CN115750793B - Slit valve and semiconductor processing equipment - Google Patents
Slit valve and semiconductor processing equipment Download PDFInfo
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- CN115750793B CN115750793B CN202211235116.4A CN202211235116A CN115750793B CN 115750793 B CN115750793 B CN 115750793B CN 202211235116 A CN202211235116 A CN 202211235116A CN 115750793 B CN115750793 B CN 115750793B
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- 238000012545 processing Methods 0.000 title claims abstract description 22
- 239000004065 semiconductor Substances 0.000 title claims abstract description 21
- 230000005540 biological transmission Effects 0.000 claims abstract description 349
- 238000007789 sealing Methods 0.000 claims abstract description 79
- 230000033001 locomotion Effects 0.000 claims abstract description 76
- 238000004891 communication Methods 0.000 claims abstract description 55
- 238000007906 compression Methods 0.000 claims description 38
- 230000006835 compression Effects 0.000 claims description 37
- 230000007704 transition Effects 0.000 claims description 21
- 230000001681 protective effect Effects 0.000 claims description 10
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 9
- 238000001125 extrusion Methods 0.000 abstract description 3
- 230000002035 prolonged effect Effects 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000000903 blocking effect Effects 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 238000003825 pressing Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- 230000005570 vertical transmission Effects 0.000 description 1
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Abstract
The application discloses a slit valve and semiconductor processing equipment using the same; the slit valve includes: a valve plate; a valve plate supporting unit; the driving unit comprises a transmission piece and is provided with a first running track and a second running track; a first transmission unit; a second transmission unit; the transmission piece can drive the first transmission unit to drive the valve plate supporting unit to move so as to realize the reciprocating motion of the valve plate along a third moving track; the transmission piece can drive the second transmission unit to drive the valve plate supporting unit to move so as to realize the reciprocating motion of the valve plate along the fourth moving track; the third moving track is perpendicular to the fourth moving track. The slit valve of the application can not cause uneven extrusion to the communication port and the sealing ring at the communication port, thereby avoiding damaging the communication port and the sealing ring and having excellent sealing effect of the valve plate; the two transmission units do not need to bear the weight of each other, each transmission unit only needs to bear the force capable of driving the valve plate supporting unit to move, the driving cost can be effectively reduced, the transmission effect is improved, and the service life of the device is prolonged.
Description
Technical Field
The application relates to the technical field of semiconductors, in particular to a slit valve and semiconductor processing equipment applying the slit valve.
Background
CVD (chemical vapor deposition) is the most widely used thin film deposition equipment in integrated circuits and semiconductor fields, and belongs to semiconductor processing equipment. Most commercially available CVD (chemical vapor deposition) equipment is typically constructed from a plurality of vacuum chambers, such as separate chambers of the type having a reaction chamber, a connecting transition chamber, a loft chamber, a temporary storage chamber, and the like. The vacuum chambers are connected through the connecting transition cabin, and the manipulator in the connecting transition cabin transfers the substrate for reaction in each vacuum chamber to complete the whole production process.
For CVD equipment, vacuum is a major technical indicator of the equipment. During the production process, it is generally necessary to independently maintain the vacuum level between the chambers, and the vacuum level when the two chambers are in communication is also considered. Therefore, a slit valve is usually added at the connection position of the connection transition cabin and each cavity to separate different cavities, and at this time, the two cavities can keep respective vacuum degrees, so that gas leakage can not occur, and the two cavities are prevented from gas leakage. When the manipulator is required to transfer the substrate, the vacuum degree between the two cavities is adjusted to be consistent, and at the moment, the slit valve falls off the travelling path of the manipulator to finish the substrate transmission.
At present, the slit valve structure is generally complex, the mutual lamination of sealing surfaces is realized through a complex transmission mechanism and a detection tool, the principle that the bottoms of the sealing surfaces are contacted firstly and then the whole sealing surfaces are laminated gradually is adopted during sealing, and the sealing rings and the sealing surfaces are easily damaged by the uneven extrusion mode, so that internal leakage is easy to occur after a period of use.
Disclosure of Invention
In view of the above, the application provides a slit valve and a semiconductor processing apparatus using the slit valve.
In order to achieve the above purpose, the present application provides the following technical solutions:
a slit valve for sealing off a communication port, comprising:
the valve plate is parallel to the communication port;
a valve plate supporting unit having a connection end; the valve plate is arranged at the connecting end;
a driving unit including a transmission member; the transmission piece comprises a first running track and a second running track;
the first transmission unit is in transmission connection with the transmission piece and is in transmission connection with the valve plate supporting unit;
the second transmission unit can be in transmission connection with the transmission piece and can be in transmission connection with the valve plate supporting unit;
wherein,
when the transmission piece reciprocates along the first running track, the transmission piece is in transmission connection with the first transmission unit, and the first transmission unit is in transmission connection with the valve plate supporting unit; at the moment, the transmission piece drives the first transmission unit to drive the valve plate supporting unit to move so as to realize the reciprocating motion of the valve plate along a third moving track;
When the transmission piece reciprocates along the second running track, the transmission piece is in transmission connection with the second transmission unit, and the second transmission unit is in transmission connection with the valve plate supporting unit; at the moment, the transmission piece drives the second transmission unit to drive the valve plate supporting unit to move so as to realize the movement of the valve plate along a fourth movement track;
the third running track is perpendicular to the fourth running track;
the third running track is parallel to the communication port;
the fourth moving track is perpendicular to the communication port.
Optionally, in the slit valve, the first moving track is collinear with the second moving track, and the first moving track is parallel to the third moving track.
Optionally, in the above slit valve,
the transmission piece comprises a transmission abutting part;
the first transmission unit has an elastic compression amount; the extending direction of the elastic compression amount is parallel to the first running track;
when the transmission piece reciprocates along the first running track, the transmission abutting part abuts against the first transmission unit and releases or compresses the first transmission unit;
the valve plate supporting unit is arranged on the first transmission unit and synchronously moves along with the first transmission unit so as to realize the reciprocating movement of the valve plate along a third moving track;
When the transmission piece moves to the starting point of the second moving track, the transmission abutting part is separated from abutting the first transmission unit, and the elastic compression amount is fixed.
Optionally, in the above slit valve,
the transmission piece comprises a first transmission part;
the second transmission unit comprises a moving piece; the moving piece comprises a second transmission part and a limiting part; the second transmission part can be in transmission connection with the first transmission part, and the limiting part can be in transmission fit with the valve plate supporting unit;
when the transmission piece reciprocates along the second running track, the first transmission part is in transmission fit with the second transmission part so as to transmit the motion of the first transmission part parallel to the third running track into the motion of the second transmission part parallel to the fourth running track; meanwhile, the limiting part is in transmission fit with the valve plate supporting unit so as to realize the reciprocating motion of the valve plate along the fourth moving track.
Optionally, in the slit valve, the first transmission unit includes:
a compression spring having an elastic compression amount;
a movable limiting piece provided with a first surface and a second surface which are opposite; the first surface is connected with the compression spring; the second surface is connected with the valve plate supporting unit and can be abutted with the transmission abutting part;
The fixed limiting pieces are arranged at one side of the movable limiting piece, close to the second surface, at intervals, and can be abutted with the second surface;
when the transmission piece moves to the starting point of the second moving track, the transmission abutting part is separated from abutting with the second surface, and the fixed limiting piece abuts with the second surface.
Optionally, in the above slit valve,
the first transmission part is provided with a first transmission surface;
the second transmission part is a transmission groove formed in the moving part, and the central axis of the transmission groove is parallel to the movement direction of the third movement track; the transmission groove is internally provided with a second transmission surface in transmission fit with the first transmission surface;
the limiting part is a limiting groove formed in the moving part, and the central axis of the limiting groove is parallel to the movement direction of the third movement track; the valve plate supporting unit is arranged in the limiting groove in a penetrating mode and can move along the direction parallel to the third moving track;
and one side of the second transmission surface far away from the valve plate is inclined relative to one side of the second transmission surface close to the valve plate in a direction from the starting point of the fourth movement track to the ending point of the fourth movement track.
Optionally, in the slit valve, the second transmission unit further includes a guide member;
the guide piece is provided with a first guide part parallel to the fourth running track;
the moving part is provided with a second guide part parallel to the fourth running track; the second guide part is matched with the first guide part;
wherein, the position of the guide piece opposite to the transmission groove is provided with a first groove;
a second groove is formed in the position, opposite to the limiting groove, of the guide piece; the size of the second groove is larger than that of the limit groove;
wherein the valve plate supporting unit passes through the second groove.
Optionally, in the slit valve, the valve plate supporting unit includes:
a support shaft; the first end of the supporting shaft is the connecting end; the second end of the supporting shaft is connected with the movable limiting piece;
the protection sleeve is sleeved on the support shaft, and can shrink/stretch in the direction parallel to the third running track;
the compression block is provided with a first sealing hole and is opposite to the position of the limiting part;
wherein, the first end of the protective sleeve is fixedly arranged in the first sealing hole; the second end of the protective sleeve is fixedly arranged on the supporting shaft;
When the support shaft moves in a direction parallel to the third running track, the protection sleeve contracts/expands.
A semiconductor processing apparatus employing the slit valve described above;
the semiconductor processing equipment comprises a first chamber, a connecting transition cabin and a second chamber which are sequentially arranged;
the connecting transition cabin is provided with the communication port;
the communication port is perpendicular to the fourth running track;
the valve plate is positioned in the transition cabin and is used for sealing/opening the communication port.
Optionally, the semiconductor processing apparatus further includes a sealing base;
the transition cabin is provided with an opening; the opening is perpendicular to the third running track;
the sealing base is arranged at the opening in a sealing way;
the sealing base is provided with a second sealing hole; a sealing element is arranged at the second sealing hole;
when the transmission piece reciprocates along the first running track, the valve plate supporting unit can penetrate into and out of the second sealing hole and is in sealing contact with the sealing piece.
The slit valve and the semiconductor processing equipment applying the slit valve provided by the application, when a valve plate in the slit valve needs to block a communication port, a driving piece is sequentially connected with a first transmission unit and a second transmission unit in a transmission way; meanwhile, the first transmission unit and the second transmission unit are sequentially in transmission fit with the valve plate supporting unit so as to respectively realize that the valve plate sequentially moves along a third moving track and a fourth moving track which are mutually perpendicular. The fourth running track is vertical to the communication port, and the valve plate can be integrally propped against the communication port under the drive of the second transmission unit, so that the sealing and blocking of the communication port are realized; the sealing device can not cause uneven extrusion to the communication port and the sealing ring at the communication port, so that the communication port and the sealing ring are prevented from being damaged, and the sealing effect of the valve plate is excellent; meanwhile, the valve plate achieves the effect of instantaneously blocking the communication port, and the action response is quick. Furthermore, the first transmission unit and the second transmission unit are independent from each other in space position, the first transmission unit and the second transmission unit do not need to bear the weight of each other, each transmission unit only needs to bear the force capable of driving the valve plate supporting unit to move, the driving cost can be effectively reduced, the transmission effect of the first transmission unit and the second transmission unit is improved, and the service life of the device is prolonged.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present application, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is an exploded view of the present application mated with a connecting transition pod;
FIG. 2 is a cross-sectional view of a valve plate of the present application at the start of a third travel path;
FIG. 3 is a cross-sectional view of a valve plate of the present application at the end of a third travel path;
fig. 4 is a cross-sectional view of the valve plate of the present application at the end of the fourth path.
In fig. 1-4:
the device comprises a valve plate 1, a valve plate 2, a valve plate supporting unit, a 3-driving unit, a first 4-transmission unit, a second 5-transmission unit, a 6-connection transition cabin, a 7-sealing base, an 8-sealing piece, a 9-installation base, a 10-horizontal limit groove, a 11-horizontal limit block, a 12-spring plunger and a 13-enclosure;
21-supporting shafts, 22-protective sleeves, 23-compacting blocks and 24-supporting plates;
31-transmission parts, 32-driving parts;
41-compression springs, 42-movement limiting pieces, 43-fixed limiting pieces, 44-upper spring mounting seats and 45-lower spring mounting seats;
231-first seal hole
51-moving part, 52-guiding part, 53-sleeve;
61-communication ports;
71-a second sealing hole;
311-an abutting part, 312-a first transmission part;
511-a second transmission; 512-limit parts, 513-second guide parts;
521-first guide;
a-a first driving surface, b-a second driving surface.
Detailed Description
The application provides a slit valve and also provides semiconductor processing equipment applying the slit valve.
The following description of the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
As shown in fig. 1 to 4, a slit valve for sealing and blocking the communication port 61; the slit valve comprises a valve plate 1, a valve plate supporting unit 2, a driving unit 3, a first transmission unit 4 and a second transmission unit 5.
The valve plate 1 is parallel to the communication port 61.
The valve plate support unit 2 has a connection end at which the valve plate 1 is disposed.
The drive unit 3 includes a transmission member 31, the transmission member 31 having a first running track and a second running track; the first running track is provided with a first starting point and a first ending point; the second running track is provided with a second starting point and a second ending point; and the first end point coincides with the second start point.
The first transmission unit 4 is arranged in the first space, the second transmission unit is arranged in the second space, and the first space and the second space are not overlapped with each other; the first transmission unit 4 can be in transmission connection with the transmission piece 31 and can be in transmission fit with the valve plate supporting unit 2; the second transmission unit 5 can be in transmission connection with the transmission member 31 and can be in transmission fit with the valve plate support unit 2.
Wherein, the transmission fit means that the valve plate supporting unit 2 has a motion track in the same direction as the first transmission unit 4 under the drive of the first transmission unit 4; the valve plate supporting unit 2 is driven by the second transmission unit 5 to have a motion track in the same direction as the second transmission unit 5.
When the transmission member 31 reciprocates along the first running track in the first space, the transmission member 31 is in transmission connection with the first transmission unit 4, and the first transmission unit 4 is in transmission fit with the valve plate supporting unit 2; at this time, the transmission member 31 drives the first transmission unit 4 to drive the valve plate supporting unit 2 to move, so as to realize the reciprocating movement of the valve plate 1 along the third moving track;
When the transmission piece 31 reciprocates along the second running track in the second space, the transmission piece 31 is in transmission connection with the second transmission unit 5, and the second transmission unit 5 is in transmission fit with the valve plate supporting unit 2; at this time, the transmission member 31 drives the second transmission unit 5 to drive the valve plate supporting unit 2 to move, so as to realize the reciprocating movement of the valve plate 1 along the fourth moving track.
The third running track is provided with a third starting point and a third ending point; the fourth movement track has a fourth starting point and a fourth ending point. The third end point coincides with the fourth end point; the third running track is perpendicular to the fourth running track, and the third running track is parallel to the communication port 61, and the fourth running track is perpendicular to the communication port 61.
When the valve plate 1 in the slit valve needs to block the communication port 61, the transmission piece 31 is sequentially connected with the first transmission unit 4 and the second transmission unit 5 in a transmission way; the working process is as follows: (1) the transmission member 31 first moves from the first start point to the first end point; meanwhile, the transmission piece 31 drives the first transmission unit 4 to synchronously drive the valve plate 1 to move from the third starting point to the third ending point; at this time, the valve plate 1 faces the communication port 61, and the valve plate 1 is disposed parallel to and spaced from the communication port 61. (2) The transmission member 31 then moves from the second start point to the second end point; meanwhile, the transmission piece 31 drives the second transmission unit 5 to synchronously drive the valve plate 1 to move from the fourth starting point to the fourth ending point; at this time, the valve plate 1 is entirely pressed against the communication port 61, and sealing and blocking of the communication port 61 are realized.
When the valve plate 1 in the slit valve needs to open the communication port 61, the transmission member 31 is sequentially connected with the second transmission unit 5 and the first transmission unit 4 in a transmission manner; the working process is as follows: (1) the transmission member 31 is first run from the second end point to the second start point; meanwhile, the transmission piece 31 drives the second transmission unit 5 to synchronously drive the valve plate 1 to move from the fourth end point to the fourth starting point; at this time, the valve plate 1 is released from the pressure against the communication port 61, the communication port 61 is opened, and the valve plate 1 is disposed parallel to and at a distance from the communication port 61. (2) The transmission member 31 then moves from the first end point to the first start point; meanwhile, the transmission member 31 drives the first transmission unit 5 to synchronously drive the valve plate 1 to move from the third end point to the third start point; at this time, the valve plate 1 is entirely moved away and is completely staggered from the communication port 61, thereby ensuring that the communication port 61 is completely communicated in both side areas perpendicular to the fourth running track.
The valve plate 1 of the application synchronously supports against or leaves the communication port 61 in a whole, so that the communication port 61 and the sealing ring at the communication port 61 are not extruded, the communication port 61 and the sealing ring are uniformly stressed, the communication port 61 and the sealing ring are prevented from being damaged, and the sealing effect of the valve plate 1 is excellent; meanwhile, the valve plate 1 achieves the effect of instantaneously sealing and blocking/opening the communication port 61, and the action response is fast.
Furthermore, the first transmission unit 4 and the second transmission unit 5 are arranged in the first space and the second space with independent space positions, the first transmission unit 4 and the second transmission unit 5 do not need to bear the weight of each other, each transmission unit only needs to bear the force capable of driving the valve plate supporting unit 2 and the valve plate 1 to move, the driving cost can be effectively reduced, the transmission effect of the first transmission unit 4 and the second transmission unit 5 is improved, and the service life of the device is prolonged.
In some embodiments of the application, the first travel track is collinear with the second travel track, and the first travel track is parallel with the third travel track.
It should be noted that the driving unit 3 includes a driving member 32; the driving member 32 drives the driving member 31 to reciprocate along the first moving trace, and the driving member 32 drives the driving member 31 to reciprocate along the second moving trace.
When the first running track and the second running track are collinear, namely, only one driving piece 32 is arranged, the normal operation of the slit valve can be realized. The driving member 32 drives the transmission member 31 to reciprocate linearly in only one direction, and can realize transmission connection with the first transmission unit 4 and the second transmission unit 5 in sequence.
As described above, the number of driving members 32 can be reduced, the component composition of the slit valve can be simplified, and the slit valve can be miniaturized as much as possible.
Further, the driving member 32 may be an electric push rod, a hydraulic push rod, a chain push rod, etc., which will not be described in detail herein. The driving member 32 is selected according to actual requirements, and flexibility and applicability are extremely high.
Further, the first moving track and the second moving track may be other arrangements besides collinear, for example, the first moving track and the second moving track are perpendicular; i.e. in addition to one driving element, two driving elements (i.e. a first driving element and a second driving element) may be provided. The first drive member can be in driving connection with the transmission member 31 and the second drive member can be in driving connection with the transmission member 31.
In some embodiments of the present application, the driving member 31 includes a driving abutment 311. The first transmission unit 4 has an elastic compression amount; the extending direction of the elastic compression amount is parallel to the first running track. When the transmission member 31 reciprocates along the first moving track, the transmission abutting portion 311 abuts against the first transmission unit 4, and releases or compresses the first transmission unit 4; the valve plate supporting unit 2 is arranged on the first transmission unit 4 and synchronously moves along with the first transmission unit 4 so as to realize the reciprocating movement of the valve plate 1 along a third moving track; when the transmission member 31 moves to the start point of the second movement path, the transmission abutting portion 311 is disengaged from the abutment against the first transmission unit 4, and the elastic compression amount is fixed.
Defining the running direction of the first running track, the running direction of the second running track and the running direction of the third running track to be parallel to the vertical direction; the running direction of the fourth running track is parallel to the horizontal direction. The first end point is positioned above the first starting point, the second end point is positioned above the second starting point, and the third end point is positioned above the third starting point; the fourth end point is located to the right of the fourth start point.
The first transmission unit 4 is always in a compressed state and has elastic compression; when the transmission member 31 reciprocates along the first running track, the transmission abutting portion 311 always abuts against the first transmission unit 4.
When the transmission member 31 moves upward along the first moving track, the transmission abutting portion 311 moves upward synchronously, so that the elastic compression amount of the first transmission unit 4 is released, the first transmission unit 4 moves upward synchronously under the action of elastic force, the first transmission unit 4 moves upward to drive the valve plate supporting unit 2 to move upward synchronously, and the valve plate supporting unit 2 moves upward to drive the valve plate 1 to move upward synchronously.
When the transmission member 31 moves downward along the first moving track, the transmission abutting portion 311 moves downward synchronously, so as to increase the elastic compression amount of the first transmission unit 4, the first transmission unit 4 moves downward synchronously under the abutting pressure of the transmission abutting portion 311, the first transmission unit 4 moves downward to drive the valve plate supporting unit 2 to move downward synchronously, and the valve plate supporting unit 2 moves downward to drive the valve plate 1 to move downward synchronously.
The first transmission unit 4 is provided with an elastic compression structure, and the valve plate 1 is lifted up and down in a reciprocating manner along the vertical direction through the cooperation of the transmission abutting part 311, the first transmission unit 4, the valve plate supporting unit 2 and the valve plate 1; the first transmission unit 4 is firm and stable in transmission in the vertical direction, simple and compact in structure, easy to process and manufacture and low in cost.
In some embodiments of the present application, the transmission member 31 includes a first transmission portion 312. The second transmission unit 5 includes a moving member 51; the moving member 51 includes a second transmission portion 511 and a limiting portion 512. The second transmission part 511 can be in transmission connection with the first transmission part 312, and the limit part 512 can be in transmission fit with the valve plate supporting unit 2. When the transmission member 31 reciprocates along the second moving track, the first transmission portion 312 is in transmission engagement with the second transmission portion 511 to transmit the movement of the first transmission portion 312 parallel to the third moving track into the movement of the second transmission portion 511 parallel to the fourth moving track; meanwhile, the limiting part 512 is in transmission fit with the valve plate supporting unit 2, so that the valve plate 1 can reciprocate along the fourth moving track.
When the transmission member 31 moves upward along the second moving trajectory, the first transmission portion 312 moves upward synchronously and is in transmission engagement with the second transmission portion 511, and the first transmission portion 312 transmits its upward movement into a rightward movement of the second transmission portion 511; the rightward movement of the second transmission part 511 drives the limiting part 512 to synchronously move rightward, the rightward movement of the limiting part 512 drives the valve plate supporting unit 2 to synchronously move rightward, and the rightward movement of the valve plate supporting unit 2 drives the valve plate 1 to synchronously move rightward; at this time, the valve plate 1 presses the seal communication port 61.
When the transmission member 31 moves downward along the second moving track, the first transmission portion 312 moves downward synchronously and is in transmission fit with the second transmission portion 511, and the first transmission portion 312 transmits its downward movement into a leftward movement of the second transmission portion 511; the leftward movement of the second transmission part 511 drives the limiting part 512 to synchronously move leftward, the leftward movement of the limiting part 512 drives the valve plate supporting unit 2 to synchronously move leftward, and the leftward movement of the valve plate supporting unit 2 drives the valve plate 1 to synchronously move leftward, and at this time, the valve plate 1 opens the communication port 61.
The second transmission part 511 of the second transmission unit 5 can move in the horizontal direction under the vertical transmission of the first transmission part 312, so that the two-way movement of the valve plate 1 in the vertical direction and the horizontal direction can be completed by only arranging one driving piece 32; the second transmission unit 5 is firm and stable in transmission in the horizontal direction, simple and compact in structure, easy to process and manufacture and low in cost.
In some embodiments of the application, the first transmission unit 4 comprises a compression spring 41, a movement limiter 42, a fixed limiter 43. The compression spring 41 has an elastic compression amount; the movement limiting member 42 has a first face and a second face opposite to each other; the first face is connected to the compression spring 41; the second surface is connected with the valve plate supporting unit 2 and can be abutted with the transmission abutting part 311; the fixed limiting pieces 43 are arranged at one side of the moving limiting piece 42 close to the second surface at intervals, and the fixed limiting pieces 43 can be abutted with the second surface. When the transmission member 31 moves to the start point of the second movement track, the fixed limiting member 43 abuts against the second surface.
Wherein, the first surface is the bottom surface of the movement limiting member 42; the second face is the top face of the travel limiter 42.
When the transmission member 31 moves upward along the first moving track, the transmission abutting portion 311 moves upward synchronously, so that the movement limiting member 42 is released, the compression amount of the compression spring 41 is released, the movement limiting member 42 is driven to move upward, the movement limiting member 42 moves upward to drive the valve plate supporting unit 2 to move upward synchronously, and the valve plate supporting unit 2 moves upward to drive the valve plate 1 to move upward synchronously. When the transmission member 31 moves to the first end point, the transmission abutting portion 311 is separated from the abutting pressure with the movement limiting member 42, and at the same time, the fixed limiting member 43 abuts against the movement limiting member 42, so that the elastic compression amount of the compression spring 41 is fixed, and the valve plate 1 does not move upward in the vertical direction.
When the transmission member 31 moves downwards along the first moving track, the transmission abutting portion 311 synchronously moves downwards, so that the movement limiting member 42 is abutted against the compression spring 41, so that the movement limiting member 42 and the compression spring 41 synchronously move downwards, the movement limiting member 42 moves downwards to drive the valve plate supporting unit 2 to synchronously move downwards, and the valve plate supporting unit 2 moves downwards to drive the valve plate 1 to synchronously move downwards.
The first transmission unit 4 has the advantages of simple structure, firm and stable transmission in the vertical direction, compact structure, easy processing and manufacturing and low cost.
Further, the slit valve further comprises a mounting base 9, and a driving piece mounting groove is formed in the mounting base 9; the driving member 32 is fixedly disposed in the driving member mounting groove. The mounting and fixing of the driving member 32 is very convenient and quick as described above.
The further slit valve also comprises a wrapper 13; the surrounding skin 13 is positioned at the outer side of the slit valve to play a role in protecting the internal structure of the slit valve.
Further, the first transmission unit 4 further comprises a sprung mounting 44 and an unsprung mounting 45. The top end of the spring-mounted seat 44 is mounted on the bottom surface of the movement limiting member 42; the bottom end of the underfloor mount 45 is mounted on the mounting base 9. The top end of the compression spring 41 is fixedly arranged at the bottom end of the spring upper mounting seat 44; the bottom end of the compression spring 41 is secured to the top end of the spring mount 44.
As set forth above, the mounting and fixing of the compression spring 41 is very convenient and quick.
Further, the spring-mounted seat 44, the spring-mounted seat 45 and the compression spring 41 are respectively provided with two groups symmetrically in front-rear direction. The above arrangement realizes firm stability that the movable limiting piece 42 drives the valve plate supporting unit 2 to move up and down.
Further, the moving limiting member 42 has a plate-shaped structure, and an abutment groove and a connection groove are arranged on the top surface of the moving limiting member 42; the transmission abutting part 311 is opposite to the abutting groove in position and is adaptive in shape; the bottom of the valve plate supporting unit 2 is connected in the connection groove. By the arrangement, the transmission abutting part 311 can be prevented from shaking back and forth and left and right when being in abutting fit with the movable limiting part 42, and further, the movement of the valve plate 1 on the third moving track is ensured to be stable and reliable. The connecting grooves provide connecting points for the valve plate supporting unit 2, and the valve plate supporting unit 2 is connected to the movable limiting member 42 more conveniently and rapidly.
Further, the fixed limiting member 43 is a rod-shaped structure fixedly disposed on the top of the moving limiting member 42.
In some embodiments of the present application, the first transmission portion 312 has a first transmission face a; the second transmission part 511 is a transmission groove formed on the moving part 51, and the central axis of the transmission groove is parallel to the movement direction of the third movement track; the transmission groove is internally provided with a second transmission surface b in transmission fit with the first transmission surface a.
The limiting part 512 is a limiting groove formed on the moving member 51, and the central axis of the limiting groove is parallel to the movement direction of the third movement track; the valve plate supporting unit 2 is arranged in the limiting groove in a penetrating mode and can move along the direction parallel to the third moving track;
The side of the second transmission surface b away from the valve plate 1 is inclined relative to the side of the second transmission surface b against the valve plate 1 in a direction from the start point of the fourth movement track to the end point of the fourth movement track.
It should be noted that, the moving member 51 has a plate-shaped structure, and the second transmission portion 511 is a transmission groove formed on the moving member 51, which has a simple structure and is convenient for production and processing; further, the limiting portion 512 is a transmission groove formed on the moving member 51, which has a simple structure and is convenient for production and processing.
It should be noted that, the transmission abutting portion 311 is a transmission rod structure adapted to the transmission groove; the first transmission surface a is arranged on the top surface of the transmission rod, the second transmission surface b is arranged on the transmission groove, so that an inclined-surface transmission matching structure is formed, and the limitation of the inclination direction of the second transmission surface b skillfully transmits the upward movement of the first transmission surface a into the rightward movement of the second transmission surface; the downward movement of the first transmission surface a is transmitted to the right of the second transmission surface b.
The first conveying surface and the second conveying surface b may be provided in an arc-shaped structure in addition to the inclined surface structure.
In some embodiments of the application, the second transmission unit 5 further comprises a guide 52.
The guide 52 is provided with a first guide portion 521 parallel to the fourth running track; the moving member 51 is provided with a second guide portion 513 parallel to the fourth moving track; the second guide 513 is fitted to the first guide 521.
The guide 52 is provided with a first slot at a position opposite to the transmission slot. A second groove is formed in the position, opposite to the limiting groove, of the guide piece 52; the size of the second groove is larger than that of the limit groove. The valve plate support unit 2 passes through the second groove.
The guide piece 52 is fixed in position, and the second guide part 513 is matched with the first guide part 521 to realize the stable movement of the moving piece 51 in the guide piece 52; and the valve plate 1 is ensured not to shake up and down and back and forth when moving in the horizontal direction, and the operation of the valve plate 1 is ensured to be more stable.
Further, the first guiding portion 521 is a guiding groove; the second guide 513 is a guide protrusion. The guide groove and the guide protrusion are simple in structure and convenient to produce and install.
Further, the guide member 52 has a plate-like structure with a groove, and the front wall and the rear wall in the groove are respectively provided with a guide groove parallel to the horizontal direction; the moving member 51 is of a board-mounted structure, and guide protrusions are provided on the front wall and the rear wall of the moving member 51, respectively. The displacement member 51 can be placed in the recess in a fitting manner, while the guide projection and the guide recess are also fitted in a fitting manner. As set forth above, the guide mounting of the moving member 51 and the guide member 52 is more convenient and quick.
Further, a horizontal limit groove 10 extending in the vertical direction is provided on the left side surface of the guide member 52; the horizontal limiting groove 10 is internally provided with a horizontal limiting block 11, and the horizontal limiting block 11 can block the moving piece 51 so as to prevent the moving piece 51 from sliding out of the guide piece 52 when moving leftwards.
Further, a spring plunger 12 is inserted and arranged on the right side surface in the groove of the guide piece; the spring plunger 12 provides a buffer for rightward movement of the moving member 51 and ensures reliable smoothness of rightward movement of the moving member 51.
Further, the second transmission unit 5 further comprises a sleeve 53; the sleeve 53 sequentially penetrates through the limit groove and the second groove and is fixed with the limit groove. When the moving piece 51 moves rightwards, the valve plate supporting unit 2 moves rightwards synchronously under the linkage of the limiting groove, and friction damage between the outer side wall of the valve plate supporting unit 2 and the inner groove wall of the limiting groove can be effectively avoided through the sleeve 53, so that accurate matching among all parts is effectively protected.
In some embodiments of the present application, the valve plate supporting unit 2 includes: a support shaft 21, a protection sleeve 22 and a compression block 23. The first end of the support shaft 21 is a connecting end; the second end of the support shaft 21 is connected to a movement limiter 42. The protection sleeve 22 is sleeved on the support shaft 21, and the protection sleeve 22 can be contracted/expanded in the direction parallel to the third running track. The pressing block 23 is provided with a first sealing hole 231 and is opposite to the position of the limiting part 512. The first end of the protection sleeve 22 is fixedly disposed within the first seal bore 231; the second end of the protective sleeve 22 is fixedly arranged on the supporting shaft 21; when the support shaft 21 moves in a direction parallel to the third running track, the protection sleeve 22 contracts/expands.
It should be noted that, the connection end of the support shaft 21 is provided with a first connection hole; the valve plate 1 is provided with a second connecting hole; through the fastener passing through first connecting hole and second connecting hole in proper order, realized the quick installation of valve plate 1 at the link of back shaft 21 and fixed. A boss is provided on the second end of the support shaft 21, and the boss is connected in the connection groove of the movement limiting member 42. The protective sleeve 22 is a corrugated tube. The pressing block 23 has a plate-like structure.
Through setting up protective sleeve 22 and compact heap 23, realized the supporting axle 21 upward movement and advanced the part in transition joint cabin, all obtained the protection in the protective sleeve 22, protective sleeve 22 provided the vacuum protection environment for the part that supporting axle 21 can business turn over transition joint cabin 6, can not lead to the fact the influence to the inside vacuum degree and the cleanliness in transition joint cabin 6.
Further, the pressing block 23 is attached to the top of the guide 52 by providing the support plate 24.
Further, two valve plate supporting units 2 are symmetrically arranged front and back, and two limiting grooves are formed in the corresponding moving piece 51. The guide 52 is provided with two second grooves.
A semiconductor processing apparatus employing the slit valve described above.
The semiconductor processing equipment comprises a first chamber, a connecting transition cabin 6 and a second chamber which are sequentially arranged. The connecting transition cabin 6 is provided with a communication port 61; the communication port 61 is perpendicular to the fourth running track; a valve plate 1 is located in the transition chamber 6 for sealing/opening the communication port 61.
Wherein, one surface of the valve plate 1 close to the communication port 61 is a first sealing surface; the side of the communication port 61 near the valve plate 1 is a second sealing surface. When the valve plate 1 moves to the fourth end point, the first sealing surface is in sealing abutment with the second sealing surface.
Since the semiconductor processing apparatus of the present application has the slit valve described above; the beneficial effects of the semiconductor processing apparatus brought by the slit valve are referred to above, and are not described herein.
In the semiconductor processing apparatus of the present application, a sealing base 7 is further included. The bottom of the transition cabin 6 is provided with an opening; the opening is perpendicular to the third running track; the sealing base 7 is arranged at the opening in a sealing way. The sealing base 7 is provided with a second sealing hole 71; a seal 8 is provided at the second seal hole 71. When the transmission member 31 reciprocates along the first running track, the valve plate supporting unit 2 can be inserted into and out of the second seal hole 71 and brought into sealing contact with the seal member 8.
It should be noted that, the sealing base 7 is disposed on the upper surface of the pressing block 23, and the second sealing hole 71 is opposite to the first sealing hole 231, the sealing element 8 is disposed on top of the first sealing hole 231, and a concave table is disposed on the second sealing hole 71. The seal 8 happens to be located in the recess.
The sealing member 8 can be arranged in the sealing area formed by the sealing base 7 and the pressing block 23 in a sealing way, the sealing member 8 is not polluted and damaged, and the sealing effect on the supporting shaft 21 is always maintained in the optimal state.
The sealing element 8 is a sealing gasket, which has simple structure, convenient production and installation and low cost.
The components, arrangements, etc. referred to in this disclosure are only illustrative examples and are not intended to require or imply that the connections, arrangements, configurations must be made in the manner shown in the drawings. These components, devices, may be connected, arranged, configured in any manner, as will be appreciated by those skilled in the art. Words such as "including," "comprising," "having," and the like are words of openness and mean "including but not limited to," and are used interchangeably therewith. The terms "or" and "as used herein refer to and are used interchangeably with the term" and/or "unless the context clearly indicates otherwise. The term "such as" as used herein refers to, and is used interchangeably with, the phrase "such as, but not limited to.
It should also be noted that in the device of the present application, the components may be disassembled and/or reassembled. Such decomposition and/or recombination should be considered as equivalent aspects of the present application.
The previous description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other aspects without departing from the scope of the application. Thus, the present application is not intended to be limited to the aspects shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
The foregoing description has been presented for purposes of illustration and description. Furthermore, this description is not intended to limit embodiments of the application to the form disclosed herein. Although a number of example aspects and embodiments have been discussed above, a person of ordinary skill in the art will recognize certain variations, modifications, alterations, additions, and subcombinations thereof.
The foregoing description of the preferred embodiments of the application is not intended to be limiting, but rather is to be construed as including any modifications, equivalents, and alternatives falling within the spirit and principles of the application.
Claims (10)
1. A slit valve for sealing off a communication port (61), characterized by comprising:
A valve plate (1) parallel to the communication port (61);
a valve plate support unit (2) having a connection end; the valve plate (1) is arranged at the connecting end;
a drive unit (3) comprising a transmission member (31); the transmission member (31) has a first running track and a second running track;
the first transmission unit (4) can be in transmission connection with the transmission piece (31) and can be in transmission fit with the valve plate supporting unit (2);
the second transmission unit (5) can be in transmission connection with the transmission piece (31) and can be in transmission fit with the valve plate supporting unit (2);
wherein,
when the transmission piece (31) reciprocates along the first running track, the transmission piece (31) is in transmission connection with the first transmission unit (4), and the first transmission unit (4) is in transmission fit with the valve plate supporting unit (2); at the moment, the transmission piece (31) drives the first transmission unit (4) to drive the valve plate supporting unit (2) to move so as to realize the reciprocating motion of the valve plate (1) along a third moving track;
when the transmission piece (31) reciprocates along the second running track, the transmission piece (31) is in transmission connection with the second transmission unit (5), and the second transmission unit (5) is in transmission fit with the valve plate supporting unit (2); at the moment, the transmission piece (31) drives the second transmission unit (5) to drive the valve plate supporting unit (2) to move so as to realize the reciprocating motion of the valve plate (1) along a fourth moving track;
The third running track is perpendicular to the fourth running track;
the third running track is parallel to the communication port (61);
the fourth running track is perpendicular to the communication port (61).
2. The slit valve of claim 1, wherein the first travel path is collinear with the second travel path and the first travel path is parallel with the third travel path.
3. The slit valve of claim 2, wherein,
the transmission member (31) includes a transmission abutting portion (311);
the first transmission unit (4) has an elastic compression amount; the extending direction of the elastic compression amount is parallel to the first running track;
when the transmission member (31) reciprocates along the first running track, the transmission abutting portion (311) abuts against the first transmission unit (4) and releases or compresses the first transmission unit (4);
the valve plate supporting unit (2) is arranged on the first transmission unit (4) and synchronously moves along with the first transmission unit (4) so as to realize the reciprocating movement of the valve plate (1) along a third moving track;
when the transmission member (31) moves to the start point of the second movement track, the transmission abutting portion (311) is separated from abutting against the first transmission unit (4), and the elastic compression amount is fixed.
4. The slit valve of claim 3, wherein the slit valve is configured to,
the transmission member (31) comprises a first transmission portion (312);
the second transmission unit (5) comprises a moving member (51); the moving part (51) comprises a second transmission part (511) and a limiting part (512); the second transmission part (511) can be in transmission connection with the first transmission part (312), and the limit part (512) can be in transmission fit with the valve plate supporting unit (2);
wherein, when the transmission member (31) reciprocates along the second running track, the first transmission part (312) is in transmission fit with the second transmission part (511) so as to transmit the motion of the first transmission part (312) parallel to the third running track into the motion of the second transmission part (511) parallel to the fourth running track; meanwhile, the limiting part (512) is in transmission fit with the valve plate supporting unit (2) so as to realize the reciprocating motion of the valve plate (1) along the fourth moving track.
5. Slit valve according to claim 4, characterized in that the first transmission unit (4) comprises:
a compression spring (41), the compression spring (41) having an elastic compression amount;
A movement limiting member (42) having a first surface and a second surface opposite to each other; the first face is connected to the compression spring (41); the second surface is connected with the valve plate supporting unit (2), and can be abutted with the transmission abutting part (311);
fixed limiting pieces (43) are arranged at one side of the movable limiting pieces (42) close to the second surface at intervals, and the fixed limiting pieces (43) can be abutted with the second surface;
when the transmission member (31) moves to the starting point of the second moving track, the transmission abutting part (311) is separated from abutting with the second surface, and the fixed limiting member (43) abuts with the second surface.
6. The slit valve of claim 4, wherein,
the first transmission part (312) is provided with a first transmission surface;
the second transmission part (511) is a transmission groove formed in the moving part (51), and the central axis of the transmission groove is parallel to the movement direction of the third movement track; the transmission groove is internally provided with a second transmission surface in transmission fit with the first transmission surface;
the limiting part (512) is a limiting groove formed in the moving part (51), and the central axis of the limiting groove is parallel to the movement direction of the third movement track; the valve plate supporting unit (2) is arranged in the limiting groove in a penetrating mode and can move along the direction parallel to the third moving track;
The second transmission surface is inclined from the starting point of the fourth running track to the ending point of the fourth running track relative to the side, close to the valve plate (1), of the second transmission surface, which is far away from the valve plate (1).
7. The slit valve of claim 6, wherein the slit valve is configured to,
the second transmission unit (5) further comprises a guide (52);
the guide piece (52) is provided with a first guide part (521) parallel to the fourth running track;
a second guide part (513) parallel to the fourth running track is arranged on the moving part (51); the second guide part (513) is matched with the first guide part (521);
wherein, the position of the guide piece (52) opposite to the transmission groove is provided with a first groove;
a second groove is formed in the position, opposite to the limiting groove, of the guide piece (52); the size of the second groove is larger than that of the limit groove;
wherein the valve plate support unit (2) passes through the second groove.
8. Slit valve according to claim 5, characterized in that said valve plate support unit (2) comprises:
a support shaft (21); the first end of the supporting shaft (21) is the connecting end; the second end of the supporting shaft (21) is connected to the moving limiting piece (42);
The protection sleeve (22) is sleeved on the support shaft (21), and the protection sleeve (22) can be contracted or expanded in the direction parallel to the third running track;
the compression block (23) is provided with a first sealing hole (231) and is opposite to the position of the limiting part (512);
wherein a first end of the protective sleeve (22) is fixedly arranged in the first sealing hole (231); the second end of the protective sleeve (22) is fixedly arranged on the supporting shaft (21);
when the support shaft (21) moves in a direction parallel to the third running track, the protective sleeve (22) contracts or expands.
9. A semiconductor processing apparatus, wherein the slit valve of any one of claims 1 to 8 is applied;
the semiconductor processing equipment comprises a first chamber, a connecting transition cabin (6) and a second chamber which are sequentially arranged;
the connecting transition cabin (6) is provided with the communication port (61);
the communication port (61) is perpendicular to the fourth running track;
the valve plate (1) is positioned in the connecting transition cabin (6) and is used for sealing or opening the communication port (61).
10. A semiconductor processing apparatus according to claim 9, further comprising a sealing base (7);
The connecting transition cabin (6) is provided with an opening; the opening is perpendicular to the third running track;
the sealing base (7) is arranged at the opening in a sealing way;
a second sealing hole (71) is formed in the sealing base (7); a sealing element (8) is arranged at the second sealing hole (71);
when the transmission piece (31) reciprocates along the first running track, the valve plate supporting unit (2) can penetrate into and out of the second sealing hole (71) and is in sealing contact with the sealing piece (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211235116.4A CN115750793B (en) | 2022-10-10 | 2022-10-10 | Slit valve and semiconductor processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211235116.4A CN115750793B (en) | 2022-10-10 | 2022-10-10 | Slit valve and semiconductor processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115750793A CN115750793A (en) | 2023-03-07 |
| CN115750793B true CN115750793B (en) | 2023-12-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211235116.4A Active CN115750793B (en) | 2022-10-10 | 2022-10-10 | Slit valve and semiconductor processing equipment |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201038847A (en) * | 2009-04-22 | 2010-11-01 | Tsung-Lin Shen | Vacuum device |
| CN203442209U (en) * | 2013-08-08 | 2014-02-19 | 洛阳三旋特种阀门有限公司 | Center feeding three-way tower bottom valve |
| DE102014119102B3 (en) * | 2014-12-18 | 2015-12-03 | Reinert - Ritz Gmbh | Shut-off valve, in particular of plastic, for pipelines |
| CN109210224A (en) * | 2018-10-10 | 2019-01-15 | 中冶南方工程技术有限公司 | Two way seal gate valve |
| CN115143298A (en) * | 2022-06-28 | 2022-10-04 | 中彩智诚(北京)科技发展有限公司 | Cylindrical self-excitation type high-pressure pneumatic quick-opening valve |
-
2022
- 2022-10-10 CN CN202211235116.4A patent/CN115750793B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201038847A (en) * | 2009-04-22 | 2010-11-01 | Tsung-Lin Shen | Vacuum device |
| CN203442209U (en) * | 2013-08-08 | 2014-02-19 | 洛阳三旋特种阀门有限公司 | Center feeding three-way tower bottom valve |
| DE102014119102B3 (en) * | 2014-12-18 | 2015-12-03 | Reinert - Ritz Gmbh | Shut-off valve, in particular of plastic, for pipelines |
| CN109210224A (en) * | 2018-10-10 | 2019-01-15 | 中冶南方工程技术有限公司 | Two way seal gate valve |
| CN115143298A (en) * | 2022-06-28 | 2022-10-04 | 中彩智诚(北京)科技发展有限公司 | Cylindrical self-excitation type high-pressure pneumatic quick-opening valve |
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| Publication number | Publication date |
|---|---|
| CN115750793A (en) | 2023-03-07 |
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