CN116007499A - Three-coordinate image measuring machine - Google Patents
Three-coordinate image measuring machine Download PDFInfo
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- CN116007499A CN116007499A CN202310006506.2A CN202310006506A CN116007499A CN 116007499 A CN116007499 A CN 116007499A CN 202310006506 A CN202310006506 A CN 202310006506A CN 116007499 A CN116007499 A CN 116007499A
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Abstract
The invention provides a three-coordinate image measuring machine which can solve the problems that in the prior art, a backlight source is easy to tremble and shake in the follow-up movement process, and the measuring precision and the measuring efficiency are affected. The three-coordinate image measuring machine comprises a workbench, a cross beam, a sliding frame and a sliding frame moving system, wherein the sliding frame is driven to slide along the cross beam, and the imaging system is arranged on the sliding frame and slides along with the sliding frame; the backlight source movement system is used for driving the backlight source to slide; the control system is used for controlling the imaging system and the backlight source to always keep the optical axes coincident in the sliding process. The invention can shorten the cantilever length of the connecting piece where the backlight source is positioned, effectively lighten or even avoid tremble and shake phenomenon generated in the movement process of the machine body of the backlight source, improve the measurement accuracy of the instrument and accelerate the detection efficiency.
Description
Technical Field
The invention relates to the field of measuring equipment, in particular to an improvement of a three-coordinate image measuring machine.
Background
At present, the high-precision image measuring instrument is widely applied to 3C electronics, high-precision instruments and chip industries, the imaging quality of an image system directly influences the functions and measuring precision of measuring equipment, particularly, a backlight source is used as a main light source for measuring the outline size, the imaging sensor is a key component for influencing the measuring functions and precision of the image instrument, and the imaging sensor and the movement of the backlight source are required to be kept highly synchronous so as to ensure the imaging quality and improve the measuring precision.
In order to eliminate the influence of Abbe errors on measurement accuracy, the three-coordinate image measuring machine generally adopts a structure of a fixed bridge and a movable table, an image system light source and a sliding frame are usually kept in synchronous motion in a mechanically rigid connection mode, and in order to avoid interference between an imaging sensor and a backlight source connecting piece and the movable table, the connecting piece of the imaging sensor and the backlight source is required to be made into a U shape, namely the backlight source is fixed on an X-axis sliding frame through the U-shaped connecting piece, the U-shaped connecting piece is horizontally arranged and comprises an upper horizontal connecting rod, a lower horizontal connecting rod and a vertical connecting rod, and the backlight source and the imaging sensor can keep following in the connection mode.
The disadvantage of the conventional connection method is that, in order not to interfere with the operation of the moving table, the longer the Y-direction stroke of the imager, the longer the length of the U-shaped connector corresponds, and the backlight source can only be fixed at the end of the lower horizontal connecting rod of the U-shaped connector. Along with the lengthening of the U-shaped connecting piece, the connecting rod is easy to generate tremble phenomenon in the moving process, so that the backlight source cannot reach a stable working state, and the imaging effect is further affected.
At present, the requirements of the measurement industry on detection efficiency are higher and higher, and large-batch, high-efficiency and programmed detection is becoming a trend. When the traditional backlight source follow-up mode is adopted, tremble occurs in the process of photographing and measuring the backlight source, so that the image formed by the sensor is blurred in edge, and the measuring precision of equipment is affected. The current solution to this problem is to reduce the running speed and acceleration and extend the positioning time before photographing, but this approach tends to reduce the measurement efficiency of the product.
Therefore, further improvements to existing three-coordinate image measuring machines are needed.
Disclosure of Invention
The invention provides a three-coordinate image measuring machine which can solve the problems that in the prior art, a backlight source is easy to tremble and shake in the follow-up movement process, and the measuring precision and the measuring efficiency are affected.
In order to solve the technical problems, the three-coordinate image measuring machine of the invention adopts the technical scheme that the three-coordinate image measuring machine comprises:
a work table;
a cross beam which is arranged above the workbench in a crossing way;
the sliding frame is arranged on the cross beam and can slide along the cross beam;
a carriage motion system for driving the carriage to slide along the cross beam;
an imaging system provided on the carriage and sliding with the carriage;
a backlight positioned below the imaging system with its optical axis parallel to the optical axis of the imaging system;
a backlight source moving system for driving the backlight source to slide in a direction parallel to a moving direction of the carriage;
and the control system is in communication connection with at least the carriage driving system and the backlight source movement system and is used for controlling the imaging system and the backlight source to always keep the optical axis coincident in the sliding process.
The backlight source movement system comprises a first driving motor, a speed reducer, a linear module, a backlight source connecting frame and a grating ruler; one end of the backlight source connecting frame is connected to the sliding table of the linear module, the other end of the backlight source connecting frame is suspended, and the backlight source is arranged at the suspended end of the backlight source connecting frame; the scale grating of the grating ruler is arranged on the guide rail of the linear module and is consistent with the extending direction of the guide rail of the linear module, and the grating reading head of the grating ruler is arranged on the sliding table of the linear module.
The backlight source connecting frame is linear and perpendicular to the linear module.
The sliding frame driving system comprises a second driving motor, a screw rod and a screw nut seat, wherein the screw nut seat is fixedly connected with the sliding frame, and the sliding frame is driven to slide by the second driving motor through the transmission of the screw rod and the screw nut seat.
The sliding frame is sleeved on the cross beam and is in sliding fit with the cross beam through an air bearing.
The cross beam is rectangular in cross section, the sliding frame is a rectangular sliding frame, the number of the air bearing is multiple, and the air bearing is arranged on the inner wall of the sliding frame.
The Z-axis component is arranged on the sliding frame and comprises an upright post and a Z-axis, the upright post is vertically and fixedly arranged on the sliding frame, the Z-axis is in sliding fit with the upright post, and the imaging system is arranged at the tail end of the Z-axis; the circumferential side surface of the upright post comprises a vertical plane and two vertical inclined planes positioned on the same side of the vertical plane, the vertical plane is parallel to the cross beam, and the two vertical inclined planes are mirror images and are inclined towards the side far away from the vertical plane; the top of Z axle has linked firmly the sleeve, the sleeve cover is established on the stand, just install on the sleeve inner wall with the perpendicular first air supporting bearing that sets up of vertical plane and with the perpendicular second air supporting bearing that sets up of vertical inclined plane.
The cross-sectional profile shape of the sleeve is adapted to the cross-sectional profile shape of the post.
The inclination angle of the vertical inclined plane is 30-60 degrees.
Compared with the prior art, the invention has the following advantages and positive effects: the imaging system is arranged on the carriage and moves along with the carriage driven by the carriage moving system, the backlight source is driven by the backlight source moving system to move, and the control system is at least in communication connection with the carriage driving system and the backlight source moving system and is used for controlling the imaging system and the backlight source to always keep the optical axes coincident in the sliding process, so that a good cooperative follow-up effect of the backlight source and the imaging system is realized. The invention does not need to arrange a traditional U-shaped connecting frame, can shorten the length of the cantilever of the connecting piece where the backlight source is positioned, effectively lighten or even avoid the tremble and shake phenomenon generated in the movement process of the machine body of the backlight source, improve the measuring precision of the instrument and accelerate the detection efficiency.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the drawings that are needed in the embodiments or the description of the prior art will be briefly described below, it will be obvious that the drawings in the following description are some embodiments of the present invention, and that other drawings can be obtained according to these drawings without inventive effort to a person skilled in the art.
FIG. 1 is a perspective view of a three-dimensional image measuring machine according to an embodiment of the present invention;
FIG. 2 is a perspective view of another view of the three-dimensional image measuring machine according to the embodiment of the present invention;
fig. 3 is an enlarged view of a portion a of fig. 2;
FIG. 4 is a perspective view of a column according to an embodiment of the present invention;
fig. 5 is a perspective view of a Z-axis and a sleeve according to an embodiment of the present invention.
Reference numerals: 100-working table; 200-a cross beam; 300-carriage; 400-carriage motion system; 410-a second drive motor; 420-screw rod; 430-a nut seat; 440-a carriage air bearing; 500-an imaging system; 600-backlight source; 700-backlight source motion system; 710—a first drive motor; 720-a linear module; 730-backlight source connection rack; 740-grating scale; 741-scale grating; 742-grating read head; 800-vertical beams; 900-Z axis assembly; 910-a column; 911-vertical plane; 912-vertical incline; 920-Z axis; 930-a sleeve; 940-a first air bearing; 950-second air bearing.
Detailed Description
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Referring to fig. 1 to 3, the three-dimensional image measuring machine according to the present embodiment includes a workbench 100, a beam 200, a carriage 300, a carriage motion system 400, an imaging system 500, a backlight 600, a backlight motion system 700, and a control system.
Wherein the cross member 200 is disposed transversely above the table 100. Specifically, the cross member 200 extends in the X direction of the table 100, and is specifically supported by two vertical beams 800 on the left and right sides of the table 100.
The carriage 300 is provided on the cross member 200 and is slidable along the cross member 200, i.e., the carriage 300 is slidable in the X direction.
The carriage motion system 400 is used to drive the carriage 300 to slide along the cross beam 200, i.e., to power the sliding of the carriage 300.
The imaging system 500 is disposed on the carriage 300 and slides with the carriage 300, and the imaging system 500 adopts the existing imaging system 500, which is not described herein.
The backlight 600 is located below the imaging system 500, which provides a transmissive light source for the imaging system 500, and the backlight 600 and the imaging system 500 are positioned such that: the optical axis of the backlight 600 is parallel to the optical axis of the imaging system 500.
The backlight motion system 700 is used for driving the backlight 600 to slide along a direction parallel to the motion direction of the carriage 300, that is, the backlight 600 can also slide along the X-direction.
And a control system, which is at least in communication with the carriage 300 drive system and the backlight motion system 700, for controlling the imaging system 500 and the backlight 600 to always maintain optical axis coincidence during sliding.
In this embodiment, the imaging system 500 is disposed on the carriage 300, and follows the carriage 300 to be driven by the carriage motion system 400, and the backlight 600 is driven to move by the backlight motion system 700, so that the control system controls the imaging system 500 and the backlight 600 to always keep the optical axes coincident in the sliding process, i.e. a good cooperative follow-up effect of the backlight 600 and the imaging system 500 is achieved. The length of the cantilever of the connecting piece where the backlight source 600 is positioned can be shortened without arranging a traditional U-shaped connecting frame, so that the tremble and shake phenomenon of the backlight source 600 in the movement process of the machine body can be effectively reduced or even avoided, the measuring precision of the instrument is improved, and the detection efficiency is accelerated.
Further, the backlight motion system 700 includes a first driving motor 710, a decelerator, a linear module 720, a backlight connection frame 730, and a grating 740; one end of the backlight source connecting frame 730 is connected to the sliding table of the linear module 720, the other end of the backlight source connecting frame is suspended, and the backlight source 600 is arranged on the suspended end of the backlight source connecting frame 730; the scale grating 741 of the grating scale 740 is arranged on the guide rail of the linear module 720, and is consistent with the extending direction of the guide rail of the linear module 720, and the grating reading head 742 of the grating scale 740 is arranged on the sliding table of the linear module 720.
Specifically, the first drive motor 710 is an encoder servo motor; during the movement of the backlight 600, the scale grating 741 cooperates with the grating reading head 742 to detect the position of the backlight 600 in real time and send the detected position information to the control system, and the control system controls the carriage movement system 400 to move, so that the carriage 300 drives the imaging system 500 to move to the corresponding position, and the imaging system 500 and the backlight 600 always keep the optical axes coincident during the sliding process.
Preferably, the backlight connection frame 730 uses a polyetheretherketone material instead of a conventional metal alloy material, and its density is only half that of the metal alloy material under the same strength condition. When the backlight source connecting frame 730 made of the material is connected with the backlight source 600 under the same acceleration, the inertia force generated by the backlight source 600 in the follow-up process is only one fourth of that generated by the conventional follow-up mode, so that the phenomenon of trembling of the backlight source 600 in the instrument moving process is effectively avoided.
The backlight source connecting frame 730 is linear and is perpendicular to the linear module 720, the linear backlight source connecting frame 730 is simple in structure and relatively short in length, and the tremble phenomenon of the backlight source 600 in the following motion process is reduced to a large extent.
For the carriage 300 driving system, the carriage 300 driving system specifically includes a second driving motor 410, a screw 420 and a screw base 430, wherein the second driving motor 410 is arranged on the vertical beam 800, the screw 420 is connected with the second driving motor 410 through a coupling, the screw base 430 is in threaded fit with the screw 420, the screw base 430 is fixedly connected with the carriage 300, and the second driving motor 410 drives the carriage 300 to slide through the transmission of the screw 420 and the screw base 430, so as to drive the imaging system 500 to move.
Further, the carriage 300 is sleeved on the cross beam 200 and is in sliding fit with the cross beam 200 through the carriage air bearing 440, so that the sliding stability of the carriage 300 is improved, and the movement stability of the imaging system 500 is further improved.
The cross beam 200 has a rectangular cross section, and correspondingly, the carriage 300 is a rectangular carriage 300, and a plurality of carriage air bearing 440 are arranged on the inner wall of the carriage 300. Specifically, four inner walls of the rectangular carriage 300 are in one-to-one correspondence with four side walls of the cross beam 200, the carriage 300 is sleeved on the cross beam 200 in an envelope manner, and each inner wall of the carriage 300 is correspondingly provided with one carriage air bearing 440.
For the installation of the imaging system 500, specifically, as shown in fig. 2 and 3, the Z-axis assembly 900 is installed on the carriage 300, the Z-axis assembly 900 includes a column 910 and a Z-axis 920, the column 910 is vertically fixed on the carriage 300, the Z-axis 920 is slidably engaged with the column 910, and the imaging system 500 is installed on the end of the Z-axis 920. Referring to fig. 4 and 5, the circumferential side of the upright 910 includes a vertical plane 911 and two vertical inclined planes 912 located on the same side of the vertical plane 911, so that the cross section of the upright is approximately trapezoidal, the vertical plane 911 is parallel to the cross beam 200, and the two vertical inclined planes 912 are mirror-image arranged and are inclined to the side far from the vertical plane 911; the top end of the Z shaft 920 is fixedly connected with a sleeve 930, the sleeve 930 is sleeved on the upright column 910, and a first air bearing 940 which is perpendicular to the vertical plane 911 and a second air bearing 950 which is perpendicular to the vertical inclined plane 912 are arranged on the inner wall of the sleeve 930.
The second air bearing 950 perpendicular to the vertical inclined plane 912 has component forces in the X direction and the Y direction for the air bearing clamping force acting on the vertical inclined plane 912 perpendicularly, when the air bearing clamping force between the Z-axis sleeve 930 and the upright column 910 needs to be adjusted, the air bearing clearance of other air bearings can be automatically adjusted only by adjusting the pretightening force of the corresponding second air bearing 950 on one of the vertical inclined planes 912, and each air bearing is not required to be correspondingly adjusted, so that the air bearing adjusting efficiency is improved, the space for adjusting operation by operators can be saved at the inclined plane, and the operation is convenient.
Accordingly, the cross-sectional profile shape of the sleeve 930 is adapted to the cross-sectional profile shape of the post 910 to facilitate vertical installation of the first air bearing 940 and the second air bearing 950.
Further, the inclination angle of the vertical inclined surface 912 is preferably 30 to 60 °, and in this embodiment, the inclination angle is 45 °.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (9)
1. A three-dimensional image measuring machine, comprising:
a work table;
a cross beam which is arranged above the workbench in a crossing way;
the sliding frame is arranged on the cross beam and can slide along the cross beam;
a carriage motion system for driving the carriage to slide along the cross beam;
an imaging system provided on the carriage and sliding with the carriage;
a backlight positioned below the imaging system with its optical axis parallel to the optical axis of the imaging system;
a backlight source moving system for driving the backlight source to slide in a direction parallel to a moving direction of the carriage;
and the control system is in communication connection with at least the carriage driving system and the backlight source movement system and is used for controlling the imaging system and the backlight source to always keep the optical axis coincident in the sliding process.
2. The three-dimensional image measuring machine according to claim 1, wherein,
the backlight source movement system comprises a first driving motor, a speed reducer, a linear module, a backlight source connecting frame and a grating ruler; one end of the backlight source connecting frame is connected to the sliding table of the linear module, the other end of the backlight source connecting frame is suspended, and the backlight source is arranged at the suspended end of the backlight source connecting frame; the scale grating of the grating ruler is arranged on the guide rail of the linear module and is consistent with the extending direction of the guide rail of the linear module, and the grating reading head of the grating ruler is arranged on the sliding table of the linear module.
3. The three-dimensional image measuring machine according to claim 2, wherein,
the backlight source connecting frame is linear and perpendicular to the linear module.
4. The three-dimensional image measuring machine according to claim 1, wherein,
the sliding frame driving system comprises a second driving motor, a screw rod and a screw nut seat, wherein the screw nut seat is fixedly connected with the sliding frame, and the sliding frame is driven to slide by the second driving motor through the transmission of the screw rod and the screw nut seat.
5. The three-dimensional image measuring machine according to claim 1, wherein,
the sliding frame is sleeved on the cross beam and is in sliding fit with the cross beam through an air bearing.
6. The three-dimensional image measuring machine according to claim 5, wherein,
the cross beam is rectangular in cross section, the sliding frame is a rectangular sliding frame, the number of the air bearing is multiple, and the air bearing is arranged on the inner wall of the sliding frame.
7. The three-dimensional image measuring machine according to claim 1, wherein,
the Z-axis component is arranged on the sliding frame and comprises an upright post and a Z-axis, the upright post is vertically and fixedly arranged on the sliding frame, the Z-axis is in sliding fit with the upright post, and the imaging system is arranged at the tail end of the Z-axis; the circumferential side surface of the upright post comprises a vertical plane and two vertical inclined planes positioned on the same side of the vertical plane, the vertical plane is parallel to the cross beam, and the two vertical inclined planes are mirror images and are inclined towards the side far away from the vertical plane; the top of Z axle has linked firmly the sleeve, the sleeve cover is established on the stand, just install on the sleeve inner wall with the perpendicular first air supporting bearing that sets up of vertical plane and with the perpendicular second air supporting bearing that sets up of vertical inclined plane.
8. The three-dimensional image measuring machine according to claim 7, wherein,
the cross-sectional profile shape of the sleeve is adapted to the cross-sectional profile shape of the post.
9. The three-dimensional image measuring machine according to claim 6, wherein,
the inclination angle of the vertical inclined plane is 30-60 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310006506.2A CN116007499A (en) | 2023-01-04 | 2023-01-04 | Three-coordinate image measuring machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310006506.2A CN116007499A (en) | 2023-01-04 | 2023-01-04 | Three-coordinate image measuring machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116007499A true CN116007499A (en) | 2023-04-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310006506.2A Pending CN116007499A (en) | 2023-01-04 | 2023-01-04 | Three-coordinate image measuring machine |
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|---|---|
| CN (1) | CN116007499A (en) |
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2023
- 2023-01-04 CN CN202310006506.2A patent/CN116007499A/en active Pending
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