CN115876275A - Liquid level detection method and detection system thereof - Google Patents
Liquid level detection method and detection system thereof Download PDFInfo
- Publication number
- CN115876275A CN115876275A CN202211505487.XA CN202211505487A CN115876275A CN 115876275 A CN115876275 A CN 115876275A CN 202211505487 A CN202211505487 A CN 202211505487A CN 115876275 A CN115876275 A CN 115876275A
- Authority
- CN
- China
- Prior art keywords
- liquid level
- detection
- tank body
- pipeline
- detection pipeline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
Abstract
The invention discloses a liquid level detection method, which is applied to the detection of the preset liquid level of a tank body and relates to the technical field of wet etching of microelectronic components, wherein the tank body is provided with a plurality of detection pipelines, the opening of each detection pipeline faces the descending direction of the liquid level, the port of each detection pipeline is flush with the corresponding preset liquid level, a liquid level switch is arranged in each detection pipeline and is connected with a controller, and the liquid level detection method comprises the following steps: continuously introducing detection gas with a certain flow rate into each detection pipeline to flow to the groove body; when the liquid level in the tank body is lower than a preset liquid level, the gas pressure in the detection pipeline is increased to enable the liquid level switch to be conducted, and the liquid level switch inputs a corresponding liquid level reaching signal to the controller; the controller receives the liquid level reaching signal and outputs an image signal that the liquid level of the tank body reaches the corresponding preset liquid level. The liquid level detection method and the liquid level detection system effectively improve the detection accuracy of the preset liquid level.
Description
Technical Field
The invention relates to the technical field of wet etching of microelectronic components, in particular to a liquid level detection method and a liquid level detection system.
Background
In the wet etching and other processes of the micro mechanical electronic component, the micro mechanical electronic component needs to be immersed in an etching solution, the liquid level of the solution is reduced along with the wet etching, new solution needs to be continuously added, and the concentration of the solution is reduced along with the wet etching, so that the solution needs to be timely discharged and the new solution needs to be added. Because etching solution has certain corrosivity, level sensor is easily corroded in setting up the cell body, detects whether the solution liquid level reaches and predetermines the liquid level through the fixed a plurality of capacitanc sensors in the cell body outside of splendid attire solution now, because solution is by certain consistency, probably produces the phenomenon of crystallization, wall built-up or string pearl in the inboard of cell body, and capacitanc sensor easily produces the false retrieval, seriously influences production quality and production safety.
Disclosure of Invention
The invention aims to provide a liquid level detection method and a detection system thereof, which aim to solve the problem of inaccurate detection of a preset liquid level in the prior art.
In order to solve the technical problem, the invention adopts the following technical scheme:
the liquid level detection method is applied to preset liquid level detection of a groove body, the groove body is provided with a plurality of detection pipelines, each detection pipeline is opened towards the liquid level descending direction, a port of each detection pipeline corresponds to the preset liquid level, a liquid level switch which is switched on when the external pressure changes by a certain value is arranged in each detection pipeline, the liquid level switch is connected with a controller, and the liquid level detection method comprises the following steps:
continuously introducing detection gas with a certain flow rate into each detection pipeline to flow to the groove body;
when the liquid level in the tank body is lower than a preset liquid level, the gas pressure in the detection pipeline is increased to enable the liquid level switch to be conducted, and the liquid level switch inputs a corresponding liquid level reaching signal to the controller;
the controller receives the liquid level reaching signal and outputs an image signal that the liquid level of the tank body reaches a corresponding preset liquid level.
In an optional embodiment of the present application, the step of continuously introducing gas at a certain flow rate into each detection pipeline, wherein the flow rate range of the detection gas is 0.2m/s to 0.6m/s.
In an optional embodiment of the present application, in the step, a detection gas continuously flowing at a certain flow rate is introduced into each detection pipeline, and the gas introduced into the detection pipeline is an inert gas.
In an optional embodiment of the present application, in the step, a detection gas continuously flowing at a certain flow rate is introduced into each detection pipeline, and the gas introduced into the detection pipeline is nitrogen.
In an optional embodiment of this application, the liquid level switch is differential pressure type liquid level switch, differential pressure type liquid level switch is used for detecting the environmental pressure change, differential pressure type liquid level switch turns into mechanical motion with pressure intensity change, and when the pressure intensity change value in the detection pipeline is greater than the default, differential pressure type liquid level switch closure and output signal.
A liquid level detection system is applied to preset liquid level detection of a tank body, and the liquid level detection method comprises the following steps:
one end of each detection pipeline extends into the tank body, the port of each detection pipeline is flush with the corresponding preset liquid level, and the other end of each detection pipeline extends out of the tank body;
the gas supply source is connected with one end of the detection pipeline, which extends out of the tank body, and is used for introducing detection gas flowing into the tank body into the detection pipeline;
the liquid level switches are respectively communicated with the detection pipelines one by one and are used for closing and outputting corresponding liquid level arrival signals when the pressure variation value in the corresponding detection pipeline is greater than a preset value;
and the controller is electrically connected with the liquid level switch and is used for processing the liquid level arrival signal input by the liquid level switch and outputting an image signal that the liquid level of the tank body reaches the corresponding preset liquid level.
In an alternative embodiment of the present application, the tank body is provided with an inlet pipe for introducing the solution and a drain pipe for draining the solution.
In an optional embodiment of the present application, the plurality of detection pipelines are arranged side by side along a side wall of the tank body.
In an optional embodiment of the present application, the plurality of detection pipelines are sequentially arranged from low to high according to the depth of the detection pipeline penetrating into the tank body.
In an optional embodiment of the present application, the material of the detection pipeline is PFA.
The liquid level detection method and the liquid level detection system disclosed by the invention have the beneficial effects that: through the gaseous flow direction cell body of detection that lets in certain velocity of flow to a plurality of detection pipeline, detect gaseous flow direction cell body from the detection pipeline of following. When the liquid level in the tank body is lower than a preset liquid level, the port of the corresponding detection pipeline of the preset liquid level in the tank body is sealed by the liquid level, the pressure of the detection gas in the corresponding detection pipeline is increased, the corresponding liquid level switch is switched on and inputs a corresponding liquid level arrival signal to the controller, and the controller outputs an image signal that the liquid level of the tank body reaches the corresponding preset liquid level after receiving the signal of the liquid level switch, so that the liquid level detection of the preset liquid level is completed. Through setting up a plurality of liquid levels of predetermineeing, can detect the different liquid levels of predetermineeing to realize the liquid level detection of predetermineeing of cell body, through detecting gas to the detection pipeline input, the liquid level passes through the detection pipeline port in the cell body and makes the pressure in the detection pipeline rise, and rethread liquid level switch switches on because of pressure risees and realizes signal output, effectively improves the liquid level detection accuracy of predetermineeing the liquid level in the cell body.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a flow chart of a liquid level detection method according to the present invention;
FIG. 2 is a schematic diagram of a liquid level detecting system according to the present invention.
Reference numbers: 10. a tank body; 20. detecting a pipeline; 30. a liquid level switch; 40. a controller; 50. a gas supply source.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on those shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention.
The terms "first", "second" and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", "third" may explicitly or implicitly include one or more of the features.
In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "communicate," "mount," "connect," and "connect" are to be construed broadly, e.g., as being fixed or removable or integral; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many different forms and should not be construed as limited to the examples set forth herein; rather, these example embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The drawings are merely schematic illustrations of the present disclosure and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and thus their repetitive description will be omitted.
The preferred embodiments of the present disclosure are further described in detail below with reference to the accompanying fig. 1-2 of the present disclosure.
Referring to fig. 1 and fig. 2, a liquid level detection method and a liquid level detection system thereof are provided in an embodiment of the present application, and the liquid level detection method and the liquid level detection system thereof provided in the embodiment of the present application can be applied to a wet etching operation of a microelectronic device. Place the port that corresponds detection pipeline 20 and predetermine the liquid level parallel and level predetermineeing at predetermined liquid level position, when the liquid level is crossed and is predetermine the liquid level, the liquid level also is crossed the detection pipeline 20 port that corresponds, the detection gas pressure in the detection pipeline 20 rises, thereby make the liquid level switch 30 that detection pipeline 20 corresponds closed and to controller 40 input signal, controller 40 receives the signal back the liquid level of output cell body 10 and does not pass the signal that corresponds the predetermined liquid level, thereby accomplish the detection of predetermineeing the liquid level in the cell body 10. The problem that liquid level detection is inaccurate due to the influence of crystallization, wall hanging and the like of the solution in the tank body 10 caused by the characteristics of the solution is solved, the liquid level detection method and the liquid level detection system provided by the scheme can be suitable for the solutions with different characteristics, and the detection accuracy of the preset liquid level is effectively improved.
Referring to fig. 1 and 2, in the embodiment of the present application, a liquid level detection method is applied to a preset liquid level detection of a tank 10, the tank 10 is provided with a plurality of detection pipelines 20, an opening of each detection pipeline 20 faces a liquid level descending direction, a port of each detection pipeline 20 is flush with a corresponding preset liquid level, a liquid level switch 30 that is turned on when an external pressure changes by a certain value is arranged in each detection pipeline 20, the liquid level switch 30 is connected to a controller 40, and the liquid level detection method includes the following steps:
s10, continuously introducing detection gas with a certain flow rate into each detection pipeline 20 to flow to the tank body 10;
s20, when the liquid level in the tank body 10 is lower than a preset liquid level, the gas pressure in the detection pipeline 20 is increased to enable the liquid level switch 30 to be conducted, and the liquid level switch 30 inputs a corresponding liquid level reaching signal to the controller 40;
s30, the controller 40 outputs an image signal that the liquid level of the trough body 10 reaches the corresponding preset liquid level after receiving the liquid level reaching signal.
The controller 40 is connected with an external image device, and after the controller 40 outputs an image signal that the liquid level of the tank body 10 reaches the corresponding preset liquid level to the external image device, the corresponding preset liquid level reaching image is displayed through the external image device.
In the step S20, the flow velocity range of the detection gas is 0.2 m/S-0.6 m/S, the low flow velocity is beneficial to saving the detection gas, and when the liquid level is over the port of the detection pipeline 20 in the tank body 10, the flow velocity of the gas emitted from the port of the detection pipeline 20 in the tank body 10 is small, so that the disturbance to the solution in the tank body 10 is reduced.
In step S20, the gas introduced into the detection pipeline 20 is inert gas, and the inert gas has stable chemical properties and does not chemically react with the solution in the tank 10, so that the chemical properties of the solution in the tank 10 are stable.
In the step S20, the gas introduced into the detection pipeline 20 is nitrogen, the chemical property of nitrogen is stable, and the manufacturing cost of nitrogen is low, which is beneficial to reducing the detection cost.
The liquid level switch 30 is a differential pressure type liquid level switch 30, the differential pressure type liquid level switch 30 is used for detecting environmental pressure variation, the differential pressure type liquid level switch 30 converts the pressure variation into mechanical movement, and when the pressure variation value in the detection pipeline 20 is larger than a preset value, the differential pressure type liquid level switch 30 is closed and outputs a signal. The differential level switch 30 may be a CDK-KML703-D check point 8 point type differential level switch 30 manufactured by Happy (China) Inc.
Referring to fig. 2, a liquid level detection system is applied to the preset liquid level detection of the tank 10, and the liquid level detection method includes:
one end of each detection pipeline 20 extends into the tank body 10, the port of each detection pipeline is flush with the corresponding preset liquid level, and the other end of each detection pipeline extends out of the tank body 10;
the gas supply source 50 is connected with one end of the detection pipeline 20, which extends out of the tank body 10, and is used for introducing detection gas flowing into the tank body 10 into the detection pipeline 20;
the liquid level switches 30 are respectively communicated with the detection pipelines 20 one by one and are used for closing and outputting corresponding liquid level arrival signals when the pressure variation value in the corresponding detection pipeline 20 is greater than a preset value;
and the controller 40 is electrically connected with the liquid level switch 30 and is used for processing a liquid level reaching signal input by the liquid level switch 30 and outputting an image signal that the liquid level of the tank body 10 reaches a corresponding preset liquid level.
Every detection pipeline 20 corresponds a and predetermines the liquid level, every detection pipeline 20 is at the port of cell body 10 and the liquid level parallel and level of predetermineeing that corresponds, let in through detection pipeline 20 and detect gaseous in the cell body 10 outside from the cell body 10, when the liquid level does not pass through predetermineeing the liquid level, the detection pipeline 20 that corresponds also is passed through by the liquid level, detect the pressure rise of gaseous in corresponding detection pipeline 20, it switches on because of the pressure rise of corresponding detection pipeline 20 to correspond liquid level switch 30, to the liquid level arrival signal that corresponds of controller 40 output, controller 40 output cell body 10 liquid level arrives the image signal that corresponds and predetermine the liquid level, thereby realize the detection of predetermineeing the liquid level in the cell body 10.
The tank body 10 is provided with an input pipe for inputting the solution and a drain pipe for discharging the solution. Through setting for a plurality of liquid levels of predetermineeing in advance, when solution is less than certain predetermined liquid level in cell body 10, increase solution in to cell body 10 through the input tube, when solution is higher than certain predetermined liquid level in cell body 10, through the fluid-discharge tube from cell body 10 in discharge solution.
The plurality of detection pipelines 20 are arranged side by side along the side wall of the tank body 10, which facilitates the layout of the detection pipelines 20 and facilitates the input of the detection gas from the gas supply source 50 to the plurality of detection pipelines 20.
The detection pipelines 20 are sequentially arranged from low to high according to the depth of the detection pipelines 20 penetrating into the tank body 10, and the influence among the detection pipelines 20 is favorably weakened.
The material of the detection pipeline 20 is PFA, and the quality of the PFA detection pipeline 20 is stable.
In summary, the detection gas flowing into the tank 10 through the detection pipes 20 at a certain flow rate flows into the tank 10, and the detection gas flows into the tank 10 from the detection pipes 20. When the liquid level in the tank body 10 is lower than a preset liquid level, the port of the corresponding detection pipeline 20 of the preset liquid level in the tank body 10 is sealed by the liquid level, the pressure of the detection gas in the corresponding detection pipeline 20 is increased, the corresponding liquid level switch 30 is switched on and inputs a corresponding liquid level arrival signal to the controller 40, the controller 40 receives the signal of the liquid level switch 30 and then outputs an image signal that the liquid level of the tank body 10 arrives at the corresponding preset liquid level, and liquid level detection of the preset liquid level is completed. Through setting up a plurality of liquid levels of predetermineeing, can detect the different liquid levels of predetermineeing to realize the predetermined liquid level detection of cell body 10, through detecting gaseous to the input of detection pipeline 20, the liquid level does not pass the detection pipeline 20 port in the cell body 10 and makes the pressure in the detection pipeline 20 rise, and rethread liquid level switch 30 switches on because of the pressure rise and realizes signal output, effectively improves the liquid level detection accuracy of predetermineeing the liquid level in the cell body 10.
In the foregoing description of embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
While the present disclosure has been described with reference to several exemplary embodiments, it is understood that the terminology used is intended to be in the nature of words of description and illustration, rather than of limitation. As the present disclosure may be embodied in several forms without departing from the spirit or essential characteristics thereof, it should also be understood that the above-described embodiments are not limited by any of the details of the foregoing description, but rather should be construed broadly within its spirit and scope as defined in the appended claims, and therefore all changes and modifications that fall within the meets and bounds of the claims, or equivalences of such meets and bounds are therefore intended to be embraced by the appended claims.
Claims (10)
1. The liquid level detection method is applied to preset liquid level detection of a groove body, and is characterized in that the groove body is provided with a plurality of detection pipelines, the opening of each detection pipeline faces to the liquid level descending direction, the port of each detection pipeline corresponds to the preset liquid level, a liquid level switch which is switched on when the external pressure changes by a certain value is arranged in each detection pipeline, the liquid level switch is connected with a controller, and the liquid level detection method comprises the following steps:
continuously introducing detection gas with a certain flow rate into each detection pipeline to flow to the groove body;
when the liquid level in the tank body is lower than a preset liquid level, the gas pressure in the detection pipeline is increased to enable the liquid level switch to be conducted, and the liquid level switch inputs a corresponding liquid level reaching signal to the controller;
the controller receives the liquid level reaching signal and outputs an image signal that the liquid level of the tank body reaches the corresponding preset liquid level.
2. The liquid level detection method according to claim 1, wherein the step of continuously introducing gas at a certain flow rate into each detection pipeline is performed, and the flow rate of the detection gas ranges from 0.2m/s to 0.6m/s.
3. The liquid level detection method according to claim 2, wherein in the step, detection gas with a certain flow rate is continuously introduced into each detection pipeline and flows into the tank body, and the gas introduced into the detection pipeline is inert gas.
4. The liquid level detection method according to claim 3, wherein in the step, detection gas with a certain flow rate is continuously introduced into each detection pipeline and flows into the tank body, and the gas introduced into the detection pipeline is nitrogen.
5. The method as claimed in claim 4, wherein the liquid level switch is a differential liquid level switch for detecting environmental pressure variation, the differential liquid level switch converts the pressure variation into mechanical movement, and when the pressure variation value in the detection pipeline is greater than a preset value, the differential liquid level switch is closed and outputs a signal.
6. A liquid level detection system is applied to the preset liquid level detection of a tank body, and is characterized in that the liquid level detection system is applied to the liquid level detection method of any one of claims 1 to 5, and comprises the following steps:
one end of each detection pipeline extends into the tank body, the port of each detection pipeline is flush with the corresponding preset liquid level, and the other end of each detection pipeline extends out of the tank body;
the gas supply source is connected with one end of the detection pipeline, which extends out of the tank body, and is used for introducing detection gas flowing into the tank body into the detection pipeline;
the liquid level switches are respectively communicated with the detection pipelines one by one and are used for closing and outputting corresponding liquid level arrival signals when the pressure variation value in the corresponding detection pipeline is greater than a preset value;
and the controller is electrically connected with the liquid level switch and used for processing a liquid level arrival signal input by the liquid level switch and outputting an image signal that the liquid level of the tank body reaches the corresponding preset liquid level.
7. The liquid level detection system according to claim 6, wherein the tank body is provided with an input pipe for inputting the solution and a drain pipe for discharging the solution.
8. The liquid level detection system of claim 7, wherein the plurality of detection pipelines are arranged side by side along the side wall of the tank body.
9. The liquid level detection system as claimed in claim 8, wherein the plurality of detection pipes are arranged in sequence from low to high according to the depth of the detection pipes penetrating into the tank body.
10. The liquid level detecting system of claim 9, wherein the detecting tube is made of PFA.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211505487.XA CN115876275A (en) | 2022-11-28 | 2022-11-28 | Liquid level detection method and detection system thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211505487.XA CN115876275A (en) | 2022-11-28 | 2022-11-28 | Liquid level detection method and detection system thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115876275A true CN115876275A (en) | 2023-03-31 |
Family
ID=85764434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211505487.XA Pending CN115876275A (en) | 2022-11-28 | 2022-11-28 | Liquid level detection method and detection system thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115876275A (en) |
-
2022
- 2022-11-28 CN CN202211505487.XA patent/CN115876275A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102265147B (en) | Reference electrode | |
| CN101975865B (en) | Automatic titration system for acid or alkali liquor | |
| CN107727805B (en) | High-temperature high-pressure gas-liquid phase balance testing device and method | |
| CN102539622A (en) | Titration apparatus | |
| CN105865568B (en) | Nondestructive quantitative detection device for grouting sleeve for steel bar connection | |
| CN102607889B (en) | A kind ofly get liquid metering method for analytical instrument | |
| CN115876275A (en) | Liquid level detection method and detection system thereof | |
| JP2013152146A (en) | Water quality inspection device and water quality inspection method | |
| CN111579718B (en) | Automatic dynamic testing device for gas sensitivity characteristics | |
| CN209214693U (en) | A kind of accurate device of volumetric method cumulative measurement | |
| CN217543095U (en) | Automatic measuring device for purity of hydrogen chloride | |
| CN216926460U (en) | Liquid concentration monitoring alarm device and regulating system | |
| CN206291942U (en) | A kind of blowing type liquid level meter | |
| CN106053537A (en) | Developing solution concentration monitoring system and developing solution concentration monitoring method | |
| KR20080050868A (en) | Electrostatic capacitance type sensor for detecting liquid level and system | |
| CN104596612A (en) | Method and device for detecting liquid level and liquid capacity | |
| US11500398B2 (en) | Intelligent safety valve and control method of an intelligent safety valve | |
| CN110542373B (en) | Utilize foil gage deflection to detect device of wasing stifled needle of separation waste liquid needle | |
| CN206291940U (en) | A kind of blowing type liquid level meter | |
| CN106066406A (en) | Air flow rate sensor | |
| CN109683019A (en) | The calibrating installation of pure water system instrument | |
| CN220040152U (en) | Simple reaction liquid viscosity measuring device | |
| CN210513328U (en) | Capacitance type liquid level meter and reaction kettle | |
| CN201156034Y (en) | Water quality measuring instrument | |
| CN218469954U (en) | Liquid level measuring device for closed container |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |