CN115857071A - Fly-eye lens, light irradiation device provided with same, and method for manufacturing fly-eye lens - Google Patents
Fly-eye lens, light irradiation device provided with same, and method for manufacturing fly-eye lens Download PDFInfo
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- CN115857071A CN115857071A CN202211472280.7A CN202211472280A CN115857071A CN 115857071 A CN115857071 A CN 115857071A CN 202211472280 A CN202211472280 A CN 202211472280A CN 115857071 A CN115857071 A CN 115857071A
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- lens
- fly
- eye lens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
- G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Abstract
The invention provides a fly-eye lens which is easier to adjust the illumination of a wide exposure area uniformly compared with the prior art. A fly-eye lens (10) is configured by arranging a plurality of lens segments (20) in a first direction. Each lens segment (20) is configured by arranging a plurality of lenses (24) in a second direction orthogonal to the first direction. The front and back surfaces of each lens segment (20) have different optical characteristics, and the front surface of the lens segment (20) constitutes a part of the front surface of the fly-eye lens (10), and the back surface of the lens segment (20) constitutes the remaining part.
Description
Technical Field
The present invention relates to a fly-eye lens that makes an illuminance distribution uniform in a light irradiation region, a light irradiation device provided with the fly-eye lens, and a method for manufacturing the fly-eye lens.
Background
A light irradiation device is used as a light source of an exposure device or the like. For example, as shown in fig. 8, the light irradiation device is composed of a lamp 1, a reflector 2, a shutter 3, a fly-eye lens 4, and a collimator lens 5.
Light emitted from the lamp 1 is reflected by the reflector 2 to change its direction, and enters the fly eye lens 4 through the shutter 3.
The fly-eye lens 4 has a function of making the illuminance distribution of the incident light uniform on the exposure surface 6.
The light emitted from the fly-eye lens 4 is reflected by the collimator lens 5 to become parallel light, and is irradiated to the exposure surface 6.
The fly-eye lens disclosed in patent document 1 is formed by a plurality of elongated lens segments in which rectangular lenses are butted in one direction and are welded to each other, and is formed by arranging the lens segments in a direction orthogonal to the one direction.
Thus, it is difficult to generate a gap at the connecting surface between the lens and the lens adjacent to each other in each lens segment, and even if dirt or damage occurs in 1 lens, it is possible to easily replace the lens unit including the lens.
Documents of the prior art
Patent document
Patent document 1: japanese patent laid-open publication No. 2011-9611
Disclosure of Invention
Problems to be solved by the invention
However, in recent years, with an increase in size of a liquid crystal panel, an exposure region is also increased in size, and the size of the entire fly-eye lens is also increased. Therefore, the difficulty of uniformly equalizing the illuminance in the wide exposure region by adjusting the fly-eye lens is increasing.
The present invention has been made in view of the above problems, and an object thereof is to provide a fly-eye lens that facilitates adjustment of uniform illuminance in a wide exposure region compared to conventional ones, a light irradiation device provided with the fly-eye lens, and a method for manufacturing the fly-eye lens.
Means for solving the problems
According to an aspect of the present invention, there is provided a fly-eye lens constructed by arranging a plurality of lens segments in a first direction, wherein,
each of the lens segments is configured by arranging a plurality of lenses in a second direction orthogonal to the first direction,
the surface and the back of each of said lens segments have mutually different optical properties,
a part of a surface of the fly-eye lens is constituted by the surface of the lens section, and the remaining part is constituted by the back surface of the lens section.
According to another aspect of the present invention, there is provided a light irradiation device including the fly-eye lens described above.
According to another aspect of the present invention, there is provided a method of manufacturing a fly-eye lens by preparing a plurality of lens segments each having a plurality of lenses arranged in a second direction orthogonal to a first direction and having different optical characteristics on a front surface and a back surface, and arranging the plurality of lens segments in the first direction,
when a plurality of the lens segments are arranged, the degree of light collection of the fly-eye lens is adjusted by selecting which of the front surface and the back surface of the lens segment is arranged on the surface of the fly-eye lens.
Effects of the invention
According to the fly-eye lens of the present invention, by using the lens segments having the front and back surfaces having different optical characteristics, the illuminance of the exposure region can be adjusted by using the front surface or the back surface of each lens segment on the front surface of the fly-eye lens. Thus, according to the fly-eye lens of the present invention, it is easy to adjust the illuminance of the wide exposure region uniformly.
Drawings
Fig. 1 is a perspective view (a) and a sectional view (b) showing a fly-eye lens 10 according to an embodiment of the present invention.
Fig. 2 is an exploded perspective view showing the lens unit 12.
Fig. 3 is a diagram showing the thickness of the lens 24 and the thickness of the holding portion 26 in the lens segment 20.
Fig. 4 is a partial sectional view showing a state where the lens segment 20 is attached to the holder 22.
Fig. 5 is a diagram showing an example in which the outer shape of the irradiation field on the irradiation surface is "pincushion".
Fig. 6 is a view showing an example in which the outer shape of the irradiation field on the irradiation surface is "barrel-shaped".
Fig. 7 is an exploded perspective view showing a modification of the holder 22.
Fig. 8 is a diagram showing an example of a light irradiation apparatus used as a light source of an exposure apparatus or the like.
Detailed Description
(Structure of fly-eye lens 10)
The fly-eye lens 10 according to the embodiment to which the present invention is applied will be described below. As shown in fig. 1, the fly-eye lens 10 is roughly provided with a pair of lens units 12 and a housing 14.
As shown in fig. 2, each lens unit 12 has a plurality of lens segments 20, and a holder 22 that holds these lens segments 20 in an aligned manner in a first direction (left-right direction in the drawing).
Each lens segment 20 is configured by arranging a plurality of lenses 24 in a second direction (a direction orthogonal to the first direction: the up-down direction in the drawing). In addition, holding portions 26 held by the holder 22 are formed at both end portions of each lens segment 20.
The lenses 24 are formed to have different optical characteristics on the front and rear surfaces thereof, and the lens segments 20 formed by arranging the lenses 24 have different optical characteristics on the front and rear surfaces thereof. Further, as a material of the lens 24, quartz (synthetic/fused), borosilicate glass, resin, or the like can be considered.
Examples of the mutually different optical characteristics include a lens (plano-convex lens) having one surface convex and the other surface planar, and a lens (biconvex lens) having both surfaces convex but different diameters (degrees of curvature) from each other. For example, the degree of curvature of the front surface (front surface) of the lens 24 in fig. 2 is relatively steep, and the degree of curvature of the opposite surface (back surface) is relatively gentle.
The lenses 24 may be arranged in series in the second direction by bonding, or the lenses 24 may be arranged in the second direction by pressing, bonding with low-melting glass, or the like.
As shown in fig. 3, the thickness of the holding portion 26 may be smaller than the thickness of the lens 24 (a), or may be larger than the thickness of the lens 24 (b). The thickness of the holding portion 26 may be the same as the thickness of the lens 24.
Returning to fig. 2, the holder 22 is a member for holding the plurality of lens segments 20 in the first direction in a row as described above, and is formed in a quadrilateral shape by the pair of vertical holding frames 30, the upper horizontal holding frame 32, and the lower horizontal holding frame 34. Further, as a material of the holder 22, aluminum, stainless steel, brass, or the like can be considered.
The vertical holding frame 30 is a member disposed on the left and right sides of the holder 22 in the vertical direction, and is formed to have a thickness slightly larger than the maximum thickness of the lenses 24 constituting the lens section 20.
The upper lateral holding frame 32 is disposed on the upper side of the bracket 22 in the lateral direction, and the lower lateral holding frame 34 is disposed on the lower side of the bracket 22 in the lateral direction.
Further, the upper horizontal holding frame 32 and the lower horizontal holding frame 34 are formed with holding grooves 42 each facing inward by forming the cross section into an L shape, respectively, and the holding portions 26 of the respective lens segments 20 can be placed in the holding grooves 42.
Further, a first pressing member 46 is disposed in the holding groove 42 of at least one of the upper lateral holding frame 32 and the lower lateral holding frame 34 (the upper lateral holding frame 32 in the present embodiment), and the first pressing member 46 presses the lens segment 20 placed thereon toward the other one of the upper lateral holding frame 32 and the lower lateral holding frame 34 (the lower lateral holding frame 34 in the present embodiment). The first pressing member 46 of the present embodiment uses a leaf spring, but the first pressing member 46 is not limited to a leaf spring and may be any member as long as it is an elastic member having the above-described function.
Further, a second pressing member 48 is disposed on one of the pair of vertical holding frames 30 (the vertical holding frame 30 on the right side in the drawing in the present embodiment), and the second pressing member 48 presses the lens segment 20 placed thereon against the other vertical holding frame 30 (the vertical holding frame 30 on the left side in the drawing in the present embodiment). The second pressing member 48 of the present embodiment also uses a leaf spring, but the second pressing member 48 is not limited to a leaf spring, and may be any member as long as it is an elastic member having the above-described function.
When a required number of lens segments 20 are arranged in the holder 22, the lens segments 20 are pressed toward one corner (the lower left corner in the drawing in the present embodiment) by the pressing forces of the first pressing member 46 and the second pressing member 48, and therefore the corner serves as a reference position (reference surface), and the lens segments 20 can be arranged at an accurate position.
The holder 22 further includes a pair of holding plate members 44 stacked and placed so as to be in contact with the holding portions 26 of the lens segments 20 placed in the holding grooves 42 of the upper horizontal holding frame 32 and the lower horizontal holding frame 34, respectively. The holding plate member 44 may be a plate member alone, or may be formed of an elastic material (e.g., a plate spring) that presses the holding portion 26 of the lens segment 20 against the holding groove 42.
Accordingly, the holding portion 26 on the upper side in the figure of each lens segment 20 receiving the pressing force from the first pressing member 46 is sandwiched between the sandwiching plate member 44 and the holding groove 42 (see fig. 4), and the holding portion 26 on the lower side in the figure is also sandwiched between the sandwiching plate member 44 and the holding groove 42, so that each lens segment 20 can be prevented from floating from the holder 22.
The housing 14 can accommodate 2 pieces of the above-described lens units 12, and as shown in fig. 1 (b), the lens units 12 are arranged in an opposing state with a predetermined interval therebetween. Further, as a material of the case 14, aluminum, stainless steel, brass, or the like can be considered. In any case, the material of the holder 22 is preferably the same as the material of the case 14.
(method of assembling and adjusting fly-eye lens 10)
Next, a method of assembling the fly-eye lens 10 will be briefly described, and then, a method of adjusting the illuminance of the exposure region by the fly-eye lens 10 will be described.
Both ends (holding portions 26) of the prepared plurality of lens segments 20 are placed in the upper and lower holding grooves 42, and the lens segments 20 are arranged in the first direction. When the arrangement of all the lens segments 20 is completed, the first pressing member 46 and the second pressing member 48 accurately position each lens segment 20 with respect to a reference position (in the present embodiment, the lower left corner).
Then, the pair of holding plate members 44 are attached to the upper lateral holding frame 32 and the lower lateral holding frame 34, respectively, thereby completing the lens unit 12. Then, the fly-eye lens 10 is completed by assembling the 2-piece lens unit 12 to the housing 14. When assembling the 2-piece lens unit 12, it is preferable to set the reference position in each lens unit 12 to be substantially on the same axis with the optical axis direction of the fly-eye lens 10.
When adjusting the illuminance distribution of the exposure area of the fly-eye lens 10, the illuminance distribution is adjusted by inverting several (the lowest 1) of the plurality of lens segments 20 constituting the lens unit 12. That is, when the plurality of lens segments 20 are arranged, it is selected which of the front surface and the back surface of the lens segment 20 is arranged on the front surface of the fly-eye lens 10. As a result, in the fly-eye lens 10 in the adjusted state, a part is constituted by the front surface of the lens segment 20, and the remaining part is constituted by the rear surface of the lens segment 20.
The adjustment of the illuminance distribution of the exposure area is explained more specifically. In general, when the lens 24 is disposed so that the convex surface (the front surface in the present embodiment) thereof is on the outer side, the outer shape of the irradiation field of the irradiation surface is "pincushion" (see fig. 5), and when the lens is disposed so that the convex surface is on the inner side (that is, when the lens is disposed so that the rear surface is on the outer side in the present embodiment), the outer shape of the irradiation field of the irradiation surface is "barrel" (see fig. 6). In the "pillow shape", the illuminance at the four corners in the irradiation range is relatively low, whereas in the "goblet shape", the illuminance at the four corners in the irradiation range is relatively high.
By utilizing such characteristics, the outer shape and illuminance distribution of the irradiation field can be changed by inverting a part of the lens segment 20 constituting each lens unit 12.
Of course, which of the front and back surfaces faces outward may be adjusted for each lens segment 20, and the orientation of a plurality of lens segments 20 may be adjusted collectively. Further, which surface faces outward may be adjusted for each lens unit 12.
Further, the degree of influence of the adjustment on the irradiation state differs depending on where the adjusted lens section 20 is located in the lens unit 12. Generally, the illuminance distribution of light irradiated from a lamp in a light irradiation device with respect to the fly eye lens 10 is highest near the center of the fly eye lens 10 and becomes lower from the center in a concentric circle shape. Therefore, when the lens segment 20 disposed near the center of the lens unit 12 is adjusted, the change in the illuminance distribution on the irradiation surface becomes large.
Further, the illuminance distribution can be adjusted by changing the interval between the pair of lens units 12.
(features of fly-eye lens 10)
According to the fly-eye lens 10 of the present embodiment, by using the lens segments 20 having the front and rear surfaces having different optical characteristics, the illuminance of the exposure region can be adjusted by using the front surface or the rear surface of each lens segment 20 on the front surface of the fly-eye lens 10. Thus, according to the fly-eye lens 10 of the present invention, it is easy to adjust the illuminance of the wide exposure region uniformly.
Further, although the fly-eye lens 10 according to the present embodiment uses 2 lens units 12 as 1 group, and it is necessary to align the central axes of the lenses 24 of the 1 group and the central axes of the lenses 24 of the other groups, which are opposed to each other, in parallel, respectively, the arrangement position can be adjusted in units of the lens segments 20 in the 1 lens units 12, and therefore, the adjustment of the central axes can be easily performed.
Further, as described above, the fly-eye lens itself becomes heavy and difficult to handle because the fly-eye lens is also large in size with the increase in size of the glass or liquid crystal panel serving as the substrate, and if the fly-eye lens 10 according to the present embodiment is assembled in units of the lens segments 20, the fly-eye lens is easily installed on the holder 22.
In addition, in the case of the lens unit 12 having 1 piece as in the conventional case, if any one of the lens units 12 has a defect, the entire lens unit 12 becomes useless, but if the fly-eye lens 10 according to the present embodiment is used, only the lens segment 20 including the lens 24 in which the defect occurs needs to be replaced, and therefore, the yield of the lens unit 12 (fly-eye lens 10) is improved.
(modification 1)
In the above-described embodiment, each lens segment 20 is configured by arranging a plurality of lenses 24 in the second direction (vertical direction in the drawing), and the lens unit 12 is configured by aligning the plurality of lens segments 20 in the first direction (horizontal direction in the drawing), but the lens segment 20 may be configured by arranging a plurality of lenses 24 in the second direction (horizontal direction) with the first direction and the second direction being opposite to each other, and the lens unit 12 may be configured by aligning the plurality of lens segments 20 in the first direction (vertical direction).
(modification 2)
The configuration of the holder 22 is not limited to the above configuration, and for example, as shown in fig. 7, a pair of vertical holding frames 30, an upper horizontal holding frame 32, and a lower horizontal holding frame 34 may be formed separately and assembled to form a quadrangular holder 22.
The vertical holding frame 30 is a member disposed on the left and right sides in the vertical direction when the holder 22 is assembled, and holding frame holding portions 36 having the same thickness as the holding portions 26 of the lens segment 20 are formed at both end portions. The thickness of the main body portion other than the holding frame holding portion 36 is formed to be slightly thicker than the maximum thickness of the lens 24 constituting the lens section 20.
The upper lateral holding frame 32 is a member disposed on the lateral upper side when the bracket 22 is assembled, and an upper groove 38 extending in the longitudinal direction is formed on the lower surface thereof. The holding portion 26 of the lens segment 20 and the holding frame holding portion 36 of the vertical holding frame 30 are fitted into the upper groove 38.
The lower horizontal holding frame 34 is a member disposed on the horizontal lower side when the bracket 22 is assembled, and has a lower groove 40 formed on the upper surface thereof and extending in the longitudinal direction. The holding portion 26 of the lens segment 20 and the holding frame holding portion 36 of the vertical holding frame 30 are fitted into the lower groove 40.
When the fly-eye lens 10 is assembled using the holder 22 according to modification 2, the plurality of prepared lens segments 20 are arranged in the first direction, and then the vertical holding frames 30 of the holder 22 are arranged at both left and right ends. Thus, the holding portions 26 of the respective lens segments 20 and the holding frame holding portions 36 of the pair of vertical holding frames 30 are aligned in one direction.
Then, the upper lateral holding frame 32 is attached so that the holding portion 26 and the holding frame holding portion 36 fit into the upper groove 38 of the upper lateral holding frame 32. Similarly, the lower lateral holding frame 34 is attached from the lower side.
This completes the lens unit 12. The pair of completed lens units 12 are housed in a housing 14, thereby completing the fly-eye lens 10.
The embodiments disclosed herein are to be considered in all respects as illustrative and not restrictive. The scope of the present invention is indicated not by the above description but by the scope of the claims, and includes all modifications within the meaning and scope equivalent to the scope of the claims.
Description of the symbols
10 … fly's eye lens, 12 … lens unit, 14 … casing
20 … lens section, 22 … support
24 … lens, 26 … holder
30 … vertical holding frame, 32 … upper side horizontal holding frame, 34 … lower side horizontal holding frame, 36 … holding frame holding section, 38 … upper side groove, 40 … lower side groove, 42 … holding groove, 44 … clamping plate material, 46 … first pressing member, 48 … second pressing member.
Claims (3)
1. A fly-eye lens is configured by arranging a plurality of lens segments in a first direction,
each of the lens segments is configured by arranging a plurality of lenses in a second direction orthogonal to the first direction,
the surface and the back of each of said lens segments have mutually different optical properties,
a part of a surface of the fly-eye lens is constituted by the surface of the lens section, and the remaining part is constituted by the back surface of the lens section.
2. A light irradiation device comprising the fly-eye lens according to claim 1.
3. A method of manufacturing a fly-eye lens, comprising preparing a plurality of lens segments each having a front surface and a back surface having different optical characteristics, the plurality of lens segments being arranged in a first direction, the plurality of lenses being arranged in a second direction orthogonal to the first direction,
in the method for manufacturing a fly-eye lens, when a plurality of the lens segments are arranged, the degree of light collection of the fly-eye lens is adjusted by selecting which of the front surface and the back surface of the lens segment is arranged on the front surface of the fly-eye lens.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021197243A JP2023083095A (en) | 2021-12-03 | 2021-12-03 | Fly-eye lens, light irradiation device having the same, and method of manufacturing fly-eye lens |
| JP2021-197243 | 2021-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115857071A true CN115857071A (en) | 2023-03-28 |
Family
ID=85665248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211472280.7A Pending CN115857071A (en) | 2021-12-03 | 2022-11-23 | Fly-eye lens, light irradiation device provided with same, and method for manufacturing fly-eye lens |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2023083095A (en) |
| KR (1) | KR20230084030A (en) |
| CN (1) | CN115857071A (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8784873B2 (en) | 2009-07-22 | 2014-07-22 | Naturewise Biotech & Medicals Corporation | Use of histone deacetylase inhibitors in changing MRJP3 protein in royal jelly |
-
2021
- 2021-12-03 JP JP2021197243A patent/JP2023083095A/en active Pending
-
2022
- 2022-11-10 KR KR1020220149267A patent/KR20230084030A/en unknown
- 2022-11-23 CN CN202211472280.7A patent/CN115857071A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| KR20230084030A (en) | 2023-06-12 |
| TW202324500A (en) | 2023-06-16 |
| JP2023083095A (en) | 2023-06-15 |
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