CN116026565A - Grating diffraction efficiency detection system and detection method thereof - Google Patents
Grating diffraction efficiency detection system and detection method thereof Download PDFInfo
- Publication number
- CN116026565A CN116026565A CN202211687493.1A CN202211687493A CN116026565A CN 116026565 A CN116026565 A CN 116026565A CN 202211687493 A CN202211687493 A CN 202211687493A CN 116026565 A CN116026565 A CN 116026565A
- Authority
- CN
- China
- Prior art keywords
- grating
- micro
- detected
- light
- nano
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a grating diffraction efficiency detection system and a detection method thereof, wherein the detection system comprises the following steps: the sample platform is rotatably arranged above the bearing platform; the incidence assembly comprises a light source aligned to the sample table, a light beam modulator arranged on the light emergent path of the light source and a polarization modulator arranged on the light emergent path of the light beam modulator; the lens component is aligned with the micro-nano grating to be measured and diffracts the light beam; the first imaging lens is arranged on the light emergent path of the lens assembly; the beam splitter is arranged on the light-emitting path of the first imaging lens; the first photoelectric detection device is arranged on a reflection light path of the beam splitter; and the second photoelectric detection device is arranged on a transmission light path of the beam splitter and is arranged on a light emergent light path of the second imaging lens. The invention solves the problem that the traditional macroscopic grating diffraction efficiency measurement scheme can not detect the diffraction efficiency of the micro-area of the micro-nano diffraction grating.
Description
Technical Field
The invention relates to the technical field of grating detection equipment, in particular to a grating diffraction efficiency detection system and a detection method thereof.
Background
With the rapid development of the information age, virtual reality (including augmented reality and mixed reality) has become the leading direction of development of new generation information technology. At the same time, micro-nano photonics has also achieved tremendous striding development. The micro-nano photonics and the virtual reality are combined, and light waves are controlled and regulated in a micro-nano scale, so that the light and thin, integrated and miniaturized virtual reality equipment is realized. The micro-nano diffraction grating is one of the most representative optical elements, and is widely applied to important prospective optical modules such as diffraction optical waveguide, spatial light modulator, laser radar and the like.
The micro-nano diffraction grating is different from the reticle grating in the traditional spectrometer, spectrophotometer and other equipment, has the morphological characteristic parameters of tens to hundreds of nano scale, and can be processed and prepared by an electron beam etching process, a photoetching process and a nanoimprint process. With further development of the preparation process and deep design and research, micro-nano diffraction gratings have achieved many subversion changes. The periodic variation of the single morphology is converted into the same grating period under the macro scale, but the morphology is designed on the microcosmic scale, so that different diffraction efficiency distribution is realized in different microcosmic areas of one grating, and the optimal effect of regulating and controlling the light waves is achieved. Because the area scale of the same appearance on the grating microcosmic is tens of micrometers, the traditional macroscopic grating diffraction efficiency measurement scheme is not applicable any more, and the related technology is blank in China and internationally. The traditional macroscopic grating diffraction efficiency measurement scheme cannot detect diffraction efficiency of a micro-area of a micro-nano scale diffraction grating.
The information disclosed in this background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person of ordinary skill in the art.
Disclosure of Invention
In order to overcome the defects existing in the prior art, a grating diffraction efficiency detection system and a detection method thereof are provided, so as to solve the problem that the traditional macroscopic grating diffraction efficiency measurement scheme cannot detect the diffraction efficiency of the micro-nano-scale diffraction grating in the micro-area.
To achieve the above object, there is provided a grating diffraction efficiency detection system including:
the sample platform for installing the micro-nano grating to be detected is rotatably arranged above the bearing platform;
the incidence assembly comprises a light source aligned to the sample table, a light beam modulator arranged on a light emergent path of the light source and a polarization modulator arranged on the light emergent path of the light beam modulator;
the lens component is aligned with the micro-nano grating to be measured and the diffraction beam of the lens component;
the first imaging lens is arranged on the light emergent path of the lens assembly;
the beam splitter is arranged on the light-emitting path of the first imaging lens;
the first photoelectric detection device is used for collecting imaging of the micro-nano grating to be detected and is arranged on a reflection light path of the beam splitter;
the second photoelectric detection device is used for collecting images of the micro-nano grating to be detected passing through the optical Fourier surface of the lens assembly, a second imaging lens is arranged on a transmission light path of the beam splitter, and the second photoelectric detection device is arranged on a light emitting light path of the second imaging lens.
Furthermore, the incidence component is installed on the bearing platform in a turnover manner by taking the region to be detected of the micro-nano grating to be detected as a circle center.
Further, the device also comprises a third photoelectric detection device for collecting zero-order diffraction signals of the micro-nano grating to be detected, the third photoelectric detection device is aligned to the reflected light beam of the micro-nano grating to be detected, and a light beam collector is arranged between the third photoelectric detection device and the micro-nano grating to be detected.
Further, the first photoelectric detection device, the second photoelectric detection device and the third photoelectric detection device are any one of a CCD camera, a spectrophotometer and a spectrometer respectively.
Further, the lens component is an objective lens.
Further, the lens assembly is a flat field achromatic large numerical aperture objective lens.
The invention provides a detection method of a grating diffraction efficiency detection system, which comprises the following steps:
installing the micro-nano grating to be detected on a sample table above a bearing table;
rotating the sample stage to enable the micro-nano grating to be detected to be aligned with an incidence component, and enabling a lens component to be aligned with the micro-nano grating to be detected and a diffraction beam thereof;
turning on the light source formed by incidence;
after the light source outputs a stable light beam, the stable light beam is shaped through a light beam modulator of the incidence assembly, so that the stable light beam has high collimation and uniform intensity distribution, and the diameter of the stable light beam is controlled;
after the stable light beam is shaped, the polarization modulator of the incidence component adjusts the shaped stable light beam to form an incidence light beam with a specific polarization state;
the incident light beam is incident on the micro-nano grating to be detected at a preset incident angle, and after being diffracted by the micro-nano grating, the lens component collects the diffracted light beam of the micro-nano grating;
the first photoelectric detection device acquires imaging of the micro-nano grating to be detected through a reflection light path of the first imaging lens and the beam splitter;
when the image of the micro-nano grating to be detected is clear, the second photoelectric detection device acquires the image of the micro-nano grating to be detected through the optical Fourier surface of the lens component at one time through the transmission light path of the first imaging lens and the beam splitter so as to obtain the diffraction intensity of the micro-nano grating to be detected along with the diffraction angle (theta dif ) And the distribution I of the wavelength (lambda) dif （θ dif ，λ）；
The micro-nano grating to be detected is moved out of the sample stage, and the second photoelectric detection device collects the incident light beam to obtain the intensity I of the incident light beam source ；
Based on the distribution I of diffraction intensity of the micro-nano grating to be detected along with diffraction angle and wavelength dif （θ dif Lambda) and the intensity I of the incident light beam source And calculating to obtain the diffraction efficiency of the micro-nano grating to be measured.
The grating diffraction efficiency detection system and the method thereof have the beneficial effects that the rapid and efficient detection of the diffraction efficiency of the local micro-area of the micro-nano diffraction grating is facilitated. Under the condition of configuring an area array spectrometer, the diffraction efficiency distribution of the micro-nano grating local microscopic region to be detected along with angles and wavelengths can be obtained only by spectrum acquisition once. The grating diffraction efficiency detection system and the method thereof are different from the principle of the traditional grating diffraction efficiency detection method, and the second photoelectric detection device is used for detecting the image of the micro-nano grating to be detected passing through the optical Fourier surface of the lens component, so that mechanical scanning of different diffraction angles is not needed, and diffraction information of all diffraction angles can be obtained through one-time imaging. In another aspect, the first photoelectric detection device is used for collecting information of the micro-nano grating sample to be detected in real space, so that the micro-area of the micro-nano grating sample to be detected, which is measured by the specific second photoelectric detection device, can be observed and determined in real time.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the detailed description of non-limiting embodiments, made with reference to the following drawings, in which:
fig. 1 is a schematic structural diagram of a grating diffraction efficiency detection system according to an embodiment of the present invention.
Fig. 2 is a schematic view of a transmission mode of an incident module according to an embodiment of the invention.
Fig. 3 is a layout diagram of a third photoelectric detection device according to an embodiment of the present invention.
Fig. 4 is a side view of an incident assembly structure according to an embodiment of the invention.
Fig. 5 is a side view of an incident assembly transmission mode structure according to an embodiment of the invention.
Fig. 6 is a schematic diagram of diffraction efficiency distribution of a one-dimensional chromium nano-grating according to an embodiment of the present invention.
FIG. 7 is a graph showing diffraction efficiency of a one-dimensional chromium nano-grating according to diffraction angle.
FIG. 8 is a graph showing diffraction efficiency of a one-dimensional chromium nano-grating according to an embodiment of the present invention.
Fig. 9 is a graph showing diffraction efficiency versus angle and wavelength for a commercial blazed grating in accordance with an embodiment of the present invention.
Detailed Description
The present application is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be noted that, for convenience of description, only the portions related to the invention are shown in the drawings.
It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other. The present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
Referring to fig. 1 to 7, the present invention provides a grating diffraction efficiency detection system including: the device comprises a bearing platform 1, an incidence assembly 2, a lens assembly 3, a first imaging lens 4, a beam splitter 5, a first photoelectric detection device 6 and a second photoelectric detection device 7.
The bearing platform provides a stable working environment for the whole detection system. A sample stage 11 is rotatably mounted above the stage 1. The sample stage 11 is used for installing the micro-nano grating to be measured.
In this embodiment, the micro-nano grating to be measured is a micro-nano diffraction grating. Specifically, the sample stage 11 has a disc shape. A driving motor 13 is arranged below the sample stage. The output end of the driving motor is coaxially connected with the sample stage. The driving motor is arranged on the bearing platform and drives the sample platform to rotate. Preferably, the bearing platform is provided with a heightening cylinder, and the heightening cylinder is supported on the driving motor. The driving motor is fixedly arranged at the telescopic end of the height-adjusting cylinder. The fixed end of the height-adjusting cylinder is arranged on the bearing platform.
The entrance assembly 2 comprises a light source 21, a beam modulator 22 and a polarization modulator 23. The light source 21 is aligned with the sample stage 11. The beam modulator 22 is disposed on the light-emitting path of the light source 21. The polarization modulator 23 is disposed on the light outgoing path of the beam modulator 22.
The light source is a monochromatic laser light source or a wide-spectrum light source, and the power stability of the output of the light source is required to be high.
The light beam modulator is a light beam control component for shaping an incident light source, so that the output light source has high collimation and uniform intensity distribution, and the diameter of the light beam can be controlled.
The polarization modulator is a polarizer or a polarization adjusting component combining the polarizer and a wave plate. The polarization modulator is used to produce an incident light beam of a particular polarization state.
In some embodiments, the incident component 2 is mounted on the platform 1 in a reversible manner with the region to be detected of the micro-nano grating to be detected as a center. Specifically, referring to fig. 4 and 5, a jacking cylinder 12 is mounted on the table. The incident assembly is installed on the jacking cylinder in an angle adjustable mode. Specifically, the incidence assembly is integrally arranged along the preset light incidence direction of the micro-nano grating to be detected. The middle part of incident subassembly articulates in the flexible end of jacking cylinder through articulated subassembly. The hinge assembly may adjust a pitch angle of the incident assembly such that the incident assembly is disposed along a predetermined incident angle.
The lens assembly 3 is aligned with the micro-nano grating to be measured and the diffracted light beam.
The first imaging lens 4 is disposed on the light-emitting path of the lens assembly 3.
The beam splitter 5 is disposed on the light outgoing path of the first imaging lens 4.
The first photodetector 6 is disposed on the reflected light path of the beam splitter 5. The first photoelectric detection device 6 is used for collecting images of the micro-nano gratings to be detected.
The transmission path of the beam splitter 5 is provided with a second imaging lens 71. The second photodetector 7 is disposed on the light-emitting path of the second imaging lens 71. The second photoelectric detection device 7 is used for collecting an image of the optical Fourier surface of the micro-nano grating to be detected passing through the lens component 3.
The lens assembly is a microscope objective or a lens group functionally equivalent to an objective. The lens assembly is used for magnifying a microscopic region and performing optical Fourier transform to realize conversion from a real space to a momentum space.
In this embodiment, the lens assembly 3 is an objective lens. The lens assembly 3 is a flat field achromatic large numerical aperture objective lens.
The beam splitter is a beam splitting cube or a beam splitting piece. In the present invention, a mirror that can cut in and out the optical path can be used instead at the corresponding position of the beam splitter of the whole system.
The first, second and third photo-detecting devices 8 are each any one of a CCD (charge coupled device) camera, a spectrophotometer, and a spectrometer. The spectrometer is an area array spectrometer.
In the invention, an incidence component is rotatably arranged on a bearing platform by taking a region to be detected of a micro-nano grating to be detected as a circle center, and is used for detecting diffraction efficiency of a micro-region of the grating under a specific incidence angle, and a light source, a light beam modulator and a polarization modulator are integrated on the same reversible incidence component on the basis that the incidence angle is determined so as to realize incidence at different angles. As shown in figure 5 of the drawings, the incident component can be turned over to the lower part of the sample stage so as to expand the diffraction efficiency detection capability, so that the diffraction efficiency detection of the reflective grating sample and the diffraction efficiency detection of the transmissive grating sample can be realized. Under different excitation angles, the diffraction efficiency of the grating has rich optical information along with the wavelength and diffraction angle distribution, and the diffraction efficiency of the grating micro-light area can be comprehensively and quantitatively measured and analyzed.
Referring again to fig. 3, in some embodiments, the grating diffraction efficiency detection system of the present invention further comprises a third photodetector device 8. The third photoelectric detection device 8 is used for collecting zero-order diffraction signals of the micro-nano grating to be detected. The third photo-detection device 8 is aligned to the reflected light beam of the micro-nano grating to be detected. A beam collector 81 is arranged between the third photoelectric detection device 8 and the micro-nano grating to be detected.
The detection of the zero-order diffraction signal is realized through the beam collector and the third photoelectric detection device in the reflection direction of the incident beam of the whole detection system. The beam dump is a beam converging element such as a lens or a lens group. The third photodetection device is a detector with energy perception of light, such as a CCD camera, spectrophotometer or spectrometer.
When the incident light source is of a single wavelength, the third photoelectric detection device can detect the reflection intensity by using a common CCD camera; when the light source is a broadband light source, the third photoelectric detection device needs to use a spectrophotometer or a spectrometer to realize wavelength-resolved reflection spectrum detection.
The invention provides a detection method of a grating diffraction efficiency detection system, which comprises the following steps:
s1: and the micro-nano grating to be measured is arranged on a sample table 11 above the bearing table 1.
S2: the sample stage 11 is rotated so that the micro-nano grating to be measured is aligned with the incidence component 2 and the lens component 3 is aligned with the micro-nano grating to be measured and the diffraction beam thereof.
S3: the light source 21 of the entrance assembly is turned on.
S4: after the light source 21 outputs the stable light beam, the stable light beam is shaped by the light beam modulator 22 of the incidence component 2, so that the collimation of the stable light beam is high, the intensity distribution is uniform, and the diameter of the stable light beam is controlled.
S5: after shaping the stabilized beam, the polarization modulator 23 of the entrance assembly 2 adjusts the shaped stabilized beam to form an incident beam of a particular polarization state.
S6: the incident light beam is incident on the micro-nano grating to be detected at a preset incident angle, and after being diffracted by the micro-nano grating, the lens component 3 collects the diffracted light beam of the micro-nano grating.
S7: the first photo-detection device 6 collects an image of the micronano-grating to be detected via the reflected light path of the first imaging lens 4 and the beam splitter 5.
S8: in-situ micro-nano grating to be measuredWhen the imaging of the micro-nano grating to be measured is clear, the second photoelectric detection device 7 acquires the image of the micro-nano grating to be measured on the optical Fourier surface of the lens component 3 through the transmission light path of the first imaging lens 4 and the beam splitter 5 at one time so as to obtain the diffraction angle (theta dif ) And the distribution I of the wavelength (lambda) dif （θ dif ，λ）。
S9: the micro-nano grating to be detected is moved out of the sample stage 11, the incidence component is rotated to a transmission position below the sample stage, and the second photoelectric detection device 7 collects the incident light beam to obtain the intensity I of the incident light beam source 。
S10: distribution I of diffraction intensity along with angle and wavelength based on micro-nano grating to be detected dif (θ dif Lambda) and the intensity I of the incident light beam source And calculating to obtain the diffraction efficiency of the micro-nano grating to be measured.
The light wave generated by the light source is modulated by the light beam shape and polarization of the light beam modulator and the deflection modulator of the incidence component and then is modulated by a certain incidence angle theta in Incident on the micro-nano diffraction grating to be measured placed on the sample stage. After diffraction by the grating, the diffraction signals from the different angles produced by the grating structure in the microscopic region will be collected by the lens assembly and converged to different spatial positions at the back focal plane 30 (optical fourier plane or momentum space plane) of the lens assembly. On the one hand, after passing through the first imaging lens and the beam splitter, the image of the micro-area of the grating is collected by the first photoelectric detector and is used for determining the position of the micro-area of the measured grating; on the other hand, the back focal plane is imaged onto the second photodetection device via the first imaging lens and the second imaging lens. The first imaging lens and the second imaging lens are plano-convex lenses.
If the light source is a monochromatic light source or a light source with continuously adjustable wavelength, the second photoelectric detection device can use a common detector; if the light source is a light source with a wide spectrum, the second photoelectric detection device needs to be replaced by a spectrophotometer or a spectrometer to realize the angle and wavelength resolution of grating diffraction, namely the distribution of diffraction efficiency along with the wavelength and the angle.
In order to further explain the application effects of the grating diffraction efficiency detection system and the method of the present invention, the following embodiments are specifically described.
Example 1
In this example, the national first-class standard substance "one-dimensional chromium nano-grating substance" (number GBW 13982) prepared by the university of Tongji is taken as an example. The period of the one-dimensional chromium nano grating is a=212.8nm, and the diffraction information of the grating is in a short wave range according to a diffraction formula. Specifically, at θ in Incident at 70 DEG, theta dif Scanning the received diffraction signal in the range of-55 DEG to 55 DEG, and selecting s polarization direction by polarization.
Specifically, the light source is a white light source. The first photoelectric detection device is a CCD camera, and the second photoelectric detection device is an area array spectrometer.
According to the sequence of figure 3 of the accompanying drawings, the optical element is placed, the light source is turned on for preheating, and the output power of the light source is ensured to be stable. Placing the grating to be measured on a sample stage, adjusting a beam modulator to make an incident beam at an angle theta in 70 DEG irradiates the grating to be measured, and the angle of the beam collector makes theta dif ＝-θ in And then adjusting the height of the sample stage to enable incident light to be reflected to the light beam modulator after passing through the sample of the grating to be detected, wherein the energy detected by the third photoelectric detector is maximum so as to determine the sample surface of the grating to be detected. Meanwhile, after a grating region to be detected can be clearly seen in a CCD camera, an area array spectrometer is utilized to collect grating diffraction signals, wherein the diffraction orientation of the grating is overlapped with a slit of the area array spectrometer by rotating a sample table, and the distribution I of diffraction intensity of the micro-region grating along with angles and wavelengths can be obtained only by spectrum collection once dif (θ dif Lambda). In the measuring process, a light source is required to be collected, specifically, after a grating sample to be measured is moved out of a poplar platform, intensity collection I is carried out source . The diffraction efficiency of the grating micro-region can then be obtained as shown in the following formula:
finally, the measured diffraction efficiency of the one-dimensional chromium nano-grating is distributed along with angles and wavelengths as shown in figures 6 to 8 of the accompanying drawings.
Example two
In this embodiment, the micro-nano grating to be measured is a commercial blazed grating. As shown in fig. 2, 5 and 9, the incident light beam is incident on the commercial blazed grating at 0 degrees, and after being diffracted by the grating, the diffraction signals of different wavelengths and different diffraction orders are collected by the lens assembly at different angles and are converged at different space positions of the back focal plane of the lens assembly. And a high-resolution area array spectrometer (namely a second photoelectric detection device) is used for collecting diffraction signals. The slit of the area array spectrometer needs to coincide with the diffraction orientation of the grating to be measured so as to obtain accurate diffraction efficiency. The measurement results are shown in fig. 9, where there are a plurality of diffraction orders in the measured wavelength range.
Specifically, according to the sequence of figure 2 of the accompanying drawings, the optical element is placed, the light source is turned on for preheating, and the stable output power of the light source is ensured. Placing the grating to be measured on a sample stage, and adjusting the sample stage so that the incident beam is at an angle θ in The optical grating to be measured is irradiated with the light of 0 DEG, and the height of the sample stage is adjusted so that the detected optical grating area can be clearly seen in the first photoelectric detection device (camera). Collecting grating diffraction signals by using a second photoelectric detection device (area array spectrometer), wherein the diffraction orientation of the grating is overlapped with the slit of the area array spectrometer by rotating the sample table, and the distribution I of diffraction intensity of the micro-area grating along with angles and wavelengths can be obtained by collecting the spectrum only once dif (θ dif Lambda). It should be noted that the light source is required to be collected during the measurement, and the intensity of the light source is detected by removing the sample for intensity collection I source . The diffraction efficiency of the grating micro-region can then be obtained
The grating diffraction efficiency detection system and the method thereof are beneficial to the rapid and efficient detection of the diffraction efficiency of the local microscopic region of the micro-nano diffraction grating. Under the condition of configuring an area array spectrometer, the diffraction efficiency distribution of the micro-nano grating local microscopic region to be detected along with angles and wavelengths can be obtained only by spectrum acquisition once. Meanwhile, the high-freedom adjustment of the incident angle is supported, and the optical grating is compatible with transmission type and reflection type optical grating samples. The grating diffraction efficiency detection system based on micro-region angular resolution imaging, provided by the invention, is combined with an automatic wafer scanning sample stage, can also provide high-efficiency analysis means and standards for morphology measurement, quality control and classification of the diffraction grating of the wafer-level diffraction optical waveguide, and is beneficial to the development of the fields of virtual reality, augmented reality, mixed reality and micro-nano photonics in China.
Different from the principle of the traditional grating diffraction efficiency detection method, the invention records the optical Fourier surface of the lens component through the second photoelectric detection device, does not need to scan at different angles, and can obtain diffraction information of all diffraction angles through one-time imaging. The angles of the light corresponding to the different positions in the optical fourier plane are different, so that only one imaging is needed. In another aspect, a sample in real space is collected by the first photo-detection device, so as to observe and determine in real time the microscopic region of the grating sample to be measured, which is measured by the specific second photo-detection device.
The foregoing description is only of the preferred embodiments of the present application and is presented as a description of the principles of the technology being utilized. It will be appreciated by persons skilled in the art that the scope of the invention referred to in this application is not limited to the specific combinations of features described above, but it is intended to cover other embodiments in which any combination of features described above or equivalents thereof is possible without departing from the spirit of the invention. Such as the above-described features and technical features having similar functions (but not limited to) disclosed in the present application are replaced with each other.
Claims (7)
1. A grating diffraction efficiency detection system, comprising:
the sample platform for installing the micro-nano grating to be detected is rotatably arranged above the bearing platform;
the incidence assembly comprises a light source aligned to the sample table, a light beam modulator arranged on a light emergent path of the light source and a polarization modulator arranged on the light emergent path of the light beam modulator;
the lens component is aligned with the micro-nano grating to be measured and the diffraction beam of the lens component;
the first imaging lens is arranged on the light emergent path of the lens assembly;
the beam splitter is arranged on the light-emitting path of the first imaging lens;
the first photoelectric detection device is used for collecting the image of the micro-nano grating to be detected and is arranged on the reflection light path of the beam splitter;
the second photoelectric detection device is used for collecting images of the micro-nano grating to be detected passing through the optical Fourier surface of the lens assembly, a second imaging lens is arranged on a transmission light path of the beam splitter, and the second photoelectric detection device is arranged on a light emitting light path of the second imaging lens.
2. The grating diffraction efficiency detection system according to claim 1, wherein the incident component is mounted on the platform in a reversible manner with the micro-nano grating to be detected area to be detected as a center.
3. The grating diffraction efficiency detection system of claim 1, further comprising a third photo-detection device for collecting zero-order diffraction signals of the micro-nano grating to be detected, wherein the third photo-detection device is aligned to the reflected light beam of the micro-nano grating to be detected, and a light beam collector is arranged between the third photo-detection device and the micro-nano grating to be detected.
4. The grating diffraction efficiency detection system according to claim 3, wherein the first, second, and third photodetectors are each any one of a CCD camera, a spectrophotometer, and a spectrometer.
5. The grating diffraction efficiency detection system of claim 1, wherein the lens assembly is an objective lens.
6. The grating diffraction efficiency detection system of claim 5, wherein the lens assembly is a flat field achromatic large numerical aperture objective lens.
7. A detection method of the grating diffraction efficiency detection system according to any one of claims 1 to 6, comprising the steps of:
installing the micro-nano grating to be detected on a sample table above a bearing table;
rotating the sample stage to enable the micro-nano grating to be detected to be aligned with an incidence component, and enabling a lens component to be aligned with the micro-nano grating to be detected and a diffraction beam thereof;
turning on the light source formed by incidence;
after the light source outputs a stable light beam, the stable light beam is shaped through a light beam modulator of the incidence assembly, so that the stable light beam has high collimation and uniform intensity distribution, and the diameter of the stable light beam is controlled;
after the stable light beam is shaped, the polarization modulator of the incidence component adjusts the shaped stable light beam to form an incidence light beam with a specific polarization state;
the incident light beam is incident on the micro-nano grating to be detected at a preset incident angle, and after being diffracted by the micro-nano grating, the lens component collects the diffracted light beam of the micro-nano grating;
the first photoelectric detection device acquires an image of the micro-nano grating to be detected through a reflection light path of the first imaging lens and the beam splitter;
when the image of the micro-nano grating to be detected is clear, the second photoelectric detection device acquires the image of the micro-nano grating to be detected through the optical Fourier surface of the lens component at one time through the transmission light path of the first imaging lens and the beam splitter so as to obtain the diffraction intensity of the micro-nano grating to be detected along with the diffraction angle (theta dif ) And wavelength (lambda)Distribution I dif (θ dif ，λ)；
The micro-nano grating to be detected is moved out of the sample stage, and the second photoelectric detection device collects the incident light beam to obtain the intensity I of the incident light beam source ；
Based on the distribution I of diffraction intensity of the micro-nano grating to be detected along with diffraction angle and wavelength dif (θ dif Lambda) and the intensity I of the incident light beam source And calculating to obtain the diffraction efficiency of the micro-nano grating to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211687493.1A CN116026565A (en) | 2022-12-27 | 2022-12-27 | Grating diffraction efficiency detection system and detection method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211687493.1A CN116026565A (en) | 2022-12-27 | 2022-12-27 | Grating diffraction efficiency detection system and detection method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116026565A true CN116026565A (en) | 2023-04-28 |
Family
ID=86078728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211687493.1A Pending CN116026565A (en) | 2022-12-27 | 2022-12-27 | Grating diffraction efficiency detection system and detection method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116026565A (en) |
-
2022
- 2022-12-27 CN CN202211687493.1A patent/CN116026565A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3076013B2 (en) | Image generating ATR spectrometer and method for obtaining spectral absorption image | |
| CN106767400B (en) | Structure detection confocal microscopic imaging method and device based on spatial light modulator | |
| US7483147B2 (en) | Apparatus and method for measuring thickness and profile of transparent thin film using white-light interferometer | |
| US5581350A (en) | Method and system for calibrating an ellipsometer | |
| CN1224829C (en) | Differential numerical aperture methods and device | |
| KR20170094288A (en) | Spectroscopic beam profile metrology | |
| TWI454654B (en) | Film thickness measuring device and method for measuring film thickness | |
| JP2005530144A (en) | Single structure optical measurement | |
| JP2014508969A (en) | System and method for illumination phase control in fluorescence microscopy | |
| KR100203345B1 (en) | Simultaneous multiple angle/multiple wavelength ellipsometer and method | |
| JP2013546000A (en) | Image map spectroscopic polarization | |
| CN106404713A (en) | Double-detector micro near-infrared spectrometer with whole spectral band of 800-2,500nm | |
| WO2017150062A1 (en) | Spectrometry device | |
| US7110118B2 (en) | Spectral imaging for vertical sectioning | |
| KR101987402B1 (en) | Optical measuring system for thicknesses of thin and thick films and 3D surface profile using a polarized pixel array | |
| TWI260427B (en) | Grating spectrograph | |
| JP2002005823A (en) | Thin-film measuring apparatus | |
| CN116718603A (en) | Diffraction imaging defect detection system and detection method thereof | |
| CN116026565A (en) | Grating diffraction efficiency detection system and detection method thereof | |
| JPH0431720A (en) | Spectroscope for two-dimensional object | |
| US20230266233A1 (en) | System for measuring thickness and physical properties of thin film using spatial light modulator | |
| US11668645B2 (en) | Spectroscopic ellipsometry system for thin film imaging | |
| JP2005504318A (en) | measuring device | |
| CN101464210B (en) | Optical grating detecting instrument | |
| JP5363976B2 (en) | Measuring apparatus and method for characteristic evaluation by reflectance measurement |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |