CN115825504A - Wafer probe test board and probe seat movement control mechanism - Google Patents
Wafer probe test board and probe seat movement control mechanism Download PDFInfo
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- CN115825504A CN115825504A CN202210817823.8A CN202210817823A CN115825504A CN 115825504 A CN115825504 A CN 115825504A CN 202210817823 A CN202210817823 A CN 202210817823A CN 115825504 A CN115825504 A CN 115825504A
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Abstract
The invention belongs to the technical field of wafer detection, and particularly relates to a wafer probe test board and a probe seat movement control mechanism, which comprise a workbench, wherein two fixed columns with two symmetrically distributed ends are fixedly connected to two sides of the top of the workbench, the tops of the two fixed columns on the same side are fixedly connected with a same longitudinal guide plate, a first sliding groove is formed in the top of the longitudinal guide plate, a first sliding block is connected in the first sliding groove in a sliding manner, a first screw is connected in the first sliding groove in a rotating manner, the first screw is in threaded connection with the first sliding block, the tops of the two first sliding blocks are fixedly connected with a same transverse guide plate, a second sliding groove is formed in the top of the transverse guide plate, a second sliding block is connected in the second sliding groove in a sliding manner, a second screw is connected in the second sliding groove in a rotating manner, a second motor is fixedly connected to one side of the transverse guide plate, and an output shaft of the second motor is fixedly connected with the second screw. In the invention, the probe is moved to keep the position of the wafer still, so that the wafer is comprehensively detected.
Description
Technical Field
The invention relates to the technical field of wafer detection, in particular to a wafer probe test board and a probe seat movement control mechanism.
Background
The wafer probe test bench is intermediate test equipment in semiconductor process line and can test the electric parameters and functions of integrated circuit and various transistor cores automatically after being connected with the tester. With the increasing demand for high-performance, multifunctional, high-speed, low-power, miniaturized, and low-price electronic products, it is required to integrate more functions into one chip and further reduce the size, so that high-precision and high-efficiency testing will be the main direction for the development of wafer probe test platforms in future.
When the existing wafer probe test bench is used for detecting a wafer, the wafer placed on the existing wafer probe test bench is generally driven by a movement control mechanism to move, so that comprehensive detection is realized, the position of the probe is fixed, the movement control mechanism is intermittent when moving, a short pause is formed in the middle of the movement control mechanism, so that the probe can detect the position, and when the movement control mechanism moves to the pause, the wafer placed on the probe test bench can move due to inertia, so that the detection result is influenced, and therefore, the problem is correspondingly improved.
Disclosure of Invention
Based on the technical problem that the existing movement control mechanism can cause the wafer position to move, the invention provides a wafer probe test board and a probe seat movement control mechanism.
The invention provides a wafer probe test board and a probe seat movement control mechanism, which comprise a workbench, wherein two sides of the top of the workbench are fixedly connected with two fixed columns with two symmetrically distributed ends, the tops of the two fixed columns at the same side are fixedly connected with a same longitudinal guide plate, the top of the longitudinal guide plate is provided with a first sliding groove, the first sliding groove is internally and slidably connected with a first sliding block, the first sliding groove is internally and rotatably connected with a first screw, the first screw is in threaded connection with the first sliding block, the tops of the two first sliding blocks are fixedly connected with a same transverse guide plate, the top of the transverse guide plate is provided with a second sliding groove, the second sliding groove is internally and slidably connected with a second sliding block, the second sliding groove is internally and rotatably connected with a second screw, the second screw is in threaded connection with the second sliding block, one side of the transverse guide plate is fixedly connected with a second motor, an output shaft of the second motor is fixedly connected with the second screw, the second sliding block is provided with a detection mechanism, and the first screw is connected with a linkage mechanism.
Preferably, the detection mechanism includes the probe, second slider top fixedly connected with stand, stand top fixedly connected with roof, roof bottom fixedly connected with electric putter, fixed connection between probe and electric putter's the output shaft.
Preferably, the link gear mechanism includes the belt, and the rear end of first screw rod extends to the outside of indulging the baffle and the cover is established and is fixed with the band pulley, and the belt cover is located between two band pulleys, and one of them indulges the rear end fixedly connected with mount of baffle, fixedly connected with first motor on the mount, fixed connection between first motor output shaft and the first screw rod that corresponds.
A wafer probe test bench comprises a probe seat movement control mechanism of the wafer probe test bench and a positioning component, wherein the positioning component is arranged below the probe seat movement control mechanism.
Preferably, the locating component is including putting the dish, place a set fixed connection in the top of workstation, place two location axles that are bilateral symmetric distribution of dish top rear end fixedly connected with, rotate on the location axle and be connected with rear side shelves pole, rear side shelves pole front end rotates and is connected with the connecting piece, the connecting piece front end rotates and is connected with front side shelves pole, front side shelves pole cross-section sets the arc, the notch has been seted up to front side shelves pole top front end, the notch interpolation is equipped with the connecting pin, the same push pedal of top fixedly connected with of two connecting pins, be provided with fixed establishment in the push pedal, rear side shelves pole is connected with preceding pushing mechanism.
Preferably, the fixing mechanism comprises an inserting plate, the top of the pushing plate is provided with an opening, the inserting plate is inserted into the opening, and the front end of the top of the placing plate is provided with a plurality of uniformly distributed inserting grooves.
Preferably, the forward pushing mechanism comprises a fixed rod, the cross section of the fixed rod is arranged to be 3-shaped, two sides of the front end of the fixed rod are provided with movable grooves with arc-shaped cross sections, movable rods are connected in the movable grooves in a sliding mode, the same first spring is fixedly connected between the rear ends of the movable rods and the inner walls of the rear ends of the movable grooves, and the movable rods are connected with corresponding rear side gear rods in a rotating mode.
Preferably, the top of the placing plate is provided with a circular groove, the inner wall of the bottom of the circular groove is fixedly connected with an ejection spring, and the top of the ejection spring is fixedly connected with an ejection block.
Preferably, the outer arc surface of the front side stop lever is fixedly connected with a first pressing plate, the overlooking cross section of the first pressing plate is arranged into an arc shape, and the sideward cross section of the first pressing plate is arranged into a triangle shape.
Preferably, the inner side surface of the rear side stop rod is fixedly connected with a second pressing plate, and the side-view cross section of the second pressing plate is triangular.
Compared with the prior art, the invention provides a wafer probe test board and a probe seat movement control mechanism, which have the following beneficial effects:
1. this a wafer probe test platform and probe seat movement control mechanism, start first motor, first motor output shaft drives first screw rod and the band pulley rotation of being connected with it, then, through the transmission cooperation of band pulley and belt, make two first screw rods rotate in step, under the screw thread effect, make first slider carry out the back-and-forth movement along the direction of first spout, then the whole of synchronous drive horizontal baffle and probe carries out the ascending removal in front and back direction, start the second motor, second motor output shaft drives the second screw rod and rotates, make the second slider control the removal along the direction of second spout, then the synchronous drive stand, the roof, the whole of electric putter and probe is controlled the removal, thereby through moving the probe, keep the position of wafer motionless, realize the comprehensive detection to the wafer, thereby effectively avoid the problem that exists among the prior art.
2. The wafer probe test board and the probe seat movement control mechanism place a wafer on a placing disc, the wafer is located between two rear side gear rods and a front side gear rod, a push plate is pushed backwards, a connecting pin on the push plate drives the front side gear rod to move backwards, the front side gear rod pushes the wafer backwards, when the front side gear rod moves backwards, the two rear side gear rods are unfolded in a splayed mode until the wafer is in contact with the two rear side gear rods, the wafer can be positioned through the two rear side gear rods and the front side gear rod, then an inserting plate is pressed down, the inserting plate is connected with a corresponding inserting groove in an inserting mode, the push plate can be fixed, the wafer position is fixed, the front side gear rod and the rear side gear rod are in contact with the wafer in a tangent mode, a large gap can be reserved among the front side gear rod, the rear side gear rod and the wafer, and the wafer taking and placing process is convenient.
3. This a wafer probe test platform and probe seat mobility control mechanism, be provided with preceding pushing mechanism, when rear side shelves pole opens, push the movable rod to the movable groove in, the movable rod extrudees first spring, the reverse elasticity of first spring is used on movable rod and rear side shelves pole in proper order, can make the wafer fixed more stable, after the detection, extract the picture peg, under the elastic action of first spring, make two rear side shelves poles draw in to the inboard, then with the wafer forward push, thereby remove the location state, be convenient for take out the wafer.
4. This a wafer probe test platform and probe seat movement control mechanism, be provided with first clamp plate and second clamp plate, because the internal surface of first clamp plate and second clamp plate is the inclined plane, when rear side pin and front side pin were fixed a position the wafer, first clamp plate and second clamp plate can push down the wafer, then the wafer with the kicking block impress in the circular slot, make the wafer with place the dish and paste tightly, when relieving the positioned state, two rear side pins inwards draw in, then with the wafer forward push, simultaneously ejecting spring passes through the kicking block with the wafer jack-up, the wafer can be taken on the kicking block to one side, make the wafer with place and form the space between the dish, thereby the staff of being convenient for takes out the wafer.
Drawings
FIG. 1 is a schematic diagram of an overall structure of a wafer probe test board and a probe base movement control mechanism according to the present invention;
FIG. 2 is a schematic structural view of a wafer probe test board and a positioning mechanism of a probe seat movement control mechanism according to the present invention;
FIG. 3 is a schematic view of a wafer probe test board and a connecting pin mounting structure of a probe seat movement control mechanism according to the present invention;
FIG. 4 is a schematic view of a wafer probe test board and a movable rod mounting structure of a probe base movement control mechanism according to the present invention;
FIG. 5 is an enlarged schematic view of the probe test platform and probe base movement control mechanism at the A position according to the present invention;
FIG. 6 is a schematic diagram of a top structure of a wafer probe test board and a placement tray of a probe seat movement control mechanism according to the present invention;
FIG. 7 is a schematic view of a first pressing plate mounting structure of a wafer probe testing table and a probe base movement control mechanism according to the present invention;
fig. 8 is a schematic view of a second pressing plate mounting structure of the wafer probe testing table and the probe base movement control mechanism according to the present invention.
In the figure: 1. a work table; 2. placing a tray; 3. a rear side stopper rod; 4. a connecting member; 5. a front side shift lever; 6. positioning the shaft; 7. a notch; 8. a connecting pin; 9. pushing a plate; 10. fixing the rod; 11. a movable groove; 12. a first spring; 13. a movable rod; 14. an opening; 15. inserting plates; 16. a slot; 17. fixing a column; 18. a longitudinal guide plate; 19. a first chute; 20. a first slider; 21. a first screw; 22. a transverse guide plate; 23. a fixed mount; 24. a first motor; 25. a pulley; 26. a belt; 27. a second chute; 28. a second slider; 29. a second screw; 30. a second motor; 31. a column; 32. a top plate; 33. an electric push rod; 34. a probe; 35. a circular groove; 36. ejecting a spring; 37. a top block; 38. a first platen; 39. and a second pressure plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Example 1
Referring to fig. 1, a wafer probe test board and a probe seat movement control mechanism include a workbench 1, two fixing columns 17 symmetrically distributed at two ends are fixedly connected to two sides of the top of the workbench 1, the top of the two fixing columns 17 at the same side is fixedly connected with the same longitudinal guide plate 18, a first sliding groove 19 is formed in the top of the longitudinal guide plate 18, a first sliding block 20 is slidably connected in the first sliding groove 19, a first screw 21 is rotationally connected in the first sliding groove 19, the first screw 21 is in threaded connection with the first sliding block 20, the top of the two first sliding blocks 20 is fixedly connected with the same transverse guide plate 22, a second sliding groove 27 is formed in the top of the transverse guide plate 22, a second sliding block 28 is slidably connected in the second sliding groove 27, the second sliding groove 27 is rotationally connected with a second screw 29, the second screw 29 is in threaded connection with the second sliding block 28, one side of the transverse guide plate 22 is fixedly connected with a second motor 30, an output shaft of the second motor 30 is fixedly connected with the second screw 29, a detection mechanism is arranged on the second sliding block 28, and the first screw 21 is connected with a linkage mechanism.
Further, the detection mechanism comprises a probe 34, the top of the second sliding block 28 is fixedly connected with a stand column 31, the top of the stand column 31 is fixedly connected with a top plate 32, the bottom of the top plate 32 is fixedly connected with an electric push rod 33, and the probe 34 is fixedly connected with an output shaft of the electric push rod 33.
Further, the linkage mechanism includes a belt 26, the rear end of the first screw 21 extends to the outside of the longitudinal guide plate 18 and is fixedly provided with a belt wheel 25 in a sleeved manner, the belt 26 is sleeved between the two belt wheels 25, the rear end of one of the longitudinal guide plates 18 is fixedly connected with a fixing frame 23, the fixing frame 23 is fixedly connected with a first motor 24, and an output shaft of the first motor 24 is fixedly connected with the corresponding first screw 21.
The working principle is as follows: during the use, start first motor 24, first motor 24 output shaft drives first screw rod 21 and the band pulley 25 rotation of being connected with it, then through the transmission cooperation of band pulley 25 and belt 26, make two first screw rods 21 rotate in step, under the screw thread effect, make first slider 20 carry out the back-and-forth movement along the direction of first spout 19, then the whole of synchronous drive horizontal guide plate 22 and probe 34 carries out the ascending removal in front and back direction, start second motor 30, second motor 30 output shaft drives second screw rod 29 and rotates, make second slider 28 remove about along the direction of second spout 27, then the whole of synchronous drive stand 31, roof 32, electric putter 33 and probe 34 removes about, thereby through removing probe 34, keep the position of wafer motionless, realize the comprehensive detection to the wafer, thereby effectively avoid the problem that exists among the prior art.
Example 2
Referring to fig. 2 to 8, a wafer prober includes a probe base movement control mechanism of the wafer prober according to any one of embodiments 1, and a positioning assembly disposed below the probe base movement control mechanism.
Further, the locating component is including putting dish 2, put 2 fixed connection in the top of workstation 1 of dish, put two location axles 6 that are bilateral symmetry distribution of 2 top rear end fixedly connected with of dish, it is connected with rear side shelves pole 3 to rotate on location axle 6, 3 front ends of rear side shelves pole are rotated and are connected with connecting piece 4, 4 front ends of connecting piece are rotated and are connected with front side shelves pole 5, 5 cross-sections of front side shelves pole set to the arc, notch 7 has been seted up to 5 top front ends of front side shelves pole, the interpolation of notch 7 is equipped with connecting pin 8, the same push pedal 9 of top fixedly connected with of two connecting pins 8, be provided with fixed establishment on the push pedal 9, rear side shelves pole 3 is connected with preceding pushing mechanism.
Furthermore, the fixing mechanism comprises an inserting plate 15, an opening 14 is formed in the top of the pushing plate 9, the inserting plate 15 is inserted into the opening 14, and a plurality of uniformly distributed inserting grooves 16 are formed in the front end of the top of the placing disc 2.
Further, the forward pushing mechanism comprises a fixing rod 10, the cross section of the fixing rod 10 is set to be in a shape like a Chinese character '3', a movable groove 11 with an arc-shaped cross section is formed in each of two sides of the front end of the fixing rod 10, a movable rod 13 is slidably connected in the movable groove 11, a first spring 12 is fixedly connected between the rear end of the movable rod 13 and the inner wall of the rear end of the movable groove 11, and the movable rod 13 is rotatably connected with the corresponding rear side gear rod 3.
Further, a circular groove 35 is formed in the top of the placing disc 2, an ejection spring 36 is fixedly connected to the inner wall of the bottom of the circular groove 35, and an ejector block 37 is fixedly connected to the top of the ejection spring 36.
Further, the outer arc surface of the front side stop lever 5 is fixedly connected with a first pressing plate 38, the top view cross section of the first pressing plate 38 is set to be arc-shaped, and the side view cross section of the first pressing plate 38 is set to be triangular.
Further, the inner side surface of the rear side stop rod 3 is fixedly connected with a second pressing plate 39, and the side-view cross section of the second pressing plate 39 is triangular.
The working principle is as follows: when the wafer positioning device is used, a wafer is placed on the placing disc 2, the wafer is positioned between the two rear side gear rods 3 and the front side gear rod 5, the push plate 9 is pushed backwards, the connecting pin 8 on the push plate 9 drives the front side gear rod 5 to move backwards, the front side gear rod 5 pushes the wafer backwards, when the front side gear rod 5 moves backwards, the two rear side gear rods 3 are unfolded in a splayed shape until the wafer is contacted with the two rear side gear rods 3, the wafer can be positioned through the two rear side gear rods 3 and the front side gear rod 5, then the inserting plate 15 is pressed down, the inserting plate 15 is inserted into the corresponding inserting groove 16, the push plate 9 can be fixed, the wafer position is fixed, the front side gear rod 5 and the rear side gear rod 3 are in tangential contact with the wafer, a larger gap can be reserved among the front side gear rod 5, the rear side gear rod 3 and the wafer, and the wafer taking and placing process of the wafer is convenient, further, a forward pushing mechanism is provided, when the rear side blocking rod 3 is opened, the movable rod 13 is pushed into the movable groove 11, the movable rod 13 extrudes the first spring 12, the reverse elastic force of the first spring 12 sequentially acts on the movable rod 13 and the rear side blocking rod 3, so that the wafer can be fixed more stably, after the detection is finished, the inserting plate 15 is pulled out, the two rear side blocking rods 3 are folded inwards under the elastic force of the first spring 12, then the wafer is pushed forward, the positioning state is released, the wafer is convenient to take out, furthermore, a first pressing plate 38 and a second pressing plate 39 are provided, because the inner surfaces of the first pressing plate 38 and the second pressing plate 39 are inclined surfaces, when the wafer is positioned by the rear side blocking rod 3 and the front side blocking rod 5, the first pressing plate 38 and the second pressing plate 39 press the wafer downwards, then the top block 37 is pressed into the circular groove 35 by the wafer, make the wafer and place dish 2 and paste tightly, when removing the positioned state, two rear side shelves 3 are drawn in to the inboard, then push forward the wafer, and ejecting spring 36 is through kicking block 37 with the wafer jack-up simultaneously, and the wafer can be taken on kicking block 37 to one side for form the space between wafer and the dish 2 of placing, thereby the staff of being convenient for takes out the wafer.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the invention.
Claims (10)
1. The utility model provides a probe seat movement control mechanism of wafer probe test platform, including workstation (1), a serial communication port, workstation (1) top both sides equal fixedly connected with two fixed columns (17) that are both ends symmetric distribution, the top fixedly connected with of two fixed columns (17) of homonymy is same indulges baffle (18), indulge baffle (18) top and seted up first spout (19), sliding connection has first slider (20) in first spout (19), first spout (19) internal rotation is connected with first screw rod (21), first screw rod (21) and first slider (20) threaded connection, the same horizontal baffle (22) of top fixedly connected with of two first sliders (20), second spout (27) has been seted up at horizontal baffle (22) top, sliding connection has second slider (28) in second spout (27), second spout (27) internal rotation is connected with second screw rod (29), second screw rod (29) and second slider (28) threaded connection, one side fixedly connected with second motor (30) of horizontal baffle (22), second motor (30) and second slider (29) internal rotation are provided with second detection screw rod (28), detection mechanism (21) is last is provided with first detection screw rod (21).
2. The probe seat movement control mechanism of a wafer probe test bench according to claim 1, wherein the probe mechanism comprises a probe (34), a vertical column (31) is fixedly connected to the top of the second sliding block (28), a top plate (32) is fixedly connected to the top of the vertical column (31), an electric push rod (33) is fixedly connected to the bottom of the top plate (32), and the probe (34) is fixedly connected to an output shaft of the electric push rod (33).
3. The probe seat movement control mechanism of the wafer probe test bench according to claim 1, wherein the linkage mechanism comprises a belt (26), the rear end of the first screw (21) extends to the outside of the longitudinal guide plate (18) and is sleeved with a belt wheel (25), the belt (26) is sleeved between the two belt wheels (25), the rear end of one longitudinal guide plate (18) is fixedly connected with a fixing frame (23), the fixing frame (23) is fixedly connected with a first motor (24), and the output shaft of the first motor (24) is fixedly connected with the corresponding first screw (21).
4. A wafer prober comprising a probe base movement control mechanism of the wafer prober according to any one of claims 1-3, and a positioning member disposed below the probe base movement control mechanism.
5. The wafer probe test bench according to claim 4, wherein the positioning assembly comprises a placing plate (2), the placing plate (2) is fixedly connected to the top of the workbench (1), two positioning shafts (6) symmetrically distributed on two sides are fixedly connected to the rear end of the top of the placing plate (2), a rear side lever (3) is rotatably connected to each positioning shaft (6), a connecting piece (4) is rotatably connected to the front end of each rear side lever (3), a front side lever (5) is rotatably connected to the front end of each connecting piece (4), the cross section of each front side lever (5) is arc-shaped, a notch (7) is formed in the front end of the top of each front side lever (5), a connecting pin (8) is inserted into each notch (7), the top of the two connecting pins (8) is fixedly connected with the same push plate (9), a fixing mechanism is arranged on each push plate (9), and the rear side lever (3) is connected with a forward pushing mechanism.
6. A wafer probe test bench according to claim 5, wherein the fixing mechanism comprises an inserting plate (15), the top of the pushing plate (9) is provided with an opening (14), the inserting plate (15) is inserted into the opening (14), and the front end of the top of the placing tray (2) is provided with a plurality of evenly distributed slots (16).
7. A wafer probe test bench according to claim 5, wherein the forward pushing mechanism comprises a fixed rod (10), the section of the fixed rod (10) is arranged in a 3 shape, two sides of the front end of the fixed rod (10) are respectively provided with a movable groove (11) with an arc-shaped section, a movable rod (13) is slidably connected in the movable groove (11), the same first spring (12) is fixedly connected between the rear end of the movable rod (13) and the inner wall of the rear end of the movable groove (11), and the movable rod (13) is rotatably connected with the corresponding rear side stop rod (3).
8. A wafer probe test bench according to claim 7, wherein a circular groove (35) is formed at the top of the placing tray (2), an ejecting spring (36) is fixedly connected to the inner wall of the bottom of the circular groove (35), and an ejecting block (37) is fixedly connected to the top of the ejecting spring (36).
9. A wafer probe test bench according to claim 5, wherein the outer arc surface of the front side stop bar (5) is fixedly connected with a first pressing plate (38), the top view cross section of the first pressing plate (38) is set to be arc-shaped, and the side view cross section of the first pressing plate (38) is set to be triangle-shaped.
10. A wafer probe test bench according to claim 5, wherein a second pressing plate (39) is fixedly connected to the inner side surface of the rear side rail (3), and the side view cross section of the second pressing plate (39) is triangular.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210817823.8A CN115825504A (en) | 2022-07-13 | 2022-07-13 | Wafer probe test board and probe seat movement control mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210817823.8A CN115825504A (en) | 2022-07-13 | 2022-07-13 | Wafer probe test board and probe seat movement control mechanism |
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| CN115825504A true CN115825504A (en) | 2023-03-21 |
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| CN202210817823.8A Pending CN115825504A (en) | 2022-07-13 | 2022-07-13 | Wafer probe test board and probe seat movement control mechanism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116359118A (en) * | 2023-05-31 | 2023-06-30 | 东营市特种设备检验研究院 | Oil gas storage and transportation container detection device |
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2022
- 2022-07-13 CN CN202210817823.8A patent/CN115825504A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116359118A (en) * | 2023-05-31 | 2023-06-30 | 东营市特种设备检验研究院 | Oil gas storage and transportation container detection device |
| CN116359118B (en) * | 2023-05-31 | 2023-08-04 | 东营市特种设备检验研究院 | Oil gas storage and transportation container detection device |
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