CN115717267A - Main furnace chamber furnace cover convenient for measuring large-diameter crystal bar in crystal pulling process and single crystal furnace - Google Patents
Main furnace chamber furnace cover convenient for measuring large-diameter crystal bar in crystal pulling process and single crystal furnace Download PDFInfo
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- CN115717267A CN115717267A CN202211558418.5A CN202211558418A CN115717267A CN 115717267 A CN115717267 A CN 115717267A CN 202211558418 A CN202211558418 A CN 202211558418A CN 115717267 A CN115717267 A CN 115717267A
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Abstract
The invention relates to a main furnace chamber furnace cover convenient for measuring a large-diameter crystal bar in a crystal pulling process, which comprises a cover body, wherein a throat, a first observation window and a second observation window are arranged on the cover body, the first observation window, the second observation window and the throat are arranged on a furnace body in a shape like Chinese character 'pin', a first graduated scale and a first support are arranged on the first observation window, a first ocular lens is arranged on the first support in a sliding mode and can observe the inside of a single crystal furnace through the first observation window, a second graduated scale and a second support are arranged on the second observation window, a second ocular lens is arranged on the second support in a sliding mode and can observe the inside of the single crystal furnace through the second observation window, and a zero graduation line of the first graduated scale and a zero graduation line of the second graduated scale are arranged close to each other. And reading a value L1 after the first ocular is aligned with one side of the crystal bar at the molten silicon liquid level, reading a value L2 after the second ocular is aligned with the other side of the crystal bar at the molten silicon liquid level, and adding the three values to obtain the diameter value of the crystal bar.
Description
Technical Field
The invention relates to the technical field of semiconductor processing, in particular to a main furnace chamber furnace cover convenient for measuring a large-diameter crystal bar in a crystal pulling process and a single crystal furnace.
Background
The single crystal furnace is a device which can melt polycrystalline silicon materials in an inert gas environment and produce monocrystalline silicon by a Czochralski method, and at present, workers adopt an eyepiece to observe the growth condition of crystals in the single crystal furnace. The eyepiece is arranged at an observation window at the top of the single crystal furnace, a lens of the eyepiece faces the inside of the furnace and is used for observing the liquid level in the furnace, and the capturing position of the camera in the single crystal furnace is determined by adjusting the height and the angles in all directions of the eyepiece; the data such as the liquid level temperature, the distance from the liquid level to the guide cylinder, the diameter of the single crystal silicon rod and the like are measured in the stages of temperature adjustment, seeding, shouldering, shoulder turning and diameter equalization in the single crystal pulling process, and a control parameter basis is provided for the single crystal pulling process.
The method comprises the steps that the diameter of a crystal bar is measured at regular time in the process of crystal pulling equal diameter, so that the diameter of the crystal bar can meet the specification of a customer, the consumption of polycrystalline silicon materials is increased if the diameter of the crystal bar is larger, the waste of the polycrystalline silicon materials is caused, the diameter of a target crystal bar meeting the requirement of the customer needs to be processed in subsequent processing, and the allowance of the processing size is larger due to the larger diameter of the crystal bar, so that the processing time and the processing amount are greatly increased; if the diameter of the crystal bar is too small to meet the requirements of customers, products can be scrapped or degraded; both of these situations result in unnecessary losses to production. The diameter of the crystal bar is measured by moving an eyepiece on an observation window along a scale bar arranged on the observation window to respectively read the numerical difference obtained by aligning the eyepiece with the two sides of the crystal bar, but the diameter of the crystal bar is larger and larger along with the production requirement of the large-diameter crystal bar, when the diameter of the crystal bar is increased to a certain degree, because the space of a main single crystal furnace of the single crystal furnace is limited, the crystal bar can be taken out from a throat opening after the crystal bar is successfully drawn by designing the size of the throat opening to be larger than that of the crystal bar, the condition that the size of the throat opening is increased due to the unchanged diameter of a cavity of the single crystal furnace inevitably designs the observation window towards the periphery of the single crystal furnace, because the observation window is limited by the throat opening and the periphery of the single crystal furnace, the length of the observation window can further cause the eyepiece not to be aligned with the two sides of the crystal bar in the moving process, the measured data is inaccurate, the design that the observation window is increased close to the periphery of the single crystal furnace and the throat opening is designed, the distance between the observation window and the throat opening is almost close to the edge of the single crystal furnace, the hidden danger of the local and the support of the production of the single crystal furnace is brought.
Disclosure of Invention
The invention mainly aims to provide a main furnace chamber furnace cover convenient for measuring a large-diameter crystal bar in the crystal pulling process, and aims to solve the problems that the supporting strength of a single crystal furnace is reduced due to the increase of the throat size of the single crystal furnace under the condition that the furnace diameter of the single crystal furnace is not changed, the diameter measurement of the crystal bar is inaccurate, and the requirement for producing the large-diameter crystal bar on the premise that the furnace diameter of the single crystal furnace is not changed in the prior art can not be met.
A main furnace chamber furnace cover convenient for measuring a large-diameter crystal bar in a crystal pulling process comprises a cover body, wherein a throat, a first observation window and a second observation window are arranged on the cover body, the first observation window and the second observation window are positioned on one side of the throat, the first observation window, the second observation window and the throat are arranged on a furnace body in a delta shape, and the first observation window and the second observation window are symmetrically arranged; the first observation window is provided with a first graduated scale, the first observation window is provided with a first support, the first support is provided with a first ocular, the first ocular is arranged on the first support in a sliding mode and can observe the interior of the single crystal furnace through the first observation window, and the first support is provided with a first pointer pointing to the first graduated scale; set up the second scale on the second observation window, set up the second support on the second observation window, install the second eyepiece on the second support, the second eyepiece sets up on the second support with the slip mode and can observe inside the single crystal growing furnace through the second observation window, set up the second pointer of directional second scale on the second support, the zero scale mark of first scale and the zero scale mark of second scale are close to each other and set up, the distance between the zero scale mark of first scale and the zero scale mark of second scale is L0.
Preferably, the first support comprises a first base, a first slide rail and a first sliding part, the first base is installed on the front side wall of the first observation window, the first slide rail is arranged on the front side wall of the first base, a first slide block and a second slide block are arranged on the rear side wall of the first sliding part, the first slide block is buckled on the upper edge of the first slide rail, the second slide block is clamped on the lower edge of the first slide rail, a first pointer is arranged on the rear side wall of the first sliding part, the first pointer is located above the first slide block, the front end of the first pointer is close to the scale of the first graduated scale, a first extension arm is arranged on the first sliding part, the first extension arm is located above the upper end face of the first observation window, and the first eyepiece is connected with the first extension arm in a rotating mode.
Preferably, the second support includes the second base, second slide rail and second slider, the second pedestal mounting is on the preceding lateral wall of second observation window, the second slide rail sets up on the preceding lateral wall of second base, set up third slider and fourth slider on the back lateral wall of second slider, third slider lock is on the last border of second slide rail, the fourth slider centre gripping is on the lower limb of second slide rail, the second pointer sets up on the back lateral wall of second slider, the second pointer is located the top of third slider, the front end of second pointer is close to the scale of second scale, set up the second extension arm on the second slider, the second extension arm is located the top of second observation window up end, second eyepiece and second extension arm rotate and are connected.
Preferably, the cover body is further provided with a third observation window, the first observation window and the second observation window are located on the same side of the throat, the third observation window is located between the first observation window and the second observation window, the third observation window and the throat are arranged in a right-to-right mode, the first observation window, the second observation window and the third observation window are arranged on the cover body in a delta shape, and the distance between the first observation window and the second observation window is smaller than the diameter of the throat.
Preferably, the first observation window and the second observation window are arranged in an axisymmetric manner, and the symmetry axis is a connecting line between a midpoint of the third observation window and a midpoint of the throat.
Preferably, the connecting line of the rear side walls of the first observation window and the second observation window is intersected with the edge of the throat.
Preferably, first scale sets up on first observation window up end, and first scale is located the border department that first observation window is close to preceding lateral wall.
Preferably, the second scale sets up on second observation window up end, and the second scale is located the border department that the second observation window is close to preceding lateral wall.
Preferably, the first ocular is provided with a first bracket, the first bracket is arranged at the lower end of the first ocular, and the first bracket is connected with the first extension arm by a rotating shaft; the two eyepieces are provided with second brackets, the second brackets are arranged at the lower ends of the second eyepieces, and the second brackets and the second extension arms are connected through rotating shafts.
The invention also provides a single crystal furnace, which comprises the main furnace chamber furnace cover convenient for measuring the large-diameter crystal bar in the crystal pulling process.
According to the technical scheme, along with the production requirement that the diameter of the crystal bar gradually increases, the first observation window and the second observation window are arranged on the cover body side by side at intervals, the requirement that the diameter of the single crystal furnace is not increased is met, the first observation window and the second observation window are arranged on the cover body side by side and aligned to one side of the crystal bar at the position of the molten silicon liquid level in a sliding mode through the first eyepiece, the numerical value L1 is read, the second observation window is arranged on the second observation window in a sliding mode and aligned to the other side of the crystal bar at the position of the molten silicon liquid level in a sliding mode through the second eyepiece, the numerical value L2 is read, then the diameter numerical value of the measured crystal bar is obtained through adding the numerical value L0, the numerical value L1 and the numerical value L2, and meanwhile, the first observation window and the second observation window are respectively reserved with the throat so that the supporting strength of the cover body meets the requirement of single crystal production.
Drawings
Fig. 1 is a perspective view of the present invention.
Fig. 2 is a top view of the present invention.
Fig. 3 is an enlarged view of fig. 1 at the first observation window.
Fig. 4 is an enlarged view of fig. 1 at the second observation window.
Fig. 5 is a perspective view of the first eyepiece and the first bracket after assembly.
Fig. 6 is a perspective view of the second eyepiece and the second bracket after assembly.
In the figure: the endoscope comprises a cover body 10, a throat 20, a first observation window 30, a first scale 31, a first support 32, a first pointer 321, a first base 322, a first slide rail 323, a first sliding part 324, a first sliding block 3241, a second sliding block 3242, a first extension arm 3243, a first ocular 33, a first bracket 331, a second observation window 40, a second scale 41, a second support 42, a second pointer 421, a second base 422, a second slide rail 423, a second sliding part 424, a third sliding block 4241, a fourth sliding block 4242, a second extension arm 4243, a second ocular 43, a second bracket 431 and a third observation window 50.
Detailed Description
The technical solutions and effects of the embodiments of the present invention are further described in detail below with reference to the drawings of the present invention.
Referring to fig. 1 to 6, the furnace cover of the main furnace chamber for measuring large-diameter crystal bars conveniently in the crystal pulling process comprises a cover body 10, wherein a throat 20, a first observation window 30 and a second observation window 40 are arranged on the cover body 10, the first observation window 30 and the second observation window 40 are positioned on one side of the throat 20, the first observation window 30, the second observation window 40 and the throat 20 are arranged on the furnace body in a delta shape, and the first observation window 30 and the second observation window 40 are symmetrically arranged; a first graduated scale 31 and a first bracket 32 are arranged on the first observation window 30, a first ocular lens 33 is arranged on the first bracket 32, the first ocular lens 33 is arranged on the first bracket 32 in a sliding mode and can observe the interior of the single crystal furnace through the first observation window 30, and a first pointer 321 pointing to the first graduated scale 31 is arranged on the first bracket 32; set up second scale 41 on the second observation window 40, set up second support 42 on the second observation window 40, install second eyepiece 43 on the second support 42, second eyepiece 43 sets up on second support 42 with sliding mode and can observe inside the single crystal growing furnace through second observation window 40, set up the second pointer 421 to second scale 41 on the second support 42, the zero scale mark of first scale 31 and the zero scale mark of second scale 41 are close to each other and set up, the distance between the zero scale mark of first scale 31 and the zero scale mark of second scale 41 is L0. In the process of drawing the crystal bar, the first eyepiece 33 is aligned to one side of the drawn crystal bar in a sliding manner on the first observation window 30, a value L1 is read, then the second eyepiece 43 is aligned to the other side of the drawn crystal bar in a sliding manner on the second observation window 40, a value L2 is read, then the value L0, the value L1 and the value L2 are added to obtain a diameter value of the measured crystal bar, and meanwhile, the first observation window 30 and the second observation window 40 are respectively spaced from the throat 20 to ensure that the supporting strength of the cover body 10 meets the requirement of single crystal production.
Further, the first bracket 32 includes a first base 322, a first slide rail 323 and a first sliding part 324, the first base 322 is installed on the front side wall of the first observation window 30, the first slide rail 323 is disposed on the front side wall of the first base 322, a first slider 3241 and a second slider 3242 are disposed on the rear side wall of the first sliding part 324, the first slider 3241 is fastened on the upper edge of the first slide rail 323, the second slider 3242 is clamped on the lower edge of the first slide rail 323, the first pointer 321 is disposed on the rear side wall of the first sliding part 324, the first pointer 321 is located above the first slider 3241, the front end of the first pointer 321 is close to the scale of the first scale 31, the first sliding part 324 is provided with a first extension arm 3243, the first extension arm 3243 is located above the upper end surface of the first observation window 30, and the first eyepiece 33 is rotatably connected with the first extension arm 3243.
Further, the second support 42 includes a second base 422, a second slide rail 423 and a second slider 424, the second base 422 is mounted on a front side wall of the second observation window 40, the second slide rail 423 is disposed on a front side wall of the second base 422, a rear side wall of the second slider 424 is provided with a third slider 4241 and a fourth slider 4242, the third slider 4241 is fastened on an upper edge of the second slide rail 423, the fourth slider 4242 is clamped on a lower edge of the second slide rail 423, the second pointer 421 is disposed on a rear side wall of the second slider 424, the second pointer 421 is located above the third slider 4241, a front end of the second pointer 421 is close to a scale of the second scale 41, the second slider 424 is provided with a second extension arm 4243, the second extension arm 4243 is located above an upper end face of the second observation window 40, and the second eyepiece 43 is rotatably connected with the second extension arm 4243.
Further, a third observation window 50 is further disposed on the cover 10, the third observation window 50 is located on the same side of the throat 20 as the first observation window 30 and the second observation window 40, the third observation window 50 is located between the first observation window 30 and the second observation window 40, the third observation window 50 is disposed opposite to the throat 20, the first observation window 30, the second observation window 40 and the third observation window 50 are disposed on the cover 10 in a delta shape, and a distance L between the first observation window 30 and the second observation window 40 is smaller than a diameter R of the throat 20. More positions in the single crystal furnace can be increasingly observed through the third observation window 50, such as positions near the throat 20 and positions directly below the third observation window 50.
Further, the first observation window 30 and the second observation window 40 are provided in an axisymmetric manner, and the axis of symmetry is a line connecting a midpoint of the third observation window 50 and a midpoint of the throat 20.
Further, the line connecting the rear side walls of the first observation window 30 and the second observation window 40 intersects with the edge of the throat 20.
Further, the first graduated scale 31 is disposed on the upper end surface of the first observation window 30, and the first graduated scale 31 is located at the edge of the first observation window 30 close to the front side wall.
Further, a second graduated scale 41 is disposed on the upper end surface of the second observation window 40, and the second graduated scale 41 is located at the edge of the second observation window 40 close to the front side wall.
Further, the first eyepiece 33 is provided with a first bracket 331, the first bracket 331 is arranged at the lower end of the first eyepiece 33, and the first bracket 331 and the first extension arm 3243 are connected by a rotating shaft; the second eyepiece 43 is provided with a second bracket 431, the second bracket 431 is provided at the lower end of the second eyepiece 43, and the second bracket 431 and the second extension arm 4243 are connected by a rotating shaft. The above-described configuration of the pivotal connection facilitates maintenance of the first eyepiece 33 and the second eyepiece 43.
The invention also provides a single crystal furnace, which comprises the main furnace chamber furnace cover convenient for measuring the large-diameter crystal bar in the crystal pulling process.
In use, in the process of drawing the crystal bar, a user slides on the first observation window 30 through the first ocular 33 to align with one side of the drawn crystal bar, reads a numerical value L1 by pointing to the corresponding scale of the first scale 31 through the first pointer 321, slides on the second observation window 40 through the second ocular 43 to align with the other side of the drawn crystal bar, reads a numerical value L2 by pointing to the corresponding scale of the second scale 41 through the second pointer 421, and then obtains a diameter numerical value of the measured crystal bar by adding the numerical value L0, the numerical value L1 and the numerical value L2.
Claims (10)
1. The utility model provides a be convenient for measure main furnace room bell of major diameter crystal bar among crystal pulling process which characterized in that: the furnace body comprises a cover body, wherein a throat, a first observation window and a second observation window are arranged on the cover body, the first observation window and the second observation window are positioned on one side of the throat, the first observation window, the second observation window and the throat are arranged on the furnace body in a shape like a Chinese character 'pin', and the first observation window and the second observation window are symmetrically arranged; the first observation window is provided with a first graduated scale, the first observation window is provided with a first support, the first support is provided with a first ocular, the first ocular is arranged on the first support in a sliding mode and can observe the interior of the single crystal furnace through the first observation window, and the first support is provided with a first pointer pointing to the first graduated scale; set up the second scale on the second observation window, set up the second support on the second observation window, install the second eyepiece on the second support, the second eyepiece sets up on the second support with the slip mode and can observe inside the single crystal growing furnace through the second observation window, set up the second pointer of directional second scale on the second support, the zero scale mark of first scale and the zero scale mark of second scale are close to each other and set up, the distance between the zero scale mark of first scale and the zero scale mark of second scale is L0.
2. A main furnace chamber lid for facilitating measurement of a large diameter ingot during crystal pulling as set forth in claim 1, wherein: the first support comprises a first base, a first sliding rail and a first sliding piece, the first base is installed on the front side wall of the first observation window, the first sliding rail is arranged on the front side wall of the first base, a first sliding block and a second sliding block are arranged on the rear side wall of the first sliding piece, the first sliding block is buckled on the upper edge of the first sliding rail, the second sliding block is clamped on the lower edge of the first sliding rail, a first pointer is arranged on the rear side wall of the first sliding piece, the first pointer is located above the first sliding block, the front end of the first pointer is close to the scale of the first scale, a first extension arm is arranged on the first sliding piece, the first extension arm is located above the upper end face of the first observation window, and the first eyepiece and the first extension arm are connected in a rotating mode.
3. A main furnace chamber lid for facilitating measurement of a large diameter ingot during crystal pulling as claimed in claim 2, wherein: the second support comprises a second base, a second sliding rail and a second sliding part, the second base is installed on the front side wall of the second observation window, the second sliding rail is arranged on the front side wall of the second base, a third sliding block and a fourth sliding block are arranged on the rear side wall of the second sliding part, the third sliding block is buckled on the upper edge of the second sliding rail, the fourth sliding block is clamped on the lower edge of the second sliding rail, a second pointer is arranged on the rear side wall of the second sliding part, the second pointer is located above the third sliding block, the front end of the second pointer is close to the scale of the second scale, a second extension arm is arranged on the second sliding part, the second extension arm is located above the upper end face of the second observation window, and the second eyepiece and the second extension arm are connected in a rotating mode.
4. A main furnace chamber lid for facilitating measurement of a large diameter ingot during crystal pulling as claimed in claim 1, wherein: the cover body is further provided with a third observation window, the first observation window and the second observation window are located on the same side of the throat, the third observation window is located between the first observation window and the second observation window, the third observation window and the throat are arranged oppositely, the first observation window, the second observation window and the third observation window are arranged on the cover body in a shape like a Chinese character 'pin', and the distance between the first observation window and the second observation window is smaller than the diameter of the throat.
5. A main furnace chamber lid for facilitating measurement of a large diameter ingot during crystal pulling as claimed in claim 1, wherein: the first observation window and the second observation window are arranged in an axisymmetric mode, and the symmetry axis is a connecting line of the middle point of the third observation window and the middle point of the throat.
6. A main furnace chamber lid for facilitating measurement of a large diameter ingot during crystal pulling as claimed in claim 5, wherein: the connecting line of the rear side walls of the first observation window and the second observation window is intersected with the edge of the throat.
7. A main furnace chamber lid for facilitating measurement of a large diameter ingot during crystal pulling as claimed in claim 2, wherein: first scale sets up on first observation window up end, and first scale is located the border department that first observation window is close to preceding lateral wall.
8. A main furnace chamber lid for facilitating measurement of a large diameter ingot during crystal pulling as claimed in claim 3, wherein: the second scale sets up on second observation window up end, and the second scale is located the border department that the second observation window is close to preceding lateral wall.
9. A main furnace chamber lid for facilitating measurement of a large diameter ingot during crystal pulling as claimed in claim 3, wherein: the first ocular is provided with a first bracket, the first bracket is arranged at the lower end of the first ocular, and the first bracket is connected with the first extension arm by a rotating shaft; the second eyepiece sets up the second bracket, and the second bracket sets up the lower extreme at the second eyepiece, and second bracket and second extension arm adopt the pivot to connect.
10. A single crystal furnace is characterized in that: the single crystal furnace comprises a main furnace chamber furnace cover for facilitating measurement of a large-diameter crystal bar during crystal pulling according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211558418.5A CN115717267A (en) | 2022-12-06 | 2022-12-06 | Main furnace chamber furnace cover convenient for measuring large-diameter crystal bar in crystal pulling process and single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211558418.5A CN115717267A (en) | 2022-12-06 | 2022-12-06 | Main furnace chamber furnace cover convenient for measuring large-diameter crystal bar in crystal pulling process and single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115717267A true CN115717267A (en) | 2023-02-28 |
Family
ID=85257484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211558418.5A Pending CN115717267A (en) | 2022-12-06 | 2022-12-06 | Main furnace chamber furnace cover convenient for measuring large-diameter crystal bar in crystal pulling process and single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115717267A (en) |
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2022
- 2022-12-06 CN CN202211558418.5A patent/CN115717267A/en active Pending
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