CN115933865A - Vibration panel and vibration device - Google Patents
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- CN115933865A CN115933865A CN202110946572.9A CN202110946572A CN115933865A CN 115933865 A CN115933865 A CN 115933865A CN 202110946572 A CN202110946572 A CN 202110946572A CN 115933865 A CN115933865 A CN 115933865A
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Abstract
The invention provides a vibration panel and a vibration device, wherein the interface of a piezoelectric layer and at least one of a first electrode layer and a second electrode layer is provided with a concave-convex structure, the concave-convex structure can increase the interface contact area of the piezoelectric layer and at least one of the electrode layers, so that the piezoelectric layer and at least one of the electrode layers form an interlocking structure with strong adhesion, the adhesion between the piezoelectric layer and at least one of the electrode layers can be enhanced, the risk of peeling (peeling) between the piezoelectric layer and the electrode layers is prevented, and the concave-convex structure can release the stress of the film layer, thereby improving the reliability of the vibration panel.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a vibration panel and a vibration device.
Background
Haptic feedback (Haptics) is the focus of modern technology development, and in particular, haptic feedback enables terminals to interact with the human body through the sense of touch. Haptic feedback can be divided into two categories, vibration feedback and haptic rendering.
The surface touch reappearance technology can sense the object characteristics by touching the screen with naked fingers, realizes high-efficiency natural interaction at the multimedia terminal, and has great research value, thereby gaining wide attention of researchers at home and abroad. In the physical sense of surface touch, the roughness of the surface of an object acts on the surface of the skin (finger tip), and different friction forces are generated due to different surface structures. Therefore, by controlling the surface friction, different touch/feel simulations can be realized.
Disclosure of Invention
The embodiment of the invention provides a vibration panel and a vibration device, which are used for improving the structural reliability of the vibration panel.
The embodiment of the invention provides a vibration panel, which comprises: the piezoelectric element comprises a substrate base plate, and a first electrode layer, a piezoelectric layer and a second electrode layer which are sequentially stacked on the substrate base plate; wherein the content of the first and second substances,
an interface of the piezoelectric layer and at least one of the first electrode layer and the second electrode layer has a concavo-convex structure.
In a possible implementation manner, in the vibration panel provided by the embodiment of the present invention, a side of the piezoelectric layer facing the first electrode layer has a plurality of first grooves;
the first electrode layer includes: a plurality of first protrusions mutually matched with the first grooves, and a first plane part positioned between the substrate base plate and the first protrusions;
the concave-convex structure comprises the first protrusion and the first groove which are matched with each other.
In a possible implementation manner, in the vibration panel provided by the embodiment of the present invention, a side of the piezoelectric layer facing the second electrode layer has a plurality of second grooves;
the second electrode layer includes: the second grooves are matched with the first protrusions, and the first plane part is located on one side, away from the substrate base plate, of the first protrusions;
the concave-convex structure further comprises the second protrusion and the second groove which are matched with each other.
In a possible implementation manner, in the above vibration panel provided by the embodiment of the present invention, a side of the substrate base substrate facing the first electrode layer has a plurality of third grooves;
the first electrode layer includes: and the first plane part is positioned between the third protrusion and the first protrusion, the first protrusion and the third protrusion are alternately arranged, and the orthographic projection of the first protrusion on the substrate base plate and the orthographic projection of the third protrusion on the substrate base plate are not overlapped.
In a possible implementation manner, in the above vibration panel provided by the embodiment of the present invention, the first protrusions and the second protrusions are alternately arranged, and an orthogonal projection of the first protrusions on the substrate base does not overlap an orthogonal projection of the second protrusions on the substrate base.
In a possible implementation manner, in the vibration panel provided by the embodiment of the present invention, a side of the piezoelectric layer facing the second electrode layer has a plurality of second grooves;
the second electrode layer includes: the second grooves are matched with the first protrusions, and the first plane part is positioned on one side, away from the substrate, of the first protrusions;
the concave-convex structure comprises the second protrusion and the second groove which are matched with each other.
In a possible implementation manner, in the vibration panel provided in the embodiment of the present invention, a side of the second electrode layer away from the substrate base plate has a plurality of fourth grooves disposed corresponding to the second protrusions, and a depth of the fourth grooves is less than or equal to a thickness of the second plane portion.
In a possible implementation manner, in the vibration panel provided in the embodiment of the present invention, an insulating layer located on a side of the second electrode layer away from the substrate is further included, and the insulating layer is tightly attached to the second electrode layer.
In a possible implementation manner, in the vibration panel provided in the embodiment of the present invention, orthographic projections of the first protrusions and the second protrusions on the substrate base plate are both in a bar shape, the first protrusions and the second protrusions both extend along a first direction, the first protrusions and the second protrusions are alternately arranged along a second direction, and the first direction and the second direction are arranged in a crossing manner.
In a possible implementation manner, in the vibration panel provided in the embodiment of the present invention, orthographic projections of the first protrusions and the second protrusions on the substrate are both block-shaped, the first protrusions and the second protrusions are alternately arranged along a first direction and a second direction, and the first direction and the second direction are arranged in a crossing manner.
In a possible implementation manner, in the above vibration panel provided by the embodiment of the present invention, the maximum thickness of the piezoelectric layer is greater than 10 times the maximum thickness of the first electrode layer.
In a possible implementation manner, in the above vibration panel provided by the embodiment of the present invention, the width of the first protrusion is 1 μm to 15 μm, and the maximum thickness of the first electrode layer is 50nm to 200nm.
In a possible implementation manner, in the vibration panel provided by the embodiment of the present invention, a thickness of the first protrusion and a thickness of the second protrusion are both less than 10% of a maximum thickness of the first electrode layer.
In a possible implementation manner, in the above vibration panel provided by the embodiment of the present invention, the width of the second protrusion is 50nm to 200nm, and the thickness of the second flat surface portion is 1 μm to 10 μm.
Correspondingly, the embodiment of the invention also provides a vibration device which comprises the vibration panel.
The embodiment of the invention has the following beneficial effects:
the invention provides a vibration panel and a vibration device, wherein the interface of a piezoelectric layer and at least one of a first electrode layer and a second electrode layer is provided with a concave-convex structure, the concave-convex structure can increase the interface contact area of the piezoelectric layer and at least one of the electrode layers, so that the piezoelectric layer and at least one of the electrode layers form an interlocking structure with strong adhesion, the adhesion between the piezoelectric layer and at least one of the electrode layers can be enhanced, the risk of peeling (peeling) between the piezoelectric layer and the electrode layers is prevented, and the concave-convex structure can release the stress of the film layer, thereby improving the reliability of the vibration panel.
Drawings
FIG. 1 is a schematic structural diagram of peeling occurring between a PZT film layer and an electrode layer in the prior art;
fig. 2-8 are schematic structural diagrams of a vibration panel according to an embodiment of the present invention;
FIG. 9 is a schematic diagram of a vibration panel according to an embodiment of the present invention;
FIG. 10 is a schematic top view of the first and second projections;
FIG. 11 is a further schematic top view of the first projection and the second projection;
FIG. 12 is a schematic view of a piezoelectric layer being broken down;
fig. 13 is a schematic diagram illustrating an actual manufacturing process of a vibration panel according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. And the embodiments and features of the embodiments may be combined with each other without conflict. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention without inventive step, are within the scope of protection of the invention.
Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. The use of the word "comprise" or "comprises", and the like, in the context of this application, is intended to mean that the elements or items listed before that word, in addition to those listed after that word, do not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "inner", "outer", "upper", "lower", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
It should be noted that the sizes and shapes of the figures in the drawings are not to be considered true scale, but are merely intended to schematically illustrate the present invention. And the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout.
The thin film piezoelectric material has the characteristics of high dielectric constant and transparency, and is very suitable for a screen integrated vibrator structure. Among them, lead zirconate titanate (PZT) is currently used in many cases due to its excellent piezoelectric properties. There are many processes for manufacturing PZT film, including dry coating (sputtering) and wet coating (Sol-Gel method), but in order to achieve good piezoelectric constant characteristics, PZT material needs to be subjected to a high temperature annealing process, which requires growth of PZT grains in an air environment at 550-650 ℃ to form a good solid solution phase. The traditional PZT film is mainly used for sensing functions (positive piezoelectric effect), mainly converts mechanical energy into electric signals and is used in the field of mechanical sensing.
At present, most PZT devices are used as inverse piezoelectric effects, and mainly PZT is used as an Actuator (Actuator) to generate high-frequency vibration to drive a glass body to generate resonance, so that the effects of virtual touch and touch feedback are realized. However, after a certain period of operation, the PZT thin film actuator is prone to generate peeling (peeling) due to internal stress of the device layer or weak ionic bond of the adhesion between the film layers because the thermal expansion coefficients of the body, the electrodes and the substrate of the PZT thin film are not matched during the manufacturing process of the PZT thin film, and when the PZT thin film actuator realizes high-amplitude vibration, the vibration strength of the PZT thin film actuator is greater than that of the adhesion between the film layers, so that the peeling is prone to occur, as shown in fig. 1.
In order to solve the problem of thin film peeling caused by high-amplitude vibration of a PZT device, an embodiment of the present invention provides a vibration panel, as shown in fig. 2 to 8, including: the piezoelectric element comprises a substrate base plate 1, and a first electrode layer 2, a piezoelectric layer 3 and a second electrode layer 4 which are sequentially stacked on the substrate base plate 1; wherein the content of the first and second substances,
the interface of the piezoelectric layer 3 and at least one of the first electrode layer 2 and the second electrode layer 4 has a concavo-convex structure.
According to the vibration panel provided by the embodiment of the invention, the interface between the piezoelectric layer and at least one of the first electrode layer and the second electrode layer is set to have the concave-convex structure, and the concave-convex structure can increase the interface contact area between the piezoelectric layer and at least one of the first electrode layer and the second electrode layer, so that the piezoelectric layer and at least one of the electrode layers form an interlocking structure with strong adhesion, the adhesion between the piezoelectric layer and at least one of the electrode layers can be enhanced, the risk of peeling (peeling) between the piezoelectric layer and the electrode layers can be prevented, and the concave-convex structure can release the stress of the film layers, so that the reliability of the vibration panel is improved.
In practical implementation, in the above-mentioned vibration panel provided by the embodiment of the present invention, as shown in fig. 2, a side of the piezoelectric layer 3 facing the first electrode layer 2 has a plurality of first grooves 31;
the first electrode layer 2 includes: a plurality of first protrusions 21 which are matched with the first grooves 31, and a first plane part 22 which is positioned between the substrate base plate 1 and the first protrusions 21;
the relief structure comprises a first protrusion 21 and a first recess 31 matching each other. The interface of the piezoelectric layer 3 and the first electrode layer 2 forms the first protrusion 21 and the first groove 31 which are matched with each other, the contact area between the piezoelectric layer 3 and the first electrode layer 2 is increased, the piezoelectric layer 3 and the first electrode layer 2 form an interlocking structure with strong adhesion, so that the adhesion between the piezoelectric layer 3 and the first electrode layer 2 can be enhanced, the risk of falling (peeling) of the piezoelectric layer 3 and the first electrode layer 2 is prevented, the film stress can be released by the first protrusion 21 and the first groove 31, and the reliability of the vibration panel is further improved.
In practical implementation, in the above-mentioned vibration panel provided by the embodiment of the present invention, as shown in fig. 3, fig. 3 is the same as fig. 2 in that a concave-convex structure is formed between the piezoelectric layer 3 and the first electrode layer 2, and fig. 3 is different from fig. 2 in that a side of the piezoelectric layer 3 facing the second electrode layer 4 in fig. 3 has a plurality of second grooves 32;
the second electrode layer 4 includes: a plurality of second protrusions 41 mutually matching with the second grooves 32, and a second flat part 42 located on the side of the second protrusions 41 away from the substrate base plate 1;
the relief structure further comprises a second protrusion 41 and a second recess 32 matching each other. Therefore, the second protrusion 41 and the second groove 32 which are matched with each other are formed on the interface of the piezoelectric layer 3 and the second electrode layer 4, the contact area of the piezoelectric layer 3 and the second electrode layer 4 is increased, the piezoelectric layer 3 and the second electrode layer 4 also form an interlocking structure with strong adhesion, so that the adhesion between the piezoelectric layer 3 and the second electrode layer 4 can be enhanced, the risk of falling off (peeling) of the piezoelectric layer 3 and the second electrode layer 4 is prevented, the film stress can be released by the second protrusion 41 and the second groove 32, and the reliability of the vibration panel is further improved.
In specific implementation, in the above-mentioned vibration panel provided by the embodiment of the present invention, as shown in fig. 4 and 5, the same point in fig. 4 and 2 is that the concave-convex structure is formed between the piezoelectric layer 3 and the first electrode layer 2, the same point in fig. 5 and 3 is that the concave-convex structure is formed between the piezoelectric layer 3 and both the first electrode layer 2 and the second electrode layer 4, and the difference point in fig. 4 and 2 and 5 and 3 is that the side of the substrate 1 facing the first electrode layer 2 in fig. 4 and 5 has a plurality of third grooves 11.
The first electrode layer 2 includes: and a third protrusion 23 matched with the third groove 11, wherein the first plane part 22 is positioned between the third protrusion 23 and the first protrusion 21, the first protrusion 21 and the third protrusion 23 are alternately arranged, and the orthographic projection of the first protrusion 21 on the substrate base plate 1 and the orthographic projection of the third protrusion 23 on the substrate base plate 1 do not overlap. Like this substrate base plate 1 also forms the concave-convex structure of mutual matching with the interface of first electrode layer 2, increase substrate base plate 1 and the area of contact of first electrode layer 2, substrate base plate 1 also forms the interlocking structure that the adhesion is stronger with first electrode layer 2 to can strengthen the adhesion between substrate base plate 1 and the first electrode layer 2, prevent that substrate base plate 1 and first electrode layer 2 from taking place the risk of droing (peeling), and the third arch 23 of the mutual matching of third recess 11 can further release rete stress, thereby further improve the reliability of vibration panel.
In practical implementation, as shown in fig. 3 and 4, if the first protrusion 21 and the second protrusion 41 are overlapped, the thickness of the piezoelectric layer 3 corresponding to the overlapping region of the first protrusion 21 and the second protrusion 41 is thinner, which results in steep breakdown voltage and Reactance (Reactance), and short circuit is prone to occur between the first electrode layer 2 and the second electrode layer 4, so that, in the above-mentioned vibration panel provided in the embodiment of the present invention, as shown in fig. 3 and 5, the first protrusion 21 and the second protrusion 41 are alternately arranged, and the orthographic projection of the first protrusion 21 on the substrate base 1 and the orthographic projection of the second protrusion 41 on the substrate base 1 do not overlap.
In practical implementation, in the above-mentioned vibration panel provided by the embodiment of the present invention, as shown in fig. 6, a side of the piezoelectric layer 3 facing the second electrode layer 4 has a plurality of second grooves 32;
the second electrode layer 4 includes: a plurality of second protrusions 41 that are matched with the second grooves 32, and a second flat portion 42 that is located on a side of the second protrusions 41 that faces away from the substrate base plate 1;
the relief structure comprises a second protrusion 41 and a second recess 32 matching each other. Therefore, the second protrusion 41 and the second groove 32 which are matched with each other are formed on the interface of the piezoelectric layer 3 and the second electrode layer 4, the contact area of the piezoelectric layer 3 and the second electrode layer 4 is increased, the piezoelectric layer 3 and the second electrode layer 4 form an interlocking structure with strong adhesion, so that the adhesion between the piezoelectric layer 3 and the second electrode layer 4 can be enhanced, the risk of falling off (peeling) of the piezoelectric layer 3 and the second electrode layer 4 is prevented, and the film layer stress can be released by the second protrusion 41 and the second groove 32, so that the reliability of the vibration panel is improved.
In specific implementation, as shown in fig. 7 and 8, in the above-mentioned vibration panel provided in the embodiment of the present invention, the same point in fig. 7 and 6 is that a concave-convex structure is formed between the piezoelectric layer 3 and the second electrode layer 4, the same point in fig. 8 and 3 is that a concave-convex structure is formed between the piezoelectric layer 3 and the first electrode layer 2, and the second electrode layer 4, and the difference point in fig. 7 and 6 and 8 and 3 is that a side of the second electrode layer 4 facing away from the substrate base plate 1 in fig. 7 and 8 has a plurality of fourth grooves 43 corresponding to the second protrusions 41, a depth of the fourth grooves 43 is less than or equal to a thickness of the second flat portion 42, and fig. 7 and 8 are illustrated by taking an example that a depth of the fourth grooves 43 is less than a thickness of the second flat portion 42. Set up a plurality of fourth recesses 43 that correspond the setting with second arch 41 in one side that second electrode layer 4 deviates from substrate base plate 1 like this, can release rete stress on the one hand and prevent the rete fracture, on the other hand second electrode layer 4 can and follow-up formation concave-convex structure between the insulating layer that forms, further improve the cross sectional area between second electrode layer 4 and the insulating layer, further slow down the problem of rete peeling.
In specific implementation, as shown in fig. 2 to 8, the vibration panel provided in the embodiment of the present invention further includes an insulating layer 5 located on a side of the second electrode layer 4 away from the substrate base plate 1, and the insulating layer 5 is tightly attached to the second electrode layer 4. Specifically, the material of the insulating layer 5 may be SiO 2 Photoresist or silicon nitride (Si) 3 N 4 ) Etc., without limitation.
In practical implementation, fig. 2 to 8 are schematic diagrams illustrating a structure of only one vibration unit in the vibration panel, as shown in fig. 9, fig. 9 is a schematic diagram illustrating a top view of a plurality of vibration units 100 arranged in an array in the vibration panel, and any structure of fig. 2 to 8 may be adopted for the vibration units 100. This vibration panel utilizes the inverse piezoelectric effect, can be with 2 ground connections of first electrode layer, through to 4 loading high frequency alternating voltage signals of second electrode layer, realizes the application to the high frequency alternating voltage signal of piezoelectric layer 3 to produce high frequency vibration, can adopt laser to realize the measurement to the vibration displacement, thereby guarantee vibration panel's performance.
In specific implementation, as shown in fig. 10, fig. 10 is a schematic top view of the first protrusions 21 and the second protrusions 41 in fig. 3, 5, and 8, orthographic projections of the first protrusions 21 and the second protrusions 41 on the substrate base 1 are in a strip shape, the first protrusions 21 and the second protrusions 41 extend along a first direction X, the first protrusions 21 and the second protrusions 41 are alternately arranged along a second direction Y, and the first direction X intersects the second direction Y.
In specific implementation, as shown in fig. 11, fig. 11 is another schematic plan view of the first protrusions 21 and the second protrusions 41 in fig. 3, 5, and 8, in which orthographic projections of the first protrusions 21 and the second protrusions 41 on the substrate base 1 are in a block shape, the first protrusions 21 and the second protrusions 41 are alternately arranged along a first direction X and a second direction Y, and the first direction X and the second direction Y are arranged in a cross manner, that is, the first protrusions 21 and the second protrusions 41 are in a grid structure.
In a specific implementation process, the electrode layer may be made of Indium Tin Oxide (ITO), indium Zinc Oxide (IZO), or one of titanium gold (Ti-Au) alloy, titanium aluminum titanium (Ti-Al-Ti) alloy, and titanium molybdenum (Ti-Mo) alloy, or one of platinum (Pt), titanium (Ti), gold (Au), silver (Ag), molybdenum (Mo), copper (Cu), tungsten (W), and chromium (Cr), and a person skilled in the art may set the electrode layer according to a practical application requirement, which is not limited herein.
In order to ensure the structural strength of the film layer, a high-strength crystalline phase is generated through a metal interface or interdiffusion ionic bonding is realized through an oxide interface, in the vibration panel provided in the embodiment of the present invention, as shown in fig. 3, the maximum thickness d1 of the piezoelectric layer 3 is greater than 10 times of the maximum thickness d2 of the first electrode layer 2.
In practical implementation, in the vibration panel provided in the embodiment of the present invention, as shown in fig. 3, the maximum thickness d1 of the piezoelectric layer 3 is about 2 μm, and the maximum thickness d2 of the first electrode layer 2 is 50nm to 200nm.
In practical implementation, in the vibration panel provided by the embodiment of the present invention, as shown in fig. 3, the width w1 of the first protrusion 21 is 1 μm to 15 μm.
In concrete implementation, in the above-described vibration panel provided by the embodiment of the present invention, as shown in fig. 3, the thickness of the first protrusion 21 and the thickness of the second protrusion 41 are both less than 10% of the maximum thickness d2 of the first electrode layer 2. If the thickness of the first protrusion 21 and the thickness of the second protrusion 41 are both greater than 10% of the maximum thickness of the first electrode layer 2, the thickness of the first protrusion 21 and/or the thickness of the piezoelectric layer 3 at the position corresponding to the second protrusion 41 are/is smaller, and the piezoelectric layer 3 is easily broken down, as shown in fig. 12, and a black block in a circle in fig. 12 is a broken-down portion.
In practical implementation, in the vibration panel provided by the embodiment of the invention, as shown in fig. 3, the width w2 of the second protrusion 41 is 50nm to 200nm, and the thickness d3 of the second plane portion 42 is 1 μm to 10 μm.
In a specific implementation, in the vibration panel provided in the embodiment of the present invention, as shown in fig. 3, a thickness d4 of the insulating layer 5 may be greater than 1 μm, so as to separate the package of the vibration panel from the upper and lower electrode layers and the traces.
It should be noted that the embodiment of the present invention is illustrated in fig. 3 showing the width and thickness of the corresponding film layer, and fig. 2, 4-7 are the same as those of fig. 3 in terms of the thickness and width of the same film layer.
In one possible embodiment, as shown in fig. 2, 3 and 8, the first plane part 22 of the first electrode layer 2 may be an ITO material, the first protrusions 21 may be a mesh structure (mesh) formed by the ITO material, and the first protrusions 21 may also be a metal mesh structure formed by a metal material (e.g., pt).
In one possible embodiment, as shown in fig. 4 and 5, the substrate base plate 1 is etched in advance, and then an ITO material or a metal material is deposited after the fourth groove 11 is formed.
In the specific implementation process, as shown in fig. 13, fig. 13 is a schematic diagram of the actual manufacturing of the vibration panel, and it can be seen from the diagram that the vibration unit on the vibration panel is well manufactured.
In the specific implementation process, the substrate base plate 1 may be a base plate made of glass, and may also be made of silicon or silicon dioxide (SiO) 2 ) The substrate may be a substrate made of sapphire, or a substrate made of a metal wafer, which is not limited herein, and a person skilled in the art may set the substrate 1 according to actual application requirements.
In particular implementations, the piezoelectric layer can be made of lead zirconate titanate (Pb (Zr, ti) O 3 PZT), aluminum nitride (AlN), znO (zinc oxide), barium titanate (BaTiO) 3 ) Lead titanate (PbTiO) 3 ) Potassium niobate (KN)bO 3 ) Lithium niobate (LiNbO) 3 ) Lithium tantalate (LiTaO) 3 ) Lanthanum gallium silicate (La) 3 Ga 5 SiO 14 ) In this way, while the transparency of the vibration panel is considered, the vibration characteristics of the vibration panel are ensured, and the material for manufacturing the piezoelectric layer may be specifically selected according to the actual use requirement of a person skilled in the art, which is not limited herein. When the PZT is used for manufacturing the piezoelectric layer, the PZT has a high piezoelectric coefficient, so that the piezoelectric property of the corresponding vibration panel is ensured, the corresponding vibration panel can be applied to a tactile feedback device, and the PZT has high light transmittance, so that the display quality of the display device is not influenced when the PZT is integrated into the display device.
Of course, the vibration panel may be provided with other film layers according to practical applications, in addition to the various film layers mentioned above.
The vibration panel provided by the embodiment of the invention can be applied to the fields of medical treatment, automobile electronics, motion tracking systems and the like. The method is particularly suitable for the field of wearable equipment, medical monitoring and treatment in vitro or implanted into human body, or the field of artificial intelligent electronic skin and the like. In particular, the vibration panel may be applied to a brake pad, a keypad, a mobile terminal, a game pad, a vehicle, etc., which may generate vibration and mechanical characteristics.
Based on the same inventive concept, the embodiment of the invention also provides a vibration device, which comprises the vibration panel provided as above. Because the principle of solving the problems of the vibration device is similar to that of the vibration panel, the implementation of the vibration device can be referred to that of the vibration panel, and repeated details are not repeated. The vibration device may be: any product or component with a display or touch function, such as a mobile phone, a tablet computer, a television, a display, a notebook computer, a digital photo frame, a navigator and the like.
In practice, the vibration device provided by the embodiments of the present disclosure may further include other film layers known to those skilled in the art, which are not described in detail herein.
In specific implementation, the touch position of a human body can be determined through the vibration device, so that corresponding vibration waveforms, amplitudes and frequencies are generated, and human-computer interaction can be realized. Of course, the vibration device can be applied to the fields of medical treatment, automotive electronics, motion tracking systems and the like according to actual needs, and the details are not described herein.
The invention provides a vibration panel and a vibration device, wherein the interface of a piezoelectric layer and at least one of a first electrode layer and a second electrode layer is set to have a concave-convex structure, the concave-convex structure can increase the interface contact area of the piezoelectric layer and at least one of the electrode layers, so that the piezoelectric layer and at least one of the electrode layers form an interlocking structure with stronger adhesiveness, the adhesiveness between the piezoelectric layer and at least one of the electrode layers can be enhanced, the risk of peeling (peeling) between the piezoelectric layer and the electrode layers can be prevented, and the concave-convex structure can release the stress of the film layer, thereby improving the reliability of the vibration panel.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the invention.
It will be apparent to those skilled in the art that various modifications and variations can be made in the embodiments of the present invention without departing from the spirit or scope of the embodiments of the invention. Thus, if such modifications and variations of the embodiments of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to encompass these modifications and variations.
Claims (15)
1. A vibrating panel, comprising: the piezoelectric element comprises a substrate base plate, and a first electrode layer, a piezoelectric layer and a second electrode layer which are sequentially stacked on the substrate base plate; wherein, the first and the second end of the pipe are connected with each other,
an interface of the piezoelectric layer and at least one of the first electrode layer and the second electrode layer has a concavo-convex structure.
2. The vibration panel according to claim 1, wherein a side of the piezoelectric layer facing the first electrode layer has a plurality of first grooves;
the first electrode layer includes: a plurality of first protrusions mutually matched with the first grooves, and a first plane part positioned between the substrate base plate and the first protrusions;
the concave-convex structure comprises the first protrusion and the first groove which are matched with each other.
3. The vibration panel according to claim 2, wherein a side of the piezoelectric layer facing the second electrode layer has a plurality of second grooves;
the second electrode layer includes: the second grooves are matched with the first protrusions, and the first plane part is positioned on one side, away from the substrate, of the first protrusions;
the concave-convex structure further comprises the second protrusion and the second groove which are matched with each other.
4. The vibration panel according to any one of claims 1 to 3, wherein a side of the substrate base substrate facing the first electrode layer has a plurality of third grooves;
the first electrode layer includes: and the first plane part is positioned between the third protrusion and the first protrusion, the first protrusion and the third protrusion are alternately arranged, and the orthographic projection of the first protrusion on the substrate base plate and the orthographic projection of the third protrusion on the substrate base plate are not overlapped.
5. A vibration panel according to claim 3, wherein said first protrusions and said second protrusions are alternately arranged, and an orthographic projection of said first protrusions on said base substrate and an orthographic projection of said second protrusions on said base substrate do not overlap.
6. The vibration panel according to claim 1, wherein a side of the piezoelectric layer facing the second electrode layer has a plurality of second grooves;
the second electrode layer includes: the second grooves are matched with the first protrusions, and the first plane part is located on one side, away from the substrate base plate, of the first protrusions;
the concave-convex structure comprises the second protrusion and the second groove which are matched with each other.
7. The vibration panel according to claim 3 or 6, wherein a side of the second electrode layer facing away from the substrate base plate has a plurality of fourth grooves provided corresponding to the second protrusions, and a depth of the fourth grooves is smaller than or equal to a thickness of the second flat portion.
8. The vibration panel according to claim 7, further comprising an insulating layer on a side of the second electrode layer facing away from the substrate base plate, the insulating layer being in close contact with the second electrode layer.
9. A vibration panel according to claim 3, wherein orthographic projections of said first protrusions and said second protrusions on said base substrate are each in a shape of a bar, said first protrusions and said second protrusions extend in a first direction, and said first protrusions and said second protrusions are alternately arranged in a second direction, said first direction and said second direction being arranged to intersect.
10. The vibration panel according to claim 3, wherein orthographic projections of the first protrusions and the second protrusions on the substrate base plate are each in a block shape, the first protrusions and the second protrusions are arranged alternately in both a first direction and a second direction, and the first direction and the second direction are arranged crosswise.
11. A vibration panel according to claim 5 or 8, wherein a maximum thickness of said piezoelectric layer is more than 10 times a maximum thickness of said first electrode layer.
12. The vibration panel according to claim 11, wherein the width of the first protrusion is 1 μm to 15 μm, and the maximum thickness of the first electrode layer is 50nm to 200nm.
13. A vibration panel according to claim 3, wherein a thickness of said first projection and a thickness of said second projection are each less than 10% of a maximum thickness of said first electrode layer.
14. The vibration panel according to claim 7, wherein the width of the second protrusion is 50nm to 200nm, and the thickness of the second flat portion is 1 μm to 10 μm.
15. A vibratory device comprising a vibratory panel as claimed in any one of claims 1-14.
Priority Applications (1)
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|---|---|---|---|
| CN202110946572.9A CN115933865A (en) | 2021-08-18 | 2021-08-18 | Vibration panel and vibration device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110946572.9A CN115933865A (en) | 2021-08-18 | 2021-08-18 | Vibration panel and vibration device |
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| CN115933865A true CN115933865A (en) | 2023-04-07 |
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| CN202110946572.9A Pending CN115933865A (en) | 2021-08-18 | 2021-08-18 | Vibration panel and vibration device |
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| CN (1) | CN115933865A (en) |
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