CN115826137A - Broadband polarization beam splitter based on directional coupling - Google Patents
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Abstract
The invention relates to a broadband polarization beam splitter based on directional coupling, which belongs to the technical field of photonic integration and comprises a silicon substrate, a silicon waveguide core layer and a silicon dioxide cladding layer; the silicon waveguide core layer is positioned inside the silicon dioxide cladding layer; the silicon dioxide cladding is positioned on the upper surface of the silicon substrate; the silicon waveguide core layer comprises an input waveguide, a first section of bending waveguide of the directional coupler, a second section of bending waveguide of the directional coupler, a third section of bending waveguide of the directional coupler, a first section of bending waveguide of the filter, a second section of bending waveguide of the filter, a TE polarization output waveguide and a TM polarization output waveguide. According to the invention, the sub-wavelength grating structure is introduced into the coupler, so that the TE polarization state is in a reflection state in the coupling region, the coupling efficiency is reduced, the TM polarization state has almost no influence, the TM high coupling efficiency is ensured, and the extinction ratio of the TE polarization state is improved; the optical fiber can be prepared by utilizing an integrated process, has the advantages of simple process, large tolerance, large bandwidth, high polarization extinction ratio, small insertion loss and small size.
Description
Technical Field
The invention relates to a broadband polarization beam splitter based on directional coupling, and belongs to the technical field of photonic integration.
Background
The high refractive index difference exists between the cladding layer and the core layer of the silicon-on-insulator waveguide, so that the optical field can be well limited, but the high refractive index difference also causes problems of polarization mode dispersion, polarization-related loss and the like. In the optical communication technology, because optical signals transmitted through optical fibers are randomly polarized, the device is required to be insensitive to polarization, and a polarization diversity scheme is generally adopted to solve the polarization problem of a photonic device. A polarizing beam splitter, which can split or combine light of two orthogonal polarization modes, is an important key device in polarization diversity schemes to eliminate polarization sensitivity.
In recent years, polarization beam splitter structures based on directional couplers, photonic crystals, multimode interference couplers (MMIs), hybrid plasma silicon waveguides, etc. have been developed. The polarization beam splitter based on the photonic crystal has a complex structure, large insertion loss and is not easy to prepare. The size of the multimode interference coupler based polarization beam splitter structure is very large, and although the size can be reduced by the quasi-static imaging and cascading structure, the size is still in the order of mm. A polarization beam splitter structure based on a mach-zehnder interferometer (MZI) is relatively easy to fabricate, but is often relatively large in size and relatively narrow in bandwidth. Hybrid plasmonic waveguides can enhance coupling and shorten device length, but such waveguides suffer additional losses due to metal absorption.
The directional coupling type polarization beam splitter has the advantages of being simple in design and manufacture, small in size, convenient to integrate, good in performance and the like, and attracts wide attention of researchers in recent years, but the ordinary directional coupling type polarization beam splitter is small in working bandwidth and high in crosstalk. Conventional grating couplers suffer from low coupling efficiency due to energy leakage from light in the grating.
Disclosure of Invention
The invention aims to provide a broadband polarization beam splitter based on a directional coupling type, which realizes the characteristics of small size, low insertion loss, high extinction ratio and broadband transmission.
In order to achieve the purpose, the invention adopts the technical scheme that:
a broadband polarization beam splitter based on a directional coupling type comprises a silicon substrate, a silicon waveguide core layer and a silicon dioxide cladding layer; the silicon waveguide core layer is positioned inside the silicon dioxide cladding layer; the silicon dioxide cladding is positioned on the upper surface of the silicon substrate;
the silicon waveguide core layer comprises an input waveguide, a first section of bending waveguide of a directional coupler, a second section of bending waveguide of the directional coupler, a third section of bending waveguide of the directional coupler, a first section of bending waveguide of a filter, a second section of bending waveguide of the filter, a TE polarization output waveguide and a TM polarization output waveguide; the input waveguide, the first section of the directional coupler, the second section of the filter and the TE polarization output waveguide are connected in sequence; the third section of the bent waveguide of the directional coupler is connected with the TM polarized output waveguide;
the directional coupler first section curved waveguide, the directional coupler second section curved waveguide and the directional coupler third section curved waveguide are sequentially arranged from top to bottom, and the circle centers of the directional coupler first section curved waveguide, the directional coupler second section curved waveguide and the directional coupler third section curved waveguide are the same;
the first section of the filter bending waveguide is positioned above the second section of the filter bending waveguide, and the center of a circle of the front end bending waveguide of the first section of the filter bending waveguide is the same as that of the second section of the filter bending waveguide;
the directional coupler comprises a directional coupler first section of bent waveguide, a directional coupler second section of bent waveguide, a directional coupler third section of bent waveguide, a connection bridge, a directional coupler second section of bent waveguide, a directional coupler third section of bent waveguide and a directional coupler third section of bent waveguide.
The technical scheme of the invention is further improved as follows: the input waveguide is 220nm in height and 550nm in width, the bending angle is 28.5 degrees, and the bending radius is 8 microns.
The technical scheme of the invention is further improved as follows: the height of the first section of the bending waveguide of the directional coupler is 220nm, the width of the first section of the bending waveguide is 550nm, the bending angle of the first section of the bending waveguide is 28.5 degrees, and the bending radius of the first section of the bending waveguide is 18.5 microns.
The technical scheme of the invention is further improved as follows: the height of the second section of the bending waveguide of the directional coupler is 220nm, the grating period is 500nm, the duty ratio is 0.8, the width of the nano island is 490nm, the width of the connecting bridge is 15nm, the bending angle is 28.5 degrees, and the bending radius is 19.1 microns.
The technical scheme of the invention is further improved as follows: the height of the third section of the bent waveguide of the directional coupler is 220nm, the width of the third section of the bent waveguide is 390nm, the bending angle of the third section of the bent waveguide is 28.5 degrees, and the bending radius of the third section of the bent waveguide is 19.65 microns.
The technical scheme of the invention is further improved as follows: the coupling distance between the first section of the bent waveguide of the directional coupler and the second section of the bent waveguide of the directional coupler is 80nm; and the coupling distance between the second section of the bent waveguide of the directional coupler and the third section of the bent waveguide of the directional coupler is 110nm.
The technical scheme of the invention is further improved as follows: the first section of the bending waveguide of the directional coupler, the second section of the bending waveguide of the directional coupler and the third section of the bending waveguide of the directional coupler meet the phase matching condition of the TM polarization state.
The technical scheme of the invention is further improved as follows: the height of the first section of the bent waveguide of the filter is 220nm, the width of the first section of the bent waveguide is 340nm, the bending angle of the first section of the bent waveguide is 30 degrees, and the bending radius of the first section of the bent waveguide is 8.7 mu m.
The technical scheme of the invention is further improved as follows: the height of the second section of the bent waveguide of the filter is 220nm, the width of the second section of the bent waveguide of the filter is 550nm, the bending angle of the second section of the bent waveguide is 30 degrees, and the bending radius of the second section of the bent waveguide is 8 micrometers.
The technical scheme of the invention is further improved as follows: the first section of the filter bending waveguide and the second section of the filter bending waveguide meet the phase matching condition of the TM polarization state.
Due to the adoption of the technical scheme, the invention has the following technical effects:
according to the invention, the sub-wavelength grating structure is introduced into the coupler, so that the TE polarization state is in a reflection state in the coupling region, the coupling efficiency is reduced, and the TM polarization state has almost no influence, so that the extinction ratio of the TE polarization state is greatly improved on the premise of ensuring the high coupling efficiency of the TM. The coupler is formed based on the phase matching principle, and the effective optical paths of TE polarization states in the waveguide are different and the effective optical paths of TM polarization states are the same by changing the widths of three sections of waveguides of the directional coupler, so that TM phase matching is caused and the TM phase matching is effectively coupled to the TM output waveguide.
In order to further improve the extinction ratio of the TM polarization state, the polarization filter is connected in series with the TE output port of the coupler, and the TM polarization state meets the phase matching condition. The polarization filter at the TE output port of the coupler can filter out TM polarization state which is not completely coupled into the grating waveguide, thereby improving the working bandwidth of the device.
The device can be prepared by an integration process, has simple process, larger tolerance and smaller size, can realize higher extinction ratio in a wider wavelength range, is easy to realize integration with other devices, and has important research and application values in the fields of polarization control in photonic integration, polarization multiplexing in long-distance transmission of optical communication and the like.
Drawings
FIG. 1 is a top view of a silicon waveguide core layer of the present invention;
FIG. 2 is a top view of a second curved waveguide section of the directional coupler of the present invention;
FIG. 3 is a diagram showing the relationship between the transmittance of TM and TE mode input and the grating period of the second section of the curved waveguide of the directional coupler according to the present invention;
FIG. 4 is a graph of the electric field when the polarization beam splitter of the present invention inputs the TM mode and the TE mode;
FIG. 5 is a schematic diagram of the polarization extinction ratio and insertion loss versus input wavelength for the input TM and TE modes of the polarization beam splitter of the present invention;
FIG. 6 is a schematic diagram showing the polarization extinction ratio and insertion loss of TM and TE modes as a function of input wavelength when the waveguide width of the polarization beam splitter of the present invention is shifted to + -20 nm;
the device comprises an input waveguide 1, an input waveguide 2, a first section of bent waveguide of a directional coupler 3, a second section of bent waveguide of the directional coupler 4, a third section of bent waveguide of the directional coupler 5, a first section of bent waveguide of a filter 6, a second section of bent waveguide of the filter 7, a TE polarized output waveguide 8 and a TM polarized output waveguide.
Detailed Description
The technical solutions in the embodiments of the present application will be described clearly and completely with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only some embodiments of the present application, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Various structural schematics according to embodiments of the present disclosure are shown in the figures. The figures are not drawn to scale, wherein certain details are exaggerated and possibly omitted for clarity of presentation. The various regions, shapes, and relative sizes and positional relationships therebetween shown in the drawings are merely exemplary, and may be subject to deviation in practice due to manufacturing tolerances or technical limitations.
A broadband polarization beam splitter based on a directional coupling type comprises a silicon substrate, a silicon waveguide core layer and a silicon dioxide cladding layer; the silicon waveguide core layer is positioned inside the silicon dioxide cladding layer; the silicon dioxide cladding layer is positioned on the upper surface of the silicon substrate.
As shown in fig. 1, the silicon waveguide core layer includes an input waveguide 1, a directional coupler first section curved waveguide 2, a directional coupler second section curved waveguide 3, a directional coupler third section curved waveguide 4, a filter first section curved waveguide 5, a filter second section curved waveguide 6, a TE polarization output waveguide 7, and a TM polarization output waveguide 8; the input waveguide 1, the first section of the directional coupler bent waveguide 2, the second section of the filter bent waveguide 6 and the TE polarization output waveguide 7 are connected in sequence; the third segment of the directional coupler, namely the curved waveguide 4, is connected with a TM polarized output waveguide 8.
The directional coupler is composed of three sections of bent silicon waveguides with different widths, a second section of bent waveguide 3 (middle waveguide) of the directional coupler is designed into a sub-wavelength grating structure, and various parameters of the waveguides are reasonably designed, so that TE polarized light cannot meet phase matching conditions in a coupling area, and therefore the TE polarized light cannot be coupled between the waveguides and is directly output from a straight-through end; the optical paths of the TM polarized light in the coupling region waveguide are the same, namely, the phase matching equation (1) is satisfied, and cross coupling output is realized.
OPL＝N 1 R 1 K 0 θ 0 ＝N 2 R 2 K 0 θ 0 ＝N 3 R 3 K 0 θ 0 (1)
Wherein N is 1 、N 2 、N 3 Respectively, the polarized light has a bending radius of R 1 、R 2 、R 3 Effective refractive index, K, in a curved waveguide of 0 Is the wave vector number in vacuum, theta 0 Is the bend angle of the curved waveguide. The wave vector K is the wave vector when the polarized light is transmitted in the three-section bending waveguide 0 Similarly, the bend angles are approximately equal, so the phase matching condition is mainly determined by the product of the bend radius R of the waveguide and the effective refractive index of the mode as it propagates through the waveguide.
Preferably, the input waveguide 1 has a height of 220nm, a width of 550nm, a bending angle of 28.5 °, and a bending radius of 8 μm.
Preferably, the first section of the curved waveguide 2 of the directional coupler has a height of 220nm, a width of 550nm, a bending angle of 28.5 degrees and a bending radius of 18.5 μm.
Preferably, the height of the second section of the bent waveguide 3 of the directional coupler is 220nm, the grating period is 500nm, the duty ratio is 0.8, the width of the nano island is 490nm, the width of the connecting bridge is 15nm, the bending angle is 28.5 degrees, and the bending radius is 19.1 μm.
Preferably, the third-segment curved waveguide 4 of the directional coupler has a height of 220nm, a width of 390nm, a bending angle of 28.5 degrees and a bending radius of 19.65 μm.
And finally selecting the waveguide parameters through calculation and analog simulation optimization of a phase matching equation (1). The directional coupler first section curved waveguide 2, the directional coupler second section curved waveguide 3 and the directional coupler third section curved waveguide 4 are sequentially arranged from top to bottom, and the circle centers of the three sections are the same.
Preferably, the first segment of the filter curved waveguide 5 has a height of 220nm, a width of 340nm, a bending angle of 30 ° and a bending radius of 8.7 μm.
Preferably, the height of the second curved waveguide 6 of the filter is 220nm, the width of the second curved waveguide is 550nm, the bending angle of the second curved waveguide is 30 degrees, and the bending radius of the second curved waveguide is 8 μm.
It should be noted that the device parameters provided in this embodiment are merely typical values for illustrating the principle, and other reasonable values may be adopted when referring to the specific processing technology, but need to conform to the device operation principle.
As shown in fig. 2, for the second section of the curved waveguide of the directional coupler, a connecting bridge is used for connecting the two sections of the curved waveguides, so that the structure of the silicon nano island is firmer and is convenient to manufacture, the effective refractive index of the grating waveguide can be increased, the duty ratio can be reduced under the condition that the period and the width are not changed, and the manufacture in the process is facilitated. For simplicity of manufacture, the width W of the connecting bridge b Should be as large as possible, and W should be added to improve the TE polarization reflection efficiency b Should not be too large, therefore, W is selected b ＝0.15μm。
As shown in fig. 2, for the sub-wavelength grating, according to the effective medium theory, the sub-wavelength grating waveguide can be equivalent to a uniform medium, and the effective refractive index can be calculated according to the formula (2).
Wherein n is 1 And n 2 The equivalent refractive indexes of the silicon nanometer island and the connecting bridge with corresponding polarization respectively, and f is the duty ratio of the grating waveguide and is set to be 0.8.
By optimizing the size of the waveguide and selecting a proper grating period, the TE polarization meets the Bragg reflection condition in the communication waveband, namely the communication waveband falls in a reflection region, and the TM polarization is transmitted in the waveguide in a Bloch mode.
The following describes in detail the simulation results of the polarization beam splitter of the present disclosure in the form of diagrams, and the structure of the polarization beam splitter is simulated by using Finite Difference Time Domain (FDTD).
In order to select a proper grating period, the following simulation is carried out, and grating parameters are fixed: width W of grating 2 =0.5 μm, width W of connecting bridge b =0.15 μm, a number of grating periods N =20, a duty cycle f =0.8, and a grating period Λ varying from 0.42 μm to 0.58 μm.
As shown in fig. 3, as the grating period is gradually increased, the TM polarization center wavelength is also increased, and the transmittance is obviously reduced; the cut-off wavelength of TE polarization is increasing and this result is compatible with bragg reflection, i.e. the reflection center wavelength is inversely proportional to the grating period. According to the results shown in fig. 3, in order to not affect the TM polarization but greatly reduce the coupling efficiency of the TE polarization, it is preferable that the grating period is 500nm.
Fig. 4 is a graph of an electric field when a TE mode and a TM mode are input to the polarization beam splitter provided in the embodiment of the present disclosure, and light having a wavelength set to 1550nm is input from an input end of the polarization beam splitter. As shown in fig. 4, it can be seen that the beam splitting effect of the PBS is satisfactory, when TM polarized light is input, the waveguide in the coupling region satisfies the phase matching condition, and is output from the output end of the waveguide structure 3 after being coupled, i.e., a Cross port; when the TE polarized light is input, the effective optical paths in the coupling regions are different, no coupling occurs, and the optical signal is directly output from the output end of the waveguide structure 5, i.e., a Through port (Through port).
FIG. 5 is a graph of polarization extinction ratio and insertion loss versus wavelength (1450 nm-1650 nm) for the input TM and TE modes. Specifically, the TM mode polarization extinction ratio can reach 32dB, the extinction ratio in the wavelength range of 1509-1650 nm exceeds 20dB, and the insertion loss is less than 1.3dB. This means that the polarizer can guarantee excellent performance over a wide bandwidth range (141 nm). The TE mode polarization extinction ratio of the device can reach 30dB, the device has a high polarization extinction ratio, the polarization extinction ratios in the wavelength range of 1450-1650 nm are all larger than 23dB, and the insertion loss is all smaller than 0.5dB.
Fig. 6 is a schematic diagram of the relationship between the input wavelength and the polarization extinction ratio and insertion loss of TM and TE modes when the waveguide width of the polarization beam splitter is converted to ± 20nm in the embodiment of the present invention. When the process error is 20nm, the bandwidth of the PER of TM polarized light is 124nm (1514-1638 nm) higher than 20dB, the insertion loss of TM is less than 0.9dB, and the polarization extinction ratio of TE polarized light can still be kept more than 20dB in the range of 200 nm. The width of the waveguide is reduced by 20nm, the PER of TM is more than 20dB and the insertion loss is less than 1.3dB in the wavelength range of 1516-1650 nm, and the polarization extinction ratio of TE polarized light can keep a good effect.
The grating waveguide structure is introduced into the coupler, so that the coupling efficiency of the TE polarization state is greatly reduced, the TM polarization state is hardly influenced, and the coupling length is reduced. A small amount of TE polarization state coupled into the grating waveguide will be present in the coupler, but will be reflected back by the grating waveguide due to the bragg reflection condition being met, thereby greatly increasing the extinction ratio of the TE polarization state. The grating waveguide has a simple and compact structure, so that the TM polarization state is not very sensitive to the deviation of the wavelength and the device size in the coupler any more, and therefore, the device has a larger fault tolerance rate to process errors.
In order to further improve the extinction ratio of the TM polarization state, the polarization filter is connected in series with the TE output end, the TM polarization state meets the phase matching condition, and the TM polarization state which is not completely coupled into the grating waveguide can be filtered.
The simulation results show that the polarization beam splitter of the invention has good polarization beam splitting characteristics, and the polarization beam splitter not only has compact structure, but also can realize the characteristics of large process tolerance, low insertion loss, high extinction ratio, transmission bandwidth and the like. The polarization beam splitter has the advantages of simple and compact structure and large process tolerance, and has important research and application values in the fields of polarization control in photonic integration, polarization multiplexing in optical communication long-distance transmission and the like.
Claims (10)
1. A broadband polarization beam splitter based on directional coupling type is characterized in that: the silicon waveguide core layer comprises a silicon substrate, a silicon waveguide core layer and a silicon dioxide cladding layer; the silicon waveguide core layer is positioned inside the silicon dioxide cladding layer; the silicon dioxide cladding is positioned on the upper surface of the silicon substrate;
the silicon waveguide core layer comprises an input waveguide (1), a first section of directional coupler bent waveguide (2), a second section of directional coupler bent waveguide (3), a third section of directional coupler bent waveguide (4), a first section of filter bent waveguide (5), a second section of filter bent waveguide (6), a TE polarization output waveguide (7) and a TM polarization output waveguide (8); the input waveguide (1), the first section of the directional coupler bent waveguide (2), the second section of the filter bent waveguide (6) and the TE polarization output waveguide (7) are connected in sequence; the third section of the bending waveguide (4) of the directional coupler is connected with a TM polarization output waveguide (8);
the directional coupler first section curved waveguide (2), the directional coupler second section curved waveguide (3) and the directional coupler third section curved waveguide (4) are sequentially arranged from top to bottom, and the circle centers of the three sections are the same;
the first section of the filter bending waveguide (5) is positioned above the second section of the filter bending waveguide (6), and the circle centers of the front end bending waveguide of the first section of the filter bending waveguide (5) and the second section of the filter bending waveguide (6) are the same;
the directional coupler second section of the curved waveguide (3) is a sub-wavelength grating structure, the grating structures are connected through a connecting bridge, TM polarization effective optical paths of the directional coupler first section of the curved waveguide (2), the directional coupler second section of the curved waveguide (3) and the directional coupler third section of the curved waveguide (4) are the same and are used for coupling TM polarization, and TE polarization of the directional coupler second section of the curved waveguide (3) is in a reflection state and is used for filtering TE polarization.
2. A broadband polarization beam splitter based on directional coupling type according to claim 1, wherein: the height of the input waveguide (1) is 220nm, the width of the input waveguide is 550nm, the bending angle is 28.5 degrees, and the bending radius is 8 mu m.
3. A broadband polarization beam splitter based on directional coupling type according to claim 1, wherein: the height of the first section of the bent waveguide (2) of the directional coupler is 220nm, the width of the first section of the bent waveguide is 550nm, the bending angle of the first section of the bent waveguide is 28.5 degrees, and the bending radius of the first section of the bent waveguide is 18.5 microns.
4. A broadband polarization beam splitter based on directional coupling type according to claim 1, wherein: the height of the second section of the bending waveguide (3) of the directional coupler is 220nm, the grating period is 500nm, the duty ratio is 0.8, the width of the nano island is 490nm, the width of the connecting bridge is 15nm, the bending angle is 28.5 degrees, and the bending radius is 19.1 microns.
5. A broadband polarization beam splitter based on directional coupling type according to claim 1, wherein: the height of the third section of the bent waveguide (4) of the directional coupler is 220nm, the width of the third section of the bent waveguide is 390nm, the bending angle of the third section of the bent waveguide is 28.5 degrees, and the bending radius of the third section of the bent waveguide is 19.65 mu m.
6. A broadband polarization beam splitter based on directional coupling type according to claim 1, wherein: the coupling distance between the first section of the directional coupler bent waveguide (2) and the second section of the directional coupler bent waveguide (3) is 80nm; the coupling distance between the second section of the directional coupler bent waveguide (3) and the third section of the directional coupler bent waveguide (4) is 110nm.
7. A broadband polarizing beam splitter based on the directional coupling type according to claim 1, wherein: the directional coupler first section of the curved waveguide (2), the directional coupler second section of the curved waveguide (3) and the directional coupler third section of the curved waveguide (4) meet the phase matching condition of the TM polarization state.
8. A broadband polarizing beam splitter based on the directional coupling type according to claim 1, wherein: the height of the first section of the bent waveguide (5) of the filter is 220nm, the width of the first section of the bent waveguide is 340nm, the bending angle of the first section of the bent waveguide is 30 degrees, and the bending radius of the first section of the bent waveguide is 8.7 mu m.
9. A broadband polarization beam splitter based on directional coupling type according to claim 1, wherein: the height of the second section of the bent waveguide (6) of the filter is 220nm, the width of the second section of the bent waveguide is 550nm, the bending angle of the second section of the bent waveguide is 30 degrees, and the bending radius of the second section of the bent waveguide is 8 mu m.
10. A broadband polarization beam splitter based on directional coupling type according to claim 1, wherein: the first section of the filter bending waveguide (5) and the second section of the filter bending waveguide (6) meet the phase matching condition of TM polarization state.
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| CN117891090A (en) * | 2024-03-13 | 2024-04-16 | 北京航空航天大学 | Lithium niobate thin film integrated chip for modulation and reception and working method thereof |
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