CN115763199A - Device for quickly adjusting beam size - Google Patents
Device for quickly adjusting beam size Download PDFInfo
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- CN115763199A CN115763199A CN202211535374.4A CN202211535374A CN115763199A CN 115763199 A CN115763199 A CN 115763199A CN 202211535374 A CN202211535374 A CN 202211535374A CN 115763199 A CN115763199 A CN 115763199A
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- rotary driving
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- movable baffle
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Abstract
The invention belongs to the technical field of particle beam flow control, and particularly relates to a device for quickly adjusting beam size, which comprises a shell formed by a diaphragm base (1) and a diaphragm top cover (7), wherein a beam outlet through which particle beams can pass is formed in the shell, a rotary driving disc (6), a vertical movable baffle (3) and a horizontal movable baffle (5) are arranged in the shell, and the vertical movable baffle (3) and the horizontal movable baffle (5) are driven to move by the rotation of the rotary driving disc (6), so that the opening or closing of the beam outlet and the size adjustment of the beam outlet are realized, and the size adjustment of the particle beams is realized. The invention realizes the continuous and rapid adjustment of the size of the beam outlet between 0cm and 10 multiplied by 10cm, and in the aspect of beam dimension, the size is increased from the original 1cm multiplied by 1cm-5cm multiplied by 5cm to 0-10cm multiplied by 10cm, thereby meeting the requirements of large-size devices and multiple devices for simultaneous irradiation, improving the utilization rate of the beam, simplifying the experimental process and improving the experimental efficiency.
Description
Technical Field
The invention belongs to the technical field of particle beam flow control, and particularly relates to a device for quickly adjusting beam size.
Background
In the experimental study of the heavy ion single particle effect, the beam spot size of the particle beam needs to be adjusted according to the size of the sensitive area of the irradiation device. In recent years, with the continuous progress of the electronic industry and the aerospace industry, devices develop towards high integration level, high frequency, high speed, low power consumption and the like, the integration level of electronic systems is continuously increased, aiming at the situation that the evaluation result of the radiation resistance of a single device cannot reflect the integral radiation resistance of the system, the size of an accelerator irradiation beam spot is expanded to meet the requirements of large-size devices (such as photoelectric devices, the size of an image sensor is larger than 7cm multiplied by 7 cm), circuit board level, system level irradiation and simultaneous irradiation of multiple devices, the continuous size-adjustable capability is given to the accelerator irradiation beam spot, the single particle effect test capability in China can be effectively improved, and the utilization rate of beam is improved.
At present, the conventional device for adjusting the beam size realizes the synchronous adjustment in the X and Y directions by adopting a mode of combining a single stepping motor with a bidirectional threaded screw and a turning conversion gear shaft, and can quickly realize the beam size adjustment of 1cm multiplied by 1cm-5cm multiplied by 5cm by controlling through a remote computer. However, due to the machining process, a gap of about 1cm exists between the two-way threaded screws, so that the diaphragm cannot be adjusted to the size of less than 1cm multiplied by 1 cm. In addition, the experimental requirements cannot be met for irradiating large-scale image sensors.
Disclosure of Invention
The invention aims to provide a novel device for quickly adjusting beam size, which constructs a square diaphragm with adjustable size through horizontal and vertical two groups (four) of movable baffles capable of synchronously moving and through opposite movement between the baffles of each group.
In order to achieve the above purpose, the technical scheme adopted by the invention is a device for rapidly adjusting the beam size, which comprises a shell formed by a diaphragm base and a diaphragm top cover, wherein a beam outlet capable of passing through particle beams is arranged on the shell, a rotary driving disc, a vertical movable baffle and a horizontal movable baffle are arranged in the shell, the vertical movable baffle and the horizontal movable baffle are driven to move by the rotation of the rotary driving disc, so that the opening or closing of the beam outlet and the adjustment of the size of the beam outlet are realized, and the adjustment of the size of the particle beams is realized.
Further, in the present invention,
the middle part of the diaphragm base is provided with a square first through hole, the middle part of the diaphragm top cover is provided with a square fourth through hole, and the first through hole and the fourth through hole are coaxial and have the same size and jointly form the beam outlet;
the vertical movable baffle plates are two movable baffle plates which are oppositely arranged, and the rotation of the rotary driving disc can be close to or far away from each other in the vertical direction;
the horizontal movable baffle plates are two movable baffle plates which are oppositely arranged, and the rotation of the rotary driving disc can be close to or far away from each other in the horizontal direction;
the beam current outlet after being adjusted by the vertical movable baffle and the horizontal movable baffle is square.
The diaphragm base is provided with a square second through hole in the middle, and the second through hole is coaxial with the first through hole and has the same size with the first through hole; the diaphragm base is not close to one side surface of the diaphragm base is further provided with a first limiting groove, and the vertical movable baffle is arranged in the first limiting groove and moves in the vertical direction along the first limiting groove.
The vertical movable baffle is arranged in the first limiting groove of the mounting disc, meanwhile, a space which is separated between the two fixed discs of the fixing disc is used as a second limiting groove, and the horizontal movable baffle is arranged in the second limiting groove and moves along the second limiting groove in the horizontal direction.
The rotary driving disc is positioned between the fixed disc and the diaphragm top cover, a circular third through hole is formed in the center of the rotary driving disc, the third through hole is coaxial with the first through hole, and the diameter of the third through hole is larger than the diagonal length of the first through hole; and four fourth limiting grooves are formed in the rotary driving disc, correspond to the two vertical movable baffles and the two horizontal movable baffles respectively, and are used for driving the vertical movable baffles and the horizontal movable baffles to move.
Further, in the present invention, it is preferable that,
a third limiting groove is further formed in the fixed disc, first convex bamboo shoots are arranged on the vertical movable baffle, and the first convex bamboo shoots penetrate through the third limiting groove and extend into the fourth limiting groove;
a second convex bamboo shoot is arranged on the horizontal movable baffle plate and extends into the fourth limiting groove;
when the rotary driving disc rotates forwards, the first convex bamboo shoot and the second convex bamboo shoot are driven to move through the fourth limiting groove, so that the vertical movable baffle plates are close to each other in the vertical direction, and the horizontal movable baffle plates are close to each other in the horizontal direction;
when the rotary driving disc rotates reversely, the first convex bamboo shoot and the second convex bamboo shoot are driven to move through the fourth limiting groove, so that the vertical movable baffle plates are far away from each other in the vertical direction, and the horizontal movable baffle plates are far away from each other in the horizontal direction;
and bearings are arranged on the first convex bamboo shoots and the second convex bamboo shoots for reducing friction.
Further, the device also comprises a stepping motor arranged on the diaphragm top cover, the stepping motor is used for providing power for the rotation of the rotary driving disc, the edge of the rotary driving disc is provided with a tooth-shaped structure, and a gear which is matched with the tooth-shaped structure of the rotary driving disc is arranged on a transmission shaft of the stepping motor and is used for realizing the transmission of the stepping motor to the rotary driving disc.
And the controller is used for controlling the rotation direction and the rotation angle of the stepping motor, and the controller is used for controlling the rotation of the stepping motor to realize the continuous and rapid adjustment of the size of the beam outlet between 0cm and 10 multiplied by 10 cm.
Furthermore, the controller can realize local control of the stepping motor and remote control of the stepping motor through remote communication between the computer and the controller, so that the local control and the remote control of the size of the beam outlet are realized.
The invention has the beneficial effects that:
1. the continuous and rapid adjustment of the size of the beam outlet between 0cm and 10 multiplied by 10cm is realized by the controller.
2. In the aspect of beam dimension, the beam dimension is increased from the original 1cm multiplied by 1cm-5cm multiplied by 5cm to 0-10cm multiplied by 10cm, the requirements of simultaneous irradiation of large-size devices and multiple devices can be met, the experimental efficiency is improved, the single event effect testing capability is improved particularly when the method is applied to heavy ion single event effect experimental research, the beam utilization rate is improved, and the experimental process is simplified.
Drawings
Fig. 1 is a front view of an apparatus for rapidly adjusting beam current dimension according to an embodiment of the present invention;
fig. 2 is a perspective view of an apparatus for rapidly adjusting beam current dimension according to an embodiment of the present invention;
fig. 3 is an exploded view of an apparatus for rapidly adjusting beam current dimension according to an embodiment of the present invention;
fig. 4 is a front perspective view of an apparatus for rapidly adjusting beam current dimension according to an embodiment of the present invention;
in the figure: 1-diaphragm base, 2-mounting disc, 3-vertical movable baffle, 4-fixed disc, 5-horizontal movable baffle, 6-rotary driving disc, 7-diaphragm top cover, 8-stepping motor, 9-first through hole, 10-second through hole, 11-third through hole, 12-fourth through hole, 13-first limiting groove, 14-first convex bamboo shoot, 15-third limiting groove, 16-second convex bamboo shoot, 17-fourth limiting groove.
Detailed Description
The invention is further described below with reference to the figures and examples.
The invention provides a device for quickly adjusting beam size (see fig. 1 to 4), which comprises a shell formed by a diaphragm base 1 and a diaphragm top cover 7, wherein a beam outlet (diaphragm opening) capable of passing a particle beam is arranged on the shell, a rotary driving disc 6, a vertical movable baffle 3 and a horizontal movable baffle 5 are arranged in the shell, the vertical movable baffle 3 and the horizontal movable baffle 5 are driven to move by the rotation of the rotary driving disc 6, the opening or closing of the beam outlet and the size adjustment of the beam outlet are realized, and the size adjustment of the particle beam is realized.
The middle part of the diaphragm base 1 is provided with a square first through hole 9, the middle part of the diaphragm top cover 7 is provided with a square fourth through hole 12, and the first through hole 9 and the fourth through hole 12 are coaxial and have the same size and jointly form a beam outlet;
the vertical movable baffle 3 is two movable baffles which are oppositely arranged and can rotate the driving disc 6 to mutually approach or depart from each other in the vertical direction;
the horizontal movable baffle 5 is two movable baffles which are oppositely arranged and can rotate the driving disc 6 to mutually approach or separate in the horizontal direction;
the beam current outlet after being adjusted by the vertical movable baffle 3 and the horizontal movable baffle 5 is square.
The diaphragm is characterized by further comprising an installation disc 2, wherein the installation disc 2 is close to the diaphragm base 1, a square second through hole 10 is formed in the middle of the diaphragm base 1, and the second through hole 10 is coaxial with the first through hole 9 and is consistent in size; the surface of one side, not close to the diaphragm base 1, of the diaphragm base 1 is further provided with a first limiting groove 13, and the vertical movable baffle 3 is arranged in the first limiting groove 13 and moves in the vertical direction along the first limiting groove 13.
Still include fixed disk 4, fixed disk 4 is the fixed disk that two longitudinal symmetry set up for set up perpendicular adjustable fender 3 in the first spacing groove 13 of mounting disc 2, simultaneously, as the second spacing groove in the space that separates mutually between two fixed disk of fixed disk 4, horizontal adjustable fender 5 sets up in the second spacing groove, realizes the motion on the horizontal direction along the second spacing groove.
The rotary driving disc 6 is positioned between the fixed disc 4 and the diaphragm top cover 7, a circular third through hole 11 is formed in the center of the rotary driving disc 6, the third through hole 11 is coaxial with the first through hole 9, and the diameter of the third through hole 11 is larger than the diagonal length of the first through hole 9; four fourth limiting grooves 17 are formed in the rotary driving disc 6, correspond to the two vertical movable baffles 3 and the two horizontal movable baffles 5 respectively, and are used for driving the vertical movable baffles 3 and the horizontal movable baffles 5 to move.
A third limiting groove 15 is further formed in the fixed disc 4, a first protruding bamboo shoot 14 is arranged on the vertical movable baffle 3, and the first protruding bamboo shoot 14 penetrates through the third limiting groove 15 and extends into a fourth limiting groove 17;
a second convex bamboo shoot 16 is arranged on the horizontal movable baffle plate 5, and the second convex bamboo shoot 16 extends into a fourth limiting groove 17;
when the rotary driving disk 6 rotates forwards, the fourth limit groove 17 drives the first convex bamboo shoot 14 and the second convex bamboo shoot 5 to move, so that the vertical movable baffle 3 is close to each other in the vertical direction, and the horizontal movable baffle is horizontally movable
The movable baffles 5 are close to each other in the horizontal direction, so that the size of the beam outlet is reduced and adjusted;
when the rotary driving disk 6 rotates reversely, the fourth limit groove 17 drives the first convex bamboo shoot 14 and the second convex bamboo shoot 16 to move, so that the vertical movable baffle plate 3 is far away from each other in the vertical direction, and the horizontal movable baffle plate can horizontally move
The movable baffles 5 are far away from each other in the horizontal direction, so that the size of the beam outlet is enlarged and adjusted; and small-size bearings are arranged on the first convex bamboo shoot 14 and the second convex bamboo shoot 16 for reducing friction. .
Still including setting up step motor 8 on diaphragm top cap 7, step motor 8 is used for providing power for the rotation of rotary driving dish 6, and step motor 8 passes through gear drive rotary driving dish 6 and rotates, changes
The edge of the driving disk 6 is provided with a tooth-shaped structure, and a transmission shaft of the stepping motor 8 is provided with a gear which is adapted to the tooth-shaped structure of the rotating driving disk 65, so as to realize the transmission of the stepping motor 8 to the rotating driving disk 6.
The device also comprises a controller used for controlling the rotation direction and the rotation angle of the stepping motor 8, and the continuous and rapid adjustment of the size of the beam outlet between 0cm and 10 multiplied by 10cm is realized by controlling the rotation of the stepping motor 8 through the controller.
The controller can realize local control of the stepping motor 8, and also can realize remote control of the stepping motor 8 through remote communication between the computer and the controller, thereby realizing local control and remote control of the size of the beam outlet.
The device according to the invention is not limited to the embodiments described in the detailed description, but is within the skill of the art
The technical solution according to the present invention can be used to derive other embodiments, which also belong to the technical innovation scope of the present invention.
Claims (9)
1. A device for quickly adjusting beam dimension is characterized in that: the utility model discloses a particle beam's regulation of size is realized to casing including diaphragm base (1) and diaphragm top cap (7) constitution, be equipped with the beam export that can pass through the particle beam on the casing be equipped with rotary driving dish (6), perpendicular adjustable fender (3) and horizontal adjustable fender (5) in the casing, through rotary driving dish (6) rotatory drive perpendicular adjustable fender (3) with horizontal adjustable fender (5) motion realizes right the opening or closing of beam export and right the regulation of the size of beam export, thereby it is right to realize the regulation of the yardstick of particle beam.
2. The device for rapidly adjusting the beam current dimension as claimed in claim 1, wherein:
a square first through hole (9) is formed in the middle of the diaphragm base (1), a square fourth through hole (12) is formed in the middle of the diaphragm top cover (7), and the first through hole (9) and the fourth through hole (12) are coaxial and have the same size and jointly form the beam outlet;
the vertical movable baffles (3) are two oppositely arranged movable baffles, and the rotation of the rotary driving disc (6) can be close to or far away from each other in the vertical direction;
the horizontal movable baffles (5) are two movable baffles which are oppositely arranged, and the rotation of the rotary driving disc (6) can be close to or far away from each other in the horizontal direction;
the beam current outlet after being adjusted by the vertical movable baffle (3) and the horizontal movable baffle (5) is square.
3. The device for rapidly adjusting the beam current dimension as claimed in claim 2, wherein: the diaphragm is characterized by further comprising a mounting disc (2), wherein the mounting disc (2) is close to the diaphragm base (1), a square second through hole (10) is formed in the middle of the diaphragm base (1), and the second through hole (10) is coaxial with the first through hole (9) and is consistent in size; the stop base (1) is not close to still be equipped with first spacing groove (13) on one side surface of stop base (1), perpendicular adjustable fender (3) set up in first spacing groove (13), follow first spacing groove (13) realize the motion in the vertical direction.
4. The device for rapidly adjusting the beam current dimension as claimed in claim 3, wherein: still include fixed disk (4), fixed disk (4) are the fixed disk that two longitudinal symmetries set up, be used for with perpendicular adjustable fender (3) set up mounting disc (2) in first spacing groove (13), simultaneously, regard as the second spacing groove in the space that separates mutually between two fixed disks of fixed disk (4), horizontal adjustable fender (5) set up in the second spacing groove, follow the motion on the horizontal direction is realized to the second spacing groove.
5. The device for rapidly adjusting the beam current dimension as claimed in claim 4, wherein: the rotary diaphragm type diaphragm stop is characterized by further comprising a rotary driving disc (6), wherein the rotary driving disc (6) is located between the fixed disc (4) and the diaphragm top cover (7), a circular third through hole (11) is formed in the center of the rotary driving disc (6), the third through hole (11) is coaxial with the first through hole (9), and the diameter of the third through hole (11) is larger than the diagonal length of the first through hole (9); four fourth limiting grooves (17) are arranged on the rotary driving disc (6), correspond to the two vertical movable baffles (3) and the two horizontal movable baffles (5) respectively, and are used for driving the vertical movable baffles (3) and the horizontal movable baffles (5) to move.
6. The device for rapidly adjusting the beam current dimension as claimed in claim 5, wherein:
a third limiting groove (15) is further formed in the fixed disc (4), a first protruding bamboo shoot (14) is arranged on the vertical movable baffle (3), and the first protruding bamboo shoot (14) penetrates through the third limiting groove (15) and extends into the fourth limiting groove (17);
a second convex bamboo shoot (16) is arranged on the horizontal movable baffle (5), and the second convex bamboo shoot (16) extends into the fourth limiting groove (17);
when the rotary driving disc (6) rotates forwards, the fourth limiting groove (17) drives the first convex bamboo shoot (14) and the second convex bamboo shoot (16) to move, so that the vertical movable baffle plates (3) are close to each other in the vertical direction, and the horizontal movable baffle plates (5) are close to each other in the horizontal direction;
when the rotary driving disc (6) rotates reversely, the fourth limiting groove (17) drives the first convex bamboo shoot (14) and the second convex bamboo shoot (16) to move, so that the vertical movable baffle (3) is far away from each other in the vertical direction, and the horizontal movable baffle (5) is far away from each other in the horizontal direction;
and bearings are arranged on the first convex bamboo shoot (14) and the second convex bamboo shoot (16) and used for reducing friction.
7. The device for rapidly adjusting the beam current dimension as claimed in claim 6, wherein: the diaphragm is characterized by further comprising a stepping motor (8) arranged on the diaphragm top cover (7), wherein the stepping motor (8) is used for providing power for rotation of the rotary driving disc (6), a tooth-shaped structure is arranged at the edge of the rotary driving disc (6), and a gear matched with the tooth-shaped structure of the rotary driving disc (6) is arranged on a transmission shaft of the stepping motor (8) and used for realizing transmission of the rotary driving disc (6) by the stepping motor (8).
8. The apparatus of claim 7, wherein the beam current dimension is adjusted rapidly by: the device also comprises a controller used for controlling the rotation direction and the rotation angle of the stepping motor (8), and the controller controls the rotation of the stepping motor (8) to realize the continuous and rapid adjustment of the size of the beam outlet between 0cm and 10 multiplied by 10 cm; the controller is capable of remote control.
9. The apparatus according to claim 8, wherein the beam current dimension is adjusted by: the controller can realize local control of the stepping motor (8), and also can realize remote control of the stepping motor (8) through remote communication between a computer and the controller, thereby realizing local control and remote control of the size of the beam outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211535374.4A CN115763199A (en) | 2022-12-02 | 2022-12-02 | Device for quickly adjusting beam size |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211535374.4A CN115763199A (en) | 2022-12-02 | 2022-12-02 | Device for quickly adjusting beam size |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115763199A true CN115763199A (en) | 2023-03-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211535374.4A Pending CN115763199A (en) | 2022-12-02 | 2022-12-02 | Device for quickly adjusting beam size |
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| CN (1) | CN115763199A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116779412A (en) * | 2023-08-25 | 2023-09-19 | 江苏鲁汶仪器股份有限公司 | Ion source baffle device and ion beam etching machine |
-
2022
- 2022-12-02 CN CN202211535374.4A patent/CN115763199A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116779412A (en) * | 2023-08-25 | 2023-09-19 | 江苏鲁汶仪器股份有限公司 | Ion source baffle device and ion beam etching machine |
| CN116779412B (en) * | 2023-08-25 | 2023-11-24 | 江苏鲁汶仪器股份有限公司 | Ion source baffle device and ion beam etching machine |
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