CN115652280B - High-temperature chamber butt joint device - Google Patents
High-temperature chamber butt joint device Download PDFInfo
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- CN115652280B CN115652280B CN202211265429.4A CN202211265429A CN115652280B CN 115652280 B CN115652280 B CN 115652280B CN 202211265429 A CN202211265429 A CN 202211265429A CN 115652280 B CN115652280 B CN 115652280B
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- air duct
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- 210000001503 joint Anatomy 0.000 title claims abstract description 92
- 238000006243 chemical reaction Methods 0.000 claims abstract description 48
- 238000003032 molecular docking Methods 0.000 claims description 44
- 238000007789 sealing Methods 0.000 claims description 18
- 238000009423 ventilation Methods 0.000 claims description 15
- 230000007246 mechanism Effects 0.000 claims description 10
- 230000001105 regulatory effect Effects 0.000 claims description 8
- 238000001125 extrusion Methods 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 238000001816 cooling Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000004378 air conditioning Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
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Abstract
The invention discloses a high-temperature chamber butt joint device, which relates to the technical field of butt joint devices and solves the problem that hot gas is easy to float upwards when cooled after being in butt joint in a high-temperature reaction box so that a cover is opened to discharge hot gas.
Description
Technical Field
The invention relates to the technical field of docking devices, in particular to a high-temperature chamber docking device.
Background
The high temperature chamber refers to an internal cavity of a high temperature closed container, and at present, when chemical vapor deposition (Chemical Vapor Deposition is called CVD for short) is performed, there is generally a high temperature closed cavity to chemically react one or more gas phase compounds or simple substances containing thin film elements on the surface of a substrate to generate a thin film, and then the surface of the substrate needs to be cooled after the thin film deposition is completed, and then the substrate is taken out.
At present, a chemical vapor deposition device generally comprises a reaction box with an end cover, sealing can be realized, a carrying platform is arranged in the box, a substrate to be deposited is placed on the carrying platform, then one or more gas phase compounds containing film elements are injected into the reaction box and then heated, so that the temperature in the reaction box reaches the required high temperature, after a batch of substrates are subjected to film deposition, the interior of the reaction box is required to be cooled, the interior of the reaction box is usually cooled, cold air is filled into the interior, the substrates are taken out after the cooling is finished, because the interior of the chamber is in a closed high-temperature environment at first, after the cold air is injected, a part of high-temperature gas is flushed, accumulated near the end cover at the upper end, high-temperature gas can be flushed out when a person opens the end cover, and the risk of high-temperature scalding exists.
Disclosure of Invention
The invention aims to provide a high-temperature chamber butt joint device which can prevent hot gas from gathering above to cause hot gas to gush out after a cover is opened when cooling the high-temperature chamber, so as to solve the problems in the background art.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a high temperature cavity interfacing apparatus, includes the reaction box, reaction box internally mounted has the microscope carrier, and the both sides of reaction box all are fixed with the butt joint pipe, still include seal assembly and butt joint shell, be equipped with the through-hole in the butt joint pipe, just seal assembly installs in the through-hole, seal assembly's front end install with the outer end of butt joint pipe cup joints the cover that ventilates mutually, the butt joint shell cover is in the outer end of butt joint pipe, just the outer end of butt joint shell install with the butt joint piece that the butt joint pipe outside is connected, the tail end of butt joint shell is fixed with the breather pipe, just install adjustment mechanism in the butt joint shell.
Preferably, the sealing assembly comprises an air duct, a conical table is fixed on the outer side of one end of the air duct, which is positioned in the reaction box, the outer side of the conical table is in butt joint with the inner wall of the ventilation sleeve through a support, the cross section of the through hole is convex, the diameter of the large-area end of the conical table is larger than the inner diameter of the small hole end of the through hole, the air duct is in sliding connection with the small hole end of the through hole, a limiting ring is fixed on the outer end of the air duct, an extrusion spring which is abutted against the outer end of the butt joint pipe is sleeved on the outer side of the air duct, a plurality of ventilation openings are formed in the air duct, which is close to one end of the conical table, and the designed sealing assembly is used for sealing treatment of the butt joint pipe.
Preferably, the butt joint piece comprises a butt joint cap, a movable groove is formed in the outer side of the butt joint shell, the butt joint cap is sleeved in the movable groove in a sliding mode, the butt joint pipe is located on the outer side of the reaction box and is fixedly provided with a butt joint ring, the butt joint cap is in threaded insertion connection with the butt joint ring, and the designed butt joint piece is used for installing and fixing the butt joint shell and the butt joint pipe.
Preferably, the outside of ventilation cover is fixed to be linked together and is had L type pipe, just the outside equidistance of L type pipe is opened there is a plurality of air vents, improves the scope of ventilation.
Preferably, the adjusting mechanism comprises a connecting frame fixed at the air outlet end of the butt joint shell, a jacking column is fixed at the outer side of the connecting frame, an adjusting wheel is fixed at the outer end of the air duct through a support, the adjusting wheel abuts against the jacking column, a steering assembly used for enabling the air duct to rotate is arranged at the inner side of the butt joint shell, and the designed adjusting mechanism is used for abutting against the sealing assembly and can realize the form adjustment of sealing and exhausting of the sealing assembly.
Preferably, the steering assembly comprises a steering motor fixed in the butt joint shell, a rotating rod is fixed at the output end of the steering motor through a coupler, a mounting plate fixed inside the butt joint shell is fixed at the outer end of the rotating rod through a bearing, a large gear and a small gear are sequentially fixed at the outer side of the rotating rod, a half toothed ring is sleeved on the outer side of the adjusting wheel in a sliding manner, the large gear is meshed with the half toothed ring, a rotating shaft is rotatably mounted on the mounting plate, steering wheels meshed with the small gear are fixed on the mounting plate through the rotating shaft, fixing frames are fixed at the outer sides of the half toothed ring and the adjusting wheels, an electric push rod is mounted between the fixing frames, and the designed steering assembly is used for forward and backward rotation of the adjusting wheels.
Preferably, the steering wheel comprises an inner shaft fixed on the outer side of the rotating shaft, an abutting plate I is fixed on the outer side of the inner shaft, a steering toothed ring is sleeved on the outer side of the inner shaft, an abutting plate II is fixed on the inner side of the steering toothed ring, a plurality of circular rings are fixed in the abutting plate I, the circular rings are sleeved with the abutting plate II in a sliding mode, arc springs abutted to the abutting plate I and the abutting plate II are sleeved on the outer side of the circular rings, and a certain angle is reserved between the steering toothed ring and the inner shaft for buffering, so that conversion between the two half toothed rings is more stable.
Preferably, the adjusting wheel is internally provided with a hollowed-out opening, the contact surface of the adjusting wheel and the jacking column is provided with a groove, the hollowed-out opening is convenient for gas circulation, and the groove is convenient for the jacking column to prop against.
Preferably, the butt joint pipe, the air duct and the L-shaped pipe are all made of high-temperature resistant materials, so that the high-temperature environment in the reaction box is met.
Preferably, a barrier strip is fixed on the outer side of the top of the connecting frame.
Compared with the prior art, the invention has the beneficial effects that:
according to the invention, the butt joint pipe and the internal sealing component are additionally arranged on the two sides of the reaction box, so that the tightness of the interior of the reaction box can be ensured when the chemical vapor deposition operation is carried out in the reaction box, after the film deposition of the substrate is finished, the butt joint with the sealing component is realized through the designed butt joint shell and the internal regulating mechanism, the hot gas in the reaction box can be discharged through pressure relief, and the hot gas at the top can be discharged and cooled preferentially through the steering component and the L-shaped pipe, so that when a person opens the end cover, the gushing of high-temperature gas can be avoided.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a schematic view of the internal structure of the reaction tank of the present invention after being partially cut away;
FIG. 3 is a schematic cross-sectional internal structure of the docking shell and docking tube of the present invention after docking;
FIG. 4 is a top view, partially in section, of a docking shell and docking tube of the present invention;
FIG. 5 is a schematic view of a seal assembly according to the present invention;
FIG. 6 is a schematic illustration of the connection of the seal assembly to the steering assembly of the present invention;
FIG. 7 is a schematic view of the connection structure of the large gear and the half-toothed ring of the present invention;
fig. 8 is a schematic view of the steering wheel structure of the present invention.
In the figure: 1-a reaction box; 2-connecting the pipes; 3-a seal assembly; 4-through holes; 5-ventilation sleeve; 6, butting a shell; 7-butting piece; 8-a vent pipe; 9-an adjusting mechanism; 10-an airway; 11-a conical table; 12-limiting rings; 13-pressing the spring; 14-vent; 15-butting caps; 16-a moving tank; 17-a docking ring; an 18-L tube; 19-vent holes; 20-connecting frames; 21-a top column; 22-an adjusting wheel; a 23-turn assembly; 24-steering motor; 25-rotating a rod; 26-large gear; 27-pinion gear; 28-a half-toothed ring; 29-steering wheel; 30-an inner shaft; 31-an abutting plate I; 32-steering ring gear; 33-a second butt plate; 34-a ring; 35-arc springs; 36-hollowed-out opening; 37-groove; 38-fixing frame; 39-electric push rod.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
Referring to fig. 1-3, a high temperature chamber docking device in the drawings comprises a reaction box 1, wherein a carrying platform is arranged in the reaction box 1, docking pipes 2 are fixed on two sides of the reaction box 1, a sealing component 3 and a docking shell 6 are also included, a through hole 4 is formed in the docking pipe 2, the sealing component 3 is arranged in the through hole 4, a ventilation sleeve 5 sleeved with the outer end of the docking pipe 2 is arranged at the front end of the sealing component 3, the docking shell 6 is sleeved with the outer end of the docking pipe 2, a docking piece 7 connected with the outer side of the docking pipe 2 is arranged at the outer end of the docking shell 6, a ventilation pipe 8 is fixed at the tail end of the docking shell 6, an adjusting mechanism 9 is arranged in the docking shell 6, an L-shaped pipe 18 is fixedly communicated with the outer side of the ventilation sleeve 5, and a plurality of ventilation holes 19 are formed in the outer side of the L-shaped pipe 18 at equal intervals;
it should be noted that: the butt joint pipe 2 of design and inside seal assembly 3 mutually support, are in when the chemical vapor deposition operation is being carried out to the inside high temperature that is in of reaction tank 1, can make butt joint pipe 2 be in sealed state, after the operation finishes, need cool down, at this moment, dock with butt joint pipe 2 through butt joint shell 6 to through adjustment mechanism 9 with inside seal assembly 3 jack-off, thereby realize the discharge to the steam.
Notably, are: the vent pipe 8 at the tail end of the butt joint shell 6 is in butt joint with cold air supply equipment, so that cold air can be transmitted;
also to be described is: in the cooling process, an end cover (not shown in the figure) at the inner top of the reaction box 1 is not opened, and at the moment, the two butt joint pipes 2 are both spliced with the butt joint shell 6, one of the butt joint pipes is used for gas transmission, the other is used for gas exhaust, and the stable gas pressure in the reaction box 1 is ensured.
Referring to fig. 3-6, the sealing assembly 3 in the drawings includes an air duct 10, a conical table 11 is fixed on the outer side of one end of the air duct 10 located in the reaction box 1, the outer side of the conical table 11 is in butt joint with the inner wall of the ventilation sleeve 5 through a bracket, the cross section of the through hole 4 is convex, the diameter of the large-area end of the conical table 11 is larger than the inner diameter of the small hole end of the through hole 4, the air duct 10 is in sliding connection with the small hole end of the through hole 4, a limiting ring 12 is fixed on the outer end of the air duct 10, an extrusion spring 13 propped against the limiting ring 12 and the outer end of the butt joint pipe 2 is sleeved on the outer side of the air duct 10, and a plurality of air vents 14 are formed in the end, close to the conical table 11, of the air duct 10 in an equidistant manner;
it should be noted that: when the air duct 10 is not acted by external force, the air duct 10 can move outwards under the action of the extrusion spring 13, so that the air vent 14 is attached to the inside of the small port of the through hole 4, meanwhile, the conical table 11 can prop against the inside of the through hole 4, and when the temperature in the reaction box 1 is increased, the conical table 11 can be extruded to prop against the inner wall of the through hole 4, thereby avoiding gas discharge and playing a sealing role;
when an external force is applied, the air duct 10 moves inwards, so that the air port 14 is separated from the small port of the through hole 4, and at the moment, the air flow in the reaction box 1 enters the air duct 10 through the air port 14 and is discharged outwards.
Meanwhile, referring to fig. 4 and 5, the docking member 7 in the drawings includes a docking cap 15, a moving groove 16 is formed on the outer side of the docking shell 6, the docking cap 15 is slidably sleeved in the moving groove 16, a docking ring 17 is fixed on the outer side of the docking tube 2 located on the reaction box 1, and the docking cap 15 is in threaded connection with the docking ring 17;
it should be noted that: when the docking shell 6 is inserted into the docking tube 2, at this time, a person pushes the docking cap 15 outward, and then screws the docking cap 15 again so as to be screwed with the docking ring 17, thereby completing the insertion and fixation of the docking shell 6.
In addition, referring to fig. 3-5, the adjusting mechanism 9 in the drawings includes a connecting frame 20 fixed at the air outlet end of the docking shell 6, a top column 21 is fixed at the outer side of the connecting frame 20, an adjusting wheel 22 is fixed at the outer end of the air duct 10 through a bracket, the adjusting wheel 22 is propped against the top column 21, and a steering assembly 23 for rotating the air duct 10 is installed at the inner side of the docking shell 6;
it should be noted that: after the butt joint shell 6 is inserted, the jacking column 21 is abutted against the adjusting wheel 22, and at the moment, the air duct 10 is pushed to move inwards, so that the air flow is discharged.
Principle of cooling after butt joint with reaction box 1: firstly, after the chemical vapor deposition operation in the reaction box 1 is finished, a person directly inserts the butt joint shell 6 into the outer end of the butt joint pipe 2, then the butt joint shell 6 is limited through the butt joint piece 7, after the butt joint shell 6 is inserted, the adjusting wheel 22 is pushed through the jacking column 21, the air duct 10 moves inwards, thereby the vent 14 is separated from the small port of the through hole 4, the air flow in the reaction box 1 flows into the air duct 10, the high-temperature environment in the reaction box 1 ensures that the internal air pressure is large, after the butt joint shell 6 is inserted, the internal hot air is directly injected into the air duct 10 through the vent hole 19 on the L-shaped pipe 18, then the person injects cold air into one of the vent pipes 8, the cold air is introduced into the reaction box 1 through the butt joint shell 6, the L-shaped pipe 18 is obliquely upwards placed, the cold air is preferentially cooled above, the hot air is discharged preferentially and is conveyed to the top of the reaction box 1, and after the cooling is finished, the person opens the end cover without the hot air, so that the existing end cover is opened, and the end cover is safer.
In this scheme, in order to obtain guaranteeing at high temperature life, butt joint pipe 2, air duct 10 and L type pipe 18 all adopt high temperature resistant material to make, simultaneously, in order to improve the circulation of gas, open at regulating wheel 22 inside has fretwork mouth 36, and regulating wheel 22 and jack-prop 21's contact surface open has recess 37, sliding butt joint between recess 37 and the jack-prop 21, the rotation of convenient regulating wheel 22.
Example 2
Referring to fig. 5-7, for further explanation of example 1, the steering assembly 23 in this embodiment includes a steering motor 24 fixed in the docking shell 6, a rotating rod 25 is fixed at an output end of the steering motor 24 through a coupling, a mounting plate fixed in the docking shell 6 is fixed at an outer end of the rotating rod 25 through a bearing, a large gear 26 and a small gear 27 are sequentially fixed at an outer side of the rotating rod 25, a half-toothed ring 28 is sleeved on an outer side of the adjusting wheel 22 in a sliding manner, the large gear 26 is meshed with the half-toothed ring 28, a rotating shaft is rotatably mounted on the mounting plate, a steering wheel 29 meshed with the small gear 27 is fixed through the rotating shaft, fixing frames 38 are fixed at outer sides of the half-toothed ring 28 and the adjusting wheel 22, and an electric push rod 39 is mounted between the two fixing frames 38;
it should be noted that: through the rotation of steering motor 24, can make dwang 25 rotate, thereby drive gear wheel 26 and rotate, make half ring gear 28 rotate, under the effect of mount 38 and electric putter 39, make half ring gear 28 rotate, can drive the rotation of regulating wheel 22, thereby also make the toper platform 11 of the outer end of air duct 10 drive ventilation cover 5 synchronous rotation, thereby make L type pipe 18 swing in reaction case 1, and through the input of air conditioning, make the air conditioning evenly discharge into reaction case 1 inside through air vent 19 in the L type pipe 18, when L type pipe 18 rotates to the top of reaction case 1, at this moment, stretch out and draw back through electric putter 39, make half ring gear 28 remove outside regulating wheel 22, and realize with steering wheel 29 butt joint, because pinion 27 and steering wheel 29 mesh, thereby make steering wheel 29 drive the reversal of air duct 10, thereby make L type pipe 18 can rotate to contact with reaction case 1 bottom, then stretch out and draw back again through electric putter 39, make half ring gear 28 mesh with gear wheel 26, thereby realize reciprocating type pipe 18 in the inside the reaction case 1, the effect of cooling down is evenly realized.
Also to be described is: the two L-shaped pipes 18 swing reciprocally in the reaction box 1, wherein one of the L-shaped pipes discharges cold air, the other sucks out hot air in the reaction box 1, the air pressure in the reaction box 1 is kept balanced after the other is entered and discharged, and meanwhile, the cooling effect is improved;
notably, are: before the end cover needs to be opened, people can input cold air above the end cover by controlling the L-shaped pipe 18 to be in an inclined upward state, so that heat flow is prevented from rushing out when the end cover is opened.
Meanwhile, in order to avoid an excessive rotation angle of the L-shaped tube 18, a barrier strip is fixed at the top outer side of the connection frame 20.
The rest of the structure is the same as in embodiment 1.
Example 3
Referring to fig. 8, for further illustration of the present embodiment, the steering wheel 29 in the drawings includes an inner shaft 30 fixed on the outer side of the rotating shaft, an abutment plate one 31 is fixed on the outer side of the inner shaft 30, a steering gear ring 32 is sleeved on the outer side of the inner shaft 30, an abutment plate two 33 is fixed on the inner side of the steering gear ring 32, a plurality of rings 34 are fixed in the abutment plate one 31, the rings 34 are slidably sleeved with the abutment plate two 33, and an arc spring 35 abutting against the abutment plate one 31 and the abutment plate two 33 is sleeved on the outer side of the rings 34.
It should be noted that: when the electric push rod 39 pushes the half-toothed ring 28 to move, the steering motor 24 is always in a rotating state, so that the steering toothed ring 32 is always in a steering state, and when the half-toothed ring 28 is connected with the steering toothed ring 32, in order to avoid the clamping caused by overlarge friction force, the designed circular ring 34 and the arc-shaped spring 35 are used for meeting the requirement that the steering toothed ring 32 has a certain angle of slipping, so that the meshing and the butt joint with the half-toothed ring 28 are convenient;
also to be described is: after the half-toothed ring 28 is driven to rotate, the steering toothed ring 32 is reset under the action of the arc-shaped spring 35, and chamfers are arranged at two ends of the steering toothed ring 32 for better butt joint with the half-toothed ring 28.
The rest of the structure is the same as in embodiment 2.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. A high temperature chamber docking apparatus comprising:
the device comprises a reaction box (1), wherein a carrier is arranged in the reaction box (1), and butt joint pipes (2) are fixed on two sides of the reaction box (1);
characterized by further comprising:
the sealing assembly (3), be equipped with through-hole (4) in butt joint pipe (2), just sealing assembly (3) are installed in through-hole (4), ventilation sleeve (5) that cup joints mutually with the outer end of butt joint pipe (2) is installed to the front end of sealing assembly (3), the outside of ventilation sleeve (5) is fixed to be linked together have L type pipe (18), just a plurality of air vents (19) are opened to the outside equidistance of L type pipe (18);
the butt joint shell (6), the butt joint shell (6) is sleeved at the outer end of the butt joint pipe (2), a butt joint piece (7) connected with the outer side of the butt joint pipe (2) is arranged at the outer end of the butt joint shell (6), a vent pipe (8) is fixed at the tail end of the butt joint shell (6), and an adjusting mechanism (9) is arranged in the butt joint shell (6);
the sealing assembly (3) comprises an air duct (10), a conical table (11) is fixed at the outer side of one end of the air duct (10) positioned in the reaction box (1), the outer side of the conical table (11) is in butt joint with the inner wall of the ventilation sleeve (5) through a support, the cross section of the through hole (4) is convex, the diameter of the large-area end of the conical table (11) is larger than the inner diameter of the small hole end of the through hole (4), the air duct (10) is in sliding connection with the small hole end of the through hole (4), a limiting ring (12) is fixed at the outer end of the air duct (10), an extrusion spring (13) propped against the limiting ring (12) and the outer end of the butt joint pipe (2) is sleeved at the outer side of the air duct (10), and a plurality of ventilation openings (14) are formed in the position, close to one end of the conical table (11), at equal intervals;
the adjusting mechanism (9) comprises a connecting frame (20) fixed at the air outlet end of the butt joint shell (6), a jack post (21) is fixed on the outer side of the connecting frame (20), an adjusting wheel (22) is fixed at the outer end of the air duct (10) through a bracket, the adjusting wheel (22) is propped against the jack post (21), and a steering assembly (23) for enabling the air duct (10) to rotate is arranged on the inner side of the butt joint shell (6);
steering assembly (23) are including fixing steering motor (24) in butt joint shell (6), steering motor (24) output is fixed with dwang (25) through the shaft coupling, the outer end of dwang (25) be fixed with the inside mounting panel that is fixed mutually of butt joint shell (6) through the bearing, the outside of dwang (25) is fixed with gear wheel (26) and pinion (27) in proper order, the outside slip cap of regulating wheel (22) has half ring gear (28), just gear wheel (26) with half ring gear (28) meshes, rotates on the mounting panel and installs the pivot to be fixed with steering wheel (29) that pinion (27) are meshed through the pivot, half ring gear (28) with regulating wheel (22) outside all is fixed with mount (38), and two install electric putter (39) between mount (38).
2. A high temperature chamber docking apparatus as claimed in claim 1 wherein: the butt joint piece (7) comprises a butt joint cap (15), a movable groove (16) is formed in the outer side of the butt joint shell (6), the butt joint cap (15) is slidably sleeved in the movable groove (16), a butt joint ring (17) is fixed on the outer side of the reaction box (1) through the butt joint pipe (2), and the butt joint cap (15) is in threaded connection with the butt joint ring (17).
3. A high temperature chamber docking apparatus as claimed in claim 1 wherein: the steering wheel (29) comprises an inner shaft (30) fixed on the outer side of a rotating shaft, an abutting plate I (31) is fixed on the outer side of the inner shaft (30), a steering gear ring (32) is sleeved on the outer side of the inner shaft (30), an abutting plate II (33) is fixed on the inner side of the steering gear ring (32), a plurality of circular rings (34) are fixed in the abutting plate I (31), the circular rings (34) are sleeved with the abutting plate II (33) in a sliding mode, and arc springs (35) abutted against the abutting plate I (31) and the abutting plate II (33) are sleeved on the outer side of the circular rings (34).
4. A high temperature chamber docking apparatus as claimed in claim 1 wherein: the adjusting wheel (22) is internally provided with a hollowed-out opening (36), and the contact surface of the adjusting wheel (22) and the jacking column (21) is provided with a groove (37).
5. A high temperature chamber docking apparatus as claimed in claim 1 wherein: the butt joint pipe (2), the air duct (10) and the L-shaped pipe (18) are made of high-temperature resistant materials.
6. A high temperature chamber docking apparatus as claimed in claim 1 wherein: and a barrier strip is fixed on the outer side of the top of the connecting frame (20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211265429.4A CN115652280B (en) | 2022-10-17 | 2022-10-17 | High-temperature chamber butt joint device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211265429.4A CN115652280B (en) | 2022-10-17 | 2022-10-17 | High-temperature chamber butt joint device |
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| Publication Number | Publication Date |
|---|---|
| CN115652280A CN115652280A (en) | 2023-01-31 |
| CN115652280B true CN115652280B (en) | 2023-11-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202211265429.4A Active CN115652280B (en) | 2022-10-17 | 2022-10-17 | High-temperature chamber butt joint device |
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| CN (1) | CN115652280B (en) |
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| CN114719064A (en) * | 2022-04-12 | 2022-07-08 | 国家电网有限公司 | Oil-immersed transformer release valve capable of preventing oil oxidation |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100655079B1 (en) * | 2005-11-11 | 2006-12-08 | 삼성전자주식회사 | Sealing apparatus between process chamber and transfer chamber |
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2022
- 2022-10-17 CN CN202211265429.4A patent/CN115652280B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5279322A (en) * | 1991-11-14 | 1994-01-18 | Smc Kabushiki Kaisha | Exhaust valve |
| KR20150059704A (en) * | 2013-11-22 | 2015-06-02 | 주식회사피에스디이 | equipment front end module |
| CN206771754U (en) * | 2017-04-24 | 2017-12-19 | 河南省豫园锅炉机电有限公司 | A kind of boiler heat-exchanging device |
| KR20200097468A (en) * | 2019-02-08 | 2020-08-19 | 김현정 | Pipe coupling apparatus using quellung reaction |
| CN114719064A (en) * | 2022-04-12 | 2022-07-08 | 国家电网有限公司 | Oil-immersed transformer release valve capable of preventing oil oxidation |
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