CN115995320A - Superconducting magnet cooling container, superconducting magnet cooling device and monocrystalline silicon production equipment - Google Patents
Superconducting magnet cooling container, superconducting magnet cooling device and monocrystalline silicon production equipment Download PDFInfo
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- CN115995320A CN115995320A CN202310093213.2A CN202310093213A CN115995320A CN 115995320 A CN115995320 A CN 115995320A CN 202310093213 A CN202310093213 A CN 202310093213A CN 115995320 A CN115995320 A CN 115995320A
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Abstract
The invention discloses a superconducting magnet cooling container, a superconducting magnet cooling device and monocrystalline silicon production equipment, wherein the superconducting magnet cooling container comprises cooling chambers, the superconducting magnet comprises a plurality of superconducting coils, the number of the cooling chambers is equal to that of the superconducting coils and corresponds to that of the superconducting coils one by one, each cooling chamber is provided with a cooling cavity and a containing cavity for containing the corresponding superconducting coils, the cooling cavity is adjacent to the containing cavity, the part of the cooling chamber, which separates the cooling cavity from the containing cavity, is made of a cold conducting material, and the bottom and the top of the cooling cavity are respectively provided with a liquid helium inlet and a helium gas outlet. The superconducting magnet cooling container provided by the invention has the advantages of small storage and consumption of liquid helium and low cooling cost of the superconducting magnet.
Description
Technical Field
The invention relates to the technical field of superconducting magnets, in particular to a superconducting magnet cooling container, a superconducting magnet cooling device and monocrystalline silicon production equipment.
Background
The chip is a core component of intelligent electronic equipment, the base material of the chip is monocrystalline silicon, the monocrystalline silicon is mostly prepared by adopting a Czochralski method, but in the process of growing semiconductor monocrystalline silicon by adopting the Czochralski method, impurities are macroscopically and microscopically non-uniform due to heat convection of melt, so that the physical and chemical properties of the crystal are influenced, and therefore, the heat convection of the melt is often inhibited by utilizing a magnetic field generated by a superconducting magnet, so that the quality of the semiconductor monocrystalline silicon is ensured.
The superconducting magnet is composed of a plurality of pairs of superconducting coils, and the superconducting coils are generally made of NbTi alloy superconducting materials. Since the critical temperature of NbTi superconducting materials is only several K, the NbTi superconducting materials generally need to be soaked in liquid helium to work normally. However, the cooling container for the superconducting magnet in the related art is generally provided with a cooling cavity for accommodating a plurality of pairs of superconducting coils together, and at this time, the volume of the cooling cavity is large, the storage and consumption of liquid helium are large, and the cooling cost of the superconducting magnet is high.
Disclosure of Invention
The present invention aims to solve at least one of the technical problems in the related art to some extent.
For this reason, the embodiment of the present invention proposes a superconducting magnet cooling container having the advantages of small reserves and consumption of liquid helium and low cooling cost of the superconducting magnet.
The embodiment of the invention also provides a superconducting magnet cooling device.
The embodiment of the invention also provides single crystal silicon production equipment.
The superconducting magnet cooling container comprises cooling chambers, wherein the number of the cooling chambers is equal to that of the superconducting coils and corresponds to that of the superconducting coils one by one, each cooling chamber is provided with a cooling cavity and a containing cavity for containing the corresponding superconducting coils, the cooling cavity is adjacent to the containing cavity, the part of the cooling chamber, which separates the cooling cavity from the containing cavity, is made of a cold conducting material, and the bottom and the top of the cooling cavity are respectively provided with a liquid helium inlet and a helium gas outlet.
According to the superconducting magnet cooling container provided by the embodiment of the invention, the cooling chambers are in one-to-one correspondence with the superconducting coils, the cooling chambers are formed to accommodate accommodating cavities of the superconducting coils, and simultaneously are also formed to provide cooling cavities for liquid helium to pass through, and the liquid helium in the cooling cavities exchanges heat with the superconducting coils in the accommodating cavities through the part of the cooling chambers between the cooling cavities and the accommodating cavities, so that the superconducting coils are cooled.
The space between adjacent cooling chambers does not need to be formed with a cooling cavity, the cooling cavity does not need to contain a coil framework, the volume of the cooling cavity only needs to ensure that liquid helium in the cooling cavity can cool the corresponding superconducting coil to a set temperature, and therefore, compared with the cooling cavity in a superconducting magnet cooling container in the related art, the total volume of the cooling cavities is smaller, the storage and consumption of the liquid helium are smaller, and the cooling cost of the superconducting magnet is lower.
In some embodiments, the cooling chamber includes a cooling guide and a coil bobbin around which the superconducting coil is wound, the cooling chamber is disposed in the cooling guide, the cooling guide is connected to the coil bobbin, and the accommodating chamber is formed between the cooling guide and the coil bobbin.
In some embodiments, the bobbin includes a shaft portion, a first stop portion, and a second stop portion, the shaft portion adapted for winding the superconducting coil; the first stop part and the second stop part are arranged on the outer peripheral surface of the shaft part, the first stop part and the second stop part are connected with the cold guide piece, the first stop part, the second stop part, the shaft part and the cold guide piece surround to form the accommodating cavity, the cold guide piece is suitable for being in fit contact with the outer peripheral surface of the superconducting coil, and the cooling cavity is an annular cavity surrounding the superconducting coil.
In some embodiments, the cold guide includes a cold guide ring plate, the first stop portion, the second stop portion, and the shaft portion surround to form an annular groove, at least a portion of the annular groove forms the accommodating cavity, the cold guide ring plate connects the first stop portion and the second stop portion, and an inner circumferential surface of the cold guide ring plate is adapted to be in abutting contact with an outer circumferential surface of the superconducting coil.
In some embodiments, the cold guide ring plate is located within the annular groove, a first side of the cold guide ring plate is engaged with and welded to a side of the first stop facing the second stop, and a second side of the cold guide ring plate is engaged with and welded to a side of the second stop facing the first stop.
In some embodiments, the cooling cavity is disposed within the cold guide ring plate;
or, the cold guide piece further comprises a cold guide pipe, the inner cavity of the cold guide pipe is formed into the cooling cavity, and the cold guide pipe covers the outer peripheral surface of the cold guide ring plate.
In some embodiments, the cold guide pipe extends spirally along the axial direction of the cold guide ring plate, and openings at two ends of the cold guide pipe respectively form the liquid helium inlet and the helium outlet, and the liquid helium inlet and the helium outlet are opposite along the radial direction of the cold guide ring plate.
In some embodiments, the cold guide ring plate is a copper plate and the cold guide tube is a copper tube.
In some embodiments, the cold guide tube is soldered to the cold guide ring plate.
In some embodiments, the shaft portion is provided with a through hole penetrating the shaft portion in an axial direction of the shaft portion.
The superconducting magnet cooling device comprises a cooling container, a liquid helium container, a first pipeline, a second pipeline and a refrigerating device, wherein the cooling container is the superconducting magnet cooling container according to any embodiment; the liquid helium container is provided with a first interface and a second interface, the liquid helium inlets in the plurality of cooling chambers are communicated with the first interface through the first pipelines, and the helium outlets in the plurality of cooling chambers are communicated with the second interface through the second pipelines; the refrigerating device is arranged on the first pipeline and is connected with each cooling container in series.
Technical advantages of the superconducting magnet cooling device according to the embodiment of the present invention are the same as those of the superconducting magnet cooling container of the above embodiment, and will not be described here again.
In some embodiments, the superconducting magnet cooling device further comprises a liquid helium conveying pipeline, a first switching pipe, a helium gas returning pipeline and a second switching pipe, wherein the liquid helium conveying pipeline is communicated with the first connectors through the first pipeline, a plurality of first connectors are arranged on the peripheral wall of the liquid helium conveying pipeline, and the number of the first connectors is equal to that of the cooling chambers and corresponds to that of the cooling chambers one by one; the number of the first transfer pipes is equal to and corresponds to the number of the cooling chambers one by one, and the first transfer pipes are connected with the corresponding first connection ports and the liquid helium inlets on the corresponding cooling chambers; the helium gas returning pipeline is communicated with the second interface through the second pipeline, a plurality of second connectors are arranged on the peripheral wall of the helium gas returning pipeline, and the number of the second connectors is equal to that of the cooling chambers and corresponds to that of the cooling chambers one by one; the number of the second transfer pipes is equal to and corresponds to the number of the cooling chambers one by one, and the second transfer pipes are connected with the corresponding second connection ports and the corresponding helium outlets on the cooling chambers.
In some embodiments, the liquid helium delivery lines are connected end to end and the helium gas return lines are connected end to end.
A single crystal silicon production apparatus according to an embodiment of the present invention includes the superconducting magnet cooling container as described in any one of the above embodiments or the superconducting magnet cooling device as described in any one of the above embodiments.
Technical advantages of the single crystal silicon production apparatus according to the embodiment of the present invention are the same as those of the superconducting magnet cooling container and the superconducting magnet cooling device of the above embodiment, and will not be described here again.
Drawings
Fig. 1 is a cross-sectional view of a superconducting magnet cooling device according to an embodiment of the present invention.
Fig. 2 is a schematic view of a superconducting magnet cooling device according to an embodiment of the present invention.
Reference numerals:
1. a cooling chamber; 11. a coil bobbin; 111. a shaft portion; 1111. a through hole; 112. a first stop portion; 113. a second stop portion; 12. a cold guide; 121. a cold guide ring plate; 122. a cold guide tube; 2. a liquid helium vessel; 3. a first pipe; 4. a second pipe; 5. a liquid helium delivery line; 6. a first transfer tube; 7. a helium return line; 8. a second transfer tube; 9. a superconducting coil.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings. The embodiments described below by referring to the drawings are illustrative and intended to explain the present invention and should not be construed as limiting the invention.
In the related art, a cooling cavity formed by a cooling container for a superconducting magnet accommodates a bobbin for winding the superconducting coils in addition to a plurality of pairs of superconducting coils, and the cooling cavity further includes a space between any adjacent two superconducting coils. The cooling cavity is larger in volume, large in storage and consumption of liquid helium and high in cooling cost of the superconducting magnet.
In order to solve the above-described drawbacks, a superconducting magnet cooling container according to an embodiment of the present invention is described below with reference to fig. 1 and 2.
The superconducting magnet cooling container according to the embodiment of the invention comprises cooling chambers 1, the superconducting magnet comprises a plurality of superconducting coils 9, the number of the cooling chambers 1 is equal to that of the superconducting coils 9 and corresponds to that of the superconducting coils one by one, each cooling chamber 1 is provided with a cooling cavity and a containing cavity for containing the corresponding superconducting coils 9, the cooling cavity is adjacent to the containing cavity, the part of the cooling chamber 1 separating the cooling cavity from the containing cavity is made of a cold conducting material, and the bottom and the top of the cooling cavity are respectively provided with a liquid helium inlet and a helium gas outlet.
According to the superconducting magnet cooling container provided by the embodiment of the invention, the cooling chambers 1 are in one-to-one correspondence with the superconducting coils 9, the cooling chambers 1 are formed to accommodate the accommodating cavities of the superconducting coils 9, and simultaneously are also formed to provide cooling cavities for passing liquid helium, and the liquid helium in the cooling cavities exchanges heat with the superconducting coils 9 in the accommodating cavities through the part of the cooling chambers 1 between the cooling cavities and the accommodating cavities, so that the superconducting coils 9 are cooled.
Wherein, the space between adjacent cooling chambers 1 does not need to be formed with a cooling cavity, and the cooling cavity does not need to accommodate the coil frame 11, and the volume of the cooling cavity only needs to ensure that liquid helium in the cooling cavity can cool the corresponding superconducting coil 9 to a set temperature, so that the total volume of the cooling cavities is smaller than that of the cooling cavities in the superconducting magnet cooling container in the related art, the storage and consumption of the liquid helium are smaller, and the cooling cost of the superconducting magnet is lower.
In some embodiments, as shown in fig. 1, the cooling chamber 1 includes a cooling guide 12 and a coil bobbin 11 around which the superconducting coil 9 is wound, the cooling chamber is disposed on the cooling guide 12, the cooling guide 12 is connected to the coil bobbin 11, and a receiving chamber is formed between the cooling guide 12 and the coil bobbin 11.
Thereby, at least part of the cold guide 12 separates the cooling chamber from the receiving chamber, which at least part effects a heat transfer between the liquid helium in the cooling chamber and the superconducting coil 9 in the receiving chamber, and thus effects a cooling of the superconducting coil 9. On the basis of not needing to improve the coil framework 11, the cooling of the superconducting coil 9 can be realized by only installing the cold guide 12 with the cooling cavity on the coil framework 11, and the superconducting magnet cooling container has simple structure and low cost.
Specifically, after the cold guide 12 is connected with the coil bobbin 11, the cold guide 12 abuts against the superconducting coil 9 in the accommodating cavity, thereby ensuring the cooling stability of the liquid helium to the superconducting coil 9.
In some embodiments, as shown in fig. 1, the bobbin 11 includes a shaft portion 111, a first stopper 112, and a second stopper 113. The shaft portion 111 is adapted for winding the superconducting coil 9. The first stop portion 112 and the second stop portion 113 are both disposed on the outer peripheral surface of the shaft portion 111, the first stop portion 112 and the second stop portion 113 are both connected with the cold guide member 12, the first stop portion 112, the second stop portion 113, the shaft portion 111 and the cold guide member 12 surround to form a containing cavity, the cold guide member 12 is suitable for being in fit contact with the outer peripheral surface of the superconducting coil 9, and the cooling cavity is an annular cavity surrounding the superconducting coil 9.
Thereby, the cooling chamber surrounds the superconducting coil 9, the cooling guide 12 can be in contact with at least the outer peripheral surface of the superconducting coil 9, liquid helium in the cooling chamber can cool each position of the superconducting coil 9 in the circumferential direction at the same time, and further, the cooling stability of the liquid helium on the superconducting coil 9 is higher.
Specifically, the cold guide 12 may also be in abutting contact with the side of the superconducting coil 9, thereby further increasing the contact area between the cold guide 12 and the superconducting coil 9, the volume of the cooling chamber may be designed smaller, and the consumption of liquid helium for cooling the superconducting coil 9 to the set temperature is less.
In some embodiments, as shown in FIG. 1, the cold guide 12 includes a cold guide ring plate 121. The first stopper 112, the second stopper 113 and the shaft portion 111 surround to constitute an annular groove, at least part of which constitutes a housing chamber, the cold guide ring plate 121 connects the first stopper 112 and the second stopper 113, and an inner peripheral surface of the cold guide ring plate 121 is adapted to be in abutting contact with an outer peripheral surface of the superconducting coil 9.
The cold guide ring plate 121 is in contact with the outer peripheral surface of the superconducting coil 9, and heat of the superconducting coil 9 is transferred to the outer peripheral surface, continuously transferred from the outer peripheral surface to the cold guide 12, and finally absorbed by liquid helium in the cooling cavity, so that the liquid helium cools the superconducting coil 9.
In some embodiments, as shown in fig. 1, the cold guide ring plate 121 is positioned in the annular groove, a first side surface of the cold guide ring plate 121 is attached to and welded with a side surface of the first stopper 112 facing the second stopper 113, and a second side surface of the cold guide ring plate 121 is attached to and welded with a side surface of the second stopper 113 facing the first stopper 112.
Therefore, the connection strength of the cold guide ring plate 121 and the first stop part 112 and the second stop part 113 is high, the connection tightness is good, and leakage of liquid helium and helium gas in the cooling cavity is effectively avoided.
Specifically, as shown in fig. 1, a side surface of the first stopper 112 facing away from the second stopper 113 is coplanar with one of the end surfaces of the shaft portion 111, a side surface of the second stopper 113 facing away from the first stopper 112 is coplanar with the other end surface of the shaft portion 111, and an outer peripheral surface diameter of the cold guide ring plate 121 is smaller than outer peripheral surface diameters of the first stopper 112 and the second stopper 113.
In some embodiments, the cooling cavity is disposed within the cold ring plate 121. Thereby, the liquid helium in the cooling cavity cools the superconducting coil 9 through the inner peripheral wall of the cooling guide ring plate 121 facing the superconducting coil 9, namely, only the inner peripheral wall of the cooling guide ring plate 121 separates the cooling cavity from the accommodating cavity, the heat transfer efficiency between the liquid helium and the superconducting coil 9 is higher, and the consumption of the liquid helium is less.
Alternatively, the cold guide 12 further includes a cold guide tube 122, the inner cavity of the cold guide tube 122 forms a cooling cavity, and the cold guide tube 122 covers the outer circumferential surface of the cold guide ring plate 121. Compared with the cooling cavity formed in the cold guide ring plate 121, the inner cavity of the cold guide tube 122 is the formed cooling cavity, and the cooling cavity is formed simply, so that the manufacturing cost of the cold guide member 12 is effectively reduced.
Alternatively, the cold guide 12 may include only the cold guide pipe 122, and the cold guide pipe 122 may directly abut on the outer peripheral surface of the superconducting coil 9.
In some embodiments, as shown in fig. 1 and 2, the cold guide tube 122 spirally extends along the axial direction of the cold guide ring plate 121, and both end openings of the cold guide tube 122 respectively form a liquid helium inlet and a helium outlet, which are opposite in the radial direction of the cold guide ring plate 121.
At this time, the diameter of the cold guide tube 122 is smaller than the dimension of the cold guide ring plate 121 in the axial direction, and the cold guide tube 122 is divided into a plurality of sections along the axial direction of the cold guide ring plate 121 to be in contact with the outer peripheral surface of the cold guide ring plate 121, thereby increasing the contact area between the cold guide tube 122 and the cold guide ring plate 121, and the higher the heat transfer efficiency between the liquid helium and the superconducting coil 9, the lower the liquid helium consumption.
Specifically, the smaller the diameter of the cold guide tube 122, the larger the contact area between the cold guide tube 122 and the cold guide ring plate 121, and the higher the heat transfer efficiency between the liquid helium and the superconducting coil 9, the less the liquid helium consumption. The cooling pipe 122 is formed by axially dividing into multiple sections, which are sequentially bonded and contacted.
In some embodiments, the cold guide ring plate 121 is a copper plate and the cold guide tube 122 is a copper tube.
Thereby, the manufacturing cost of the cold guide ring plate 121 and the cold guide tube 122 is low, and the thermal resistance is low, whereby the volume of the cooling chamber can be designed smaller, and the consumption amount of liquid helium for cooling the superconducting coil 9 to the set temperature is smaller.
In some embodiments, cold leg 122 is soldered to cold ring plate 121. Thereby, the cold guide tube 122 is in closer contact with the cold guide ring plate 121, the heat transfer efficiency between the two is higher, the volume of the cooling chamber can be designed smaller, and the consumption of liquid helium for cooling the superconducting coil 9 to the set temperature is smaller.
In some embodiments, as shown in fig. 1, the shaft 111 is provided with a through hole 1111, and the through hole 1111 penetrates the shaft 111 in the axial direction of the shaft 111, i.e., the shaft 111 is hollow and cylindrical.
When the liquid helium cools the superconducting coil 9, the temperature of the coil former 11 needs to be cooled below the set temperature, and at this time, the through holes 1111 are formed in the shaft portion 111, so that the volume and weight of the coil former 11 are further reduced, the amount of liquid helium required for cooling the coil former 11 is reduced, the volume of the cooling chamber can be designed to be smaller, and the storage and consumption of liquid helium are smaller.
The superconducting magnet cooling device according to the embodiment of the invention comprises a cooling container, a liquid helium container 2, a first pipeline 3, a second pipeline 4 and a refrigerating device. The cooling vessel is the superconducting magnet cooling vessel of any of the embodiments described above. The liquid helium container 2 is provided with a first interface and a second interface, liquid helium inlets in the plurality of cooling chambers 1 are communicated with the first interface through a first pipeline 3, and helium outlets in the plurality of cooling chambers 1 are communicated with the second interface through a second pipeline 4. A refrigerating device is mounted to the first pipe 3, the refrigerating device being connected in series with each cooling vessel.
Specifically, the cooling chambers of the plurality of cooling chambers 1 are connected in parallel, liquid helium in the liquid helium container 2 enters the cooling chambers in each cooling chamber 1 through the first pipeline 3, helium gas produced in each cooling chamber enters the second pipeline 4 through the helium gas outlet, the helium gas is cooled into liquid helium at the second pipeline 4 through the refrigerating device, and then enters the liquid helium container 2, so that continuous and stable cooling of the liquid helium on the superconducting coil 9 is realized.
Technical advantages of the superconducting magnet cooling device according to the embodiment of the present invention are the same as those of the superconducting magnet cooling container of the above embodiment, and will not be described here again.
In some embodiments, as shown in fig. 2, the superconducting magnet cooling device further includes a liquid helium delivery pipe 5, a first transfer pipe 6, a helium gas return pipe 7, and a second transfer pipe 8. The liquid helium delivery pipeline 5 is communicated with the first connectors through the first pipeline 3, a plurality of first connectors are arranged on the peripheral wall of the liquid helium delivery pipeline 5, and the number of the first connectors is equal to and corresponds to that of the cooling chambers 1 one by one. The number of the first transfer pipes 6 is equal to the number of the cooling chambers 1 and corresponds to the number of the cooling chambers 1 one by one, and the first transfer pipes 6 are connected with the corresponding first connection ports and the liquid helium inlets on the corresponding cooling chambers 1. The helium gas returning pipeline 7 is communicated with the second connectors through the second pipeline 4, a plurality of second connectors are arranged on the peripheral wall of the helium gas returning pipeline 7, and the number of the second connectors is equal to and corresponds to that of the cooling chambers 1 one by one. The number of the second transfer tubes 8 is equal to and corresponds to the number of the cooling chambers 1 one by one, and the second transfer tubes 8 are connected with the corresponding second connection ports and helium outlets on the corresponding cooling chambers 1.
After entering the liquid helium conveying pipeline 5 through the first pipeline 3, the liquid helium flows into a plurality of cooling cavities through a plurality of first transfer pipes 6 respectively, helium gas produced in the plurality of cooling cavities enters a helium gas returning pipeline 7 through a plurality of second transfer pipes 8, is converted into liquid helium through a refrigerating device at the second pipeline 4 and flows into the liquid helium container 2. The liquid helium delivery pipeline 5, the helium return pipeline 7, the first switching pipe 6 and the second switching pipe 8 realize the parallel connection of a plurality of cooling cavities, and the liquid helium has high cooling stability on each superconducting coil 9.
Specifically, the plurality of superconducting coils 9 are arranged at intervals in the circumferential direction and located at the same height, and further the plurality of cooling chambers 1 are arranged at intervals in the circumferential direction and located at the same height. The liquid helium container 2 is positioned above the cooling chamber 1, so that the liquid helium can enter the cooling cavity from the liquid helium container 2 through the first pipeline 3, the liquid helium conveying pipeline 5 and the first transfer pipe 6 under the action of gravity, and meanwhile, helium in the cooling cavity can automatically float to the helium returning pipeline 7 and the second pipeline 4 under the self gas property.
In some embodiments, as shown in FIG. 2, the liquid helium delivery lines 5 are connected end to end and the helium return lines 7 are connected end to end.
Thereby, when liquid helium enters the liquid helium delivery pipe 5, the liquid helium delivery pipe 5 can be filled more uniformly/quickly to be delivered more uniformly into each cooling chamber by the first transfer pipe 6. Similarly, helium in the helium return line 7 flows more evenly and rapidly to the second line 4.
Specifically, one end of the first pipe 3 communicates with an opening in the peripheral wall of the liquid helium delivery pipe 5, and one end of the second pipe 4 communicates with an opening in the peripheral wall of the helium gas returning pipe 7.
A single crystal silicon production apparatus according to an embodiment of the present invention includes the superconducting magnet cooling container of any one of the embodiments described above or the superconducting magnet cooling device of any one of the embodiments described above.
Technical advantages of the single crystal silicon production apparatus according to the embodiment of the present invention are the same as those of the superconducting magnet cooling container and the superconducting magnet cooling device of the above embodiment, and will not be described here again.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
For purposes of this disclosure, the terms "one embodiment," "some embodiments," "example," "a particular example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
While the above embodiments have been shown and described, it should be understood that the above embodiments are illustrative and not to be construed as limiting the invention, and that variations, modifications, alternatives, and variations of the above embodiments may be made by those of ordinary skill in the art without departing from the scope of the invention.
Claims (14)
1. A superconducting magnet cooling container, comprising:
the superconducting magnet comprises a plurality of superconducting coils, the number of the cooling chambers is equal to that of the superconducting coils and corresponds to that of the superconducting coils one by one, each cooling chamber is provided with a cooling cavity and a containing cavity for containing the corresponding superconducting coils, the cooling cavity is adjacent to the containing cavity, the part of the cooling chamber, which separates the cooling cavity from the containing cavity, is made of a cold conducting material, and the bottom and the top of the cooling cavity are respectively provided with a liquid helium inlet and a helium gas outlet.
2. The cooling container according to claim 1, wherein the cooling chamber includes a cooling guide and a bobbin around which the superconducting coil is wound, the cooling chamber is provided to the cooling guide, the cooling guide is connected to the bobbin, and the accommodation chamber is formed between the cooling guide and the bobbin.
3. The superconducting magnet cooling container according to claim 2, wherein the bobbin comprises:
a shaft portion adapted to be wound by the superconducting coil; and
the first stop part and the second stop part, first stop part with the second stop part all set up in the outer peripheral face of shaft part, first stop part with the second stop part all with lead cold piece and link to each other, first stop part second stop part shaft part with lead cold piece around constituting hold the chamber, lead cold piece be suitable for with superconducting coil's outer peripheral face laminating contact, the cooling chamber is encircleed superconducting coil's annular chamber.
4. The cooling container for a superconducting magnet according to claim 3, wherein the cooling member includes a cooling ring plate, the first stopper portion, the second stopper portion, and the shaft portion surround to form an annular groove, at least part of the annular groove forms the accommodation chamber, the cooling ring plate connects the first stopper portion and the second stopper portion, and an inner peripheral surface of the cooling ring plate is adapted to come into abutting contact with an outer peripheral surface of the superconducting coil.
5. The superconducting magnet cooling container of claim 4 wherein the cold guide ring plate is located within the annular groove, a first side of the cold guide ring plate being in engagement and welded with a side of the first stop facing the second stop, and a second side of the cold guide ring plate being in engagement and welded with a side of the second stop facing the first stop.
6. The superconducting magnet cooling container of claim 4 wherein the cooling cavity is disposed within the cold guide ring plate;
or, the cold guide piece further comprises a cold guide pipe, the inner cavity of the cold guide pipe is formed into the cooling cavity, and the cold guide pipe covers the outer peripheral surface of the cold guide ring plate.
7. The superconducting magnet cooling container according to claim 6, wherein the cold guide pipe extends spirally in an axial direction of the cold guide ring plate, and openings at both ends of the cold guide pipe form the liquid helium inlet and the helium outlet, respectively, which are opposite to each other in a radial direction of the cold guide ring plate.
8. The superconducting magnet cooling container of claim 6 wherein the cold guide ring plate is a copper plate and the cold guide tube is a copper tube.
9. The superconducting magnet cooling container of claim 6 wherein the cold guide tube is soldered to the cold guide ring plate.
10. A superconducting magnet cooling container according to claim 3, wherein the shaft portion is provided with a through hole penetrating the shaft portion in an axial direction of the shaft portion.
11. A superconducting magnet cooling device, characterized by comprising:
a cooling vessel which is the superconducting magnet cooling vessel as claimed in any one of claims 1 to 10;
the liquid helium container is provided with a first interface and a second interface, the liquid helium inlets in the plurality of cooling chambers are communicated with the first interface through the first pipeline, and the helium outlets in the plurality of cooling chambers are communicated with the second interface through the second pipeline; and
and the refrigerating device is arranged on the first pipeline and is connected with each cooling container in series.
12. The superconducting magnet cooling device according to claim 11, further comprising:
the liquid helium conveying pipeline is communicated with the first connectors through the first pipeline, a plurality of first connectors are arranged on the peripheral wall of the liquid helium conveying pipeline, and the number of the first connectors is equal to that of the cooling chambers and corresponds to that of the cooling chambers one by one;
the first transfer pipes are equal to the cooling chambers in number and correspond to each other one by one, and are connected with the corresponding first connection ports and the liquid helium inlets on the corresponding cooling chambers;
the helium gas returning pipeline is communicated with the second interface through the second pipeline, a plurality of second connectors are arranged on the peripheral wall of the helium gas returning pipeline, and the number of the second connectors is equal to that of the cooling chambers and corresponds to that of the cooling chambers one by one; and
the number of the second transfer pipes is equal to and corresponds to the number of the cooling chambers one by one, and the second transfer pipes are connected with the corresponding second connection ports and the corresponding helium outlets on the cooling chambers.
13. The superconducting magnet cooling device of claim 12 wherein the liquid helium delivery conduit is connected end-to-end and the helium return conduit is connected end-to-end.
14. A single crystal silicon production apparatus comprising the superconducting magnet cooling container according to any one of claims 1 to 10 or the superconducting magnet cooling device according to any one of claims 11 to 13.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310093213.2A CN115995320A (en) | 2023-01-17 | 2023-01-17 | Superconducting magnet cooling container, superconducting magnet cooling device and monocrystalline silicon production equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310093213.2A CN115995320A (en) | 2023-01-17 | 2023-01-17 | Superconducting magnet cooling container, superconducting magnet cooling device and monocrystalline silicon production equipment |
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| Publication Number | Publication Date |
|---|---|
| CN115995320A true CN115995320A (en) | 2023-04-21 |
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| CN202310093213.2A Pending CN115995320A (en) | 2023-01-17 | 2023-01-17 | Superconducting magnet cooling container, superconducting magnet cooling device and monocrystalline silicon production equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116564643A (en) * | 2023-07-10 | 2023-08-08 | 苏州八匹马超导科技有限公司 | Superconducting magnet device, ultralow temperature system and cooling method of superconducting magnet device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116564643A (en) * | 2023-07-10 | 2023-08-08 | 苏州八匹马超导科技有限公司 | Superconducting magnet device, ultralow temperature system and cooling method of superconducting magnet device |
| CN116564643B (en) * | 2023-07-10 | 2023-09-26 | 苏州八匹马超导科技有限公司 | Method for cooling superconducting magnet device |
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