CN115791625A - Light path system applied to particle size and particle shape analysis of metal micro-particles - Google Patents
Light path system applied to particle size and particle shape analysis of metal micro-particles Download PDFInfo
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- CN115791625A CN115791625A CN202310043700.8A CN202310043700A CN115791625A CN 115791625 A CN115791625 A CN 115791625A CN 202310043700 A CN202310043700 A CN 202310043700A CN 115791625 A CN115791625 A CN 115791625A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract
The invention provides a light path system applied to metal particulate particle size and particle shape analysis, and relates to the technical field of metal particulate particle light path measurement.
Description
Technical Field
The invention relates to the technical field of light path measurement of metal particles, in particular to a light path system applied to particle size and particle shape analysis of metal micro-particles.
Background
In production and laboratory analysis, detecting the content and the particle size of metal microparticles in a microparticle material is becoming a concern of production and scientific research personnel, and the existing scheme can only be realized by a mode of pre-separating magnetic metal particles by a magnetic separation technology and then measuring the magnetic metal particles.
The problems in the above documents for the analysis of the particle size of the metal particles are:
the first problem is that when the metal particles are analyzed by utilizing the properties of metal in a magnetic absorption mode, non-magnetic metal particles such as copper metal particles cannot be absorbed by magnetic absorption;
second, the process of magnetic particle pre-separation increases the complexity of the experiment, and the improper pre-separation operation may result in the loss of magnetic particles, thereby affecting the experimental result.
Disclosure of Invention
Solves the technical problem
Aiming at the defects of the prior art, the invention provides the optical path system applied to the particle size and shape analysis of the metal micro-particles, which solves the problem of incompatibility of a magnetic suction mode 1 and a magnetic suction mode, utilizes the optical properties of the metal particles to distinguish, and has wide coverage range; 2. the magnetic attraction analysis mode is complex, the light path is utilized for integration and distinguishing, the structure is simple, the time is shortened, and the efficiency is improved.
Technical scheme
In order to achieve the purpose, the invention is realized by the following technical scheme: the utility model provides a be applied to light path system of metal particulate matter granularity grain shape analysis, includes lens group and sample granule main part, lens group surface one end is equipped with image sensor, the one end that image sensor was kept away from to the lens group is equipped with the circular polarization lens, the circular polarization lens side is connected and is equipped with the polarization lens driver, circular polarization lens bottom is equipped with the beam splitter, beam splitter one side is equipped with preceding light source, the beam splitter bottom surface is equipped with carries the glass board, carry the glass board surface to place and be equipped with the sample granule main part, it is equipped with the light source dorsad to carry the glass board bottom, image sensor, lens group, circular polarization lens, beam splitter, carry the glass board, dorsad light source, sample granule main part, preceding light source and polarization lens driver constitute whole system architecture.
Preferably, the method of analysis of the bulk of the sample particles in the system is as follows:
sp1: the method comprises the following steps of preparing system equipment, wherein the preparation of the system equipment is to adjust the positions of lenses connected with a lens group in a system, place a sample particle main body to be detected on the surface of a glass carrying plate and wait for analysis and detection;
sp2: screening a sample particle main body, namely screening images aiming at the light transmittance, reflectivity and surface texture characteristics of the sample particle main body;
sp3: the method comprises the steps of (1) light transmission primary screening of a sample particle main body, wherein the light transmission primary screening of the sample particle main body is to select a pulse starting mode to turn on a back light source and turn off a front light source, parallel light penetrates through the sample particle main body, imaging is carried out in an image sensor, and light transmission particles and light non-transmission particles in the sample particle main body are distinguished through imaging;
sp4: screening reflected light of the sample particle main body, wherein the reflected light of the sample particle main body is screened by selecting a pulse turn-on mode to turn on a forward light source and turn off a backward light source, the forward light source is reflected by a light splitting plate to irradiate the sample particle main body to generate diffuse reflection, the reflected light penetrates through the light splitting plate and enters a lens group through a circular polarized lens to be imaged in an image sensor, at the moment, a polarized lens driver drives the circular polarized lens to rotate at a constant speed, the diffuse reflection light intensity on the surface of the sample particle main body is almost constant, but the specular reflection light intensity can be changed periodically;
sp5: screening the texture characteristics of a sample particle main body, wherein a pulse starting mode is adopted for screening the texture characteristics of the sample particle main body, a forward light source and a backward light source are simultaneously started, and a circular polarized lens is driven by a polarized lens driver to rotate to an angle, so that transmitted light and reflected light are mixed in a certain proper proportion and enter a lens group image sensor for imaging;
sp6: and (4) analyzing and identifying the sample particle body, wherein the analysis and identification of the sample particle body are to calculate and classify characteristic parameters after the image displayed by the sample particle body in Sp3, sp4 and Sp5 is processed by a computer.
Preferably, the vertical central line of the lens group, the vertical central line of the image sensor, the vertical central line of the glass carrying plate and the vertical central line facing away from the light source coincide with each other.
Preferably, the beam splitter is installed in an inclined mode, the included angle between the top end of the beam splitter and the bottom end of the beam splitter is 45 degrees, and the horizontal straight line where the center of the beam splitter is located coincides with the horizontal center line of the forward light source.
Preferably, the image sensor is specifically a CCD image sensor or a CMOS image sensor.
Preferably, the back light source in the preliminary screening of the sample particle body is preferably a blue collimated light source.
Advantageous effects
The invention provides an optical path system applied to particle size and particle shape analysis of metal micro-particles. The method has the following beneficial effects:
1. the invention adopts a light path generated by combining a forward light source and a backward light source in a multi-mode way, irradiates a sample particle main body placed on the surface of a glass carrying plate, images through a lens group and an image sensor, distinguishes the sample particle main body through the optical characteristics of transparency, reflection and surface texture of the sample particle main body, is used in matched particle size shape analysis equipment, directly determines the material and particle size shape parameters of each particle, has high adaptability, reduces the error of test data and improves the experiment efficiency.
2. The invention adopts the mode of forming the light path to irradiate the sample particle main body after the multi-mode combination of the forward light source and the backward light source to distinguish the sample particle main body, and utilizes the optical characteristics of the surface of the sample particle main body to distinguish the metal content of the sample particle main body, the outline shape of the metal particles and the granularity particle shape parameters.
Drawings
FIG. 1 is a block diagram of the system of the present invention;
FIG. 2 is a diagram of a system method of the present invention.
Wherein: 1. an image sensor; 2. a lens group; 3. a circularly polarized lens; 4. a light splitting plate; 5. a glass carrying plate; 6. a back-facing light source; 7. a sample particle body; 8. a forward light source; 9. a polarized lens driver.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The first embodiment is as follows:
as shown in fig. 1-2, a light path system for analyzing the particle size and shape of metal micro particles, includes a lens set 2 and a sample particle main body 7, an image sensor 1 is disposed at one end of the surface of the lens set 2, a circular polarized lens 3 is disposed at one end of the lens set 2 away from the image sensor 1, a polarized lens driver 9 is connected to a side surface of the circular polarized lens 3, a beam splitter 4 is disposed at a bottom end of the circular polarized lens 3, a forward light source 8 is disposed at one side of the beam splitter 4, a glass carrier 5 is disposed at a bottom surface of the beam splitter 4, a sample particle main body 7 is disposed on the surface of the glass carrier 5, a backward light source 6 is disposed at the bottom of the glass carrier 5, the image sensor 1, the lens set 2, the circular polarized lens 3, the beam splitter 4, the glass carrier 5, the backward light source 6, the sample particle main body 7, the forward light source 8 and the lens polarization driver 9 constitute an entire system structure, a light path is generated after multi-mode combination of the forward light source 8 and the backward light source 6, the sample particle main body 7 is irradiated and imaged through the lens set 2 and the image sensor 1, the sample particle main body 7 is distinguished through the transparent characteristics of the sample particle main body 7, a reflected light and a surface, the optical characteristics of the sample particle size and a grain analysis device is used for directly determining the particle analysis, and analyzing efficiency of the sample particle size and particle size, and for directly determining the sample particle size and determining the particle size and particle analysis device, and for directly determining the particle size and increasing the particle size and particle analysis efficiency of the sample particle analysis.
Each restriction structure is the vertical central line of lens group 2 among the entire system, the vertical central line of image sensor 1, carry the vertical central line of glass board 5 and coincide mutually to the vertical central line of light source 6 dorsad, 4 oblique installations of beam-splitting board, and the contained angle of 4 tops of beam-splitting board and bottom is 45 degrees, the horizontal straight line at 4 centers of beam-splitting board coincides mutually with the horizontal central line of preceding light source 8, through the coincidence of the vertical central line of each structure, make the optic fibre that 6 sent dorsad light source pass in proper order carry glass board 5, sample granule main part 7, inside beam-splitting board 4 and circular polarization lens 3 entering lens group 2, and image through image sensor 1, the transmission path of light shortens greatly, reduce the loss of light transmission, improve light transmission efficiency, thereby increase the rapid analysis to sample granule main part 7.
The second embodiment is as follows:
as shown in fig. 1-2, the analysis method for the sample particle body 7 in the system is as follows:
sp1: preparing system equipment, namely adjusting the positions of lenses connected with the lens group 2 in the system, placing a sample particle main body 7 to be detected on the surface of the glass carrying plate 5, and waiting for analysis and detection;
sp2: screening the sample particle main body 7, wherein the screening of the sample particle main body 7 is to perform image screening aiming at the light transmittance, the reflectivity and the surface texture characteristics of the sample particle main body 7;
sp3: the method comprises the following steps of (1) carrying out light transmission primary screening on a sample particle main body 7, wherein the light transmission primary screening of the sample particle main body 7 is to select a pulse starting mode to turn on a back light source 6 and turn off a front light source 8, parallel light penetrates through the sample particle main body 7, imaging is carried out in an image sensor 1, and light transmission particles and light non-transmission particles in the sample particle main body 7 are distinguished through imaging;
sp4: screening reflected light of the sample particle main body 7, wherein the reflected light of the sample particle main body 7 is screened by selecting a pulse on mode to turn on a forward light source 8 and turn off a backward light source 6, the forward light source 8 is reflected by a light splitting plate 4 to irradiate the sample particle main body 7 to generate diffuse reflection, the reflected light penetrates through the light splitting plate 4 and enters a lens group 2 through a circular polarized lens 3 to be imaged in an image sensor 1, at the moment, a polarized lens driver 9 drives the circular polarized lens 3 to rotate at a constant speed, the intensity of the diffuse reflection on the surface of the sample particle main body 7 is almost constant, but the intensity of the specular reflection is changed periodically;
sp5: screening the texture characteristics of the sample particle main body 7, wherein the screening of the texture characteristics of the sample particle main body 7 adopts a pulse starting mode to simultaneously start the forward light source 8 and the backward light source 6, and the circular polarized lens 3 is driven by the polarized lens driver 9 to rotate to an angle, so that transmitted light and reflected light are mixed in a certain proper proportion and enter the image sensor 1 of the lens group 2 for imaging;
sp6: and analyzing and identifying the sample particle bodies 7, wherein the analyzing and identifying of the sample particle bodies 7 are to calculate and classify characteristic parameters after the images displayed by the sample particle bodies 7 in Sp3, sp4 and Sp5 are processed by a computer.
The back light source 6 in the preliminary screening of the sample particle main body 7 preferably uses a blue parallel light source, and the blue parallel light emitted by the back light source 6 during the light transmission preliminary screening of the sample particle main body 7 passes through the glass carrying plate 5, passes through the sample particle main body 7, then directly enters the lens group 2 through the light splitting plate 4 and the circular polarization lens 3, and is imaged in the sensor, so that the observation of the surface light transmission of the sample particle main body 7 is performed.
The third concrete example:
as shown in fig. 1-2, the sample particle main body 7 is generally classified into four types, i.e., transparent non-reflective, transparent and reflective, opaque non-reflective, and opaque reflective according to the material and surface characteristics, and the opaque and reflective material is generally classified into a metal material, so that opaque particles in the light transmission initial screening of the sample particle main body 7 can be rapidly screened out through combined imaging in three states and computer synthesis calculation, particles with periodic specular reflection light intensity exist under the screening of the reflected light of the sample particle main body 7, the screened metal particles can simultaneously display the outline and surface texture characteristics of the particles under the screening of the texture characteristics of the sample particle main body 7, and the purpose of identifying and analyzing the metal particles is achieved through computer image processing and further characteristic parameter calculation and classification.
The fourth concrete example:
as shown in fig. 1-2, the parallel light emitted by the forward light source 8 and the backward light source 6 can be replaced by other forms of light sources, such as a ring light for the forward light source 8 and a flat light source, a point light source, etc. for the backward light source 6.
The fifth concrete embodiment:
as shown in fig. 1-2, the circularly polarizing lens 3 can be implemented by other polarized lens, such as linearly polarized lens, and periodically or non-periodically changing the intensity of the specular reflection.
The sixth specific embodiment:
as shown in fig. 1-2, the image sensor 1, the lens group 2, the circularly polarizing lens 3, the beam splitter 4, the glass carrier plate 5, the back light source 6, the sample particle body 7, the forward light source 8, and the polarizing lens driver 9 in the whole system are all provided with corresponding fixing structures or supporting structures or adjusting structures at the time and outside during use, so as to maintain the stability and position correspondence of each structure in the system, and the specific structure type can be set according to the actual installation and use mode.
The seventh specific embodiment:
as shown in fig. 1-2, the image sensor 1 is specifically a CCD image sensor or a CMOS image sensor, specifically, the selection is based on that the CCD adopts one-by-one photosensitive output, which can only be output according to a prescribed program, the speed is slow, the CMOS has a plurality of charge-voltage converters and row-column switch control, the speed is much faster, in addition, the address strobe switch of the CMOS can sample randomly to realize sub-window output, higher speed can be obtained when only sub-window image is output, the CCD can only output analog electrical signals, which needs subsequent address decoder, analog converter, image signal processor processing, and three sets of power supply synchronous clock control circuits with different voltages, the integration level is very low, and the CMOS is integrated on a single material called metal oxide, which is the same as the process for producing semiconductor integrated circuits such as tens of thousands of computer chips and memory devices, so the cost of the sound field CMOS is much lower than that of the CCD, and the CMOS chip can only need to realize a basic camera function, and thus, all CMOS chip can be selected according to the actual image sensor type 1 or CMOS type.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising a reference structure" does not exclude the presence of other identical elements in the process, method, article, or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides an optical path system for analysis of metal particulate matter granularity grain shape, includes lens group (2) and sample granule main part (7), its characterized in that: lens group (2) surface one end is equipped with image sensor (1), the one end that image sensor (1) was kept away from in lens group (2) is equipped with circular polarization lens (3), circular polarization lens (3) side is connected and is equipped with polarization lens driver (9), circular polarization lens (3) bottom is equipped with beam splitter (4), beam splitter (4) one side is equipped with preceding light source (8), beam splitter (4) bottom surface is equipped with carries glass board (5), carry glass board (5) surface placement and be equipped with sample granule main part (7), carry glass board (5) bottom to be equipped with dorsad light source (6), image sensor (1), lens group (2), circular polarization lens (3), beam splitter (4), glass carries board (5), dorsad light source (6), sample granule main part (7), preceding light source (8) and polarization lens driver (9) constitute whole system architecture.
2. The optical path system applied to the particle size and shape analysis of the metal microparticles as claimed in claim 1, wherein: the method of analysis of the system for a body (7) of sample particles is as follows:
sp1: the method comprises the following steps of preparing system equipment, wherein the preparation of the system equipment is to adjust the positions of lenses connected with a lens group (2) in a system, place a sample particle main body (7) to be detected on the surface of a glass carrying plate (5) and wait for analysis and detection;
sp2: screening of the sample particle body (7), wherein the screening of the sample particle body (7) is image screening aiming at the light transmittance, reflectivity and surface texture characteristics of the sample particle body (7);
sp3: the method comprises the steps of (1) primarily screening light transmission of a sample particle main body (7), wherein the primarily screening light transmission of the sample particle main body (7) is realized by opening a back light source (6) and closing a front light source (8) in a pulse opening mode, parallel light penetrates through the sample particle main body (7), imaging is carried out in an image sensor (1), and light transmission and light-tight particles in the sample particle main body (7) are distinguished through imaging;
sp4: screening reflected light of a sample particle main body (7), wherein the reflected light of the sample particle main body (7) is screened by selecting a pulse starting mode to turn on a forward light source (8), turn off a backward light source (6), the forward light source (8) is reflected by a light splitting plate (4) to irradiate the sample particle main body (7) for diffuse reflection, the reflected light penetrates through the light splitting plate (4) and enters a lens group (2) through a circular polarized lens (3) to be imaged in an image sensor (1), at the moment, a polarized lens driver (9) drives the circular polarized lens (3) to rotate at a constant speed, the diffuse reflection light intensity on the surface of the sample particle main body (7) is almost constant, but the specular reflection light intensity can be changed periodically;
sp5: screening the textural features of the sample particle main body (7), wherein the textural features of the sample particle main body (7) are screened by simultaneously starting a forward light source (8) and a backward light source (6) in a pulse starting mode, and the circularly polarized lens (3) is driven by a polarized lens driver (9) to rotate to an angle, so that transmitted light and reflected light are mixed in a certain proper proportion and enter the image sensor (1) of the lens group (2) for imaging;
sp6: and (3) analyzing and identifying the sample particle body (7), wherein the analysis and identification of the sample particle body (7) are that after the image displayed by the sample particle body (7) in Sp3, sp4 and Sp5 is processed by a computer, characteristic parameter calculation and classification are carried out.
3. The optical path system applied to the particle size and shape analysis of the metal microparticles as claimed in claim 1, wherein: the vertical center line of the lens group (2), the vertical center line of the image sensor (1), the vertical center line of the glass carrying plate (5) and the vertical center line of the backlight source (6) are superposed with each other.
4. The optical path system applied to the particle size and shape analysis of the metal microparticles as claimed in claim 1, wherein: the light splitting plate (4) is obliquely installed, the included angle between the top end of the light splitting plate (4) and the bottom end of the light splitting plate is 45 degrees, and the horizontal straight line at the center of the light splitting plate (4) and the horizontal center line of the forward light source (8) coincide with each other.
5. The optical path system for analyzing the particle size and shape of metal microparticles as claimed in claim 1, wherein: the image sensor (1) is specifically a CCD image sensor or a CMOS image sensor.
6. The optical path system for analyzing the particle size and shape of metal microparticles according to claim 2, wherein: the back light source (6) in the primary screening of the sample particle main body (7) is preferably a blue parallel light source.
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB929104A (en) * | 1961-04-20 | 1963-06-19 | R W Gunson Seeds Ltd | Improvements relating to the sorting of translucent objects |
CN101477762A (en) * | 2009-01-19 | 2009-07-08 | 杭州电子科技大学 | Method for generating granule substance micro-gravity environment and apparatus thereof |
CN102834689A (en) * | 2010-04-01 | 2012-12-19 | 新日本制铁株式会社 | Particle measuring system and particle measuring method |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB929104A (en) * | 1961-04-20 | 1963-06-19 | R W Gunson Seeds Ltd | Improvements relating to the sorting of translucent objects |
US3197647A (en) * | 1961-04-20 | 1965-07-27 | Gunsons Sortex Ltd | Photosensitive apparatus for sorting translucent objects |
CN101477762A (en) * | 2009-01-19 | 2009-07-08 | 杭州电子科技大学 | Method for generating granule substance micro-gravity environment and apparatus thereof |
CN102834689A (en) * | 2010-04-01 | 2012-12-19 | 新日本制铁株式会社 | Particle measuring system and particle measuring method |
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