CN115931725B - Rotary sample stage and microscopic Raman spectrum measuring method - Google Patents
Rotary sample stage and microscopic Raman spectrum measuring method Download PDFInfo
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- CN115931725B CN115931725B CN202310135288.2A CN202310135288A CN115931725B CN 115931725 B CN115931725 B CN 115931725B CN 202310135288 A CN202310135288 A CN 202310135288A CN 115931725 B CN115931725 B CN 115931725B
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Abstract
The invention relates to the technical field of optical equipment, in particular to a rotary sample stage and a microscopic Raman spectrum measuring method. The invention provides a rotary sample table, which comprises a sample driving assembly and a sample loading assembly, wherein the sample loading assembly is arranged on the sample driving assembly and is used for loading samples; the sample driving assembly is used for driving the sample loading assembly to rotate in the irradiation range of the laser focusing light spot and the focal plane where the laser focusing light spot is located in the state that the sample is loaded on the sample loading assembly. The rotating sample stage provided by the invention solves the technical problem that the sample is heated or damaged by long-time irradiation of laser on the same point of the sample when the micro-Raman spectrum is measured in the prior art, reduces the measurement difficulty of the micro-Raman spectrum, is easy to obtain the intrinsic Raman spectrum signal of the sample, and can realize the micro-Raman spectrum acquisition with high signal-to-noise ratio.
Description
Technical Field
The invention relates to the technical field of optical equipment, in particular to a rotary sample stage and a microscopic Raman spectrum measuring method.
Background
Raman spectroscopy (Raman spectra) is a type of scattering spectrum. Raman spectroscopy is an analytical method based on Raman scattering effects found by indian scientist c.v. Raman (Raman) that analyzes a scattering spectrum different from the frequency of incident light to obtain information on molecular vibration and rotation, and is applied to molecular structure research.
In the measurement of micro-raman spectroscopy, laser light needs to be focused on a certain fixed point on a sample through a micro-objective lens for irradiation and collection for a certain time. However, the laser spot size is in the micrometer scale, and for a thin film/layer with low heat conductivity and non-transparency, such as a two-dimensional material sheet like graphene, the laser power density in the micrometer scale laser spot is high, especially the ultraviolet laser with high photon energy, and even if the sample is irradiated for a short time, the sample is possibly heated or permanently damaged, so that an effective intrinsic raman spectrum signal cannot be obtained. In addition, hydrocarbon in the atmosphere is easy to generate carbon pollution on the surface of the substance under the irradiation of ultraviolet light, so that the Raman spectrum signal is weakened.
In order to avoid the above, in the case of performing microscopic raman spectroscopy, measures such as reducing the power of laser light or shortening the acquisition time are generally taken, but the signal to noise ratio of the acquired raman spectrum is relatively low, which is difficult to use for analysis.
In view of the foregoing, there is a need for a rotary sample stage and a method for measuring microscopic raman spectra.
Disclosure of Invention
The invention provides a rotary sample table and a microscopic Raman spectrum measuring method, which are used for solving the technical problem that in the prior art, when the microscopic Raman spectrum is measured, laser irradiates the same point of a sample for a long time to heat or damage the sample.
The present invention provides a rotary sample stage comprising: a sample drive assembly; the sample loading assembly is arranged on the sample driving assembly and used for loading samples; the sample driving assembly is used for driving the sample loading assembly to rotate in the irradiation range of the laser focusing light spot and the focal plane where the laser focusing light spot is located in the state that the sample is loaded on the sample loading assembly.
According to one embodiment of the invention, the sample driving device further comprises a levelness adjusting assembly, wherein the levelness adjusting assembly is positioned below the sample driving assembly and connected with the sample driving assembly and used for adjusting the levelness of the sample driving assembly.
According to one embodiment of the present invention, a levelness adjustment assembly includes: the first plate is arranged along the horizontal direction and is connected with the lower end of the sample driving assembly; the second plate is arranged along the horizontal direction and positioned below the first plate; a support member interposed between the first plate and the second plate; and the levelness adjusting part is arranged on the first plate and used for adjusting the levelness of the first plate.
According to one embodiment of the present invention, the levelness adjustment member includes a first adjustment member and a second adjustment member; the first adjusting piece vertically penetrates through the edge of the first plate and is in threaded connection with the first plate, the lower end of the first adjusting piece can be abutted to the upper end of the second plate, and the first adjusting piece is used for adjusting levelness of the first plate; the second regulating part vertically penetrates through the edge of the first plate and is in threaded connection with the first plate, the lower end of the second regulating part can be abutted to the upper end of the second plate, and the second regulating part is used for regulating levelness of the first plate.
According to one embodiment of the invention, the support member is spherical.
According to one embodiment of the invention, the first plate is connected to the second plate by a tensioning assembly.
According to one embodiment of the invention, the horizontal displacement adjusting assembly is positioned below the levelness adjusting assembly and is connected with the levelness adjusting assembly.
According to one embodiment of the invention, the sample driving assembly is a motor, which is positioned below the sample loading assembly, the motor is provided with a rotating shaft, and the sample loading assembly is embedded at the upper end of the rotating shaft.
According to one embodiment of the invention, the upper end of the sample loading assembly is provided with a sample loading groove and a sample taking groove, the shape of the sample loading groove is matched with that of the sample, and the sample taking groove is arranged at the notch of the sample loading groove.
The invention also provides a measuring method of the micro-Raman spectrum, which comprises the following steps: the position of a rotary sample table is adjusted, and a sample is placed below a microscope objective of a microscopic Raman spectrometer; focusing on the surface of the sample by adopting laser to penetrate through a microscope objective; and driving the sample to perform rotary motion in the irradiation range of the laser focusing light spot and the focal plane where the laser focusing light spot is positioned so as to measure the microscopic Raman spectrum of the sample.
According to the rotary sample table provided by the invention, under the state that a sample is loaded on the sample loading assembly, the sample driving assembly is used for driving the sample loading assembly to rotate in the irradiation range of the laser focusing light spot and the focal plane where the laser focusing light spot is located, namely, the irradiation position of the laser focusing light spot on the sample is not fixed in the microscopic Raman spectrum measurement process, so that the technical problem that the sample is heated or damaged due to the fact that the laser irradiates the same point of the sample for a long time in the microscopic Raman spectrum measurement process in the prior art is solved. By the arrangement of the structure, the method reduces the measurement difficulty of the micro-Raman spectrum, is easy to obtain the intrinsic Raman spectrum signal of the sample, and realizes the collection of the micro-Raman spectrum with high signal-to-noise ratio.
Drawings
In order to more clearly illustrate the invention or the technical solutions of the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the invention, and other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic perspective view of a rotary sample stage of the present invention.
Fig. 2 is an exploded view of a rotary sample stage of the present invention.
Fig. 3 is a schematic perspective view of the levelness adjustment assembly of the present invention.
Fig. 4 is a schematic perspective view of a sample loading assembly of the present invention.
Fig. 5 is a flow chart of a method of measuring micro raman spectra of the present invention.
Fig. 6 is an experimental result obtained by using the rotary sample stage of the present invention and applying the measurement method of micro raman spectrum of the present invention.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present embodiment, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present embodiment and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present embodiment.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present embodiment, the meaning of "plurality" is at least two, for example, two, three, etc., unless explicitly defined otherwise.
In this embodiment, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and include, for example, either permanently connected, removably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present embodiment can be understood by those of ordinary skill in the art according to the specific circumstances.
Fig. 1 to 6 show a rotary sample stage and a measurement method of micro raman spectrum provided by the present invention, and it can be seen from the drawings that the present invention provides a rotary sample stage, which is applied to a micro raman spectrometer, and the rotary sample stage includes a sample driving component 1 and a sample loading component 2 (or referred to as a sample loading stage), where the sample loading component 2 is disposed in the sample driving component 1, and is used for loading a sample 5; the sample driving assembly 1 is used for driving the sample loading assembly 2 to perform rotary motion in the irradiation range of the laser focusing light spot and in the focal plane where the laser focusing light spot is located in a state that the sample 5 is loaded on the sample loading assembly 2.
According to the rotary sample table provided by the invention, in the state that the sample 5 is loaded on the sample loading assembly 2, the sample driving assembly 1 is used for driving the sample loading assembly 2 to perform rotary motion in the irradiation range of the laser focusing light spot and the focal plane where the laser focusing light spot is located, namely, in the microscopic Raman spectrum measurement process, the irradiation position of the laser focusing light spot on the sample 5 is not fixed, so that the technical problem that the sample 5 is heated or damaged due to the fact that the laser irradiates the same point of the sample 5 for a long time in the microscopic Raman spectrum measurement process in the prior art is solved. By the arrangement of the structure, the method can reduce the measurement difficulty of the micro-Raman spectrum, is easy to obtain the intrinsic Raman spectrum signal of the sample 5, and realizes the collection of the micro-Raman spectrum with high signal-to-noise ratio.
It will be appreciated that in some embodiments the laser and raman spectrum signals may be changed from circular to linear by means of a cylindrical generator to reduce the energy density of the laser where the sample 5 is irradiated. However, the structure of the optical path in the conventional confocal microscopic raman spectrometer is precise and complex, and when the conventional confocal microscopic raman spectrometer is implemented in a specific way, an excitation optical path and a collection optical path are required to be modified, so that the requirement on the specificity of an operation user is high, and the practical use effect is difficult to ensure. Therefore, in the prior art, when measuring the micro raman spectrum, the situation that the sample 5 is easily heated or damaged due to the fact that the laser irradiates the same point of the sample 5 for a long time still exists, the signal to noise ratio of the raman spectrum signal is poor, and the intrinsic signal of the sample 5 cannot be obtained.
As shown in fig. 2, in particular, sample 5 may use a single layer of molybdenum disulfide (MoS 2 ) The coverage area of the film and the sample 5 on the substrate can be more than fifty percent, the laser can use ultraviolet laser with the wavelength of 266 nm, and the magnification of the microscope objective can be 40 times.
As shown in fig. 2 and 4, more specifically, the upper end of the sample loading assembly 2 has a sample loading slot 21 and a sample taking-out slot 22, the shape of the sample loading slot 21 is matched with that of the sample 5, the sample taking-out slot 22 is provided at the notch of the sample loading slot 21, for example, the slot shape of the sample loading slot 21 may be rectangular, the slot shape of the sample taking-out slot 22 may be semicircular, and the sample taking-out slot 22 may be located at four corners of the sample loading slot 21 having a square shape, that is, the sample taking-out slot 22 may be four, thereby facilitating the user to take out the sample 5 in a plurality of orientations.
Through the structure setting, can make things convenient for dismouting sample 5. When the sample 5 is installed, the sample 5 can be embedded into the sample loading groove 21 from top to bottom, so that the installation of the sample 5 is completed; when the sample 5 is taken out, a sample taking tool such as forceps can be inserted into the sample taking groove 22, and the sample 5 in the sample loading groove 21 is picked up by force, so that the sample 5 is taken out from the sample loading groove 21, the taking difficulty of the sample 5 is reduced, and the technical problem that the sample 5 is not easy to take out from the sample loading groove 21 is prevented.
It will be appreciated that the groove shape of the sample loading groove 21 and the groove shape of the sample taking-out groove 22 may be set according to actual needs, for example, the groove shape of the sample loading groove 21 may be determined by the shape of the sample 5, and if the sample 5 is rectangular, the groove shape of the sample loading groove 21 may be rectangular, and the groove shape of the sample taking-out groove 22 may be designed by the shape of the sample taking-out tool, so that the user can take out the sample conveniently.
In some embodiments, the sample loading well 21 and the sample taking well 22 may not be provided, and the sample 5 and the sample loading assembly 2 may be connected by a connector (e.g., a press sheet or a fastener) provided at the upper end of the sample loading assembly 2, and further, the sample 5 and the sample loading assembly 2 may be connected (bonded) by conventional glue.
As shown in fig. 1, further, the sample driving assembly 1 may be a motor, which is located below the sample loading assembly 2, and the motor includes a stator, a rotor and a rotating shaft 11, and the sample loading assembly 2 is embedded in the upper end of the rotating shaft 11.
In specific implementation, when the motor is started, the rotating shaft 11 of the motor starts to rotate 360 degrees, so as to drive the sample loading assembly 2 arranged at the upper end of the rotating shaft 11 to rotate, and then the sample driving assembly 1 is used for driving the sample loading assembly 2 to rotate in the irradiation range of the laser focusing light spot and in the focal plane where the laser focusing light spot is located in the state that the sample 5 is loaded on the sample loading assembly 2.
As shown in fig. 1, specifically, the bottom of the sample loading assembly 2 may have a connection portion 23, the connection portion 23 may have a tubular structure disposed along the height direction H of the rotary sample stage, and the free end (upper end) of the rotation shaft 11 may be embedded in the connection portion 23, that is, the sample loading assembly 2 may be embedded in the motor through the rotation shaft 11.
In some embodiments, the shaft 11 may be made using a conventional telescopic rod structure. Thereby, the height of the sample 5 can be conveniently adjusted.
In some embodiments, the sample driving assembly 1 may be replaced by a reciprocating linear motion mechanism, so that in a state that the sample 5 is loaded on the sample loading assembly 2, the sample driving assembly 1 is used to drive the sample loading assembly 2 to reciprocate in a linear motion along a height direction H perpendicular to the rotating sample stage within an irradiation range of the laser focusing spot and within a focal plane where the laser focusing spot is located.
As shown in fig. 1 to 3, the rotary sample stage according to an embodiment of the present invention may further include a levelness adjustment assembly 3 positioned below the sample driving assembly 1 and connected to the sample driving assembly 1 for adjusting the levelness of the sample driving assembly 1.
Specifically, the levelness adjustment assembly 3 includes a first plate 31, a second plate 32, a supporting member 33, and a levelness adjustment member 34, the first plate 31 being disposed in a horizontal direction and being connected to the lower end of the sample driving assembly 1; the second plate 32 is disposed in the horizontal direction and is located below the first plate 31; the support member 33 is sandwiched between the first plate 31 and the second plate 32; the levelness adjustment member 34 is provided to the first plate 31 for adjusting the levelness of the first plate 31.
In practice, the levelness of the first plate 31 is adjusted by operating the levelness adjusting part 34, so that the levelness of the sample driving assembly 1 is adjusted, and the levelness of the sample 5 on the sample loading assembly 2 is adjusted.
Specifically, the support member 33 may be spherical, and in some embodiments, the support member 33 may be in the shape of a regular dodecahedron.
As shown in fig. 2 and 3, further, the levelness adjustment part 34 may include a first adjustment member 341 and a second adjustment member 342; the first adjusting piece 341 vertically penetrates through the edge of the first plate 31 and is in threaded connection with the first plate 31, the lower end of the first adjusting piece 341 can be abutted against the upper end of the second plate 32, and the first adjusting piece 341 is used for adjusting levelness of the first plate 31; the second adjusting member 342 vertically penetrates through the edge of the first plate 31 and is in screwed connection with the first plate 31, the lower end of the second adjusting member 342 can be abutted to the upper end of the second plate 32, and the second adjusting member 342 is used for adjusting levelness of the first plate 31.
In particular, the first plate 31 and the second plate 32 can be adjusted by rotating the first adjusting member 341 and/or the second adjusting member 342, so that the levelness of the first plate 31 can be adjusted, and the first plate 31, the sample driving assembly 1 and the sample loading assembly 2 are sequentially connected, so that the levelness of the sample 5 can be adjusted by rotating the first adjusting member 341 and/or the second adjusting member 342.
As shown in fig. 3, in some embodiments, the upper end of the first plate 31 may be provided with a sample driving assembly mounting groove 311, the shape of the sample driving assembly mounting groove 311 may be matched with the shape of the sample driving assembly 1, for example, the groove shape of the sample driving assembly mounting groove 311 may be circular, and the lower end of the sample driving assembly 1 may be embedded in the sample driving assembly mounting groove 311.
In practice, the lower end of the sample driving assembly 1 may be forcibly inserted into the sample driving assembly mounting groove 311 of the first plate 31, and the sample driving assembly 1 and the first plate 31 may be coupled by a fastener such as a screw or the like.
Further, the rotary sample stage of the present invention may further comprise a tension assembly by which the first plate 31 is connected to the second plate 32.
In particular, through the above-mentioned structure setting, can connect first board 31 and second board 32, improve the stability of levelness adjustment assembly 3 in the use.
Specifically, the tension assembly may be sandwiched between the first plate 31 and the second plate 32, and the tension assembly may be an elastic member such as a spring (e.g., a conventional tension spring) disposed along the height direction H of the rotary sample stage, one end of the spring being connected to the first plate 31, and the other end of the spring being connected to the second plate 32.
Still further, the rotary sample stage of the present invention may further comprise a horizontal displacement adjustment assembly 4, which is located below the levelness adjustment assembly 3 and is connected to the levelness adjustment assembly 3.
In practice, the sample driving assembly 1 can be moved in the horizontal direction by the horizontal displacement adjusting assembly 4, so as to move the sample loading assembly 2, and further realize the movement of the sample 5 on the sample loading assembly 2, that is, the position of the sample 5 can be changed in the horizontal direction.
Specifically, the horizontal displacement adjustment assembly 4 may be a manual sliding table with a crossed axis (or may be called an XY-axis crossed roller guide rail type sliding table or a two-dimensional displacement table), and is used for integrally performing displacement adjustment on the three components of the sample driving assembly 1, the sample loading assembly 2 and the levelness adjustment assembly 3, so as to ensure that the sample loading assembly 2 can be always in the irradiation range of the laser focusing light spot in the rotation process.
In some embodiments, the horizontal displacement adjustment assembly 4 may be a sample stage or a two-dimensional displacement stage in a micro-raman spectrometer.
As shown in fig. 5, the present invention further provides a method for measuring a micro raman spectrum, which includes the following step S100:
s101, adjusting the position of a rotary sample table, and placing a sample 5 below a microscope objective of a microscopic Raman spectrometer;
s102, focusing on the surface of the sample 5 by adopting a laser through a microscope objective;
s103, driving the sample 5 to rotate in the irradiation range of the laser focusing light spot and the focal plane where the laser focusing light spot is located so as to measure the microscopic Raman spectrum of the sample 5.
In some embodiments, the method for measuring micro raman spectrum may comprise the steps of:
loading a rotating sample stage under a microscope objective of a micro raman spectrometer;
selecting a sample loading assembly 2 of a sample loading slot 21 matched with the size of the sample 5, and placing the sample 5 into the sample loading slot 21;
focusing on the surface of the sample 5 by adopting laser to penetrate through a microscope objective;
the horizontal displacement adjusting component 4 is used for moving the sample 5 into the irradiation range of the laser focusing light spot, and the horizontal displacement adjusting component 4 is further finely adjusted to ensure that the sample 5 is always in the irradiation range of the laser focusing light spot in the rotating process;
the horizontal state of the sample 5 is regulated by using the horizontal regulating component 3, and the sample 5 is further finely regulated so as to ensure that the sample 5 is always positioned in the focal plane where the laser focusing light spot is positioned in the rotating process;
and (3) electrifying a motor (such as a micro motor) to drive the sample 5 to rotate 360 degrees in a focal plane where a laser focusing spot is positioned, and testing the micro-Raman spectrum of the sample 5.
Specifically, the micro-Raman spectrometer can be a tri-grating Raman spectrometer, the grating line number can be 2400gr/mm, the laser can be ultraviolet laser, the wavelength of the laser is 266 nm, the laser power under the micro-objective lens is 2.6 mW, the magnification of the micro-objective lens is 40 times, the motor can be RF-300C, the rotation number per minute can be 2800, and the outer diameter can be 25 mm.
When ultraviolet laser with the laser power of 2.6 milliwatts and the wavelength of 266 nanometers irradiates on the sample 5 under the microscope objective, the appearance of the single-layer molybdenum disulfide film is burnt immediately. Fig. 6 shows raman spectra of a single layer of molybdenum disulfide film collected using a rotary sample stage of the present invention, with an integration time of 1000 seconds. The appearance of the sample 5 is not obviously damaged before and after the comparison and collection. Wherein the left plot of fig. 6 is the first order raman peak of a single layer of molybdenum disulfide. The solid line of the right graph of fig. 6 is a plurality of higher order raman peaks under resonance raman excitation, and the broken line of the right graph of fig. 6 is a fitted curve of each higher order raman peak because the acquired raman spectrum has a higher signal to noise ratio, thus facilitating analysis and fitting of the higher order raman peak under resonance excitation due to ultraviolet laser. The invention effectively solves the technical problem that the sample 5 is heated or damaged by the laser irradiating the same point of the sample 5 for a long time in the measuring process of the micro-Raman spectrum, plays a role in protecting the sample 5 and improving the experimental accuracy, and is easy to measure the micro-Raman spectrum.
According to the technical scheme, the characteristics and advantages of the rotary sample stage and the microscopic Raman spectrum measuring method are as follows:
1. according to the rotary sample table, the sample 5 is loaded on the sample loading assembly 2, so that the technical problem that the sample 5 is heated or damaged due to the fact that laser irradiates the same point of the sample 5 for a long time when microscopic Raman spectrum is measured in the prior art is effectively solved, the acquisition time of Raman spectrum signals can be properly increased on the premise of reducing laser damage, and the signal-to-noise ratio of Raman spectrum is improved.
2. The rotary sample stage has the advantages of compact structure, easy operation, good stability, convenient assembly, capability of being directly matched with a sample stage of a micro Raman spectrometer for use, and good application prospect in micro Raman spectrum test, especially ultraviolet micro Raman spectrum test.
It should be noted that, in the description of the present invention, the terms "first," "second," and the like are used for descriptive purposes only and to distinguish between similar objects, and there is no order of preference between them, nor should they be construed as indicating or implying relative importance. Furthermore, in the description of the present invention, unless otherwise indicated, the meaning of "at least one" means one or more, and the meaning of "a plurality" means two or more. By using the term "may" herein, it is intended that any attribute described as "may" be included is optional.
In the description of the present embodiment, it should be noted that, unless explicitly specified and limited otherwise, the terms "connected," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in the present embodiment can be understood by those of ordinary skill in the art according to the specific circumstances.
In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "manner," "particular modes," or "some modes," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or mode is included in at least one embodiment or mode of the embodiments of the present invention. In this specification, the schematic representations of the above terms are not necessarily directed to the same embodiment or manner. Furthermore, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or ways. Furthermore, various embodiments or modes and features of various embodiments or modes described in this specification can be combined and combined by those skilled in the art without mutual conflict.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (9)
1. A rotary sample stage, the rotary sample stage comprising:
the sample driving assembly (1), the sample driving assembly (1) is a motor with a rotating shaft (11), and the rotating shaft (11) is of a telescopic rod structure;
the sample loading assembly (2) is arranged at the upper end of the rotating shaft (11) of the sample driving assembly (1) and is used for loading a sample (5);
the levelness adjusting assembly (3) is positioned below the sample driving assembly (1) and connected with the sample driving assembly (1) for adjusting the levelness of the sample driving assembly (1);
the sample driving assembly (1) is used for driving the sample loading assembly (2) to rotate in the irradiation range of the laser focusing light spot and the focal plane where the laser focusing light spot is located in the state that the sample (5) is loaded on the sample loading assembly (2).
2. A rotary sample stage according to claim 1, characterized in that the levelness adjustment assembly (3) comprises:
a first plate (31) which is arranged along the horizontal direction and is connected with the lower end of the sample driving component (1);
a second plate (32) disposed in the horizontal direction and located below the first plate (31);
a support member (33) interposed between the first plate (31) and the second plate (32);
and a levelness adjusting member (34) provided on the first plate (31) for adjusting the levelness of the first plate (31).
3. The rotary sample stage according to claim 2, characterized in that the levelness adjustment means (34) comprises a first adjustment member (341) and a second adjustment member (342);
the first adjusting piece (341) vertically penetrates through the edge of the first plate (31) and is in threaded connection with the first plate (31), the lower end of the first adjusting piece (341) can be abutted to the upper end of the second plate (32), and the first adjusting piece (341) is used for adjusting levelness of the first plate (31);
the second adjusting piece (342) penetrates through the edge of the first plate (31) along the vertical direction and is in threaded connection with the first plate (31), the lower end of the second adjusting piece (342) can be abutted to the upper end of the second plate (32), and the second adjusting piece (342) is used for adjusting levelness of the first plate (31).
4. A rotary sample stage according to claim 3, characterized in that the support member (33) is spherical.
5. The rotary sample stage according to claim 4, further comprising a tensioning assembly by which the first plate (31) is connected to the second plate (32).
6. The rotary sample stage according to claim 1, further comprising a horizontal displacement adjustment assembly (4) located below the levelness adjustment assembly (3) and connected to the levelness adjustment assembly (3).
7. A rotary sample stage according to any one of claims 1 to 6, characterized in that the sample loading assembly (2) is embedded in the upper end of the spindle (11).
8. The rotary sample stage according to any one of claims 1 to 6, characterized in that the upper end of the sample loading assembly (2) has a sample loading slot (21) and a sample removal slot (22), the shape of the sample loading slot (21) being matched to the shape of the sample (5), the sample removal slot (22) being provided in a notch of the sample loading slot (21).
9. A method of measuring micro-raman spectra using a rotating sample stage according to any one of claims 1 to 8, the method comprising:
adjusting the position of a rotary sample stage, and placing a sample (5) below a microscope objective of a microscopic Raman spectrometer;
focusing on the surface of the sample (5) by laser through the microscope objective;
and driving the sample (5) to perform rotary motion in the irradiation range of the laser focusing light spot and the focal plane where the laser focusing light spot is positioned so as to measure the microscopic Raman spectrum of the sample (5).
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| CN106226282A (en) * | 2016-06-24 | 2016-12-14 | 北京华泰诺安探测技术有限公司 | A kind of laser Raman spectrometer is used to carry out the device and method sampled |
| JP6203355B1 (en) * | 2016-09-26 | 2017-09-27 | 日本分光株式会社 | Confocal Raman microscope |
| CN107748158B (en) * | 2017-11-03 | 2020-11-06 | 中国科学院重庆绿色智能技术研究院 | micro-Raman imaging spectrum rapid detection device and method |
| CN107884389A (en) * | 2017-12-26 | 2018-04-06 | 同方威视技术股份有限公司 | Raman spectrum detection device and method |
| CN108717057A (en) * | 2018-05-31 | 2018-10-30 | 中央民族大学 | A kind of portable surface enhancing Raman spectrometer and its measurement method |
| WO2021014623A1 (en) * | 2019-07-24 | 2021-01-28 | 株式会社日立ハイテク | Defect inspection device and defect inspection method |
| CN211545944U (en) * | 2019-12-11 | 2020-09-22 | 华南理工大学 | Experimental device for complicated curved surface micro-nano structure processing based on force position control |
| CN111796410B (en) * | 2020-06-28 | 2022-03-11 | 哈尔滨工业大学 | Solid-state sample multidimension degree precision revolving stage of micro-raman imaging |
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