CN115726029A - Beam mechanical controllable molecular beam epitaxial metal element source furnace with valve block - Google Patents
Beam mechanical controllable molecular beam epitaxial metal element source furnace with valve block Download PDFInfo
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- CN115726029A CN115726029A CN202211560975.0A CN202211560975A CN115726029A CN 115726029 A CN115726029 A CN 115726029A CN 202211560975 A CN202211560975 A CN 202211560975A CN 115726029 A CN115726029 A CN 115726029A
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Abstract
The invention discloses a beam mechanical controllable molecular beam epitaxy metal element source furnace with a valve block, which comprises a crucible body and a crucible cover arranged on the upper part of the crucible body, wherein the crucible cover is internally provided with the valve block capable of sealing the crucible cover, and the top of the valve block is connected with a control screw rod through a connecting rod assembly; the crucible comprises a crucible body, a vacuum flange, a connecting rod assembly, a resistance heating wire, a connecting rod and a control screw rod, wherein a heat insulation sleeve is arranged outside the crucible body, the resistance heating wire is arranged in the heat insulation sleeve, the bottom of the heat insulation sleeve is connected to the vacuum flange through a support, a corrugated pipe is arranged in the vacuum flange, and the connecting rod assembly penetrates through the corrugated pipe and then is connected with the control screw rod; the invention can improve the quality of epitaxial growth and the yield; metal sources can be saved; the epitaxial growth time can be shortened; the maintenance cost of the vacuum chamber can be reduced. The advantages enable the epitaxial growth to save a large amount of cost and improve the benefit.
Description
Technical Field
The invention relates to the technical field of molecular beam epitaxy equipment, in particular to a beam mechanical controllable molecular beam epitaxy metal element source furnace with a valve block.
Background
Molecular Beam Epitaxy (MBE) is a newly developed epitaxial film-making method and is also a special vacuum coating process. Epitaxy is a new technique for preparing single crystal thin films, and is a method for growing thin films layer by layer along the crystal axis direction of a substrate material under a proper substrate and proper conditions. The technology has the advantages that: the used substrate has low temperature, the film layer has slow growth rate, the beam intensity is easy to control accurately, and the film layer components and the doping concentration can be adjusted rapidly along with the source change. By the technology, single crystal films as thin as tens of atomic layers can be prepared, and ultrathin quantum microstructure materials formed by alternately growing films with different components and different doping can be prepared.
Molecular beam epitaxy is one of the most important material growth devices in the semiconductor field at present, and can be used for preparing most of the existing semiconductor devices and also can be used for preparing a plurality of new devices, wherein the new devices comprise superlattice structures, high electron mobility transistors, multiple quantum well type laser diodes and the like which are difficult to realize by other methods, such as by means of atomic scale film thickness control. For the above-mentioned epitaxial growth at atomic scale, high demands are put on the source furnace.
Present molecular beam epitaxy equipment is to non-metallic source material source stove such as arsenic and phosphorus, the commonly adopted pyrolysis furnace, because non-metallic source material corrosivity is lower under gaseous phase and liquid phase, is difficult to the adhesion moreover, so this type of pyrolysis furnace can be through the design of pinhole valve for the switch of control source stove and the accurate quick control of realization beam size. For metal source materials such as gallium, indium, aluminum and the like, the metal materials are not suitable for the design of a pinhole valve because the metal materials are high in corrosivity in a gas phase and a liquid phase and are easy to adhere. As shown in fig. 2, a shutter which can be opened and closed is disposed at a position about 1 cm from a crucible in a conventional metal source furnace, and is used for controlling the on and off of a beam. The shutter cannot contact the crucible due to the adhesion of the metal. The disadvantages are as follows: 1. even if the shutter is in the closed position, the metal vapor can still evaporate from the space between the shutter and the crucible in large amounts, resulting in a waste of source material. 2. The evaporation of the waste metal vapors from between the shutter and the crucible causes contamination of the chamber. 3. The shutter only has an opening position and a closing position, and the size of the beam current cannot be accurately regulated and controlled. The beam size can be regulated and controlled only by the heating temperature of the source furnace, and the beam size cannot be regulated and controlled instantaneously because the temperature rise and fall take a long time. 4. If the condensation of metal steam takes place at the crucible oral area, inside the metal liquid drop after the condensation can flow back to the crucible, because the temperature difference is great, can take place the sputtering of metal liquid drop, cause the oval defect of epitaxial film, harm is very big.
If the defects of the metal material source furnace can be overcome, the performance of the molecular beam epitaxy technology can be greatly improved.
Disclosure of Invention
In order to solve the technical problems, the technical scheme provided by the invention is as follows: a beam mechanical controllable molecular beam epitaxy metal element source furnace with a valve block comprises a crucible body and a crucible cover arranged on the upper portion of the crucible body, wherein the crucible cover is internally provided with the valve block capable of sealing the crucible cover, and the top of the valve block is connected with a control screw rod through a connecting rod assembly; the crucible comprises a crucible body, a vacuum flange, a connecting rod assembly, a resistance heating wire, a connecting rod and a control screw rod, wherein a heat insulation sleeve is arranged outside the crucible body, the resistance heating wire is arranged in the heat insulation sleeve, the bottom of the heat insulation sleeve is connected to the vacuum flange through a support, a corrugated pipe is arranged in the vacuum flange, and the connecting rod assembly penetrates through the corrugated pipe and then is connected with the control screw rod; the vacuum flange comprises an upper flange plate and a lower flange block, a corrugated pipe installation cavity is formed between the top of the lower flange block and the upper flange plate, the corrugated pipe is arranged in the corrugated pipe installation cavity, and the control screw rod is arranged on the lower flange block through threads.
Compared with the prior art, the invention has the advantages that: compared with the prior device, the invention has the following advantages: (1) The sealing of the source furnace and the accurate control of beam current can be realized by using a valve.
(2) Expensive metal sources can be greatly saved, and the pollution of the leaked metal sources to the cavity can be avoided.
(3) The instantaneous control of beam current can be realized, and the growth time is shortened. While finer growth can be achieved.
(5) The valve can effectively prevent the backflow condensed liquid from sputtering outwards, thereby avoiding the elliptical defect in epitaxial growth.
The invention can improve the quality of epitaxial growth and the yield; metal sources can be saved; the epitaxial growth time can be shortened; the maintenance cost of the vacuum chamber can be reduced. These advantages enable epitaxial growth to save a great deal of cost and improve the benefits.
Drawings
Fig. 1 is a schematic structural diagram of a beam mechanical controllable molecular beam epitaxy metal element source furnace with a valve block.
FIG. 2 is a schematic view of a conventional metal source furnace.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
In the description of the embodiments of the present invention, it should be noted that, if the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate an orientation or a positional relationship based on an orientation or a positional relationship shown in the drawings, or an orientation or a positional relationship which is usually arranged when the product of the present invention is used, it is only for convenience of description and simplification of the description, but does not indicate or imply that the device or the element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another, and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical", "overhang" and the like do not require that the components be absolutely horizontal or overhang, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the embodiments of the present invention, "a plurality" means at least 2.
In the description of the embodiments of the present invention, it should be further noted that unless otherwise explicitly stated or limited, the terms "disposed," "mounted," "connected," and "connected" should be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
The embodiment is as follows:
a beam mechanical controllable molecular beam epitaxy metal element source furnace with a valve block comprises a crucible body 1 and a crucible cover 2 arranged on the upper portion of the crucible body 1, wherein a valve block 3 capable of sealing the crucible cover is arranged in the crucible cover 2, the top of the valve block 3 is connected with a control screw rod 5 through a connecting rod assembly 4, and a crucible is arranged to be a crucible cover and a crucible body which are assembled up and down, so that the valve block and the crucible cover can be conveniently installed; the upper part of the crucible cover 2 is provided with a tightening structure 201, and the valve block 3 is matched with the tightening structure 201 in shape, so that the tightening structure 201 of the crucible cover 2 can be sealed or opened when the valve block 3 moves up and down under the driving of the connecting rod assembly 4; the tightening structure can be in a conical shape or other shapes convenient for sealing, and the crucible and the sealing block can be made of thermal cracking boron nitride, graphite, al2O3 and the like, and can effectively prevent the corrosion of metal steam without being limited to the materials. The connecting rod assembly 4 is made of a heat-resistant metal material, such as tantalum or molybdenum, but not limited to these two materials, and other heat-resistant metal materials may be used.
A heat insulation sleeve 6 is arranged outside the crucible body 1, a resistance heating wire 7 is arranged in the heat insulation sleeve 6, the bottom of the heat insulation sleeve 6 is connected to a vacuum flange 8 through a support 9, a corrugated pipe 9 is arranged in the vacuum flange 8, and a connecting rod assembly 4 penetrates through the corrugated pipe 9 and then is connected with a control screw 5;
the holder 9 is used to support the source furnace components of the crucible and is typically machined from a vacuum material such as, but not limited to, 316 stainless steel;
the heat-insulating envelope 6 is used for enclosing the crucible, the heating wire and the like, and is typically a heat-resistant metal material, such as tantalum or molybdenum, but not limited to these two materials, and other heat-resistant metal materials can be used.
The control screw 5 realizes the precise movement control of the corrugated pipe by threads. The screw rod can also be externally connected with a stepping motor to realize accurate digital control.
The connecting rod assembly 4 is rigid, one end of the connecting rod assembly is connected with the valve, and the other end of the connecting rod assembly is connected with the corrugated pipe. Can be finely adjusted and moved up and down for the accurate control of the valve.
The vacuum flange 8 comprises an upper flange plate 801 and a lower flange block 802, a bellows installation cavity 803 is arranged between the top of the lower flange block 802 and the upper flange plate 801, a bellows 9 is arranged in the bellows installation cavity 803, and the control screw 5 is arranged on the lower flange block 802 through threads.
Selecting a vacuum material for the corrugated pipe; typically a vacuum material such as 316 stainless steel, but is not limited to such a material. The bellows realizes the control of the connecting rod in the cavity from the outside of the cavity and isolates the atmosphere at the same time.
The present invention and its embodiments have been described above, and the description is not intended to be limiting, and the drawings are only one embodiment of the present invention, and the actual structure is not limited thereto. In summary, those skilled in the art should appreciate that they can readily use the disclosed conception and specific embodiments as a basis for designing or modifying other structures for carrying out the same purposes of the present invention without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (6)
1. A beam current mechanical controllable molecular beam epitaxy metal element source furnace with a valve block is characterized by comprising a crucible body and a crucible cover arranged on the upper portion of the crucible body, wherein the crucible cover is internally provided with the valve block capable of sealing the crucible cover, and the top of the valve block is connected with a control screw rod through a connecting rod assembly; the crucible body sets up adiabatic big envelope outward, set up resistance heating wire in the adiabatic big envelope, adiabatic big envelope bottom is through support connection in vacuum flange, set up the bellows in the vacuum flange, link assembly passes behind the bellows and connects the control screw rod.
2. The beam mechanical controllable molecular beam epitaxy metal element source furnace with the valve block as claimed in claim 1, wherein the vacuum flange comprises an upper flange plate and a lower flange block, a bellows installation cavity is arranged between the top of the lower flange block and the upper flange plate, the bellows is arranged in the bellows installation cavity, and the control screw is arranged on the lower flange block through threads.
3. The beam mechanical controllable molecular beam epitaxy metal element source furnace with the valve block according to claim 1, wherein a tightening structure is arranged at the upper part of the crucible cover, and the valve block is adapted to the tightening structure in shape, so that when the valve block moves up and down under the driving of the connecting rod assembly, the tightening structure of the crucible cover is sealed or opened.
4. The molecular beam epitaxy metal element source furnace with the mechanically controllable beam current and the valve block as claimed in claim 1, wherein the connecting rod assembly is made of heat-resistant metal material.
5. The beam mechanical controllable molecular beam epitaxy metal element source furnace with the valve block according to claim 1, wherein the bellows is made of vacuum material.
6. The molecular beam epitaxy metal element source furnace of claim 1, wherein the bottom of the control screw is connected to a stepping motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211560975.0A CN115726029A (en) | 2022-12-07 | 2022-12-07 | Beam mechanical controllable molecular beam epitaxial metal element source furnace with valve block |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211560975.0A CN115726029A (en) | 2022-12-07 | 2022-12-07 | Beam mechanical controllable molecular beam epitaxial metal element source furnace with valve block |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115726029A true CN115726029A (en) | 2023-03-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211560975.0A Pending CN115726029A (en) | 2022-12-07 | 2022-12-07 | Beam mechanical controllable molecular beam epitaxial metal element source furnace with valve block |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115726029A (en) |
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2022
- 2022-12-07 CN CN202211560975.0A patent/CN115726029A/en active Pending
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