CN115650711A - Integrated rapid 3D printing manufacturing method of ceramic arm - Google Patents
Integrated rapid 3D printing manufacturing method of ceramic arm Download PDFInfo
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- CN115650711A CN115650711A CN202211045248.0A CN202211045248A CN115650711A CN 115650711 A CN115650711 A CN 115650711A CN 202211045248 A CN202211045248 A CN 202211045248A CN 115650711 A CN115650711 A CN 115650711A
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- 239000000919 ceramic Substances 0.000 title claims abstract description 142
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 39
- 238000010146 3D printing Methods 0.000 title claims abstract description 29
- 239000002002 slurry Substances 0.000 claims abstract description 24
- 238000005094 computer simulation Methods 0.000 claims abstract description 21
- 238000004140 cleaning Methods 0.000 claims abstract description 20
- 238000000016 photochemical curing Methods 0.000 claims abstract description 20
- 238000007639 printing Methods 0.000 claims abstract description 20
- 239000010410 layer Substances 0.000 claims abstract description 19
- 238000005245 sintering Methods 0.000 claims abstract description 16
- 239000002356 single layer Substances 0.000 claims abstract description 14
- 238000010276 construction Methods 0.000 claims abstract description 11
- 238000000547 structure data Methods 0.000 claims abstract description 11
- 238000005238 degreasing Methods 0.000 claims abstract description 8
- 238000010438 heat treatment Methods 0.000 claims abstract description 7
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 16
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- 238000003199 nucleic acid amplification method Methods 0.000 claims description 15
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- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000002270 dispersing agent Substances 0.000 claims description 3
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- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 125000000174 L-prolyl group Chemical group [H]N1C([H])([H])C([H])([H])C([H])([H])[C@@]1([H])C(*)=O 0.000 description 1
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Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Abstract
An integrated rapid 3D printing manufacturing method of a ceramic arm comprises the following steps: providing size and structure data of a top plate and a bottom plate of a ceramic arm, and establishing a 3D computer model according to the size and the structure data; adjusting the placing posture of the 3D computer model of the ceramic arm on a construction platform, and exporting to obtain a slice file with a certain single-layer thickness; providing a photocuring 3D printer and ceramic slurry; leading the slice file into the photocuring 3D printer, and setting the printing layer thickness, the exposure light intensity and the exposure time to prepare a green body of the ceramic arm; putting the prepared ceramic arm green body into cleaning fluid, and cleaning redundant uncured slurry; degreasing the cleaned ceramic arm green body at a certain heating rate, and then sintering at 1620-1680 ℃ at high temperature to obtain the integrated ceramic arm. The 3D printing manufacturing method enables the customized design change of the ceramic arm product to be faster and easier to execute, and can realize the integrated manufacturing and structure optimization of the ceramic arm.
Description
Technical Field
The invention relates to the technical field of inorganic non-metallic material additive manufacturing, in particular to an integrated rapid 3D printing manufacturing method of a ceramic arm.
Background
3D printing is a rapid prototyping technique, also known as additive manufacturing, that is a technique that builds objects by printing layer by layer based on a three-dimensional data model. With the gradual maturity of additive manufacturing technology, 3D printing technology has played an excellent role in various material fields, wherein the photocuring technology becomes an efficient high-precision forming method due to its high curing speed and high manufacturing precision, and thus becomes a hot spot for research in the 3D printing field.
The ceramic arm is also called a ceramic conveying arm and an end effector, is mainly used for grabbing and clamping semiconductor parts, and is widely applied to production equipment in the field of pan-semiconductors such as integrated circuits, flat panel displays, LEDs, photovoltaics and the like. Structurally, ceramic arms are usually designed as flat arms and palms, and require air holes on the surface and air grooves on the inside. When the wafer transfer device is used, vacuum is formed after air is pumped from the air groove, and therefore the wafer is firmly adsorbed on the palm of the hand to be transferred. In the direction of manufacturing materials of the ceramic arm, high-purity 99 alumina ceramic is generally used, so that the ceramic arm has good heat resistance, mechanical strength, insulativity and corrosion resistance when used in a cavity of processing equipment, and particle pollution to the vacuum environment in the cavity is reduced.
However, since the dimensional accuracy of the parts is very high (e.g., the flatness tolerance is ± 0.02 mm), the ceramic arm in the prior art is usually manufactured by directly processing a plate by a numerical control machine (CNC). Therefore, in order to form a communicating air passage inside, the ceramic arm as a whole must be split into two parts, namely a top plate and a bottom plate. And forming required through holes and grooves on the top plate through cutting machining. The bottom plate is also called as a sealing plate and is covered on the top plate to play a role in sealing the air holes and the grooves. And finally splicing the bottom plate and the top plate together through a bonding agent to form the ceramic arm containing the internal air channel.
However, the higher the purity of alumina, the higher the hardness will be, and thus the more difficult it will be to cut, and thus the processing of the plate requires the use of diamond tools, resulting in high manufacturing costs and long time consumption. In addition, since the ceramic arm is recycled in an extreme environment in the chamber for a long time, the additional adhesive fastening part of the ceramic arm is easy to age, so that the air tightness of the ceramic arm is poor, and the service life of the ceramic arm is shortened.
Therefore, if the integrated manufacture of the top plate and the bottom plate of the ceramic arm can be realized, the service life of the ceramic arm can be prolonged, the manufacturing cost can be reduced, and the ceramic arm is suitable for the rapid update of semiconductor processing equipment.
The technical scheme disclosed in the patent application No. CN110105057A is that paraffin is firstly processed into a formed part with the size equal to the size of an air passage of a ceramic arm, then a ceramic raw material and the formed part are formed together, paraffin is removed, and finally sintering is carried out to obtain the integrally formed ceramic arm. This preparation method is complicated in wax pattern processing and removal, resulting in high manufacturing costs.
Disclosure of Invention
In view of the above, the present invention provides an integrated fast 3D printing method for manufacturing a ceramic arm, so as to solve the above technical problems.
An integrated rapid 3D printing manufacturing method of a ceramic arm comprises the following steps:
providing size and structure data of a ceramic arm, and establishing a 3D computer model according to the size and structure data;
adjusting the placing posture of the 3D computer model of the ceramic arm on the construction platform to enable the minimum dimension direction of the length, the width and the height to be parallel to the Z-axis direction of the construction platform, and after multiplying the three directions of X, Y, Z of the 3D computer model by amplification factors, deriving to obtain a slice file with a certain monolayer thickness;
providing a photocuring 3D printer and ceramic slurry;
guiding the slice file into the photocuring 3D printer, and setting the printing layer thickness, the exposure light intensity and the exposure time to obtain a green body of the ceramic arm;
putting the prepared ceramic arm green body into cleaning fluid, and cleaning redundant uncured slurry;
degreasing the cleaned ceramic arm green body at a certain heating rate, and then sintering at 1620-1680 ℃ at high temperature to obtain the integrated ceramic arm.
Further, the 3D computer model of the ceramic arm is formed by combining a top plate part and a bottom plate part, and the size and structure data of the ceramic arm includes the size and structure data of the top plate and the size and structure data of the bottom plate.
Furthermore, the top plate is provided with at least one air hole and at least one air groove communicated with the air hole.
Further, the magnification factors of the 3D computer model in the X-axis direction, the Y-axis direction, and the Z-axis direction are 117% -120%,117% -120%, and 120% -122%, respectively.
Further, the slice thickness of the slice file is 15-100 micrometers.
Further, the ceramic slurry is photosensitive alumina ceramic slurry with the density of more than or equal to 2.63g/cm 3 The high-purity alumina ceramic powder contains 55-58% of high-purity alumina ceramic powder with the volume fraction, the purity of the high-purity alumina ceramic powder is more than 99.9%, and the balance of photosensitive resin and a dispersing agent.
Furthermore, the photocuring 3D printer is a digital surface projection ceramic 3D printer with a sinking structure, and the wavelength of a light source is 365 nm-405 nm.
Further, the cleaning solution is alcohol or pure water, and the cleaning times are 3-5 times.
Further, the temperature rising rate of the rubber discharge is 0.1-5 ℃/min, the highest temperature is 500 ℃, and the heat preservation time is 1h.
Furthermore, the sintering temperature rise rate is 5-10 ℃/min, the sintering temperature is 1650 ℃, and the heat preservation time is 2h.
Compared with the prior art, the integrated rapid 3D printing manufacturing method of the ceramic arm provided by the invention realizes the integrated manufacturing of the ceramic arm through photocuring 3D printing forming, firstly, a top plate and a bottom plate of a traditional ceramic arm are combined into a whole through computer software to form an integrated 3D model of the ceramic arm, then, the 3D model enables the length direction, the width direction, the middle direction and the minimum dimension direction to be parallel to the Z-axis direction of a construction platform, then, after multiplying the three directions X, Y, Z of the 3D computer model by amplification coefficients, a slice file with a certain single-layer thickness is obtained through derivation, and finally, the slice file is subjected to 3D printing through a photocuring 3D printer, so that the ceramic arm is manufactured. The manufacturing method is far higher than the traditional cutting processing technology in manufacturing cost and efficiency, the manufactured integrated ceramic arm does not need additional polymer bonding and fastening, the air tightness problem does not exist, and the service life of the ceramic arm in the extreme environment in the cavity can be greatly prolonged. In addition, in the face of continuous upgrading iteration of semiconductor processing equipment, the high-precision rapid preparation method enables the customized design change of the ceramic arm product to be faster and easier to execute, and can realize the integrated manufacturing and structure optimization of the ceramic arm.
Detailed Description
Specific examples of the present invention will be described in further detail below. It should be understood that the description herein of embodiments of the invention is not intended to limit the scope of the invention.
The integrated rapid 3D printing manufacturing method of the ceramic arm comprises the following steps:
STEP101: providing size and structure data of a ceramic arm, and establishing a 3D computer model according to the size and structure data;
STEP102: adjusting the placing posture of the 3D computer model of the ceramic arm on the construction platform to enable the dimension direction of the minimum length, width, height and middle height to be parallel to the Z-axis direction of the construction platform, and after multiplying the three directions of X, Y, Z of the 3D computer model by amplification factors, deriving and obtaining a slicing file with a certain monolayer thickness;
STEP103: providing a photocuring 3D printer and ceramic slurry;
STEP104: leading the slice file into the photocuring 3D printer, and setting the printing layer thickness, the exposure light intensity and the exposure time to prepare a green body of the ceramic arm;
STEP105: putting the prepared ceramic arm green body into cleaning fluid, and cleaning redundant uncured slurry;
STEP106: degreasing the cleaned ceramic arm green body at a certain heating rate, and then sintering at 1620-1680 ℃ to obtain the integrated ceramic arm.
In STEP101, the ceramic arm itself is conventional, and the parameters such as the size and the structure thereof are well known to those skilled in the art and will not be described herein again. In order to facilitate cutting, a ceramic arm in the prior art is divided into a top plate part and a bottom plate part, namely, a 3D computer model of the ceramic arm is formed by combining the top plate part and the bottom plate part, so that when the 3D model of the ceramic arm is designed, a 2D graph of the top plate and a 2D graph of the bottom plate are combined and converted into an integrated 3D model by using computer software, and then an air hole and an air groove are directly formed in the 3D model. Accordingly, the dimensional and structural data of the ceramic arm includes the dimensional and structural data of the top plate and the dimensional and structural data of the bottom plate. It is contemplated that the top plate is provided with at least one air hole, and at least one air groove communicating with the air hole. The number of the air holes and the air grooves can be set according to actual requirements. The computer software can be CAD three-dimensional design software, and also can be Solidworks or Pro/E three-dimensional design software. And designing a 3D model of the ceramic arm through the computer software, wherein the 3D model comprises all the size and structural parameters of the ceramic arm.
In STEP102, the ceramic arm is printed by making the direction of the smallest dimension of the length, width and height in the 3D module of the ceramic arm parallel to the Z-axis direction of the build platform. Regarding the Z-axis direction of the building platform, it is the prior art, and it is a common technical term for 3D printing design, and is used for placing the 3D model to be printed, and is not described herein again. After being placed on the build platform, the data in the X, Y, Z three directions of the 3D computer model are magnified to obtain a ceramic arm of the correct size after sintering. Specifically, it is to multiply the data in X, Y, Z three directions of the 3D computer model by the amplification factor. The magnification factor acts to counteract the dimensional shrinkage of the ceramic greenbody after sintering. In the invention, the magnification coefficients of the 3D computer model in the X-axis direction, the Y-axis direction, and the Z-axis direction are 117% to 120%, and 120% to 122%, respectively. After amplification, the ceramic arm with the correct size after sintering is obtained. And then exporting the slice file with a certain single-layer thickness for a 3D printer. For the slice file, the slice file is a format file which is commonly used by a 3D printer and can be identified, and is not described herein again. The individual layer thickness of the slice file may be between 15 microns and 100 microns. In this embodiment, the slice file has a single layer thickness of 50 microns.
In STEP103, the photo-curing 3D printer may be a Digital Light Projection (DLP) ceramic 3D printer with a sunken structure, and the Light source wavelength is 365nm to 410nm. In this embodiment, the light source wavelength of the photocuring 3D printer is 385nm, the horizontal resolution is 4K (3840 × 2160 pixels), the projection horizontal resolution is 65 microns, and the forming breadth is 249.6mm × 140.4mm, so as to ensure high-precision realization of fine pores in the ceramic arm during the forming process. The ceramic slurry is photosensitive alumina ceramic slurry with the density of more than or equal to 2.63g/cm 3 Which contains 55 to 58 volume percent of high-purity alumina (Al) 2 O 3 ) Ceramic powder of Al 2 O 3 The purity of the powder is more than 99.9 percent, and the balance is organic components such as photosensitive resin, dispersant and the like. Of course, it is contemplated that for different quality ceramic arms, other parameters of the photosensitive alumina ceramic slurry may be selected, and are not listed here.
In STEP104, the set parameters such as the printing layer thickness, the exposure light intensity, and the exposure time can be set according to actual needs. In this embodiment, the thickness of the printing layer is set to 50 μm, which is the same as the thickness of the sliced layer, and the exposure condition is that the light intensity is not less than 4mw/cm 2 The exposure time is less than or equal to 10s, and more preferably is 4mw/cm 2 ～7s，8mw/cm 2 3s and 16mw/cm 2 And the optimal process windows of about 0.5s can ensure the printing efficiency and the interlayer bonding strength of the green body under the condition, realize lower residual stress in the green body and favorably avoid the defect formation in the subsequent binder removal sintering process.
In STEP105, the cleaning liquid used may be alcohol, pure water, or the like, and the number of cleaning times is 3 to 5. Meanwhile, the air gun can be used for flushing the internal air passage and the small surface hole in the ceramic arm, and the flushing method is the prior art in the 3D printing technology and is not described herein again.
In STEP STEP106, in the degreasing process, the temperature rising rate of the discharged glue is 0.1-5 ℃/min, the highest temperature is 500 ℃, and the heat preservation time is 1h. In the high-temperature sintering process, the sintering temperature rise rate is 5-10 ℃/min, the sintering temperature is 1650 ℃, and the heat preservation time is 2h.
Compared with the prior art, the integrated rapid 3D printing manufacturing method of the ceramic arm realizes the integrated manufacturing of the ceramic arm through photocuring 3D printing forming, the method comprises the steps of firstly combining a top plate and a bottom plate of a traditional ceramic arm into a 3D model of the ceramic arm through computer software, then enabling the size direction of the minimum length, the minimum width, the minimum middle height and the minimum height of the 3D model to be parallel to the Z-axis direction of a building platform, then multiplying the amplification factors in the three directions of X, Y, Z of the 3D computer model, then leading out a slice file with a certain single-layer thickness, and finally carrying out 3D printing on the slice file through a photocuring 3D printer, thereby manufacturing the ceramic arm. The manufacturing method is far higher than the traditional cutting processing technology in manufacturing cost and efficiency, the manufactured integrated ceramic arm does not need additional polymer bonding and fastening, the air tightness problem does not exist, and the service life of the ceramic arm in the extreme environment in the cavity can be greatly prolonged. In addition, in the face of continuous upgrading iteration of semiconductor processing equipment, the high-precision rapid preparation method enables customization design change of ceramic arm products to be faster and easier to execute, and structure optimization of the ceramic arm can be realized.
The first embodiment is as follows:
f type ceramic arm A (left)
1. According to two-dimensional drawings of a top plate and a bottom plate of the F-shaped ceramic arm A (left), three-dimensional modeling is carried out by using CAD software to obtain an integrated 3D model of the F-shaped ceramic arm A (left); adjusting the 3D model of the F-shaped ceramic arm A (left), enabling the thickness direction of the model to be parallel to the Z-axis direction of the printer construction platform, and adding a model amplification coefficient: x-direction magnification factor: 118.02%, a Y-direction amplification factor of 117.24% and a Z-direction amplification factor of 120.25%, and deriving an F-shaped ceramic arm A (left) slice file with a single-layer thickness of 50 micrometers;
2. adding the photosensitive alumina ceramic slurry into a material cylinder of a CeramPlus DLP 4K ceramic 3D printer, introducing a slice file of an F-shaped ceramic arm A (left) into photocuring 3D printer control software, setting the thickness of a printing layer to be 50 micrometers, and setting the exposure light intensity to be 8mw/cm 2 Single layer exposure time 3s, printing was started. After absorbing ultraviolet light, the slurry is printed layer by layer into a solid state, and an integrated F-shaped ceramic arm A (left) green body with a surface through hole and an internal air passage structure is finally formed after 24 min;
3. putting the prepared integrated F-shaped ceramic arm A (left) printing green body into special cleaning liquid, and cleaning redundant uncured slurry;
4. and (3) putting the cleaned F-shaped ceramic arm A (left) printing green body into a muffle furnace, degreasing for 2h at the temperature of 500 ℃ at the speed of 0.25 ℃/min, then heating to 1650 ℃ at the speed of 5 ℃/min, preserving the heat for 2h, and naturally cooling to obtain the integrated F-shaped ceramic arm A (left) with the correct size.
Example two
F type ceramic arm A (Right)
1. According to two-dimensional drawings of a top plate and a bottom plate of the F-shaped ceramic arm A (right), three-dimensional modeling is carried out by using CAD software to obtain an integrated 3D model of the F-shaped ceramic arm A (right);
2. adjusting the 3D model of the F-shaped ceramic arm A (right), enabling the thickness direction of the model to be parallel to the Z-axis direction of the printer construction platform, and adding a model amplification factor: x-direction magnification factor: 118.02%, magnification factor in Y direction 117.24%, magnification factor in Z direction 120.25%, and exporting the obtained single-layer thickness 50-micrometer F-type ceramic arm A (right) slice file;
3. adding the photosensitive alumina ceramic slurry into a material cylinder of a CeramPlus DLP 4K ceramic 3D printer, introducing a slice file of an F-shaped ceramic arm A (right) into photocuring 3D printer control software, setting the printing layer thickness to be 50 micrometers, and setting the exposure light intensity to be 4mw/cm 2 Single layer exposure time 7s, printing was started. The slurry absorbs ultraviolet light and is printed into a solid state layer by layer, and an integrated F-shaped ceramic arm A (right) green body with a surface through hole and an internal air passage structure is finally formed after 27 min;
4. putting the prepared integrated F-shaped ceramic arm A (right) printing green body into special cleaning solution, and cleaning redundant uncured slurry;
5. and (3) putting the cleaned printing green body of the F-shaped ceramic arm A (right) into a muffle furnace, degreasing for 2h at 500 ℃ at the speed of 0.5 ℃/min, then heating to 1650 ℃ at the speed of 10 ℃/min, preserving heat for 2h, and naturally cooling to obtain the integrated F-shaped ceramic arm A (right) with the correct size.
EXAMPLE III
F type ceramic arm B (Right)
1. According to two-dimensional drawings of a top plate and a bottom plate of the F-shaped ceramic arm B (right), three-dimensional modeling is carried out by using CAD software to obtain an integrated 3D model of the F-shaped ceramic arm B (right);
2. adjusting the 3D model of the F-shaped ceramic arm B (right), enabling the thickness direction of the 3D model to be parallel to the Z-axis direction of the printer construction platform, and adding a model amplification factor: x-direction magnification factor: 118.02%, a Y-direction amplification factor of 117.24% and a Z-direction amplification factor of 120.25%, and deriving to obtain a single-layer thickness 50-micrometer F-type ceramic arm B (right) slice file;
3. adding the photosensitive alumina ceramic slurry into a material cylinder of a CeramPlus DLP 4K ceramic 3D printer, introducing a slice file of an F-shaped ceramic arm B (right) into photocuring 3D printer control software, setting the printing layer thickness to be 50 micrometers, and setting the exposure light intensity to be 16mw/cm 2 Single layer exposure time 0.5s, printing was started. The slurry absorbs ultraviolet light and is printed into a solid state layer by layer, and the integrated F-shaped ceramic with the surface through hole and the internal air passage structure is finally formed after 22minArm B (right) green;
4. putting the prepared integrated F-shaped ceramic arm B (right) printing green body into special cleaning solution, and cleaning redundant uncured slurry;
5. and (3) putting the cleaned printing green body of the F-shaped ceramic arm B (right) into a muffle furnace, degreasing for 2h at the temperature of 500 ℃ at the speed of 1 ℃/min, then heating to 1650 ℃ at the speed of 5 ℃/min, preserving heat for 2h, and naturally cooling to obtain the flat integral F-shaped ceramic arm B (right).
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the scope of the present invention, and any modifications, equivalents or improvements that are within the spirit of the present invention are intended to be covered by the following claims.
Claims (10)
1. An integrated rapid 3D printing manufacturing method of a ceramic arm comprises the following steps:
providing size and structure data of a ceramic arm, and establishing a 3D computer model according to the size and structure data;
adjusting the placing posture of the 3D computer model of the ceramic arm on the construction platform to enable the minimum dimension direction of the length, the width and the height to be parallel to the Z-axis direction of the construction platform, and after multiplying the three directions of X, Y, Z of the 3D computer model by amplification factors, deriving to obtain a slice file with a certain monolayer thickness;
providing a photocuring 3D printer and ceramic slurry;
leading the slice file into the photocuring 3D printer, and setting the printing layer thickness, the exposure light intensity and the exposure time to prepare a green body of the ceramic arm;
putting the prepared ceramic arm green body into cleaning fluid, and cleaning redundant uncured slurry;
degreasing the cleaned ceramic arm green body at a certain heating rate, and then sintering at 1620-1680 ℃ at high temperature to obtain the integrated ceramic arm.
2. The integrated rapid 3D printing manufacturing method of ceramic arm according to claim 1, characterized in that: the 3D computer model of ceramic arm is formed by roof portion and bottom plate part combination, the size and the structural data of ceramic arm include the roof size and structural data with the bottom plate size and structural data.
3. The integrated rapid 3D printing manufacturing method of ceramic arm according to claim 2, characterized in that: the top plate is provided with at least one air hole and at least one air groove communicated with the air hole.
4. The integrated rapid 3D printing manufacturing method of ceramic arm according to claim 1, characterized in that: the amplification factors of the 3D computer model in the X-axis direction, the Y-axis direction and the Z-axis direction are 117% -120%,117% -120% and 120% -122% respectively.
5. The integrated rapid 3D printing manufacturing method of ceramic arms as claimed in claim 1, characterized in that: the slice thickness of the slice file is 15-100 microns.
6. The integrated rapid 3D printing manufacturing method of ceramic arm according to claim 1, characterized in that: the ceramic slurry is photosensitive alumina ceramic slurry with the density of more than or equal to 2.63g/cm 3 The high-purity alumina ceramic powder contains 55-58% of high-purity alumina ceramic powder with the volume fraction, the purity of the high-purity alumina ceramic powder is more than 99.9%, and the balance of photosensitive resin and a dispersing agent.
7. The integrated rapid 3D printing manufacturing method of ceramic arm according to claim 1, characterized in that: the photocuring 3D printer is a digital surface projection ceramic 3D printer with a sinking structure, and the wavelength of a light source is 365-405 nm.
8. The integrated rapid 3D printing manufacturing method of ceramic arms as claimed in claim 1, characterized in that: the cleaning liquid is alcohol or pure water, and the cleaning times are 3-5 times.
9. The integrated rapid 3D printing manufacturing method of ceramic arm according to claim 1, characterized in that: the temperature rising rate of the discharged glue is 0.1-5 ℃/min, the highest temperature is 500 ℃, and the heat preservation time is 1h.
10. The integrated rapid 3D printing manufacturing method of ceramic arm according to claim 1, characterized in that: the sintering temperature rise rate is 5-10 ℃/min, the sintering temperature is 1650 ℃, and the heat preservation time is 2h.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1648100A (en) * | 2004-01-20 | 2005-08-03 | 珠海粤科清华电子陶瓷有限公司 | Multilayer ceramic irregular device and its producing method |
| CN110105057A (en) * | 2019-06-26 | 2019-08-09 | 深圳市商德先进陶瓷股份有限公司 | Ceramic arm and preparation method thereof, vacuum suction machinery hand and wafer conveying device |
| US20190255611A1 (en) * | 2018-02-20 | 2019-08-22 | Greenheck Fan Coproration | Metal-based pellet extrusion additive manufacturing system and method of using same |
| CN110407603A (en) * | 2019-08-01 | 2019-11-05 | 上海应用技术大学 | The preparation method of regular controllable porous ceramic |
| CN112537948A (en) * | 2020-12-19 | 2021-03-23 | 西北工业大学 | Photocuring 3D printing manufacturing method of alumina-based ceramic core |
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2022
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1648100A (en) * | 2004-01-20 | 2005-08-03 | 珠海粤科清华电子陶瓷有限公司 | Multilayer ceramic irregular device and its producing method |
| US20190255611A1 (en) * | 2018-02-20 | 2019-08-22 | Greenheck Fan Coproration | Metal-based pellet extrusion additive manufacturing system and method of using same |
| CN110105057A (en) * | 2019-06-26 | 2019-08-09 | 深圳市商德先进陶瓷股份有限公司 | Ceramic arm and preparation method thereof, vacuum suction machinery hand and wafer conveying device |
| CN110407603A (en) * | 2019-08-01 | 2019-11-05 | 上海应用技术大学 | The preparation method of regular controllable porous ceramic |
| CN112537948A (en) * | 2020-12-19 | 2021-03-23 | 西北工业大学 | Photocuring 3D printing manufacturing method of alumina-based ceramic core |
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