodiments of the present invention, wherein the radius of curvature in the embodiment of the present invention is positive when the direction of propagation of the light is convex, and negative when the direction of propagation of the light is concave, and the positive and negative of the radius of curvature are only used to determine the bending direction of the curved surface. In practical applications, the relevant design parameters of the lens 31 may be configured according to practical requirements, which is not limited herein.
Further, as shown in fig. 5, the image quality star point diagram of the lens 31 under the condition that the illumination wavelength is 532nm in the embodiment of the invention shows that the image quality of the lens 31 in the 20mm field of view is close to the diffraction limit, which means that the full field of view of the lens 31 is clear, therefore, the illumination module 10 can provide the surface excitation light with the illumination wavelength of 532nm, for example, in the embodiment of the invention, the illumination module 10 can provide the surface excitation light with the 20mm circular area, so as to realize the matching of the illumination area and the imaging area. It should be noted that, the image quality star point chart is an effect chart of detecting the imaging quality of the lens 31 by using a star point method, in which a star point plate with micropores is placed on the object carrying surface 22 and well illuminated is obtained, the scattered light of the star point plate is transmitted to the area array camera 32 through the lens 31, and the imaging quality of the lens 31 is evaluated by observing the imaging shape and size of the area array camera 32.
In some examples, the lighting module 10 is disposed directly above the object-carrying surface 22, the lighting module 10 emits excitation light toward the object-carrying surface 22, the micro-fluidic chip 21 is disposed on the object-carrying surface 22, the lighting module 10 can emit surface excitation light with an illumination wavelength of 532nm and in a circular area of 20mm to the micro-fluidic chip 21, the micro-fluidic chip 21 scatters the excitation light to the lens 31, the scattered light sequentially passes through the first lens L1, the second lens L2 and the third lens L3 and is imaged on the area-array camera 32, and a worker can observe the surface dirt condition of the micro-fluidic chip 21 according to real-time imaging of the area-array camera 32 and can clean according to imaging of the area-array camera 32.
In this way, by setting various design parameters of the lens 31 and setting the illumination wavelength and the illumination area of the illumination module 10, the image quality in the visual field range of the lens 31 can be close to the diffraction limit, so that the imaging quality is improved, a worker can clearly observe the cleanliness of the microfluidic chip 21 while cleaning the microfluidic chip 21, and the cleaning efficiency is improved.
The foregoing examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.

Claims (10)

1. A cleanliness detection system for detecting a microfluidic chip, the cleanliness detection system comprising:
a lighting module;
the object stage is arranged on the light path of the lighting module and comprises an object carrying surface, and the object carrying surface is used for carrying the microfluidic chip; and
the imaging module comprises a lens and an area array camera, the imaging module is used for imaging light rays which are emitted by the illumination module and scattered by the microfluidic chip, and an optical axis of the lens is obliquely arranged relative to the object carrying plane.
2. The cleanliness detection system according to claim 1, wherein the area camera comprises a detection surface, and the optical axis of the lens is disposed obliquely with respect to the detection surface.
3. The cleanliness detection system according to claim 2, wherein the angle of the optical axis of the lens with respect to the object plane is the same as the angle of the optical axis of the lens with respect to the detection plane.
4. A cleanliness detection system according to claim 3 wherein the optical axis of the lens is disposed at an angle of 45 ° to the object plane.
5. The cleanliness detection system according to claim 3, wherein the lens comprises, in order from the object side to the image side, a first lens of positive optical power, a second lens of positive optical power, and a third lens of negative optical power.
6. The cleanliness detection system according to claim 5, wherein a ratio of a focal length of the first lens to a focal length of the lens is in a range of 0.75 to 0.83.
7. The cleanliness detection system according to claim 5, wherein the ratio of the focal length of the second lens to the focal length of the lens is in the range of 19.3 to 21.4.
8. The cleanliness detection system according to claim 5, wherein the ratio of the focal length of the third lens to the focal length of the lens is in the range of-1.73 to-1.56.
9. The cleanliness detection system of claim 5, wherein the first lens comprises a first face toward the object side and a second face toward the image side;
the second lens includes a third face toward the object side and a fourth face toward the image side;
the third lens includes a fifth surface facing the object side and a sixth surface facing the image side.
10. The cleanliness detection system of claim 1 wherein the illumination module comprises a laser, a beam shaping lens, and an optical fiber connecting the laser and the beam shaping lens.
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Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2729694Y (en) * 2004-07-30 2005-09-28 中国科学院上海光学精密机械研究所 Optical apparatus of light scattering dust particle measuring gauge
CN101639435A (en) * 2009-08-10 2010-02-03 中国人民解放军军事医学科学院卫生装备研究所 Particle counter
CN102906557A (en) * 2010-03-15 2013-01-30 伯乐实验室有限公司 Microassembled imaging flow cytometer
JP2014123097A (en) * 2012-12-21 2014-07-03 Konica Minolta Inc Image capturing lens
KR101421199B1 (en) * 2013-03-12 2014-07-22 주식회사 세코닉스 Lens system for head mounted display
CN104568857A (en) * 2015-01-29 2015-04-29 山东大学 Method and device for novel two-dimensional light scattering static cytometer
CN107907521A (en) * 2017-12-13 2018-04-13 广东顺德墨赛生物科技有限公司 micro-fluidic detection system
CN109709025A (en) * 2019-02-12 2019-05-03 军事科学院系统工程研究院卫勤保障技术研究所 A kind of multi-modality imaging optical system
CN112098333A (en) * 2020-11-17 2020-12-18 北京领邦智能装备股份公司 High-precision imaging system and method, image acquisition device and detection equipment
CN112269242A (en) * 2020-11-23 2021-01-26 中国科学院自动化研究所苏州研究院 High-resolution oblique image lens
CN112858191A (en) * 2020-12-30 2021-05-28 清华大学 Flow type imaging system based on spectral marking method and optical frequency sweeping method
US20210161385A1 (en) * 2018-05-10 2021-06-03 Board Of Regents, The University Of Texas System Line excitation array detection microscopy
CN113624666A (en) * 2021-09-07 2021-11-09 清华大学 Stream type imaging system based on dot matrix laser scanning
CN215986689U (en) * 2021-09-15 2022-03-08 浙江舜宇光学有限公司 Optical imaging system

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2729694Y (en) * 2004-07-30 2005-09-28 中国科学院上海光学精密机械研究所 Optical apparatus of light scattering dust particle measuring gauge
CN101639435A (en) * 2009-08-10 2010-02-03 中国人民解放军军事医学科学院卫生装备研究所 Particle counter
CN102906557A (en) * 2010-03-15 2013-01-30 伯乐实验室有限公司 Microassembled imaging flow cytometer
JP2014123097A (en) * 2012-12-21 2014-07-03 Konica Minolta Inc Image capturing lens
KR101421199B1 (en) * 2013-03-12 2014-07-22 주식회사 세코닉스 Lens system for head mounted display
CN104568857A (en) * 2015-01-29 2015-04-29 山东大学 Method and device for novel two-dimensional light scattering static cytometer
CN107907521A (en) * 2017-12-13 2018-04-13 广东顺德墨赛生物科技有限公司 micro-fluidic detection system
US20210161385A1 (en) * 2018-05-10 2021-06-03 Board Of Regents, The University Of Texas System Line excitation array detection microscopy
CN109709025A (en) * 2019-02-12 2019-05-03 军事科学院系统工程研究院卫勤保障技术研究所 A kind of multi-modality imaging optical system
CN112098333A (en) * 2020-11-17 2020-12-18 北京领邦智能装备股份公司 High-precision imaging system and method, image acquisition device and detection equipment
CN112269242A (en) * 2020-11-23 2021-01-26 中国科学院自动化研究所苏州研究院 High-resolution oblique image lens
CN112858191A (en) * 2020-12-30 2021-05-28 清华大学 Flow type imaging system based on spectral marking method and optical frequency sweeping method
CN113624666A (en) * 2021-09-07 2021-11-09 清华大学 Stream type imaging system based on dot matrix laser scanning
CN215986689U (en) * 2021-09-15 2022-03-08 浙江舜宇光学有限公司 Optical imaging system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
阿克赛尔.多涅斯: "《大功率射频板条CO2激光器》", 华中科技大学出版社, pages: 226 - 227 *

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