CN115922062A - Manufacturing method of integrated Fresnel lens based on femtosecond laser writing - Google Patents
Manufacturing method of integrated Fresnel lens based on femtosecond laser writing Download PDFInfo
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- CN115922062A CN115922062A CN202211640306.4A CN202211640306A CN115922062A CN 115922062 A CN115922062 A CN 115922062A CN 202211640306 A CN202211640306 A CN 202211640306A CN 115922062 A CN115922062 A CN 115922062A
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Abstract
The invention discloses a manufacturing method of an integrated Fresnel lens based on femtosecond laser writing, which comprises the following steps: presetting processing parameters of a femtosecond laser processing system, wherein a femtosecond laser source in the femtosecond laser processing system generates femtosecond laser, and the femtosecond laser carries out beam collimation through an optical fiber or an optical lens to obtain collimated beams; focusing the collimated light beam on a laser processing substrate material through a lens; and processing the laser processing substrate material according to the set processing design parameters and the processing layer number of the Fresnel lens to obtain the integrated Fresnel lens. The Fresnel lens is processed and manufactured based on the femtosecond laser writing technology, the processing cost is low, the speed is high, the stability is high and the accurate control of the Fresnel lens parameters can be realized by adjusting the parameter setting and the processing mode of the femtosecond laser.
Description
Technical Field
The invention relates to the technical field of optical devices and femtosecond laser processing, in particular to a manufacturing method of an integrated Fresnel lens based on femtosecond laser writing and the integrated Fresnel lens.
Background
A femtosecond laser is a laser light emitted in a pulse form, and the pulse duration is in units of femtoseconds. When a focused femtosecond laser is applied to a material, the energy of photons is transmitted to the interior of the material lattice due to nonlinear absorption, thereby causing structural changes in the material. Such structural changes may alter the optical properties of the material. The femtosecond laser pulse has the characteristics of instantaneous high energy, non-contact property and high-precision micro-nano processing.
Femtosecond laser processing is a potential modern integrated optical fabrication technique. Compared with the most traditional electron beam lithography and plasma enhanced chemical vapor deposition, the femtosecond laser direct writing has the advantages of high manufacturing speed, flexible processing structure design, high spatial precision, easy integration of processed samples and the like.
Fresnel lenses (Fresnel lenses), also known as screw lenses, are mostly sheets of polyolefin material that are injection-molded, and are also made of glass, one surface of the lens is smooth, and the other surface is inscribed with concentric circles from small to large, and the texture of the lens is designed according to the requirements of light interference and interference, relative sensitivity and receiving angle. The Fresnel lens has the advantages of light weight and thin thickness, and is widely applied to the fields of projection display, solar photovoltaic, aviation and navigation and the like.
In the traditional Fresnel lens processing, a machine tool burning mould is mostly adopted, and then the burning mould is used for integral casting and compression molding, or the Fresnel lens is directly formed by grinding and burning on a lens base material. The method for pouring and compression molding of the mold has the disadvantages of complex process, low design flexibility of the mold, long processing time, weak universality and high manufacturing cost. And the Fresnel lens prepared by directly grinding and burning on the lens base material is not easy to integrate.
That is to say, the traditional fresnel lens manufacturing process has the disadvantages of complex process, high manufacturing cost, low flexibility and difficulty in integration, and is difficult to meet the development requirement of small integration of the fresnel lens.
Accordingly, there is a need for improvements and developments in the art.
Disclosure of Invention
The invention mainly aims to provide a manufacturing method of an integrated Fresnel lens based on femtosecond laser writing and the integrated Fresnel lens, and aims to solve the problems that in the prior art, a Fresnel lens manufacturing process has the defects of complex process, high manufacturing cost, low flexibility and difficulty in integration, and the development requirement of small integration of the Fresnel lens is difficult to meet.
In order to achieve the above object, the present invention provides a method for manufacturing an integrated fresnel lens based on femtosecond laser writing, which includes the following steps:
presetting processing parameters of a femtosecond laser processing system, wherein a femtosecond laser source in the femtosecond laser processing system generates femtosecond laser, and the femtosecond laser carries out beam collimation through an optical fiber or an optical lens to obtain collimated beams;
focusing the collimated light beam on a laser processing substrate material through a lens;
and processing the laser processing substrate material according to the set processing design parameters and the processing layer number of the Fresnel lens to obtain the integrated Fresnel lens.
Optionally, in the method for manufacturing an integrated fresnel lens based on femtosecond laser writing, the processing parameters include femtosecond laser energy, wavelength, pulse energy, repetition frequency, pulse duration, number of single-point repetitive processing times, and numerical aperture of the lens.
Optionally, in the method for manufacturing an integrated fresnel lens based on femtosecond laser writing, the optical fiber or the optical lens is placed on a mechanically controllable displacement platform in the femtosecond laser processing system as required;
and the mechanical controllable displacement platform is used for controlling the movement of the femtosecond laser to process the laser processing substrate material.
Optionally, in the method for manufacturing an integrated fresnel lens based on femtosecond laser writing, the laser processing substrate material includes fused quartz, a silicon wafer, a germanium wafer, sapphire, rutile, calcium fluoride, barium fluoride, magnesium fluoride, and zinc selenide;
the laser processing base material is a mature optical element or a blank substrate.
Optionally, in the method for manufacturing an integrated fresnel lens based on femtosecond laser writing, the lens is placed on the mechanically controllable displacement platform.
Optionally, in the manufacturing method of the integrated fresnel lens based on femtosecond laser writing, the processing design parameters include a focal length, a diameter, and a number of layers of the fresnel lens.
Optionally, in the manufacturing method of the integrated fresnel lens based on femtosecond laser writing, a numerical aperture of the lens is 0.1NA to 1.5NA.
Optionally, in the method for manufacturing an integrated fresnel lens based on femtosecond laser writing, the wavelength is 0.1 to 10 μm;
the pulse energy is 1nJ-10 mu J;
the repetition frequency is 1Hz-10GHz;
the pulse duration is 1-1000fs.
Optionally, in the manufacturing method of the integrated fresnel lens based on femtosecond laser writing, a diameter range of the integrated fresnel lens is 0.1-100mm;
the focal length range of the integrated Fresnel lens is 0.1-100mm.
In addition, in order to achieve the above purpose, the present invention further provides an integrated fresnel lens, wherein the integrated fresnel lens is manufactured by the manufacturing method of the integrated fresnel lens based on femtosecond laser writing.
In the invention, processing parameters of a femtosecond laser processing system are preset, a femtosecond laser source in the femtosecond laser processing system generates femtosecond laser, and the femtosecond laser carries out beam collimation through an optical fiber or an optical lens to obtain collimated beams; the collimated light beams are focused on a laser processing substrate material through a lens; and processing the laser processing substrate material according to the set processing design parameters and the processing layer number of the Fresnel lens to obtain the integrated Fresnel lens. The Fresnel lens is processed and manufactured based on the femtosecond laser writing technology, the processing cost is low, the speed is high, the stability is high and the accurate control of the Fresnel lens parameters can be realized by adjusting the parameter setting and the processing mode of the femtosecond laser.
Drawings
FIG. 1 is a flow chart of a preferred embodiment of the method for fabricating an integrated Fresnel lens based on femtosecond laser writing according to the present invention;
fig. 2 is a schematic diagram of a writing structure based on femtosecond laser processing in a preferred embodiment of the method for manufacturing an integrated fresnel lens based on femtosecond laser writing according to the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer and clearer, the present invention is further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
As shown in fig. 1 and 2, the method for manufacturing an integrated fresnel lens based on femtosecond laser writing according to a preferred embodiment of the present invention includes the following steps:
step S10, presetting processing parameters of a femtosecond laser processing system, wherein a femtosecond laser source in the femtosecond laser processing system generates femtosecond laser, and the femtosecond laser carries out beam collimation through an optical fiber or an optical lens to obtain collimated beams.
Specifically, the femtosecond laser processing system is a processing machine for processing a fresnel lens, and then before processing, processing parameters of the femtosecond laser processing system need to be set in advance, wherein the processing parameters include femtosecond laser energy, wavelength, pulse energy, repetition frequency, pulse duration, single-point repetitive processing times and numerical aperture of the lens, the wavelength is 0.1-10 μm, the pulse energy is 1nJ-10 μ J, the repetition frequency is 1Hz-10GHz, and the pulse duration is 1-1000fs.
A femtosecond laser light source (equivalent to a laser) in the femtosecond laser processing system generates femtosecond laser, the femtosecond laser performs beam collimation through an optical fiber or an optical lens to obtain a collimated beam (as denoted by 1 in fig. 2, namely, the femtosecond laser after beam collimation), wherein the optical fiber or the optical lens is placed on a mechanical controllable displacement platform in the femtosecond laser processing system according to requirements, the mechanical controllable displacement platform belongs to one component in the femtosecond laser processing system, and the mechanical controllable displacement platform is used for controlling the movement of the femtosecond laser to process a laser processing substrate material.
And S20, focusing the collimated light beam on a laser processing substrate material through a lens.
Specifically, the laser processing base material (indicated as 2 in fig. 2, that is, the laser processing base material) includes fused silica, a silicon wafer, a germanium wafer, sapphire, rutile, calcium fluoride, barium fluoride, magnesium fluoride, and zinc selenide; namely, during processing, the laser processing substrate material is any one of fused quartz, a silicon wafer, a germanium wafer, sapphire, rutile, calcium fluoride, barium fluoride, magnesium fluoride and zinc selenide; the laser processing substrate material is a mature (complete' means a mature optical element with a certain function, namely the substrate material to be processed can be a mature optical element or a blank transparent optical medium; femtosecond laser can directly write the structure of the Fresnel lens in the optical element or the transparent medium, so that a plurality of optical elements with different functions can be integrated together.
The lens is placed on the mechanical controllable displacement platform, and the lens refers to a focusing lens with a function of converging light beams, such as a plano-convex lens, a positive concave-convex lens, an aspheric lens and the like; for more finely machined scenes, a high power Objective (similar to that used with a microscope) is used for focusing, such as an Objective with a magnification of 40 and a numerical aperture NA =0.65 (e.g., olympus Plan N40x/0.65NA Objective).
Wherein, the reference range of the numerical aperture of the lens is 0.1NA-1.5NA, and the common numerical aperture is 0.25NA,0.65NA,1.25NA and the like; the lenses with different numerical apertures can be selected according to requirements, the focusing depth of field of light with different Numerical Apertures (NA) is different, the smaller the numerical aperture value is, the larger the depth of field is, and the thicker the thickness of single laser scanning processing is. Different lens numerical apertures can be used for processing with different requirements of size and fineness for different devices.
Laser pulses (femtosecond laser after beam collimation) are focused on a chip material (laser processing substrate material), a focused light spot is 0.1-100 mu m, and a lens is written in the transparent material through nonlinear absorption.
And S30, processing the laser processing substrate material according to the set processing design parameters and the processing layer number of the Fresnel lens to obtain the integrated Fresnel lens.
Specifically, the processing design parameters include the focal length, the diameter and the number of layers of the Fresnel lens; according to requirements, coding processing design parameters and the number of designed processing layers of the Fresnel lens, and processing the Fresnel lens in the laser processing substrate material; through adjusting the parameter setting and the processing mode of the femtosecond laser, the precise control of the parameters of the Fresnel lens can be realized.
For example, the sample (fresnel lens) is fixed on a three-dimensional stage (i.e., a mechanically controllable displacement stage), the movement (x, y, z axes) of the stage (i.e., the mechanically controllable displacement stage) can be encoded using a computer, and the desired shape (like 3D printing) can be processed by controlling the trajectory of the stage movement (and thus the precise location of the laser process) and the pulse emission time of the femtosecond laser.
The processing design parameters of the Fresnel lens mainly comprise focal length, diameter and layer number. The design of the number of processing layers involves matching to the lens, for example for a structure with a processing thickness of 0.1mm, if a focusing lens with a relatively small numerical aperture (longer depth of field, thicker thickness per scan) is used, then only 5 stacked scans are required to achieve a total thickness of 0.1mm, i.e. a 5-layer structure, but if a focusing lens with a relatively large numerical aperture is used, 10 layers may be required.
In addition, the diameter range of the inscribed integrated Fresnel lens is 0.1-100mm; the focal length range of the integrated Fresnel lens is 0.1-100mm.
As shown in FIG. 2, the femtosecond laser 1 in FIG. 2 generated a frequency-doubled 515nm laser with a wavelength of 1030nm, a pulse width of 200 femtoseconds, a pulse repetition frequency of 200kHz, and a pulse energy of 220nJ. The laser pulses were focused to the inside of a 10 x 1mm piece of fused silica negative (20 μm depth) using a lens with a focal length of 0.15mm numerical aperture of 1.25, ablating 20 layers (3 in fig. 2 representing a single or multi-layer structure) of the fresnel lens structure.
According to the invention, femtosecond laser is used for directly writing the Fresnel lens structure in the laser processing substrate material, and the parameter setting of the femtosecond laser is adjusted to realize the precise control of the Fresnel lens parameters, so that the problems that the traditional Fresnel lens is difficult to integrate and the structure design flexibility is low are effectively solved; the integrated Fresnel lens inside the transparent medium based on femtosecond laser writing can be applied to important fields of projection display, solar photovoltaic, aviation and navigation and the like.
Has the beneficial effects that:
(1) And (3) rapid manufacturing: the writing speed is different according to the laser used. For a laser with a repetition rate of 1MHz, the writing time of a single layer lens with the diameter of 1mm is within 30 seconds.
(2) The lens parameters are controllable: the efficiency of the Fresnel lens at the focus can be controlled to be 0-100% by controlling laser parameters, when a beam of light strikes the Fresnel lens, a light spot is formed at the focus through the convergence effect of the Fresnel lens, and the efficiency at the focus is the ratio of the energy of the light spot to the total energy.
(3) The repeatability is high: by testing the substrate, a processing coding pattern (the processing coding pattern is referred to as a 'coding Fresnel lens', which is a track graph formed after coding a three-dimensional moving axis and has different codes according to different requirements) and a processing method are determined, and the substrate with the same requirement can be repeatedly processed and produced in mass under the same program.
(4) The stability is high: the laser writing structure has very high mechanical stability and the working temperature range is-50-200 ℃.
(5) High integration level: can be processed in the mature optical device, and has high integration level.
(6) The cost is low: the processing cost is low, the laser processing technology is based, and an ultra-clean room preparation environment is not needed.
Further, based on the manufacturing method of the integrated Fresnel lens based on femtosecond laser writing, the invention also correspondingly provides the integrated Fresnel lens, and the integrated Fresnel lens is manufactured by the manufacturing method of the integrated Fresnel lens based on femtosecond laser writing.
In summary, the invention provides an integrated fresnel lens manufacturing method based on femtosecond laser writing and an integrated fresnel lens, wherein the method comprises the following steps: presetting processing parameters of a femtosecond laser processing system, wherein a femtosecond laser source in the femtosecond laser processing system generates femtosecond laser, and the femtosecond laser carries out beam collimation through an optical fiber or an optical lens to obtain collimated beams; focusing the collimated light beam on a laser processing substrate material through a lens; and processing the laser processing substrate material according to the set processing design parameters and the processing layer number of the Fresnel lens to obtain the integrated Fresnel lens. The Fresnel lens is processed and manufactured based on the femtosecond laser writing technology, the processing cost is low, the speed is high, the stability is high and the accurate control of the Fresnel lens parameters can be realized by adjusting the parameter setting and the processing mode of the femtosecond laser.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or terminal that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or terminal. Without further limitation, an element defined by the phrase "comprising one of 8230, and" comprising 8230does not exclude the presence of additional like elements in a process, method, article, or terminal comprising the element.
It is to be understood that the invention is not limited to the examples described above, but that modifications and variations may be effected thereto by those of ordinary skill in the art in light of the foregoing description, and that all such modifications and variations are intended to be within the scope of the invention as defined by the appended claims.
Claims (10)
1. A manufacturing method of an integrated Fresnel lens based on femtosecond laser writing is characterized in that the manufacturing method of the integrated Fresnel lens based on femtosecond laser writing comprises the following steps:
presetting processing parameters of a femtosecond laser processing system, wherein a femtosecond laser source in the femtosecond laser processing system generates femtosecond laser, and the femtosecond laser carries out beam collimation through an optical fiber or an optical lens to obtain collimated beams;
focusing the collimated light beam on a laser processing substrate material through a lens;
and processing the laser processing substrate material according to the set processing design parameters and the processing layer number of the Fresnel lens to obtain the integrated Fresnel lens.
2. The method of claim 1, wherein the processing parameters include femtosecond laser energy, wavelength, pulse energy, repetition frequency, pulse duration, number of single-point repetitive processing, and numerical aperture of the lens.
3. The method for manufacturing the integrated Fresnel lens based on femtosecond laser writing according to the claim 1, wherein the optical fiber or the optical lens is placed on a mechanical controllable displacement platform in the femtosecond laser processing system according to requirements;
and the mechanical controllable displacement platform is used for controlling the movement of the femtosecond laser to process the laser processing substrate material.
4. The method for manufacturing the integrated Fresnel lens based on the femtosecond laser writing according to the claim 1, wherein the laser processing substrate material comprises fused quartz, a silicon wafer, a germanium wafer, sapphire, rutile, calcium fluoride, barium fluoride, magnesium fluoride and zinc selenide;
the laser processing base material is a mature optical element or a blank substrate.
5. The method for manufacturing an integrated Fresnel lens based on femtosecond laser writing according to claim 3, wherein the lens is placed on the mechanically controllable displacement platform.
6. The method for manufacturing an integrated Fresnel lens based on femtosecond laser writing according to claim 1, wherein the processing design parameters comprise the focal length, the diameter and the number of layers of the Fresnel lens.
7. The method for manufacturing an integrated Fresnel lens based on femtosecond laser writing according to claim 2, wherein the numerical aperture of the lens is 0.1NA-1.5NA.
8. The method for manufacturing an integrated fresnel lens based on femtosecond laser writing according to claim 2, wherein the wavelength is 0.1-10 μm;
the pulse energy is 1nJ-10 mu J;
the repetition frequency is 1Hz-10GHz;
the pulse duration is 1-1000fs.
9. The method for manufacturing the integrated Fresnel lens based on the femtosecond laser writing according to the claim 1, wherein the diameter range of the integrated Fresnel lens is 0.1-100mm;
the focal length range of the integrated Fresnel lens is 0.1-100mm.
10. An integrated fresnel lens, characterized in that the integrated fresnel lens is manufactured by the method for manufacturing an integrated fresnel lens based on femtosecond laser writing according to any one of claims 1 to 9.
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| CN117358926A (en) * | 2023-12-05 | 2024-01-09 | 天津大学 | Preparation method of germanium diaphragm array and light field imaging system |
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| CN117358926A (en) * | 2023-12-05 | 2024-01-09 | 天津大学 | Preparation method of germanium diaphragm array and light field imaging system |
| CN117358926B (en) * | 2023-12-05 | 2024-02-13 | 天津大学 | Preparation method of germanium diaphragm array and light field imaging system |
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