CN115711666A - High-temperature-resistant piezoelectric acceleration sensor - Google Patents
High-temperature-resistant piezoelectric acceleration sensor Download PDFInfo
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- CN115711666A CN115711666A CN202211580847.2A CN202211580847A CN115711666A CN 115711666 A CN115711666 A CN 115711666A CN 202211580847 A CN202211580847 A CN 202211580847A CN 115711666 A CN115711666 A CN 115711666A
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Abstract
The invention relates to the technical field of acceleration sensors, in particular to a high-temperature-resistant piezoelectric acceleration sensor, which comprises: a piezoelectric measuring body capable of outputting a piezoelectric signal according to vibration of a device under test; the lower side of the mounting seat is used for connecting a device to be tested, and the upper side of the mounting seat is provided with the piezoelectric measuring body; the lower end of the sealing shell is fixedly connected with the upper end of the mounting seat in a sealing manner, and the sealing shell is used for sealing the piezoelectric measuring body; the sealing joint is arranged on the sealing shell, and a positive connecting electrode and a negative connecting electrode are hermetically inserted in the sealing joint; the positive electrode connecting pole and the negative electrode connecting pole are used for connecting the piezoelectric measuring body and an external cable. The invention can ensure the whole sealing performance of the sealing shell, can stably operate in a high-temperature environment, and can be widely applied to vibration testing in the high-temperature environment in the nuclear power field.
Description
Technical Field
The invention relates to the technical field of acceleration sensors, in particular to a high-temperature-resistant piezoelectric acceleration sensor.
Background
The piezoelectric acceleration sensor is a device for performing electromechanical energy conversion by utilizing a piezoelectric effect, has the advantages of high sensitivity, wide frequency response, strong environmental adaptability and the like, is widely applied to military and civil fields such as nuclear power industry, aerospace, road and bridge design, building design and the like, and particularly has a special status in the nuclear power industry.
The vibration load caused by fluid vibration, water hammer impact, gas-liquid two-phase flow and the like exists around the nuclear power equipment for a long time, so that the fatigue vibration problem is induced, the performance of materials and structures is deteriorated, the service stability and reliability of the equipment are further influenced, and leakage and even forced shutdown are caused in severe cases. Particularly, when the nuclear-grade pipeline is broken, the high-energy fluid sprayed at the broken opening can cause the pipeline to throw, damage surrounding equipment and cause more serious secondary damage. Therefore, in the operation process of the nuclear power system, a sensor is required to be adopted to carry out on-line vibration monitoring on nuclear power key equipment so as to judge the structural defects and potential threats of the nuclear power key equipment.
In practical use, a method of measuring an acceleration amplitude by using a piezoelectric acceleration sensor is generally adopted to perform online monitoring and vibration measurement evaluation on nuclear power key equipment. The operating temperature of the nuclear power system exceeds 300 ℃, and the used acceleration sensor needs to stably work in a high-temperature environment for a long time. At present, the domestic piezoelectric acceleration sensor has low temperature tolerance, can stably work at normal temperature, but has limited precision and low impedance at high temperature, can not stably work for a long time, and is difficult to meet the test requirement of nuclear power equipment.
Disclosure of Invention
Aiming at the technical problem that the conventional piezoelectric acceleration sensor is low in temperature resistance, the invention provides a high-temperature-resistant piezoelectric acceleration sensor which can stably operate in a high-temperature environment and can be widely applied to vibration testing in the high-temperature environment in the field of nuclear power.
The invention is realized by the following technical scheme:
the invention provides a high-temperature-resistant piezoelectric acceleration sensor, which comprises: a piezoelectric measuring body capable of outputting a piezoelectric signal according to vibration of a device under test; the lower side of the mounting seat is used for connecting a device to be tested, and the upper side of the mounting seat is provided with the piezoelectric measuring body; the lower end of the sealing shell is fixedly connected with the upper end of the mounting seat in a sealing manner, and the sealing shell is used for sealing the piezoelectric measuring body; the sealing joint is arranged on the sealing shell, and a positive connecting electrode and a negative connecting electrode are hermetically inserted in the sealing joint; the positive connecting pole and the negative connecting pole are used for connecting the piezoelectric measuring body and an external cable.
According to the high-temperature-resistant piezoelectric acceleration sensor provided by the invention, the piezoelectric measuring body is arranged on the mounting seat, the sealing shell is fixedly connected with the upper end of the mounting seat in a sealing manner, so that the piezoelectric measuring body is sealed by the sealing shell, meanwhile, the electric signal of the piezoelectric measuring body is led out through the anode connecting pole and the cathode connecting pole of the sealing joint, and the sealing joint is hermetically penetrated through the upper wall of the sealing shell, so that the integral sealing performance of the sealing shell can be ensured, the external medium is prevented from directly exchanging heat with the piezoelectric measuring body, and the high-temperature-resistant piezoelectric acceleration sensor can stably run in a high-temperature environment, and can be widely applied to vibration testing in the high-temperature environment in the field of nuclear power.
In an alternative embodiment, the piezoelectric measuring body is fixedly connected to the mounting base by a pretensioning bolt, so that a pretensioning force is provided to the piezoelectric measuring body by the pretensioning bolt.
In an optional embodiment, a through hole is formed in the middle of the piezoelectric measuring body, a screw hole is formed in the upper end of the mounting seat, and the pre-tightening bolt penetrates through the through hole and is in threaded connection with the screw hole, so that the mounting reliability of the piezoelectric measuring body is ensured.
In an alternative embodiment, a mass is arranged between the head of the pretensioning bolt and the piezoelectric measuring body, so that the output charge of the sensor is effectively increased by the mass.
In an alternative embodiment, the piezoelectric measuring body comprises a plurality of piezoelectric ceramic plates stacked together so as to adjust the sensitivity of the piezoelectric measuring body.
In an alternative embodiment, the polarities of the opposite sides of two adjacent piezoceramic wafers are the same.
In an optional embodiment, the piezoelectric ceramic sheet is made of bismuth layer or perovskite high-temperature piezoelectric ceramic, so as to ensure that the piezoelectric measuring body has sufficient high-temperature resistance.
In an alternative embodiment, the top of the sealing shell is provided with a connecting hole for plugging the sealing joint.
In an alternative embodiment, the negative connecting electrode sleeve is provided with a first sealing member, the first sealing member sleeve is provided with a sealing cover, and the sealing cover is used for sealing a gap between the first sealing member and the sealing shell; the piezoelectric measuring device comprises a piezoelectric measuring body, a negative electrode connecting electrode, a positive electrode connecting electrode, a second sealing piece and a sealing shell, wherein the negative electrode connecting electrode is provided with a plugging hole, the positive electrode connecting electrode is plugged in the plugging hole, the positive electrode connecting electrode is sleeved with the second sealing piece, and the second sealing piece is used for sealing a gap between the positive electrode connecting electrode and the negative electrode connecting electrode so as to lead out the measuring data of the piezoelectric measuring body while ensuring the sealing property of the sealing shell.
In an alternative embodiment, the first sealing member and the second sealing member are made of glass or metallized insulating ceramic.
The invention has the following advantages and beneficial effects:
according to the high-temperature-resistant piezoelectric acceleration sensor provided by the invention, the piezoelectric measuring body is arranged on the mounting seat, the sealing shell is fixedly connected with the upper end of the mounting seat in a sealing manner, so that the piezoelectric measuring body is sealed by the sealing shell, meanwhile, the electric signal of the piezoelectric measuring body is led out through the anode connecting pole and the cathode connecting pole of the sealing joint, and the sealing joint is hermetically penetrated through the upper wall of the sealing shell, so that the integral sealing performance of the sealing shell can be ensured, the external medium is prevented from directly exchanging heat with the piezoelectric measuring body, and the high-temperature-resistant piezoelectric acceleration sensor can stably run in a high-temperature environment, and can be widely applied to vibration testing in the high-temperature environment in the field of nuclear power.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
In the drawings:
FIG. 1 is a schematic structural diagram of a high temperature resistant piezoelectric acceleration sensor according to an embodiment of the present invention;
FIG. 2 is an enlarged view of the portion A of FIG. 1;
fig. 3 is an enlarged schematic view of a portion B of fig. 1.
In the drawings:
10-piezoelectric measuring body, 11-through hole, 12-mass block, 13-piezoelectric ceramic piece, 14-positive electrode piece, 15-negative electrode piece, 20-mounting seat, 21-screw hole, 30-sealing shell, 31-connecting hole, 40-sealing joint, 41-negative electrode connecting pole, 42-positive electrode connecting pole, 43-first sealing piece, 44-second sealing piece, 45-inserting hole, 46-sealing cover and 50-pre-tightening bolt.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined or explained in subsequent figures. The embodiments and features of the embodiments of the invention may be combined with each other without conflict.
In the description of the embodiments of the present invention, the terms "central," "upper," "lower," "left," "right," "vertical," "longitudinal," "lateral," "horizontal," "inner," "outer," "front," "rear," "top," "bottom," and the like refer to orientations or positional relationships that are conventionally used in the product of this application, or are orientations or positional relationships that are conventionally understood by those skilled in the art, which are used to describe the present invention and to simplify the description, but do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be considered limiting to the present invention.
In the description of the present invention, unless otherwise expressly specified or limited, the terms "disposed," "open," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
It should be noted that the operating temperature of the nuclear power system exceeds 300 ℃, and the used acceleration sensor needs to stably operate in a high-temperature environment for a long time. At present, a high-temperature-resistant piezoelectric acceleration sensor used by a nuclear power system is seriously dependent on import, long in supply period and high in price.
In order to solve the problems, the invention provides a high-temperature-resistant piezoelectric acceleration sensor which can work for a long time in a high-temperature environment of 400 ℃, and has the advantages of high sensitivity, wide frequency response, strong anti-interference performance and the like, which are detailed in the embodiment.
Examples
With reference to fig. 1, the present embodiment provides a high temperature resistant piezoelectric acceleration sensor, including: a piezoelectric measuring body 10, the piezoelectric measuring body 10 being capable of outputting a piezoelectric signal according to vibration of a device under test; the lower side of the mounting seat 20 is used for connecting a device to be tested, and the upper side of the mounting seat 20 is provided with the piezoelectric measuring body 10; the lower end of the sealing shell 30 is fixedly connected with the upper end of the mounting seat 20 in a sealing manner, and the sealing shell 30 is used for sealing the piezoelectric measuring body 10; the sealing joint 40 is arranged on the sealing shell 30, and a negative electrode connecting pole 41 and a positive electrode connecting pole 42 are hermetically inserted in the sealing joint 40; the negative electrode connecting electrode 41 and the positive electrode connecting electrode 42 are used for connecting the piezoelectric measuring body 10 and an external cable.
In detail with reference to fig. 2, the piezoelectric measuring body 10 is fixedly connected to the mounting base 20 through a pre-tightening bolt 50, and a pre-tightening force is provided to the piezoelectric measuring body 10 through the pre-tightening bolt 50.
Correspondingly, the middle part of the piezoelectric measuring body 10 is provided with a through hole 11, the upper end of the mounting seat 20 is provided with a screw hole 21, and the pre-tightening bolt 50 penetrates through the through hole 11 and is in threaded connection with the screw hole 21, so that the mounting reliability of the piezoelectric measuring body 10 is ensured.
On the basis, a mass block 12 is arranged between the head of the pre-tightening bolt 50 and the piezoelectric measuring body 10, so that the output charge quantity of the sensor is effectively improved through the mass block 12. For the mass block 12, in this embodiment, the material of the mass block 12 is a high specific gravity alloy, which not only significantly improves the charge sensitivity of the sensor, but also effectively reduces the volume of the sensor.
In the present embodiment, the piezoelectric measuring body 10 includes a plurality of piezoelectric ceramic plates 13 stacked together so as to be adjusted according to the required sensitivity. Generally, the number of the piezoceramic wafers 13 is 4 to 6.
Specifically, the polarities of the opposite surfaces of two adjacent piezoelectric ceramic plates 13 are the same.
The piezoelectric ceramic sheet 13 is made of bismuth layer-like or perovskite-like materials, or other materials capable of withstanding high temperature. In the present embodiment, the bismuth-layered high-temperature piezoelectric ceramic is preferably used so that the use temperature of the piezoelectric ceramic sheet 13 exceeds 400 ℃.
In addition, a positive electrode pole 14 is assembled at the positive electrode end of each piezoelectric ceramic piece 13, and a negative electrode pole 15 is assembled at the negative electrode end of each piezoelectric ceramic piece for extracting charges generated by the piezoelectric ceramic pieces 13. That is, the piezoelectric ceramic plates 13, the positive electrode plate 14 and the negative electrode plate 15 are assembled to form the piezoelectric measuring body 10, and the number of the piezoelectric ceramic plates 13 of the piezoelectric measuring body 10 can be adjusted according to the required sensitivity.
It can be understood that the piezoelectric measuring body 10 has insulation sheets disposed on the upper and lower ends thereof, so as to achieve electrical insulation between the piezoelectric measuring body 10 and other components (the mass block 12 and the mounting base 20). Namely, the mounting seat 20, the piezoelectric measuring body 10, the mass block 12 and the insulating sheet are locked by the pre-tightening bolt 50, and the pre-tightening bolt 50 provides pre-tightening force for the whole structure.
On the basis, in the present embodiment, in detail with reference to fig. 1, a connection hole 31 for inserting the sealing joint 40 is formed at the top of the sealing shell 30. In this embodiment, a nichrome alloy is used instead of conventional stainless steel to ensure sufficient high temperature resistance of the sealed housing 30.
Referring to fig. 3, the negative electrode connecting pole 41 is externally provided with a first sealing member 43, the first sealing member 43 is externally provided with a sealing cover 46, and the sealing cover 46 is used for sealing a gap between the first sealing member 43 and the sealing shell 30; a plug hole 45 is arranged in the negative electrode connecting electrode 41, the positive electrode connecting electrode 42 is inserted in the plug hole 45, a second sealing element 44 is sleeved outside the positive electrode connecting electrode 42, and the second sealing element 44 is used for sealing a gap between the positive electrode connecting electrode 42 and the negative electrode connecting electrode 41 so as to ensure the sealing performance of the sealing shell 30 and derive the measurement data of the piezoelectric measuring body 10.
It can be known that, traditional rubber seal, the highest temperature of enduring can only reach about 200 ℃, is no longer applicable to this embodiment. Therefore, in the present embodiment, the material of the first sealing member 43 and the second sealing member 44 is glass or metalized insulating ceramic, so as to ensure sufficient high temperature resistance of the sealing joint 40. Meanwhile, in the present embodiment, the material of the sealing cover 46 is nichrome to ensure sufficient high temperature resistance.
When the first sealing member 43 and the second sealing member 44 are made of glass, during manufacturing and assembly, glass powder is firstly sintered into a glass blank, then the sealing cover 46, the first sealing member 43, the negative electrode connecting electrode 41, the second sealing member 44 and the positive electrode connecting electrode 42 are sequentially sleeved together, then all parts are placed in a high-temperature environment for sintering, so that the parts are stably connected into a whole, and finally the sealing joint 40 is obtained through a series of surfacing treatments.
When the first sealing element 43 and the second sealing element 44 are made of insulating ceramics, the first sealing element 43 and the second sealing element 44 are metalized, the sealing cover 46, the first sealing element 43, the negative connecting electrode 41, the second sealing element 44 and the positive connecting electrode 42 are sequentially sleeved together, and all parts are sintered in a high-temperature environment, so that the parts are stably connected into a whole, and the sealing joint 40 is obtained.
In addition, the mounting seat 20 and the pre-tightening bolt 50 are made of the same material, and are made of nickel-chromium-iron alloy, so that the structural stability and the performance stability of the sensor in a high-temperature environment can be ensured. Typically, the mounting base 20 is of circular configuration; the mounting base 20 and the device to be tested have various connection modes, and can be connected through a standard threaded interface at the center of the bottom part and also can be connected through gluing.
The high-temperature-resistant piezoelectric acceleration sensor provided by the implementation has the following assembling steps:
s10, stacking the negative electrode plate 15, the piezoelectric ceramic plate 13 and the positive electrode plate 14 in sequence, and centering by using a special tool during stacking to keep all parts coaxial;
s20, during stacking, the angles of the long ends of all the positive electrode sheets 14 are kept consistent, the angles of the long ends of all the negative electrode sheets 15 are kept consistent, the long ends of the positive electrode sheets 14 and the negative electrode sheets 15 have certain angle deviation, and the relative angle between the long ends of the positive electrode sheets 14 and the long ends of the negative electrode sheets 15 is 90 degrees after stacking;
s30, after stacking is finished (the electrode plate is positioned at the top), bending the long ends of the electrode plates at the same angle respectively, ensuring that the bent electrode plates are tightly attached to the side edge of the piezoelectric ceramic plate 13, and then welding the electrode plates at the same angle together to form a positive electrode end and a negative electrode end respectively; all the parts form a piezoelectric measuring body 10; welding leads with certain length at the positive electrode end and the negative electrode end;
s40, sequentially placing the insulating sheet, the piezoelectric measuring body 10, the insulating sheet and the mass block 12 on the upper part of the mounting base 20 and centering by using a special tool to keep all parts coaxial; after centering, placing the pre-tightening bolt 50 on the top and applying a certain torque to tighten;
and S50, placing the sealing shell 30 at the upper end of the mounting seat 20, and welding the connection part.
S60, sequentially sleeving the positive connecting electrode 42, the second sealing element 44, the negative connecting electrode 41, the first sealing element 43 and the sealing cover 46 together, and sintering all parts in a high-temperature environment to enable all parts to be stably connected into a whole to form the sealing joint 40;
s70, respectively welding the negative electrode connecting electrode 41 and the end lead of the negative electrode sheet 15, and respectively welding the positive electrode connecting electrode 42 and the end lead of the positive electrode sheet 14;
and S80, placing the sealing joint 40 at the upper end of the sealing shell 30 and welding to finally form the complete high-temperature-resistant piezoelectric acceleration sensor.
For the welding between the metal parts, in the present embodiment, laser welding or fine brazing is used to ensure the high temperature resistant sealing of the sealed envelope.
Through the test verification of high-temperature service life, the high-temperature-resistant piezoelectric acceleration sensor provided by the embodiment can stably work for a long time in a working environment of 400 ℃.
To sum up, the high temperature resistant piezoelectricity acceleration sensor that this embodiment provided, the piezoelectricity measuring body is installed on the mount pad, and sealed shell and mount pad upper end sealing fixed connection, thereby through the sealed piezoelectricity measuring body of sealed shell, simultaneously through the anodal connecting pole and the negative pole connecting pole of sealing joint draw forth the signal of telecommunication of piezoelectricity measuring body, and sealing joint seals and wears to establish in the upper portion connecting hole of sealed shell, can ensure the holistic leakproofness of sealed shell, avoid outside medium directly to carry out the heat exchange with the piezoelectricity measuring body, and then can stable operation under the environment of high temperature, and the sealed shell can shield outside electromagnetic interference (mainly the piezoelectricity measuring body has realized the insulation through insulating piece and other parts).
Therefore, the high-temperature-resistant piezoelectric acceleration sensor provided by the embodiment can stably operate in a high-temperature environment, has the advantages of high sensitivity, wide frequency response, strong anti-interference performance and the like, can meet the vibration measurement and online monitoring requirements of nuclear power key equipment, and can be widely applied to vibration tests in the nuclear power field and other fields in high-temperature environments.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
That is, various changes may be made within the knowledge of those skilled in the art without departing from the spirit of the present invention, for example, the number of piezoelectric ceramic sheets, the directions of the positive and negative electrodes, the materials and dimensions of the respective parts, and the like may be modified. Such modifications and variations are within the scope of the invention as determined by the appended claims and their equivalents.
Claims (10)
1. A high temperature resistant piezoelectric acceleration sensor, comprising:
a piezoelectric measuring body (10), the piezoelectric measuring body (10) being capable of outputting a piezoelectric signal in accordance with a vibration of a device under test;
the lower side of the mounting seat (20) is used for connecting the device to be tested, and the piezoelectric measuring body (10) is mounted on the upper side of the mounting seat (20);
the lower end of the sealing shell (30) is fixedly connected with the upper end of the mounting seat (20) in a sealing manner, and the sealing shell (30) is used for sealing the piezoelectric measuring body (10);
the sealing joint (40) is arranged on the sealing shell (30), and a positive connecting pole (42) and a negative connecting pole (41) are hermetically inserted in the sealing joint (40);
wherein the positive electrode connecting pole (42) and the negative electrode connecting pole (41) are used for connecting the piezoelectric measuring body (10) and an external cable.
2. The high-temperature-resistant piezoelectric acceleration sensor of claim 1, characterized in that the piezoelectric measuring body (10) is fixedly connected with the mounting base (20) by means of a pretension bolt (50).
3. The high-temperature-resistant piezoelectric acceleration sensor of claim 2, wherein a through hole (11) is formed in the middle of the piezoelectric measuring body (10), a screw hole (21) is formed in the upper end of the mounting seat (20), and the pre-tightening bolt (50) penetrates through the through hole (11) to be in threaded connection with the screw hole (21).
4. The high temperature resistant piezoelectric acceleration sensor of claim 2, characterized in that a mass (12) is arranged between the head of the pretension bolt (50) and the piezoelectric measuring body (10).
5. The high temperature resistant piezoelectric acceleration sensor of claim 2, characterized in that the piezoelectric measuring body (10) comprises a plurality of piezoelectric ceramic plates (13) stacked together.
6. The high temperature resistant piezoelectric acceleration sensor according to claim 5, characterized in that the polarities of the opposite sides of two adjacent piezoelectric ceramic plates (13) are the same.
7. The high-temperature-resistant piezoelectric acceleration sensor according to claim 5, wherein the piezoelectric ceramic sheet (13) is made of bismuth layer or perovskite high-temperature piezoelectric ceramic.
8. The high-temperature-resistant piezoelectric acceleration sensor according to any one of claims 1 to 7, characterized in that the top of the sealing shell (30) is provided with a connection hole (31) for plugging the sealing joint (40).
9. The high temperature resistant piezoelectric acceleration sensor of claim 8, characterized in that the negative connection electrode (41) is provided with a first sealing member (43) around, the first sealing member (43) is provided with a sealing cover (46) around, the sealing cover (46) is used for sealing the gap between the first sealing member (43) and the sealing shell (30);
the cathode connecting pole (41) is internally provided with an inserting hole (45), the anode connecting pole (42) is inserted in the inserting hole (45), a second sealing piece (44) is sleeved outside the anode connecting pole (42), and the second sealing piece (44) is used for sealing a gap between the anode connecting pole (42) and the cathode connecting pole (41).
10. The high-temperature-resistant piezoelectric acceleration sensor according to claim 9, characterized in that the material of the first sealing member (43) and the second sealing member (44) is glass or metalized insulating ceramic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211580847.2A CN115711666A (en) | 2022-12-09 | 2022-12-09 | High-temperature-resistant piezoelectric acceleration sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211580847.2A CN115711666A (en) | 2022-12-09 | 2022-12-09 | High-temperature-resistant piezoelectric acceleration sensor |
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| Publication Number | Publication Date |
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| CN115711666A true CN115711666A (en) | 2023-02-24 |
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| CN202211580847.2A Pending CN115711666A (en) | 2022-12-09 | 2022-12-09 | High-temperature-resistant piezoelectric acceleration sensor |
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- 2022-12-09 CN CN202211580847.2A patent/CN115711666A/en active Pending
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