CN115930555A - Drying device and drying method for polycrystalline silicon - Google Patents
Drying device and drying method for polycrystalline silicon Download PDFInfo
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- CN115930555A CN115930555A CN202211267042.2A CN202211267042A CN115930555A CN 115930555 A CN115930555 A CN 115930555A CN 202211267042 A CN202211267042 A CN 202211267042A CN 115930555 A CN115930555 A CN 115930555A
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- box body
- air
- polycrystalline silicon
- drying
- hot air
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 63
- 238000001035 drying Methods 0.000 title claims abstract description 55
- 238000010438 heat treatment Methods 0.000 claims abstract description 39
- 238000007664 blowing Methods 0.000 claims abstract description 19
- 229920005591 polysilicon Polymers 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims abstract description 12
- 238000005260 corrosion Methods 0.000 claims abstract description 8
- 239000011241 protective layer Substances 0.000 claims abstract description 5
- 239000010453 quartz Substances 0.000 claims description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 13
- 230000008016 vaporization Effects 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 10
- 238000009835 boiling Methods 0.000 abstract description 5
- 238000005086 pumping Methods 0.000 abstract description 4
- 238000005265 energy consumption Methods 0.000 abstract description 3
- 229920003023 plastic Polymers 0.000 description 7
- 239000004033 plastic Substances 0.000 description 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000004484 Briquette Substances 0.000 description 4
- 229920000049 Carbon (fiber) Polymers 0.000 description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 3
- 239000004917 carbon fiber Substances 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 229920000840 ethylene tetrafluoroethylene copolymer Polymers 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910001092 metal group alloy Inorganic materials 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- 229910017604 nitric acid Inorganic materials 0.000 description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
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- Drying Of Solid Materials (AREA)
Abstract
The invention discloses a drying device and a drying method for polycrystalline silicon, wherein the drying device comprises: the air blowing unit pressurizes clean air and then blows the air into the heating unit; the heating unit heats the blown air to form hot air and introduces the hot air into the box body; the box body bears the polysilicon to be dried; a hollow cavity structure is formed inside the box body, an anti-corrosion protective layer covers the surface of the inner wall of the box body, an air inlet and an air outlet are formed in the box body, and the air outlet is connected with a negative pressure unit; the box body also comprises a box cover arranged at the top, and the box cover enables the box body to be in a sealed state. According to the drying device and the drying method provided by the invention, the original method of reducing the boiling point of water by using a vacuum pump and continuously pumping out evaporated water is cancelled, and high-temperature hot air is directly introduced into the polycrystalline silicon to dry the polycrystalline silicon, so that the drying efficiency is improved and the energy consumption in the drying process is reduced.
Description
Technical Field
The invention belongs to the technical field of polycrystalline silicon production, and particularly relates to a drying device and a drying method for polycrystalline silicon.
Background
Polycrystalline silicon is a fundamental raw material for the integrated circuit industry and the photovoltaic industry. At present, an improved siemens method is mainly used for preparing polycrystalline silicon, and the method is characterized in that a polycrystalline silicon rod is prepared by depositing on the surface through the reaction of trichlorosilane and hydrogen in a high-temperature environment, and then the polycrystalline silicon rod is crushed and cleaned to prepare a final product. After being cleaned by the cleaning liquid, the polysilicon needs to be placed in a drying box for drying. At present, most of silicon briquette drying processes adopt a vacuum drying method, namely, cleaned silicon briquettes are placed in a square or round container, a vacuum environment is provided by a vacuum pump to reduce the boiling point of water, and evaporated water is continuously pumped out, so that the aim of drying is fulfilled.
Drying the silicon briquette by the above-mentioned method is not efficient, for example, 20kg of silicon briquette needs 5-10 hours to be completely dried, and the smaller the particle size of the silicon briquette is, the longer the drying time is. Therefore, this drying method not only has low drying efficiency, but also requires heating, and the longer the drying time, the higher the energy consumption. It is very important to improve drying efficiency and reduce energy consumption.
Disclosure of Invention
In view of the defects in the prior art, the invention provides a drying device and a drying method for polycrystalline silicon, and aims to solve the problem of low drying efficiency of polycrystalline silicon in the existing polycrystalline silicon production.
In order to solve the above problems, the present invention first provides a drying apparatus for polycrystalline silicon, comprising: a blower unit, a heating unit and a box body,
the blowing unit is used for blowing clean air into the heating unit;
the heating unit is used for heating the blown air to form hot air and introducing the hot air into the box body;
the box body is used for bearing the polycrystalline silicon to be dried;
the box body is internally provided with a hollow cavity structure, the inner wall surface of the box body is covered with an anti-corrosion protective layer, the box body is provided with an air inlet and an air outlet, and the air outlet (302) is connected with a negative pressure unit; the box body further comprises a box cover arranged at the top, and the box cover enables the box body to be in a sealed state.
In particular, the blower unit is a blower.
Preferably, the heating unit comprises a thermocouple and a quartz tube, one end of the quartz tube is connected with the blowing unit, the other end of the quartz tube is connected with the air inlet, and the thermocouple is used for heating the quartz tube.
Preferably, a latticed bearing part is arranged in the box body, the latticed bearing part is far away from the bottom surface in the box body, and the latticed bearing part is used for bearing the polycrystalline silicon to be dried.
The invention also provides a drying method of polycrystalline silicon, which adopts the drying device and comprises the following steps:
s10, placing the polycrystalline silicon to be dried in a box body;
s20, blowing clean air into a heating unit by using a blowing unit to be heated to form hot air;
and S30, introducing the obtained hot air into the box body, and vaporizing the moisture on the surface of the polycrystalline silicon to be dried by the hot air to achieve the aim of drying the polycrystalline silicon.
Preferably, the temperature of the hot air is 300 ℃ to 400 ℃.
Preferably, after the hot air is introduced into the box body in the step S30, a part of the hot air is discharged through the air outlet, and a part of the hot air flows back to the heating unit through the air inlet, and enters the box body again after being heated by the heating unit, so that the cycle is performed.
According to the drying device and the drying method for the polycrystalline silicon, provided by the embodiment of the invention, the polycrystalline silicon to be dried is placed in the box body by arranging the blowing unit, the heating unit and the box body, then clean air is blown into the heating unit by the blowing unit to be heated to form hot air, and finally the hot air is introduced into the box body and vaporizes moisture on the surface of the polycrystalline silicon to be dried, so that the aim of drying the polycrystalline silicon is achieved. According to the drying method provided by the embodiment of the invention, the original method of reducing the boiling point of water by using a vacuum pump and continuously pumping out evaporated water is cancelled, and high-temperature hot air is directly introduced into polycrystalline silicon to dry the polycrystalline silicon by the high-temperature hot air.
Drawings
Fig. 1 is a schematic structural diagram of a polysilicon drying apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a meshed bearing surface according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a heating unit according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention are described in detail below with reference to the accompanying drawings. Examples of these preferred embodiments are illustrated in the accompanying drawings. The embodiments of the invention shown in the drawings and described in accordance with the drawings are exemplary only, and the invention is not limited to these embodiments.
It should be noted that, in order to avoid obscuring the present invention with unnecessary details, only the structures and/or processing steps closely related to the scheme according to the present invention are shown in the drawings, and other details not so relevant to the present invention are omitted.
Fig. 1 is a schematic structural diagram of a drying apparatus for polysilicon according to an embodiment of the present invention, and as shown in fig. 1, the drying apparatus includes: a blower unit 1, a heating unit 2, and a cabinet 3.
The blowing unit 1 is used to blow clean air into the heating unit 2.
The heating unit 2 is used for heating the blown air to form hot air and introducing the hot air into the box body 3.
The box body 3 is used for bearing the polysilicon to be dried.
A hollow cavity structure is formed inside the box body 3, an anti-corrosion protective layer 31 covers the inner wall surface of the box body 3, an air inlet 301 and an air outlet 302 are formed in the box body 3, and the air outlet 302 is connected with a negative pressure unit 4; the box body 3 further comprises a box cover 32 arranged at the top, and the box cover 32 enables the box body 3 to be in a sealed state.
In a preferred embodiment, the inner wall surface of the box body 3 is covered with an anti-corrosion protective layer 31 which is a PFA coating, and since the polysilicon is washed and often carries some corrosive liquid, the PFA coating can prevent the inner wall of the box body 3 from being corroded.
Specifically, the box body 3 and the box cover 32 are made of metal alloy or high-strength plastic (or plastic with strength increased by relevant means) or carbon fiber material coated with plastic PFA/PTFE/ETFE, and have the function of resisting corrosion of hydrofluoric acid and nitric acid.
Specifically, the air outlet 302 on the box 3 is connected to a negative pressure unit 4, and the negative pressure unit 4 can maintain a negative pressure environment at the air outlet 302, so as to ensure the discharge efficiency of the air flow inside the box 3.
In the above embodiment, the blower unit 1, the heating unit 2 and the box body 3 are arranged, polysilicon to be dried is placed in the box body 3, then clean air is blown into the heating unit 2 by the blower unit 1 to be heated to form hot air, and finally the hot air is introduced into the box body 3 to vaporize moisture on the surface of the polysilicon to be dried, so that the purpose of drying the polysilicon is achieved. According to the drying method provided by the embodiment of the invention, the original method of reducing the boiling point of water by using a vacuum pump and continuously pumping out evaporated water is cancelled, and high-temperature hot air is directly introduced into the polycrystalline silicon to dry the polycrystalline silicon by the high-temperature hot air, and 25kg of silicon blocks can be dried within 8min by using the drying method provided by the invention.
Specifically, the blower unit 1 is a blower.
The blower is of an impeller and turbine type, comprises a blower, an air knife and the like, is made of metal alloy or high-strength engineering plastic or carbon fiber material sprayed with plastic (PFA/PTFE/ETFE) except for an electric part, and has the function of resisting hydrofluoric acid and nitric acid corrosion.
Fig. 3 is a schematic structural diagram of a heating unit according to an embodiment of the present invention, and in a preferred embodiment, as shown in fig. 1 and fig. 3, the heating unit 2 includes a thermocouple 21 and a quartz tube 22, one end of the quartz tube 22 is connected to the blower unit 1, the other end of the quartz tube 22 is connected to the air inlet 301, and the thermocouple 21 is configured to heat the quartz tube 22.
Fig. 2 is a schematic structural diagram of a grid-shaped carrying surface provided in an embodiment of the present invention, and in a preferred embodiment, as shown in fig. 2, a grid-shaped carrying part 33 is provided inside the box body 3, the grid-shaped carrying part 33 is far away from a bottom surface inside the box body 3, and the grid-shaped carrying part 33 is used for carrying polysilicon to be dried.
Specifically, the latticed bearing part 33 is made of metal alloy of spray-coated plastic (PFA/PTFE/ETFE), high-strength plastic (or plastic with strength increased by relevant means) or carbon fiber material, and has the function of resisting corrosion of hydrofluoric acid and nitric acid.
The polycrystalline silicon to be dried is arranged on the latticed bearing part 33, certain moisture is gathered in the polycrystalline silicon to be dried which is just cleaned, the moisture can be dripped into the bottom surface inside the box body 3, and after hot air enters the inside of the box body 3, the polycrystalline silicon to be dried can be dried in an all-around mode, so that the efficiency is improved.
The embodiment of the invention also provides a drying method of polycrystalline silicon, which adopts the drying device and comprises the following steps:
s10, placing the polycrystalline silicon to be dried in the box body 3.
And S20, blowing clean air into the heating unit 2 by using the blowing unit 1 to heat the air to form hot air.
Specifically, the temperature of the hot air is 300 ℃ to 400 ℃, for example, 300 ℃, 330 ℃, 350 ℃, 380 ℃ or 400 ℃.
And S30, introducing the obtained hot air into the box body 3, and vaporizing the moisture on the surface of the polycrystalline silicon to be dried by the hot air to achieve the aim of drying the polycrystalline silicon.
Specifically, after the hot air is introduced into the box 3 in step S30, a part of the hot air is discharged through the air outlet 302, and a part of the hot air flows back to the heating unit 2 through the air inlet 301, and enters the box 3 again after being heated by the heating unit 2, so that the circulation is performed.
Specifically, the clean air is pressurized by the blower and then heated by the quartz tube and then introduced into the box body 3, then most of the clean air in the box body 3 enters the inlet of the blowing unit 1 again through the air inlet 301, the air is blown into the heating unit 2 again through the inlet of the blowing unit 1, the air enters the drying box after being heated by the heating unit 2, the clean air is ensured to be recycled, meanwhile, the air outlet 302 maintains a negative pressure environment, and a small amount of clean air is discharged through the air outlet 302.
In summary, in the embodiments of the present invention, the blowing unit, the heating unit and the box are arranged, the polysilicon to be dried is placed in the box, then the blowing unit is used to blow clean air into the heating unit to heat the air to form hot air, and finally the hot air is introduced into the box to vaporize the moisture on the surface of the polysilicon to be dried, so as to dry the polysilicon. According to the drying method provided by the embodiment of the invention, the original method of reducing the boiling point of water by using a vacuum pump and continuously pumping out evaporated water is cancelled, and high-temperature hot air is directly introduced into polycrystalline silicon to dry the polycrystalline silicon by the high-temperature hot air.
The foregoing is illustrative of the present disclosure and it will be appreciated by those skilled in the art that changes may be made in this embodiment without departing from the principles of the disclosure, the scope of which is defined by the appended claims.
Claims (7)
1. A drying apparatus for polycrystalline silicon, characterized in that the drying apparatus comprises: a blower unit (1), a heating unit (2) and a box body (3),
the blowing unit (1) is used for pressurizing clean air and then blowing the air into the heating unit (2);
the heating unit (2) is used for heating the blown air to form hot air and introducing the hot air into the box body (3);
the box body (3) is used for bearing polycrystalline silicon to be dried;
the vacuum box comprises a box body (3), a vacuum cavity structure, an anti-corrosion protective layer (31) covers the surface of the inner wall of the box body (3), an air inlet (301) and an air outlet (302) are formed in the box body (3), and the air outlet (302) is connected with a negative pressure unit (4); the box body (3) further comprises a box cover (32) arranged at the top, and the box cover (32) enables the box body (3) to be in a sealed state.
2. Drying device for polycrystalline silicon according to claim 1, characterized in that the blower unit (1) is a blower.
3. The polysilicon drying apparatus according to claim 1, wherein the heating unit (2) comprises a thermocouple (21) and a quartz tube (22), one end of the quartz tube (22) is connected to the blower unit (1), the other end of the quartz tube (22) is connected to the air inlet (301), and the thermocouple (21) is used for heating the quartz tube (22).
4. The polysilicon drying apparatus according to claim 1, wherein a grid-shaped bearing part (33) is arranged inside the box body (3), the grid-shaped bearing part (33) is far away from the bottom surface inside the box body (3), and the grid-shaped bearing part (33) is used for bearing the polysilicon to be dried.
5. A method for drying polycrystalline silicon, characterized by using the drying apparatus according to any one of claims 1 to 4, the method comprising the steps of:
s10, placing the polycrystalline silicon to be dried in a box body (3);
s20, blowing clean air into a heating unit (2) by using a blowing unit (1) to heat to form hot air;
s30, introducing the obtained hot air into the box body (3), and vaporizing the moisture on the surface of the polycrystalline silicon to be dried by the hot air to achieve the purpose of drying the polycrystalline silicon.
6. The method for drying polycrystalline silicon according to claim 5, wherein the temperature of the hot air is 300 to 400 ℃.
7. The method for drying polycrystalline silicon according to claim 5, wherein after the hot air is introduced into the box body (3) in the step S30, a part of the hot air is discharged through the air outlet (302), a part of the hot air returns to the heating unit (2) through the air inlet (301), and the hot air is heated by the heating unit (2) and then enters the box body (3) again, thereby circulating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211267042.2A CN115930555A (en) | 2022-10-17 | 2022-10-17 | Drying device and drying method for polycrystalline silicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211267042.2A CN115930555A (en) | 2022-10-17 | 2022-10-17 | Drying device and drying method for polycrystalline silicon |
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| Publication Number | Publication Date |
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| CN115930555A true CN115930555A (en) | 2023-04-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211267042.2A Pending CN115930555A (en) | 2022-10-17 | 2022-10-17 | Drying device and drying method for polycrystalline silicon |
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| WO2018006672A1 (en) * | 2016-07-05 | 2018-01-11 | 江西省农业科学院农产品加工研究所 | Negative-pressure continuous grain dryer with built-in heating device |
| CN107631603A (en) * | 2017-11-08 | 2018-01-26 | 东莞市科隆威自动化设备有限公司 | Silicon chip drying stove |
| CN207649242U (en) * | 2017-10-20 | 2018-07-24 | 广州市尼科机械设备有限公司 | A kind of industrial baking oven |
| CN210952133U (en) * | 2019-11-20 | 2020-07-07 | 常州捷佳创精密机械有限公司 | Silicon wafer drying groove |
| CN211739699U (en) * | 2020-03-31 | 2020-10-23 | 青岛斯八达分析测试有限公司 | Experimental electric heating blast oven with anti-corrosion sealing function |
| CN215832337U (en) * | 2021-09-08 | 2022-02-15 | 青海黄河上游水电开发有限责任公司新能源分公司 | Silicon briquette drying box |
| CN217541265U (en) * | 2022-03-29 | 2022-10-04 | 微宏动力系统（湖州）有限公司 | Battery drying device |
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2022
- 2022-10-17 CN CN202211267042.2A patent/CN115930555A/en active Pending
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| CN202204253U (en) * | 2011-08-29 | 2012-04-25 | 成都老肯科技股份有限公司 | Low-temperature dry cabinet |
| CN205119668U (en) * | 2015-11-16 | 2016-03-30 | 深圳市百瑞空气处理设备有限公司 | Novel energy -conserving removal moisture drying case |
| WO2018006672A1 (en) * | 2016-07-05 | 2018-01-11 | 江西省农业科学院农产品加工研究所 | Negative-pressure continuous grain dryer with built-in heating device |
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| CN207649242U (en) * | 2017-10-20 | 2018-07-24 | 广州市尼科机械设备有限公司 | A kind of industrial baking oven |
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