CN115832848B - Frequency-locking deep ultraviolet ultrafast laser - Google Patents

Frequency-locking deep ultraviolet ultrafast laser Download PDF

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CN115832848B
CN115832848B CN202211542363.9A CN202211542363A CN115832848B CN 115832848 B CN115832848 B CN 115832848B CN 202211542363 A CN202211542363 A CN 202211542363A CN 115832848 B CN115832848 B CN 115832848B
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laser
locking
mode
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CN115832848A (en
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黄志华
李超
徐强坤
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Wuhan Guangzhi Technology Co ltd
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Wuhan Guangzhi Technology Co ltd
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Abstract

The invention provides a frequency-locking deep ultraviolet ultrafast laser, which belongs to the technical field of laser, wherein a mode-locking oscillator outputs mode-locking pulse laser, and the mode-locking pulse laser is amplified by an optical fiber power amplifier and then outputs power amplification laser; the frequency-locked loop also comprises a solid amplifier, a frequency multiplication module and a frequency locking electronic module; the power amplification laser sequentially passes through the solid amplifier and the frequency multiplication module and then outputs target laser; the frequency locking electronics module adjusts the fiber power amplifier and the mode locking oscillator; the first photoelectric detector is used for detecting mode-locked pulse laser output by the spectroscope, and the first photoelectric detector transmits the detected mode-locked pulse laser result to the frequency-locked electronic module; the second photoelectric detector measures the repetition frequency signal and transmits the repetition frequency signal to the frequency locking electronic module, and the photoelectron frequency stabilization system drives the position change of the piezoelectric ceramics to realize stable compensation and locking of the repetition frequency.

Description

Frequency-locking deep ultraviolet ultrafast laser
Technical Field
The invention relates to the technical field of laser coupling, in particular to a frequency-locking deep ultraviolet ultrafast laser.
Background
The deep ultraviolet picosecond pulse laser can bombard the photocathode material and generate electron beam clusters with picosecond width, and the shorter the laser wavelength is, the higher the quantum efficiency of electron beam generated by the photocathode is. The high-quality electron beam clusters are accelerated by an electromagnetic field to form high-energy electron beam clusters, and finally high-energy X rays can be formed by a magnet oscillator and used for material detection. Grant bulletin number CN209766852U, name: an ultrafast laser is disclosed, which is based on mode locking technology such as semiconductor saturable absorber mirror (semiconductor saturable absorber mirrior, SESAM), kerr lens, etc., and has pulse width in ps (units: picosecond) or even fs (units: femtosecond). In order to effectively accelerate the electron beam, the time jitter is required to be controlled to be in the order of hundreds of femtoseconds, so that strict synchronization and frequency locking between the microwave signal and the optical pulse of the acceleration signal are ensured, and the prior art cannot control the synchronization and the frequency locking between the microwave signal and the optical pulse of the acceleration signal.
Thus, there is a need for an ultra-violet ultrafast laser that accelerates the synchronization and frequency locking between the microwave signal and the optical pulse of the signal.
Disclosure of Invention
In view of this, the present invention provides a deep ultraviolet ultrafast laser capable of freely controlling and forming macro pulse trains with various pulse widths and heavy frequencies, thereby forming corresponding electron beam clusters, and ensuring synchronization and frequency locking between the microwave signals and the light pulses of the acceleration signals.
The technical scheme of the invention is realized as follows: a frequency-locked deep ultraviolet ultrafast laser comprises a mode-locked oscillator and an optical fiber power amplifier,
the mode locking oscillator outputs mode locking pulse laser, and the mode locking pulse laser is amplified by the optical fiber power amplifier and then outputs power amplification laser;
the frequency-locked loop also comprises a solid amplifier, a frequency multiplication module and a frequency locking electronic module;
the power amplification laser sequentially passes through the solid amplifier and the frequency multiplication module and then outputs target laser;
the frequency-locked electronics module adjusts the fiber power amplifier and the mode-locked oscillator.
On the basis of the technical scheme, the optical fiber power amplifier is preferably further provided with an electro-optical switch and a photoelectric drive, the photoelectric drive drives the electro-optical switch to be electrified and powered off, the electro-optical switch is arranged between the optical fiber power amplifier and the solid amplifier, and the output end of the electro-optical switch is connected with the input end of the solid amplifier and is used for forming macro-pulse strings with the length of microsecond magnitude and adjustable repetition frequency.
On the basis of the technical scheme, preferably, the mode-locked oscillator comprises a saturable absorber and piezoelectric ceramics, and the saturable absorber is fixedly arranged on the movable piezoelectric ceramics.
On the basis of the technical scheme, preferably, the mode-locked oscillator further comprises a chirped fiber Bragg grating, a wavelength division multiplexer and a beam-splitting isolator, the output end of the piezoelectric ceramic is connected with the chirped fiber Bragg grating, the output end of the chirped fiber Bragg grating is connected with the wavelength division multiplexer, the output end of the wavelength division multiplexer is connected with the beam-splitting isolator, and the beam-splitting isolator outputs mode-locked pulse laser.
On the basis of the technical scheme, preferably, the wavelength division multiplexer comprises an ytterbium-doped optical fiber and a single-mode pump source, and the ytterbium-doped optical fiber is injected into the output end of the single-mode pump source.
On the basis of the technical scheme, preferably, the optical fiber power amplifier comprises a primary amplifying light path, a secondary amplifying light path and a tertiary amplifying light path, and the output end of the optical splitting isolator sequentially passes through the primary amplifying light path, the secondary amplifying light path and the tertiary amplifying light path and then outputs power amplified laser.
On the basis of the technical scheme, preferably, the primary amplifying optical path comprises a first circulator, a first beam combiner, a first high-reflection mirror and a first semiconductor pump source, wherein the first beam combiner is arranged between the first circulator and the first high-reflection mirror, and the first semiconductor pump source excites the first beam combiner.
On the basis of the technical scheme, preferably, the second-stage amplification optical path comprises a second circulator, a second beam combiner, a second high-reflection mirror and a second semiconductor pump source, wherein the second beam combiner is arranged between the second circulator and the second high-reflection mirror, and the second semiconductor pump source excites the second beam combiner.
On the basis of the technical scheme, preferably, the three-stage amplification optical path comprises a mode field adapter, a third beam combiner, a cladding light stripper, a third semiconductor pump source and a fourth semiconductor pump source, wherein the mode field adapter, the third beam combiner and the cladding light stripper are sequentially arranged, and the third semiconductor pump source and the fourth semiconductor pump source excite the third beam combiner at the same time.
On the basis of the technical scheme, the power amplification laser beam device comprises a beam splitter, a second photoelectric detector, a polarization beam splitter and a pulse train output switch module, wherein the power amplification laser beam enters the beam splitter and is divided into first power amplification laser beam and second power amplification laser beam by the beam splitter, the first power amplification laser beam enters the second photoelectric detector, the macro pulse train enters the polarization beam splitter, the polarization beam splitter divides the macro pulse train into first polarization laser beam and second polarization laser beam, the first polarization laser beam enters the pulse train output switch module, the second polarization laser beam sequentially passes through a solid amplifier and a frequency doubling module, and the second photoelectric detector is electrically connected with the frequency locking electronic module.
On the basis of the technical scheme, the frequency-locking electronic module preferably further comprises a first photoelectric detector, an optoelectronic frequency stabilization system, a feedback system, a frequency doubling temperature control system and a frequency quadrupling temperature control system, wherein the frequency-locking electronic module is electrically connected with the first photoelectric detector, the optoelectronic frequency stabilization system, the feedback system, the frequency doubling temperature control system and the frequency quadrupling temperature control system; the photoelectron frequency stabilization system is electrically connected with the piezoelectric ceramic; the first photoelectric detector is electrically connected with the spectroisolator; the feedback system is electrically connected with the third semiconductor pumping source and the fourth semiconductor pumping source; the frequency doubling temperature control system controls the temperature of the frequency doubling crystal, and the frequency quadrupling temperature control system controls the temperature of the frequency quadrupling crystal.
Compared with the prior art, the invention has the following beneficial effects:
(1) The first photoelectric detector is used for detecting mode-locked pulse laser output by the spectroscope, and the first photoelectric detector transmits the detected mode-locked pulse laser result to the frequency-locked electronic module; the second photoelectric detector measures the repetition frequency signal and transmits the repetition frequency signal to the frequency locking electronics module, and the photoelectron frequency stabilization system drives the position change of the piezoelectric ceramics to realize stable compensation and locking of the repetition frequency;
(2) The primary amplification optical path and the secondary amplification optical path are used for improving the four-frequency conversion efficiency in the subsequent optical path;
(3) The first polarized laser enters a pulse train output switch module to interfere with the power amplification laser, so that the phase of the power amplification laser is locked on the reference light;
(4) The solid amplifier needs to adopt a neodymium-doped yttrium vanadate (Nd: YVO 4) crystal rod-shaped amplifier for further amplification so as to solve the problem of high peak power of laser pulse;
(5) The temperature of the frequency doubling crystal is controlled by the frequency doubling temperature control system, and the temperature of the frequency quadrupling crystal is controlled by the frequency quadrupling temperature control system, so that the frequency doubling crystal and the frequency quadrupling crystal keep a stable working state.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a block diagram of a frequency-locked deep ultraviolet ultrafast laser of the present invention;
fig. 2 is a schematic diagram of a component connection structure of a frequency-locked deep ultraviolet ultrafast laser according to the present invention.
Detailed Description
The following description of the embodiments of the present invention will clearly and fully describe the technical aspects of the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, are intended to fall within the scope of the present invention.
As shown in fig. 1-2, a frequency-locked deep ultraviolet ultrafast laser comprises a mode-locked oscillator 1, an optical fiber power amplifier 2, an electro-optical switch 3, a solid-state amplifier 4, a frequency doubling module 5, a frequency-locked electronics module 6, a first photoelectric detector 61, a second photoelectric detector 62, an electronic frequency stabilization system 63, a feedback system 64, a photoelectric drive 65, a frequency doubling temperature control system 66, a frequency quadrupling temperature control system 67, a beam splitter 7, a polarization beam splitter 8 and a pulse string output switch module 9.
The mode-locked oscillator 1 outputs mode-locked pulse laser, the mode-locked pulse laser is amplified by the optical fiber power amplifier 2 and then outputs power amplified laser, and the power amplified laser sequentially passes through the solid amplifier 4 and the frequency doubling module 5 and then outputs target laser.
As shown in fig. 1, the mode-locked oscillator 1 includes a saturable absorber 11, a piezoelectric ceramic 12, a chirped fiber bragg grating 13, a wavelength division multiplexer 14, and a spectroscopic isolator 15, wherein the saturable absorber 11 is fixedly disposed on the movable piezoelectric ceramic 12.
The output end of the piezoelectric ceramic 12 is connected with the chirped fiber Bragg grating 13 through an ytterbium-doped single-mode fiber, the output end of the chirped fiber Bragg grating 13 is connected with the wavelength division multiplexer 14, the output end of the wavelength division multiplexer 14 is connected with the optical splitting isolator 15, and the optical splitting isolator 15 outputs mode-locked pulse laser.
The wavelength division multiplexer 14 comprises an ytterbium-doped optical fiber 141 and a single-mode pump source 142, wherein the output end of the single-mode pump source 142 is injected into the ytterbium-doped optical fiber 141, the single-mode pump source 142 uses a 980nm pump source, in order to lock the repetition frequency of a pulse, the cavity length needs to be adjusted, therefore, the saturable absorber 11 is fixed on the movable piezoelectric ceramic 12, the laser in the cavity is focused on the saturable absorber 11 through the coupling head and forms a mode locking pulse, the first photoelectric detector 61 is electrically connected with the optical splitting isolator 15, the first photoelectric detector 61 is used for detecting the mode locking pulse laser output by the optical splitting isolator 15, the first photoelectric detector 61 is electrically connected with the photoelectron frequency stabilizing system 63, the photoelectron frequency stabilizing system 63 is electrically connected with the frequency locking electronic module 6, and the mode locking pulse laser detected by the first photoelectric detector 61 is transmitted to the frequency locking electronic module 6.
Taking 2856MHz as an example of microwave frequency, the repetition frequency of the mode-locked oscillator is 1/16 of the microwave, namely 178.5MHz. The saturable absorber 11 of suitable parameters was chosen to obtain picosecond pulses with a pulse width of about 10ps, a center wavelength of 1064nm, a spectral width of about 0.3nm, and an average power of about 10 mW.
The optical fiber power amplifier 2 comprises a primary amplifying light path 21, a secondary amplifying light path 22 and a tertiary amplifying light path 23, the output end of the optical splitting isolator 15 sequentially passes through the primary amplifying light path 21, the secondary amplifying light path 22 and the tertiary amplifying light path 23 and outputs power amplified laser, the primary amplifying light path 21 and the secondary amplifying light path 22 adopt a double-pass amplifying mode, and the tertiary amplifying light path 23 adopts a single-pass reverse pumping mode.
The first-stage amplifying optical path 21 includes a first circulator 211, a first beam combiner 212, a first high-reflection mirror 213 and a first semiconductor pump source 214, where the first beam combiner 212 is disposed between the first circulator 211 and the first high-reflection mirror 213, the first semiconductor pump source 214 excites the first beam combiner 212, the first circulator 211 and the first beam combiner 212 are connected by an ytterbium-doped optical fiber, the mode-locked pulse laser passes through the first beam combiner 212 and reaches the first beam combiner 212 by the ytterbium-doped optical fiber, the seed signal is amplified after being excited by the first semiconductor pump source 214, the amplified seed signal is amplified again after being reflected by the first high-reflection mirror 213 and is output after being reflected again by the first circulator 211, and as a preferred embodiment, the first high-reflection mirror 213 is coated with a reflective film with a reflection band width of 0.1 nm.
The seed signal output by the first circulator 211 enters the second-stage amplifying optical path 22 again, the second-stage amplifying optical path 22 comprises a second circulator 221, a second beam combiner 222, a second high-reflection mirror 223 and a second semiconductor pump source 224, the second beam combiner 222 is arranged between the second circulator 221 and the second high-reflection mirror 223, the second semiconductor pump source 224 excites the second beam combiner 222, and the principle of the second-stage amplifying optical path 22 is the same as that of the first-stage amplifying optical path 21, and will not be repeated here. The purpose of the primary amplifying optical path 21 and the secondary amplifying optical path 22 is to improve the conversion efficiency of frequency quadrupling in the subsequent optical path.
The three-stage amplifying optical path 23 includes a mode field adaptor 231, a third beam combiner 232, a cladding light stripper 233, a third semiconductor pump source 234 and a fourth semiconductor pump source 235, where the mode field adaptor 231, the third beam combiner 232 and the cladding light stripper 233 are sequentially disposed, the third semiconductor pump source 234 and the fourth semiconductor pump source 235 excite the third beam combiner 232 at the same time, the mode field adaptor 231 and the third beam combiner 232 are connected by ytterbium doped optical fibers, a feedback system 64 is electrically connected with the third semiconductor pump source 234 and the fourth semiconductor pump source 235, and the feedback system 64 is electrically connected with the frequency-locked electronics module 6 and feeds back the working states of the third semiconductor pump source 234 and the fourth semiconductor pump source 235.
After the mode-locked pulse laser passes through the optical fiber power amplifier 2, the optical path length of the mode-locked pulse laser in the optical fiber medium is at least 15 meters, so that the optical path length is long. The length of the optical fiber is slightly changed under the influence of temperature change, vibration and noise, so that the repetition frequency of the laser pulse is changed, in order to be capable of stabilizing the frequency locking, the power amplification laser condition after passing through the optical fiber power amplifier 2 needs to be known at all times, and in a preferred embodiment, the power amplification laser firstly enters the collimating energy mirror 10, enters the beam splitter 7 after being collimated by the collimating energy mirror 10, and is divided into first power amplification laser and second power amplification laser by the beam splitter 7, the first power amplification laser enters the second photoelectric detector 62, the second photoelectric detector 62 is electrically connected with the frequency locking electronic module 6, the second photoelectric detector 62 measures the repetition frequency signal, and transmits the repetition frequency signal to the frequency locking electronic module 6, after frequency multiplication (taking 178.5MHz and 2856MHz as an example, 16 frequency multiplication) and the reference microwave signal are subjected to difference frequency calculation, so as to obtain an error feedback signal, and act on the photoelectron frequency stabilizing system 63 to drive the position change of the piezoelectric ceramics 12 to realize the stabilizing compensation and locking of the repetition frequency.
The target laser needs a macro pulse train, so that the second power amplification laser needs to be chopped through the electro-optical switch 3 to form a macro pulse train with a length of microsecond magnitude and adjustable repetition frequency, wherein a macro pulse chopping signal is synchronous with a microwave starting signal, the electro-optical switch 3 is driven to be electrified and powered off by the electro-optical driver 65, and the frequency-locking electronic module 6 controls the electro-optical driver 65 to work according to an actual optical path.
The macro-pulse train with adjustable repetition frequency enters a polarization beam splitter 8, the polarization beam splitter 8 divides the macro-pulse train with adjustable repetition frequency into first polarized laser and second polarized laser, and the first polarized laser enters a pulse train output switch module 9 to interfere with the power amplification laser, so that the phase of the power amplification laser is locked on the reference light.
The second polarized laser sequentially passes through the solid amplifier 4 and the frequency doubling module 5, and the peak power of the second polarized laser pulse is higher due to the subsequent amplification, and the second polarized laser pulse has stronger nonlinear effect in the optical fiber amplifier, so that the spectrum is easy to widen, and the solid amplifier 4 needs to adopt a neodymium-doped yttrium vanadate (Nd: YVO 4) crystal rod-shaped amplifier for further amplification, so that the problem of high peak power of the laser pulse is solved.
The frequency doubling module 5 comprises a frequency doubling crystal 51 and a frequency quadrupling crystal 52, the output end of the solid amplifier 4 is sequentially connected with the frequency doubling crystal 51 and the frequency quadrupling crystal 52, the frequency doubling crystal 51 adopts an LBO crystal, the frequency quadrupling crystal 52 adopts a BBO crystal, and the total efficiency of the frequency quadrupling crystal 52 can reach about 10%.
The temperature of the frequency doubling crystal 51 is controlled by the frequency doubling temperature control system 66, and the temperature of the frequency quadrupling crystal 52 is controlled by the frequency quadrupling temperature control system 67, wherein the frequency doubling temperature control system 66 and the frequency quadrupling temperature control system 67 are electrically connected with the frequency locking electronic module 6. The frequency doubling crystal 51 and the frequency quadrupling crystal 52 can also be arranged in a constant temperature control box to ensure constant temperature, so that the frequency doubling crystal 51 and the frequency quadrupling crystal 52 keep stable working states.
The following describes the method of use of the invention:
the center wavelength of the mode locking pulse laser emitted by the mode locking oscillator 1 is 1064nm, 1030nm or 1550nm and other wavelengths capable of realizing stable mode locking. When different wavelengths are selected, the types of the ytterbium-doped fiber 141 and the solid-state amplifier 4 correspondingly change.
The actual pulse width may be as short as fs or as long as ns, taking 10ps as an example.
The frequency doubling mode is exemplified by a quadruple frequency crystal 52 of 1064nm to 266nm, and can be a triple frequency of 1064nm to 355 nm.
The optical fiber power amplifier 2 comprises a primary amplifying light path 21, a secondary amplifying light path 22 and a tertiary amplifying light path 23 which are three-stage, and different systems select different amplifying stages according to the requirement of design output power.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.

Claims (7)

1. A frequency-locking deep ultraviolet ultrafast laser comprises a mode-locking oscillator (1) and an optical fiber power amplifier (2),
the mode locking oscillator (1) outputs mode locking pulse laser, and the mode locking pulse laser is amplified by the optical fiber power amplifier (2) and then outputs power amplification laser;
the method is characterized in that: the photoelectric frequency-stabilizing device also comprises a solid amplifier (4), a frequency multiplication module (5), a frequency locking electronics module (6), an electro-optical switch (3), a photoelectric drive (65), a beam splitter (7), a second photoelectric detector (62), a polarization beam splitter (8), a pulse string output switch module (9), a first photoelectric detector (61) and a photoelectric frequency-stabilizing system (63);
the frequency locking electronic module (6) is used for adjusting the optical fiber power amplifier (2) and the mode locking oscillator (1);
the mode-locked oscillator (1) comprises a saturable absorber (11), piezoelectric ceramics (12), a chirped fiber Bragg grating (13), a wavelength division multiplexer (14) and a spectral isolator (15), wherein the saturable absorber (11) is fixedly arranged on the movable piezoelectric ceramics (12); the output end of the piezoelectric ceramic (12) is connected with the chirped fiber Bragg grating (13), the output end of the chirped fiber Bragg grating (13) is connected with the wavelength division multiplexer (14), the output end of the wavelength division multiplexer (14) is connected with the optical splitting isolator (15), and the optical splitting isolator (15) outputs mode-locked pulse laser;
the first photoelectric detector (61) is electrically connected with the photoelectron frequency stabilization system (63), the photoelectron frequency stabilization system (63) is electrically connected with the frequency locking electronics module (6), and the first photoelectric detector (61) is electrically connected with the spectral isolator (15);
the power amplification laser enters the beam splitter (7) and is divided into first power amplification laser and second power amplification laser by the beam splitter (7), the first power amplification laser enters the second photoelectric detector (62), the second photoelectric detector (62) is electrically connected with the frequency locking electronic module (6), and the photoelectron frequency stabilization system (63) is electrically connected with the piezoelectric ceramic (12);
the photoelectric drive (65) drives the electro-optical switch (3) to be electrified and powered off, the electro-optical switch (3) is used for chopping the second power amplification laser to form a macro pulse train with the length of microsecond magnitude and adjustable repetition frequency;
the macro-pulse train enters a polarization beam splitter (8), the polarization beam splitter (8) divides the macro-pulse train into first polarized laser and second polarized laser, the first polarized laser enters a pulse train output switch module (9), and the second polarized laser sequentially passes through a solid amplifier (4) and a frequency doubling module (5) to output target laser.
2. The frequency-locked deep ultraviolet ultrafast laser of claim 1, wherein: the optical fiber power amplifier (2) comprises a primary amplifying light path (21), a secondary amplifying light path (22) and a tertiary amplifying light path (23), and the output end of the optical splitting isolator (15) sequentially passes through the primary amplifying light path (21), the secondary amplifying light path (22) and the tertiary amplifying light path (23) and then outputs power amplified laser.
3. A frequency-locked deep ultraviolet ultrafast laser as recited in claim 2, wherein: the primary amplifying optical path (21) comprises a first circulator (211), a first beam combiner (212), a first high-reflection mirror (213) and a first semiconductor pump source (214), wherein the first beam combiner (212) is arranged between the first circulator (211) and the first high-reflection mirror (213), and the first semiconductor pump source (214) excites the first beam combiner (212).
4. A frequency-locked deep ultraviolet ultrafast laser as recited in claim 2, wherein: the secondary amplifying optical path (22) comprises a second circulator (221), a second beam combiner (222), a second high-reflection mirror (223) and a second semiconductor pump source (224), wherein the second beam combiner (222) is arranged between the second circulator (221) and the second high-reflection mirror (223), and the second semiconductor pump source (224) excites the second beam combiner (222).
5. A frequency-locked deep ultraviolet ultrafast laser as recited in claim 2, wherein: the three-stage amplification optical path (23) comprises a mode field adapter (231), a third beam combiner (232), a cladding light stripper (233), a third semiconductor pump source (234) and a fourth semiconductor pump source (235), wherein the mode field adapter (231), the third beam combiner (232) and the cladding light stripper (233) are sequentially arranged, and the third semiconductor pump source (234) and the fourth semiconductor pump source (235) excite the third beam combiner (232) at the same time.
6. The frequency-locked deep ultraviolet ultrafast laser of claim 5, wherein: the frequency doubling module (5) comprises a frequency doubling crystal (51) and a frequency quadrupling crystal (52), and the output end of the solid amplifier (4) is sequentially connected with the frequency doubling crystal (51) and the frequency quadrupling crystal (52).
7. The frequency-locked deep ultraviolet ultrafast laser of claim 6, wherein: the frequency locking electronic module (6) is electrically connected with the feedback system (64), the frequency doubling temperature control system (66) and the frequency quadrupling temperature control system (67); the feedback system (64) is electrically connected with the third semiconductor pump source (234) and the fourth semiconductor pump source (235); the frequency doubling temperature control system (66) controls the temperature of the frequency doubling crystal (51), and the frequency quadrupling temperature control system (67) controls the temperature of the frequency quadrupling crystal (52).
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