CN115849724A - Method for manufacturing micro-channel on glass surface by using infrared nanosecond laser - Google Patents
Method for manufacturing micro-channel on glass surface by using infrared nanosecond laser Download PDFInfo
- Publication number
- CN115849724A CN115849724A CN202211588188.7A CN202211588188A CN115849724A CN 115849724 A CN115849724 A CN 115849724A CN 202211588188 A CN202211588188 A CN 202211588188A CN 115849724 A CN115849724 A CN 115849724A
- Authority
- CN
- China
- Prior art keywords
- laser
- glass sheet
- glass
- deposition layer
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The invention provides a novel process method for manufacturing a micro-channel on glass by using infrared nanosecond laser, which comprises the following steps: step 1: placing the target on a horizontal workbench, and covering a transparent glass sheet to be processed above the target to ensure that a certain gap is reserved between the target and the transparent glass sheet; step 2: irradiating the target material by adopting proper laser processing parameters, and preparing a metal deposition layer on the lower surface of the glass sheet; and step 3: turning the glass sheet, enabling the surface with the deposition layer to face upwards, and ablating the deposition layer on the surface of the glass by adopting proper laser parameters to prepare a micro-channel; and 4, step 4: dropping proper amount of acid onto the deposited layer on the glass surface, washing with clear water after several minutes, washing in anhydrous alcohol and drying. The novel process method for preparing the micro-channel on the surface of the glass by using the infrared nanosecond laser has the advantages of high processing efficiency, simple equipment and low cost.
Description
Technical Field
The invention relates to the technical field of microfluidic channel preparation, in particular to a method for manufacturing a microchannel on the surface of glass by using infrared nanosecond laser.
Background
Glass is a very important material in micro-nano manufacturing, microelectronic chips, biochips, biological channels, microfluids, optoelectronic devices and other applications due to its light transmission, corrosion resistance, chemical stability, insulation, and high temperature and thermal shock resistance. Microfluidics is applicable in a variety of fields from biology, chemistry to information technology and optics. The preparation of efficient micro-channels on transparent materials can just meet the requirements of the development of micro-fluid technology, and the application of the micro-channels relates to the fields of chemistry, biology, medicine, detection and analysis and the like.
The traditional micro-channel is prepared by photoetching and femtosecond laser direct ablation, the technical requirements of the equipment are precise and expensive, and the time cost and the economic cost of the manufacture are high. Infrared nanosecond laser is one of the most widely applied laser types at present, but quartz glass has low absorptivity for infrared nanosecond laser with the wavelength of 1064nm, and material removal cannot be realized.
Patent CN111548023B discloses a method for finely processing a glass surface by using a red light nanosecond laser, which coats a layer of metal auxiliary material on the surface of a glass material, realizes laser focusing inside the coating layer by using the characteristic of higher absorptivity of the auxiliary material, and effectively overcomes the defect that the laser cannot be focused on the surface due to overhigh light transmittance of the glass in the processing process of the red light nanosecond laser. However, the patent auxiliary materials are required to be kept still for 48 to 60 hours after being coated, the processing time is long, the production period is long, and the requirement of mass production is difficult to meet. Patent CN110642524B discloses a method for preparing a microstructure on a glass surface by using titanium dioxide nanoparticles to assist infrared nanosecond laser, however, a method of separately processing after filling titanium dioxide nanoparticle hydrogel between two glass sheets makes a titanium dioxide layer on the surface of the glass sheet not uniform enough, and the binding force between the titanium dioxide layer and the surface of the glass sheet is not enough, which is not favorable for forming uniform and deep microgrooves. In addition, the preparation of the nano particles and the hydrogel is complex, the process requirement is high, the cost is high, and the method is not suitable for mass production.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide a method for manufacturing a micro-channel on the surface of glass by using infrared nanosecond laser. In order to achieve the purpose, the invention is realized by the following technical scheme:
a method of fabricating a microchannel in glass using an infrared nanosecond laser, comprising the steps of:
step 1: covering a transparent glass sheet to be processed above the metal target material, and ensuring that a certain gap is formed between the glass sheet and the target material;
step 2: laser is irradiated on the metal target material, and a metal deposition layer is formed on the lower surface of the glass sheet;
and step 3: turning the glass sheet, enabling the surface with the deposition layer to face upwards, and ablating the deposition layer on the surface of the glass by using laser to prepare a micro-channel;
and 4, step 4: and soaking the deposited layer on the surface of the glass in acid liquor, and then cleaning and drying.
Preferably, in step 1, the gap between the glass sheet and the metal target is 20 to 100 μm.
Preferably, the metal target is one or more of copper, titanium and titanium alloy.
Preferably, in step 1, the transparent glass sheet is a glass sheet or a quartz glass sheet containing a silicate double salt as a component.
Preferably, in step 2, the laser wavelength is 1064nm, the pulse width is 7ns, the scanning speed is 50-300 mm/s, the average power is 16-20 w, the frequency is 20-50 kHz, the scanning line spacing is 0.005-0.05mm, the scanning frequency is 1 time, and the position of the laser focus is controlled on the upper surface of the metal target.
Preferably, the thickness of the metal deposition layer obtained in step 2 is 5 to 8 μm.
Preferably, in step 3, the laser scanning speed is 0.5-20 mm/s, the average power is 16-20 w, the frequency is 20-50 kHz, the scanning times are 1 time, and the laser focus position is controlled on the surface of the deposition layer obtained in step 2.
Preferably, in the step 4, the acid solution is a hydrofluoric acid solution or a nitric acid solution, the mass fraction of the acid solution is 5% -20%, and the soaking time is 1-10min.
Preferably, in the step 4, the acid liquor accounts for 10% by mass, and the soaking time is 2-3min.
Preferably, in step 4, the washing step is washing with clean water and then washing in absolute ethyl alcohol.
The principle of the method provided by the invention is as follows: (1) The laser-induced plasma-assisted ablation realizes the metallization of the glass surface: when laser irradiates on the target material, the target material can absorb the energy of the laser, so that melting and gasification are carried out, and plasma is generated. On the other hand, during the process of ablating the target, metal particles are generated to be sputtered and deposited on the surface of the glass, and a deposition layer can be obtained on the surface of the glass by selecting proper laser processing parameters. (2) direct laser ablation indirect processing of glass: the laser beam with high energy density is directly radiated on the surface of the target material, and the laser energy is absorbed by the target material and then converted into heat energy, thereby directly realizing the melting and gasification of the target material and achieving the purpose of removing the material. Because the transparent glass material does not absorb nanosecond pulse laser, the deposited layer is melted and gasified by directly ablating the deposited layer by laser, and the glass is ablated and removed, so that the glass is indirectly processed. And (3) chemically cleaning to remove the deposited layer: the chemical solution and the deposited layer substance are subjected to chemical reaction, the reaction speed is higher when the concentration of the chemical solution is higher, redundant deposited layers can be effectively removed in a short time, and the glass substrate is hardly damaged.
Compared with the prior art, the invention has the following advantages and beneficial effects:
(1) The processing method has the advantages of short time consumption, low cost, high dimensional precision and controllable parameters, and the design iteration change does not need die making, so that a large amount of design cost can be saved, the requirements of modern low production period, low production cost and mass production are met, the development requirement of the microfluid technology is met, and the method has a wide application prospect.
(2) The metal deposition layer prepared by the laser-induced deposition method is thin and uniform, has certain bonding force with a glass sheet, and can be used for processing uniform and deep micro-channels with the depth of 20 mu m.
(3) The invention adopts the laser to ablate the thinner metal deposition layer to process the glass indirectly, which can effectively avoid the negative effect of the plasma shielding effect on the processing and lead the uniformity of the processed micro-channel to be better.
Drawings
Fig. 1 is a schematic diagram of a step of fabricating a micro channel according to the present invention, in which 1 is a target, 2 is glass, 3 is a laser beam, 4 is a scanning path of step 2, 5 is a deposition layer, 6 is a scanning path of step 3, 7 is a micro channel, and 8 is a hydrofluoric acid solution.
FIG. 2 is a schematic diagram of the prepared microchannel, 2 is glass, and 7 is the microchannel.
FIG. 3 is a topographical view of a prepared microchannel.
FIG. 4 is a partial three-dimensional topography of a fabricated microchannel.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
Examples
As shown in fig. 1, the present invention provides a novel process for manufacturing micro-channels on a glass surface, comprising the following steps:
step 1: the target material is placed on a horizontal workbench, and a transparent glass sheet to be processed covers the upper part of the target material, so that a certain gap (50 mu m) is ensured between the target material and the transparent glass sheet. The target material is selected from titanium and alloy thereof, and the glass is selected from quartz glass.
This example requires pretreatment of quartz glass sheets and titanium targets: firstly, the target material is polished to enable the surface of the target material to be smooth. And then washing the quartz glass sheet and the target material by using deionized water, and naturally airing.
Step 2: irradiating the target material by adopting proper laser processing parameters, and preparing a metal compound deposition layer on the lower surface of the glass sheet;
in the step 2, the adopted laser is a fiber laser with the wavelength of 1064nm and the pulse width of 7 ns; the laser scanning speed of the laser is 200mm/s, the average power is 20w, the frequency is 20kHz, the scanning line interval is 0.01mm, and the scanning times are 1; the laser focal point position of the laser is controlled on the upper surface of the target. The method for preparing the deposition layer by laser induction is simple, efficient and low in cost, the deposition layer and glass are high in combination degree, firm and good in uniformity, and the thickness of the deposition layer is 6 microns.
And step 3: turning the glass sheet, enabling the surface with the deposition layer to face upwards, and ablating the deposition layer on the surface of the glass by adopting proper laser parameters to prepare a micro-channel;
in step 3, the laser scanning speed of the laser is 1mm/s, the average power is 20w, the frequency is 20kHz, and the scanning times are 1; and controlling the laser focal point position of the laser to the surface of the deposition layer obtained in the step 2.
And 4, step 4: dropping proper amount of hydrofluoric acid solution onto the deposited layer on the surface of glass, washing with clear water after several minutes, washing in absolute ethyl alcohol and drying.
And 4, the hydrofluoric acid accounts for 10 mass percent, the soaking time is 3min, and the hydrofluoric acid is used for removing the deposited layer on the surface of the glass.
FIG. 4 is a partial three-dimensional view of a prepared microchannel, with a sampling area of 2mm in length and 1.2mm in width, and a depth of the prepared microchannel up to 22 μm.
The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such modifications are intended to be included in the scope of the present invention.
Claims (10)
1. A method of fabricating a microchannel in glass using an infrared nanosecond laser, comprising the steps of:
step 1: covering a transparent glass sheet to be processed above the metal target material, and ensuring that a certain gap is formed between the glass sheet and the target material;
step 2: laser is irradiated on the metal target material, and a metal deposition layer is formed on the lower surface of the glass sheet;
and step 3: turning the glass sheet, enabling the surface with the deposition layer to face upwards, and ablating the deposition layer on the surface of the glass by using laser to prepare a micro-channel;
and 4, step 4: the deposited layer on the surface of the glass is soaked in acid liquor, and then is washed and dried.
2. The method according to claim 1, wherein in step 1, the gap between the glass sheet and the metal target is 20 to 100 μm.
3. The method of claim 1, wherein the metal target is one or more of copper, titanium, and titanium alloy.
4. The method according to claim 1, wherein in step 1, the transparent glass sheet is a glass sheet or a quartz glass sheet having a composition of a silicate double salt.
5. The method of claim 1, wherein in step 2, the laser wavelength is 1064nm, the pulse width is 7ns, the scanning speed is 50-300 mm/s, the average power is 16-20 w, the frequency is 20-50 kHz, the scanning line spacing is 0.005-0.05mm, the scanning times are 1, and the laser focal point position is controlled on the upper surface of the metal target.
6. The method of claim 1, wherein the thickness of the metal deposition layer obtained in step 2 is 5 to 8 μm.
7. The method according to claim 1, wherein in step 3, the laser scanning speed is 0.5-20 mm/s, the average power is 16-20 w, the frequency is 20-50 kHz, the scanning times are 1 time, and the laser focus position is controlled on the surface of the deposition layer obtained in step 2.
8. The method as claimed in claim 1, wherein in the step 4, the acid solution is hydrofluoric acid solution or nitric acid solution, the mass fraction of the acid solution is 5% -20%, and the soaking time is 1-10min.
9. The method as claimed in claim 8, wherein in the step 4, the acid liquor is 10% by mass, and the soaking time is 2-3min.
10. The method as claimed in claim 1, wherein in step 4, the washing step is carried out by washing with clean water and then washing in absolute ethanol.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211588188.7A CN115849724A (en) | 2022-12-12 | 2022-12-12 | Method for manufacturing micro-channel on glass surface by using infrared nanosecond laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211588188.7A CN115849724A (en) | 2022-12-12 | 2022-12-12 | Method for manufacturing micro-channel on glass surface by using infrared nanosecond laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115849724A true CN115849724A (en) | 2023-03-28 |
Family
ID=85672026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211588188.7A Pending CN115849724A (en) | 2022-12-12 | 2022-12-12 | Method for manufacturing micro-channel on glass surface by using infrared nanosecond laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115849724A (en) |
-
2022
- 2022-12-12 CN CN202211588188.7A patent/CN115849724A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Xie et al. | Laser machining of transparent brittle materials: from machining strategies to applications | |
| CN101851709B (en) | Preparation method and device for nano porous metal or ceramic | |
| CN106583930A (en) | Method for achieving reversible wettability of titanium sheet based on femtosecond laser direct writing | |
| CN106392332B (en) | A kind of laser-graining method for improving medical implant surfaces cell adhesion | |
| US11952310B2 (en) | Silicate glass compositions useful for the efficient production of through glass vias | |
| Chen et al. | A short review on functionalized metallic surfaces by ultrafast laser micromachining | |
| CN105228968A (en) | Surface enhanced Raman scattering (SERS) sensor and manufacture method thereof | |
| Chen et al. | Review on laser-induced etching processing technology for transparent hard and brittle materials | |
| US20200354262A1 (en) | High silicate glass articles possessing through glass vias and methods of making and using thereof | |
| Kwon et al. | High aspect ratio channel fabrication with near-infrared laser-induced backside wet etching | |
| Xia et al. | A comparative study of direct laser ablation and laser-induced plasma-assisted ablation on glass surface | |
| Wang et al. | Inverted pyramid structure on monocrystalline silicon processed by wet etching after femtosecond laser machining in air and deionized water | |
| Markauskas et al. | Efficient milling and cutting of borosilicate glasses through a thin flowing water film with a picosecond laser | |
| CN107812678A (en) | A kind of method that floride-free super-hydrophobic surface is prepared on metal | |
| CN103894743A (en) | Foaming-assisted sheet metal laser precision boring method and device | |
| CN115849724A (en) | Method for manufacturing micro-channel on glass surface by using infrared nanosecond laser | |
| Xie et al. | High-quality laser processing of fused silica with bursts of ultrafast pulses | |
| Oyane et al. | Laser-assisted calcium phosphate deposition on polymer substrates in supersaturated solutions | |
| Wang et al. | Improving the quality of femtosecond laser processing micro-hole array by coated with aluminum film on fused silica sheet | |
| CN108617102A (en) | A kind of production method of ceramic circuit board | |
| Zhang et al. | Process exploration of β-Ga2O3 blind hole processing by water-assisted femtosecond laser technology | |
| CN110331402B (en) | Method for preparing extreme wettability pattern by laser-induced backward transfer | |
| Chen et al. | Fabrication of microstructures on glass by imprinting in conventional furnace for lab-on-chip application | |
| CN111168233A (en) | Method for inducing periodic structure on surface of optical glass by picosecond laser | |
| CN212217441U (en) | Laser boring device for metal film auxiliary brittle material |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |