CN115901072B - Compensation method and system of silicon piezoresistance type air pressure sensing module - Google Patents
Compensation method and system of silicon piezoresistance type air pressure sensing module Download PDFInfo
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- 239000010703 silicon Substances 0.000 title claims abstract description 61
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- 238000013507 mapping Methods 0.000 claims abstract description 46
- 238000005259 measurement Methods 0.000 claims abstract description 12
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- 238000010606 normalization Methods 0.000 claims description 25
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Abstract
The invention provides a compensation method and a system of a silicon piezoresistance type air pressure sensing module, comprising the following steps: monitoring and collecting a calibrated air pressure value, calibrated temperature information and corresponding excitation voltage; normalizing the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage; constructing a regression equation relation among the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage and output voltage; substituting the acquired calibration air pressure value, calibration temperature information and corresponding excitation voltage into a regression equation relation, and calculating to obtain a mapping matrix coefficient in the regression equation relation; and calculating and obtaining a target air pressure value to be measured and an air pressure height value based on regression equation relation according to the calibration temperature information, the corresponding excitation voltage and the output voltage at the current moment, and completing calibration compensation of the silicon piezoresistive air pressure sensing module. By applying the technical scheme of the invention, the technical problem of low measurement accuracy of the air pressure sensing module in the prior art is solved.
Description
Technical Field
The invention relates to the technical field of pressure sensing, in particular to a compensation method and a system of a silicon piezoresistive air pressure sensing module.
Background
The air pressure sensing module based on the silicon piezoresistive principle has the advantages of small volume, easiness in integration, high sensitivity, strong overload capacity, low process difficulty, low cost and the like, and is widely applied to the fields of aerospace, meteorological monitoring, consumer electronics and the like. With the high-speed development of various technologies, the products are developed towards integration, intelligence, easy maintenance and the like so as to realize application in more fields.
However, the output signal of the air pressure sensing module based on the silicon piezoresistive principle is greatly affected by temperature, temperature drift and time drift are easy to occur to reduce the measurement accuracy, and meanwhile, the excitation power supply also affects the output signal of the air pressure sensing module, so that a compensation method is required to be provided for each factor affecting the output signal and the accuracy, so that the measurement accuracy of the air pressure sensing module is further improved, and the requirement of more high-accuracy application scenes is met.
Disclosure of Invention
The invention provides a compensation method and a compensation system for a silicon piezoresistive air pressure sensing module, which can solve the technical problem of low measurement accuracy of the air pressure sensing module in the prior art.
According to an aspect of the present invention, there is provided a method of compensating a silicon piezoresistive barometric sensor module, the method of compensating a silicon piezoresistive barometric sensor module including: monitoring and collecting a calibrated air pressure value, calibrated temperature information and corresponding excitation voltage; normalizing the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage; constructing a regression equation relation among the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage and output voltage; substituting the acquired calibration air pressure value, calibration temperature information and corresponding excitation voltage into a regression equation relation, and calculating to obtain a mapping matrix coefficient in the regression equation relation; and calculating and obtaining a target air pressure value to be measured and an air pressure height value based on regression equation relation according to the calibration temperature information, the corresponding excitation voltage and the output voltage at the current moment, and completing calibration compensation of the silicon piezoresistive air pressure sensing module.
Further, the equation set for normalizing the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage is thatWherein P is the calibrated air pressure value, T is the calibrated temperature information, ve is the corresponding excitation voltage, P ' is the normalized calibrated air pressure value, T ' is the normalized calibrated temperature information, ve ' is the normalized corresponding excitation voltage, a is the calibrated air pressure normalization coefficient, b is the calibrated temperature normalization coefficient, c is the excitation voltage normalization coefficient, b 0 To calibrate the temperature bias normalization parameter c 0 The normalization parameters are biased for the excitation voltage.
Further, the regression equation is related as Wherein V is out To output voltage, k 0 For the first mapping momentArray coefficients, k 1 For the second mapping matrix coefficient, k 2 For the third mapping matrix coefficient, k 3 For the fourth mapping matrix coefficient, k 4 For the fifth mapping matrix coefficient, k 5 For the sixth mapping matrix coefficient, k 6 For the seventh mapping matrix coefficient, k 7 For the eighth mapping matrix coefficient, k 8 For the ninth mapping matrix coefficient ε p Is a high order infinitely small quantity.
Further, based on the regression equation, calculating and obtaining the target air pressure value and the air pressure height value to be measured according to the calibration temperature information, the corresponding excitation voltage and the output voltage at the current moment specifically includes: substituting the calibration temperature information, the corresponding excitation voltage and the output voltage at the current moment into a regression equation relation, and calculating to obtain a target air pressure value to be measured; and acquiring an air pressure height value corresponding to the target air pressure value to be measured according to the set atmosphere model and the target air pressure value to be measured.
According to still another aspect of the present invention, there is provided a compensation system of a silicon piezoresistive barometric sensor module, which performs measurement accuracy compensation using the compensation method of the silicon piezoresistive barometric sensor module as described above.
Further, the compensation system of the silicon piezoresistive air pressure sensing module comprises: the data acquisition module is used for monitoring and acquiring the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage; the normalization module is used for normalizing the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage; the regression equation relation construction module is used for constructing a regression equation relation among the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage and the output voltage; the mapping matrix coefficient calculation module is used for substituting the acquired calibration air pressure value, calibration temperature information and corresponding excitation voltage into the regression equation relation, and calculating and obtaining the mapping matrix coefficient in the regression equation relation; and the calibration compensation module is used for calculating and obtaining a target air pressure value to be measured and an air pressure height value according to the calibration temperature information, the corresponding excitation voltage and the output voltage at the current moment based on the regression equation relation to complete the calibration compensation of the silicon piezoresistive air pressure sensing module.
The invention provides a compensation method of a silicon piezoresistance type air pressure sensing module, which takes input pressure, working temperature, excitation voltage and output voltage value as variables to construct a multi-element fitting mathematical model, so that after the output voltage of the air pressure sensing module is measured, the corresponding working temperature and excitation voltage are combined and substituted into the mathematical model, and the air pressure value and the air pressure height value of a measured point can be calculated rapidly and simply. Compared with the prior art, the compensation method of the silicon piezoresistive barometric sensor module comprehensively considers influence factors of more dimensions, can further improve the measurement accuracy of the silicon piezoresistive barometric sensor module after compensation, and realizes application in more fields; the method for realizing the multi-element data compensation based on the pressure, temperature and excitation voltage is simple and practical, reduces the quality requirement of the matching circuit on the excitation voltage, is convenient and effective to implement, and has strong feasibility.
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The accompanying drawings, which are included to provide a further understanding of embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention. It is evident that the drawings in the following description are only some embodiments of the present invention and that other drawings may be obtained from these drawings without inventive effort for a person of ordinary skill in the art.
Fig. 1 shows a schematic block diagram of a compensation method of a silicon piezoresistive barometric sensor module according to a specific embodiment of the invention.
Detailed Description
It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other. The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. The following description of at least one exemplary embodiment is merely exemplary in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
The relative arrangement of the components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless it is specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective parts shown in the drawings are not drawn in actual scale for convenience of description. Techniques, methods, and apparatus known to one of ordinary skill in the relevant art may not be discussed in detail, but should be considered part of the specification where appropriate. In all examples shown and discussed herein, any specific values should be construed as merely illustrative, and not a limitation. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further discussion thereof is necessary in subsequent figures.
As shown in fig. 1, according to an embodiment of the present invention, there is provided a method for compensating a silicon piezoresistive barometric sensor module, the method for compensating a silicon piezoresistive barometric sensor module comprising: monitoring and collecting a calibrated air pressure value, calibrated temperature information and corresponding excitation voltage; normalizing the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage; constructing a regression equation relation among the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage and output voltage; substituting the acquired calibration air pressure value, calibration temperature information and corresponding excitation voltage into the regression equation relation, and calculating to obtain a mapping matrix coefficient in the regression equation relation; and calculating and obtaining a target air pressure value to be measured and an air pressure height value based on regression equation relation according to the calibration temperature information, the corresponding excitation voltage and the output voltage at the current moment, and completing calibration compensation of the silicon piezoresistive air pressure sensing module.
The method takes input pressure, working temperature, excitation voltage and output voltage value as variables to construct a multi-element fitting mathematical model, so that after the output voltage of the air pressure sensing module is measured, the corresponding working temperature and excitation voltage are combined and substituted into the mathematical model, and the air pressure value and air pressure height value of a measured point can be calculated rapidly and simply. Compared with the prior art, the compensation method of the silicon piezoresistive barometric sensor module comprehensively considers influence factors of more dimensions, can further improve the measurement accuracy of the silicon piezoresistive barometric sensor module after compensation, and realizes application in more fields; the method for realizing the multi-element data compensation based on the pressure, temperature and excitation voltage is simple and practical, reduces the quality requirement of the matching circuit on the excitation voltage, is convenient and effective to implement, and has strong feasibility.
Further, as the temperature effect of the silicon piezoresistive pressure sensing module is obvious, the output signal difference of the silicon piezoresistive pressure sensing module is large in a wide temperature working range, most of the silicon piezoresistive pressure sensing modules can integrate a temperature sensor therein, and acquire temperature information for carrying out full-temperature zone compensation on the silicon piezoresistive pressure sensing module.
Further, for the voltage-excited silicon piezoresistive air pressure sensing module, a wheatstone full-bridge mode is adopted to output a voltage signal, so that the output voltage signal Vout of the silicon piezoresistive air pressure sensing module has a positive correlation with the excitation voltage Ve, and the formula can be used: vout=ve×f (P, T), so that monitoring acquisition of the excitation voltage Ve is required.
Further, when the silicon piezoresistive air pressure sensing module is calibrated and compensated, through a three-dimensional calibration experiment on the calibrated air pressure value P, the calibrated temperature information T and the corresponding excitation voltage Ve, the calibrated air pressure value P, the calibrated temperature information T and the corresponding excitation voltage Ve are normalized, so that a regression equation relation between the calibrated air pressure value P, the calibrated temperature information T, the corresponding excitation voltage Ve and the output voltage Vout is established: vout=f (P, T, ve), and thus calibration compensation of the silicon piezoresistive barometric sensor module is completed.
In the invention, the equation set for normalizing the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage is thatWherein P is the calibrated air pressure value, T is the calibrated temperature information, ve is the corresponding excitation voltage, P ' is the normalized calibrated air pressure value, T ' is the normalized calibrated temperature information, ve ' is the normalized corresponding excitation voltage, a is the calibrated air pressure normalization coefficient, b is the calibrated temperature normalization coefficient, c is the excitation voltage normalization coefficient, b 0 To calibrate the temperature bias normalization parameter c 0 The normalization parameters are biased for the excitation voltage. Through normalization, the calibrated air pressure value P, the calibrated temperature information T and the corresponding excitation voltage Ve can be converted into (0, 1).
Further, output voltage V out And establishing a regression equation relation with the normalized calibrated air pressure value P ', the calibrated temperature information T ' and the corresponding excitation voltage Ve '. The regression equation relationship is Wherein V is out To output voltage, k 0 For the first mapping matrix coefficient, k 1 For the second mapping matrix coefficient, k 2 For the third mapping matrix coefficient, k 3 For the fourth mapping matrix coefficient, k 4 For the fifth mapping matrix coefficient, k 5 For the sixth mapping matrix coefficient, k 7 For the eighth mapping matrix coefficient, k 8 For the ninth mapping matrix coefficient ε p Is a high order infinitely small quantity.
After the regression equation relationship is established, the calibration compensation of the silicon piezoresistive air pressure sensing module can be completed by calculating and obtaining the air pressure value and the air pressure height value of the target to be measured according to the calibration temperature information, the corresponding excitation voltage and the output voltage at the current moment based on the regression equation relationship.
In the invention, based on regression equation relation, according to the calibration temperature information, the corresponding excitation voltage and the output voltage at the current moment, the method for calculating and obtaining the target air pressure value and the air pressure height value to be measured specifically comprises the following steps: substituting the calibration temperature information, the corresponding excitation voltage and the output voltage at the current moment into a regression equation relation, and calculating to obtain a target air pressure value to be measured; and acquiring the air pressure height value corresponding to the target air pressure value to be measured according to the set atmospheric model and the target air pressure value to be measured specified by GJB 365.1-87.
According to another aspect of the present invention, there is provided a compensation system of a silicon piezoresistive barometric sensor module, which performs measurement accuracy compensation using the compensation method of the silicon piezoresistive barometric sensor module as described above.
By using the configuration mode, the compensation system of the silicon piezoresistive air pressure sensing module is provided, and the system takes input pressure, working temperature, excitation voltage and output voltage value as variables to construct a multi-fitting mathematical model, so that after the output voltage of the air pressure sensing module is measured, the corresponding working temperature and excitation voltage are combined and substituted into the mathematical model, and the air pressure value and the air pressure height value of a measured point can be calculated rapidly and simply. Compared with the prior art, the compensation system of the silicon piezoresistive barometric sensor module comprehensively considers influence factors of more dimensions, can further improve the measurement accuracy of the silicon piezoresistive barometric sensor module after compensation, and realizes application in more fields; the method for realizing the multi-element data compensation based on the pressure, temperature and excitation voltage is simple and practical, reduces the quality requirement of the matching circuit on the excitation voltage, is convenient and effective to implement, and has strong feasibility.
Further, in order to realize the measurement accuracy compensation of the silicon piezoresistive barometric sensor module, the compensation system of the silicon piezoresistive barometric sensor module can be configured to comprise a data acquisition module, a normalization module, a regression equation relation construction module, a mapping matrix coefficient calculation module and a calibration compensation module, wherein the data acquisition module is used for monitoring and acquiring a calibration barometric pressure value, calibration temperature information and corresponding excitation voltage, the normalization module is used for normalizing the calibration barometric pressure value, the calibration temperature information and the corresponding excitation voltage, the regression equation construction module is used for constructing a regression equation relation between the calibration barometric pressure value, the calibration temperature information and the corresponding excitation voltage and the output voltage, the mapping matrix coefficient calculation module is used for substituting the acquired calibration barometric pressure value, calibration temperature information and the corresponding excitation voltage into the regression equation relation, calculating and obtaining a mapping matrix coefficient in the regression equation relation, and the calibration compensation module is used for calculating and obtaining a target barometric pressure value and a barometric pressure height value to be measured according to the calibration temperature information, the corresponding excitation voltage and the output voltage at the current moment based on the regression equation relation, so as to complete the calibration compensation of the silicon piezoresistive barometric sensor module.
In order to further understand the present invention, the following describes the compensation method of the silicon piezoresistive barometric sensor module according to the present invention with reference to fig. 1.
As shown in fig. 1, according to an embodiment of the present invention, a compensation method for a silicon piezoresistive barometric sensor module is provided, where the compensation method completes monitoring and collecting a calibration barometric value P, calibration temperature information T, and a corresponding excitation voltage Ve through a matching circuit of the silicon piezoresistive barometric sensor module, so as to construct a regression equation relationship between three calibration information amounts and an output voltage Vout: vout=f (P, T, ve), thus finishing calibration compensation of the silicon piezoresistive barometric sensor module, calculating a target parameter to be measured-barometric pressure value according to the equation and the atmospheric model specified by GJB 365.1-87 by using the calibration temperature information T at the current moment, the corresponding excitation voltage Ve and the output voltage Vout when in actual use. The method specifically comprises the following steps.
Step one, monitoring and collecting a calibrated air pressure value, calibrated temperature information and corresponding excitation voltage. The silicon piezoresistive barometric sensor module is provided with suitable calibration test points according to experience, for example, m pressure calibration points, n temperature calibration points, and l excitation voltage calibration points, where the total of m x n x l calibration test points is 11 pressure calibration points, 8 temperature calibration points, and 8 excitation voltage calibration points.
And secondly, normalizing the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage. In this embodiment, the matching circuit information processing module of the silicon piezoresistive air pressure sensing module is used to complete the conditioning and collection of the calibration temperature information T, the corresponding excitation voltage Ve and the output voltage Vout, then normalize the calibration air pressure value P, the calibration temperature information T and the corresponding excitation voltage Ve, and normalize the calibration air pressure value, the calibration temperature information and the corresponding excitation voltage as the equation setWherein P is the calibrated air pressure value, T is the calibrated temperature information, ve is the corresponding excitation voltage, P ' is the normalized calibrated air pressure value, T ' is the normalized calibrated temperature information, ve ' is the normalized corresponding excitation voltage, a is the calibrated air pressure normalization coefficient, b is the calibrated temperature normalization coefficient, c is the excitation voltage normalization coefficient, b 0 To calibrate the temperature bias normalization parameter c 0 The normalization parameters are biased for the excitation voltage. Through normalization, the calibrated air pressure value P, the calibrated temperature information T and the corresponding excitation voltage Ve can be converted into (0, 1).
And thirdly, constructing regression equation relations among the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage and output voltage. Will output voltage V out And establishing a regression equation relation with the normalized calibrated air pressure value P ', the calibrated temperature information T ' and the corresponding excitation voltage Ve '. The regression equation relationship is Wherein V is out To output voltage, k 0 For the first mapping matrix coefficient, k 1 For the second mapping matrix coefficient, k 2 For the third mapping matrix coefficient, k 3 For the fourth mapping matrix coefficient, k 4 For the fifth mapping matrix coefficient, k 5 For the sixth mapping matrix coefficient, k 6 For the seventh mapping matrix coefficient, k 7 For the eighth mapping matrix coefficient, k 8 For the ninth mapping matrix coefficient ε p Is a negligible high order infinitely small amount.
Substituting m, n and l calibration test point data into the above formula to obtain a simultaneous equation set, and expressing the simultaneous equation set in a matrix form as follows: p=h×k+epsilon p Then, the matlab calculation software is used to calculate the coefficient k= (H) of the matrix by the least square method T H) - 1 H T P, H is the output voltage V out The correlation matrix of the calibration temperature information T and the corresponding excitation voltage Ve, k being k 0 、k 1 、k 2 、k 3 、k 4 、k 5 、k 6 、k 7 And k 8 Is a constant coefficient of (c).
And fifthly, calculating and obtaining a target air pressure value to be detected and an air pressure height value based on the regression equation relation according to the calibration temperature information, the corresponding excitation voltage and the output voltage at the current moment, and completing calibration compensation of the silicon piezoresistive air pressure sensing module.
In the present embodiment, the constant coefficient k is substituted into The pressure value Pt to be calculated can be combined with (Vout, T, ve) at the current moment, and the corresponding air can be calculated according to the atmospheric model regulated by GJB 365.1-87A pressure altitude value.
In summary, the invention provides a compensation method of a silicon piezoresistive air pressure sensing module, which takes input pressure, working temperature, excitation voltage and output voltage value as variables to construct a multi-fitting mathematical model, so that after the output voltage of the air pressure sensing module is measured, the corresponding working temperature and excitation voltage are combined and substituted into the mathematical model, and the air pressure value and the air pressure height value of a measured point can be calculated rapidly and simply. Compared with the prior art, the compensation method of the silicon piezoresistive pressure sensing module provided by the invention realizes the multi-element data compensation of the pressure-temperature-excitation voltage on the output signal, comprehensively considers influence factors of more dimensions, can further improve the measurement precision of the silicon piezoresistive pressure sensing module after compensation, realizes the application in more fields, and can solve the requirement that the existing silicon piezoresistive pressure sensing module needs to meet more high-precision application scenes; the method for realizing the multi-element data compensation based on the pressure, temperature and excitation voltage is simple and practical, reduces the quality requirement of the matching circuit on the excitation voltage, is convenient and effective to implement, and has strong feasibility.
Spatially relative terms, such as "above … …," "above … …," "upper surface at … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial location relative to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "over" other devices or structures would then be oriented "below" or "beneath" the other devices or structures. Thus, the exemplary term "above … …" may include both orientations of "above … …" and "below … …". The device may also be positioned in other different ways (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
In addition, the terms "first", "second", etc. are used to define the components, and are only for convenience of distinguishing the corresponding components, and the terms have no special meaning unless otherwise stated, and therefore should not be construed as limiting the scope of the present invention.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (4)
1. The compensation method of the silicon piezoresistive barometric sensing module is characterized by comprising the following steps of:
monitoring and collecting a calibrated air pressure value, calibrated temperature information and corresponding excitation voltage;
normalizing the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage;
constructing a regression equation relation among the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage and output voltage;
substituting the acquired calibration air pressure value, the calibration temperature information and the corresponding excitation voltage into the regression equation relation, and calculating to obtain a mapping matrix coefficient in the regression equation relation;
based on the regression equation relation, calculating and obtaining a target air pressure value to be detected and an air pressure height value according to the calibration temperature information, the corresponding excitation voltage and the output voltage at the current moment, and completing calibration compensation of the silicon piezoresistive air pressure sensing module;
the equation set for normalizing the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage is thatWherein P is a calibrated air pressure value, T is calibrated temperature information,ve is the corresponding excitation voltage, P ' is the normalized calibrated air pressure value, T ' is the normalized calibrated temperature information, ve ' is the normalized corresponding excitation voltage, a is the normalized air pressure normalization coefficient, b is the normalized temperature normalization coefficient, c is the normalized excitation voltage coefficient, b 0 To calibrate the temperature bias normalization parameter c 0 Biasing the normalization parameter for the excitation voltage;
will output voltage V out Establishing a regression equation relation with the normalized calibrated air pressure value P ', the calibrated temperature information T ' and the corresponding excitation voltage Ve ', wherein the regression equation relation is that Wherein V is out To output voltage, k 0 For the first mapping matrix coefficient, k 1 For the second mapping matrix coefficient, k 2 For the third mapping matrix coefficient, k 3 For the fourth mapping matrix coefficient, k 4 For the fifth mapping matrix coefficient, k 5 For the sixth mapping matrix coefficient, k 6 For the seventh mapping matrix coefficient, k 7 For the eighth mapping matrix coefficient, k 8 For the ninth mapping matrix coefficient ε p Is a high order infinitely small quantity.
2. The method for compensating a silicon piezoresistive pressure sensing module according to claim 1, wherein calculating and obtaining the target pressure value and the pressure height value to be measured according to the calibration temperature information, the corresponding excitation voltage and the output voltage at the current moment based on the regression equation relation specifically comprises: substituting the calibration temperature information, the corresponding excitation voltage and the output voltage at the current moment into the regression equation relation, and calculating to obtain a target air pressure value to be measured; and acquiring an air pressure height value corresponding to the target air pressure value to be measured according to the set atmosphere model and the target air pressure value to be measured.
3. A compensation system of a silicon piezoresistive barometric sensor module, characterized in that the compensation system of a silicon piezoresistive barometric sensor module uses the compensation method of a silicon piezoresistive barometric sensor module according to claim 1 or 2 for measurement accuracy compensation.
4. The compensation system of a silicon piezoresistive barometric sensor module according to claim 3, wherein the compensation system of a silicon piezoresistive barometric sensor module comprises:
the data acquisition module is used for monitoring and acquiring a calibration air pressure value, calibration temperature information and corresponding excitation voltage;
the normalization module is used for normalizing the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage;
the regression equation relation construction module is used for constructing a regression equation relation among the calibrated air pressure value, the calibrated temperature information and the corresponding excitation voltage and output voltage;
the mapping matrix coefficient calculation module is used for substituting the acquired calibration air pressure value, the calibration temperature information and the corresponding excitation voltage into the regression equation relation, and calculating and obtaining the mapping matrix coefficient in the regression equation relation;
and the calibration compensation module is used for calculating and obtaining a target air pressure value to be measured and an air pressure height value according to the calibration temperature information, the corresponding excitation voltage and the output voltage at the current moment based on the regression equation relation to complete the calibration compensation of the silicon piezoresistive air pressure sensing module.
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| CN108318529A (en) * | 2018-02-02 | 2018-07-24 | 中国石油大学(华东) | For the temperature-compensation method of voltage detecting, electric field fingerprint detection method and system |
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