CN115684297A - Nitrogen oxygen sensor chip with independently designed pump unit - Google Patents
Nitrogen oxygen sensor chip with independently designed pump unit Download PDFInfo
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- CN115684297A CN115684297A CN202211225656.4A CN202211225656A CN115684297A CN 115684297 A CN115684297 A CN 115684297A CN 202211225656 A CN202211225656 A CN 202211225656A CN 115684297 A CN115684297 A CN 115684297A
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- matrix
- alumina
- zirconia
- oxygen
- substrate
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- DOTMOQHOJINYBL-UHFFFAOYSA-N molecular nitrogen;molecular oxygen Chemical compound N#N.O=O DOTMOQHOJINYBL-UHFFFAOYSA-N 0.000 title claims abstract description 17
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 98
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 68
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 59
- 239000001301 oxygen Substances 0.000 claims abstract description 57
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 57
- 239000011159 matrix material Substances 0.000 claims abstract description 55
- 239000000758 substrate Substances 0.000 claims description 63
- 239000010410 layer Substances 0.000 claims description 14
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims description 12
- 230000004913 activation Effects 0.000 claims description 12
- 239000007789 gas Substances 0.000 claims description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 238000009792 diffusion process Methods 0.000 claims description 8
- AVXURJPOCDRRFD-UHFFFAOYSA-N Hydroxylamine Chemical class ON AVXURJPOCDRRFD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- PXXKQOPKNFECSZ-UHFFFAOYSA-N platinum rhodium Chemical compound [Rh].[Pt] PXXKQOPKNFECSZ-UHFFFAOYSA-N 0.000 claims description 3
- 238000013329 compounding Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000011241 protective layer Substances 0.000 claims description 2
- 238000005086 pumping Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 5
- 238000013461 design Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000004480 active ingredient Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
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- Measuring Oxygen Concentration In Cells (AREA)
Abstract
The application discloses nitrogen oxygen sensor chip of pump unit independent design, including the base plate, the base plate is piled up the complex in proper order by multilayer aluminium oxide base member and multilayer zirconia base member and is formed. The multi-layer alumina matrix comprises a first alumina matrix, a second alumina matrix, a third alumina matrix and a fourth alumina matrix, and the multi-layer zirconia matrix comprises a first zirconia matrix, a second zirconia matrix and a third zirconia matrix. By adopting the nitrogen oxygen sensor chip with the pump units independently designed, the pump oxygen units of the nitrogen oxygen sensor are mutually independent, the precision of the product can be improved, especially the influence of the oxygen content on the nitrogen oxygen content measurement is reduced when the oxygen content is violently changed, the size of the chip is greatly shortened, and the cost is reduced under the condition of improving the performance.
Description
Technical Field
The invention relates to the technical field of nitrogen-oxygen sensors, in particular to a nitrogen-oxygen sensor chip with an independently designed pump unit.
Background
The research and development of the nitrogen-oxygen sensor mainly aims at solving the problem of NO X (including NO, NO) 2 ) Can realize accurate and rapid determination of NO X And the content of the active ingredients in the air is reduced, so that the requirements of atmospheric quality detection and environmental protection are met. The product is mainly used in the aftertreatment system and the industrial flue system of medium and heavy diesel vehicles at present to realize NO treatment X Accurate measurement and control of.
A conventional nitroxide sensor chip is shown in fig. 1, and the conventional nitroxide sensor is formed on the basis of a conventional substrate 110 formed by laminating a plurality of zirconia substrates. The conventional substrate 110 defines a conventional opening 112, a conventional first chamber 114, a conventional second chamber 116, and a conventional reference gas channel 118. A conventional outer electrode 122 is disposed on the exterior of the conventional substrate 110, a conventional first inner electrode 124 is disposed in the conventional first chamber 114, and a conventional second inner electrode 126 and a conventional third inner electrode 128 are disposed in the conventional second chamber 116. Wherein the conventional external electrode 122, the conventional first internal electrode 124 and a portion of the substrate constitute a conventional main oxygen pump, the conventional external electrode 122, the conventional second internal electrode 126 and a portion of the substrate constitute a conventional auxiliary oxygen pump, and the conventional external electrode 122, the conventional third electrode 128 and a portion of the substrate constitute a conventional measurement oxygen pump. After the nox enters the conventional first chamber 114 from the conventional opening 112, the conventional main oxygen pump pumps away a portion of the oxygen, and after the remaining gas enters the conventional second chamber 116, the conventional auxiliary oxygen pump further pumps away the oxygen, so that the nox is reduced to oxygen and nitrogen on the surface of the conventional third electrode 128, and the conventional measurement oxygen pump can obtain the nox concentration in the gas entering from the conventional opening 112 by measuring the decomposed oxygen concentration.
In the conventional structure, the zirconia between the oxygen pumps is interconnected, and when the oxygen concentration is subjected to drastic change, mutual interference between an oxygen signal and a nitrogen oxygen signal can be caused, so that the nitrogen oxygen concentration under certain working conditions is inaccurate to test, and therefore improvement is needed.
Disclosure of Invention
The present invention is directed to solving one of the technical problems of the prior art.
The application provides a nitrogen oxygen sensor chip of pump unit independent design, including the base plate, its characterized in that, the base plate is piled up the complex in proper order by multilayer alumina base member and multilayer zirconia base member and forms.
Preferably, the following components are used: the multi-layer alumina matrix comprises a first alumina matrix, a second alumina matrix, a third alumina matrix and a fourth alumina matrix, and the multi-layer zirconia matrix comprises a first zirconia matrix, a second zirconia matrix and a third zirconia matrix.
Preferably: the substrate sequentially comprises a first alumina substrate, a first zirconia substrate, a second alumina substrate, a second zirconia substrate, a third alumina substrate, a third zirconia substrate and a fourth alumina substrate from top to bottom.
Preferably, the following components are used: the device comprises a first alumina substrate, a first zirconia substrate and a second alumina substrate, wherein the first alumina substrate, the first zirconia substrate and the second alumina substrate are provided with air inlets from top to bottom, the second alumina substrate is provided with a first reaction cavity, the first reaction cavity is internally provided with a first internal oxygen electrode and a contrast electrode, one side of the first reaction cavity is communicated with the air inlets, the other side of the first reaction cavity is provided with a second reaction cavity, the second reaction cavity penetrates through the second zirconia substrate and is formed in the third alumina substrate, the second reaction cavity is internally provided with an activation electrode, the fourth alumina substrate is positioned below the second reaction cavity and is provided with an oxygen discharge cavity, the second oxygen discharge cavity is internally provided with a second internal oxygen electrode, the third alumina substrate is positioned below the first reaction cavity and is provided with a first reference cavity, the first reference electrode is arranged in the first reference cavity, the first alumina substrate is provided with a groove, and the groove is internally provided with an external electrode.
Preferably, the following components are used: one side of the first reaction cavity is communicated with the air inlet through the first diffusion layer.
Preferably: and a heating electrode is arranged in the alumina matrix IV.
Preferably: the protective layer is arranged in the groove and used for covering and protecting the outer electrode.
Preferably: the outer electrode, the inner oxygen electrode I and the zirconia matrix I form an oxygen pump to pump oxygen inside the reaction cavity I to the outside of the reaction cavity I.
Preferably: and the rest gas enters the second reaction cavity through the second diffusion layer and reaches the surface of an activation electrode, the activation electrode is a platinum rhodium electrode and can convert nitric oxide into nitrogen and oxygen, and the decomposed oxygen is pumped to the oxygen discharge cavity through a second oxygen pump consisting of the activation electrode, the second internal oxygen electrode and the third zirconia matrix.
By adopting the nitrogen oxygen sensor chip with the pump units independently designed, the pump oxygen units of the nitrogen oxygen sensor are mutually independent, the precision of the product can be improved, especially the influence of oxygen content on the measurement of the nitrogen oxygen content is reduced when the oxygen content is changed violently, the size of the chip is greatly shortened, and the cost is reduced under the condition of improving the performance.
The advantageous effects of the present invention will be explained in detail in the embodiments, thereby making the advantageous effects more apparent.
Drawings
FIG. 1 is a schematic cross-sectional view of a conventional NOx sensor chip.
FIG. 2 is a schematic cross-sectional view of a head of a NOx sensor chip with a pump unit designed independently.
FIG. 3 is a schematic diagram of a wiring structure of an eight-wire NOx sensor chip.
FIG. 4 is a schematic diagram of a six-wire NI sensor chip wiring structure.
FIG. 5 is a schematic diagram of a top view of the front and back sides of an eight-pin NOx sensor chip.
FIG. 6 is a schematic diagram of a top view of the front and back sides of a six-pin NOx sensor chip.
Detailed Description
The technical solutions in the embodiments of the present application will be described clearly below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some, but not all, embodiments of the present application. All other embodiments, which can be derived from the embodiments in the present application by a person skilled in the art, are within the scope of protection of the present application.
The terms "first," "second," and the like in the description and in the claims of the present application are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the data so used may be interchanged under appropriate circumstances such that embodiments of the application may be practiced in sequences other than those illustrated or described herein, and the terms "first", "second", and the like are generally used herein in a generic sense and do not limit the number of terms, e.g., the first term can be one or more than one. In addition, "and/or" in the specification and claims means at least one of connected objects, and the character "/", generally means that the objects related to each other before and after are in a relationship of "or".
The embodiments of the present application are described in detail below with reference to the accompanying drawings through specific embodiments and application scenarios thereof.
Example 1:
as shown in FIG. 2, a nitrogen oxide sensor chip with a pump unit independent design comprises a substrate, in the embodiment of the invention, the substrate is formed by sequentially stacking and compounding multiple layers of alumina matrix and multiple layers of zirconia matrix, wherein the multiple layers of alumina matrix comprise a first alumina matrix 16, a second alumina matrix 18, a third alumina matrix 20 and a fourth alumina matrix 22, the multiple layers of zirconia matrix comprise a first zirconia matrix 17, a second zirconia matrix 19 and a third zirconia matrix 21, and the substrate is sequentially formed by sequentially stacking the first alumina matrix 16, the first zirconia matrix 17, the second alumina matrix 18, the second zirconia matrix 19, the third alumina matrix 20, the third zirconia matrix 21 and the fourth alumina matrix 22 from top to bottom.
The difference from the conventional nox sensor chip lies in that alumina is spaced between each layer of zirconia, and as shown in fig. 2, the substrates are composed of an alumina substrate 16, a zirconia substrate 17, an alumina substrate 18, a zirconia substrate 19, an alumina substrate three 20, a zirconia substrate three 21 and an alumina substrate four 22 from top to bottom, so that the zirconia electrolytes between each oxygen pump electrode are independent and do not interfere with each other.
In the embodiment of the invention, the first alumina substrate 16, the first zirconia substrate 17 and the second alumina substrate 18 are provided with gas inlet holes 2 from top to bottom, the second alumina substrate 18 is provided with a first reaction cavity 6, the first reaction cavity 6 is internally provided with a first internal oxygen electrode 5 and a reference electrode 7, one side of the first reaction cavity 6 is communicated with the gas inlet holes 2, the other side of the first reaction cavity 6 is provided with a second reaction cavity 11, the second reaction cavity 11 penetrates through the second zirconia substrate 19 and is formed in a third alumina substrate 20, the second reaction cavity 11 is internally provided with an activation electrode 12, the fourth alumina substrate 22 is provided with an oxygen discharge cavity 14 below the second reaction cavity 11, the oxygen discharge cavity 14 is internally provided with a second internal oxygen electrode 13, the third alumina substrate 20 is provided with a first reference cavity 10 below the first reaction cavity 6, the first reference cavity 10 is provided with a reference electrode 9, the first alumina substrate 16 is provided with a groove, the groove is provided with a protection layer 3, one side of the first reaction cavity 6 is communicated with the first external electrode 2 through a first diffusion layer 4, the fourth alumina substrate 22 is provided with a protection layer 15, and the gas inlet holes 1 for covering the aluminum substrate are provided with a protection layer.
The specific working principle is as follows: tail gas enters a reaction cavity I6 through an air inlet 2 and then enters a diffusion layer I4, an oxygen pump is formed by an outer electrode 3, an inner oxygen electrode I5 and a zirconia base body I17 to pump oxygen in the reaction cavity I6 to the outside of the cavity, a pump current IP1 and oxygen concentration are in a linear corresponding relation, the voltage between a contrast electrode 7 and a reference electrode 9 is controlled to be 450mV (the oxygen concentration is 0) as a target value, the rest gas enters a reaction cavity II 11 through a diffusion layer II 8 and reaches the surface of an activation electrode 12, the activation electrode 12 is a platinum rhodium electrode and can convert nitric oxide into nitrogen and oxygen, a second oxygen pump is formed by the activation electrode 12, the inner oxygen electrode II 13 and a zirconia base body III 21 to pump the decomposed oxygen to an oxygen discharge cavity 14, and a pump current IP is pumped 2 And the concentration of the nitrogen oxide is in linear correspondence.
Example 2:
in addition to the structural features of the previous embodiments, in a specific embodiment of the present invention, the oxynitride sensor chip may be designed in an eight-pin structure, as shown in fig. 3; six-pin configurations are also contemplated, as shown in fig. 4.
According to the signal processing condition of ECU, the common electrode which can be grounded is connected into a pin electrode to be led out, the internal oxygen electrode I5, the comparison electrode 7 and the activation electrode 12 in FIG. 1 can be connected into a pin electrode to be led out at the tail part of the chip, and by the design, the nitrogen oxygen sensor only has 6 lines in appearance, but actually has 8 electrodes. Fig. 5 and 6 show top views of front and back surfaces of two chips.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, the statement "comprises a" or "comprising" a defined element does not exclude the presence of other identical elements in the process, method, article, or apparatus that comprises the element. Further, it should be noted that the scope of the methods and apparatuses in the embodiments of the present application is not limited to performing the functions in the order illustrated or discussed, but may include performing the functions in a substantially simultaneous manner or in a reverse order based on the functions recited, e.g., the described methods may be performed in an order different from that described, and various steps may be added, omitted, or combined. In addition, features described with reference to certain examples may be combined in other examples.
While the present embodiments have been described with reference to the accompanying drawings, it is to be understood that the invention is not limited to the precise embodiments described above, which are meant to be illustrative and not restrictive, and that various changes may be made therein by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. The nitrogen-oxygen sensor chip with the pump unit independently designed comprises a substrate and is characterized in that the substrate is formed by sequentially stacking and compounding multiple layers of alumina matrixes and multiple layers of zirconia matrixes.
2. The NI sensor chip of claim 1, wherein the multilayer alumina matrix comprises a first alumina matrix (16), a second alumina matrix (18), a third alumina matrix (20), and a fourth alumina matrix (22), and the multilayer zirconia matrix comprises a first zirconia matrix (17), a second zirconia matrix (19), and a third zirconia matrix (21).
3. The NI sensor chip of claim 2, wherein said substrate is composed of, from top to bottom, alumina matrix one (16), zirconia matrix one (17), alumina matrix two (18), zirconia matrix two (19), alumina matrix three (20), zirconia matrix three (21), and alumina matrix four (22).
4. The nitroxide sensor chip as claimed in claim 3, wherein the first alumina substrate (16), the first zirconia substrate (17) and the second alumina substrate (18) are provided with gas inlets (2) from top to bottom, the first alumina substrate (18) is provided with a first reaction cavity (6), the first reaction cavity (6) is provided with a first internal oxygen electrode (5) and a reference electrode (7), one side of the first reaction cavity (6) is connected to the gas inlets (2), the other side of the first reaction cavity is provided with a second reaction cavity (11), the second reaction cavity (11) penetrates through the second zirconia substrate (19) and is formed in the third alumina substrate (20), the second reaction cavity (11) is provided with an active electrode (12), the fourth alumina substrate (22) is provided with an oxygen discharge cavity (14) below the second reaction cavity (11), the oxygen discharge cavity (14) is provided with a second internal oxygen electrode (13), the third alumina substrate (20) is provided with a cavity (10) below the first reaction cavity (6), the reference cavity (10) is provided with a groove (9), and the reference electrode (9) is provided with a groove (3).
5. The NI sensor chip of claim 4, wherein one side of the reaction cavity (6) is connected to the air inlet hole (2) through a diffusion layer (4).
6. The NI sensor chip of claim 4, wherein one side of the first reaction cavity (6) is connected to the second reaction cavity (11) through the second diffusion layer (8).
7. The NI sensor chip of claim 4, 5 or 6, wherein said alumina substrate (22) has heating electrodes (15) disposed therein.
8. A pump unit independent designed NI sensor chip according to claim 4 or 5 or 6, characterized by further comprising a protective layer (1) disposed in the recess for covering and protecting the outer electrode (3).
9. The NI sensor chip of claim 4, wherein the external electrode (3), the internal oxygen electrode one (5) and the zirconia substrate one (17) constitute an oxygen pump for pumping oxygen inside the reaction cavity one (6) to the outside of the reaction cavity one (6).
10. The nitroxide sensor chip of claim 8, wherein the residual gas enters the second reaction cavity (11) through the second diffusion layer (8) and reaches the surface of the activation electrode (12), the activation electrode (12) is platinum rhodium, which can convert nitric oxide into nitrogen and oxygen, and the second oxygen pump is composed of the activation electrode (12), the second internal oxygen electrode (13) and the third zirconia substrate (21) to pump the decomposed oxygen into the oxygen exhaust cavity (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211225656.4A CN115684297A (en) | 2022-10-08 | 2022-10-08 | Nitrogen oxygen sensor chip with independently designed pump unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211225656.4A CN115684297A (en) | 2022-10-08 | 2022-10-08 | Nitrogen oxygen sensor chip with independently designed pump unit |
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| Publication Number | Publication Date |
|---|---|
| CN115684297A true CN115684297A (en) | 2023-02-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211225656.4A Pending CN115684297A (en) | 2022-10-08 | 2022-10-08 | Nitrogen oxygen sensor chip with independently designed pump unit |
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10221298A (en) * | 1996-05-31 | 1998-08-21 | Ngk Spark Plug Co Ltd | Nitrogen oxide concentration detector |
| US6303011B1 (en) * | 1997-06-23 | 2001-10-16 | Kabushiki Kaisha Riken | Gas sensor |
| US6338783B1 (en) * | 1998-11-25 | 2002-01-15 | Ngk Spark Plug Co., Ltd. | Gas sensor, method of manufacturing the same, and gas sensor system using the gas sensor |
| US20030070924A1 (en) * | 1998-09-17 | 2003-04-17 | Satoshi Sugaya | Gas sensor |
| JP2008170316A (en) * | 2007-01-12 | 2008-07-24 | Ngk Spark Plug Co Ltd | Gas sensor element, gas sensor, and nox sensor |
| CN102043007A (en) * | 2010-10-30 | 2011-05-04 | 无锡隆盛科技有限公司 | Nitrogen oxide sensor chip |
| US20120097553A1 (en) * | 2010-10-20 | 2012-04-26 | Thomas Classen | Method for measuring and/or calibrating a gas sensor |
| CN105388197A (en) * | 2014-09-01 | 2016-03-09 | 丰田自动车株式会社 | gas concentration detecting device |
| CN208689005U (en) * | 2017-07-26 | 2019-04-02 | 深圳安培龙科技股份有限公司 | A kind of heating electrode is the nitrogen oxide sensor of aluminium oxide structure |
| CN214174230U (en) * | 2020-12-24 | 2021-09-10 | 广东岭南职业技术学院 | Improved nitrogen-oxygen sensor chip |
-
2022
- 2022-10-08 CN CN202211225656.4A patent/CN115684297A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10221298A (en) * | 1996-05-31 | 1998-08-21 | Ngk Spark Plug Co Ltd | Nitrogen oxide concentration detector |
| US6303011B1 (en) * | 1997-06-23 | 2001-10-16 | Kabushiki Kaisha Riken | Gas sensor |
| US20030070924A1 (en) * | 1998-09-17 | 2003-04-17 | Satoshi Sugaya | Gas sensor |
| US6338783B1 (en) * | 1998-11-25 | 2002-01-15 | Ngk Spark Plug Co., Ltd. | Gas sensor, method of manufacturing the same, and gas sensor system using the gas sensor |
| JP2008170316A (en) * | 2007-01-12 | 2008-07-24 | Ngk Spark Plug Co Ltd | Gas sensor element, gas sensor, and nox sensor |
| US20120097553A1 (en) * | 2010-10-20 | 2012-04-26 | Thomas Classen | Method for measuring and/or calibrating a gas sensor |
| CN102043007A (en) * | 2010-10-30 | 2011-05-04 | 无锡隆盛科技有限公司 | Nitrogen oxide sensor chip |
| CN105388197A (en) * | 2014-09-01 | 2016-03-09 | 丰田自动车株式会社 | gas concentration detecting device |
| CN208689005U (en) * | 2017-07-26 | 2019-04-02 | 深圳安培龙科技股份有限公司 | A kind of heating electrode is the nitrogen oxide sensor of aluminium oxide structure |
| CN214174230U (en) * | 2020-12-24 | 2021-09-10 | 广东岭南职业技术学院 | Improved nitrogen-oxygen sensor chip |
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