CN115929671B - Method, device, equipment and medium for identifying gas impact in magnetic suspension molecular pump - Google Patents
Method, device, equipment and medium for identifying gas impact in magnetic suspension molecular pump Download PDFInfo
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Abstract
The invention provides a method, a device, equipment and a medium for identifying gas impact in a magnetic suspension molecular pump, wherein the method for identifying the gas impact comprises the following steps: determining the axial movement speed of the rotor according to the axial displacement and the axial movement time of a thrust disc on a magnetic bearing of the magnetic suspension molecular pump; acquiring a first rotating speed and a second rotating speed of a rotor, and determining a rotating speed variation according to the first rotating speed and the second rotating speed; and determining a weighted summation result of the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate, and determining whether the gas impact exists in the magnetic suspension molecular pump according to the corresponding relation between the weighted summation result and the gas impact identification result. The invention can accurately identify whether the magnetic suspension molecular pump has gas impact, effectively reduce the risk of high-speed falling of the magnetic suspension molecular pump, improve the stability of a suspension system and prolong the service life of equipment.
Description
Technical Field
The invention relates to the technical field of magnetic suspension, in particular to a method, a device, equipment and a medium for identifying gas impact in a magnetic suspension molecular pump.
Background
The magnetic suspension molecular pump is a mechanical vacuum pump which uses a rotor rotating at a high speed to transmit momentum to gas molecules so as to obtain directional speed, and is compressed to an exhaust port for pumping.
The existing magnetic suspension molecular pump may cause the occurrence of the situations of suffocating (for example, closing of a front-stage port valve of the molecular pump) or gas backflow impact (for example, high-flow instant impact, opening of a front-stage valve while the pressure of the front-stage port valve is too high) due to the factors such as valve control logic of a vacuum system, pressure difference and the like. When the impact force of the air flow is larger than the maximum magnetic force which can be output by the magnetic suspension bearing, suspension failure can be caused, and the turbine rotor falls on the protection bearing. When the turbine rotor falls off at full speed for a certain number of times, the protective bearings may be damaged, resulting in the pump needing to be removed from the production line and overhauled.
In order to solve the problem that the air impact is caused to the magnetic levitation molecular pump due to the wrong valve action or the too high air flow in the vacuum system in the related art, no effective solution is proposed at present.
Disclosure of Invention
The embodiment of the invention provides a method, a device, equipment and a medium for identifying gas impact in a magnetic suspension molecular pump, which are used for solving the problem that the magnetic suspension molecular pump is subjected to gas impact due to incorrect valve action or excessive gas flow in a vacuum system in the related technology.
In order to achieve the above object, according to a first aspect of the embodiments of the present invention, there is provided a method for identifying gas impact in a magnetic levitation molecular pump, including:
determining the axial movement speed of the rotor according to the axial displacement and the axial movement time of a thrust disc on a magnetic bearing of the magnetic suspension molecular pump; the axial movement time represents the time period for the thrust disc to generate the axial displacement, and the axial displacement is smaller than the maximum distance for maintaining the rotor suspension state;
acquiring a first rotating speed and a second rotating speed of the rotor, and determining a rotating speed variation according to the first rotating speed and the second rotating speed; the first rotating speed is the rotating speed of the rotor before the thrust disc is axially displaced, and the second rotating speed is the rotating speed of the rotor after the thrust disc is axially displaced;
determining the rotating speed change rate of the rotor according to the axial movement time and the rotating speed change quantity;
and determining a weighted summation result of the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate, and determining whether gas impact exists in the magnetic suspension molecular pump according to the corresponding relation between the weighted summation result and the gas impact identification result.
According to the method for identifying the gas impact in the magnetic suspension molecular pump, provided by the invention, whether the gas impact exists in the magnetic suspension molecular pump is determined through the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate, so that whether the gas impact exists in the magnetic suspension molecular pump can be accurately judged, and the method can be used for carrying out auxiliary rigidity compensation on the magnetic suspension molecular pump to carry out technical support.
Optionally, in a possible implementation manner of the first aspect, the method further includes:
when the gas impact is identified, judging the impact strength of the gas impact according to the axial displacement, and performing rigidity compensation according to a judging result; the rigidity compensation is to set a voltage applied to the magnetic bearing coil to a bias voltage corresponding to the judgment result.
According to the method for identifying the gas impact in the magnetic suspension molecular pump, provided by the invention, the rigidity compensation is carried out according to the judgment result of the impact strength of the gas impact, so that the risk of high-speed falling of the magnetic suspension molecular pump can be effectively reduced, the stability of a suspension system is improved, and the service life of equipment is prolonged.
Optionally, in one possible implementation manner of the first aspect, the determining, according to the axial displacement, the impact strength of the gas impact, and performing stiffness compensation according to a determination result, includes:
setting a bias voltage applied to the magnetic bearing coil to a first voltage when the axial displacement is greater than a first displacement threshold and less than a second displacement threshold;
setting a bias voltage applied to the magnetic bearing coil to a second voltage, the second voltage being a maximum value of the bias voltage, when the axial displacement is greater than or equal to a second displacement threshold;
wherein the second displacement threshold is greater than the first displacement threshold and the second voltage is greater than the first voltage.
According to the method for identifying the gas impact in the magnetic suspension molecular pump, provided by the invention, the voltage applied to the magnetic bearing coil is set to be the bias voltage corresponding to the judgment result, so that the gas impact in the molecular pump can be subjected to grading treatment, the purposes of improving the stability of a suspension system and prolonging the service life of equipment are achieved, and the stability of the suspension system is not affected even if misjudgment occurs due to the grading treatment adopted by the gas impact.
Optionally, in a possible implementation manner of the first aspect, the method further includes:
detecting the temperature value of the magnetic bearing coil in real time through a temperature sensor arranged beside the magnetic bearing coil;
and stopping rigidity compensation when the difference value between the temperature value of the magnetic bearing coil and the winding withstand temperature is smaller than a threshold value.
According to the method for identifying the gas impact in the magnetic suspension molecular pump, provided by the invention, the temperature of the magnetic bearing is ensured to be at the safety threshold value through temperature monitoring, the service life of the magnetic bearing is not influenced, and the magnetic suspension molecular pump is safe and reliable.
Optionally, in a possible implementation manner of the first aspect, the method further includes:
after the stiffness compensation is performed, if the rotor cannot maintain the suspension state, the stiffness compensation is stopped and an alarm operation is performed to prompt a user that valve malfunction or overload may exist.
Optionally, in one possible implementation manner of the first aspect, the determining a weighted sum result of the axial displacement, the axial movement speed, the second rotational speed, and the rotational speed change rate, and determining whether there is a gas impact in the magnetic levitation molecular pump according to a correspondence between the weighted sum result and a gas impact identification result includes:
determining a weighted summation result of the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate through a trained recognition model, and determining whether gas impact exists in the magnetic suspension molecular pump according to a corresponding relation between the weighted summation result and the gas impact recognition result by utilizing the trained recognition model;
the identification model is input into the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate, and the identification model is output into the gas impact identification result.
Optionally, in one possible implementation manner of the first aspect, the determining a weighted sum result of the axial displacement, the axial movement speed, the second rotational speed, and the rotational speed change rate, and determining whether there is a gas impact in the magnetic levitation molecular pump according to a correspondence between the weighted sum result and a gas impact identification result includes:
wherein f 1 (Z) represents the axial movement speed of the rotor, W 1 Weight value indicating axial movement speed of rotor, Δz indicates axial displacement of thrust disk, W 2 Weight value, n, representing axial displacement of thrust disc 0 Representing the second rotational speed of the rotor, W 3 Weight value f representing second rotational speed of rotor 2 (n) represents the rotational speed change rate of the rotor, W 4 A weight value indicating a rotational speed change rate of the rotor; w (W) 1 、W 4 Greater than W 2 、W 3 The method comprises the steps of carrying out a first treatment on the surface of the F (crash) represents the gas impact recognition result.
According to the method for identifying the gas impact in the magnetic suspension molecular pump, the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate parameters are all strongly related to the gas impact, and the input signal has no noise interference, so that an identification model is easy to converge, and higher accuracy can be obtained through neural network training.
In a second aspect of the embodiment of the present invention, there is provided a device for identifying gas impact in a magnetic levitation molecular pump, including:
the axial movement speed determining module is used for determining the axial movement speed of the rotor according to the axial displacement and the axial movement time of the thrust disc on the magnetic bearing of the magnetic suspension molecular pump; the axial movement time represents the time period for the thrust disc to generate the axial displacement, and the axial displacement is smaller than the maximum distance for maintaining the rotor suspension state;
the rotating speed variation determining module is used for obtaining a first rotating speed and a second rotating speed of a rotor of a magnetic bearing of the magnetic suspension molecular pump and determining the rotating speed variation according to the first rotating speed and the second rotating speed; the first rotating speed is the rotating speed of the rotor before the thrust disc is axially displaced, and the second rotating speed is the rotating speed of the rotor after the thrust disc is axially displaced;
the rotating speed change rate determining module is used for determining the rotating speed change rate of the rotor according to the axial movement time and the rotating speed change quantity;
the gas impact recognition module is used for determining a weighted summation result of the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate, and determining whether gas impact exists in the magnetic suspension molecular pump according to a corresponding relation between the weighted summation result and the gas impact recognition result.
In a third aspect of embodiments of the present invention, there is provided a computer device comprising a memory and a processor, the memory storing a computer program executable on the processor, the processor implementing the steps of the method embodiments described above when the computer program is executed.
In a fourth aspect of embodiments of the present invention, there is provided a readable storage medium having stored therein a computer program for carrying out the steps of the method of the first aspect and the various possible designs of the first aspect when executed by a processor.
The technical scheme of the invention also has the following technical effects:
according to the technical scheme, only the software is adjusted, and the physical parameters of the magnetic bearing are not changed, so that the problem of slow response of a high-turn-number scheme can be effectively solved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic flow chart of a method for identifying gas impact in a magnetic levitation molecular pump according to embodiment 1 of the present invention.
FIG. 2 is a schematic diagram of a specific implementation flow of model training.
Fig. 3 is a schematic block diagram of a gas impact recognition device in a magnetic levitation molecular pump according to embodiment 2 of the present invention.
Fig. 4 is a block diagram of a computer device in embodiment 3 of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; the two components can be directly connected or indirectly connected through an intermediate medium, or can be communicated inside the two components, or can be connected wirelessly or in a wired way. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Example 1
The embodiment provides a method for identifying gas impact in a magnetic suspension molecular pump, as shown in fig. 1, the method comprises the following steps:
s100: and determining the axial movement speed of the rotor according to the axial displacement and the axial movement time of the thrust disc on the magnetic bearing of the magnetic suspension molecular pump.
Specifically, the magnetic suspension molecular pump may be a five-axis magnetic suspension molecular pump, the magnetic bearing may be a radial thrust bearing structure, and the bearing structure includes a pair of magnetic suspension bearings (i.e., an upper magnetic bearing and a lower magnetic bearing), a rotor and a thrust disc sleeved on the rotor shaft, and the position of the thrust disc may be changed by changing the magnetic force output by the magnetic bearings through electrifying, so that the rotor shaft is suspended. Taking the vertical installation of the magnetic suspension molecular pump as an example, in a normal suspension state, the upper magnetic bearing can output larger magnetic force to overcome the gravity of the turbine rotor, so that the thrust disc is suspended at the central position Z of the axial magnetic bearing 0 (distance between the upper end face of the thrust disc and the lower end face of the upper magnetic bearing=distance between the lower end face of the thrust disc and the upper end face of the lower magnetic bearing).
In particular, the axial displacement of the thrust disk is used to indicate the axial displacement of the thrust disk (i.e. the displacement occurring in the direction of the rotor shaft) when being impacted by gas, which is smaller than the maximum distance for maintaining the rotor in a suspended state, and the above-mentioned magnetic levitation molecular pump is vertically installed, for example, when the inlet of the magnetic levitation molecular pump has a large transient gas impact, the thrust disk is changed in position in the direction of the rotor shaft due to the air pressure difference and the fast air flow velocity, i.e. the position of the thrust disk is changed from the central position Z of the axial magnetic bearing 0 Down to Z 1 Thereby calculating the axial displacement deltaz=z of the thrust disk 1 -Z 0 Considering that the thrust disc is sleeved on the rotor shaft, the turbine rotor generates axial displacement along with the thrust disc in the same axial direction, so that the axial displacement of the thrust disc can be taken as the axial displacement of the rotor. Wherein Z is 0 、Z 1 The position coordinates can be obtained by an axial displacement sensor of the magnetic suspension molecular pump, the axial displacement sensor can be an inductance sensor or an eddy current sensor, the axial displacement sensor can be fixed at the bottom of a stator system of the magnetic suspension molecular pump and used for detecting the distance between the lower end face of a rotor thrust disc and the upper end face of a lower magnetic bearing, and then the rotor thrust disc is replaced by a signal operational amplifierAnd calculating displacement coordinates.
In particular, the axial movement time t represents the length of time it takes for the thrust disc to undergo axial displacement. After obtaining the axial displacement and axial movement time of the thrust disk on the magnetic bearing of the magnetic suspension molecular pump, differentiating the axial displacement and the axial movement time, namely f 1 (Z) =dΔz/dt, resulting in the axial movement speed f of the rotor 1 (Z)。
S200: and acquiring a first rotating speed and a second rotating speed of the rotor, and determining the rotating speed variation according to the first rotating speed and the second rotating speed.
S300: and determining the rotating speed change rate of the rotor according to the axial movement time and the rotating speed change quantity.
In steps S200 to S300, the first rotational speed is the rotational speed n of the rotor before axial displacement of the thrust disk, and the second rotational speed is the rotational speed n of the rotor after axial displacement of the thrust disk 0 Because the magnetic suspension molecular pump is of a turbine structure, when the molecular pump is impacted by gas, a lot of gas can be injected to increase the resistance, and the rotating speed of the rotor can be obviously reduced, so that the first rotating speed n is greater than the second rotating speed n 0 . The axial movement time of the thrust disk is equal to the axial running time of the rotor and the time of the impact of gas, and the rotational speed variation n-n of the rotor is equal to the rotational speed variation n-n of the rotor before and after axial displacement 0 Differentiating the axial movement time t of the rotor, and calculating the rotating speed change rate f of the rotor 2 (n), i.e. f 2 (n)＝d(n-n 0 )/dt。
S400: and determining a weighted summation result of the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate, and determining whether the gas impact exists in the magnetic suspension molecular pump according to the corresponding relation between the weighted summation result and the gas impact identification result.
According to the method for identifying the gas impact in the magnetic suspension molecular pump, provided by the invention, whether the gas impact exists in the magnetic suspension molecular pump is determined through the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate, so that whether the gas impact exists in the magnetic suspension molecular pump can be accurately judged, and the method can be used for carrying out auxiliary rigidity compensation on the magnetic suspension molecular pump to carry out technical support.
Preferably, step S400 comprises the steps of:
s410: determining a weighted sum result of the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate through a trained recognition model, and determining whether gas impact exists in the magnetic suspension molecular pump according to a corresponding relation between the weighted sum result and the gas impact recognition result by utilizing the trained recognition model; the identification model is input into the device as axial displacement, axial movement speed, second rotating speed and rotating speed change rate, and the identification model is output as a gas impact identification result.
In step S410, a controllable flowmeter is provided at each of the inlet and outlet of the magnetic levitation molecular pump in advance to accelerate the magnetic levitation molecular pump to rated operation, and the instantaneous maximum gas flow Q at the inlet of the molecular pump is determined according to the maximum magnetic force that the magnetic bearing can output and the controllable flowmeter (determined by the design parameters of the magnetic bearing and the rotor structure) 1max And instantaneous maximum gas flow Q at the outlet 2max The method comprises the steps of carrying out a first treatment on the surface of the The following parameter settings were then made for the simulated test molecular pump if there was a gas surge with the corresponding parameter settings:
(1) Randomly adjusting the opening of the inlet flow meter to vary the inlet flow Q 1 So that it is less than the instantaneous maximum gas flow at the inlet, i.e. 0<Q 1 <Q 1max ；
(2) Randomly adjusting the opening of the outlet flow meter to vary the outlet flow Q 2 So that it is less than the instantaneous maximum gas flow at the outlet, i.e. 0<Q 1 <Q 2max ；
(3) Randomly setting the rotor speed n of the magnetic molecular pump, wherein the speed is required to be larger than the minimum value of the speed and smaller than the maximum value of the speed, namely n min <n<n max The maximum and minimum rotational speeds are determined by design parameters.
Repeating the parameter setting, and calibrating whether the current state of the magnetic suspension molecular pump has gas impact.
In the above simulation scenario, the recognition model for recognizing the gas impact is trained, as shown in fig. 2, specifically as follows:
(1) Randomly selecting a weight value W corresponding to the axial displacement DeltaZ 1 And axial movement speed f 1 (Z) corresponding weight value W 2 And a second rotation speed n 0 Corresponding weight value W 3 And the rotational speed change rate f 2 (n) corresponding weight value W 4 The method comprises the steps of carrying out a first treatment on the surface of the Calculating an output layer F (crash) according to the following formula and the weight value;
wherein f 1 (Z) represents the axial movement speed of the rotor, W 1 Weight value indicating axial movement speed of rotor, Δz indicates axial displacement of thrust disk, W 2 Weight value, n, representing axial displacement of thrust disc 0 Representing the second rotational speed of the rotor, W 3 Weight value f representing second rotational speed of rotor 2 (n) represents the rotational speed change rate of the rotor, W 4 A weight value indicating a rotational speed change rate of the rotor; w (W) 1 、W 4 Greater than W 2 、W 3 The method comprises the steps of carrying out a first treatment on the surface of the F (crash) represents the gas impact recognition result.
(2) According to W described above 1 、W 2 、W 3 、W 4 Calculating a deviation value (gradient value) of the weight value parameter and the learning step length condition;
(3) Updating W based on the deviation value 1 、W 2 、W 3 、W 4 A weight value parameter;
(4) Repeating the steps (1) - (3) until the recognition accuracy of the recognition model reaches a preset threshold value, thereby determining W 1 、W 2 、W 3 、W 4 Weight value parameters.
Specifically, in determining the weight value W corresponding to the axial displacement ΔZ 1 And axial movement speed f 1 (Z) corresponding weight value W 2 And a second rotation speed n 0 Corresponding weight value W 3 And the rotational speed change rate f 2 (n) corresponding weight value W 4 Thereafter, the current state of the magnetic molecular pump can be determined by inputting parameters (i.e. shaftAxial displacement Δz, axial movement speed f 1 (Z), second rotation speed n 0 And the rotational speed change rate f 2 (n)) is input to the recognition model (the above formula F (crash)) for which the weight value is determined, no gas shock is considered to occur when F (crash) =0, and the gas shock is considered to exist when F (crash) =1.
More specifically, the trained recognition model is stored as a gas impact recognition module to the CPU
(Central Processing Unit ) the processing unit, when the magnetic molecular pump is in static suspension and acceleration mode, the motor unit and the magnetic molecular pump are communicated with the controller processing unit, and the gas impact recognition module is closed; when the magnetic suspension molecular pump enters a normal operation stage (the magnetic suspension molecular pump is increased to a rated rotation speed to operate), the gas impact recognition module is started and starts to intelligently judge whether the gas impact exists, and if the gas impact exists, rigidity compensation is provided.
According to the method for identifying the gas impact in the magnetic suspension molecular pump, the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate parameters are all strongly related to the gas impact, and the input signal has no noise interference, so that an identification model is easy to converge, and higher accuracy can be obtained through neural network training.
Preferably, the method for identifying gas impact in the magnetic suspension molecular pump further comprises the following steps:
s500: when the gas impact is identified, the impact strength of the gas impact is judged according to the axial displacement, and rigidity compensation is carried out according to the judgment result.
In particular, this axial displacement is smaller than the maximum distance for maintaining the rotor in a levitated state, which can also be understood as: when the axial displacement of the rotor is greater than or equal to the maximum distance for maintaining the suspended state of the rotor, the rotor is not maintained in the suspended state any more, the turbine rotor falls on the protection bearing, and when the turbine rotor falls for a certain number of times in the full-speed state, the protection bearing can be damaged, so that the pump needs to be detached from the production line and overhauled.
In particular, the impact strength of the gas impact may be expressed in terms of the axial displacement of the thrust disc or rotor, for example, when the axial displacement of the thrust disc or rotor exceeds a certain threshold value, the impact strength is considered to reach a certain level; the rigidity compensation judgment result is that when the impact strength reaches a certain level, certain rigidity compensation measures are adopted, the level of the impact strength is different, and the adopted rigidity compensation measures are also different; the rigidity compensation may be to set the voltage applied to the magnetic bearing coil to a bias voltage corresponding to the judgment result.
According to the method for identifying the gas impact in the magnetic suspension molecular pump, provided by the invention, the rigidity compensation is carried out according to the judgment result of the impact strength of the gas impact, so that the risk of high-speed falling of the magnetic suspension molecular pump can be effectively reduced, the stability of a suspension system is improved, and the service life of equipment is prolonged.
Preferably, the step S500 includes:
s510: setting a bias voltage applied to the magnetic bearing coil to a first voltage when the axial displacement is greater than a first displacement threshold and less than a second displacement threshold;
s520: setting a bias voltage applied to the magnetic bearing coil to a second voltage, the second voltage being a maximum value of the bias voltage, when the axial displacement is greater than or equal to a second displacement threshold;
specifically, the first displacement threshold and the second displacement threshold are related to the gas flow; the first voltage and the second voltage are associated with a magnetic bearing structure; the second displacement threshold is greater than the first displacement threshold and the second voltage is greater than the first voltage, for example:
(1) when the axial displacement DeltaZ exceeds Z 1 (given a light gas load threshold, related to gas flow) but less than Z 2 (given a threshold value for heavy gas load, related to gas flow), the voltage applied to the magnetic bearing coil is set to the corresponding bias voltage V 1 (greater than the bias voltage V for that location when PI D control is used in the prior art).
(2) When the axial displacement DeltaZ exceeds Z 2 (given a heavy gas load threshold, associated with gas flow), the voltage applied to the magnetic bearing coil is set to a corresponding biasVoltage of execution V 2 (bias voltage maximum).
Above V 1 、V 2 The hardware parameters are related to the structure of the magnetic bearing itself; the magnetic bearings with different structures can adjust Z according to the actual output rigidity and heating condition 1 、Z 2 A threshold value.
According to the method for identifying the gas impact in the magnetic suspension molecular pump, provided by the invention, the voltage applied to the magnetic bearing coil is set to be the bias voltage corresponding to the judgment result, so that the gas impact in the molecular pump can be subjected to grading treatment, the purposes of improving the stability of a suspension system and prolonging the service life of equipment are achieved, and the stability of the suspension system is not affected even if misjudgment occurs due to the grading treatment adopted by the gas impact.
Preferably, the method further comprises: detecting the temperature value of the magnetic bearing coil in real time through a temperature sensor arranged beside the magnetic bearing coil; and stopping the rigidity compensation when the difference value between the temperature value of the magnetic bearing coil and the winding withstand temperature is smaller than a threshold value.
Specifically, the winding withstand temperature is related to the structure of the magnetic bearing coil itself, and the hardware parameter may be set manually according to the actual situation, which is not limited herein.
According to the method for identifying the gas impact in the magnetic suspension molecular pump, provided by the invention, the temperature of the magnetic bearing is ensured to be at the safety threshold value through temperature monitoring, the service life of the magnetic bearing is not influenced, and the magnetic suspension molecular pump is safe and reliable.
Preferably, the method further comprises: after the stiffness compensation is performed, if the rotor cannot maintain the suspension state, the stiffness compensation is stopped and an alarm operation is performed to prompt a user that valve malfunction or overload may exist.
Preferably, after determining the axial displacement, the axial movement speed, the second rotational speed, and the rotational speed change rate, the method further comprises:
and carrying out standardization treatment on the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate, shrinking the second rotating speed and the axial displacement to a first preset interval, and shrinking the axial movement speed and the rotating speed change rate to a second preset interval.
In particular, in practical applications, the input parameters (i.e. axial displacement Δz, axial movement speed f 1 (Z), a second rotational speed n, and a rotational speed change rate f 2 (n) before inputting the input parameters into the trained recognition model, normalizing the input parameters, namely shrinking the threshold values of the second rotating speed n and the axial displacement delta Z to (0, 1)]Interval, the axial movement speed f 1 (Z) and the rotational speed change rate f 2 The threshold of (n) is shrunk to the (-1, 1) interval.
The technical scheme of the invention also has the following technical effects:
according to the technical scheme, only the software is adjusted, and the physical parameters of the magnetic bearing are not changed, so that the problem of slow response of a high-turn-number scheme can be effectively solved.
Example 2
The embodiment provides a device for identifying gas impact in a magnetic suspension molecular pump, as shown in fig. 3, including:
the axial movement speed determining module is used for determining the axial movement speed of the rotor according to the axial displacement and the axial movement time of the thrust disc on the magnetic bearing of the magnetic suspension molecular pump; the axial movement time represents the time length for the thrust disc to axially displace, and the axial displacement is smaller than the maximum distance for maintaining the suspension state of the rotor;
the rotating speed change amount determining module is used for obtaining the first rotating speed and the second rotating speed of the rotor and determining the rotating speed change amount according to the first rotating speed and the second rotating speed; the first rotating speed is the rotating speed of the rotor before axial displacement of the thrust disc, and the second rotating speed is the rotating speed of the rotor after axial displacement of the thrust disc;
the rotating speed change rate determining module is used for determining the rotating speed change rate of the rotor according to the axial movement time and the rotating speed change quantity;
the gas impact recognition module is used for determining a weighted summation result of the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate, and determining whether gas impact exists in the magnetic suspension molecular pump according to the corresponding relation between the weighted summation result and the gas impact recognition result.
Preferably, the device for identifying gas impact in the magnetic suspension molecular pump further comprises:
the rigidity compensation module is used for judging the impact strength of the gas impact according to the axial displacement when the gas impact is identified, and carrying out rigidity compensation according to the judgment result; the rigidity compensation is to set the voltage applied to the magnetic bearing coil to a bias voltage corresponding to the judgment result.
Preferably, the stiffness compensation module comprises:
a first compensation unit for setting a bias voltage applied to the magnetic bearing coil to a first voltage when the axial displacement is greater than a first displacement threshold and less than a second displacement threshold;
a second compensation unit for setting a bias voltage applied to the magnetic bearing coil to a second voltage, which is a maximum value of the bias voltage, when the axial displacement is greater than or equal to a second displacement threshold;
wherein the second displacement threshold is greater than the first displacement threshold and the second voltage is greater than the first voltage.
Preferably, the device for identifying gas impact in the magnetic suspension molecular pump further comprises:
the temperature monitoring module is used for detecting the temperature value of the magnetic bearing coil in real time through a temperature sensor arranged beside the magnetic bearing coil; and stopping the rigidity compensation when the difference value between the temperature value of the magnetic bearing coil and the winding withstand temperature is smaller than a threshold value.
Preferably, the device for identifying gas impact in the magnetic suspension molecular pump further comprises:
and the alarm prompting module is used for stopping the rigidity compensation and executing alarm operation after the rigidity compensation is carried out if the rotor cannot maintain the suspension state, and is used for prompting a user that valve misoperation or overload possibly exists.
Preferably, the gas impingement recognition module comprises:
the gas impact recognition unit is used for determining a weighted summation result of the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate through a trained recognition model, and determining whether gas impact exists in the magnetic suspension molecular pump or not according to the corresponding relation between the weighted summation result and the gas impact recognition result by utilizing the trained recognition model; the identification model is input into the device as axial displacement, axial movement speed, second rotating speed and rotating speed change rate, and the identification model is output as a gas impact identification result.
Preferably, the gas shock identification module determines whether a gas shock exists within the magnetic levitation molecular pump by the following formula, including:
wherein f 1 (Z) represents the axial movement speed of the rotor, W 1 Weight value indicating axial movement speed of rotor, Δz indicates axial displacement of thrust disk, W 2 Weight value, n, representing axial displacement of thrust disc 0 Representing the second rotational speed of the rotor, W 3 Weight value f representing second rotational speed of rotor 2 (n) represents the rotational speed change rate of the rotor, W 4 A weight value indicating a rotational speed change rate of the rotor; w (W) 1 、W 4 Greater than W 2 、W 3 The method comprises the steps of carrying out a first treatment on the surface of the F (crash) represents the gas impact recognition result.
Example 3
The invention also provides a computer device, as shown in fig. 4, comprising a memory and a processor, wherein the memory stores a computer program capable of running on the processor, and the processor realizes the method for identifying gas impact in the magnetic suspension molecular pump provided by the various embodiments when executing the computer program.
The invention also provides a computer readable storage medium, on which a computer program is stored, which when executed by a processor, implements the method for identifying gas impact in a magnetic levitation molecular pump provided in the above various embodiments.
It will be appreciated by those skilled in the art that embodiments of the present invention may be provided as a method, system, or computer program product. Accordingly, the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present invention may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.
The present invention is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems) and computer program products according to embodiments of the invention. It will be understood that each flow and/or block of the flowchart illustrations and/or block diagrams, and combinations of flows and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.
Claims (10)
1. The method for identifying the gas impact in the magnetic suspension molecular pump is characterized by comprising the following steps of:
determining the axial movement speed of the rotor according to the axial displacement and the axial movement time of a thrust disc on a magnetic bearing of the magnetic suspension molecular pump; the axial movement time represents the time period for the thrust disc to generate the axial displacement, and the axial displacement is smaller than the maximum distance for maintaining the rotor suspension state;
acquiring a first rotating speed and a second rotating speed of the rotor, and determining a rotating speed variation according to the first rotating speed and the second rotating speed; the first rotating speed is the rotating speed of the rotor before the thrust disc is axially displaced, and the second rotating speed is the rotating speed of the rotor after the thrust disc is axially displaced;
determining the rotating speed change rate of the rotor according to the axial movement time and the rotating speed change quantity;
and determining a weighted summation result of the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate, and determining whether gas impact exists in the magnetic suspension molecular pump according to the corresponding relation between the weighted summation result and the gas impact identification result.
2. The method for identifying gas impingement in a magnetic levitation molecular pump of claim 1, further comprising:
when the gas impact is identified, judging the impact strength of the gas impact according to the axial displacement, and performing rigidity compensation according to a judging result; the rigidity compensation is to set a voltage applied to the magnetic bearing coil to a bias voltage corresponding to the judgment result.
3. The method for recognizing gas shock in a magnetic levitation molecular pump according to claim 2, wherein the determining the shock strength of the gas shock according to the axial displacement and the stiffness compensation according to the determination result comprises:
setting a bias voltage applied to the magnetic bearing coil to a first voltage when the axial displacement is greater than a first displacement threshold and less than a second displacement threshold;
setting a bias voltage applied to the magnetic bearing coil to a second voltage, the second voltage being a maximum value of the bias voltage, when the axial displacement is greater than or equal to a second displacement threshold;
wherein the second displacement threshold is greater than the first displacement threshold and the second voltage is greater than the first voltage.
4. The method for recognizing gas shock in a magnetic levitation molecular pump according to claim 1, wherein the determining the weighted sum of the axial displacement, the axial movement speed, the second rotational speed, and the rotational speed change rate, determining whether there is a gas shock in the magnetic levitation molecular pump according to the correspondence between the weighted sum and the gas shock recognition result, comprises:
wherein f 1 (Z) represents the axial movement speed of the rotor, W 1 Weight value indicating axial movement speed of rotor, Δz indicates axial displacement of thrust disk, W 2 Weight value, n, representing axial displacement of thrust disc 0 Representing the second rotational speed of the rotor, W 3 Weight value f representing second rotational speed of rotor 2 (n) represents the rotational speed change rate of the rotor, W 4 A weight value indicating a rotational speed change rate of the rotor; w (W) 1 、W 4 Greater than W 2 、W 3 The method comprises the steps of carrying out a first treatment on the surface of the F (crash) represents the gas impact recognition result.
5. The method for identifying gas impingement in a magnetic levitation molecular pump of claim 2, further comprising:
detecting the temperature value of the magnetic bearing coil in real time through a temperature sensor arranged beside the magnetic bearing coil;
and stopping rigidity compensation when the difference value between the temperature value of the magnetic bearing coil and the winding withstand temperature is smaller than a threshold value.
6. The method for identifying gas impingement in a magnetic levitation molecular pump of claim 2, further comprising:
after the stiffness compensation is performed, if the rotor cannot maintain the suspension state, the stiffness compensation is stopped and an alarm operation is performed to prompt a user that valve malfunction or overload may exist.
7. The method for recognizing gas shock in a magnetic levitation molecular pump according to claim 1 or 4, wherein the determining the weighted sum of the axial displacement, the axial movement speed, the second rotational speed, and the rotational speed change rate, determining whether there is a gas shock in the magnetic levitation molecular pump according to the correspondence between the weighted sum and the gas shock recognition result, comprises:
determining a weighted summation result of the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate through a trained recognition model, and determining whether gas impact exists in the magnetic suspension molecular pump according to a corresponding relation between the weighted summation result and the gas impact recognition result by utilizing the trained recognition model;
the identification model is input into the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate, and the identification model is output into the gas impact identification result.
8. A device for identifying gas impact in a magnetic molecular pump, comprising:
the axial movement speed determining module is used for determining the axial movement speed of the rotor according to the axial displacement and the axial movement time of the thrust disc on the magnetic bearing of the magnetic suspension molecular pump; the axial movement time represents the time period for the thrust disc to generate the axial displacement, and the axial displacement is smaller than the maximum distance for maintaining the rotor suspension state;
the rotating speed variation determining module is used for obtaining a first rotating speed and a second rotating speed of a rotor of a magnetic bearing of the magnetic suspension molecular pump and determining the rotating speed variation according to the first rotating speed and the second rotating speed; the first rotating speed is the rotating speed of the rotor before the thrust disc is axially displaced, and the second rotating speed is the rotating speed of the rotor after the thrust disc is axially displaced;
the rotating speed change rate determining module is used for determining the rotating speed change rate of the rotor according to the axial movement time and the rotating speed change quantity;
the gas impact recognition module is used for determining a weighted summation result of the axial displacement, the axial movement speed, the second rotating speed and the rotating speed change rate, and determining whether gas impact exists in the magnetic suspension molecular pump according to a corresponding relation between the weighted summation result and the gas impact recognition result.
9. A computer device comprising a memory and a processor, the memory storing a computer program executable on the processor, characterized in that the processor, when executing the computer program, implements the steps of the method for identifying gas shocks in a magnetic levitation molecular pump according to any of claims 1 to 7.
10. A computer readable storage medium having stored thereon a computer program, wherein the computer program when executed by a processor realizes the steps of the method for identifying gas shocks in a magnetic levitation molecular pump according to any of claims 1 to 7.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10213369A (en) * | 1997-01-29 | 1998-08-11 | Matsushita Electric Ind Co Ltd | Fan |
| JPH10288190A (en) * | 1997-04-16 | 1998-10-27 | Daikin Ind Ltd | Magnetic bearing device |
| CN112078375A (en) * | 2020-09-18 | 2020-12-15 | 同济大学 | Control method and system for inhibiting transverse impact interference of suspension system of magnetic-levitation train |
| CN114251358A (en) * | 2021-11-22 | 2022-03-29 | 北京高孚动力科技有限公司 | Active magnetic bearing rotor drop protection method |
| CN115143193A (en) * | 2022-09-01 | 2022-10-04 | 江苏明磁动力科技有限公司 | Magnetic suspension motor instability pre-diagnosis method and system based on sensitivity detection result |
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2022
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10213369A (en) * | 1997-01-29 | 1998-08-11 | Matsushita Electric Ind Co Ltd | Fan |
| JPH10288190A (en) * | 1997-04-16 | 1998-10-27 | Daikin Ind Ltd | Magnetic bearing device |
| CN112078375A (en) * | 2020-09-18 | 2020-12-15 | 同济大学 | Control method and system for inhibiting transverse impact interference of suspension system of magnetic-levitation train |
| CN114251358A (en) * | 2021-11-22 | 2022-03-29 | 北京高孚动力科技有限公司 | Active magnetic bearing rotor drop protection method |
| CN115143193A (en) * | 2022-09-01 | 2022-10-04 | 江苏明磁动力科技有限公司 | Magnetic suspension motor instability pre-diagnosis method and system based on sensitivity detection result |
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