CN115685428A - Multi-channel narrow-band optical filter based on reflective volume Bragg grating, and preparation method and application thereof - Google Patents
Multi-channel narrow-band optical filter based on reflective volume Bragg grating, and preparation method and application thereof Download PDFInfo
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Abstract
The invention discloses a multi-channel narrow-band optical filter based on a reflective volume Bragg grating, which comprises a photothermal sensitive conversion glass substrate, wherein the photothermal sensitive conversion glass substrate is correspondingly arranged and divided into a plurality of exposure areas according to the number of channels and the corresponding wavelength of the multi-channel narrow-band optical filter as required, and the two sides of the photothermal sensitive conversion glass substrate are symmetrically exposed through a holographic exposure interference light path with adjustable interference angles, the exposure of each exposure area is the same, and the grating periods of different exposure areas are different; the invention also provides a preparation method of the multi-channel narrow-band filter based on the reflective volume Bragg grating and application in the fields of optical communication systems and laser detection; by the mode, the narrow-band light filtering device can realize narrow-band light filtering of light with various wavelengths through the block Bragg grating, and effectively meets application requirements of different scenes in the fields of optical communication systems, laser detection and the like.
Description
Technical Field
The invention relates to a narrow-band filter technology in the fields of optical communication systems and laser detection, in particular to a multi-channel narrow-band filter based on a reflective volume Bragg grating, a preparation method and application thereof.
Background
In the technical field of optical communication, dense wavelength division multiplexing technology is developed vigorously, and on the basis, a narrow-band filter becomes one of core devices for realizing 'dense', most narrow-band filters in the current market realize narrow-band filtering by adopting a vacuum coating mode on a glass substrate, and utilize a multi-cavity interference technology, for example, the number of layers of the conventional DWDM design is as many as hundreds of layers, the narrower the bandwidth is, the more the number of designed layers is, and the higher the requirements on thin films and substrate materials are.
However, the above-mentioned narrow-band filter prepared by using a coating method is expensive in cost, and due to the limitation of the coating technique, a multi-channel narrow-band filter cannot be realized on the same substrate, so that an optical module with a more compact structure is realized, and further industrial upgrading is promoted.
At present, the traditional mode of coating a film on a glass substrate is adopted, single-channel narrow-band filtering can only be realized, multi-channel narrow-band filtering cannot be realized, the problem of narrower bandwidth can be solved through a single-block reflection type volume Bragg grating at present, the preparation cost is lower, but one block Bragg grating can only correspond to one channel, multi-channel filtering can only be realized through a stacking mode, the light energy utilization efficiency is low, and the structure is complex.
Disclosure of Invention
The invention mainly solves the technical problem of providing a multi-channel narrow-band optical filter based on a reflection type volume Bragg grating, a preparation method and application thereof, and can realize narrow-band optical filtering on light with various wavelengths through one volume Bragg grating, thereby effectively meeting the application requirements of different scenes in the fields of optical communication systems, laser detection and the like.
In order to solve the technical problems, the invention adopts a technical scheme that: the multi-channel narrow-band filter comprises a photothermal sensitive conversion glass substrate, the photothermal sensitive conversion glass substrate is correspondingly arranged and divided into a plurality of exposure areas according to the number of channels and the corresponding wavelength of the multi-channel narrow-band filter as required, the two sides of the photothermal sensitive conversion glass substrate are symmetrically exposed through a holographic exposure interference light path with adjustable interference angles, the exposure of each exposure area is the same, and the grating periods of different exposure areas are different.
The invention also provides a preparation method of the multi-channel narrow-band filter based on the reflection type volume Bragg grating, which is characterized by comprising the following steps:
(1) Obtaining a grating period according to a coupled wave theory of the reflection type volume holographic grating:
wherein: lambda [ alpha ] 0 Is a central wavelength, n av For the refractive index of the photo-thermal sensitive refraction glass substrate, when the product is actually applied,
is 0 degree, and the central wavelength lambda of narrow-band filtering is determined according to the number n of channels required by the product 0 And a bandwidth FWHM, wherein n is greater than or equal to 2, 1 grating period corresponding to 1 central wavelength of 1 channel is obtained through calculation, n grating periods corresponding to n central wavelengths of n channels one to one are obtained according to the calculation mode, and the grating period lambada corresponding to each exposure area is finally obtained;
(2) Further according to the relational expression
Calculating to obtain the angle theta of the interference beams under different exposure areas, wherein: lambda [ alpha ] 1 Is the laser output wavelength at exposure, λ 0 The central wavelength of the narrow-band filtering light, and n is the refractive index of the photo-thermal sensitive refraction glass substrate;
(3) And calculating to obtain the required exposure thickness according to the required bandwidth delta lambda:
wherein d is 1 、 d 2 The multiple channels 1 and 2.. Dn correspond to the channels respectively;
(4) Attaching a black light absorption adhesive tape with the corresponding width d on the surface of the photothermal sensitive conversion glass substrate to be exposed, and exposing an area with the required exposure thickness dn;
(5) Symmetrically exposing two sides of the photothermal sensitive refraction and transformation glass substrate by utilizing a holographic exposure interference light path, wherein when the holographic exposure interference light path exposes a first exposure area on the photothermal sensitive refraction and transformation glass substrate, the period of an interference fringe and the period of a writing body Bragg grating are both inverted V-shaped 1 ；
(6) Changing the included angle of the interference light beam through the holographic exposure interference light path, re-sticking a black light absorption tape to ensure that only a second exposure area transmits light, exposing the second exposure area on the photothermal sensitive refraction glass substrate according to the mode of the step (5), wherein the exposure amount is the same as that of the first time, and the period of writing the volume Bragg grating is inverted V 2 ；
(7) In the same way, the exposure areas n of the photothermal sensitive refraction glass substrate are exposed, the exposure amount of each exposure area is the same, and the period of the writing volume Bragg grating is inverted V n ；
(8) After n times of exposure are finished, placing the whole photo-thermal sensitive conversion glass substrate in a heat treatment furnace for thermal development and fixation;
(9) And continuously cutting, finely grinding and polishing the narrow-band filter to finally obtain the multi-channel volume Bragg grating filter, namely the multi-channel narrow-band filter based on the reflective volume Bragg grating.
Preferably, the holographic exposure interference light path comprises an ultraviolet laser, laser emitted by the ultraviolet laser sequentially passes through a semi-transparent semi-reflecting mirror and a reflecting mirror to be divided into two beams of light, the transmission light path and the reflection light path sequentially pass through an ultraviolet focusing objective lens, an ultraviolet beam expanding lens and an ultraviolet reflecting mirror respectively, and finally, double-beam interference exposure is carried out at a sample table, the photothermal sensitive conversion glass substrate is placed on the sample table, and the two-side symmetrical exposure of the photothermal sensitive conversion glass substrate is carried out in a double-beam interference exposure mode.
Preferably, a precise linear electric displacement table is arranged below the sample table and combined with the sample table to control precise movement in the vertical direction so as to realize adjustment of the exposure interference angle.
Preferably, the ultraviolet reflectors are respectively arranged on a precise electric turntable, the precise electric turntable is used for controlling the included angle of the interference light and the grating period, and the relationship between the grating period and the exposure angle theta is
Preferably, a piezoelectric ceramic controller is integrally arranged between the ultraviolet reflecting mirror and the precise electric turntable and used for locking stripes during holographic exposure and enhancing the exposure stability.
Preferably, the temperature of the heat development and fixing treatment in the above step (8) is 500 to 550 ℃.
Preferably, the photothermographic conversion glass substrate is formed by smelting SiO 2 、 B 2 O 3 、ZnO、Al 2 O 3 、ZrF 4 And Ag 2 CO 3 。
Preferably, the photothermal sensitive refractive glass substrate comprises the following components in percentage by mass 2 10％～15％、B 2 O 3 18％～30％、ZnO 55％～60％、Al 2 O 3 5％～8％、ZrF 4 1％～5％、Ag 2 CO 3 0.01％～1％。
The invention also provides application of the multi-channel narrow-band optical filter based on the reflective volume Bragg grating in the fields of optical communication systems and laser detection.
The invention has the beneficial effects that:
the invention discloses a reflection type volume Bragg grating based on photo-thermal sensitive refraction glass, which is used as a multi-channel narrow-band filter, incident light is vertically incident to the reflection type volume Bragg grating, light with broadband components and the reflection type volume Bragg grating with variable period can output light with multi-channel narrow-band spectrum, and compared with a common narrow-band filter, the multi-channel narrow-band filter based on the reflection type volume Bragg grating can realize narrower bandwidth, not only has high diffraction efficiency, long service life and good stability, but also can realize spectrum selection of incident light beams.
Drawings
FIG. 1 shows different channels corresponding to the exposed samples of the present invention;
FIG. 2 is a schematic diagram of the structural design of the holographic exposure interference optical path of the present invention;
FIG. 3 is a schematic illustration of different center wavelengths reflected back by the present invention;
FIG. 4 is two sets of example data provided by the present invention for a photothermographic refractive glass formulation system;
the parts in the drawings are numbered as follows:
1. an ultraviolet laser; 2. a semi-transparent semi-reflective mirror; 3. a mirror; 4. an ultraviolet focusing objective lens; 5. an ultraviolet beam expander; 6. an ultraviolet reflecting mirror; 7. a sample stage; 8. a precision linear electric displacement stage; 9. A precision electric turntable; 10. a piezoelectric ceramic controller.
Detailed Description
The following detailed description of the preferred embodiments of the present invention is provided to enable those skilled in the art to more readily understand the advantages and features of the present invention, and to clearly and unequivocally define the scope of the present invention.
Example (b):
the invention provides a multi-channel narrow-band optical filter based on a reflective volume Bragg grating, which comprises a photo-thermal sensitive refraction glass substrate, wherein the photo-thermal sensitive refraction glass substrate is correspondingly arranged and divided into a plurality of exposure areas according to the number of channels and the corresponding wavelength of the multi-channel narrow-band optical filter as required, the two sides of the photo-thermal sensitive refraction glass substrate are symmetrically exposed through a holographic exposure interference light path with adjustable interference angles, the exposure of each exposure area is the same, and the grating periods of different exposure areas are different; according to the multi-channel narrow-band filter based on the reflection type volume Bragg grating, narrow-band filtering of light with various wavelengths can be realized only through one volume Bragg grating, the application requirements of different scenes in the fields of optical communication systems, laser detection and the like are effectively met, and the specific implementation technical information is as follows:
firstly, obtaining the grating period according to the coupled wave theory of the reflection type volume holographic grating, the required channel number n (n is more than or equal to 2), the central wavelength lambda of narrow-band filtering 0 And bandwidth FWHM is a known parameter, i.e. the product requirement, the center wavelength of one channel corresponds to one grating period, refer to foreign published documents: [1]Ciapurin I V，Smirnov V I，Drachenberg D R，et al. Modeling of phase volume diffractive gratings，part 2：reflecting sinusoidal uniform gratings，Bragg mirrors[J]Optical Engineering,2012, 51 (5): 8001. satisfy the formula
In the formula: lambda [ alpha ] 0 Is a central wavelength, n av For the refractive index of the photo-thermal sensitive refraction glass substrate, when the product is actually applied,
and the angle is 0 degrees, 1 grating period corresponding to 1 central wavelength of 1 channel is obtained through calculation, and n grating periods corresponding to n central wavelengths of n channels one to one can be obtained according to the calculation mode, namely the grating period lambada corresponding to each exposure area is finally obtained.
Further according to an optical relation
Calculating to obtain the angle theta of the interference beams under different exposure areas, wherein: lambda [ alpha ] 1 Is the laser output wavelength at the time of exposure, lambda 0 The central wavelength of the narrow-band filtering light, and n is the refractive index of the photo-thermal sensitive refraction glass substrate.
Further, in order to obtain the effect of high diffraction efficiency in each wavelength band, according to the foreign publication [1 ]] Ciapurin I V，Smirnov V I，Drachenberg D R，et al.Modeling of phase volume diffractive gratings，part 2：reflecting sinusoidal uniform gratings， Bragg mirrors[J]Optical Engineering,2012, 51 (5): 8001, the required bandwidth is delta lambda, and the required exposure thickness is calculated as follows:
wherein d1, d2.. Dn correspond to channel 1, channel 2.. Dn, respectively, as shown in fig. 1, in order to use the photothermal sensitive refractive glass substrate as the exposure substrate, the exposure area is divided into n blocks, this embodiment embodies that the exposure area is divided into 4 blocks, a, b, c and d, respectively, the corresponding channel widths are d1, d2, d3 and d4, respectively, the exposure holographic interference angle is subsequently changed on the basis, and the four areas a, b, c and d are respectively and independently exposed to form a period Λ 1 、∧ 2 、∧ 3 And ^ a 4 The areas to be thermally developed correspond to the four channel areas, respectively.
The specific implementation of the exposure is as follows: attaching a black light absorption adhesive tape with the corresponding width d on the surface of the photothermal sensitive conversion glass substrate to be exposed, and exposing an area with the required exposure thickness dn; the two sides of the photothermographic refractive glass substrate are symmetrically exposed by utilizing the holographic exposure interference light path, and when the 1 st exposure area on the photothermographic refractive glass substrate is exposed by utilizing the holographic exposure interference light path, the period of the interference fringe and the period of the writing volume Bragg grating are both inverted V 1 Changing the included angle of interference beams through a holographic exposure interference light path, re-pasting a black light absorption adhesive tape to ensure that only the 2 nd exposure area transmits light, exposing the 2 nd exposure area on the photothermographic refractive glass substrate according to the mode, wherein the exposure amount is the same as the first time, and the period of writing in the volume Bragg grating is inverted V 2 (ii) a In the same way, the exposure areas n of the photothermographic refractive glass substrate are exposed, the exposure amount of each exposure area is the same, and the period of the writing volume Bragg grating is inverted V n 。
Next, the structural design of the holographic exposure interference optical path is further described, as shown in fig. 2, the holographic exposure interference optical path includes an ultraviolet laser 1, laser emitted from the ultraviolet laser 1 is divided into two beams of light sequentially by a half-mirror 2 and a reflector 3, the two beams of light sequentially pass through an ultraviolet focusing objective 4, an ultraviolet beam expander 5 and an ultraviolet reflector 6, and finally, two-beam interference exposure is performed at a sample stage 7, and a photothermal sensitive conversion glass substrate is placed on the sample stage 7, and two-side symmetric exposure of the photothermal sensitive conversion glass substrate is performed by a two-beam interference exposure mode.
As shown in fig. 2, further, a precise linear electric displacement table 8 is arranged below the sample table 7, and is combined with the sample table 7 to control precise movement in the vertical direction, so as to realize adjustment of the exposure interference angle. The ultraviolet reflecting mirrors 6 are respectively arranged on a precise electric turntable 9, the included angle of interference light and the grating period are controlled by the precise electric turntable 9, and the relationship between the grating period and the exposure angle theta is
A piezoelectric ceramic controller 10 is integrally arranged between the ultraviolet reflecting mirror 6 and the precise electric turntable 9, the piezoelectric ceramic controller 10 and the ultraviolet reflecting mirror 6 are combined into a whole, the effect of locking stripes during holographic exposure is achieved, the stability during exposure is enhanced, and an exposure area is a meeting part of two beams of light as shown in figure 2.
And after n times of exposure is finished, placing the whole photo-thermal sensitive conversion glass substrate in a heat treatment furnace for thermal development and fixation, wherein the treatment temperature of the thermal development and fixation is 500-550 ℃, and continuously cutting, finely grinding and polishing the narrow-band optical filter to finally obtain the multi-channel volume Bragg grating optical filter, namely the multi-channel narrow-band optical filter based on the reflective volume Bragg grating.
In addition, the multichannel narrow-band filter of the reflective volume Bragg grating is based on a photothermal sensitive conversion glass substrate, and the components of the photothermal sensitive conversion glass substrate are respectively SiO in percentage by mass 2 10％～15％、B 2 O 3 18％～30％、ZnO 55％～60％、 Al 2 O 3 5％～8％、ZrF 4 1％～5％、Ag 2 CO 3 0.01 to 1 percent of the glass substrate is prepared by multiple times of smelting, and in the photothermal sensitive conversion glass substrate system, ag is utilized 2 CO 3 As photosensitizersExposing with ultraviolet light, exposing Ag + to light to form Ag atom, heat treating at 500-600 deg.C, and polymerizing the Ag atom formed after exposure and the fluorine atom formed after heat treatment to form [ Ag 0. F0 ]]Micelle, induced ZrF with a similar structure of crystalline phase 4 Generation of primary crystal phase, and generation of ZnSiO by heat-treating the exposed region again 3 Crystallization, resulting in an increase in the refractive index of the exposed region, while the unexposed region remains in a glassy state, does not undergo devitrification, does not undergo a change in refractive index, and the degree of change in refractive index varies with the exposure dose, thereby producing 10 in the exposed and unexposed regions -3 The refractive index of magnitude changes, so the mechanism can be used for manufacturing the photothermal conversion glass substrate and various microstructure patterns such as gratings, holograms and the like.
In view of the above photothermal conversion glass formulation system, the present invention provides at least two groups of examples, as shown below, wherein the following reflection effect in fig. 3 is a reflection based on the photothermal conversion glass substrate configured based on the example of the group 1 formulation:
| | Ratio | 1 | Formulation No. 2 |
| SiO 2 | 11.5％ | 11.4％ | |
| B 2 O 3 | 19.2％ | 22.8％ | |
| ZnO | 57.6％ | 55.0％ | |
| Al 2 O 3 | 7.7％ | 5.7％ | |
| ZrF 4 | 3.8％ | 4.7％ | |
| Ag 2 CO 3 | 0.2％ | 0.4％ |
The invention is based on the reflection type volume Bragg grating of the photo-thermal sensitive refraction glass substrate to be used as a multi-channel narrow-band filter, incident light is vertical to the reflection type volume Bragg grating, and light with broadband components and the reflection type volume Bragg grating with variable period can output light with multi-channel narrow-band spectrum. As shown in FIG. 3, the output wavelength of the multi-channel narrow-band filter of the reflective volume Bragg grating provided by the present invention is a continuous band light source, and the spectral range is λ m -λ n Incident in a direction parallel to the grating surface, the central wavelengths of the diffracted lights passing through the reflective volume Bragg grating are respectively lambda 1 、λ 2 、λ 3 、λ 4 I.e. four different center wavelengths reflected back, corresponding to the four channels, respectively.
Compared with a common narrow-band filter, the narrow-band filter can realize a narrower broadband, can realize the spectrum selection of an incident beam, and can effectively meet the application requirements of different scenes in the fields of optical communication systems and laser detection.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by the present specification, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. A multi-channel narrow-band filter based on a reflective volume Bragg grating is characterized in that: the method comprises a photothermal sensitive conversion glass substrate, wherein the photothermal sensitive conversion glass substrate is correspondingly arranged and divided into a plurality of exposure areas according to the number of channels and the corresponding wavelength of a required multi-channel narrow-band filter, the two sides of the photothermal sensitive conversion glass substrate are symmetrically exposed through a holographic exposure interference light path with an adjustable interference angle, the exposure of each exposure area is the same, and the grating periods of different exposure areas are different.
2. The method for preparing the multi-channel narrowband filter based on the reflective volume Bragg grating according to claim 1, comprising the following steps:
(1) Obtaining the grating period according to the coupled wave theory of the reflection type volume holographic grating:
wherein: lambda [ alpha ] 0 Is a central wavelength, n av The refractive index of the photo-thermal sensitive refraction glass substrate is changed, when the product is actually applied,
is 0 degree, and the central wavelength lambda of narrow-band filtering is determined according to the number n of channels required by the product 0 And a bandwidth FWHM, wherein n is greater than or equal to 2, 1 grating period corresponding to 1 central wavelength of 1 channel is obtained through calculation, n grating periods corresponding to n central wavelengths of n channels one to one are obtained according to the calculation mode, and the grating period lambada corresponding to each exposure area is finally obtained;
(2) Further according to the relational expression
Calculating to obtain the angle theta of the interference light beams under different exposure areas, wherein: lambda [ alpha ] 1 Is the laser output wavelength at the time of exposure, lambda 0 The central wavelength of the narrow-band filtering light, and n is the refractive index of the photo-thermal sensitive refraction glass substrate;
(3) And calculating to obtain the required exposure thickness according to the required bandwidth delta lambda:
wherein d is 1 、d 2 The multiple channels 1 and 2.. Dn correspond to the channels respectively;
(4) Attaching a black light absorption adhesive tape with the corresponding width d on the surface of the photothermal sensitive conversion glass substrate to be exposed, and exposing an area with the required exposure thickness dn;
(5) Symmetrically exposing two sides of the photothermal sensitive refraction and transformation glass substrate by utilizing a holographic exposure interference light path, wherein when the holographic exposure interference light path exposes a first exposure area on the photothermal sensitive refraction and transformation glass substrate, the period of an interference fringe and the period of a writing body Bragg grating are both inverted V-shaped 1 ；
(6) Changing the included angle of the interference light beam through the holographic exposure interference light path, re-sticking a black light absorption tape to ensure that only a second exposure area transmits light, exposing the second exposure area on the photothermal sensitive refraction glass substrate according to the mode of the step (5), wherein the exposure amount is the same as that of the first time, and the period of writing the volume Bragg grating is inverted V 2 ；
(7) In the same way, the exposure areas n of the photothermal sensitive refraction glass substrate are exposed, the exposure amount of each exposure area is the same, and the period of the writing volume Bragg grating is inverted V n ；
(8) After n times of exposure are finished, placing the whole photo-thermal sensitive conversion glass substrate in a heat treatment furnace for thermal development and fixation;
(9) And continuously cutting, finely grinding and polishing the narrow-band filter to finally obtain the multi-channel volume Bragg grating filter, namely the multi-channel narrow-band filter based on the reflection volume Bragg grating.
3. The method for preparing the multi-channel narrowband filter based on the reflective volume Bragg grating is characterized in that: the holographic exposure interference light path comprises an ultraviolet laser, laser emitted by the ultraviolet laser sequentially passes through a semi-transparent semi-reflecting mirror and a reflecting mirror to be divided into two beams of light, a transmission light path and a reflection light path sequentially pass through an ultraviolet focusing objective lens, an ultraviolet beam expanding mirror and an ultraviolet reflecting mirror respectively, and finally, double-beam interference exposure is carried out at a sample stage, a photothermal sensitive conversion glass substrate is placed on the sample stage, and the two-side symmetrical exposure of the photothermal sensitive conversion glass substrate is carried out in a double-beam interference exposure mode.
4. The method for preparing the multi-channel narrowband filter based on the reflective volume Bragg grating according to claim 3, wherein the method comprises the following steps: and a precise linear electric displacement table is arranged below the sample table and combined with the sample table to control precise movement in the vertical direction so as to realize adjustment of the exposure interference angle.
5. The method for preparing the multi-channel narrowband filter based on the reflective volume Bragg grating according to claim 3, wherein the method comprises the following steps: the ultraviolet reflectors are respectively arranged on the precise electric turntable, the precise electric turntable is used for controlling the included angle of interference light and the grating period, and the relationship between the grating period and the exposure angle theta is
6. The method for preparing the multi-channel narrowband filter based on the reflective volume Bragg grating according to claim 5, wherein the method comprises the following steps: a piezoelectric ceramic controller is integrally arranged between the ultraviolet reflector and the precise electric turntable and used for locking stripes during holographic exposure and enhancing the exposure stability.
7. The method for preparing the multi-channel narrowband filter based on the reflective volume Bragg grating is characterized in that: the processing temperature for the thermal development and fixing in the above-mentioned step (8) is from 500 to 550 ℃.
8. The method for manufacturing a multi-channel narrowband filter based on a reflective volume Bragg grating as claimed in claim 2, wherein the method comprises the following steps: the photothermographic conversion glass substrate is prepared by smelting the following components for multiple times, namely SiO 2 、B 2 O 3 、ZnO、Al 2 O 3 、ZrF 4 And Ag 2 CO 3 。
9. The method for manufacturing a multi-channel narrowband filter based on a reflective volume bragg grating according to claim 8, wherein: the photo-thermal sensitive refraction glass substrate comprises the following components in percentage by mass 2 10％～15％、B 2 O 3 18％～30％、ZnO 55％～60％、Al 2 O 3 5％～8％、ZrF 4 1％～5％、Ag 2 CO 3 0.01％～1％。
10. Use of the reflective volume bragg grating based multi-channel narrowband filter according to claim 1 in optical communication systems, laser detection.
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