CN115783319A - Ultrahigh vacuum low-temperature sample transfer operation experiment system - Google Patents
Ultrahigh vacuum low-temperature sample transfer operation experiment system Download PDFInfo
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- CN115783319A CN115783319A CN202211727397.5A CN202211727397A CN115783319A CN 115783319 A CN115783319 A CN 115783319A CN 202211727397 A CN202211727397 A CN 202211727397A CN 115783319 A CN115783319 A CN 115783319A
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- 238000002474 experimental method Methods 0.000 title claims abstract description 30
- 238000012546 transfer Methods 0.000 title claims abstract description 22
- 238000005057 refrigeration Methods 0.000 claims abstract description 10
- 239000000523 sample Substances 0.000 claims description 62
- 230000001105 regulatory effect Effects 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000003860 storage Methods 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 238000002955 isolation Methods 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 238000010998 test method Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 6
- 238000004088 simulation Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 4
- 238000012795 verification Methods 0.000 description 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 241000282414 Homo sapiens Species 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The invention discloses an ultrahigh vacuum low-temperature sample transfer operation experiment system which comprises a micro-operation vacuum cavity main system unit, a sample refrigeration and temperature control unit, a parameter reading unit, a vacuum equipment control unit and an experiment unit. The micro-manipulation vacuum cavity main system unit comprises a micro-manipulation vacuum cavity body, a magnetic drive ultrahigh vacuum mechanical arm, and a vacuum low-temperature sample stage and a vacuum low-temperature bearing stage which are arranged in the cavity body. The vacuum equipment control unit, the sample refrigeration and temperature control unit and the parameter reading unit can enable the sample to be tested to reach a vacuum and low-temperature state. And transferring the sample to be tested to the instrument to be tested by the ultrahigh vacuum mechanical arm. Thereby completing the transfer operation experiment of the ultrahigh vacuum and low temperature sample.
Description
Technical Field
The invention relates to an ultrahigh vacuum low-temperature sample transfer operation experiment system and an experiment method.
Background
Deep space exploration is an important way for human beings to develop and utilize space resources, and to carry out space science and technical innovation. The reliability verification effect of the space load is determined by the integrity requirement of the ground simulation experiment condition. The detection of water and volatile components in the permanent shadow area of the moon becomes one of the important contents of the subsequent tasks of moon detection in China. However, at present, no vacuum and low-temperature experimental verification platform for simulating the lunar polar region of the load experiment unit exists.
Disclosure of Invention
In order to solve the technical problems, an ultrahigh vacuum low-temperature sample transfer operation experiment system and an ultrahigh vacuum low-temperature sample transfer operation experiment method are provided. The system comprises a micro-operation vacuum cavity main system unit, a sample refrigeration and temperature control unit, a parameter reading unit, a vacuum equipment control unit and an experiment unit.
Also provides an experimental method for the ultra-high vacuum low-temperature sample transfer operation, which comprises the following steps:
the first step is as follows: placing a low-temperature sample to be detected in a sample box;
the second step: starting a vacuum equipment control unit, setting a vacuum threshold parameter P1 of an experimental system, and reading whether a vacuum pressure reading module reaches the vacuum threshold parameter P1;
the third step: and starting the sample refrigeration and temperature control unit, and opening the low-temperature regulating valve. Setting a temperature parameter T1 of the low-temperature sample, reading a first temperature probe and judging whether the temperature reaches the set temperature T1;
the fourth step: starting a coil heating unit in the vacuum low-temperature bearing table, setting a bearing temperature parameter T2, reading a second temperature probe and judging whether the temperature reaches the set temperature T2;
the fifth step: and clamping the low-temperature sample by using a vacuum mechanical arm, placing the low-temperature sample in an experiment unit, and starting an experiment unit test program. And storing experimental data in real time;
and a sixth step: the low temperature vacuum experiment was ended.
The invention has the beneficial effects that: the invention provides a method for completing the whole-process reliability verification of sample simulation, transfer and test of space load in-situ test by taking vacuum and low-temperature sample simulation and vacuum low-temperature sample transfer as technical means.
Drawings
FIG. 1: the overall schematic diagram of the ultra-high vacuum low-temperature sample transfer operation experiment system;
FIG. 2: an experiment general flow chart of the ultra-high vacuum low-temperature sample transfer operation experiment system.
Detailed Description
The invention relates to an ultrahigh vacuum low-temperature sample transfer operation experimental system, which is characterized in that: the system comprises a micro-operation vacuum cavity main system unit, a sample refrigeration and temperature control unit, a parameter reading unit, a vacuum equipment control unit and an experiment unit. Wherein:
the micro-manipulation vacuum cavity main system unit comprises a micro-manipulation vacuum cavity body and a magnetic drive ultrahigh vacuum mechanical arm, and a vacuum low-temperature sample stage and a vacuum low-temperature bearing stage 1 are arranged in the cavity body. The sample refrigeration and temperature control unit comprises a low-temperature storage tank, a low-temperature regulation pipeline and a low-temperature fluid conveying pipeline. One end of the low-temperature regulating valve is arranged above the low-temperature storage tank and is in threaded sealing connection, and the other end of the low-temperature regulating valve is connected with the vacuum low-temperature sample stage through a low-temperature fluid conveying pipeline and the micro-operation vacuum cavity penetrating bin;
the parameter reading unit comprises an image acquisition module, a cavity internal temperature reading module and a vacuum pressure reading module. The module uploads the pressure parameter, the temperature parameter and the image parameter to an upper computer;
the vacuum equipment control unit comprises a primary pump group and a high vacuum pump group. The primary pump set is connected with a high vacuum pump set pipeline, and the high vacuum pump set is connected with the micro-operation vacuum cavity flashboard isolation valve.
The vacuum low-temperature sample stage is provided with a sample box, and the outer wall of the sample box is provided with a first temperature probe. The vacuum low-temperature bearing platform is connected with the cryogenic fluid conveying pipeline in a cabin-penetrating manner, and a heat-conducting copper strip is arranged at the end close to the bearing platform. Be provided with coil pipe heating unit in the plummer, be provided with second temperature probe on the plummer up end.
The magnetic force driving ultrahigh vacuum mechanical arm is connected with a vacuum flange of the micro-manipulation vacuum cavity, the vacuum low-temperature bearing table is connected with a vacuum transmission rod through a flange, and the vacuum transmission rod is connected with the X-Y-Z motor and can drive the low-temperature bearing table to translate and rotate.
For the ultra-high vacuum low temperature sample transfer operation experiment, the specific flow is as follows:
the first step is as follows: placing a low-temperature sample to be detected in a sample box;
the second step: starting a vacuum equipment control unit, setting a vacuum threshold parameter P1 of the experimental system, and reading whether a vacuum pressure reading module reaches the vacuum threshold parameter P1;
the third step: and starting the sample refrigeration and temperature control unit, and opening the low-temperature regulating valve. Setting a temperature parameter T1 of the low-temperature sample, reading a first temperature probe and judging whether the temperature reaches the set temperature T1;
the fourth step: starting a coil heating unit in the vacuum low-temperature bearing table, setting a bearing temperature parameter T2, reading a second temperature probe and judging whether the temperature reaches the set temperature T2;
the fifth step: and clamping the low-temperature sample by using a vacuum mechanical arm, placing the low-temperature sample in an experiment unit, and starting a test program of the experiment unit. And storing experimental data in real time;
and a sixth step: the low temperature vacuum experiment was ended.
The invention has the beneficial effects that: the invention provides a method for completing the whole-process reliability verification of sample simulation, transfer and test of space load in-situ test by taking vacuum and low-temperature sample simulation and vacuum low-temperature sample transfer as technical means.
Claims (5)
1. The utility model provides an ultrahigh vacuum low temperature sample shifts operation experiment system which characterized in that: the system comprises a micro-operation vacuum cavity main system unit 100, a sample refrigeration and temperature control unit 110, a parameter reading unit 120, a vacuum equipment control unit 130 and an experiment unit 140. Wherein:
the micro-manipulation vacuum cavity main system unit 100 comprises a micro-manipulation vacuum cavity 101, a magnetic drive ultrahigh vacuum mechanical arm 102, and a vacuum low-temperature sample stage 103 and a vacuum low-temperature bearing stage 104 which are arranged in the cavity;
the sample refrigeration and temperature control unit 110 includes a cryogenic storage tank 111, a cryogenic regulating valve 112, a cryogenic fluid transfer line. One end of the low-temperature regulating valve 112 is arranged above the low-temperature storage tank 111 and is in threaded sealing connection, and the other end of the low-temperature regulating valve is connected with the vacuum low-temperature sample stage 103 through a low-temperature fluid conveying pipeline and the micro-operation vacuum cavity 101 in a penetrating mode;
the parameter reading unit comprises an image acquisition module 121, a cavity internal temperature reading module 122 and a vacuum pressure reading module 123. The module uploads the pressure parameter, the temperature parameter and the image parameter to an upper computer;
the vacuum apparatus control unit 130 includes a primary pump group 131 and a high vacuum pump group 132. The primary pump set is connected with a high vacuum pump set pipeline, and the high vacuum pump set is connected with the gate plate isolation valve of the micro-operation vacuum cavity 101.
2. The ultra-high vacuum low temperature sample transfer operation experiment system as claimed in claim 1, wherein the vacuum low temperature sample stage 103 is provided with a sample box 105, and the outer wall of the sample box 105 is provided with a first temperature probe.
3. The ultra-high vacuum cryogenic sample transfer operation experimental system of claim 1, wherein the vacuum cryogenic platform 104 is cross-hatch connected to the cryogenic fluid transfer pipeline and has a thermally conductive copper tape disposed near the platform end. Be provided with coil pipe heating unit in the plummer, be provided with second temperature probe on the plummer up end.
4. The vacuum cryogenic sample transfer operation experiment system of claim 1 and claim 3, wherein the magnetically driven ultra-high vacuum robot arm 102 is vacuum flange-connected to the micro-manipulation vacuum chamber 101, the vacuum cryogenic carrier 104 is flange-connected to the vacuum transmission rod 106, and the vacuum transmission rod is connected to the X-Y-Z motor to drive the cryogenic carrier to translate and rotate.
5. The experimental system of claim 1-4, wherein the experimental steps of the experimental system for ultra-high vacuum low temperature sample transfer operation are as follows:
the first step is as follows: placing a low-temperature sample to be tested in the sample box 105;
the second step is that: starting the vacuum equipment control unit 130, setting a vacuum threshold parameter P1 of the experimental system, and reading whether the vacuum pressure reading module 123 reaches the vacuum threshold parameter P1;
the third step: the sample refrigeration and temperature control unit 110 is activated and the cryo-regulation valve 112 is opened. Setting a temperature parameter T1 of the low-temperature sample, reading a first temperature probe and judging whether the temperature reaches the set temperature T1;
the fourth step: starting a coil heating unit in the vacuum low-temperature bearing table 104, setting a bearing temperature parameter T2, reading a second temperature probe and judging whether the temperature reaches the set temperature T2;
the fifth step: the low temperature sample is picked up by the vacuum robot 102 and placed in the experiment unit 140, and the test procedure of the experiment unit 140 is started. And storing experimental data in real time;
and a sixth step: the low temperature vacuum experiment was ended.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211727397.5A CN115783319A (en) | 2022-12-30 | 2022-12-30 | Ultrahigh vacuum low-temperature sample transfer operation experiment system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211727397.5A CN115783319A (en) | 2022-12-30 | 2022-12-30 | Ultrahigh vacuum low-temperature sample transfer operation experiment system |
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| CN115783319A true CN115783319A (en) | 2023-03-14 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101692824B1 (en) * | 2015-10-29 | 2017-01-05 | 국방과학연구소 | Test apparatus for altitude simulation and test method therefor |
| JP2021130396A (en) * | 2020-02-20 | 2021-09-09 | 山田技研株式会社 | Test device of artificial satellite |
| CN113432931A (en) * | 2021-05-27 | 2021-09-24 | 中国科学院地质与地球物理研究所 | Simulation experiment device for water-containing ice lunar soil water vapor extraction |
| CN113928604A (en) * | 2021-10-19 | 2022-01-14 | 上海卫星装备研究所 | Device and method for testing performance of high-temperature heat shield of deep space exploration spacecraft |
| CN114486988A (en) * | 2022-01-27 | 2022-05-13 | 东北大学 | Microwave mobile sintering lunar soil test device and test method under vacuum environment |
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2022
- 2022-12-30 CN CN202211727397.5A patent/CN115783319A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101692824B1 (en) * | 2015-10-29 | 2017-01-05 | 국방과학연구소 | Test apparatus for altitude simulation and test method therefor |
| JP2021130396A (en) * | 2020-02-20 | 2021-09-09 | 山田技研株式会社 | Test device of artificial satellite |
| CN113432931A (en) * | 2021-05-27 | 2021-09-24 | 中国科学院地质与地球物理研究所 | Simulation experiment device for water-containing ice lunar soil water vapor extraction |
| CN113928604A (en) * | 2021-10-19 | 2022-01-14 | 上海卫星装备研究所 | Device and method for testing performance of high-temperature heat shield of deep space exploration spacecraft |
| CN114486988A (en) * | 2022-01-27 | 2022-05-13 | 东北大学 | Microwave mobile sintering lunar soil test device and test method under vacuum environment |
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