CN115976522A - Method for preventing chloride ion corrosion of outer wall of liner of jacket equipment - Google Patents
Method for preventing chloride ion corrosion of outer wall of liner of jacket equipment Download PDFInfo
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- CN115976522A CN115976522A CN202211726049.6A CN202211726049A CN115976522A CN 115976522 A CN115976522 A CN 115976522A CN 202211726049 A CN202211726049 A CN 202211726049A CN 115976522 A CN115976522 A CN 115976522A
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Abstract
The invention discloses a method for preventing the outer wall of an inner container of jacket equipment from being corroded by chloride ions. According to the invention, the outer wall of the inner container of the single crystal furnace is additionally provided with the peripheral aluminum alloy anode strip, and the aluminum alloy strip takes effect as a sacrificial anode cathodic protection measure, so that cathodic protection can be formed on the outer wall of the stainless steel inner container, and the corrosion of chloride ions to the stainless steel outer wall of equipment can be effectively relieved; or the auxiliary anode and the reference electrode are additionally arranged at the corresponding positions of the single crystal furnace and connected with the multi-channel potentiostat, and the outer wall of the equipment liner is always kept in an electron-rich state in an additional current mode, so that the outer wall of the equipment liner is protected by a cathode, and the corrosion of chloride ions to the stainless steel outer wall of the equipment is effectively relieved.
Description
Technical Field
The invention belongs to the technical field of single crystal furnace preparation, and particularly relates to a method for preventing the outer wall of an inner container of jacket equipment from being corroded by chloride ions.
Background
In the industrial production process of monocrystalline silicon, the core equipment is a monocrystalline furnace, in order to meet the process requirements, the equipment is generally cooled in a jacket cooling mode, and the cooling medium is circulating water. As the contact part of the single crystal furnace and water is usually made of stainless steel, the rust prevention requirement is met, and the service life of equipment is prolonged.
However, stainless steel materials have poor corrosion resistance to free chlorine, so that the water quality of circulating water is generally required, and the content of free chlorine ions in water is generally required to be not higher than 25ppm. However, in the operation process of equipment, the condition that the quality of circulating water exceeds the standard often occurs, once abnormal working conditions occur, such as impurities entering a circulating water system or internal leakage of partial cooling equipment, the content of chlorine ions in the circulating water is increased rapidly, corrosion can be caused to a stainless steel inner container of a single crystal furnace, once the quality of the circulating water exceeds the standard, free chlorine ions in the water can damage a passivation layer on the surface of the stainless steel material, and therefore intergranular corrosion is carried out on the stainless steel inner container, a jacket layer of the single crystal furnace is of a non-detachable structure, and cannot be cleaned through equipment disassembly and inspection, and the inner container is covered by the jacket layer, so that the corrosion and the perforation of the equipment are difficult to find under normal conditions, and at the moment, the temperature in the single crystal furnace is as high as 1400-1500 ℃, once the inner container is perforated, the circulating water can leak into the furnace, and is rapidly gasified due to temperature rise, and the equipment is caused to explode. Can cause great damage to single crystal furnace equipment and even directly discard the equipment.
At present, the conventional treatment process generally adopts means such as circulating water dosing and purification, improves the water quality, avoids the content of chloride ions in water from exceeding standard, reduces the probability of corrosion, but because of unpredictability of accident conditions, the corrosion of jacket equipment still exists, and the influence is large. Therefore, a method that can better prevent corrosion of the single crystal furnace is sought.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a method for preventing the outer wall of the liner of jacket equipment from being corroded by chloride ions. According to the invention, the outer wall of the inner container of the single crystal furnace is additionally provided with the peripheral aluminum alloy anode strip, and the aluminum alloy strip takes effect as a sacrificial anode cathodic protection measure, so that cathodic protection can be formed on the outer wall of the stainless steel inner container, and the corrosion of chloride ions to the stainless steel outer wall of equipment can be effectively relieved; or the auxiliary anode and the reference electrode are additionally arranged at the corresponding positions of the single crystal furnace and connected with the multi-channel potentiostat, and the outer wall of the equipment inner container is always kept in an electron-rich state in an additional current mode, so that the cathode protection of the outer wall of the equipment inner container is realized, and the corrosion of chloride ions to the stainless steel outer wall of the equipment is effectively relieved.
The technical scheme of the invention is as follows:
a method for preventing the corrosion of chlorine ions on the external wall of the liner of a jacket device is characterized in that an anode strip is arranged on the external wall of the liner of the jacket device to form a sacrificial anode cathodic protection system or a jacket layer of the existing device is provided with cathodic protection to form a forced current cathodic protection system.
Furthermore, the inner container is made of stainless steel.
Further, the method is preferably used in the production of new products, an anode strip is arranged on the outer wall of the liner of the jacket equipment to form a sacrificial anode cathode protection system, and then the jacket is fixed.
Further, the construction method of the sacrificial anode cathodic protection system comprises the following steps: an anode strip is wound on the outer wall of the inner container of the device, the anode strip is fixed on the outer wall of the inner container through welding, and then a jacket is arranged.
Furthermore, the anode strip is an aluminum alloy strip with the width of 4cm and the thickness of 3cm, and 1.9-2.1 meters of aluminum alloy strip is arranged on the outer wall of each square meter (calculated according to the circumferential direction of the outer wall); the anode strip is preferably an aluminium alloy strip 4cm wide, 3cm thick and 27 metres long.
Further, the protection current of the sacrificial anode cathodic protection system is 0.65-2.6A, preferably 0.65A; the protective current density is 50-200 mA/m 2 。
Furthermore, the forced current cathodic protection system comprises a two-way forced current cathodic protection system, wherein one way is a forced current cathodic protection system I on the outer wall of the auxiliary chamber of the equipment; the other path is a forced current cathodic protection system II of the outer wall of the furnace body jacket; the protection current of the forced current cathodic protection system is 0.65-2.6A, and the protection current density is 50-200 mA/m 2 。
Furthermore, a forced current cathode protection system I of the outer wall of the auxiliary chamber of the equipment is characterized in that an annular guide rail I, an annular guide rail II and an annular guide rail III are arranged on the outer wall of the auxiliary chamber of the equipment, and a cathode connecting terminal of a constant potential rectifier is connected with the annular guide rail I of the outer wall of the auxiliary chamber of the equipment to form cathode protection; a reference electrode box is arranged at the position of a circulating water outlet and comprises a binding post I, a binding post of the reference electrode box is connected with an annular guide rail II, an electric brush II is arranged on the annular guide rail II, and the electric brush II is connected with a reference electrode of a constant potential rectifier; set up supplementary positive pole box in circulating water import position, supplementary positive pole box includes terminal II, and terminal II and the circular guide III of supplementary positive pole box are connected, is provided with brush III on the guide rail III, and brush III is connected with the supplementary positive pole of constant potential rectifier.
Furthermore, a cathode wiring terminal of the constant potential rectifier is connected with the outer wall of the equipment furnace body jacket to form cathode protection; connecting a reference electrode of a potentiostat with a reference electrode box, specifically connecting a reference electrode of a potentiostat with a binding post of the reference electrode box; and a binding post of the auxiliary anode box is connected with an auxiliary anode of the constant potential rectifier by a lead, the reference electrode box is arranged on a circulating water outlet pipeline, and the auxiliary anode box is arranged on a circulating water inlet pipeline.
Furthermore, the reference electrode box comprises a wiring terminal, a reference electrode, an electrode box shell, an anti-impact baffle, an inlet connecting pipe and an outlet connecting pipe.
Furthermore, the auxiliary anode box comprises a binding post, an auxiliary anode, an electrode box shell, an anti-impact baffle, an inlet connecting pipe and an outlet connecting pipe; the auxiliary anode is a platinum-niobium composite anode.
Further, the brush is connected with a terminal of the reference electrode box.
The beneficial technical effects of the invention are as follows:
the invention effectively protects the equipment under the condition that the possible circulating water chloride ions exceed the standard by adopting active measures, can prolong the service life of the equipment to the maximum extent and avoid the damage of the equipment caused by cavitation erosion and the like.
The invention provides electric charge for the protective surface of equipment, cathode polarization is formed on the surface of metal, and electrochemical corrosion between free chloride ions in water and stainless steel can be effectively inhibited when the potential of the metal is negative to a certain potential value. The sacrificial anode method supplies electric charge to the surface of the device through an anode strip, and the forced current method supplies electric charge to the surface of the device through direct current supplied by a potentiostat.
Drawings
Fig. 1 is a schematic view of embodiment 1 of the present invention.
Fig. 2 is a schematic diagram of embodiment 2 of the present invention.
Fig. 3 is a schematic structural view of a reference electrode cartridge in embodiment 2 of the present invention.
In the figure: 1 is a binding post, and 2 is a reference electrode; 3 is an electrode box shell; 4 is an anti-impact baffle; 5 is an inlet connecting pipe; and 6 is an outlet connecting pipe.
Fig. 4 is a schematic structural view of an auxiliary anode case in embodiment 2 of the present invention.
In the figure: 1 is a binding post, and 2 is an auxiliary anode; 3 is an electrode box shell; 4 is an anti-impact baffle; 5 is an inlet connecting pipe; 6 is an outlet connecting pipe.
Fig. 5 is a schematic diagram of the dynamic wiring structure of the auxiliary anode box.
FIG. 6 is a schematic view showing corrosion of a jacket apparatus according to the present invention.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings and examples.
The invention provides a method for preventing the corrosion of the outer wall of a liner of a single crystal furnace, which is characterized in that the existing single crystal furnace equipment depends on the control of water quality and the self anti-corrosion characteristic of materials, and is different in equipment damage caused by unavoidable occurrence of cavitation when meeting abnormal working conditions that chloride ions exceed standards.
In one embodiment of the invention, for new equipment, in the manufacturing process, the aluminum alloy anode strip surrounds the inner wall of the equipment, the anode strip is welded on the outer wall of the inner wall of the equipment according to an equal division mode, the equipment is installed with an external sleeve after the anode strip is installed, and in the subsequent production and use processes, once the water quality exceeds the standard, the aluminum alloy anode strip can effectively protect the equipment cylinder.
In another embodiment of the invention, the existing equipment is modified, an auxiliary anode and a reference electrode are additionally arranged on an equipment interface, a cathode lead is welded on an equipment cylinder body, the equipment cylinder body is connected and conducted with a multi-channel constant potential rectifier in series, and the equipment cylinder body is effectively protected by adopting the forced current cathodic protection.
Example 1
A method for preventing chloride ion corrosion of a cooling layer on the outer wall of an inner container of a jacket device is provided, the embodiment aims at the improvement of the existing single crystal furnace, and the existing device is improved by adopting a sacrificial anode and cathode protection scheme; the adopted circulating water indexes are as follows: the temperature of the material (circulating water) is 30-50 ℃, the conductivity is 28/366 mu S/cm (normal/abnormal), and the chloride is 1.53/20.7mg/L (normal/abnormal).
(1) Calculating to obtain the outer surface area 13m to be protected according to the outer shape parameters of the single crystal furnace 2 Empirically, the protection current density was taken to be 50mA/m 2 The weight of the anode was calculated according to the following formula:
W＝8760It/ZUQ
in the formula: i is the anode current output (obtained by multiplying the external surface area by the protection current density), and is unit A; t is the design life of the equipment, unit; u is current efficiency (0.5)
Z is theoretical capacitance, and 2970Ah/kg is taken; q is the anode utilization rate, and is 85 percent; w is the weight (Kg) of the anode.
The anode current output value is calculated to be 0.65A according to the protection area and the current density, the design life is 20 years as same as that of the device, the required aluminum alloy strip-shaped anode (3A 21) with the weight of 90.22kg and the number of anode strips with the thickness of 4x3cm reduced to the specification of about 27 meters can be obtained, and the inner wall of the device is circumferentially and equally spot-welded and laid, so that the anti-corrosion effect of the aluminum alloy strip-shaped anode on the inner wall can be ensured, as shown in figure 1.
(2) In the manufacturing process of the single crystal furnace, the 27-meter aluminum alloy anode strip surrounds the inner wall of the equipment, the anode strip is welded on the inner wall of the equipment according to an equal division mode, an outer jacket is installed on the equipment after the equipment is completed, and in the subsequent production and use processes, the aluminum alloy anode strip can effectively protect the cylinder of the equipment to protect the inner wall of the equipment once the water quality exceeds the standard. In the work, the metal activity of the additionally arranged aluminum alloy anode strip is higher than that of the stainless steel outer wall, so that the anode strip can react preferentially to the outer wall of the inner container of the single crystal furnace, and the electron loss of the outer wall of the single crystal furnace is avoided, thereby forming the protection for the outer wall of the single crystal furnace.
Example 2
A method for preventing chloride ion corrosion of a cooling layer on the outer wall of an inner container of jacket equipment is disclosed, and the embodiment is used for modifying the existing single crystal furnace by adopting a forced current cathode protection scheme; the adopted circulating water indexes are as follows: the temperature of the material (circulating water) is 30-50 ℃, the conductivity is 28/366 mu S/cm (normal/abnormal), and the chloride is 1.53/20.7mg/L (normal/abnormal).
(1) According to the external parameters of the single crystal furnace, the external surface area to be protected is calculated to be 13m 2 The protection current density is 50mA/m 2 And calculating the required protection current I according to a related formula of GB/T17005.
V＝I(R a +R 1 +R c )+V a
In the formula: p is power supply power, and the unit W and the unit V are output voltage and the unit V; eta is the equipment efficiency, I is the required protection current, and the unit is A; ra is the auxiliary oxygen agent connecting water resistance with ohm unit; r 1 Is the wire resistance, unit ohm; r c Cathode excess resistance, in ohms; v a To assist the back emf of the oxygen bed in units of V (coke charge).
The required power P was empirically taken to be 5.07w and the power plant output voltage V was taken to be 5.46V (8 ohms according to Ra; R) 1 Is ohm; r is c 0.4 ohm; the conducting wire is a pure copper conducting wire, and is short in length and can be ignored; the back emf of the auxiliary anode bed can be disregarded) where the efficiency of the power supply apparatus is taken to be 0.7 and the required protection current is calculated to be 0.65A.
(2) Calculating the mass of the auxiliary anode by adopting platinumNiobium composite anode, consumption rate omega a Taking 0.01g/A.a, designing the service life according to the service life T of the equipment a For 20 years, the mass of the auxiliary anode material was calculated according to the following formula, taking the auxiliary anode utilization coefficient K to be 0.8.
In the formula: w is a group of a The mass of the anode is expressed in kg; t is a The equipment life is in unit of year; omega a Consumption in g/a.a; i is the desired protection current in a.
The required anode quality W can be obtained a The weight of the anode is 0.16kg, and the number of the required auxiliary anodes is 1 based on the mass of a single anode of 2 kg/root.
(3) As the auxiliary chamber and the furnace body jacket are used separately, a double-path forced current cathodic protection system is arranged to protect the inner wall of the equipment as shown in figures 2-5; the double-path forced current cathodic protection system specifically comprises:
the furnace body jacket (furnace body) and the surface of the auxiliary chamber are respectively provided with an auxiliary anode, a reference electrode and a cathode protection, and are connected with a constant potential rectifier.
Specifically, the setting mode of the auxiliary chamber is as follows: the auxiliary chamber of the single crystal furnace is provided with an annular guide rail I, an annular guide rail II and an annular guide rail III by utilizing a conductive bracket, and a cathode of a constant potential rectifier is connected with an electric brush I and the auxiliary chamber jacket annular guide rail I of the single crystal furnace by a lead through a cathode wiring string terminal to form a cathode loop;
a reference electrode box is arranged at the position of a circulating water outlet, a binding post I of the reference electrode box is connected with an annular guide rail II, and the guide rail is connected with an equipment shell by adopting an insulating material; the electric brush II is connected with an auxiliary anode terminal of the multi-path constant potential instrument, and the electric brush is always attached to and conducted with the guide rail;
an auxiliary anode is arranged in a circulating water inlet pipeline, a binding post II of the auxiliary anode is provided with an annular guide rail III, the guide rail is supported on the outer wall of equipment by adopting an insulating material support, an auxiliary anode terminal of the potentiometer is connected with an electric brush III by a lead, and the auxiliary anode terminal of the potentiometer is connected with the electric brush through the guide rail to form a passage.
The setting method of the furnace body in the same way comprises the following steps: connecting the cathode of the constant potential rectifier with the outer wall of the auxiliary chamber of the single crystal furnace through a copper wire by a wiring pile to form a cathode protection loop;
a reference electrode is arranged at the position of a circulating water outlet, a wiring pile of the reference electrode is connected with a wiring pile of the reference electrode of the potentiostat, an auxiliary anode is arranged in a circulating water inlet pipeline, and the wiring pile of the auxiliary anode is connected with the wiring pile of the auxiliary anode of the potentiostat through a copper wire.
In the work, the potentiostat is opened, the voltage of the potentiostat is set to be 5.46V, and the potential around the outer wall of the single crystal furnace can be ensured to be higher than that of the outer wall of the single crystal furnace in the use of the single crystal furnace, so that the outer wall of the single crystal furnace is protected.
Similarly, the outer wall of the auxiliary chamber can also realize corrosion prevention.
Compared with the corrosion situation which occurs when no protective measures are taken (as shown in figure 6), the method of the invention can effectively avoid the corrosion situation.
The invention can well utilize the prior electrochemical reaction of the newly added anode strip and the medium by arranging the aluminum alloy strip anode on the outer wall of the single crystal furnace and adopting a sacrificial anode cathode protection method and installing the anode strip on the metal surface, thereby avoiding the corrosion of the outer wall of the single crystal furnace. The double-path forced current cathodic protection system is respectively arranged on the auxiliary chamber and the furnace body jacket, so that the reactivity of free chlorine in the surrounding environment and the metal body is reduced, and the corrosion of the outer wall of the inner container is prevented.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed.
Claims (10)
1. A method for preventing the corrosion of chloride ions on the outer wall of an inner container of a jacket device is characterized in that an anode strip is arranged on the outer wall of the inner container of the jacket device to form a sacrificial anode cathodic protection system, or a cathode protection is arranged on a jacket layer to form a forced current cathodic protection system.
2. The method of claim 1, wherein the sacrificial anode cathodic protection system is constructed by: an anode strip is wound on the outer wall of the liner of the jacket equipment, the anode strip is fixed on the outer wall of the liner by welding, and then the jacket is arranged.
3. The method according to claim 2, wherein the anode strip is an aluminum alloy strip having a width of 4cm and a thickness of 3cm, and 1.9 to 2.1 meters of the aluminum alloy strip is provided per square meter of the outer wall; the anode strip is preferably an aluminium alloy strip 4cm wide, 3cm thick and 27 metres long.
4. The method according to claim 2, wherein the sacrificial anodic cathodic protection system has a protection current of 0.65 to 2.6A, preferably 0.65A; the protective current density is 50-200 mA/m 2 。
5. The method according to claim 1, wherein the impressed current cathodic protection system comprises a two-way impressed current cathodic protection system, one being an impressed current cathodic protection system i of the outer wall of the equipment sub-chamber; the other path is a forced current cathodic protection system II of the outer wall of the jacket of the furnace body of the equipment.
6. The method of claim 5, wherein the protection current of the forced current cathodic protection system is 0.65-2.6A, and the protection current density is 50-200 mA/m 2 。
7. The method as claimed in claim 5, wherein the forced current cathodic protection system I of the outer wall of the auxiliary chamber of the equipment is characterized in that a circular guide rail I, a circular guide rail II and a circular guide rail III are arranged on the outer wall of the auxiliary chamber of the equipment, and a cathode terminal of a constant potential rectifier is connected with the circular guide rail I of the outer wall of the auxiliary chamber of the equipment to form cathodic protection; a reference electrode box is arranged at the position of a circulating water outlet and comprises a binding post I, a binding post of the reference electrode box is connected with an annular guide rail II, an electric brush II is arranged on the annular guide rail II, and the electric brush II is connected with a reference electrode of a constant potential rectifier; an auxiliary anode box is arranged at a circulating water inlet and comprises a binding post II, the binding post II of the auxiliary anode box is connected with an annular guide rail III, an electric brush III is arranged on the annular guide rail III, and the electric brush III is connected with an auxiliary anode of a constant potential rectifier.
8. The method according to claim 5, wherein the forced current cathodic protection system II of the outer wall of the equipment furnace body jacket is formed by connecting a cathode terminal of a constant potential rectifier with the outer wall of the equipment furnace body jacket to form cathodic protection; a reference electrode of the potentiostat is connected with a reference electrode box, one end of an auxiliary anode box is connected with the auxiliary anode box of the potentiostat, the reference electrode box is arranged on a circulating water outlet pipeline, and the auxiliary anode box is arranged on a circulating water inlet pipeline.
9. The method of any one of claims 7-8, wherein the reference electrode cartridge comprises a terminal post, a reference electrode, an electrode cartridge housing, an anti-impingement baffle, an inlet connection, and an outlet connection.
10. The method of any one of claims 7-8, wherein the auxiliary anode cartridge comprises a terminal post, an auxiliary anode, an electrode cartridge housing, an anti-shock baffle, an inlet connection tube, an outlet connection tube; the auxiliary anode is a platinum-niobium composite anode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211726049.6A CN115976522A (en) | 2022-12-30 | 2022-12-30 | Method for preventing chloride ion corrosion of outer wall of liner of jacket equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211726049.6A CN115976522A (en) | 2022-12-30 | 2022-12-30 | Method for preventing chloride ion corrosion of outer wall of liner of jacket equipment |
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| CN115976522A true CN115976522A (en) | 2023-04-18 |
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| CN202211726049.6A Pending CN115976522A (en) | 2022-12-30 | 2022-12-30 | Method for preventing chloride ion corrosion of outer wall of liner of jacket equipment |
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| CN (1) | CN115976522A (en) |
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- 2022-12-30 CN CN202211726049.6A patent/CN115976522A/en active Pending
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