CN115694404A - Surface acoustic wave resonator - Google Patents
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- CN115694404A CN115694404A CN202211411216.8A CN202211411216A CN115694404A CN 115694404 A CN115694404 A CN 115694404A CN 202211411216 A CN202211411216 A CN 202211411216A CN 115694404 A CN115694404 A CN 115694404A
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Abstract
The present invention provides a surface acoustic wave resonator, comprising: the piezoelectric device comprises a piezoelectric substrate and interdigital electrodes, wherein the interdigital electrodes are arranged on the piezoelectric substrate; the interdigital electrode comprises an electrode finger and a bus bar which are integrally formed, and the electrode finger is connected and arranged on the bus bar; the electrode finger comprises a deformation part, a main body part and a plurality of compensation parts; one end of the main body portion is disposed on the bus bar, the deformation portion is disposed at a distal end of the main body portion, and the plurality of compensation portions are disposed on the deformation portion. The invention sets the deformation part and the compensation part at the tail end of the electrode finger to accurately regulate and control the sound velocity, restrain unexpected ripples or stray waves and excite the piston mode, thereby greatly improving the electrical performance of the surface acoustic wave resonator.
Description
Technical Field
The present invention relates to a surface acoustic wave resonator, and more particularly, to a surface acoustic wave resonator having an interdigital electrode with a terminal distorted structure.
Background
The surface wave resonator realizes the mutual conversion of sound energy and electric energy through the interdigital electrode, because a substrate or a film material with a piezoelectric effect is arranged under the interdigital electrode, two adjacent interdigital electrodes can form an electric field and excite the surface acoustic wave under different electric potentials, a typical problem is that unexpected stray waves can be caused due to sound velocity mutation or uneven electric field distribution at the tail end of the interdigital electrode, and then the performance of a deteriorated device is formed, which is a technical problem to be solved urgently.
The prior art solves the above problems in several ways: a. an acoustic aperture (the coincident length of the electrodes in the diagram lengthwise) is provided that is small enough, but results in an undesirable source impedance; b. interdigital electrode apodization, which results in undesirably large impedance, reduced electromechanical coupling coefficient, and the method also exhibits undesirable transverse modes; c. the mass loading layer is arranged at the tail end of the interdigital electrode, but the size of the mass loading layer needs to be accurately controlled, the requirement is high, the process is relatively complex, and the realization difficulty is extremely high.
Patent document CN111934644B discloses an interdigital electrode structure which is provided on a substrate, wherein the ends of interdigital electrodes in the interdigital electrode structure are ion-implanted to form a doped portion, and a surface acoustic wave device which includes the above interdigital electrode structure, the surface acoustic wave device being a filter or a resonator. However, the patent document still has the defect that abrupt sound velocity change or uneven electric field distribution at the end of the interdigital electrode can cause undesirable stray waves.
Disclosure of Invention
In view of the deficiencies in the prior art, it is an object of the present invention to provide a surface acoustic wave resonator.
According to the present invention, there is provided a surface acoustic wave resonator comprising: the piezoelectric device comprises a piezoelectric substrate and interdigital electrodes, wherein the interdigital electrodes are arranged on the piezoelectric substrate;
the interdigital electrode comprises an electrode finger and a bus bar which are integrally formed, and the electrode finger is connected and arranged on the bus bar;
the electrode finger comprises a deformation part, a main body part and a plurality of compensation parts; one end of the main body portion is disposed on the bus bar, the deformation portion is disposed at a distal end of the main body portion, and the plurality of compensation portions are disposed on the deformation portion.
Preferably, the end direction of the electrode finger is a first direction, and the direction perpendicular to the first direction is a second direction;
the dimension length of the main body part in the second direction is the width W of the main body part 2 Adjacent said body portion in said second directionAt a distance W from each other 1 ；
The length G of a gap between the tail end of the electrode finger and the bus bar along the first direction is 0.1 lambda-1 lambda, and lambda is the wavelength of the surface acoustic wave;
a length L of the deformation portion in the first direction 1 Is 0.2 lambda to 1 lambda;
a length Y of the single compensation portion overlapping the deformation portion in the first direction 1 Is 0.1G to 0.5G; the length Y of the single compensation part protruding from the surface side wall of the deformation part along the first direction 2 Is 0.1L 1 ～0.5L 1 ；
A length X of the single compensation portion overlapping the deformation portion in the second direction 2 Less than or equal to 2W 2 (ii) a The single compensation part protrudes from the surface side wall of the deformation part along the second direction by a length X 1 Less than or equal to 0.9W 1 。
Preferably, the metallization ratio of the deformation portion is 0.3 to 0.8.
Preferably, the deformation part is a rectangular body;
the tail end of the main body part is vertically arranged on one side wall of the deformation part, and the compensation part is arranged at the end corner position of the deformation part.
Preferably, the deformation part is a trapezoid body;
the tail end of the main body part is vertically arranged on one side wall of the deformation part, and the compensation part is arranged at the bottom edge corner of the deformation part.
Preferably, the deformation part comprises a first rectangular body and a second rectangular body which are integrally formed;
the length of the first rectangular body along the tail end direction of the main body part is 0.1-0.9 times of the total length of the deformation part;
the tail end of the main body part is vertically arranged on one side wall of the first rectangular body, and the compensation part is arranged at the position of an end angle of the second rectangular body;
the first rectangular body and the second rectangular body are arranged in parallel, and the length of the side wall of the second rectangular body in the second direction is larger than that of the side wall of the first rectangular body in the second direction.
Preferably, the deformation part is a rectangular body;
the tail end of the main body part is arranged to protrude out of one side wall of the deformation part; the compensation part is arranged at the end angle position of the deformation part and the tail end of the main body part;
the distance from the end of the deformation part along the direction of the end of the electrode finger to the end of the electrode finger is 0.1 lambda-0.5 lambda.
Preferably, the artificial finger is also included; the tail end of the main body part and the tail end of the artificial finger are both provided with a deformation part and a compensation part.
Preferably, the deformation portion and the compensation portion are provided in any one of the following manners:
the first method is as follows: the deformation part and the compensation part are integrally formed;
the second method comprises the following steps: the compensation portion is partially stacked on the deformation portion;
the third method comprises the following steps: the compensator portion is stacked under the deformation portion.
Preferably, the piezoelectric substrate comprises LT, LN, PZT, znO, alN;
the main body part is of a single-layer structure or a plurality of composite layer structures; when the main body part is of a single-layer structure, any one of the following materials is adopted: mo, ag, au, cu, ti, al, ru and Pt; the main body part is of a multilayer composite layer structure and is made of any of the following materials: mo, ag, au, cu, ti, al, ru and Pt;
the bus bar is of a single-layer structure or a plurality of composite layer structures; when the bus bar is of a single-layer structure, any one of the following materials is adopted: mo, ag, au, cu, ti, al, ru and Pt; the bus bar is of a multilayer composite layer structure and is made of any of the following materials: mo, ag, au, cu, ti, al, ru and Pt.
Compared with the prior art, the invention has the following beneficial effects:
1. the tail end of the interdigital electrode is provided with the deformation part and the compensation part to accurately regulate and control the sound velocity, so that the deformation part and the compensation part have lower sound velocity relative to the interdigital electrode region;
2. the invention can restrain unexpected ripple waves or stray waves, excite the piston mode and greatly improve the electrical property of the surface acoustic wave resonator.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
fig. 1 is a structural view of a surface acoustic wave resonator in the first embodiment;
FIG. 2 is a cross-sectional view taken along line a-a of FIG. 1;
FIG. 3 is a cross-sectional view taken along line b-b of FIG. 1 with the compensator partially stacked on the deformer;
FIG. 4 is a cross-sectional view taken along line b-b of FIG. 1 with the compensator portion disposed below the deformation;
FIG. 5 is a diagram showing dimensions of a SAW resonator in accordance with the first embodiment;
fig. 6 is an impedance characteristic curve of the surface acoustic wave resonator in the first embodiment;
fig. 7 is a structural view of a surface acoustic wave resonator in the second embodiment;
fig. 8 is an impedance characteristic curve of the surface acoustic wave resonator in the second embodiment;
fig. 9 is a structural view of a surface acoustic wave resonator in the third embodiment;
FIG. 10 is a schematic view showing the structure of a deformation part and a compensation part in a third embodiment;
fig. 11 is an impedance characteristic curve of the surface acoustic wave resonator in the third embodiment;
fig. 12 is a structural view of a surface acoustic wave resonator in the fourth embodiment;
FIG. 13 is a schematic view showing the configuration of a deformed portion and a compensating portion in a fourth embodiment;
fig. 14 is an impedance characteristic curve of the surface acoustic wave resonator in the fourth embodiment;
fig. 15 is a structural view of a surface acoustic wave resonator in a fifth embodiment.
The figures show that:
Compensating part 202
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the present invention.
Example 1:
as shown in fig. 1 to 6, the present embodiment provides a surface acoustic wave resonator comprising: the piezoelectric device comprises a piezoelectric substrate 1 and interdigital electrodes, wherein the interdigital electrodes are arranged on the piezoelectric substrate 1, the interdigital electrodes comprise electrode fingers 2 and bus bars 3 which are integrally formed, the electrode fingers 2 are connected and arranged on the bus bars 3, the electrode fingers 2 comprise deformation parts 201, main body parts 203 and a plurality of compensation parts 202, one ends of the main body parts 203 are arranged on the bus bars 3, the deformation parts 201 are arranged at the tail ends of the main body parts 203, and the compensation parts 202 are arranged on the deformation parts 201.
The tip direction of the electrode finger 2 is a first direction, a direction perpendicular to the first direction is a second direction, and the dimension length of the main body portion 203 in the second direction is the width W of the main body portion 203 2 The distance between adjacent main body parts 203 in the second direction is W 1 The length G of the gap between the end of the electrode finger 2 and the bus bar 3 in the first direction is 0.1 lambda to 1 lambda, lambda is the surface acoustic wave wavelength, and the length L of the deformation portion 201 in the first direction 1 A length Y of the single compensation part 202 overlapping the deformation part 201 along the first direction is 0.2 lambda to 1 lambda 1 0.1G-0.5G, the length Y of the single compensation part 202 protruding from the side wall of the surface of the deformation part 201 along the first direction 2 Is 0.1L 1 ～0.5L 1 The length X of the single compensation portion 202 overlapping the deformation portion 201 in the second direction 2 Less than or equal to 2W 2 Single offset 202 edgeThe length X of the second direction protruding from the sidewall of the surface of the deformation part 201 1 Less than or equal to 0.9W 1 The metallization ratio of the deformation portion 201 is 0.3 to 0.8.
The deformation part 201 is a rectangular body, the end of the main body part 203 is vertically arranged on one side wall of the deformation part 201, and the compensation part 202 is arranged at the corner position of the deformation part 201.
The deformation portion 201 and the compensation portion 202 are provided in any one of the following manners:
the first method is as follows: the deformation part 201 and the compensation part 202 are integrally formed;
the second method comprises the following steps: the compensation portion 202 is partially stacked on the deformation portion 201;
the third method comprises the following steps: the compensation portion 202 is partially stacked under the deformation portion 201.
The piezoelectric substrate 1 includes LT, LN, PZT, znO, alN; LT, LN, PZT, znO and AlN sequentially represent lithium tantalate, lithium niobate, lead zirconate titanate, zinc oxide and aluminum nitride, the common properties are piezoelectric materials, and the acoustic surface waves are basically the first two, and can be single-layer or composite-layer.
The main body 203 has a single-layer structure or a plurality of composite-layer structures; when the main body 203 has a single-layer structure, any one of the following materials is used: mo, ag, au, cu, ti, al, ru and Pt; the main body 203 is a multi-layer composite structure, and any of the following materials are adopted: mo, ag, au, cu, ti, al, ru and Pt;
the bus bar 3 has a single-layer structure or a plurality of composite-layer structures; when the bus bar 3 has a single-layer structure, any one of the following materials is used: mo, ag, au, cu, ti, al, ru, pt; the bus bar 3 is a multilayer composite layer structure and adopts any of the following materials: mo, ag, au, cu, ti, al, ru and Pt.
The following is specifically explained:
as shown in fig. 1, the surface acoustic wave resonator of the present embodiment includes a piezoelectric substrate 1 and an interdigital electrode including an electrode finger 2 and a bus bar 3, the electrode finger 2 including a deformation portion 201, a main body portion 203, and a plurality of compensation portions 202, W1: pitch of main body 203, W2: the main body portion 203 is line width; gap: the spacing between the ends of the electrode fingers 2 to the bus bars. The piezoelectric substrate includes: LT, LN, PZT, znO, alN, electrode fingers and bus bar materials include one or more composite layers of Mo, ag, au, cu, ti, al, ru, pt.
The tail end of the main body part 203 is provided with a deformation part 201 and a compensation part 202, the deformation part is rectangular, the compensation part is arranged at the corner position of the deformation part, as shown in fig. 1, a region I is influenced by the deformation part and the compensation part to have a first sound velocity, a region II is set to have a second sound velocity, the metallization rate of the tail end of the interdigital electrode is increased by the deformation part 201 to greatly weaken the sound velocity of the region I, the metallization rate of the tail end of the interdigital electrode is slightly increased by the compensation part 202 to slightly weaken and adjust the sound velocity of the region I, and accordingly the first sound velocity is smaller than the second sound velocity to suppress an unexpected transverse waveform.
The end deformation part of the main body part 203 and the compensation part have three structural relations. The first method comprises the following steps: the deformation part and the compensation part are on the same horizontal plane, as shown in fig. 2, the structure shown in the figure can be formed only by growing an electrode film once and patterning the film by combining photoetching and etching processes, and the structure is a preferred structure; and the second method comprises the following steps: the compensator is partially stacked on the deformation, as shown in fig. 3; and the third is that: the compensator portion is disposed under the deformation portion as shown in fig. 4. Referring to fig. 3 and 4, the material selected for the compensation portion may be different from the interdigital electrode, and may be one or more layers of metal, or may be SiO (dielectric material) 2 Or Si 3 N 4 And the two structures can be obtained by growing the films twice in the process and respectively patterning the two films by combining the photoetching process and the etching process, and the process is relatively complex but is more flexible in fine adjustment of the sound velocity.
As shown in fig. 5, a detailed explanation of the dimensions of the deformation portion and the compensation portion is provided for a partially enlarged view of the tip of the electrode finger 2. Setting the gap (gap) between 0.1 lambda and 1 lambda, X 1 Is no more than 0.9 times the pitch of the body portion 203 (i.e., less than 0.9W) 1 )，X 2 Is no more than 2 times the line width of the body portion 203 (i.e., less than 2W) 2 ) Length L of the deformed part at the tip of the electrode finger 2 1 Between 0.2 lambda and 1 lambda, Y 1 Length of 0.1 to 0.5 times gap (gap), Y 2 Has a length ofL 1 0.1 to 0.5 times, the metallization ratio (the dimension embodying the lateral direction) of the deformation portion is set between 0.3 and 0.8.
With the above setting, a resonator excellent in performance can be obtained. Referring to the schematic diagram of the impedance characteristic curve, as shown in fig. 6, the existence of two distinct and sharp extreme points shows that the resonator has a high quality factor, the smooth curve between the two extreme points and near the extreme points shows an excellent transverse wave suppression effect, and the large interval between the two extreme points (about 80 MHz) shows that the filter composed of the resonator has a large bandwidth effect, and these characteristics completely meet the conditions of the resonator with excellent performance.
Example 2:
the present embodiment is different from embodiment 1 in that the deformation portion 201 is a trapezoidal body, the end of the main body portion 203 is vertically disposed on one side wall of the deformation portion 201, and the compensation portion 202 is disposed at the bottom edge corner position of the deformation portion 201.
As shown in fig. 7 and 8, the present embodiment is different from embodiment 1 in that the deformed portion develops from a rectangular shape into a trapezoidal shape, the compensating portion is arbitrarily provided at the end corner portion thereof and the dimensional setting rule thereof is the same as that of embodiment 1. This embodiment is functionally different from embodiment 1 in that the sound velocity in region I is gradually reduced in the direction of the electrode tip, and the length L of the deformed portion at the tip of the electrode finger 2 2 Between 0.2 lambda and 1 lambda and a metallization ratio between 0.3 and 0.8, whereby a surface acoustic wave resonator excellent in electrical properties can be obtained.
Example 3:
the present embodiment is different from embodiment 1 in that the deformation portion 201 includes a first rectangular body and a second rectangular body which are integrally formed, a length of the first rectangular body in a direction of a distal end of the main body portion 203 is 0.1 to 0.9 times of a total length of the deformation portion 201, the distal end of the main body portion 203 is vertically disposed on one side wall of the first rectangular body, the compensation portion 202 is disposed at an end corner position of the second rectangular body, the first rectangular body and the second rectangular body are disposed in parallel, and a length of the side wall of the second rectangular body in the second direction is greater than a length of the side wall of the first rectangular body in the second direction.
As shown in fig. 9 to 11, the present embodiment is different from embodiment 1 in that the deformed portion is transformed from one rectangle into two rectangles having different areas and increasing in the direction of the distal end of the electrode finger 2, the compensation portion is still provided at the corner portion thereof and the dimensional arrangement rule thereof is the same as that of embodiment 1.
This example is functionally different from embodiment 1 in that, as shown in fig. 9, a region I is divided into a region I-1 and a region I-2, the sound velocity of the region I-1 is higher than that of the region I-2, and the sound velocity of the region I is lower than that of the region ii, and the total length L of the deformed portion at the end of the main body portion 203 is equal to or greater than that of the deformed portion 3 Between 0.2 lambda and 1 lambda, L 31 Is 0.1L 3 ～0.9L 3 The metallization ratio is between 0.3 and 0.8, the length of the I-1 area along the tail end direction of the electrode finger 2 is 0.1 to 0.9 times of the total length of the deformation part, and the I-2 area size is set according to the same principle of the I-1 area, so that the surface acoustic wave resonator with excellent electrical performance can be obtained by the arrangement.
Example 4:
the present embodiment is different from embodiment 1 in that the deformation portion 201 is a rectangular body, and the end of the main body portion 203 protrudes from a side wall of the deformation portion 201; the compensation portion 202 is provided at the end corner position of the deformation portion 201 and the end of the main body portion 203, and the distance from the end of the deformation portion 201 in the end direction of the electrode finger 2 to the end of the electrode finger 2 is 0.1 λ to 0.5 λ.
As shown in fig. 12 to 14, the present embodiment is different from embodiment 6 in that the length L of the deformation portion is changed from the end of the main body 203 to a distance from the end of the main body 203 4 Is 0.2 lambda-1 lambda, L 41 0.1 λ to 0.5 λ, the compensation portion is provided at the end corner portion thereof and the dimensional setting rule thereof is the same as that of example 6, and the compensation portion is provided at the end of the main body portion 203 in the same manner (the dimensional setting is also the same).
The present embodiment is different in that the change of the sound velocity is a trend of decreasing first and then increasing, that is, the sound velocity: the sound velocity in the region II is slightly lower than that in the region II because of the compensation part. The length L of the deformation part along the direction of the tail end of the electrode finger 2 4 The metallization ratio (the size of the lateral direction) of the deformation part is set between 0.2 lambda and 1 lambda to be between 0.3 and 0.8The distance from the end of the deformation portion in the direction of the end of the electrode finger 2 to the end of the main body portion 203 is 0.1 λ to 0.5 λ (i.e., L in fig. 13) 41 ) By virtue of this arrangement, a surface acoustic wave resonator excellent in electrical properties can be obtained.
Example 5:
as shown in fig. 15, the present embodiment is different from embodiment 1 in that the electrode finger 2 further includes a dummy finger 204, and the tip of the body portion 203 and the tip of the dummy finger 204 are provided with a deformed portion 201 and a compensation portion 202.
The transverse dimension of the deformation part is measured by metallization ratio and is 0.3-0.8; the longitudinal dimension of the deformation part is 0.2 lambda-1 lambda; the dimensions of the compensation part were the same as in example 1.
The invention restrains undesired stray waveforms, excites the piston mode and greatly improves the electrical property of the surface acoustic wave resonator.
In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and therefore, are not to be construed as limiting the present application.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.
Claims (10)
1. A surface acoustic wave resonator, comprising: the piezoelectric element comprises a piezoelectric substrate (1) and interdigital electrodes, wherein the interdigital electrodes are arranged on the piezoelectric substrate (1);
the interdigital electrode comprises an electrode finger (2) and a bus bar (3) which are integrally formed, and the electrode finger (2) is connected and arranged on the bus bar (3);
the electrode finger (2) comprises a deformation part (201), a main body part (203) and a plurality of compensation parts (202); one end of the main body portion (203) is provided on the bus bar (3), the deformation portion (201) is provided at a tip end of the main body portion (203), and the plurality of compensation portions (202) are provided on the deformation portion (201).
2. The surface acoustic wave resonator according to claim 1, wherein the direction of the end of the electrode finger (2) is a first direction, and a direction perpendicular to the first direction is a second direction;
the dimension length of the main body part (203) in the second direction is the width W of the main body part (203) 2 A spacing between adjacent body portions (203) in the second direction is W 1 ；
The length G of a gap between the tail end of the electrode finger (2) and the bus bar (3) along the first direction is 0.1 lambda-1 lambda, and lambda is the wavelength of the surface acoustic wave;
a length L of the deformation portion (201) in the first direction 1 Is 0.2 lambda to 1 lambda;
a length Y of the single compensation portion (202) overlapping the deformation portion (201) in the first direction 1 0.1G to 0.5G; the single compensation part (202) protrudes from the surface side wall of the deformation part (201) along the first direction by a length Y 2 Is 0.1L 1 ～0.5L 1 ；
A length X of the single compensation portion (202) overlapping the deformation portion (201) in the second direction 2 Less than or equal to 2W 2 (ii) a The single compensation part (202) protrudes from the surface side wall of the deformation part (201) along the second direction by a length X 1 Less than or equal to 0.9W 1 。
3. A surface acoustic wave resonator according to claim 2, wherein a metallization ratio of the deformation portion (201) is 0.3 to 0.8.
4. A surface acoustic wave resonator according to claim 3, wherein said deformation portion (201) is a rectangular body;
the tail end of the main body part (203) is vertically arranged on one side wall of the deformation part (201), and the compensation part (202) is arranged at the corner position of the deformation part (201).
5. A surface acoustic wave resonator according to claim 3, wherein said deformation portion (201) is a trapezoidal body;
the tail end of the main body part (203) is vertically arranged on one side wall of the deformation part (201), and the compensation part (202) is arranged at the bottom edge corner position of the deformation part (201).
6. A surface acoustic wave resonator according to claim 3, wherein said deformation portion (201) comprises a first rectangular body and a second rectangular body which are integrally provided;
the length of the first cuboid along the tail end direction of the main body part (203) is 0.1-0.9 times of the total length of the deformation part (201);
the tail end of the main body part (203) is vertically arranged on one side wall of the first rectangular body, and the compensation part (202) is arranged at the end corner position of the second rectangular body;
the first rectangular body and the second rectangular body are arranged in parallel, and the length of the side wall of the second rectangular body in the second direction is larger than that of the side wall of the first rectangular body in the second direction.
7. A surface acoustic wave resonator according to claim 3, wherein said deformation portion (201) is a rectangular body;
the tail end of the main body part (203) is arranged to protrude out of one side wall of the deformation part (201); the compensation part (202) is arranged at the end angle position of the deformation part (201) and the tail end of the main body part (203);
the distance from the end of the deformation part (201) along the direction of the end of the electrode finger (2) to the end of the electrode finger (2) is 0.1 lambda-0.5 lambda.
8. The surface acoustic wave resonator according to any one of claims 1 to 7, further comprising a dummy finger (204); the tail end of the main body part (203) and the tail end of the artificial finger (204) are provided with a deformation part (201) and a compensation part (202).
9. A surface acoustic wave resonator according to claim 1, wherein said strain part (201) and said compensation part (202) are provided in any one of the following manners:
the first method is as follows: the deformation part (201) and the compensation part (202) are integrally formed;
the second method comprises the following steps: the compensation portion (202) is partially stacked on the deformation portion (201);
the third method comprises the following steps: the compensation portion (202) is partially stacked under the deformation portion (201).
10. The surface acoustic wave resonator according to claim 1, wherein the piezoelectric substrate (1) includes LT, LN, PZT, znO, alN;
the main body part (203) is of a single-layer structure or a plurality of composite-layer structures; when the main body part (203) is of a single-layer structure, any one of the following materials is adopted: mo, ag, au, cu, ti, al, ru and Pt; the main body part (203) is of a multilayer composite layer structure and adopts any of the following materials: mo, ag, au, cu, ti, al, ru and Pt;
the bus bar (3) is of a single-layer structure or a plurality of composite-layer structures; when the bus bar (3) is of a single-layer structure, any one of the following materials is adopted: mo, ag, au, cu, ti, al, ru and Pt; the bus bar (3) is of a multilayer composite layer structure and is made of any of the following materials: mo, ag, au, cu, ti, al, ru, pt.
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