CN115971020B - Ultrasonic transducer, manufacturing method thereof and ultrasonic transduction system - Google Patents
Ultrasonic transducer, manufacturing method thereof and ultrasonic transduction system Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 230000026683 transduction Effects 0.000 title abstract description 7
- 238000010361 transduction Methods 0.000 title abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 100
- 238000000034 method Methods 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 5
- 239000002861 polymer material Substances 0.000 claims description 5
- 238000002604 ultrasonography Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 description 10
- 238000005530 etching Methods 0.000 description 7
- 238000003491 array Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000012945 sealing adhesive Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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Abstract
The application provides an ultrasonic transducer, a manufacturing method thereof and an ultrasonic transduction system. The ultrasonic transducer comprises a first substrate, a first electrode and a second electrode, wherein the first substrate comprises a first base, a plurality of first electrodes and a plurality of cylindrical structures; the first electrodes are distributed on one side of the first substrate at intervals; the plurality of cylindrical structures are distributed on one side of the first substrate at intervals, and the plurality of cylindrical structures correspondingly surround the plurality of first electrodes; the cylindrical structure is higher than the first electrode; the second substrate is arranged opposite to the first substrate and comprises a second base, a plurality of second electrodes and a vibrating diaphragm, the second electrodes are distributed on one side of the second base facing the first base at intervals, the second electrodes correspond to the first electrodes, and the vibrating diaphragm is arranged on one side of the second electrodes facing the first electrodes; the plurality of cylindrical structures are supported on one side of the diaphragm facing the first substrate. The application can solve the problem that the vibrating diaphragm is easy to collapse.
Description
Technical Field
The application relates to the technical field of ultrasonic transducers, in particular to a connector ultrasonic transducer, a manufacturing method thereof and an ultrasonic transduction system.
Background
With the development of technology, ultrasonic transducers have attracted more and more attention. However, existing ultrasound transducers are subject to improvement.
Disclosure of Invention
The application provides an ultrasonic transduction device without sacrificial layer etching, a manufacturing method thereof and an ultrasonic transduction system, which can prevent diaphragm collapse.
The application provides an ultrasonic transducer, comprising:
A first substrate including a first base, a plurality of first electrodes, and a plurality of cylindrical structures; the first electrodes are distributed on one side of the first substrate at intervals; the cylindrical structures are distributed on one side of the first substrate at intervals, and correspondingly surround the first electrodes; the cylindrical structure is higher than the first electrode;
the second substrate is arranged opposite to the first substrate and comprises a second base, a plurality of second electrodes and a vibrating diaphragm, the second electrodes are distributed on one side of the second base facing the first base at intervals, the second electrodes correspond to the first electrodes, and the vibrating diaphragm is arranged on one side of the second electrode facing the first electrode; the cylindrical structures are supported on one side of the vibrating diaphragm, which faces the first substrate.
Further, the plurality of first electrodes comprise a plurality of first electrode groups, and the electrodes in the first electrode groups are distributed along a first direction; the plurality of second electrodes comprise a plurality of second electrode groups, and the electrodes in the second electrode groups are distributed along a second direction; the first direction intersects the second direction; the electrodes in the first electrode group are electrically connected through a first connecting wire, and the electrodes in the second electrode group are electrically connected through a second connecting wire.
Further, the first electrodes are distributed in a rectangular array, and the second electrodes are correspondingly distributed in a rectangular array; the first direction is orthogonal to the second direction.
Further, the first wire and the first electrode are arranged in the same layer, and the cylindrical structure covers part of the first wire; the second connecting wire and the second electrode are arranged on the same layer, and the vibrating diaphragm covers part of the second connecting wire.
Further, the ultrasonic transducer further comprises a first limiting piece and a second limiting piece, wherein one of the first limiting piece and the second limiting piece is arranged on one side of the first substrate facing the second substrate, and the other is arranged on one side of the second substrate facing the first substrate; the first limiting piece and the second limiting piece are corresponding in position and matched with each other.
Further, the ultrasonic transducer comprises a plurality of first limiting pieces and second limiting pieces; the first limiting parts are arranged in a rectangular array; the rectangular array formed by the first electrodes and the rectangular array formed by the first limiting pieces are arranged in a staggered mode.
Further, the second limiting piece is conical, and the conical tip of the second limiting piece faces the first limiting piece; the second limiting part main body is made of a high polymer material, and a layer of metal film is plated on the surface of the main body.
Further, the cylindrical structure is a cylindrical cylinder or a polygonal cylinder, and the number of edges of the polygonal cylinder is more than 3; the cavity in the middle of the cylindrical structure is a vibration cavity.
The application also provides an ultrasonic system comprising the ultrasonic transducer.
The application also provides a manufacturing method of the ultrasonic transducer, which comprises the following steps:
Providing a first substrate, wherein the first substrate comprises a first base, a plurality of first electrodes and a cylindrical structure; the first electrodes are distributed on one side of the first substrate at intervals; the cylindrical structures are arranged on one side of the first substrate and are distributed at intervals, and the cylindrical structures correspondingly surround the first electrodes; the cylindrical structure is higher than the first electrode;
Providing a second substrate, wherein the second substrate comprises a second base, a plurality of second electrodes and a vibrating diaphragm, the second electrodes are distributed on one side of the second base facing the first base at intervals, the second electrodes correspond to the first electrodes, and the vibrating diaphragm is arranged on one side of the second electrodes facing the first electrodes; the cylindrical structures are supported on one side of the vibrating diaphragm, which faces the first substrate;
and pairing the first substrate and the second substrate.
Compared with the prior art, the ultrasonic transducer provided by the application does not need to adopt a sacrificial layer etching process, so that the problem of long sacrificial layer etching time in the traditional scheme is avoided, and meanwhile, the problem that the vibrating diaphragm is easy to collapse in a cavity hollow state after the etching is finished can be avoided through the cylindrical structure of the supporting vibrating diaphragm.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the specification and together with the description, serve to explain the principles of the specification.
Fig. 1 is a schematic cross-sectional structure of an ultrasonic transducer according to an exemplary embodiment of the present application.
Fig. 2 is a schematic cross-sectional structure of a first substrate according to an exemplary embodiment of the present application.
Fig. 3 is a schematic cross-sectional structure of a second substrate according to an exemplary embodiment of the present application.
Fig. 4 is a top view of an ultrasound transducer according to an exemplary embodiment of the present application.
Fig. 5 is a schematic diagram of the second limiting member according to the present application.
Reference numerals illustrate: a first substrate 100; a first substrate, 10; a buffer layer 11; a first electrode 12; a first electrode group 121; a first wire 13; a tubular structure 14; a vibrating cavity 131; a first stopper 31; a second substrate 200; a second substrate 20; a second electrode 21; a second electrode group 211; a second wire 22; a diaphragm 23; a second stop 32; a main body 321; metal thin films, 322; sealing frame glue, 300; a first glass substrate 400; a second glass substrate, 500.
Detailed Description
Reference will now be made in detail to exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numbers in different drawings refer to the same or similar elements, unless otherwise indicated. The implementations described in the following exemplary examples do not represent all implementations consistent with the present specification. Rather, they are merely examples of apparatus and methods consistent with some aspects of the present description as detailed in the accompanying claims.
The terminology used in the description presented herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the description. As used in this specification and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and/or" as used herein refers to and encompasses any or all possible combinations of one or more of the associated listed items.
It should be understood that although the terms first, second, third, etc. may be used in this specification to describe various information, these information should not be limited to these terms. These terms are only used to distinguish one type of information from another. For example, the first information may also be referred to as second information, and similarly, the second information may also be referred to as first information, without departing from the scope of the present description. The word "if" as used herein may be interpreted as "at … …" or "at … …" or "in response to a determination" depending on the context.
In the related art, a vibrating diaphragm in an ultrasonic transducer needs to be matched with a vibrating cavity, and the vibrating cavity needs to be formed by etching a sacrificial layer. The etching time of the sacrificial layer is too long, and after the sacrificial layer is etched, the lower cavity of the vibrating diaphragm is in a hollowed-out state, and the vibrating diaphragm is easy to collapse.
Next, embodiments of the present specification will be described in detail.
The application discloses an ultrasonic transducer, a manufacturing method thereof and an ultrasonic transduction system.
As shown in fig. 1 to 4, the ultrasonic transducer includes a first substrate 100 and a second substrate 200. The first substrate 100 and the second substrate 200 are bonded together by the frame sealing adhesive 300.
The first substrate 100 includes a first base 10, a buffer layer 11, a first electrode 12, a first connection line 13, and a cylindrical structure 14.
Preferably, the first substrate 10 adopts a PI substrate (polyimide substrate), and the side of the first substrate 10 facing the second substrate 200 is covered with a buffer layer 11.
The first electrodes 12 are spaced apart from one another on a side of the first substrate 10 facing the second substrate 200. The plurality of first electrodes 12 includes a plurality of first electrode groups 121, and the first electrodes 12 in the first electrode groups 121 are distributed along the first direction. The first electrodes 12 are provided with first connection lines 13 on the same layer, and the first electrodes 12 in the same first electrode group 121 are electrically connected through the first connection lines 13. In this embodiment, the plurality of first electrodes 12 are distributed in a rectangular array on a side of the buffer layer 11 facing the second substrate 200.
The plurality of cylindrical structures 14 are spaced apart from one side of the first substrate 10, and the plurality of cylindrical structures 14 correspondingly surround the plurality of first electrodes 12. Wherein the plurality of cylindrical structures 14 surrounds the plurality of first electrodes 12 in a one-to-one correspondence. The distance of the cylindrical structure 14 from the second substrate 200 is smaller than the distance of the first electrode 12 from the second substrate 200. The tubular structure 14 covers part of the first connection line 13. In the present embodiment, the plurality of cylindrical structures 14 are distributed in a rectangular array on a side of the buffer layer 11 facing the second substrate 200 and are in one-to-one correspondence with the first electrodes 12.
The cylindrical structure 14 is a cylindrical cylinder or a polygonal cylinder, and if the cylindrical structure is a polygonal cylinder, the number of sides of the polygonal cylinder is greater than 3. The cavity in the middle of the tubular structure is a vibration cavity 131. In this embodiment, the tubular structure 14 is a cylindrical barrel. Preferably, the cylindrical structure is made of polystyrene.
The second substrate 200 is disposed opposite to the first substrate 100, and includes a second base 20, a second electrode 21, a second connection line 22, and a diaphragm 23. Preferably, the second substrate 20 employs a PI substrate.
The plurality of second electrodes 21 are spaced apart from one side of the second substrate 20 facing the first substrate 10. The plurality of second electrodes 21 corresponds to the plurality of first electrodes 12. The plurality of second electrodes 21 includes a plurality of second electrode groups 211, and the second electrodes 21 in the second electrode groups 211 are distributed along a second direction, and the second direction intersects the first direction. The second electrode 21 is provided with a second connection line 22 on the same layer, and the second electrodes 21 in the same second electrode group 211 are electrically connected through the second connection line 22. In the present embodiment, the plurality of second electrodes 21 are distributed in a rectangular array on one side of the second substrate 20 facing the first substrate 100, and the second direction is orthogonal to the first direction, so as to avoid interference of coupling capacitance on the ultrasonic signal caused by overlapping wires.
The diaphragm 23 is disposed on a side of the second electrode 21 facing the first electrode 12, and the diaphragm 23 covers the second electrode 21 and part of the second wire 22. The side of the diaphragm 23 facing the first electrode 12 is supported by the tubular structure 14. The cylindrical structure 14 supports the vibrating diaphragm 23, so that the problem that the vibrating diaphragm 23 is easy to collapse in the hollow state of the vibrating cavity 131 can be avoided.
The ultrasonic transducer of the application further comprises a first limiting piece 31 and a second limiting piece 32, wherein one of the first limiting piece 31 and the second limiting piece 32 is arranged on one side of the first substrate 10 facing the second substrate 20, and the other is arranged on one side of the second substrate 20 facing the first substrate 10; the first limiting piece 31 and the second limiting piece 32 are corresponding in position and are matched with each other. In the present embodiment, the first limiting member 31 is disposed on the first substrate 10, and the second limiting assembly is disposed on the second substrate 20.
The ultrasonic transducer includes a plurality of first stoppers 31 and a plurality of second stoppers 32. The first limiting members 31 are arranged in a rectangular array on the same layer of the first electrode 12. The rectangular array formed by the plurality of first electrodes 12 and the rectangular array formed by the plurality of first limiting members 31 are arranged in a staggered manner.
The second limiting member 32 is conical, and the conical tip of the second limiting member 32 faces the first limiting member 31. The second limiting members 32 and the first limiting members 31 are arranged in a rectangular array corresponding to each other and are located at the same layer as the second electrode 21. The main body 321 of the second limiting member 32 is made of a polymer material, and a layer of metal film 322 is plated on the surface of the main body 321.
As shown in fig. 5, the second limiting member 32 is manufactured by a photolithography process, and in order to obtain the final conical second limiting member 32, calculation may be performed according to the Lambert-beer law:
I＝I0E-αh
Wherein, I 0 is the initial UV light intensity, I is the critical light intensity which makes the polymer material unable to react any more, and alpha is the absorption coefficient of the photoresistance to UV.
We can get the following relationship:
I＝I1E-αh1;I＝I2E-αh2;I＝I3E-αh3;I＝I4E-αh4
No matter how large the value of I 0 is, the final I value must be the same for the same type of photoresist, we can calculate the absorption coefficient α using the above relation, and after obtaining the parameter, we can set the final exposure energy according to our design requirement h.
The application also provides an ultrasonic system comprising the ultrasonic transducer.
The application also provides a manufacturing method of the ultrasonic transducer, which comprises the following steps:
providing a first glass substrate 400, and manufacturing a first substrate 100 on the first glass substrate 400;
sequentially forming a first base 10 and a buffer layer 11 on a first glass substrate 400;
Forming a plurality of first electrodes 12, first wires 13, a plurality of tubular structures 14, and a plurality of first stoppers 31 on the buffer layer 11;
The first electrodes 12 are distributed on the buffer layer 11 in a rectangular array, and the first electrodes 12 are electrically connected through the first connection lines 13 in the first direction; the plurality of cylindrical structures 14 correspondingly surround the plurality of first electrodes, the cylindrical structures 14 cover part of the first connecting wires 13, and the cylindrical structures 14 are higher than the first electrodes 12; the first limiting pieces 31 are distributed between the rectangular arrays of the first electrodes 12 in rectangular arrays; the first glass substrate 400 is removed using laser lift-off.
Providing a second glass substrate 500, and manufacturing a second substrate 200 on the second glass substrate 500;
Forming a second base 20 on a second glass substrate 500, forming a plurality of second electrodes 21, second connection lines 22, a diaphragm 23 and a plurality of second limiting members 32 on the second base 20;
The plurality of second electrodes 21 correspond in position to the plurality of first electrodes 12, and the plurality of second electrodes 21 are electrically connected in the second direction through second wires 22; a diaphragm 23 is formed on a side of the second electrode 21 facing the first electrode 12; the second limiting members 32 are distributed in rectangular arrays between the rectangular arrays of the second electrodes 21; the second glass substrate 500 is removed using laser lift-off.
The first substrate 100 and the second substrate 200 are paired and bonded by using the frame sealing glue 300, and the vibrating diaphragm 23 is supported by the cylindrical structure 14 after the pairing. The method can effectively solve the problem of overlong etching time of the sacrificial layer in the traditional method.
The above description is not intended to limit the application in any way, but rather to limit the application to the preferred embodiments disclosed, and any person skilled in the art may make use of the application without departing from the scope of the application
The disclosed technical content is changed or modified to be equivalent to the equivalent embodiment of the equivalent change, but any simple modification, equivalent change and modification of the above embodiment according to the technical substance of the present application still falls within the scope of the technical solution of the present application.
Claims (7)
1. An ultrasonic transducer, comprising:
A first substrate including a first base, a plurality of first electrodes, and a plurality of cylindrical structures; the first electrodes are distributed on one side of the first substrate at intervals; the cylindrical structures are distributed on one side of the first substrate at intervals, and correspondingly surround the first electrodes; the cylindrical structure is higher than the first electrode;
The second substrate is arranged opposite to the first substrate and comprises a second base, a plurality of second electrodes and a vibrating diaphragm, the second electrodes are distributed on one side of the second base facing the first base at intervals, the second electrodes correspond to the first electrodes, and the vibrating diaphragm is arranged on one side of the second electrode facing the first electrode; the cylindrical structures are supported on one side of the vibrating diaphragm, which faces the first substrate;
The ultrasonic transducer further comprises a plurality of first limiting pieces and a plurality of second limiting pieces, wherein one of the first limiting pieces and the second limiting pieces is arranged on one side of the first substrate facing the second substrate, and the other one of the first limiting pieces and the second limiting pieces is arranged on one side of the second substrate facing the first substrate; the first limiting piece and the second limiting piece are corresponding in position and are matched with each other; the first limiting parts are arranged in a rectangular array; the rectangular array formed by the plurality of first electrodes and the rectangular array formed by the plurality of first limiting pieces are arranged in a staggered manner; the second limiting piece is conical, and the conical tip of the second limiting piece faces the first limiting piece; the second limiting part main body is made of a high polymer material, and a layer of metal film is plated on the surface of the main body.
2. The ultrasonic transducer of claim 1, wherein a plurality of the first electrodes comprise a plurality of first electrode sets, the electrodes of the first electrode sets being distributed along a first direction; the plurality of second electrodes comprise a plurality of second electrode groups, and the electrodes in the second electrode groups are distributed along a second direction; the first direction intersects the second direction; the electrodes in the first electrode group are electrically connected through a first connecting wire, and the electrodes in the second electrode group are electrically connected through a second connecting wire.
3. The ultrasonic transducer of claim 2, wherein a plurality of the first electrodes are distributed in a rectangular array and a plurality of the second electrodes are correspondingly distributed in a rectangular array; the first direction is orthogonal to the second direction.
4. The ultrasonic transducer of claim 2, wherein the first wire is co-layer with the first electrode, the tubular structure covering a portion of the first wire; the second connecting wire and the second electrode are arranged on the same layer, and the vibrating diaphragm covers part of the second connecting wire.
5. The ultrasonic transducer of claim 1, wherein the cylindrical structure is a cylindrical barrel or a polygonal barrel, the number of sides of the polygonal barrel being greater than 3; the cavity in the middle of the cylindrical structure is a vibration cavity.
6. An ultrasound system comprising an ultrasound transducer according to any of claims 1-5.
7. A method of making an ultrasonic transducer, the method comprising:
Providing a first substrate, wherein the first substrate comprises a first base, a plurality of first electrodes and a cylindrical structure; the first electrodes are distributed on one side of the first substrate at intervals; the cylindrical structures are arranged on one side of the first substrate and are distributed at intervals, and the cylindrical structures correspondingly surround the first electrodes; the cylindrical structure is higher than the first electrode;
Providing a second substrate, wherein the second substrate comprises a second base, a plurality of second electrodes and a vibrating diaphragm, the second electrodes are distributed on one side of the second base facing the first base at intervals, the second electrodes correspond to the first electrodes, and the vibrating diaphragm is arranged on one side of the second electrodes facing the first electrodes; the cylindrical structures are supported on one side of the vibrating diaphragm, which faces the first substrate;
Pairing the first substrate and the second substrate;
The ultrasonic transducer further comprises a plurality of first limiting pieces and a plurality of second limiting pieces, wherein one of the first limiting pieces and the second limiting pieces is arranged on one side of the first substrate facing the second substrate, and the other one of the first limiting pieces and the second limiting pieces is arranged on one side of the second substrate facing the first substrate; the first limiting piece and the second limiting piece are corresponding in position and are matched with each other; the first limiting parts are arranged in a rectangular array; the rectangular array formed by the plurality of first electrodes and the rectangular array formed by the plurality of first limiting pieces are arranged in a staggered manner; the second limiting piece is conical, and the conical tip of the second limiting piece faces the first limiting piece; the second limiting part main body is made of a high polymer material, and a layer of metal film is plated on the surface of the main body.
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| CN115971020A (en) | 2023-04-18 |
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