CN115747746A - Cavity cooling system and method for vacuum coating machine - Google Patents

Cavity cooling system and method for vacuum coating machine Download PDF

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CN115747746A
CN115747746A CN202211272284.0A CN202211272284A CN115747746A CN 115747746 A CN115747746 A CN 115747746A CN 202211272284 A CN202211272284 A CN 202211272284A CN 115747746 A CN115747746 A CN 115747746A
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temperature
cooling
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cooling device
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杨玉飞
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Jiangyin Mudas Vacuum Equipment Co ltd
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Jiangyin Mudas Vacuum Equipment Co ltd
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Abstract

The invention discloses a cavity cooling method and a system, belonging to the technical field of vacuum coating machines, in particular to a cavity cooling system and a method of a vacuum coating machine, wherein the cavity temperature and the temperature of a cooling device are collected by a temperature sensor of an information collection module and are uploaded to a programmable control module for state centralized monitoring and regulation; the programmable control module inputs and outputs control signals corresponding to each module and the cooling device, and sends the running state information of the cooling device to the upper computer monitoring module, and the upper computer monitoring module realizes real-time monitoring and analysis control on the cooling device and the cavity conditions, so that the invention can monitor the temperature of the cavity and the cooling equipment in real time, realize multiple remote and short control modes, and greatly improve the efficiency.

Description

Cavity cooling system and method for vacuum coating machine
Technical Field
The invention discloses a cavity cooling method and system, belongs to the technical field of vacuum coating machines, and particularly relates to a cavity cooling system and method of a vacuum coating machine.
Background
The vacuum coating machine mainly refers to a coating machine which needs to be carried out under a higher vacuum degree, and specifically comprises various types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and the like. The main idea is to divide into evaporation and sputtering. A
The existing vacuum coating machine has poor cavity cooling operation effect, unstable heat dissipation and overhigh cavity temperature; therefore, the existing requirements are not met, and a cavity cooling device of a vacuum coating machine is provided for the requirement. In the prior art, when the cooling is carried out, the equipment can be observed by workers only, so that the equipment is inconvenient.
Disclosure of Invention
The purpose of the invention is as follows: provides a cavity cooling system and a cavity cooling method of a vacuum coating machine, and solves the problems.
In a first aspect, a chamber cooling system for a vacuum coating machine comprises: the power supply module monitors the states of two mutually independent power supplies of the cooling device through the three-phase power acquisition module;
the information acquisition module is used for monitoring, regulating and controlling the state in a centralized manner by the temperature sensor cavity temperature and the cooling device temperature and uploading the temperature to the programmable control module;
the programmable control module inputs and outputs control signals corresponding to each module and the cooling device and sends the running state information of the cooling device to the upper computer monitoring module;
the interactive communication module is coupled with the programmable control module and is used for interactive communication between the programmable control module and the upper computer module and timely mastering the running state of the cooling device and the internal cooling condition of the cavity;
and the upper computer monitoring module is used for monitoring, analyzing and controlling the conditions of the cooling device and the cavity in real time.
In a further embodiment, the programmable control module can monitor only the current target cooling device and cavity, and each cavity is equipped with a cooling device, the cooling device and the cavity need to be rapidly and accurately adjusted and controlled according to the collected signals of the information collecting module, and the mark W is marked according to the collected cavity temperature and the cooling temperature of the cooling device 1 And W 2 And controlling the output temperature of the cooling device by using the fuzzy controller according to the temperature difference monitored by the temperature sensor, wherein the physical domain of the temperature difference of a given cavity is (-15, 15), and the basic domain of the temperature difference change rate is (-1, 1), so that fuzzy subsets of input and output variables of the fuzzy controller can be divided into { positive large (PB) }, { Positive Middle (PM) }, { Positive Small (PS) }, { Zero (ZO) }, { Negative Small (NS) }, { Negative Middle (NM) and { negative large (NB) }7 levels, and then the corresponding fuzzy domains are:
{3,2,1,0,-1,-2,-3}。
in a further embodiment, the information acquisition module converts the signal, and the information acquisition module is divided into an analog-to-digital conversion module and an interface conversion module, wherein the analog-to-digital conversion module converts the analog signal into a digital signal, and the interface module converts the digital signal into an interface signal.
In a further embodiment, the interactive communication module converts the cavity temperature in the programmable control module and the cooling temperature signal of the cooling device into wireless signals and transmits the wireless signals to the upper computer monitoring module, the upper computer monitoring module carries out data transmission and transmits the analysis result to the mobile client, and the mobile client displays the real-time monitoring parameters and the data analysis result.
In a further embodiment, a storage module is arranged inside each of the programmable control module and the upper computer monitoring module;
the storage module is used for classifying and storing different types of data.
In a second aspect, a method for cooling a chamber of a vacuum coater comprises:
step 1, firstly, a power module power-on equipment system is electrified and initialized, and a cooling and alarm threshold value and mode selection are set;
step 2, the information acquisition module detects the temperature of the cavity and the cooling temperature of the cooling device and inputs the temperature to the programmable control module;
step 3, the programmable control module carries out fuzzy initial adjustment according to the data;
step 4, inputting the cavity temperature and the cooling temperature of the cooling device into an upper computer monitoring module through an interactive communication module;
and 5, the upper computer monitoring module analyzes and predicts the data, and issues a control signal and stores the information.
In a further embodiment, after the whole cooling system is powered on, the programmable control module and the upper computer monitoring module are initialized firstly, the upper computer monitoring module can be set in a remote or local, manual or automatic mode, and the upper computer monitoring module executes a monitoring task after reading the corresponding mode and can receive the cavity temperature and the state parameters of the cooling device; in order to prevent frequent switching actions of the cooling device, a device switching threshold and a device exiting threshold are respectively set in the programmable control module, and a group of cooling groups is switched into operation by default in an automatic control mode; and when the temperature of the cavity is higher than the device input threshold value, continuing inputting the second group of cooling devices, and when the temperature of the cavity is lower than the cut-out threshold value, stabilizing the current input.
In a further embodiment, if a certain group of cooling devices are abnormal in the operation process, the programmable control module can automatically cut off the group of devices, then other numbering devices are started for replacement, and meanwhile, an alarm signal and related information including the numbers of the abnormal cooling devices, temperature parameters and fault properties can be sent to the upper computer monitoring module; in addition, in order to avoid service life shortening caused by long-term high-load operation of the single-group cooling device, a rotation working strategy is designed in the monitoring system, and fixed rotation time is set in a main program. When the rotation time is reached, different groups of cooling devices can be automatically switched, so that the service life of each group of cooling device assemblies can be effectively prolonged while the safe and stable operation of the transformer is ensured.
In a further embodiment, in the step 5, the upper computer monitoring module performs data analysis and prediction, and establishes a prediction model by using the cooling temperature and the cavity temperature, and the specific steps are as follows:
step 51, the cooling temperature and the cavity temperature are in inverse proportion, the cavity temperature is in a slow descending trend at the initial stage of operation of the cooling device, and after the cavity temperature is stable, the cavity temperature keeps a stable value for a long time and has an equal ratio characteristic, so that a sequence X is set (0) Comprises the following steps:
Figure SMS_1
step 52, generating X (0) One accumulation sequence of (a):
Figure SMS_2
wherein the content of the first and second substances,
Figure SMS_3
the calculation formula of (2) is as follows:
Figure SMS_4
step 53, calculating the model parameter value by using the least square method, and setting a * =(a 1 ,a 2 ) T Is the parameter column of the model, and:
Figure SMS_5
Figure SMS_6
the estimate of the model is then: a is a * =(a 1 ,a 2 ) T =(B T B) -1 B T Y
Step 54, get
Figure SMS_7
The model's push function is then:
Figure SMS_8
then find the reduction value X *(1) Comprises the following steps:
Figure SMS_9
wherein the content of the first and second substances,
Figure SMS_10
is a predicted value at the moment of k +1,
Figure SMS_11
accumulating the predicted value for one time at the moment of k + 1;
step 55, producing a prediction model:
Figure SMS_12
wherein, the first and the second end of the pipe are connected with each other,
Figure SMS_13
accumulating the predicted value for one time at the moment of k + 1;
Figure SMS_14
for a cumulative prediction at time k, a 1 、a 2 Are model parameters.
In a further embodiment, the data store comprises creating a storage file and appending data.
Has the advantages that: the invention discloses a cavity cooling method and a system, which belong to the technical field of vacuum coating machines, in particular to a cavity cooling system and a method of a vacuum coating machine, wherein the cavity temperature and the cooling device temperature are collected by a temperature sensor of an information collection module and are uploaded to a programmable control module for state centralized monitoring and regulation; the programmable control module inputs and outputs control signals corresponding to each module and the cooling device, and sends the running state information of the cooling device to the upper computer monitoring module, and the upper computer monitoring module realizes real-time monitoring and analysis control on the cooling device and the cavity conditions, so that the invention can monitor the temperature of the cavity and the cooling equipment in real time, realize multiple remote and short control modes, and greatly improve the efficiency.
Drawings
Fig. 1 is the overall functional architecture of the cooling system of the present invention.
FIG. 2 is a graph of fuzzy control input-output membership function of the programmable control module of the present invention.
Fig. 3 is a schematic diagram of the system power-on initialization of the present invention.
FIG. 4 is a control schematic of the programmable control module of the present invention.
FIG. 5 is a schematic diagram of an information collection module of the present invention.
FIG. 6 is a simplified flow diagram of the present invention for creating a storage file.
FIG. 7 is a schematic flow chart of the present invention for adding data to a storage file.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
Example 1:
a vacuum coating machine cavity cooling system comprises: the method comprises the following steps: the power supply module monitors the states of two mutually independent power supplies of the cooling device through the three-phase power acquisition module;
the information acquisition module is used for monitoring, regulating and controlling the state in a centralized manner by the temperature sensor cavity temperature and the cooling device temperature and uploading the temperature to the programmable control module;
the programmable control module inputs and outputs control signals corresponding to each module and the cooling device and sends the running state information of the cooling device to the upper computer monitoring module;
the interactive communication module is coupled with the programmable control module and is used for interactive communication between the programmable control module and the upper computer module and timely mastering the running state of the cooling device and the internal cooling condition of the cavity;
and the upper computer monitoring module is used for monitoring, analyzing and controlling the conditions of the cooling device and the cavity in real time.
In one embodiment, as shown in fig. 2, the programmable control module can only monitor the current target cooling device and cavity, and each cavity is equipped with a cooling device, according to the collected signal of the information collecting module, the cooling device and the cavity need to be adjusted and controlled rapidly and precisely, and the mark is W according to the collected cavity temperature and the cooling temperature of the cooling device 1 And W 2 According to the temperature difference monitored by the temperature sensor, the output temperature of the cooling device is regulated and controlled by the fuzzy controller, the physical domain of the temperature difference of the given cavity is (-15, 15), and the basic domain of the temperature difference change rate is set to be (-1, 1), so that the temperature difference can be obtainedFuzzy subsets of fuzzy controller input and output variables are divided into { positive large (PB) }, { Positive Middle (PM) }, { Positive Small (PS) }, { Zero (ZO) }, { Negative Small (NS) }, { Negative Middle (NM), and { negative large (NB) }7 levels, then the corresponding fuzzy inference field is:
{3,2,1,0,-1,-2,-3}。
in one embodiment, as shown in fig. 5, the information acquisition module converts the signal, and the information acquisition module is divided into an analog-to-digital conversion module and an interface conversion module, where the analog-to-digital conversion module converts the analog signal into a digital signal, and the interface module converts the digital signal into an interface signal.
In one embodiment, the interactive communication module converts the cavity temperature signal in the programmable control module and the cooling temperature signal of the cooling device into wireless signals and transmits the wireless signals to the upper computer monitoring module, the upper computer monitoring module carries out data transmission and transmits the analysis result to the mobile client, and the mobile client displays the real-time monitoring parameters and the data analysis result.
In one embodiment, a storage module is arranged inside each of the programmable control module and the upper computer monitoring module;
the storage module is used for classifying and storing different types of data.
Example 2:
a method for cooling a cavity of a vacuum coating machine comprises the following steps:
step 1, firstly, a power module power-on equipment system is electrified and initialized, and a cooling and alarm threshold value and mode selection are set;
step 2, detecting the cavity temperature and the cooling temperature of the cooling device by the information acquisition module, and inputting the detected temperatures into the programmable control module;
step 3, the programmable control module carries out fuzzy initial adjustment according to the data;
step 4, inputting the cavity temperature and the cooling temperature of the cooling device into an upper computer monitoring module through an interactive communication module;
and 5, the upper computer monitoring module analyzes and predicts the data, and sends a control signal and stores the information.
In one embodiment, as shown in fig. 3 and 4, after the whole cooling system is powered on, the programmable control module and the upper computer monitoring module perform initialization operation first, the upper computer monitoring module can be set in a remote or local, manual or automatic mode, and the upper computer monitoring module executes monitoring tasks after reading corresponding modes, and can receive the cavity temperature and the state parameters of the cooling device; in order to prevent frequent switching actions of the cooling device, a device switching threshold value and a device exiting threshold value are respectively set in the programmable control module, and a group of cooling groups is switched to work by default in an automatic control mode; and when the temperature of the cavity is higher than the device input threshold value, continuing inputting the second group of cooling devices, and when the temperature of the cavity is lower than the cut-out threshold value, stabilizing the current input.
In one embodiment, as shown in fig. 4, if a certain group of cooling devices is abnormal during operation, the programmable control module will automatically remove the group of cooling devices, turn on other numbering devices for replacement, and send an alarm signal and related information to the upper computer monitoring module, including the number of the abnormal cooling device, temperature parameters and fault properties; in addition, in order to avoid service life shortening caused by long-term high-load operation of the single-group cooling device, a rotation working strategy is designed in the monitoring system, and fixed rotation time is set in a main program. When the rotation time is reached, different groups of cooling devices can be automatically switched, so that the service life of each group of cooling device assemblies can be effectively prolonged while the safe and stable operation of the transformer is ensured.
In one embodiment, in step 5, the upper computer monitoring module performs data analysis and prediction, and establishes a prediction model by using the cooling temperature and the cavity temperature, and the specific steps are as follows:
step 51, the cooling temperature and the cavity temperature are in inverse proportion, the cavity temperature is in a slow descending trend at the initial stage of operation of the cooling device, and after the cavity temperature is stable, the cavity temperature keeps a stable value for a long time and has an equal ratio characteristic, so that a sequence X is set (0) Comprises the following steps:
Figure SMS_15
step 52, generating X (0) A series of one accumulation of (c):
Figure SMS_16
wherein the content of the first and second substances,
Figure SMS_17
the calculation formula of (c) is:
Figure SMS_18
step 53, calculating the model parameter value by using the least square method, and setting a * =(a 1 ,a 2 ) T Is the parameter column of the model, and:
Figure SMS_19
Figure SMS_20
the estimate of the model is then: a is * =(a 1 ,a 2 ) T =(B T B) -1 B T Y
Step 54, get
Figure SMS_21
The model's push function is then:
Figure SMS_22
then find the reduction value X *(1) Comprises the following steps:
Figure SMS_23
wherein, the first and the second end of the pipe are connected with each other,
Figure SMS_24
is a predicted value at the moment of k +1,
Figure SMS_25
accumulating the predicted value for one time at the moment of k + 1;
step 55, producing a prediction model:
Figure SMS_26
wherein the content of the first and second substances,
Figure SMS_27
accumulating the predicted value for one time at the moment of k + 1;
Figure SMS_28
for a cumulative prediction at time k, a 1 、a 2 Are model parameters.
In one embodiment, as shown in fig. 6 and 7, the data storage includes creating storage files and adding data, according to the previous storage scheme design, in case of normal operation of the water cooling system, the data will be stored every 2min, each storage file stores one month of data amount, and each storage file can store 21600 pieces of data calculated by 30 days per month. Excel tables in xls format are used as storage files, each of which will be named with "data" plus the number of the corresponding year and month. The operation of storing data in an XLS grid Excel table is realized by adopting java programming, a jar packet which is an Apache POI is mainly used at present, the jar packet is an open source project developed by an Apache software foundation, and an HSSF packet therein provides the function of reading and writing a document in a Microsoft Excel XLS format. Data storage operations include both the case of initially creating a file and appending data. The initial file is created in a specified directory before data storage is started, an xls file is set, a header row of the file is set, the content of the file comprises 5 columns which are respectively time, flow 1, temperature 1, flow 2 and temperature 2, the unit of the flow is L/min, and the unit of the temperature is ℃. After the program for creating the file is executed, a storage file is generated. The additional data is created by additionally writing the real-time analysis data into the xls file according to the subsequently received analysis data. When the data is stored for one month, the program will create a new storage file again, and continue to add data in the new storage file, and the process is circulated.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.

Claims (10)

1. A vacuum coating machine cavity cooling system is characterized by comprising:
the power supply module monitors the states of two paths of mutually independent power supplies of the cooling device through the three-phase power acquisition module;
the information acquisition module is used for monitoring, regulating and controlling the state in a centralized manner by the temperature sensor cavity temperature and the cooling device temperature and uploading the temperature to the programmable control module;
the programmable control module inputs and outputs control signals corresponding to each module and the cooling device and sends the running state information of the cooling device to the upper computer monitoring module;
the interactive communication module is coupled with the programmable control module and is used for interactive communication between the programmable control module and the upper computer module and timely mastering the running state of the cooling device and the internal cooling condition of the cavity;
and the upper computer monitoring module is used for monitoring, analyzing and controlling the conditions of the cooling device and the cavity in real time.
2. The system of claim 1, wherein the programmable control module is capable of monitoring only the current target cooling device and the chamber, and each chamber is equipped with a cooling device, and the cooling device and the chamber are required to be rapidly operated according to the signal collected by the information collecting moduleAccurately adjusting and controlling, and marking as W according to the collected cavity temperature and cooling temperature of the cooling device 1 And W 2 According to the temperature difference monitored by the temperature sensor, the output temperature of the cooling device is regulated and controlled by the fuzzy controller, the physical domain of the temperature difference of the given cavity is (-15, 15), and the basic domain of the change rate of the temperature difference is set to be (-1, 1), so that fuzzy subsets of input and output variables of the fuzzy controller can be obtained as follows: { positive large (PB) }, { Positive (PM) }, { Positive Small (PS) }, { Zero (ZO) }, { Negative Small (NS) }, { Negative Medium (NM) and { negative large (NB) }7 levels, then the corresponding ambiguity fields are:
{3,2,1,0,-1,-2,-3}。
3. the vacuum coater chamber cooling system as defined in claim 1 wherein the information collection module converts signals and is divided into an analog-to-digital conversion module and an interface conversion module, the analog-to-digital conversion module converts analog signals into digital signals and the interface module converts digital signals into interface signals.
4. The vacuum coating machine cavity cooling system of claim 1, wherein the interactive communication module converts cavity temperature signals in the programmable control module and cooling temperature signals of the cooling device into wireless signals, and transmits the wireless signals to the upper computer monitoring module, the upper computer monitoring module carries out data transmission, analysis results are transmitted to the mobile client, and the mobile client displays real-time monitoring parameters and data analysis results.
5. The cooling system of vacuum coating machine cavity according to claim 1,
the programmable control module and the upper computer monitoring module are internally provided with storage modules;
the storage module is used for classifying and storing different types of data.
6. A method for cooling a cavity of a vacuum coating machine is characterized by comprising the following steps:
step 1, firstly, a power module power-on equipment system is electrified and initialized, and a cooling and alarm threshold value and mode selection are set;
step 2, the information acquisition module detects the temperature of the cavity and the cooling temperature of the cooling device and inputs the temperature to the programmable control module;
step 3, the programmable control module carries out fuzzy initial adjustment according to the data;
step 4, inputting the cavity temperature and the cooling temperature of the cooling device into an upper computer monitoring module through an interactive communication module;
and 5, the upper computer monitoring module analyzes and predicts the data, and sends a control signal and stores the information.
7. The cooling method of vacuum coating machine cavity according to claim 6, characterized in that,
after the whole cooling system is powered on, the programmable control module and the upper computer monitoring module are initialized firstly, the upper computer monitoring module can be set to be in a remote or local, manual or automatic mode, and the upper computer monitoring module executes a monitoring task after reading the corresponding mode and can receive the cavity temperature and the state parameters of the cooling device; in order to prevent frequent switching actions of the cooling device, a device switching threshold and a device exiting threshold are respectively set in the programmable control module, and a group of cooling groups is switched into operation by default in an automatic control mode; and when the temperature of the cavity is higher than the device input threshold value, continuing inputting the second group of cooling devices, and when the temperature of the cavity is lower than the cut-out threshold value, stabilizing the current input.
8. The cooling method of vacuum coating machine cavity according to claim 7,
if a certain group of cooling devices are abnormal in the operation process, the programmable control module can automatically cut off the group of cooling devices, then other numbering devices are started for replacement, and meanwhile, an alarm signal and related information including the numbers, temperature parameters and fault properties of the abnormal cooling devices can be sent to the upper computer monitoring module.
9. The method for cooling the cavity of the vacuum coating machine according to claim 6, wherein the upper computer monitoring module performs data analysis and prediction in step 5, and a prediction model is established by using the cooling temperature and the cavity temperature, and the method comprises the following specific steps:
step 51, the cooling temperature and the cavity temperature are in inverse proportion, the cavity temperature is in a slow descending trend at the initial stage of operation of the cooling device, and after the cavity temperature is stable, the cavity temperature keeps a stable value for a long time and has an equal ratio characteristic, so that a sequence X is set (0) Comprises the following steps:
Figure FDA0003895517860000041
step 52, generating X (0) One accumulation sequence of (a):
Figure FDA0003895517860000042
wherein the content of the first and second substances,
Figure FDA0003895517860000043
the calculation formula of (c) is:
Figure FDA0003895517860000044
step 53, calculating the model parameter value by using the least square method, and setting a * =(a 1 ,a 2 ) T Is the parameter column of the model, and:
Figure FDA0003895517860000045
Figure FDA0003895517860000046
the estimate of the model is then: a is a * =(a 1 ,a 2 ) T =(B T B) -1 B T Y
Step 54, get
Figure FDA0003895517860000047
The model's push function is then:
Figure FDA0003895517860000048
then find the reduction value X *(1) Comprises the following steps:
Figure FDA0003895517860000051
wherein the content of the first and second substances,
Figure FDA0003895517860000052
is a predicted value at the moment of k +1,
Figure FDA0003895517860000053
accumulating the predicted value for the moment k + 1;
step 55, producing a prediction model:
Figure FDA0003895517860000054
wherein, the first and the second end of the pipe are connected with each other,
Figure FDA0003895517860000055
accumulating the predicted value for one time at the moment of k + 1;
Figure FDA0003895517860000056
is an accumulated prediction value of the time, a 1 、a 2 Are model parameters.
10. The method of claim 6, wherein the data storage comprises creating a storage file and adding data.
CN202211272284.0A 2022-10-18 2022-10-18 Cavity cooling system and method for vacuum coating machine Pending CN115747746A (en)

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CN109945588A (en) * 2019-03-18 2019-06-28 常州市乐萌压力容器有限公司 A kind of coolant circulation system and control method applied on coating machine
CN112030146A (en) * 2020-08-04 2020-12-04 西安电子科技大学芜湖研究院 Diamond growth control method and device based on PLC cooling device
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