CN115717904A - Flexible sensing module and electronic equipment - Google Patents
Flexible sensing module and electronic equipment Download PDFInfo
- Publication number
- CN115717904A CN115717904A CN202211445956.3A CN202211445956A CN115717904A CN 115717904 A CN115717904 A CN 115717904A CN 202211445956 A CN202211445956 A CN 202211445956A CN 115717904 A CN115717904 A CN 115717904A
- Authority
- CN
- China
- Prior art keywords
- layer
- flexible
- flexible sensor
- electrode layer
- respond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The embodiment of the invention provides a flexible sensing module and electronic equipment, wherein the flexible sensing module can respond to various external stimuli at the same time, for example, the external stimuli such as external humidity, temperature and pressure can be converted into non-interfering electric signals (voltage, capacitance and resistance), so that the decoupling of various electric signals is realized, and the effective distinguishing of external stimulus types is realized. Meanwhile, the flexible sensing module in the embodiment of the invention adopts a layered structure design, so that mutual interference of resistance signals, voltage signals and capacitance signals is avoided.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a flexible sensing module and electronic equipment.
Background
With the rapid development of the flexible electronic technology, the application requirements of the flexible electronic technology in the fields of intelligent wearing, human-computer interaction, medical health, consumer electronics and the like are more and more. Electronic skin has been extensively studied for its advantages of good flexibility, easy co-shaping and attachment. Flexible sensors are an important component of electronic skin systems that accurately convert stimuli into electrical signals with comfortable wear.
Disclosure of Invention
The embodiment of the invention provides a flexible sensing module and electronic equipment, and the specific scheme is as follows:
the embodiment of the invention provides a flexible sensing module, which comprises a resistance-type flexible sensor, a voltage-type flexible sensor and a capacitance-type flexible sensor which are arranged in a stacked mode, wherein the resistance-type flexible sensor is configured to respond to external humidity, temperature or pressure stimulation, the voltage-type flexible sensor is configured to respond to external humidity, temperature or pressure stimulation, the capacitance-type flexible sensor is configured to respond to external humidity, temperature or pressure stimulation, and the resistance-type flexible sensor, the voltage-type flexible sensor and the capacitance-type flexible sensor in the same flexible sensing module are configured to respond to different external stimulation.
Optionally, in the above flexible sensing module provided in an embodiment of the present invention, the voltage-type flexible sensor is configured to respond to an external humidity stimulus, and the voltage-type flexible sensor includes a first pole electrode layer, a first humidity response layer, and a second electrode layer, which are sequentially stacked;
the resistive flexible sensor is configured to respond to an external temperature stimulus and comprises a first flexible substrate, a first thermal response layer and a first interdigital electrode which are sequentially stacked and arranged on one side, away from the first electrode layer, of the second electrode layer;
the capacitive flexible sensor is configured to respond to an external pressure stimulus and comprises a first electrolyte layer, an adhesive layer, a second interdigital electrode and a second flexible substrate which are sequentially stacked and arranged on one side, away from the first flexible substrate, of the first interdigital electrode.
Optionally, in the flexible sensing module provided in the embodiment of the present invention, the first electrode layer includes a plurality of first sub-electrodes distributed in an array, the first sub-electrodes have a plurality of via holes, and the first sub-electrodes located in the same row are electrically connected to each other, and the first sub-electrodes located in different rows are independently disposed;
the first humidity responsive layer comprises a third flexible substrate and a moisture responsive material impregnated on the third substrate;
the second electrode layer comprises a plurality of second sub-electrodes distributed in an array, the second sub-electrodes correspond to the first sub-electrodes one to one, the second sub-electrodes located in the same row are electrically connected, and the second sub-electrodes located in different rows are independently arranged.
Optionally, in the above flexible sensing module according to an embodiment of the present invention, the material of the first electrode layer and the material of the second electrode layer include a nano material having a carbon-based or metal-based group, and the moisture-responsive material includes polystyrene sulfonate/polyvinyl alcohol, a transition metal carbide, graphene oxide, or cellulose and its derivatives.
Optionally, in the flexible sensing module provided in the embodiment of the present invention, a material of the first interdigital electrode includes poly 3, 4-ethylenedioxythiophene polystyrene sulfonate;
the first thermal response layer is in a snake shape, and the material of the first thermal response layer comprises poly (3, 4-ethylenedioxythiophene), polystyrene sulfonate/polyvinyl alcohol/carbon nano tube, polyaniline or transition metal carbide.
Optionally, in the flexible sensing module provided in an embodiment of the present invention, the first electrolyte layer includes a fourth flexible substrate and polyvinyl alcohol/ionic liquid impregnated on the fourth flexible substrate, or the first electrolyte layer is an ionic liquid/polyurethane electrolyte layer obtained by electrostatic spinning;
the material of the bonding layer comprises polyurethane;
the material of the second interdigital electrode comprises poly (3, 4-ethylenedioxythiophene), polystyrene sulfonate/polyvinyl alcohol/Co 3 O 4 。
Optionally, in the above flexible sensing module provided in the embodiment of the present invention, the capacitive flexible sensor is configured to respond to an external humidity stimulus, and the capacitive flexible sensor includes a fifth flexible substrate, a third electrode layer, a second humidity responsive layer, a second electrolyte layer, and a fourth electrode layer that are sequentially stacked;
the resistive flexible sensor configured to respond to an ambient pressure stimulus, the voltage-based flexible sensor configured to respond to an ambient temperature stimulus, the resistive flexible sensor and the voltage-based flexible sensor multiplexed, comprising: the thermoelectric material layer and the fifth electrode layer are sequentially stacked and arranged on one side, away from the fifth flexible substrate, of the fourth electrode layer.
Optionally, in the flexible sensing module provided in the embodiment of the present invention, the material of the second humidity responsive layer includes a cellulose-based thin film and a derivative thereof, or polyimide with which water molecules can be intercalated;
the second electrolyte layer comprises a sixth flexible substrate and polyvinyl alcohol/ionic liquid impregnated on the sixth flexible substrate, or the second electrolyte layer is an ionic liquid/polyurethane electrolyte layer obtained through electrostatic spinning.
Optionally, in the flexible sensing module provided by the embodiment of the invention, the thermoelectric material layer includes a foam substrate and poly 3, 4-ethylenedioxythiophene-polystyrene sulfonate/carbon nanotube located inside the foam substrate, and the foam substrate has a plurality of pores inside.
Optionally, in the flexible sensing module provided in the embodiment of the present invention, the capacitive flexible sensor is configured to respond to an external humidity stimulus, and the capacitive flexible sensor includes a seventh flexible substrate, a sixth electrode layer, a third humidity response layer, a third electrolyte layer, and a seventh electrode layer, which are sequentially stacked;
the resistive flexible sensor is configured to respond to an ambient temperature stimulus, the resistive flexible sensor comprising: the third electrolyte layer, the seventh electrode layer, and a second thermal response layer and an eighth electrode layer which are sequentially stacked and arranged on one side, away from the seventh flexible substrate, of the seventh electrode layer;
the voltage-based flexible sensor is configured to respond to an external pressure stimulus, the voltage-based flexible sensor comprising: the eighth electrode layer, the first negative electric friction layer, the first non-conductive telescopic layer and the ninth electrode layer are sequentially stacked and arranged on one side, away from the seventh flexible substrate, of the eighth electrode layer; or the voltage-mode flexible sensor comprises: the eighth electrode layer, the first negative electric friction layer, the first conductive telescopic layer and the eighth flexible substrate are sequentially stacked and arranged on one side, away from the seventh flexible substrate, of the eighth electrode layer.
Optionally, in the flexible sensing module provided in the embodiment of the present invention, a material of the third humidity responsive layer includes a cellulose-based thin film and a derivative thereof, or polyimide with which water molecules can be intercalated;
the third electrolyte layer comprises a ninth flexible substrate and polyvinyl alcohol/ionic liquid impregnated on the ninth flexible substrate, or the third electrolyte layer is an ionic liquid/polyurethane electrolyte layer obtained through electrostatic spinning.
Optionally, in the flexible sensing module according to the embodiment of the invention, the second thermal response layer has a serpentine shape, and the material of the second thermal response layer includes poly-3, 4-ethylenedioxythiophene, polystyrene sulfonate/polyvinyl alcohol/carbon nanotube, polyaniline, or transition metal carbide.
Optionally, in the flexible sensing module provided in the embodiment of the present invention, a material of the first negative electric friction layer includes polytetrafluoroethylene, polyvinylidene fluoride, fluorinated ethylene propylene, or polydimethylsiloxane, a material of the first non-conductive elastic layer includes foam or aerogel, and a material of the first conductive elastic layer includes conductive foam or aerogel.
Optionally, in the above flexible sensing module provided in the embodiment of the present invention, the resistive flexible sensor is configured to respond to an external humidity stimulus, and the resistive flexible sensor includes a tenth flexible substrate, a fourth humidity response layer, and a third interdigital electrode, which are sequentially stacked;
the capacitive flexible sensor is configured to respond to external temperature stimulation and comprises a tenth electrode layer, a fourth electrolyte layer, a third thermal response layer and an eleventh electrode layer which are sequentially stacked and arranged on one side, away from the tenth flexible substrate, of the third trigeminal finger electrode;
the voltage-based flexible sensor is configured to respond to an external pressure stimulus, the voltage-based flexible sensor comprising: the eleventh electrode layer, and a second negative electric friction layer, a second non-conductive telescopic layer and a twelfth electrode layer which are sequentially stacked and arranged on one side of the eleventh electrode layer, which is far away from the tenth flexible substrate; or the voltage-mode flexible sensor comprises: the first electrode layer, the second negative electric friction layer, the second conductive telescopic layer and the eleventh flexible substrate are sequentially stacked and arranged on one side, away from the tenth flexible substrate, of the eleventh electrode layer.
Optionally, in the flexible sensing module according to an embodiment of the present invention, a material of the fourth humidity responsive layer includes poly 3, 4-ethylenedioxythiophene/polystyrene sulfonate or transition metal carbide.
Optionally, in the flexible sensing module provided in the embodiment of the present invention, the fourth electrolyte layer includes a twelfth flexible substrate and polyvinyl alcohol/ionic liquid impregnated on the twelfth flexible substrate, or the fourth electrolyte layer is an ionic liquid/polyurethane electrolyte layer obtained through electrostatic spinning;
the material of the third thermal response layer is a thermal expansion material.
Optionally, in the flexible sensing module provided in the embodiment of the present invention, a material of the second negative electric friction layer includes polytetrafluoroethylene, polyvinylidene fluoride, fluorinated ethylene propylene, or polydimethylsiloxane, a material of the second non-conductive elastic layer includes foam or aerogel, and a material of the second conductive elastic layer includes conductive foam or aerogel.
Correspondingly, the embodiment of the invention also provides electronic equipment which comprises the flexible sensing module provided by the embodiment of the invention.
The embodiment of the invention has the following beneficial effects:
according to the flexible sensing module and the electronic equipment provided by the embodiment of the invention, the flexible sensing module can respond to various external stimuli at the same time, for example, external humidity, temperature and pressure stimuli can be converted into non-interfering electric signals (voltage, capacitance and resistance), decoupling of various electric signals is realized, and thus effective distinguishing of external stimulus types is realized. Meanwhile, the flexible sensing module in the embodiment of the invention adopts a layered structure design, so that mutual interference of resistance signals, voltage signals and capacitance signals is avoided.
Drawings
Fig. 1 is a schematic structural diagram of a flexible sensing module according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a flexible sensing module according to an embodiment of the present invention;
FIG. 3 is a schematic plan view of the first electrode layer of FIG. 2;
FIG. 4 is a schematic plan view of the second electrode layer of FIG. 2;
FIG. 5 is a schematic structural diagram of a region where a first sub-electrode and a second sub-electrode are oppositely arranged;
FIG. 6 is a shape of the first thermo-responsive layer of FIG. 2;
fig. 7 is a shape of the first interdigitated electrode of fig. 2;
fig. 8 is a schematic structural diagram of another flexible sensing module according to an embodiment of the present invention;
fig. 9 is a schematic structural diagram of another flexible sensing module according to an embodiment of the present invention;
fig. 10 is a schematic structural diagram of another flexible sensing module according to an embodiment of the present invention;
FIG. 11 is a schematic diagram of the operation of the voltage-based flexible sensor of FIG. 9;
FIG. 12 is a schematic diagram of the operation of the voltage-based flexible sensor of FIG. 9;
fig. 13 is a schematic structural diagram of another flexible sensing module according to an embodiment of the present invention;
fig. 14 is a schematic structural diagram of another flexible sensing module according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. And the embodiments and features of the embodiments may be combined with each other without conflict. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention without any inventive step, are within the scope of protection of the invention.
Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. The use of the word "comprise" or "comprises", and the like, in the context of this application, is intended to mean that the elements or items listed before that word, in addition to those listed after that word, do not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "inner", "outer", "upper", "lower", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
It should be noted that the sizes and shapes of the figures in the drawings are not to be considered true scale, but are merely intended to schematically illustrate the present invention. And the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout.
Electronic skins capable of sensing different stimuli will open a new era of medical care, medical science and robotics, playing an essential role in human-computer interaction and intelligent life. Recently, advances in technology have led to the development of multi-modal flexible sensors, where the ability to sense external moisture, pressure and thermal stimuli is fundamental. However, the existing multi-modal flexible sensors usually convert different stimuli into the same electrical signal (current or resistance), and the signal coupling problem limits the application of the multi-modal flexible sensors in complex scenes. Therefore, it is crucial to design a multi-modal flexible sensor capable of sensing external stimulus changes simultaneously without coupling signals.
In view of this, in order to convert external different stimuli into different electrical signals to achieve effective differentiation of types of external stimuli, an embodiment of the present invention provides a flexible sensing module, as shown in fig. 1, which includes a capacitive flexible sensor 1, a resistive flexible sensor 2, and a voltage flexible sensor 3, which are stacked, where the capacitive flexible sensor 1 is configured to respond to external humidity, temperature, or pressure stimuli, the resistive flexible sensor 2 is configured to respond to external humidity, temperature, or pressure stimuli, the voltage flexible sensor 3 is configured to respond to external humidity, temperature, or pressure stimuli, and the capacitive flexible sensor 1, the resistive flexible sensor 2, and the voltage flexible sensor 3 in a same flexible sensing module are configured to respond to different external stimuli.
According to the flexible sensing module provided by the embodiment of the invention, the flexible sensing module can respond to various external stimuli at the same time, for example, external humidity, temperature and pressure stimuli can be converted into non-interfering electric signals (voltage, capacitance and resistance), decoupling of various electric signals is realized, and thus, effective distinguishing of external stimulus types is realized. Meanwhile, the flexible sensing module in the embodiment of the invention adopts a layered structure design, so that mutual interference of resistance signals, voltage signals and capacitance signals is avoided.
In practical implementation, in the above flexible sensing module provided in the embodiment of the present invention, as shown in fig. 2, the voltage-type flexible sensor 3 is configured to respond to an external humidity stimulus, and the voltage-type flexible sensor 3 includes a first electrode layer 31, a first humidity-responsive layer 32, and a second electrode layer 33, which are sequentially stacked.
Specifically, as shown in fig. 3, fig. 3 is a schematic plan view of the first electrode layer 31 in fig. 2, the first electrode layer 31 may include a plurality of first sub-electrodes 311 distributed in an array, the first sub-electrodes 311 have a plurality of vias V1, and the first sub-electrodes 311 located in the same row are electrically connected, and the first sub-electrodes 311 located in different rows are independently disposed; the via hole V1 can make external moisture preferentially enter a specific area; the first electrode layer 31 may be prepared on the first humidity responsive layer 32 by printing or spraying or other forming processes, and the material of the first electrode layer 31 may include, but is not limited to, a nanomaterial with a carbon-based or metal-based group; the number of the first sub-electrodes 311 may be customized according to requirements, and the specific structure of the first sub-electrodes 311 is not limited to the circular shape shown in fig. 3, and may also be a polygonal shape such as a square shape or a rectangular shape.
As shown in fig. 4, fig. 4 is a schematic plan view of the second electrode layer 33 in fig. 2, the second electrode layer 33 may include a plurality of second sub-electrodes 331 distributed in an array, the second sub-electrodes 331 correspond to the first sub-electrodes 311 one to one, and the second sub-electrodes 331 located in the same row are electrically connected, and the second sub-electrodes 331 located in different rows are independently disposed; the second electrode layer 33 may be prepared on the side of the first humidity responsive layer 32 facing away from the first electrode layer 31 by a printing or spraying process, and the material of the second electrode layer 33 may include, but is not limited to, a nanomaterial having a carbon-based or metal-based group; the number of the second sub-electrodes 331 may be customized according to the requirement, and the specific structure of the second sub-electrodes 331 is not limited to the circular shape shown in fig. 4, and may be a polygonal shape such as a square, a rectangle, and the like.
Specifically, the first humidity responsive layer 32 may be an organic material or an inorganic material having a polyhydroxy group, for example, the first humidity responsive layer 32 may include a third flexible substrate and a moisture responsive material impregnated on the third substrate, the moisture responsive material may include, but is not limited to, polystyrene sulfonate/polyvinyl alcohol, transition metal carbide, graphene oxide or cellulose and derivatives thereof, and the third flexible substrate may be a commercial fabric such as nylon, spandex, cotton, silk or polyurethane felt obtained by electrospinning.
As shown in fig. 5, fig. 5 is a schematic structural diagram of a corresponding area where a first sub-electrode 311 and a second sub-electrode 331 are disposed oppositely, and a process of the voltage-type flexible sensor 3 in fig. 2 responding to an external humidity stimulus provided by an embodiment of the present invention is explained by using the structure shown in fig. 5: when a certain moisture (shown by arrow a) stimulus is applied, the moisture preferentially enters the first humidity responsive layer 32 through the via hole V1 on the first sub-electrode 311 and gradually permeates to the position of the second sub-electrode 331 on the back of the first humidity responsive layer 32, forming a humidity gradient (shown by arrow B) between the first sub-electrode 311 and the second sub-electrode 331. The oxygen-rich functional groups in the first humidity response layer 32 promote the capture of water molecules through hydrogen bonds, the oxygen-containing functional groups are ionized by moisture to release free protons, a concentration gradient based on an asymmetric structure is formed, the protons are directionally transported from a high-concentration area to a low-concentration area, charge separation in the humidity response material is induced, and voltage is generated. Therefore, the voltage-type flexible sensor 3 in fig. 2 can convert an external humidity stimulus into a voltage signal.
In practical implementation, in the above flexible sensing module provided in the embodiment of the present invention, as shown in fig. 2, the resistive flexible sensor 2 is configured to respond to an external temperature stimulus, and the resistive flexible sensor 2 includes a first flexible substrate 21, a first thermal response layer 22, and a first interdigital electrode 23, which are sequentially stacked and disposed on a side of the second electrode layer 33 facing away from the first electrode layer 31. The first flexible substrate 21 may be a commercial fabric such as nylon, spandex, cotton, silk, or polyurethane felt obtained by electrostatic spinning. Specifically, as shown in fig. 6, the first thermal response layer 22 may have a serpentine shape, the material of the first thermal response layer 22 may include, but is not limited to, poly (3, 4-ethylenedioxythiophene) (polystyrene sulfonate)/polyvinyl alcohol/carbon nanotube, polyaniline or transition metal carbide), and the first thermal response layer 22 may be prepared by ink direct writing, inkjet printing, screen printing, and the like. As shown in fig. 7, the first interdigital electrode 23 is composed of a first interdigital 231 and a second interdigital 232, the material of the first interdigital electrode 23 may include, but is not limited to, poly 3, 4-ethylenedioxythiophene: polystyrene sulfonate, and the first interdigital electrode 23 may be prepared by processes such as direct ink writing, ink jet printing, and screen printing.
As shown in fig. 2, when the resistive flexible sensor 2 is in a high temperature environment, molecular chains of the first thermal response layer 22 shrink or a lattice spacing is shortened, so that the electrical conductivity is increased, and thus the resistance is decreased. Thus, the resistive flexible sensor 2 of fig. 2 can convert an external temperature stimulus into a resistance signal.
In specific implementation, the flexible sensing module provided by the embodiment of the inventionIn a set, as shown in fig. 2, the capacitive flexible sensor 1 is configured to respond to an external pressure stimulus, and the capacitive flexible sensor 1 includes a first electrolyte layer 11, an adhesive layer 12, a second interdigital electrode 13, and a second flexible substrate 14, which are sequentially stacked and disposed on a side of the first interdigital electrode 23 facing away from the first flexible substrate 21. The second flexible substrate 14 may be a commercial fabric such as nylon, spandex, cotton, silk, or polyurethane felt obtained by electrostatic spinning. Specifically, the first electrolyte layer 11 may include a fourth flexible substrate and polyvinyl alcohol/ionic liquid impregnated on the fourth flexible substrate, and the fourth flexible substrate may be a commercial fabric such as nylon, spandex, cotton cloth, silk, or polyurethane felt obtained by electrostatic spinning; or the first electrolyte layer is an ionic liquid/polyurethane electrolyte layer obtained by electrostatic spinning; of course, the first electrolyte layer 11 may also be another flexible electrolyte layer; the material of the adhesive layer 12 may include, but is not limited to, polyurethane; second interdigital electrode 13 Structure referring to the shape of the first interdigital electrode 23 shown in FIG. 7, the second interdigital electrode 13 can be prepared on the second flexible substrate 14 by ink direct writing, ink jet printing, screen printing, and the like, and the material of the second interdigital electrode 13 can include, but is not limited to, poly 3, 4-ethylenedioxythiophene polystyrene sulfonate/polyvinyl alcohol/Co 3 O 4 The material of the second interdigital electrode 13 may also contain other than Co 3 O 4 Other pseudocapacitive materials.
As shown in fig. 2, when an external force is applied to the capacitive flexible sensor 1, the effective area between the interdigital electrodes of the second interdigital electrode 13 increases, thereby changing the capacitance. Thus, the capacitive flexible sensor 1 in fig. 2 can convert an external pressure stimulus into a capacitance signal.
Therefore, the flexible sensing module in the embodiment shown in fig. 2 of the invention can respond the humidity stimulation to the voltage signal, respond the temperature stimulation to the resistance signal, and respond the pressure stimulation to the capacitance signal when the external humidity, temperature and pressure are stimulated, and meanwhile, the signals are not interfered with each other, so that different external stimulation signals can be distinguished, and the stimulation type can be effectively identified.
In specific implementation, in the above flexible sensing module provided in the embodiment of the present invention, as shown in fig. 8, the capacitive flexible sensor 1 is configured to respond to an external humidity stimulus, and the capacitive flexible sensor 1 includes a fifth flexible substrate 15, a third electrode layer 16, a second humidity response layer 17, a second electrolyte layer 18, and a fourth electrode layer 19, which are sequentially stacked; the fifth flexible substrate 15 may be a commercial fabric such as nylon, spandex, cotton, silk, or polyurethane felt obtained by electrostatic spinning. Specifically, the third electrode layer 16 and the fourth electrode layer 19 may be metal foil electrodes of Cu, al, or Sn; the material of the second humidity responsive layer 17 may include, but is not limited to, cellulose-based thin film and its derivatives or polyimide in which water molecules can be intercalated, however, the material of the second humidity responsive layer 17 may also be other organic or inorganic material rich in oxygen functional groups; the second electrolyte layer 18 may include a sixth flexible substrate, which may be a commercial fabric such as nylon, spandex, cotton, silk, or polyurethane felt obtained by electrostatic spinning, and polyvinyl alcohol/ionic liquid impregnated on the sixth flexible substrate; or the second electrolyte layer 18 is an ionic liquid/polyurethane electrolyte layer obtained by electrospinning; of course, the second electrolyte layer 18 may also be other flexible electrolyte layers.
As shown in fig. 8, when the humidity is changed, the thickness or area of the second humidity responsive layer 17 is changed, thereby causing a change in capacitance. Thus, the capacitive flexible sensor 1 in fig. 8 can convert an external humidity stimulus into a capacitive signal.
In specific implementation, in the above flexible sensing module provided in the embodiment of the present invention, as shown in fig. 8, the resistive flexible sensor 2 is configured to respond to an external pressure stimulus, the voltage flexible sensor 3 is configured to respond to an external temperature stimulus, and the resistive flexible sensor 2 and the voltage flexible sensor 3 are multiplexed, including: a fourth electrode layer 19, and a thermoelectric material layer 24/34 and a fifth electrode layer 25/35 which are sequentially stacked and disposed on a side of the fourth electrode layer 19 facing away from the fifth flexible substrate 15. Specifically, the thermoelectric material layer 24/34 may include a foam substrate 241/341 and poly 3, 4-ethylenedioxythiophene, polystyrene sulfonate/carbon nanotubes inside the foam substrate 241/341, a large number of pores V2 remaining inside the foam substrate 241/341; among them, the foam substrate 241/341 may be polydimethylsiloxane foam, polyurethane foam obtained by sacrificial salt template or sugar template, or may be commercial melamine foam; poly 3, 4-ethylenedioxythiophene, polystyrene sulfonate/carbon nanotubes, etc. may be introduced into the interior of the foam substrate 241/341 by an impregnation method.
As shown in FIG. 8, when the temperature changes, the low thermal conductivity of the foam substrate 241/341 makes the foam substrate have a temperature gradient (shown by arrow C), which causes the carriers of poly 3, 4-ethylenedioxythiophene, polystyrene sulfonate/carbon nanotube, to move from the hot end to the cold end and to accumulate at the cold end, thereby forming a potential difference inside the material, and simultaneously generating a reverse charge flow under the action of the potential difference, and when the thermally moving charge flow and the internal electric field reach dynamic equilibrium, a stable thermoelectromotive force is formed at the two ends of the foam substrate, and a voltage is generated. Therefore, the voltage type flexible sensor 3 in fig. 8 can convert the external temperature stimulus into a voltage signal.
As shown in fig. 8, compressible conductive poly 3, 4-ethylenedioxythiophene polystyrene sulfonate/carbon nanotubes may also be used as the pressure responsive layer. When an external force is applied, the conductive path increases, so that the resistance decreases. Thus, the resistive flexible sensor 2 in fig. 8 can convert an external pressure stimulus into a resistance signal.
Therefore, the flexible sensing module in the embodiment shown in fig. 8 of the present invention can respond the humidity stimulation to the capacitance signal, respond the temperature stimulation to the voltage signal, and respond the pressure stimulation to the resistance signal when the external humidity, temperature and pressure are stimulated, and simultaneously, the signals are not interfered with each other, so that different external stimulation signals can be distinguished, and the stimulation type can be effectively identified.
In specific implementation, in the above flexible sensing module provided in the embodiment of the present invention, as shown in fig. 9 and 10, the capacitive flexible sensor 1 is configured to respond to an external humidity stimulus, and the capacitive flexible sensor 1 includes a seventh flexible substrate 15', a sixth electrode layer 16', a third humidity response layer 17', a third electrolyte layer 18', and a seventh electrode layer 19' that are sequentially stacked; the seventh flexible substrate 15' may be a commercial fabric such as nylon, spandex, cotton, silk, or polyurethane felt obtained by electrostatic spinning. Specifically, the sixth electrode layer 16 'and the seventh electrode layer 19' may be metal foil electrodes of Cu, al, or Sn; the material of the third humidity responsive layer 17 'may include, but is not limited to, cellulose-based thin film and its derivatives or polyimide in which water molecules may be intercalated, and of course, the material of the third humidity responsive layer 17' may also be other organic or inorganic materials rich in oxygen functional groups; the third electrolyte layer 18' may include a ninth flexible substrate, which may be a commercial fabric such as nylon, spandex, cotton, silk, or polyurethane felt obtained by electrostatic spinning, and polyvinyl alcohol/ionic liquid impregnated on the ninth flexible substrate; or the third electrolyte layer 18' is an ionic liquid/polyurethane electrolyte layer obtained by electrospinning; of course, the third electrolyte layer 18' may also be another flexible electrolyte layer.
As shown in fig. 9 and 10, when the humidity is changed, the thickness or area of the third humidity responsive layer 17' is changed, thereby causing a change in capacitance. Thus, the capacitive flexible sensor 1 in fig. 9 and 10 can convert an external humidity stimulus into a capacitive signal.
As shown in fig. 9 and 10, the resistive flexible sensor 2 is configured to respond to an ambient temperature stimulus, the resistive flexible sensor 2 including: a third electrolyte layer 18', a seventh electrode layer 19', and a second thermally responsive layer 26 and an eighth electrode layer 27 sequentially laminated on the seventh electrode layer 19 'on the side facing away from the seventh flexible substrate 15'; specifically, the shape of the second thermal response layer 26 may be serpentine, the material of the second thermal response layer 26 may include, but is not limited to, poly (3, 4-ethylenedioxythiophene): polystyrene sulfonate/polyvinyl alcohol/carbon nanotube, polyaniline or transition metal carbide, and the second thermal response layer 26 may be prepared by ink direct writing, inkjet printing, screen printing, and other processes. The eighth electrode layer 27 may be a metal foil electrode of Cu, al, or Sn.
As shown in fig. 9 and 10, when the resistive flexible sensor 2 is in a high-temperature environment, molecular chains of the second thermal response layer 26 shrink or a lattice spacing is shortened, so that the electrical conductivity increases, and the electrical resistance decreases. Thus, the resistive flexible sensor 2 of fig. 9 and 10 can convert an external temperature stimulus into a resistance signal.
As shown in fig. 9, the voltage-type flexible sensor 3 is configured to respond to an external pressure stimulus, and the voltage-type flexible sensor 3 includes: an eighth electrode layer 27, and a first negative electric friction layer 36, a first non-conductive stretchable layer 37, and a ninth electrode layer 38, which are sequentially stacked and disposed on a side of the eighth electrode layer 17 facing away from the seventh flexible substrate 15'; specifically, the material of the first negative electrical friction layer 36 may include, but is not limited to, teflon, polyvinylidene fluoride, fluorinated ethylene propylene, or polydimethylsiloxane (negatively charged material after contact), and the material of the first non-conductive stretch layer 37 may include, but is not limited to, compression recoverable foam or aerogel.
Alternatively, as shown in fig. 10, the voltage type flexible sensor 3 includes: an eighth electrode layer 27, and a first negative electric friction layer 36, a first conductive stretchable layer 37' and an eighth flexible substrate 38' which are sequentially stacked and disposed on a side of the eighth electrode layer 27 facing away from the seventh flexible substrate 15 '. The eighth flexible substrate 38' may be a commercial fabric such as nylon, spandex, cotton, silk, or polyurethane felt obtained by electrostatic spinning. Specifically, the material of the first negative electric friction layer 36 may include, but is not limited to, teflon, polyvinylidene fluoride, fluorinated ethylene propylene, or polydimethylsiloxane (material negatively charged after contact), and the material of the first conductive stretch layer 37' may include, but is not limited to, a compression recoverable electrically conductive foam or aerogel.
Taking fig. 9 as an example, when an external force is applied, the gap between the eighth electrode layer 27 and the first negative electric friction layer 36 is reduced, and the contact is tight, as shown in fig. 11; after release, a positive charge is induced in the eighth electrode layer 27, and the gap between the eighth electrode layer 27 and the first negative electrode friction layer 36 increases, as shown in fig. 12. To restore the eighth electrode layer 27 to electrical neutrality, electrons need to move from the ninth electrode layer 38 to the eighth electrode layer 27, thereby creating an induced potential difference, creating a voltage. Thus, the voltage-type flexible sensor 3 in fig. 9 can convert an external pressure stimulus into a voltage signal.
The principle of the voltage-type flexible sensor 3 shown in fig. 10 responding to the external pressure stimulus is the same as that shown in fig. 9, and is not described in detail herein.
Therefore, the flexible sensing module in the embodiment shown in fig. 9 and 10 of the present invention can respond the humidity stimulation to the capacitance signal, respond the temperature stimulation to the resistance signal, and respond the pressure stimulation to the voltage signal when the external humidity, temperature and pressure are stimulated, and simultaneously, the signals are not interfered with each other, so that different external stimulation signals can be distinguished, and the stimulation type can be effectively identified.
In practical implementation, in the above flexible sensing module provided in the embodiment of the present invention, as shown in fig. 13 and fig. 14, the resistive flexible sensor 2 is configured to respond to an external humidity stimulus, and the resistive flexible sensor 2 includes a tenth flexible substrate 28, a fourth humidity responsive layer 29, and a third interdigital electrode 29' that are sequentially stacked; the tenth flexible substrate 28 may be a commercial fabric such as nylon, spandex, cotton, silk, or polyurethane felt obtained by electrostatic spinning. Specifically, the material of the fourth humidity responsive layer 29 may include, but is not limited to, poly 3, 4-ethylenedioxythiophene/polystyrene sulfonate or transition metal carbide, and the structure of the third interdigital electrode 29' refers to the shape of the first interdigital electrode 23 shown in fig. 7.
As shown in fig. 13 and 14, water molecules are intercalated at high humidity, so that the conductive path is extended, the conductivity is reduced, and the resistance is increased. Thus, the resistive flexible sensor 2 of fig. 13 and 14 can convert an external humidity stimulus into a resistance signal.
As shown in fig. 13 and 14, the capacitive flexible sensor 1 is configured to respond to an external temperature stimulus, and the capacitive flexible sensor 1 comprises a tenth electrode layer 11", a fourth electrolyte layer 12", a third thermal response layer 13", and an eleventh electrode layer 14" which are sequentially stacked and arranged on a side of the third interdigitated electrode 29' facing away from the tenth flexible substrate 28; specifically, the fourth electrolyte layer 12 "may include, but is not limited to, a twelfth flexible substrate and polyvinyl alcohol/ionic liquid impregnated on the twelfth flexible substrate, or the fourth electrolyte layer 12" is an ionic liquid/polyurethane electrolyte layer obtained by electrospinning; of course, the fourth electrolyte layer 12 "may also be other flexible electrolyte layers; the material of the third thermo-responsive layer 13 "may be a thermally expansive material; the tenth electrode layer 11 "and the eleventh electrode layer 14" may be metal foil electrodes of Cu, al, or Sn.
As shown in fig. 13 and 14, at high temperature, the thickness or volume of the third thermally responsive layer 13 "increases, thereby changing the capacitance. Thus, the capacitive flexible sensor 1 in fig. 13 and 14 can convert an external temperature stimulus into a capacitive signal.
As shown in fig. 13, the voltage-type flexible sensor 3 is configured to respond to an external pressure stimulus, and the voltage-type flexible sensor 3 includes: an eleventh electrode layer 14", and a second negative electric friction layer 391, a second non-conductive stretch layer 392, and a twelfth electrode layer 393 arranged in this order on a side of the eleventh electrode layer 14" facing away from the tenth flexible substrate 28; specifically, the material of the second negative electrical friction layer 391 may include, but is not limited to, teflon, polyvinylidene fluoride, fluorinated ethylene propylene, or polydimethylsiloxane (negatively charged material after contact), and the material of the second non-conductive stretch layer 392 may include, but is not limited to, compression recoverable foam or aerogel.
Or as shown in fig. 14, the voltage type flexible sensor 3 includes: an eleventh electrode layer 14", and a second negative electric friction layer 391, a second conductive stretch layer 392 'and an eleventh flexible substrate 393' which are sequentially stacked and disposed on a side of the eleventh electrode layer 14" facing away from the tenth flexible substrate 28. Specifically, the material of the second negative electric friction layer 391 may include, but is not limited to, teflon, polyvinylidene fluoride, fluorinated ethylene propylene, or polydimethylsiloxane (material with negative charge after contact), and the material of the second conductive elastic layer 392' may include, but is not limited to, compressed and recoverable conductive foam or aerogel.
The principle of the voltage-type flexible sensor 3 shown in fig. 13 and 14 responding to the external pressure stimulus is the same as that shown in fig. 9, and is not described in detail herein.
Therefore, the flexible sensing module in the embodiment shown in fig. 13 and 14 of the present invention can respond the humidity stimulation to the resistance signal, respond the temperature stimulation to the capacitance signal, and respond the pressure stimulation to the voltage signal when the external humidity, temperature and pressure are stimulated, and meanwhile, the signals are not interfered with each other, so that different external stimulation signals can be distinguished, and the stimulation type can be effectively identified.
In summary, in the embodiments of the present invention, the flexible substrate is combined with the humidity, temperature and pressure responsive material, and the decoupling of the generated capacitance, voltage and resistance signals is realized through material selection and multilayer structure design, so as to distinguish the external humidity, temperature and pressure stimuli.
Based on the same inventive concept, the embodiment of the invention also provides electronic equipment, which comprises the flexible sensing module provided by the embodiment of the invention. Because the principle of the electronic device for solving the problems is similar to that of the flexible sensing module, the implementation of the electronic device can be referred to that of the flexible sensing module, and repeated details are not repeated herein.
In a specific implementation, the electronic device provided in the embodiment of the present invention may be an electronic skin, which is not limited herein.
According to the flexible sensing module and the electronic equipment provided by the embodiment of the invention, the flexible sensing module can respond to various external stimuli at the same time, for example, external humidity, temperature and pressure stimuli can be converted into non-interfering electric signals (voltage, capacitance and resistance), decoupling of various electric signals is realized, and thus effective distinguishing of external stimulus types is realized. Meanwhile, the flexible sensing module in the embodiment of the invention adopts a layered structure design, so that mutual interference of resistance signals, voltage signals and capacitance signals is avoided.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all such alterations and modifications as fall within the scope of the invention.
It will be apparent to those skilled in the art that various modifications and variations can be made in the embodiments of the present invention without departing from the spirit or scope of the embodiments of the invention. Thus, if such modifications and variations of the embodiments of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to encompass such modifications and variations.
Claims (18)
1. A flexible sensing module comprising a resistive flexible sensor, a voltage-based flexible sensor and a capacitive flexible sensor arranged in a stack, wherein the resistive flexible sensor is configured to respond to an external humidity, temperature or pressure stimulus, the voltage-based flexible sensor is configured to respond to an external humidity, temperature or pressure stimulus, the capacitive flexible sensor is configured to respond to an external humidity, temperature or pressure stimulus, and the resistive flexible sensor, the voltage-based flexible sensor and the capacitive flexible sensor in the same flexible sensing module are configured to respond to different external stimuli.
2. The flexible sensing module of claim 1, wherein the voltage-based flexible sensor is configured to respond to an external humidity stimulus, the voltage-based flexible sensor comprising a first pole electrode layer, a first humidity-responsive layer, and a second electrode layer, which are sequentially stacked;
the resistive flexible sensor is configured to respond to an external temperature stimulus and comprises a first flexible substrate, a first thermal response layer and a first interdigital electrode which are sequentially stacked and arranged on one side, away from the first electrode layer, of the second electrode layer;
the capacitive flexible sensor is configured to respond to an external pressure stimulus and comprises a first electrolyte layer, an adhesive layer, a second interdigital electrode and a second flexible substrate which are sequentially stacked and arranged on one side, away from the first flexible substrate, of the first interdigital electrode.
3. The flexible sensor module according to claim 2, wherein the first electrode layer comprises a plurality of first sub-electrodes distributed in an array, the first sub-electrodes have a plurality of vias, and the first sub-electrodes in the same row are electrically connected, and the first sub-electrodes in different rows are independently arranged;
the first humidity responsive layer comprises a third flexible substrate and a moisture responsive material impregnated on the third substrate;
the second electrode layer comprises a plurality of second sub-electrodes distributed in an array, the second sub-electrodes correspond to the first sub-electrodes one to one, the second sub-electrodes in the same row are electrically connected, and the second sub-electrodes in different rows are independently arranged.
4. The flexible sensor module of claim 3, wherein the material of the first electrode layer and the material of the second electrode layer comprise nanomaterials having a carbon or metal matrix, and the moisture responsive material comprises polystyrene sulfonate/polyvinyl alcohol, transition metal carbides, graphene oxide, or cellulose and derivatives thereof.
5. The flexible sensor module of claim 2, wherein the material of said first interdigitated electrodes comprises poly-3, 4-ethylenedioxythiophene: polystyrene sulfonate;
the first thermal response layer is in a snake shape, and the material of the first thermal response layer comprises poly (3, 4-ethylenedioxythiophene), polystyrene sulfonate/polyvinyl alcohol/carbon nano tube, polyaniline or transition metal carbide.
6. The flexible sensor module of claim 2, wherein the first electrolyte layer comprises a fourth flexible substrate and polyvinyl alcohol/ionic liquid impregnated on the fourth flexible substrate, or the first electrolyte layer is an ionic liquid/polyurethane electrolyte layer obtained by electrospinning;
the material of the bonding layer comprises polyurethane;
the material of the second interdigital electrode comprises poly (3, 4-ethylenedioxythiophene), polystyrene sulfonate/polyvinyl alcohol/Co 3 O 4 。
7. The flexible sensor module according to claim 1, wherein the capacitive flexible sensor is configured to respond to an external humidity stimulus, and comprises a fifth flexible substrate, a third electrode layer, a second humidity-responsive layer, a second electrolyte layer and a fourth electrode layer, which are sequentially stacked;
the resistive flexible sensor configured to respond to an ambient pressure stimulus, the voltage-based flexible sensor configured to respond to an ambient temperature stimulus, the resistive flexible sensor and the voltage-based flexible sensor multiplexed, comprising: the thermoelectric material layer and the fifth electrode layer are sequentially stacked and arranged on one side, away from the fifth flexible substrate, of the fourth electrode layer.
8. The flexible sensor module of claim 7, wherein the material of the second humidity-responsive layer comprises a cellulose-based film and derivatives thereof or water molecule-intercalatable polyimide;
the second electrolyte layer comprises a sixth flexible substrate and polyvinyl alcohol/ionic liquid impregnated on the sixth flexible substrate, or the second electrolyte layer is an ionic liquid/polyurethane electrolyte layer obtained through electrostatic spinning.
9. The flexible sensor module of claim 7, wherein the thermoelectric material layer comprises a foam substrate having a plurality of pores therein and poly (3, 4-ethylenedioxythiophene) polystyrene sulfonate/carbon nanotubes within the foam substrate.
10. The flexible sensor module of claim 1, wherein the capacitive flexible sensor is configured to respond to an external humidity stimulus, and comprises a seventh flexible substrate, a sixth electrode layer, a third humidity-responsive layer, a third electrolyte layer, and a seventh electrode layer, which are sequentially stacked;
the resistive flexible sensor is configured to respond to an ambient temperature stimulus, the resistive flexible sensor comprising: the third electrolyte layer, the seventh electrode layer, and a second thermal response layer and an eighth electrode layer which are sequentially stacked and arranged on one side, away from the seventh flexible substrate, of the seventh electrode layer;
the voltage-based flexible sensor is configured to respond to an external pressure stimulus, the voltage-based flexible sensor comprising: the eighth electrode layer, the first negative electric friction layer, the first non-conductive telescopic layer and the ninth electrode layer are sequentially stacked and arranged on one side, away from the seventh flexible substrate, of the eighth electrode layer; or the voltage-based flexible sensor comprises: the first negative electric friction layer, the first conductive telescopic layer and the eighth flexible substrate are sequentially arranged on one side, away from the seventh flexible substrate, of the eighth electrode layer in a stacked mode.
11. The flexible sensor module of claim 10, wherein the material of the third humidity responsive layer comprises cellulose based films and derivatives thereof or water molecule intercalated polyimides;
the third electrolyte layer comprises a ninth flexible substrate and polyvinyl alcohol/ionic liquid impregnated on the ninth flexible substrate, or the third electrolyte layer is an ionic liquid/polyurethane electrolyte layer obtained by electrostatic spinning.
12. The flexible sensor module of claim 10, wherein the second thermo-responsive layer has a serpentine shape, and the material of the second thermo-responsive layer comprises poly-3, 4-ethylenedioxythiophene, polystyrene sulfonate/polyvinyl alcohol/carbon nanotubes, polyaniline, or transition metal carbide.
13. The flexible sensor module of claim 10, wherein the material of the first negative electrical friction layer comprises polytetrafluoroethylene, polyvinylidene fluoride, fluorinated ethylene propylene, or polydimethylsiloxane, the material of the first non-conductive elastic layer comprises foam or aerogel, and the material of the first conductive elastic layer comprises conductive foam or aerogel.
14. The flexible sensing module of claim 1, wherein the resistive flexible sensor is configured to respond to an external humidity stimulus, the resistive flexible sensor comprising a tenth flexible substrate, a fourth humidity responsive layer, and a third interdigitated electrode arranged in a sequential stack;
the capacitive flexible sensor is configured to respond to external temperature stimulation and comprises a tenth electrode layer, a fourth electrolyte layer, a third thermal response layer and an eleventh electrode layer which are sequentially stacked and arranged on one side, away from the tenth flexible substrate, of the third trigeminal finger electrode;
the voltage-based flexible sensor is configured to respond to an external pressure stimulus, the voltage-based flexible sensor comprising: the eleventh electrode layer, and a second negative electric friction layer, a second non-conductive telescopic layer and a twelfth electrode layer which are sequentially stacked and arranged on one side of the eleventh electrode layer, which is far away from the tenth flexible substrate; or the voltage-mode flexible sensor comprises: the first electrode layer, the second negative electric friction layer, the second conductive telescopic layer and the eleventh flexible substrate are sequentially stacked and arranged on one side, away from the tenth flexible substrate, of the eleventh electrode layer.
15. The flexible sensor module of claim 14, wherein the material of the fourth humidity responsive layer comprises poly 3, 4-ethylenedioxythiophene/polystyrene sulfonate or a transition metal carbide.
16. The flexible sensor module according to claim 14, wherein the fourth electrolyte layer comprises a twelfth flexible substrate and a polyvinyl alcohol/ionic liquid impregnated on the twelfth flexible substrate, or the fourth electrolyte layer is an ionic liquid/polyurethane electrolyte layer obtained by electrospinning;
the material of the third thermal response layer is a thermal expansion material.
17. The flexible sensor module of claim 14, wherein the material of the second negative electrical friction layer comprises polytetrafluoroethylene, polyvinylidene fluoride, fluorinated ethylene propylene, or polydimethylsiloxane, the material of the second non-conductive elastic layer comprises foam or aerogel, and the material of the second conductive elastic layer comprises conductive foam or aerogel.
18. An electronic device comprising the flexible sensor module of any one of claims 1-17.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211445956.3A CN115717904A (en) | 2022-11-18 | 2022-11-18 | Flexible sensing module and electronic equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211445956.3A CN115717904A (en) | 2022-11-18 | 2022-11-18 | Flexible sensing module and electronic equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115717904A true CN115717904A (en) | 2023-02-28 |
Family
ID=85255469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211445956.3A Pending CN115717904A (en) | 2022-11-18 | 2022-11-18 | Flexible sensing module and electronic equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115717904A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116295656A (en) * | 2023-05-09 | 2023-06-23 | 之江实验室 | Photoelectric fusion-based integrated multi-parameter sensor and preparation method thereof |
-
2022
- 2022-11-18 CN CN202211445956.3A patent/CN115717904A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116295656A (en) * | 2023-05-09 | 2023-06-23 | 之江实验室 | Photoelectric fusion-based integrated multi-parameter sensor and preparation method thereof |
| CN116295656B (en) * | 2023-05-09 | 2023-10-31 | 之江实验室 | Photoelectric fusion-based integrated multi-parameter sensor and preparation method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Li et al. | Physical sensors for skin‐inspired electronics | |
| Zhu et al. | Technologies toward next generation human machine interfaces: From machine learning enhanced tactile sensing to neuromorphic sensory systems | |
| Sun et al. | Flexible tactile electronic skin sensor with 3D force detection based on porous CNTs/PDMS nanocomposites | |
| Tao et al. | Graphene-paper pressure sensor for detecting human motions | |
| Li et al. | Large-area, wearable, self-powered pressure–temperature sensor based on 3D thermoelectric spacer fabric | |
| Lee et al. | Graphene-based stretchable/wearable self-powered touch sensor | |
| Yang et al. | Recent advances in wearable tactile sensors: Materials, sensing mechanisms, and device performance | |
| Xiong et al. | Progress on wearable triboelectric nanogenerators in shapes of fiber, yarn, and textile | |
| Lin et al. | Triboelectric active sensor array for self-powered static and dynamic pressure detection and tactile imaging | |
| Zeng et al. | Fiber‐based wearable electronics: a review of materials, fabrication, devices, and applications | |
| CN103616097A (en) | Flexible film tactile sensor and production method thereof | |
| Vu et al. | Flexible wearable sensors-an update in view of touch-sensing | |
| CN107144379A (en) | A kind of resistive pressure is distributed fabric sensor | |
| Kim et al. | Approaches to deformable physical sensors: Electronic versus iontronic | |
| Zhao et al. | Spider web-like flexible tactile sensor for pressure-strain simultaneous detection | |
| CN206291983U (en) | A kind of electronic skin for touch detection | |
| KR102111534B1 (en) | Flexible electronic device and pressure and temperature sensor comprising the same | |
| CN111505065A (en) | Interdigital counter electrode type flexible touch sensor based on super-capacitor sensing principle and preparation method thereof | |
| WO2015024369A1 (en) | Skin-based electrical signal output device and electrical signal output method | |
| CN115717904A (en) | Flexible sensing module and electronic equipment | |
| Liu et al. | Recent advances in inkjet-printing technologies for flexible/wearable electronics | |
| Gao et al. | Self-Powered Resilient Porous Sensors with Thermoelectric Poly (3, 4-ethylenedioxythiophene): Poly (styrenesulfonate) and Carbon Nanotubes for Sensitive Temperature and Pressure Dual-Mode Sensing | |
| Ma et al. | Performance of flexible strain sensors with different transition mechanisms: a review | |
| Liu et al. | Thin, soft, garment‐integrated triboelectric nanogenerators for energy harvesting and human machine interfaces | |
| CN203965077U (en) | A kind of fexible film touch sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |