CN115792276A - Piezoelectric acceleration sensor with near-constant pretightening force in full temperature region - Google Patents
Piezoelectric acceleration sensor with near-constant pretightening force in full temperature region Download PDFInfo
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- CN115792276A CN115792276A CN202211563901.2A CN202211563901A CN115792276A CN 115792276 A CN115792276 A CN 115792276A CN 202211563901 A CN202211563901 A CN 202211563901A CN 115792276 A CN115792276 A CN 115792276A
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Abstract
The invention discloses a piezoelectric acceleration sensor with near-constant pretightening force in a full temperature area, which relieves high-temperature thermal mismatch caused by inconsistent thermal expansion coefficients of metal parts and piezoelectric materials in the piezoelectric acceleration sensor by adding a bolt pad, and ensures that the sensor is in a near-constant pretightening state in the full working temperature area; the pretightening force of the bolt of the acceleration sensor is kept consistent with the initial pretightening force as much as possible along with the temperature rise, so that the influence of a force-thermal coupling field on the piezoelectric constant of the piezoelectric sensitive element is eliminated, the sensitivity temperature drift of the sensor is consistent with the temperature drift of the piezoelectric constant of the piezoelectric sensitive element, in addition, the near-constant pretightening force of a full temperature zone is kept, the linearity of the piezoelectric acceleration sensor can be kept consistent with that of the piezoelectric sensitive element at room temperature, and the linearity deterioration caused by the pretightening force change caused by the temperature rise can be avoided. The piezoelectric acceleration sensor controls the pretightening force change through structural design to improve the high-temperature performance of the piezoelectric acceleration sensor, and the improvement method is simple and reliable.
Description
Technical Field
The invention relates to the field of sensors, in particular to a piezoelectric acceleration sensor with nearly constant pretightening force in a full temperature region.
Background
The piezoelectric acceleration sensor is also called as a piezoelectric accelerometer, and converts an external vibration signal into an electric signal through the piezoelectric effect of a piezoelectric sensitive element, so that the vibration measurement of the environment is realized. When the piezoelectric acceleration sensor is excited by external vibration, the force of the mass block acting on the piezoelectric sensing element changes along with the vibration, and the output signal of the piezoelectric sensing element changes along with the change of the force, and when the vibration frequency is far less than the resonance frequency of the piezoelectric acceleration sensor, the vibration frequency and the resonance frequency are in a direct proportion relation.
In the development of high-end equipment such as aerospace, heavy gas turbines and nuclear power plants, higher requirements are put on the high temperature tolerance of the piezoelectric acceleration sensor for monitoring the vibration of the high-end equipment. With the increase of the use temperature, the adhesive used for fixing the sensor parts usually fails, the parts of the piezoelectric acceleration sensor are usually fixed and pre-tightened by bolts and nuts, and then the pre-tightening force of the bolts is attenuated with the increase of the temperature, so that the sensitivity temperature drift of the sensor is increased due to the action of a force-thermal coupling field, and the performances such as linearity, impact resistance and the like are reduced. Therefore, a piezoelectric acceleration sensor with nearly constant pretightening force in a full temperature region needs to be designed, the performance reduction of the sensor caused by pretightening force attenuation due to temperature rise is relieved, and the service performance of the piezoelectric acceleration sensor in a high-temperature environment is improved.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides a piezoelectric acceleration sensor with nearly constant pretightening force in a full temperature region.
In order to realize the purpose, the technical scheme of the invention is as follows:
the piezoelectric acceleration sensor comprises a shell, a base, a mass block, piezoelectric sensitive elements, a bolt, a nut and a bolt pad, wherein a central column is arranged on the base, the central column is provided with two opposite assembly base planes, the two assembly base planes are provided with first through holes, the piezoelectric sensitive elements are provided with second through holes corresponding to the first through holes, the mass block is provided with third through holes and fourth through holes corresponding to the first through holes, the fourth through holes face one side of the piezoelectric sensitive elements, the piezoelectric sensitive elements and the mass block are sequentially and symmetrically arranged on the two assembly base planes, electrode plates are arranged between the piezoelectric sensitive elements and the central column or between the mass block, the bolt pad is arranged at the head of the bolt and arranged in the third through hole, the bolt penetrates through the first through holes, the second through holes, the third through holes and the fourth through holes and is connected with the nut to provide a normal pretightening force fastening mass block, the piezoelectric sensitive elements, the central column and the bolt pad, the head of the bolt is a conical round table, the bolt pad is arranged on the shell, the base and the cavity formed by the piezoelectric sensitive elements and the bolt pad.
Preferably, the taper of the tapered circular truncated cone of the bolt is the same as the taper of the tapered through hole of the bolt pad.
Preferably, the thickness of the tapered circular truncated cone of the bolt is the same as the thickness of the bolt pad.
Preferably, a stepped structure is formed between the third through hole and the fourth through hole of the mass block, the depth of the third through hole is the same as that of the fourth through hole and the thickness of the bolt pad, the diameter of the third through hole is larger than that of the fourth through hole, and the diameter of the fourth through hole is equal to that of the first through hole and that of the second through hole.
Preferably, the surface of the mass facing the piezoelectric sensor has an area greater than or equal to the area of the surface of the piezoelectric sensor in contact with the mass.
Preferably, the piezoelectric sensing element comprises piezoelectric ceramics or piezoelectric crystals, and the two side surfaces of the piezoelectric sensing element are provided with thin film layers.
Preferably, the piezoelectric sensing elements are square, the number of the piezoelectric sensing elements is 2-6, the piezoelectric sensing elements are symmetrically distributed on two sides of the central column, and when the number of the used piezoelectric sensing elements is more than 2, two adjacent piezoelectric sensing elements on one side of the central column are connected in parallel in a mode of opposite polarity.
Preferably, the electrode sheet is a platinum metal sheet or a nickel metal sheet, and the contact area of the electrode sheet and the contact area of the piezoelectric sensitive element are the same.
Preferably, the bottom of the shell is provided with a stepped hole, and the base is clamped on the stepped hole and connected in a laser welding mode.
Preferably, during the temperature variation, the relationship between the normal pretightening force of the piezoelectric acceleration sensor and the physical parameters of the bolt pad and the material is as follows:
wherein, P t Normal pretightening force at high temperature, P normal pretightening force at normal temperature, delta t temperature change, k slope of SR linear equation, b intercept of SR linear equation on Z axis, r radius of taper through hole of bolt pad, and alpha 1 Is the coefficient of thermal expansion, alpha, of the piezo-sensitive element in the Z direction 2 Is the coefficient of thermal expansion, α, of the mass 3 Is the coefficient of thermal expansion of the bolt pad, α 4 Is the coefficient of thermal expansion of the bolt, /) 1 Is the thickness of the piezoelectric sensor, /) 2 Is the thickness of the mass between the piezoelectric sensor and the bolt pad, K 1 、K 2 、K 3 、K 4 The normal stiffness of the bolt, bolt pad, piezoelectric sensing element and mass.
Compared with the prior art, the invention has the following beneficial effects:
(1) The piezoelectric acceleration sensor pre-tightened at the nearly constant temperature in the full working temperature region can realize the micro change of the pre-tightening force of the piezoelectric acceleration sensor in the full working temperature region from room temperature to high temperature, thereby improving the performances of the piezoelectric acceleration sensor such as linearity, shock resistance and the like at the high temperature and reducing the sensitivity temperature drift of the piezoelectric acceleration sensor in the full working temperature region.
(2) The piezoelectric acceleration sensor with the nearly constant pre-tightening in the full working temperature region has a simple structure and is tightly matched, the performance reduction of the sensor caused by the pre-tightening force attenuation caused by the temperature rise can be relieved, and the service performance of the piezoelectric acceleration sensor in a high-temperature environment is improved.
(3) The near-constant pre-tightening piezoelectric acceleration sensor in the full working temperature region provided by the invention has the advantages that the bolt pre-tightening force of the acceleration sensor is kept consistent with the initial pre-tightening force as much as possible along with the temperature rise through the design of structures such as the bolt pad and the like, so that the influence of a force-thermal coupling field on the piezoelectric constant of the piezoelectric sensitive element is eliminated, the sensitivity temperature drift of the sensor is consistent with the temperature drift of the piezoelectric constant of the piezoelectric sensitive element, in addition, the near-constant pre-tightening force in the full working temperature region is kept, the linearity of the piezoelectric acceleration sensor can be kept consistent with that at room temperature, the linearity deterioration caused by the pre-tightening force change caused by the temperature rise is avoided, the high-temperature performance of the piezoelectric acceleration sensor is improved by controlling the pre-tightening force change, and the improvement method is simple and reliable.
Drawings
The accompanying drawings are included to provide a further understanding of the embodiments and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments and together with the description serve to explain the principles of the invention. Other embodiments and many of the intended advantages of embodiments will be readily appreciated as they become better understood by reference to the following detailed description.
FIG. 1 is a schematic diagram of a piezoelectric acceleration sensor with a full-temperature-range near-constant pre-tightening force according to an embodiment of the present disclosure;
fig. 2 is a schematic cross-sectional view of a piezoelectric acceleration sensor with a near-constant pre-tightening force in a full temperature range according to an embodiment of the present disclosure;
FIG. 3 is a top view of an assembly over a base of a full-temperature-zone near-constant pre-load piezoelectric acceleration sensor according to an embodiment of the present disclosure;
FIG. 4 is a schematic diagram of a bolt of a piezoelectric acceleration sensor with near-constant pre-tightening force in a full temperature range according to an embodiment of the present disclosure;
fig. 5 is a schematic diagram of a bolt pad of a piezoelectric acceleration sensor with a near-constant pre-tightening force in a full temperature region according to an embodiment of the present application;
fig. 6 is a schematic diagram of thermal compensation of a bolt pad for realizing near-constant pre-tightening in the full temperature region of the piezoelectric acceleration sensor of the near-constant pre-tightening force in the full temperature region according to the embodiment of the present application;
FIG. 7 is a graph of variation of bolt pretension with temperature of a full-temperature-zone near-constant pretension piezoelectric acceleration sensor according to an embodiment of the present application;
reference numerals: 1. a housing; 2. a mass block; 3. a piezoelectric sensing element; 4. an electrode sheet; 5. a bolt pad; 6. a nut; 7. a central column; 8. a base; 9. and (4) bolts.
Detailed Description
The present application will be described in further detail with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention. It should be noted that, for convenience of description, only the portions related to the related invention are shown in the drawings.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
Referring to fig. 1 to 6, in an embodiment of the present invention, a piezoelectric acceleration sensor with a near-constant pre-tightening force in a full temperature region is provided, and includes a housing 1, a base 8, a mass block 2, a piezoelectric sensing element 3, a bolt 9, a nut 6, and a bolt pad 5, where a center column 7 is disposed on the base 8, and two opposite assembly base planes are disposed on the center column 7, specifically, the base 8 and the center column 7 are integrally formed, a joint between the base 8 and the center column 7 is a rounded angle, and the assembly base plane of the center column 7 is a rectangle. The two assembly base planes are provided with first through holes, the piezoelectric sensing element 3 is provided with second through holes corresponding to the first through holes, the mass block 2 is provided with third through holes and fourth through holes corresponding to the first through holes, the fourth through holes face one side of the piezoelectric sensing element 3, the third through holes are arranged on the other side, the first through holes, the second through holes, the third through holes and the fourth through holes have the same axle center, the diameter of the third through holes is larger than that of the fourth through holes, the diameter of the fourth through holes is equal to that of the first through holes and the second through holes, and the piezoelectric sensing element 3 and the mass block 2 are conveniently assembled on the assembly base planes on two sides of the central column 7. The piezoelectric sensing elements 3 and the mass blocks 2 are sequentially and symmetrically arranged on the two assembly base surfaces, specifically, the piezoelectric sensing elements 3 are firstly arranged on the assembly base surfaces on the two sides of the center column 7, the mass blocks 2 are arranged on the side surfaces of the piezoelectric sensing elements 3, electrode plates 4 are arranged between every two adjacent piezoelectric sensing elements 3 and between the piezoelectric sensing elements 3 and the center column 7 or between the piezoelectric sensing elements 2, so that the piezoelectric sensing elements 3 are enabled to be output in parallel, and the piezoelectric sensing elements 3, the mass blocks 2, the electrode plates 4 and the center column 7 are assembled together through bolts 9, bolt pads 5 and nuts 6. The bolt pad 5 is installed at the head of the bolt 9 and installed in the third through hole, the bolt 9 penetrates through the first through hole, the second through hole, the third through hole and the fourth through hole and is connected with the nut 6 to provide normal pretightening force to fasten the mass block 2, the piezoelectric sensing element 3, the central column 7 and the bolt pad 5, the head of the bolt 9 is a conical circular truncated cone, the bolt pad 5 is provided with a conical through hole matched with the conical circular truncated cone, namely, the conical degree of the conical circular truncated cone of the bolt 9 is the same as that of the conical through hole of the bolt pad 5, the conical circular truncated cone is clamped in the conical through hole, in the temperature change process, the normal pretightening force between the bolt 9 and the mass block 2, between the piezoelectric sensing element 3 and between the central column 7 is changed through the volume changes of the bolt pad 5, the bolt 9, the mass block 2, between the piezoelectric sensing element 3 and between the central column 7, so that the normal pretightening force is approximately consistent in the temperature change process, and the bolt pad 5 is adopted for thermal compensation, so that the bolt 9 nearly constant pretightening force in the full temperature range is realized. The base 8 is installed on the shell 1, and center post 7, quality piece 2, piezoelectricity sensing element 3, bolt 9, nut 6 and bolt pad 5 are located in the cavity that forms between shell 1 and the base 8, and is specific, and the bottom of shell 1 is equipped with the shoulder hole, and 8 blocks of base are on the shoulder hole to adopt the laser welding mode to connect, realize piezoelectric acceleration sensor's encapsulation. In the preferred embodiment, the housing 1 is mounted in a triangular manner, which increases the reliability of the piezoelectric acceleration sensor.
In a specific embodiment, referring to fig. 4 and 5, the head of the bolt 9 is machined into a tapered circular truncated cone with a certain taper, the center of the bolt pad 5 is also machined into a tapered through hole with a certain taper, the tapers of the two are the same, and the thickness of the tapered circular truncated cone of the bolt 9 is the same as that of the bolt pad 5. The conical frustum of the bolt 9 is fully embedded in the conical through hole of the bolt pad 5, and the assembled conical frustum of the bolt 9 and the bolt pad 5 can be received in the third through hole.
In a specific embodiment, a stepped structure is formed between the third through hole and the fourth through hole of the mass block 2, the depth of the third through hole is the same as that of the fourth through hole and the thickness of the bolt pad 5, one side of the bolt pad 5 abuts against the bottom of the conical circular truncated cone of the bolt 9, and the other side abuts against the stepped structure. And a gap is formed between the side edge of the bolt pad 5 and the inner wall of the third through hole. The area of the surface of the mass block 2 facing the piezoelectric sensing element 3 is larger than or equal to the area of the surface of the piezoelectric sensing element 3 contacting with the mass block 2, so that the piezoelectric sensing element 3 can be completely attached to the mass block 2.
In a specific embodiment, the piezoelectric sensing element 3 comprises piezoelectric ceramics or piezoelectric crystals, and both side surfaces of the piezoelectric sensing element 3 are provided with thin film layers. In a preferred embodiment, the film layer is a platinum film, the piezoelectric sensing element 3 is coated with a platinum film with a certain thickness on both sides before use, and the piezoelectric sensor works by using a shear piezoelectric constant. Specifically, the piezoelectric acceleration sensor is of a shear type structure, the piezoelectric sensing elements 3 are square, the number of the piezoelectric sensing elements is 2-6, the piezoelectric sensing elements are symmetrically distributed on two sides of the central column 7, and when the number of the used piezoelectric sensing elements 3 is larger than 2, two adjacent piezoelectric sensing elements 3 on one side of the central column 7 are connected in parallel in a mode of opposite polarity.
In a specific embodiment, the electrode sheet 4 is a platinum metal sheet or a nickel metal sheet, and has the same contact area with the piezoelectric sensing element 3. The size of the electrode plate 4 is the same as that of the piezoelectric sensitive element 3, and the electrode plate is obtained by laser cutting and forming.
In a specific embodiment, the nearly constant pre-tightening of the piezoelectric acceleration sensor can be realized by adjusting the size of the bolt pad 5 and selecting different materials, and by realizing the nearly constant pre-tightening of the whole temperature region of the piezoelectric acceleration sensor, the performance (such as linearity, impact resistance and the like) reduction of the piezoelectric acceleration sensor caused by the pre-tightening force attenuation caused by the temperature rise is relieved, the sensitivity temperature drift of the sensor caused by the severe change of a force-thermal coupling field is reduced, and the service performance of the piezoelectric acceleration sensor in a high-temperature environment is improved. Referring to fig. 6, the relationship between the normal pretension of the piezoelectric acceleration sensor and the dimensions of the bolt pad 5 and the physical parameters of the material during temperature changes is:
wherein, P t Normal pretightening force at high temperature, P normal pretightening force at normal temperature, delta t temperature change, k slope of SR linear equation, b intercept of SR linear equation on Z axis, r radius of bottom hole of tapered through hole of bolt pad 5, and alpha 1 Is the coefficient of thermal expansion, alpha, of the piezo-sensitive element 3 in the Z direction 2 Is the coefficient of thermal expansion, α, of the mass 2 3 Is the coefficient of thermal expansion, alpha, of the bolt pad 5 4 Is the coefficient of thermal expansion of the bolt 9, /) 1 Thickness (FI), l of the piezoelectric sensing element 3 2 Thickness (IJ), K of the mass 2 between the piezo sensor 3 and the bolt pad 5 1 、K 2 、K 3 、K 4 Is the normal stiffness of the bolt 9, the bolt pad 5, the piezo-sensitive element 3 and the mass 2. Therefore, the bolt 9 in the whole temperature range can be pre-tightened nearly constantly by designing the size of the bolt pad 5 and selecting a proper material of the bolt pad 5.
In one embodiment, if the piezoelectric sensor has a coefficient of thermal expansion α 1 =12.8 ppm/DEG C, thickness l 1 ＝1.2mm，l 2 When the coordinates of the T point and the S point are (2, 3.7) and (2.5, 6.2), a TS linear equation can be obtained according to the coordinates of the T point and the S point, and the TS linear equation and the SR linear equation are the same because TS and SR are collinear, so that k =5,b = -6.3 of the SR linear equation can be obtained, and the thermal expansion coefficient alpha of the alloy of other parts of the sensor is alpha 2 ＝α 3 ＝α 4 ＝17.8ppm/℃，k＝2.5，b＝-1.6e-3，K 1 ＝1.0169e10N/m，K 2 ＝1.663e8N/m，K 3 ＝1.553e10 N/m，K 4 In the case of =2.0508e9N/m, the change of the bolt pretightening force along with the temperature is shown in FIG. 7, and it can be seen that the bolt pretightening force changes by less than 10% when the temperature changes from room temperature to 900 ℃, but because the elasticity coefficient of the material is reduced in the actual process to reduce the rigidity of the material, the change of the bolt pretightening force in the actual process is slightly larger than that of the design, so that the near constant pretightening force can be realized in the whole temperature region. In other embodiments, it may be adjusted to specific situations.
While the present invention has been described with reference to the preferred embodiments, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined by the appended claims. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. The piezoelectric acceleration sensor is characterized by comprising a shell, a base, a mass block, piezoelectric sensitive elements, bolts, nuts and bolt pads, wherein the base is provided with a center column, the center column is provided with two opposite assembly base planes, the two assembly base planes are provided with first through holes, the piezoelectric sensitive elements are provided with second through holes corresponding to the first through holes, the mass block is provided with third through holes and fourth through holes corresponding to the first through holes, the fourth through holes face one side of the piezoelectric sensitive elements, the piezoelectric sensitive elements and the mass block are sequentially and symmetrically arranged on the two assembly base planes, electrode plates are arranged between the adjacent two piezoelectric sensitive elements and between the piezoelectric sensitive elements and the center column or the mass block, the bolt pads are arranged at the head of the bolts and arranged in the third through holes, the bolts penetrate through the first through holes, the second through holes, the third through holes and the fourth through holes and are connected with the nuts so as to provide normal fastening mass blocks, the piezoelectric sensitive elements, the center columns and the bolt pads, the heads of the bolts are conical round platforms, the bolt pads are arranged on the conical through holes matched with the conical bolt pads, the shell, the base and the piezoelectric sensitive elements and the bolt pads.
2. The near-constant pre-tightening force piezoelectric acceleration sensor of the full-temperature region according to claim 1, characterized in that the taper of the tapered circular truncated cone of the bolt is the same as the taper of the tapered through hole of the bolt pad.
3. The near-constant pre-tightening force piezoelectric acceleration sensor of the full-temperature region of claim 1, wherein the thickness of the conical round table of the bolt is the same as the thickness of the bolt pad.
4. The piezoelectric acceleration sensor with the near-constant pretightening force in the full temperature range according to claim 1, wherein a stepped structure is formed between a third through hole and a fourth through hole of the mass block, the depth of the third through hole is the same as that of the fourth through hole and the thickness of the bolt pad, the diameter of the third through hole is larger than that of the fourth through hole, and the diameter of the fourth through hole is equal to that of the first through hole and that of the second through hole.
5. The piezoelectric acceleration sensor of near-constant pretightening force within the full temperature range of claim 1, wherein the surface of the mass facing the piezoelectric sensor has an area greater than or equal to the area of the surface of the piezoelectric sensor in contact with the mass.
6. The piezoelectric acceleration sensor of near-constant pretightening force in a full temperature region according to claim 1, wherein the piezoelectric sensing element comprises piezoelectric ceramics or piezoelectric crystals, and both side surfaces of the piezoelectric sensing element are provided with thin film layers.
7. The piezoelectric acceleration sensor of near-constant pretightening force in the full-temperature region of claim 1, wherein the piezoelectric sensing elements are square, the number of the piezoelectric sensing elements is 2-6, the piezoelectric sensing elements are symmetrically distributed on two sides of the central column, and when the number of the used piezoelectric sensing elements is more than 2, two adjacent piezoelectric sensing elements on one side of the central column are connected in parallel in a polarity-opposite mode.
8. The near-constant pretightening force piezoelectric acceleration sensor in the full temperature region of claim 1, wherein the electrode sheet is a platinum metal sheet or a nickel metal sheet, and the contact area of the electrode sheet and the piezoelectric sensitive element is the same.
9. The piezoelectric acceleration sensor with the near-constant pretightening force in the full temperature range according to claim 1, wherein a stepped hole is formed in the bottom of the housing, and the base is clamped on the stepped hole and connected in a laser welding mode.
10. The piezoelectric acceleration sensor of near-constant pretightening force of full-temperature region according to claim 1, wherein the relationship between the normal pretightening force of the piezoelectric acceleration sensor and the size of the bolt pad and the physical parameters of the material during the temperature variation is as follows:
wherein, P t Normal pretightening force at high temperature, P normal pretightening force at normal temperature, delta t is temperature change, k is slope of SR linear equation, b is intercept of SR linear equation on Z axis, r is radius of tapered through hole of bolt pad, and alpha 1 Is the coefficient of thermal expansion, alpha, of the piezo-sensitive element in the Z direction 2 Is the coefficient of thermal expansion, α, of the mass 3 Is the coefficient of thermal expansion of the bolt pad, α 4 Is the coefficient of thermal expansion of the bolt,/ 1 Is the thickness of the piezoelectric sensor, /) 2 Is the thickness of the mass between the piezoelectric sensor and the bolt pad, K 1 、K 2 、K 3 、K 4 The normal stiffness of the bolt, the bolt pad, the piezoelectric sensing element and the mass block.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211563901.2A CN115792276A (en) | 2022-12-07 | 2022-12-07 | Piezoelectric acceleration sensor with near-constant pretightening force in full temperature region |
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| CN202211563901.2A CN115792276A (en) | 2022-12-07 | 2022-12-07 | Piezoelectric acceleration sensor with near-constant pretightening force in full temperature region |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116046029A (en) * | 2023-03-27 | 2023-05-02 | 成都凯天电子股份有限公司 | Temperature drift compensation structure of piezoelectric mechanical sensor and compensation method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116046029A (en) * | 2023-03-27 | 2023-05-02 | 成都凯天电子股份有限公司 | Temperature drift compensation structure of piezoelectric mechanical sensor and compensation method thereof |
| CN116046029B (en) * | 2023-03-27 | 2023-07-14 | 成都凯天电子股份有限公司 | Temperature drift compensation structure of piezoelectric mechanical sensor and compensation method thereof |
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