CN115639647A - Manufacturing method and equipment of MT (Multi-terminal) ferrule and MT ferrule - Google Patents

Abstract

The invention provides a manufacturing method of an MT (multiple terminal) ferrule, equipment thereof and the MT ferrule, wherein the manufacturing method of the MT ferrule comprises the following steps: providing a glass substrate, wherein the glass substrate is provided with a first end face and a second end face which are opposite; removing stains on the surface of the glass substrate by adopting a laser process; carrying out laser layered processing modification on at least one optical fiber hole to be processed in the glass substrate to form at least one modified area in the glass substrate, wherein each modified area penetrates through the first end face and the second end face; removing the material in each modified region by using a selective etching process to form at least one optical fiber hole in the glass substrate; polishing the hole wall of each optical fiber hole; and chamfering at least one port of the two end ports of each optical fiber hole by adopting a laser process. By utilizing the characteristics of good temperature resistance and small thermal expansion coefficient of the glass substrate, the defects of poor temperature resistance, poor stability under high temperature and the like of the traditional MPO connector can be overcome.

Description

Manufacturing method and equipment of MT (Multi-terminal) ferrule and MT ferrule

Technical Field

The invention relates to the technical field of optical fibers, in particular to a manufacturing method of an MT (multi-terminal) ferrule, equipment thereof and the MT ferrule.

Background

Fiber optic communication has several advantages over wireless communication and other types of communication. First, it has wide transmission frequency band and large communication capacity, and the available bandwidth is about 50000GHz. And the maximum relay distance of an optical fiber communication system consisting of quartz optical fibers can reach more than 200 kilometers. Moreover, the anti-electromagnetic interference is strong, the optical fiber is formed by quartz fusion drawing, belongs to an insulator with high dielectric constant, and is not interfered by the external electromagnetic environment and the artificial high electromagnetic environment, so that the optical fiber can be erected in parallel with the high-voltage transmission line or compounded with the power conductor to form the composite optical cable, and the cost of remote communication is reduced. Besides the characteristics, the optical fiber also has the advantages of strong corrosion resistance, strong radiation resistance, good flexibility, no electric spark, small leakage, strong confidentiality and the like, and can be used in special environments or military.

Because optical fiber communication has incomparable advantages compared with other copper cable and radio communication, the existing communication backbone networks all adopt optical fiber communication. Therefore, as the popularity and demand of optical fiber communication increase, data centers are widely distributed around each backbone communication network, and therefore, the backbone network needs to be connected with the data centers. With the development of optical communication, optical fiber connectors are smaller in size, higher in density, easier to install and more excellent in performance, and the size of an MPO connector (one of optical fiber connectors) and a multimode optical fiber jumper is the same as that of an SC connector (one of optical fiber connectors), but the advantages of large number of cores, small volume, high transmission rate and the like of the MPO connector are multiplied by the number of optical fibers which occupy an important position in optical communication. The MPO connector and the multimode optical fiber jumper have great flexibility and expandability, so that the wiring deployment becomes simpler, and the requirements of network upgrading, capacity expansion and changing in the future can be met. The optical fiber cable is widely applied to optical fiber communication networks, high-density data centers, transmission systems, CATV networks and the like, and the application of the optical fiber cable in active optical cable components, such as AOC, QSFP and the like, is becoming one of the preferred schemes of high-speed communication networks.

Currently, MPO connectors and multimode fiber jumpers are widely applied to connectors inside optical transceivers such as pre-finished ends of trunk optical cables, high-density data centers, optical splitters, 40G/100G, SFPs and QSFPs. The MPO connector consists of a spare part and an MT (multi-terminal interconnect) ferrule, wherein the spare part consists of a dustproof cap, an outer frame sleeve, a PIN (personal identification number), a lining, a spring, a stop ring, a copper part and a tail sheath, most of the spare part and the MT ferrule are made of plastic forming of high polymer materials such as plastics, nylon and the like, and a small part of the spare part and the MT ferrule is made of integral ceramic sintering. The polymer material has processing advantages, but the polymer material has the defects of temperature difference resistance, poor stability of more than 70 ℃, low dielectric constant under high radio frequency environments such as RF and the like, and therefore, the polymer material has high requirements on the stability of the use environment and the electromagnetic environment. The MPO connector integrally sintered and formed by ceramic needs secondary processing, and the size precision of the hole site of the sintered ceramic ferrule is difficult to match with the outer diameter of the optical fiber, so that the optical fiber needs to be fixed by glue, the electromagnetic energy resistance is improved, but the temperature resistance is limited by the temperature resistance stability and the strength reduction of the glue in the temperature resistance aspect, and the temperature bearing capacity is not improved. The exit end of the multimode optical fiber jumper adopts an optical fiber with a gradually-changed refractive index, the refractive index of the optical fiber is gradually changed, and then the port is mechanically cold-processed, so that a miniature focusing lens is formed on the end face, connection is realized by coupling light into the optical fiber through focusing, the cost of the gradually-changed refractive index optical fiber is high, the end face is complex in processing technology and high in cost, and meanwhile, the diameter of the fiber core cannot be too small, so that the mode cannot be suitable for a single-mode optical fiber, and the communication quality is poor.

As described above, several existing MPO connectors have the defects of poor temperature resistance, poor stability under high temperature conditions, and the like, so that the conditions for temperature control in high-density data centers, high-speed communications, and active optical cable assemblies are harsh, and certain limitations are imposed on the use process. The multimode optical fiber jumper wire is manufactured by performing optical fiber cold processing on the graded-index optical fiber, the processing technology is complex, the cost is high, and the multimode optical fiber jumper wire is difficult to process under the single-mode optical fiber, so that the multimode optical fiber jumper wire has poor communication quality due to the instability of a transverse mode and low signal-to-noise ratio in the transmission process of light.

Disclosure of Invention

The invention provides a manufacturing method of an MT (multi-fiber) ferrule, equipment thereof and the MT ferrule, which can overcome the defects of poor temperature resistance, poor stability under a high-temperature condition and the like of the traditional MPO (maximum power output) connector.

In a first aspect, the present invention provides a method for manufacturing an MT ferrule, the MT ferrule being applied to an MPO connector, the method comprising: providing a glass substrate, wherein the glass substrate is provided with a first end face and a second end face which are opposite; removing stains on the surface of the glass substrate by adopting a laser process; carrying out laser layered processing modification on the position of at least one optical fiber hole to be processed in the glass substrate so as to form at least one modified area in the glass substrate, wherein each modified area penetrates through the first end face and the second end face; removing the material in each modified region by using a selective etching process to form at least one optical fiber hole in the glass substrate; polishing the hole wall of each optical fiber hole; and chamfering at least one port of the two end ports of each optical fiber hole by adopting a laser process.

In the scheme, the glass substrate is used as a manufacturing base material of the MT insertion core, the surface of the glass substrate is sequentially subjected to stain removal by adopting a laser process, the laser process is adopted to form the modified zone in the glass substrate, the material of the modified zone is selectively corroded, and then the hole wall of the optical fiber hole is subjected to polishing and chamfering treatment. The laser process is mainly utilized to process the optical fiber holes, so that the processing efficiency and the accuracy of the optical fiber holes are improved. In the MT ferrule process prepared in the mode, by changing the jumper wire preparation process in the aspects of the conventional optical fiber communication network, high-density data center, transmission system, CATV network and the like, the defects of poor temperature resistance, poor stability under high-temperature conditions and the like of the conventional MPO connector can be overcome by utilizing the characteristics of good temperature resistance and small thermal expansion coefficient of the glass substrate, and the problems of poor communication quality and the like caused by the instability of a transverse mode of the multimode optical fiber jumper wire, low signal-to-noise ratio and the like can be improved. The MPO connector has the advantages of greatly improving the temperature bearing capacity of the MPO connector, reducing the strict requirement on the space environment temperature, reducing the operating cost of a high-density data center, high-speed communication and active optical cable assembly, improving the communication quality of the multimode optical fiber jumper, reducing the production cost of the multimode optical fiber jumper and expanding the application range. Thereby meeting the requirements of high-speed interconnection, high signal-to-noise ratio, low cost-effectiveness ratio and the like in the information industry. Meanwhile, the preparation process does not need to carry out special treatment on the end face of the optical fiber, the core number of the optical fiber can be selected at will, the requirement of a device on the environment is reduced, the use and maintenance cost is greatly reduced, and the application range of the device is expanded.

In one embodiment, removing stains from the surface of the glass substrate using a laser process comprises: outputting a nanosecond laser beam by a nanosecond Q-switched pulse laser source; shaping the nanosecond laser beam into a flat-top beam from a Gaussian beam by adopting a telescope system and a mode of a cylindrical mirror and a cylindrical lens group; the flat-top beam is focused on the surface of the glass substrate and scanned over the surface of the glass substrate to remove stains from the surface of the glass substrate. The cleanliness of the surface of the glass substrate is improved, the change of the refractive index of the optical fiber caused by oil stains and dirt on the surface of the glass substrate is prevented, and the laser modification of the next process is influenced by the carbonization of the dirt.

In a specific embodiment, removing stains from the surface of the glass substrate using a laser process further comprises: the exhaust system is adopted to discharge the dust generated by the gasification of the stain to the outside of the processing cavity, and the dust generated by the gasification of the stain is discharged out of the processing cavity in time, so that the dust is prevented from being adhered to the surface of the glass substrate again after being solidified, and the effect of removing the stain is improved.

In a specific embodiment, laser cladding machining modification is performed at least one optical fiber hole location to be machined in a glass substrate to form at least one modified zone within the glass substrate, comprising: outputting a femtosecond laser beam between 300fs and 1000fs by a femtosecond laser source; filtering peripheral stray light of the femtosecond laser beam through a diaphragm; the filtered laser beam sequentially passes through a telescope system and a DOE system so as to convert the femtosecond laser beam into a flat-top beam from a Gaussian beam; focusing the flat-top light beam at the position of an optical fiber hole to be processed in the glass substrate, scanning a plurality of modification lines at the position of each optical fiber hole to be processed in sequence, and extending the plurality of modification lines through cracks to form a modification area; wherein each modification line penetrates through the first end face and the second end face, and the interval between any two modification lines in the plurality of modification lines is 20-50 micrometers. Through the mode, the power density distribution of the light spots after the flat-top treatment is basically uniform, the power density of the unit area of the optical device can be reduced, the damage to the optical device is reduced, meanwhile, the modification of the material at the position of the optical fiber hole to be processed in the glass substrate can be rapidly completed, and a modified area is formed.

In one embodiment, the polishing of the walls of each fiber hole comprises: adding abrasive particles into deionized water to form a water abrasive; a water abrasive is pressed through each fiber hole to polish the hole wall of each fiber hole. The selective etching process is isotropic, the hole walls of the optical fiber holes after selective etching are uneven, and the hole walls of the optical fiber holes are polished by adopting water abrasive to press the optical fiber holes to pass through each optical fiber hole, so that the flatness of the optical fiber holes can be improved to meet the required size.

In a second aspect, the present invention also provides an MT ferrule manufacturing apparatus, where the MT ferrule is applied to an MPO connector, the MT ferrule manufacturing apparatus including: the device comprises a laser cleaning device, a laser modification selective area processing device, a selective corrosion device, a polishing device and a laser chamfering device. The laser cleaning device is used for removing stains on the surface of the glass substrate by adopting a laser process; the glass substrate is provided with a first end face and a second end face which are opposite. The laser modification region selection processing device is used for carrying out laser layering processing modification on at least one optical fiber hole to be processed in the glass substrate so as to form at least one modified region in the glass substrate, wherein each modified region penetrates through the first end face and the second end face. The selective etching device is used for removing the material in each modified area by adopting a selective etching process so as to form at least one optical fiber hole in the glass substrate. The polishing device is used for polishing the hole wall of each optical fiber hole. And the laser chamfering device is used for chamfering at least one port of the ports at the two ends of each optical fiber hole by adopting a laser process.

In the scheme, the glass substrate is used as a manufacturing base material of the MT ferrule, the surface of the glass substrate is sequentially subjected to stain removal by adopting a laser process, the laser process is adopted to form the modified zone in the glass substrate, the material of the modified zone is selectively etched, and then the hole wall of the optical fiber hole is subjected to polishing and chamfering treatment. The laser process is mainly utilized to process the optical fiber holes, so that the processing efficiency and the accuracy of the optical fiber holes are improved. In the MT ferrule process prepared in the mode, by changing the jumper wire preparation process in the aspects of the conventional optical fiber communication network, high-density data center, transmission system, CATV network and the like, the defects of poor temperature resistance, poor stability under high-temperature conditions and the like of the conventional MPO connector can be overcome by utilizing the characteristics of good temperature resistance and small thermal expansion coefficient of the glass substrate, and the problems of poor communication quality and the like caused by the instability of a transverse mode of the multimode optical fiber jumper wire, low signal-to-noise ratio and the like can be improved. The MPO connector has the advantages of greatly improving the temperature bearing capacity of the MPO connector, reducing the strict requirement on the space environment temperature, reducing the operating cost of a high-density data center, high-speed communication and active optical cable assembly, improving the communication quality of the multimode optical fiber jumper, reducing the production cost of the multimode optical fiber jumper and expanding the application range. Thereby meeting the requirements of high-speed interconnection, high signal-to-noise ratio, low cost-effectiveness ratio and the like in the information industry. Meanwhile, the preparation process does not need to carry out special treatment on the end face of the optical fiber, the number of the cores of the optical fiber can be selected at will, the requirement of a device on the environment is reduced, the use and maintenance cost is greatly reduced, and the application range of the device is expanded.

In one particular embodiment, a laser cleaning apparatus includes: nanosecond Q-switched pulse laser light source, a first telescope system, a cylindrical mirror, a cylindrical lens group and a first focusing scanning system. The nanosecond Q-switched pulse laser light source is used for outputting nanosecond laser beams. The first telescope system and the cylindrical lens and cylindrical lens group are used for shaping the nanosecond laser beam into a flat-top beam from a Gaussian beam. The first focusing and scanning system is used for focusing the flat-top light beam on the surface of the glass substrate and scanning the flat-top light beam on the surface of the glass substrate so as to remove stains on the surface of the glass substrate. The cleanliness of the surface of the glass substrate is improved, the change of the refractive index of the optical fiber caused by oil stains and dirt on the surface of the glass substrate is prevented, and the laser modification of the next process is influenced by the carbonization of the dirt.

In a specific embodiment, the laser cleaning apparatus further comprises: and the air draft system is used for discharging dust generated by gasifying the stain out of the processing cavity when the stain on the surface of the glass substrate is removed by adopting a laser process, and preventing the dust generated by gasifying the stain from being adhered to the surface of the glass substrate again after being solidified by discharging the dust out of the processing cavity in time, so that the effect of removing the stain is improved.

In one embodiment, a laser modified selective area processing apparatus comprises: the device comprises a femtosecond laser light source, a diaphragm, a second telescope system, a DOE system and a second focus scanning system. Wherein, the femtosecond laser source is used for outputting femtosecond laser beams between 300fs and 1000 fs. The diaphragm is used for filtering peripheral stray light of the femtosecond laser beam. And the second telescope system and the DOE system are used for converting the filtered femtosecond laser beam into a flat-top beam from a Gaussian beam. The second focusing scanning system is used for focusing the flat-top light beam at the position of an optical fiber hole to be processed in the glass substrate, scanning a plurality of modification lines at the position of each optical fiber hole to be processed in sequence, and forming a modification area by extending the plurality of modification lines through cracks; wherein each modification line penetrates through the first end face and the second end face, and the interval between any two modification lines in the plurality of modification lines is 20-50 micrometers. Through the mode, the power density distribution of the light spots after the flat-top treatment is basically uniform, the power density of the unit area of the optical device can be reduced, the damage to the optical device is reduced, meanwhile, the modification of the material at the position of the optical fiber hole to be processed in the glass substrate can be rapidly completed, and a modified area is formed.

In one specific embodiment, a polishing apparatus includes: water abrasive equipment and pressurization equipment. The water abrasive equipment is used for adding abrasive particles into deionized water to form water abrasive. And the pressurizing device is used for pressurizing the water abrasive to pass through each optical fiber hole so as to polish the hole wall of each optical fiber hole. Because the selective etching process is isotropic, the hole walls of the optical fiber holes after selective etching are uneven, and the water abrasive is adopted to pressurize and pass through each optical fiber hole so as to polish the hole walls of each optical fiber hole, the flatness of the optical fiber holes can be improved, and the required size can be achieved.

In a third aspect, the present invention further provides an MT ferrule, the MT ferrule being applied to an MPO connector, the MT ferrule including: a glass substrate; further comprising: at least one optical fiber hole is manufactured on the glass substrate by adopting any one of the methods for manufacturing the MT inserting core. The method comprises the steps of taking a glass substrate as a manufacturing base material of the MT insertion core, sequentially removing stains on the surface of the glass substrate by adopting a laser process, forming a modified area in the glass substrate by adopting the laser process, selectively corroding the material of the modified area, and then polishing and chamfering the hole wall of the optical fiber hole. The laser process is mainly utilized to process the optical fiber holes, so that the processing efficiency and the accuracy of the optical fiber holes are improved. In the MT ferrule process prepared in the mode, by changing the jumper wire preparation process in the aspects of the conventional optical fiber communication network, high-density data center, transmission system, CATV network and the like, the defects of poor temperature resistance, poor stability under high-temperature conditions and the like of the conventional MPO connector can be overcome by utilizing the characteristics of good temperature resistance and small thermal expansion coefficient of the glass substrate, and the problems of poor communication quality and the like caused by the instability of a transverse mode of the multimode optical fiber jumper wire, low signal-to-noise ratio and the like can be improved. The MPO connector has the advantages of greatly improving the temperature bearing capacity of the MPO connector, reducing the strict requirement on the space environment temperature, reducing the operating cost of a high-density data center, high-speed communication and active optical cable assembly, improving the communication quality of the multimode optical fiber jumper, reducing the production cost of the multimode optical fiber jumper and expanding the application range. Therefore, the method meets the requirements of high-speed interconnection, high signal-to-noise ratio, low cost-to-efficiency ratio and the like in the information industry. Meanwhile, the preparation process does not need to carry out special treatment on the end face of the optical fiber, the core number of the optical fiber can be selected at will, the requirement of a device on the environment is reduced, the use and maintenance cost is greatly reduced, and the application range of the device is expanded.

Drawings

Fig. 1 is a flowchart of a method for manufacturing an MT ferrule according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a device for manufacturing an MT ferrule according to an embodiment of the present invention;

FIG. 3 is a schematic diagram of a process for fabricating a modified region on a glass substrate according to an embodiment of the present invention;

FIG. 4 is a schematic structural diagram of a selective etching apparatus according to an embodiment of the present invention;

FIG. 5 is a schematic structural view of a polishing apparatus according to an embodiment of the present invention;

fig. 6 is a schematic structural diagram of a laser chamfering apparatus according to an embodiment of the present invention;

fig. 7 to 10 are a perspective view and a three-dimensional view of an MT ferrule manufactured by the method for manufacturing an MT ferrule according to an embodiment of the present invention.

Reference numerals:

10-glass substrate 11-modified zone 12-optical fiber hole 13-chamfer

21-corrosion vessel 22-alternating current field driving device 23-internal reflux device

31-auxiliary water guide liquid supply system 32-optical fiber laser processing head 33-spiral motion platform

41-laser cleaning device 42-laser modification selective area processing device

43-selective etching device 44-polishing device 45-laser chamfering device

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

To facilitate understanding of the method for manufacturing the MT ferrule provided in the embodiment of the present invention, an application scenario of the method for manufacturing the MT ferrule provided in the embodiment of the present invention is first described below, where the method is applied to a process for preparing the MT ferrule, where the MT ferrule is a ferrule in an MPO connector. The following describes the method for manufacturing the MT ferrule in detail with reference to the accompanying drawings.

Referring to fig. 1, 2, and 7 to 10, a method for manufacturing an MT ferrule according to an embodiment of the present invention includes:

step10: providing a glass substrate 10, wherein the glass substrate 10 is provided with a first end face and a second end face which are opposite;

step20: removing stains on the surface of the glass substrate 10 by using a laser process;

step30: carrying out laser layered processing modification on the position of at least one optical fiber hole 12 to be processed in the glass substrate 10 so as to form at least one modified zone 11 in the glass substrate 10, wherein each modified zone 11 penetrates through the first end face and the second end face;

step40: removing the material in each modified region 11 using a selective etching process to form at least one fiber hole 12 in the glass substrate 10;

step50: polishing the hole wall of each optical fiber hole 12;

step60: a chamfering 13 is performed at least one of the two end ports of each fiber hole 12 using a laser process.

In the scheme, the glass substrate is used as a manufacturing base material of the MT insertion core, the surface of the glass substrate 10 is sequentially subjected to stain removal by adopting a laser process, the modified zone 11 is formed in the glass substrate 10 by adopting the laser process, the material of the modified zone 11 is selectively etched, and then the hole wall of the optical fiber hole 12 is subjected to polishing and chamfering 13. That is, the fiber holes 12 are processed mainly by using a laser process, thereby improving the processing efficiency and the accuracy of the fiber holes 12. In the process of the MT ferrule prepared in the above manner, by changing the jumper wire preparation process in the aspects of the existing optical fiber communication network, high-density data center, transmission system, CATV network and the like, the defects of poor temperature resistance, poor stability under high-temperature conditions and the like of the existing MPO connector can be solved by utilizing the characteristics of good temperature resistance and small thermal expansion coefficient of the glass substrate 10, and meanwhile, the problems of poor communication quality and the like caused by the instability of a transverse mode of a multimode optical fiber jumper wire, low signal-to-noise ratio and the like can be improved. The MPO connector has the advantages of greatly improving the temperature bearing capacity of the MPO connector, reducing the harsh requirement on the space environment temperature, reducing the operating cost of a high-density data center, high-speed communication and active optical cable components, improving the communication quality of the multimode optical fiber jumper, reducing the production cost of the multimode optical fiber jumper, and expanding the application range. Thereby meeting the requirements of high-speed interconnection, high signal-to-noise ratio, low cost-effectiveness ratio and the like in the information industry. Meanwhile, the preparation process does not need to carry out special treatment on the end face of the optical fiber, the number of the cores of the optical fiber can be selected at will, the requirement of a device on the environment is reduced, the use and maintenance cost is greatly reduced, and the application range of the device is expanded. The above steps will be described in detail with reference to the accompanying drawings.

First, referring to fig. 1, fig. 2 and fig. 7, a glass substrate 10 is provided, wherein the glass substrate 10 has a first end face and a second end face opposite to each other. That is, the glass substrate 10 is provided as a cubic block, and the glass substrate 10 has a first end face and a second end face opposite to each other as two end faces through which the optical fiber holes 12 penetrate. The glass substrate 10 may be a glass substrate such as a fused silica glass substrate 10, a sapphire glass substrate 10, or a BK7 glass substrate 10.

Next, referring to fig. 1 and 2, stains on the surface of the glass substrate 10 are removed using a laser process. Specifically, when the laser process is adopted to remove stains on the surface of the glass substrate 10, the nanosecond Q-switched pulse laser light source can output a nanosecond laser beam firstly; then, a telescope system and a mode of a cylindrical mirror and a cylindrical lens group are adopted to shape the nanosecond laser beam into a flat-top beam from a Gaussian beam, so that the power density of the nanosecond laser beam in unit area is reduced; then, the flat-top beam is focused on the surface of the glass substrate 10 and scanned over the surface of the glass substrate 10 to remove stains from the surface of the glass substrate 10. The cleanness of the surface of the glass substrate 10 is improved, the change of the refractive index of the optical fiber caused by oil stains and dirt on the surface of the glass substrate 10 is prevented, and the laser modification of the next process is influenced by the carbonization of the dirt. The light spot of the Gaussian beam can be shaped into a linear light spot or a square light spot from a point light spot through the cylindrical lens and the cylindrical lens, so that the area of the light spot is increased, and the efficiency of removing stains is improved.

In addition, while removing stains on the surface of the glass substrate 10 by using a laser process, an air draft system can be adopted to discharge dust generated by gasifying the stains to the outside of the processing cavity, and the dust generated by gasifying the stains is discharged from the outside of the processing cavity in time, so that the dust is prevented from adhering to the surface of the glass substrate 10 again after being solidified, and the effect of removing the stains is improved.

Next, referring to fig. 1, 2 and 3, laser delamination processing modification is performed at the position of at least one optical fiber hole 12 to be processed in the glass substrate 10 to form at least one modified region 11 in the glass substrate 10, wherein each modified region 11 penetrates through the first end face and the second end face. The number of the modified zones 11 is equal to the number of cores supported by the MT ferrule. For example, when the MT ferrule is applied to a 128-core MPO connector, the number of the modified regions 11 on the glass substrate 10 is 128. When the MT ferrule is applied to a 64-core MPO connector, the number of the modified regions 11 on the glass substrate 10 is 64. When the MT ferrule is applied to a 32-core MPO connector, the number of the modified regions 11 on the glass substrate 10 is 32. The plurality of modified zones 11 may be arranged in an array within the glass substrate 10 such that the processed fiber holes 12 are arranged in an array within the glass substrate 10.

Specifically, when modifying the position of at least one optical fiber hole 12 to be processed in the glass substrate 10 by laser layer processing to form at least one modified region 11 in the glass substrate 10, the following steps may be adopted:

firstly, the femtosecond laser light source outputs a femtosecond laser beam between 300fs and 1000 fs. The power of the femtosecond laser beam can be 10 w-20 w. The femtosecond laser source can adopt a 1070nm femtosecond laser and output a femtosecond laser beam between 300fs and 1000 fs. Specifically, the femtosecond laser beams with 300fs to 1000fs, such as 300fs, 350fs, 400fs, 500fs, 600fs, 700fs, 800fs, 900fs, 1000fs, etc., can be output.

Then filtering peripheral stray light of the femtosecond laser beam through a diaphragm, wherein the diaphragm can be 6mm, 7mm or 8 mm;

and then, the filtered laser beam sequentially passes through a telescope system and a DOE system so as to convert the femtosecond laser beam into a flat-top beam from a Gaussian beam, thereby reducing the power density of the unit area of the optical device and reducing the damage to the optical device. The telescope system can be a 4-time telescope system or a 5-time telescope system.

Secondly, focusing the flat-top light beam at the position of one optical fiber hole 12 to be processed in the glass substrate 10, scanning a plurality of modification lines at the position of each optical fiber hole 12 to be processed in sequence, and extending the plurality of modification lines through cracks to form a modification area 11; wherein each modification line penetrates through the first end face and the second end face, and the interval between any two modification lines in the plurality of modification lines is 20-50 micrometers. As shown in fig. 3, scribing may be performed on the 3D structure of each optical fiber hole 12 region to be processed on the glass substrate 10, that is, scanning a plurality of modification lines on each modification region 11, and extending the plurality of modification lines through cracks to form one modification region 11. A plurality of modification lines may be spaced to define a modification zone 11 having a circular cross-section. The spacing between any two modification lines may be 20-50 microns. After one modified zone 11 is machined, another fiber hole 12 to be machined is then selectively modified by layer machining.

By the mode, the power density distribution of the light spots after the flat-topping treatment is basically uniform, the power density of the unit area of the optical device can be reduced, the damage to the optical device is reduced, and meanwhile, the modification of the material at the position of the optical fiber hole 12 to be processed in the glass substrate 10 can be quickly completed to form the modified area 11.

Next, referring to fig. 1, 2 and 4, the material in each modified region 11 is removed using a selective etching process to form at least one fiber hole 12 in the glass substrate 10. In one embodiment, the material in each modified zone 11 may be removed in the following manner.

First, the glass substrate 10 is put in a hydrofluoric acid solution with magnetic powder. The mass concentration of the hydrofluoric acid solution can be 30-50%, specifically, the mass concentration of the hydrofluoric acid solution can be any value between 30-50% such as 30%, 35%, 40%, 45%, 50%, etc., so as to improve the efficiency of the selective etching. The particle size of the magnetic powder can be 200-600 meshes, specifically, the particle size of the magnetic powder can be 200-300 meshes, 400 meshes, 500 meshes, 600 meshes and other arbitrary values between 200-600 meshes, so as to improve the flow driving effect of the hydrofluoric acid solution.

Thereafter, as shown in fig. 4, an alternating magnetic field may be applied around the hydrofluoric acid solution carrying the magnetic powder to drive the flow of the hydrofluoric acid solution to selectively etch away the material in each modified region 11 to form at least one optical fiber hole 12 in the glass substrate 10. Specifically, an alternating magnetic field may be applied to the bottom of the hydrofluoric acid solution carrying the magnetic powder to drive the flow of the hydrofluoric acid solution, and selectively etch away the material in each modified region 11 to form at least one fiber hole 12 in the glass substrate 10. The effect of driving the flow of the hydrofluoric acid solution is improved. It should be understood that the application of the ac magnetic field is not limited to the above-described manner of applying the ac magnetic field to the bottom of the hydrofluoric acid solution, and other manners may be used.

By adding the magnetic powder into the hydrofluoric acid solution, after the modified glass substrate 10 is placed into the hydrofluoric acid solution with the magnetic powder, an alternating current magnetic field is applied to the periphery of the hydrofluoric acid solution carrying the magnetic powder to drive the hydrofluoric acid solution to flow, and the material in each modified area 11 is selectively corroded, so that the corrosion forming rate of the modified areas 11 can be increased, the material in the modified areas 11 can be quickly corroded and removed, and the influence degree of isotropy on the unevenness of the hole walls of the optical fiber holes 12 due to overlong corrosion time can be improved.

Next, referring to fig. 1, 2 and 5, the hole wall of each optical fiber hole 12 is subjected to polishing treatment. When polishing the hole wall of each optical fiber hole 12, abrasive particles can be added into deionized water to form a water abrasive; thereafter, a water abrasive is pressed through each of the fiber holes 12 to polish the hole wall of each of the fiber holes 12. Because the selective etching process is isotropic, the hole walls of the optical fiber holes 12 after selective etching are uneven, and the hole walls of each optical fiber hole 12 are polished by pressing the optical fiber holes 12 through water abrasive, the flatness of the optical fiber holes 12 can be improved, and the required size can be achieved.

Specifically, as shown in fig. 5, the hole wall of each optical fiber hole 12 may be polished by rotation using a high-pressure water-conducting fiber with an abrasive. Wherein, the water footpath of high pressure water guide fiber can be less than 20um, and high pressure water guide fiber's supplementary water drain is for doping the deionized water of abradant, improves the precision of polishing. In addition, referring to fig. 5, when the high-pressure water-guide fiber with the abrasive is used to perform the rotary polishing on the hole wall of each fiber hole 12, the fiber hole 12 with the set fiber diameter can be subjected to the rotary polishing by controlling the spiral motion platform 33 bearing the fiber laser head and adopting a spiral processing mode, so that the polishing effect is improved. The set fiber diameter can be 30um-300um, concretely, the set fiber diameter can be any value between 30um-300um such as 30um, 50um, 70um, 80um, 100um, 130um, 150um, 170um, 180um, 200um, 230um, 250um, 270um, 280um, 300um, so that the processed fiber hole 12 can be thinner, and the adaptability of the precision and the application scene is improved. By adopting the high-pressure water-guide optical fiber with the abrasive to carry out rotary polishing on the hole wall of each optical fiber hole 12, the leveling uniformity of the hole wall of each optical fiber hole 12 can be improved, the influence on the propagation of subsequent light in the waveguide is reduced, and the polishing effect and efficiency are also improved.

Next, referring to fig. 1, 2 and 6, chamfering 13 is performed at least one of the two end ports of each optical fiber hole 12 using a laser process. That is, after each optical fiber hole 12 is processed, the optical fiber hole 12 has a certain roughness at the entrance/exit end, which easily damages the coating layer of the optical fiber, resulting in deterioration of moisture resistance and bending property of the optical fiber, and breakage of the optical fiber. At this time, the chamfering 13 may be performed at least one of the two end ports of each of the optical fiber holes 12 using a laser process. The specific mode can adopt a nanosecond Q-switched laser to pass through a telescope system and then pass through a 2D galvanometer to shape a light beam into a spiral rotation or circular ring light, then chamfer 13 is carried out on the inlet and outlet positions of the optical fiber hole 12, the damage of a port to an optical fiber is reduced, and therefore the whole MT inserting core is processed.

In the various embodiments shown above, by using a glass substrate as a manufacturing base material of the MT ferrule, the surface of the glass substrate 10 is sequentially desmeared by a laser process, the modified zone 11 is formed in the glass substrate 10 by the laser process, and the material of the modified zone 11 is selectively etched away, and then the wall of the fiber hole 12 is polished and chamfered 13. Namely, the optical fiber holes 12 are processed mainly by using a laser process, thereby improving the processing efficiency and the accuracy of the optical fiber holes 12. In the process of the MT ferrule prepared in the above manner, by changing the jumper wire preparation process in the aspects of the existing optical fiber communication network, high-density data center, transmission system, CATV network and the like, the defects of poor temperature resistance, poor stability under high-temperature conditions and the like of the existing MPO connector can be solved by utilizing the characteristics of good temperature resistance and small thermal expansion coefficient of the glass substrate 10, and meanwhile, the problems of poor communication quality and the like caused by the instability of a transverse mode of a multimode optical fiber jumper wire, low signal-to-noise ratio and the like can be improved. The MPO connector has the advantages of greatly improving the temperature bearing capacity of the MPO connector, reducing the strict requirement on the space environment temperature, reducing the operating cost of a high-density data center, high-speed communication and active optical cable assembly, improving the communication quality of the multimode optical fiber jumper, reducing the production cost of the multimode optical fiber jumper and expanding the application range. Thereby meeting the requirements of high-speed interconnection, high signal-to-noise ratio, low cost-effectiveness ratio and the like in the information industry. Meanwhile, the preparation process does not need to carry out special treatment on the end face of the optical fiber, the core number of the optical fiber can be selected at will, the requirement of a device on the environment is reduced, the use and maintenance cost is greatly reduced, and the application range of the device is expanded.

Furthermore, an embodiment of the present invention further provides an MT ferrule manufacturing apparatus, where the MT ferrule is applied to an MPO connector, and with reference to fig. 1, fig. 2, and fig. 7 to fig. 10, the MT ferrule manufacturing apparatus includes: a laser cleaning device 41, a laser modification selective area processing device 42, a selective etching device 43, a polishing device 44 and a laser chamfering device 45. The laser cleaning device 41 is used for removing stains on the surface of the glass substrate 10 by using a laser process; wherein the glass substrate 10 has a first end face and a second end face opposite to each other. The laser modification selective area processing device 42 is used for performing laser layered processing modification on the position of at least one optical fiber hole 12 to be processed in the glass substrate 10 so as to form at least one modified area 11 in the glass substrate 10, wherein each modified area 11 penetrates through the first end face and the second end face. The selective etching device 43 is used to remove the material in each modified zone 11 using a selective etching process to form at least one fiber hole 12 in the glass substrate 10. The polishing device 44 is used to polish the hole wall of each optical fiber hole 12. And the laser chamfering device 45 is used for chamfering 13 at least one of the two end ports of each optical fiber hole 12 by adopting a laser process.

In the above scheme, a glass substrate is used as a manufacturing substrate of the MT ferrule, the surface of the glass substrate 10 is sequentially subjected to stain removal by using a laser process, the modified region 11 is formed in the glass substrate 10 by using the laser process, the material of the modified region 11 is selectively etched away, and then the hole wall of the optical fiber hole 12 is subjected to polishing and chamfering 13. Namely, the optical fiber holes 12 are processed mainly by using a laser process, thereby improving the processing efficiency and the accuracy of the optical fiber holes 12. In the process of the MT ferrule prepared in the above manner, by changing the jumper wire preparation process in the aspects of the existing optical fiber communication network, high-density data center, transmission system, CATV network and the like, the defects of poor temperature resistance, poor stability under high-temperature conditions and the like of the existing MPO connector can be solved by utilizing the characteristics of good temperature resistance and small thermal expansion coefficient of the glass substrate 10, and meanwhile, the problems of poor communication quality and the like caused by the instability of a transverse mode of a multimode optical fiber jumper wire, low signal-to-noise ratio and the like can be improved. The MPO connector has the advantages of greatly improving the temperature bearing capacity of the MPO connector, reducing the strict requirement on the space environment temperature, reducing the operating cost of a high-density data center, high-speed communication and active optical cable assembly, improving the communication quality of the multimode optical fiber jumper, reducing the production cost of the multimode optical fiber jumper and expanding the application range. Therefore, the method meets the requirements of high-speed interconnection, high signal-to-noise ratio, low cost-to-efficiency ratio and the like in the information industry. Meanwhile, the preparation process does not need to carry out special treatment on the end face of the optical fiber, the core number of the optical fiber can be selected at will, the requirement of a device on the environment is reduced, the use and maintenance cost is greatly reduced, and the application range of the device is expanded.

Referring to fig. 2, in providing the above-described laser cleaning apparatus 41, the laser cleaning apparatus 41 may include: nanosecond Q-switched pulse laser light source, a first telescope system, a cylindrical mirror and cylindrical lens group and a first focusing and scanning system. The nanosecond Q-switched pulse laser light source is used for outputting nanosecond laser beams. The first telescope system, the cylindrical mirror and the cylindrical lens group are used for shaping the nanosecond laser beam into a flat-topped beam from a Gaussian beam. The first focus scanning system is used for focusing the flat-top light beam on the surface of the glass substrate 10 and scanning the flat-top light beam on the surface of the glass substrate 10 to remove stains on the surface of the glass substrate 10. The cleanness of the surface of the glass substrate 10 is improved, the change of the refractive index of the optical fiber caused by oil stains and dirt on the surface of the glass substrate 10 is prevented, and the laser modification of the next process is influenced by the carbonization of the dirt. Of course, other arrangements may be adopted as the laser cleaning device 41.

In addition, the laser cleaning device 41 may further include: and the air draft system is used for discharging dust generated by gasifying the stains to the outside of the processing cavity when the stains on the surface of the glass substrate 10 are removed by adopting a laser process, and preventing the dust generated by gasifying the stains from being adhered to the surface of the glass substrate 10 again after being solidified by discharging the dust generated by gasifying the stains to the outside of the processing cavity in time, so that the effect of removing the stains is improved.

In providing the laser modification optional region processing device 42, referring to fig. 2 and 3, the laser modification optional region processing device 42 may include: the device comprises a femtosecond laser source, a diaphragm, a second telescope system, a DOE system and a second focus scanning system. Wherein, the femtosecond laser source is used for outputting a femtosecond laser beam between 300fs and 1000 fs. The diaphragm is used for filtering peripheral stray light of the femtosecond laser beam. And the second telescope system and the DOE system are used for converting the filtered femtosecond laser beam into a flat-top beam from a Gaussian beam. The second focusing scanning system is used for focusing the flat-top light beam at the position of one optical fiber hole 12 to be processed in the glass substrate 10, scanning a plurality of modification lines at the position of each optical fiber hole 12 to be processed in sequence, and forming a modification area 11 by extending the plurality of modification lines through cracks; wherein each modification line penetrates through the first end face and the second end face, and the interval between any two modification lines in the plurality of modification lines is 20-50 micrometers. Through the mode, the power density distribution of the light spots after the flat-top treatment is basically uniform, the power density of the unit area of the optical device can be reduced, the damage to the optical device is reduced, meanwhile, the modification of the material at the position of the optical fiber hole 12 to be processed in the glass substrate 10 can be rapidly completed, and the modified area 11 is formed. Of course, other arrangements may be used as the laser modified selective area processing device 42.

When the selective etching apparatus 43 is provided, referring to fig. 2 and 4, the selective etching apparatus 43 may include: an etching container 21, an alternating current electric field driving device 22, and a high-pressure water optical fiber polishing device 44. The etching container 21 is used for containing a hydrofluoric acid solution with magnetic powder and also used for containing the glass substrate 10. The ac electric field driving device 22 is used for applying an ac magnetic field around the hydrofluoric acid solution carrying the magnetic powder, driving the flow of the hydrofluoric acid solution, and selectively etching away the material in each modified region 11 to form at least one optical fiber hole 12 in the glass substrate 10. The high-pressure water guide optical fiber polishing device 44 is used for performing rotary polishing on the hole wall of each optical fiber hole 12 by using high-pressure water guide optical fibers with abrasive materials. By adding magnetic powder into hydrofluoric acid solution, after the modified glass substrate 10 is placed into the hydrofluoric acid solution with the magnetic powder, an alternating current magnetic field is applied to the periphery of the hydrofluoric acid solution carrying the magnetic powder to drive the hydrofluoric acid solution to flow, and materials in each modified area 11 are selectively etched away, so that the rate of corrosion forming of the modified areas 11 can be increased, the materials in the modified areas 11 can be quickly removed by corrosion, and the degree of influence of isotropy on the unevenness of the hole walls of the optical fiber holes 12 due to overlong corrosion time can be improved.

Referring to fig. 4, when the etching container 21 and the ac electric field driving unit 22 are placed, the etching container 21 may be positioned above the ac electric field driving unit 22 so that the ac electric field driving unit 22 applies an ac magnetic field around the hydrofluoric acid solution to drive the flow of the hydrofluoric acid solution from the bottom of the hydrofluoric acid solution. The effect of driving the flow of the hydrofluoric acid solution is improved. It should be understood that the etching container 21 is not limited to the arrangement above the ac electric field driving device 22 shown in fig. 4, and other arrangements may be adopted. In addition, referring to fig. 4, an internal reflux device 23 may be additionally installed inside the etching container 21 to guide the hydrofluoric acid solution to dynamically reflux in the etching container 21, thereby improving the etching effect.

In providing the above-described polishing apparatus 44, referring to fig. 2 and 5, the polishing apparatus 44 may include: a water abrasive device and a pressurizing device. The water abrasive equipment is used for adding abrasive particles into deionized water to form the water abrasive. The pressing device is used for pressing the water abrasive through each optical fiber hole 12 so as to polish the hole wall of each optical fiber hole 12. Because the selective etching process is isotropic, the hole walls of the optical fiber holes 12 after selective etching are uneven, and the hole walls of each optical fiber hole 12 are polished by pressing the optical fiber holes 12 through water abrasive, the flatness of the optical fiber holes 12 can be improved, and the required size can be achieved.

As shown in fig. 5, a polishing device 44, the polishing device 44 is a high pressure water guide fiber polishing device 44, and the high pressure water guide fiber polishing device 44 may include: an auxiliary water guide liquid supply system 31, a fiber laser processing head 32 and a spiral motion platform 33. Wherein the auxiliary aqueous conductive liquid supply system 31 is used for supplying deionized water doped with abrasive. The fiber laser processing head 32 is adapted to receive abrasive-doped deionized water and output a high pressure, abrasive-laden, water-conducting fiber. The spiral motion platform 33 is used for driving the optical fiber laser processing head 32 to perform spiral motion so as to rotationally polish the optical fiber hole 12 with a set fiber diameter by adopting a spiral processing mode, thereby improving the polishing precision and effect. By adopting the high-pressure water-guide optical fiber with the abrasive to carry out rotary polishing on the hole wall of each optical fiber hole 12, the leveling uniformity of the hole wall of each optical fiber hole 12 can be improved, the influence on the propagation of subsequent light in the waveguide is reduced, and the polishing effect and efficiency are also improved.

In addition, an embodiment of the present invention further provides an MT ferrule, where the MT ferrule is applied to an MPO connector, and referring to fig. 7 to 10, the MT ferrule includes: a glass substrate 10; further comprising: at least one optical fiber hole 12 is manufactured on the glass substrate 10 by any one of the above-mentioned methods for manufacturing an MT ferrule. The manufacturing method comprises the steps of taking a glass substrate as a manufacturing base material of the MT insertion core, sequentially removing stains on the surface of the glass substrate 10 by adopting a laser process, forming a modified zone 11 in the glass substrate 10 by adopting the laser process, selectively etching off the material of the modified zone 11, and then polishing and chamfering 13 the hole wall of an optical fiber hole 12. Namely, the optical fiber holes 12 are processed mainly by using a laser process, thereby improving the processing efficiency and the accuracy of the optical fiber holes 12. In the process of the MT ferrule prepared in the above manner, by changing the jumper wire preparation process in the aspects of the existing optical fiber communication network, high-density data center, transmission system, CATV network and the like, the defects of poor temperature resistance, poor stability under high-temperature conditions and the like of the existing MPO connector can be solved by utilizing the characteristics of good temperature resistance and small thermal expansion coefficient of the glass substrate 10, and meanwhile, the problems of poor communication quality and the like caused by the instability of a transverse mode of a multimode optical fiber jumper wire, low signal-to-noise ratio and the like can be improved. The MPO connector has the advantages of greatly improving the temperature bearing capacity of the MPO connector, reducing the strict requirement on the space environment temperature, reducing the operating cost of a high-density data center, high-speed communication and active optical cable assembly, improving the communication quality of the multimode optical fiber jumper, reducing the production cost of the multimode optical fiber jumper and expanding the application range. Thereby meeting the requirements of high-speed interconnection, high signal-to-noise ratio, low cost-effectiveness ratio and the like in the information industry. Meanwhile, the preparation process does not need to carry out special treatment on the end face of the optical fiber, the core number of the optical fiber can be selected at will, the requirement of a device on the environment is reduced, the use and maintenance cost is greatly reduced, and the application range of the device is expanded.

The above description is only for the specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. A method of manufacturing an MT ferrule to be applied to an MPO connector, comprising:

providing a glass substrate, wherein the glass substrate is provided with a first end face and a second end face which are opposite;

removing stains on the surface of the glass substrate by adopting a laser process;

carrying out laser layered processing modification on at least one optical fiber hole to be processed in the glass substrate to form at least one modified area in the glass substrate, wherein each modified area penetrates through the first end face and the second end face;

removing the material in each modified region by using a selective etching process to form at least one optical fiber hole in the glass substrate;

polishing the hole wall of each optical fiber hole;

and chamfering at least one port of the two end ports of each optical fiber hole by adopting a laser process.

2. The method of manufacturing according to claim 1, wherein the removing stains from the surface of the glass substrate using a laser process comprises:

outputting a nanosecond laser beam by a nanosecond Q-switched pulse laser source;

shaping the nanosecond laser beam into a flat-top beam from a Gaussian beam by adopting a telescope system and a mode of a cylindrical mirror and a cylindrical lens group;

focusing the flat-top light beam on the surface of the glass substrate, and scanning the flat-top light beam on the surface of the glass substrate to remove stains on the surface of the glass substrate.

3. The method of manufacturing according to claim 2, wherein the removing stains from the surface of the glass substrate using the laser process further comprises:

and an air draft system is adopted to discharge the dust generated by the gasification of the stains to the outside of the processing cavity.

4. The manufacturing method according to claim 1, wherein the modifying the laser delamination machining at the location of the at least one optical fiber hole to be machined in the glass substrate to form at least one modified zone in the glass substrate comprises:

outputting a femtosecond laser beam between 300fs and 1000fs by a femtosecond laser source;

filtering peripheral stray light of the femtosecond laser beam through a diaphragm;

sequentially passing the filtered laser beam through a telescope system and a DOE system to convert the femtosecond laser beam into a flat-top beam from a Gaussian beam;

focusing the flat-top light beam at the position of an optical fiber hole to be processed in the glass substrate, scanning a plurality of modification lines at the position of each optical fiber hole to be processed in sequence, and extending the plurality of modification lines through cracks to form the modification area; wherein each modification line penetrates through the first end face and the second end face, and the interval between any two modification lines in the plurality of modification lines is 20-50 micrometers.

5. The method of manufacturing of claim 1, wherein said polishing the walls of each fiber hole comprises:

adding abrasive particles into deionized water to form a water abrasive;

the water abrasive is pressed through each fiber hole to polish the hole wall of each fiber hole.

6. An MT ferrule manufacturing apparatus, the MT ferrule being applied to an MPO connector, the apparatus comprising:

the laser cleaning device is used for removing stains on the surface of the glass substrate by adopting a laser process; wherein the glass substrate has first and second opposing end faces;

the laser modification region selection processing device is used for carrying out laser layered processing modification on the position of at least one optical fiber hole to be processed in the glass substrate so as to form at least one modified region in the glass substrate, wherein each modified region penetrates through the first end face and the second end face;

a selective etching device for removing the material in each modified zone by using a selective etching process to form at least one optical fiber hole in the glass substrate;

the polishing device is used for polishing the hole wall of each optical fiber hole;

and the laser chamfering device is used for chamfering at least one port of the ports at the two ends of each optical fiber hole by adopting a laser process.

7. The manufacturing apparatus of claim 6, wherein the laser cleaning device comprises:

the nanosecond Q-switched pulse laser light source is used for outputting a nanosecond laser beam;

the first telescope system, the cylindrical mirror and the cylindrical lens group are used for shaping the nanosecond laser beam into a flat-top beam from a Gaussian beam;

and the first focusing and scanning system is used for focusing the flat-top light beam on the surface of the glass substrate and scanning the flat-top light beam on the surface of the glass substrate so as to remove stains on the surface of the glass substrate.

8. The manufacturing apparatus of claim 6, wherein the laser modified selective processing device comprises:

the femtosecond laser source is used for outputting a femtosecond laser beam between 300fs and 1000 fs;

the diaphragm is used for filtering peripheral stray light of the femtosecond laser beam;

the second telescope system and the DOE system are used for converting the filtered femtosecond laser beam into a flat-top beam from a Gaussian beam;

the second focusing scanning system is used for focusing the flat-top light beam at the position of one optical fiber hole to be processed in the glass substrate, scanning a plurality of modification lines at the position of each optical fiber hole to be processed in sequence, and extending the plurality of modification lines through cracks to form the modified area; wherein each modification line penetrates through the first end face and the second end face, and the interval between any two modification lines in the plurality of modification lines is 20-50 micrometers.

9. The manufacturing apparatus according to claim 6, wherein the polishing means comprises:

the water abrasive equipment is used for adding abrasive particles into deionized water to form water abrasive;

and the pressurizing device is used for pressurizing the water abrasive to pass through each optical fiber hole so as to polish the hole wall of each optical fiber hole.

10. An MT ferrule to be applied to an MPO connector, comprising:

a glass substrate;

the method of manufacturing an MT ferrule according to any one of claims 1 to 5, wherein at least one optical fiber hole is manufactured in said glass substrate.

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