CN115629635A - Multi-mode composite ultra-precise temperature control device - Google Patents
Multi-mode composite ultra-precise temperature control device Download PDFInfo
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- CN115629635A CN115629635A CN202211218942.8A CN202211218942A CN115629635A CN 115629635 A CN115629635 A CN 115629635A CN 202211218942 A CN202211218942 A CN 202211218942A CN 115629635 A CN115629635 A CN 115629635A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
Abstract
The multi-mode composite ultra-precise temperature control device belongs to the technical field of microenvironment temperature control equipment and comprises a sealing box and a core heating component arranged on the inner side of the sealing box; a plurality of groups of radiation convection dual-mode composite temperature control mechanisms are arranged on the inner side wall of the sealing box, and the radiation convection dual-mode composite temperature control mechanisms regulate and control the temperature of the inner side of the sealing box; a monitoring assembly for monitoring the environment inside the sealing box is arranged inside the sealing box; and a controller is arranged on the outer side of the seal box, acquires the measurement result of the monitoring assembly, and controls the radiation-convection dual-mode composite temperature control mechanism and the cooling assembly to adjust the temperature of the inner side of the seal box based on the measurement result. The composite control of the ambient temperature inside the seal box is realized through the radiation convection dual-mode composite temperature control mechanism and the cooling assembly.
Description
Technical Field
The invention belongs to the technical field of microenvironment temperature control equipment, and particularly relates to a multimode composite ultra-precise temperature control device.
Background
With the continuous improvement of ultra-precision machining and measurement levels, the disturbance of environmental parameters such as temperature, humidity, pressure, cleanliness and the like becomes a key factor for restricting the improvement of precision and performance of ultra-precision machining equipment and measurement instruments. The ultra-precise manufacturing equipment such as ultra-precise instruments such as a scanning tunnel microscope and the like and a photoetching machine and the like has extremely high technical density and complexity, and all key indexes reach the limit of the capability of the prior art, thereby representing the highest level of the current measurement and processing manufacture. Ultra-precise environmental control becomes a key technology at the core of such equipment.
The traditional temperature control mode only considers the dominant heat transfer mode, and other heat transfer modes are not paid corresponding attention. When the temperature of circulating water is controlled, only the function of heat conduction is considered (Zhao Yiwen. Research on immersion high-precision temperature control technology based on active disturbance rejection control, university of science and technology in Huazhong, 2107.); the temperature control of the gas bath gas only takes the thermal convection into consideration (Zhao Jiangjun. Photoetching machine internal gas temperature control model and algorithm research 2107. University of science and technology in china). The single temperature control mode is more and more difficult to meet the requirements of industrial production and other occasions, and the neglected heat transfer mode becomes an important factor for restricting the temperature control precision. Therefore, the temperature control precision is difficult to meet the requirement of ultra-precise temperature control.
At the end of the last century, in order to meet the measurement requirements of the nano-device and lsi manufacturing industries, the MOLECULAR measurement machine developed by NIST employs a vacuum temperature control scheme that inhibits the natural convection of air, a copper housing covered by a resistance heating wire surrounds a measurement core, and the surfaces of the housing and the measurement core are plated with matte gold to maintain the stability of the radiation coupling therebetween (1.kramar j, jun j, penzes w, et al. He MOLECULAR mechanical measurement machine.2008. 2.Us Department of commerce, NIST nano-meter Resolution with the measurement machine.measurement science &. Technology). The scheme can realize the temperature control precision superior to +/-0.001 ℃, but the response time of the scheme is up to several days or even several months, and the requirement of ultra-precision machining and manufacturing on efficiency is difficult to meet.
In the prior art, a patent document of application number 202110647092.2 discloses a high-precision temperature control device for cross radiation convection, which adopts a temperature control mode of cross radiation convection, wherein liquid from a water chilling unit is delivered to a water separator after passing through a first fine adjustment heating device and a second fine adjustment heating device, and the water separator uniformly delivers the liquid to the cross radiation convection device. The flow of the cross radiation convection device is adjusted through the frequency conversion of the water pump, the cross radiation convection device is automatically adaptive to the change of a heat source on the measuring platform, the heat exchange efficiency is improved, the temperature of the water collector is accurately controlled through the fine adjustment heating device, and the purpose of controlling and adjusting the temperature of the measuring platform is achieved. However, the scheme does not provide enough details of radiation convection temperature control, and according to the description of the invention content, convection and radiation power of the device cannot be completely decoupled, so that the advantages of high-precision temperature control of heat radiation and rapid temperature control of heat convection cannot be exerted. The patent document 201810171584.7 discloses a temperature control method of atmospheric pressure heat radiation: the coarse control Wen Gatong is used for controlling the temperature of the precise inner temperature control cylinder in a heat radiation coupling way, and the precise inner temperature control cylinder is used for controlling the internal temperature in a heat radiation way. The method does not actually exert the high-precision temperature control effect of a thermal radiation temperature control mode, and the temperature control effect of natural convection under normal pressure cannot be ignored. Therefore, the heat exchange between the coarse temperature control clamping barrel and the precise inner temperature control barrel is a composite form of heat radiation and heat convection, and the two temperature control modes do not adopt decoupling measures and do not exert the advantage of high heat radiation temperature control precision.
In conclusion, in the face of the increasingly high requirements of ultra-precise instruments and equipment and large-scale ultra-precise manufacturing equipment on the control of micro-environmental parameters, the traditional single temperature control mode has low precision and longer adjustment time; the composite temperature control mode does not decouple the temperature control power, and cannot exert the advantages of the temperature control precision and efficiency of the composite temperature control mode. The above-mentioned techniques can not meet the requirements of precision and efficiency of ultra-precision processing equipment and measuring instrument.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides a multi-mode composite ultra-precise temperature control device, which can realize the rapid cooling of a core heating component through a cooling component and realize the composite control of the ambient temperature inside a sealing box by matching with a radiation convection dual-mode composite temperature control mechanism.
(II) technical scheme
In order to achieve the above object, an embodiment of the present application provides a multi-mode composite ultra-precise temperature control device, including a sealed box and a core heating component disposed inside the sealed box; a plurality of groups of radiation convection dual-mode composite temperature control mechanisms for regulating and controlling the temperature of the inner side of the sealing box are arranged on the inner side wall of the sealing box; a monitoring assembly for monitoring the environment inside the sealing box is arranged inside the sealing box; and a controller is arranged on the outer side of the seal box, is communicated with the monitoring assembly and controls the radiation-convection dual-mode composite temperature control mechanism to adjust the temperature on the inner side of the seal box based on the measurement result of the monitoring assembly.
The radiation convection dual-mode composite temperature control mechanism comprises a heat insulation frame, wherein a plurality of mounting ports are formed in the heat insulation frame in an array mode; the radiation plates and the convection assemblies are respectively arranged in different mounting ports; the radiation plates and the convection assemblies are arranged in a staggered mode at intervals.
The convection assembly comprises a convection heat exchanger detachably connected to the mounting opening and a convection fan mounted on one side of the convection heat exchanger; the convection heat exchanger comprises a mounting frame detachably connected to the mounting opening; a plurality of water cooling pipelines are formed at the inner side of the mounting rack at intervals, a convection medium outflow pipe is arranged at the upper end of the mounting rack, and a convection medium inflow pipe is arranged at the lower end of the mounting rack; the convection medium inflow pipe and the convection medium outflow pipe are respectively communicated with the water cooling pipeline.
A dehumidification mechanism and a filtering and purifying mechanism are arranged on the inner side of the sealing box; the dehumidification mechanism comprises a dehumidifier and a dehumidification drainage pipeline which are arranged on the inner side of the seal box, one end of the dehumidification drainage pipeline is connected with the dehumidifier, and the other end of the dehumidification drainage pipeline is connected with the outside of the seal box; the filtration purification mechanism including set up in the inboard filtration purification host computer and the dust exhaust pipe of seal box, dust exhaust pipe one end is connected the filtration purification host computer, the other end is connected outside the seal box.
The monitoring assembly comprises a temperature sensor, a humidity sensor, a pressure sensor and an environment cleanliness sensor.
A cooling assembly for refrigerating the core heating component is arranged on the sealing box; the cooling assembly comprises a cooling medium inlet pipe, a cooling medium outlet pipe and a circulating coil for cooling the core heating component; the two ends of the circulating coil pipe are respectively connected with the cooling medium inlet pipe and the cooling medium outlet pipe; the other ends of the cooling medium inlet pipe and the cooling medium outlet pipe are respectively positioned outside the seal box; a temperature monitoring sensor for monitoring the temperature of the cooling medium is provided in the cooling medium outflow pipe.
Preferably, the outer side of the sealing box is wrapped with a heat insulation layer.
(III) advantageous effects
The invention provides a multi-mode composite ultra-precise temperature control device, wherein when the device is used, a cooling assembly can realize rapid cooling of a core heating component, and a radiation convection dual-mode composite temperature control mechanism is matched to realize composite control of the ambient temperature inside a sealing box.
The invention adopts a temperature control method combining various heat transfer modes, and improves the temperature control precision and efficiency. A radiation convection dual-mode composite temperature control mechanism is arranged in a sealing box of the device to perform multi-mode temperature control. When the cooling assembly is used, the core heating components are rapidly cooled in a heat conduction mode, heat from the core heating components is carried to the outside of the sealing box by circulating water to be dissipated, and the long-term stable cooling effect of the cooling assembly is guaranteed. Meanwhile, the convection heat exchanger controls the temperature of air flowing through the convection heat exchanger, and the convection fan enables the air to flow through the convection heat exchanger and sends the temperature-controlled air to a temperature-controlled area. The radiation plate controls the temperature of the radiation plate in an electric temperature control mode, so that the radiation temperature control power of the radiation plate is controlled. The radiation convection dual-mode composite temperature control mechanism is arranged in an alternate and repeated mode, and can ensure the uniformity of a temperature field of a controlled area, so that the composite temperature control effect is improved. The problem of current instrument equip single accuse temperature mode be difficult to compromise accuse temperature precision and efficiency is solved.
The invention adopts a reasonable measure of decoupling the temperature control power and ensures the temperature control precision and efficiency of a composite temperature control mode. The conduction cooling power of the cooling assembly in the sealing box of the device is controlled by the cooling assembly, the radiation power on the radiation plate is controlled by the radiation plate, the convection power in the convection assembly is controlled by the convection assembly, and the temperature control of the cooling assembly, the radiation plate and the convection assembly are mutually independent. The conduction cooling effect of the cooling component mainly depends on the circulating cooling medium, and temperature crosstalk cannot be formed between the cooling component and the dual-mode composite temperature control mechanism. The radiation plate and the convection assembly are isolated by the heat insulation frame between the radiation plate and the convection assembly, so that the crosstalk of the temperature between the radiation plate and the convection assembly on the radiation convection dual-mode composite temperature control mechanism can be avoided, the problem that the radiation and convection composite temperature control power is difficult to decouple is solved, the good effect that different temperature control modes are complementary in the core temperature control area is realized, and the problems that the temperature control precision and efficiency of the composite temperature control mode are difficult to effectively exert due to the fact that the temperature control power of different temperature control modes in the composite temperature control mode of the existing instrument and equipment is difficult to decouple and interfere with each other are solved.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a multimode composite ultra-precise temperature control device according to the present invention;
FIG. 2 is a schematic diagram of a protruded radiation convection dual-mode composite temperature control mechanism in a multi-mode composite ultra-precise temperature control device according to the present invention;
fig. 3 is a front view of a protruded convection component in a protruded radiation convection dual-mode composite temperature control mechanism in the multi-mode composite ultra-precise temperature control device according to the present invention;
FIG. 4 is a side view of a protruded convection component in a protruded radiation convection dual-mode composite temperature control mechanism in a multi-mode composite ultra-precise temperature control device according to the present invention;
description of part numbers in the figures: 100 sealed boxes, 110 controllers, 120 insulating layers, 200 core heat generating components, 300 radiation convection dual-mode composite temperature control mechanisms, 310 heat insulation frames, 320 radiation plates, 330 convection components, 331 convection heat exchangers, 331a mounting rack, 331b water cooling pipelines, 331c convection medium outflow pipes, 331d convection medium inflow pipes, 332 convection fans, 400 monitoring components, 500 dehumidifying mechanisms, 600 filtering and purifying mechanisms, 700 cooling components, 710 cooling medium inflow pipes, 720 cooling medium outflow pipes and 730 temperature monitoring sensors.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
Examples
The invention provides a multimode composite ultra-precise temperature control device, which comprises a sealed box 100 and a core heating component 200 arranged on the inner side of the sealed box 100, and is shown in figures 1-4. Wherein, the core part 200 that generates heat is the region and the part that require high to environmental parameter in the super precision measurement in the seal box 100, the manufacturing equipment, and the instrument equipment work is seriously influenced to generate heat, and this scheme can generate heat the stable accuse temperature of part 200 to the core. It will be appreciated that the enclosure 100 is relatively sealed, leaving a wiring hole or other mounting hole for the equipment to be connected to the core heat generating component 200, and a sealing structure is provided at the location of the wiring hole or mounting hole.
Specifically, a plurality of sets of radiation-convection dual-mode composite temperature control mechanisms 300 are arranged on the inner side wall of the seal box 100, and the radiation-convection dual-mode composite temperature control mechanisms 300 regulate and control the temperature of the inner side of the seal box 100. The inner side of the seal box 100 is provided with a monitoring assembly 400 for monitoring the environment inside the seal box 100; the controller 110 is arranged outside the sealed box 100, and the controller 110 obtains the measurement result of the monitoring assembly 400 and controls the radiation-convection dual-mode composite temperature control mechanism 300 to adjust the temperature inside the sealed box 100 based on the measurement result.
The radiation-convection dual-mode composite temperature control mechanism 300 comprises a heat insulation frame 310, wherein a plurality of mounting openings are formed in the heat insulation frame 310 in an array manner; the radiation plate 320 and the convection assembly 330 are respectively arranged in different installation openings; the radiation plates 320 and the convection assemblies 330 are arranged in a staggered manner at intervals, and are insulated by the heat insulation frame 310, so that the temperature crosstalk between the radiation plates 320 and the convection assemblies 330 is avoided, and the independence of respective temperature control of the radiation plates 320 and the convection assemblies 330 on the radiation-convection dual-mode composite temperature control mechanism 300 is maintained.
The convection assembly 330 includes a convection heat exchanger 331 detachably coupled at the mounting port and a convection fan 332 installed at one side of the convection heat exchanger 331.
The convection heat exchanger 331 includes a mounting bracket 331a detachably coupled to the mounting opening; a plurality of water cooling channels 331b are formed at intervals inside the mounting frame 331a, a convection medium outlet pipe 331c is provided at an upper end of the mounting frame 331a, and a convection medium inlet pipe 331d is provided at a lower end of the mounting frame 331a; the convection medium inflow tube 331d and the convection medium outflow tube 331c communicate with the water-cooled duct 331b, respectively. It can be understood that a circulating cooling medium temperature control device connected to the convection medium inflow pipe 331d and the convection medium outflow pipe 331c is disposed outside the hermetic container 100, and the circulating cooling medium temperature control device and the convection heat exchanger 331 form a stable closed-loop backflow structure.
The radiation plate 320 controls the temperature thereof in an electric temperature control manner, and participates in the control of the microenvironment in the seal box 100 in a thermal radiation manner, and the convection heat exchanger 331 controls the temperature by using a circulating cooling medium, so that the circulating cooling medium with adjustable temperature enters the water cooling pipeline 331b through the convection medium inflow pipe 331d, and finally flows out through the convection medium outflow pipe 331 c. In the process, the convection fan 332 operates, and the air passes through the convection heat exchanger 331 and is controlled in temperature, and participates in the control of the microenvironment in the seal box 100 in a convection manner. The two are cut apart through thermal-insulated frame 310, can solve radiation convection bimodulus composite temperature control mechanism 300 on radiation accuse temperature power and convection current accuse temperature power intercoupling problem to can be complementary with different accuse temperature mode advantages in the regional accuse temperature of core component 200 place, solved the problem that different accuse temperature powers of current instrument equipment composite temperature control mode are difficult to decoupling zero, mutual interference, guaranteed the control by temperature change precision and the efficiency of composite temperature control mode.
The inner side of the seal box 100 is provided with a dehumidifying mechanism 500 and a filtering and purifying mechanism 600; the air inside the cabinet can be further filtered and purified by the dehumidifying mechanism 500 and the filtering and purifying mechanism 600. In ultra-precise environmental control, temperature and humidity are coupled with each other, and the fluctuation of the humidity directly influences the stability of the temperature.
The dehumidification mechanism 500 comprises a dehumidification host and a dehumidification drainage pipeline, the dehumidification host is located inside the seal box 100, one end of the dehumidification drainage pipeline is connected with the dehumidification host, and the other end of the dehumidification drainage pipeline is connected with the dehumidification host and the outside of the seal box 100. The dehumidification mechanism 500 adopts a semiconductor refrigeration dehumidification mode, air in the seal box 100 is sucked into the dehumidification host under the action of the fan, water vapor in the air is condensed into water and then discharged through the dehumidification drainage pipeline, and the dehumidified air is sent back into the seal box 100 again after being electrically heated and temperature controlled.
The filtering and purifying mechanism 600 comprises a filtering and purifying host and a dust exhaust pipeline, the filtering and purifying host is located inside the seal box 100, one end of the dust exhaust pipeline is connected with the filtering and purifying host, and the other end of the dust exhaust pipeline is connected with the outside of the seal box 100. The filtering and purifying main machine adopts an active and passive compound dust removal mode, and the collected dust can be discharged out of the sealing box 100 through a dust discharge pipeline.
The monitoring assembly 400 includes a temperature sensor, a humidity sensor, a pressure sensor, and an environmental cleanliness sensor. The monitoring assembly 400 sends the measurement results of the environmental parameters and the parameters of the circulating cooling medium to the controller 110, and the controller 110 controls the radiation plate 320, the convection assembly 330, the dehumidification mechanism 500, the filtration and purification mechanism 600 and the cooling assembly 700, so as to realize the efficient control of the environmental temperature inside the sealed box 100 and the temperature of the core heat generating component 200.
A cooling unit 700 for cooling the core heat generating component 200 is provided in the hermetic container 100; the cooling assembly 700 comprises a cooling medium inlet pipe 710, a cooling medium outlet pipe 720 and a circulating coil for cooling the core heat generating component 200; the two ends of the circulation coil are connected to a cooling medium inlet pipe 710 and a cooling medium outlet pipe 720, respectively.
The other ends of the cooling medium inlet pipe 710 and the cooling medium outlet pipe 720 are respectively located outside the hermetic container 100, and it is understood that a mechanism for connecting the cooling medium inlet pipe 710 and the cooling medium outlet pipe 720, controlling the temperature of the cooling medium therein, and providing circulating power is provided outside the hermetic container 100. The cooling medium outflow pipe 720 is provided with a temperature monitoring sensor 730 for monitoring the temperature of the cooling medium.
The cooling assembly 700 and the radiation convection dual-mode temperature control mechanism 300 have a conduction radiation convection multi-mode temperature control mode, and the three are closely matched to finish the targeted control of the temperature in the seal box 100.
The outside of the seal box 100 is wrapped by the heat insulation layer 120, and the interference of the temperature fluctuation outside the seal box 100 on the internal microenvironment of the seal box 100 can be attenuated through the arranged heat insulation layer 120, so that the temperature stability of the inside of the seal box 100 is further improved.
The invention provides a multi-mode composite ultra-precise temperature control device which comprises a sealing box 100, a radiation-convection dual-mode composite temperature control mechanism 300 and a cooling assembly 700, wherein the radiation-convection dual-mode composite temperature control mechanism 300 and the cooling assembly 700 are arranged on the inner side of the sealing box 100, and the cooling assembly 700 can realize rapid cooling of a core heating component 200. Meanwhile, the radiation convection dual-mode composite temperature control mechanism 300 is used for conducting radiation convection multi-mode composite temperature control on the environment temperature in the sealed box 100.
Specifically, the radiation plate 320 that sets up controls self temperature through the mode that adopts electric temperature control to the microenvironment of seal box 100 inboard is controlled to the mode of heat radiation, and the convection current subassembly 330 that sets up carries the air of convection heat exchanger 331 department to the regional of the part 200 that generates heat of core through convection fan 332, and the high accuracy radiation temperature control effect that combines radiation plate 320 carries out the high accuracy accuse temperature to the regional of the part 200 that generates heat of core. The problem of current instrument equip single accuse temperature mode be difficult to improve accuse temperature precision and efficiency simultaneously is solved.
The invention adopts a reasonable measure of decoupling temperature control power and ensures the temperature control precision and efficiency of a composite temperature control mode. The radiation power on the radiation plate 320 in the sealed box of the device is controlled by the radiation plate 320, the convection power in the convection assembly 330 is controlled by the convection assembly 330, the temperature control of the radiation plate 320 and the convection assembly 330 are mutually independent, and the heat insulation frame 310 between the radiation plate 320 and the convection assembly 330 isolates the radiation plate 320 from the convection assembly 330, so that the temperature crosstalk between the radiation plate 320 and the convection assembly 330 on the radiation-convection dual-mode composite temperature control mechanism 300 can be avoided, thereby solving the problem that the radiation and convection temperature control powers are difficult to decouple, realizing the advantage complementation of different temperature control modes in a core temperature control area, and solving the problems that the single temperature control power of the existing instrument and equipment composite temperature control mode is difficult to decouple and interfere with each other, and the temperature control precision and efficiency of the composite temperature control mode.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "front", "rear", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be configured in a specific orientation, and operate, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may include, for example, a fixed connection, a detachable connection, an integral connection, a mechanical connection, an electrical connection, a direct connection, an indirect connection via an intermediate medium, and a communication between two elements. The specific meanings of the above terms in the present invention can be understood in a specific case to those of ordinary skill in the art. The embodiments and features of the embodiments of the present invention may be combined with each other without conflict.
Claims (7)
1. A multi-mode composite ultra-precise temperature control device is characterized in that: comprises a sealed box (100) and a core heating component (200) arranged inside the sealed box (100); a plurality of radiation convection dual-mode composite temperature control mechanisms (300) for regulating and controlling the temperature of the inner side of the seal box (100) are arranged on the inner side wall of the seal box (100); a monitoring assembly (400) for monitoring the environment inside the sealed box (100) is arranged on the inner side of the sealed box (100); the controller (110) is arranged on the outer side of the seal box (100), the controller (110) is communicated with the monitoring assembly (400), and the radiation-convection dual-mode composite temperature control mechanism (300) is controlled to adjust the temperature of the inner side of the seal box (100) based on the measurement result of the monitoring assembly (400).
2. The multimode composite ultra-precise temperature control device according to claim 1, wherein: the radiation convection dual-mode composite temperature control mechanism (300) comprises a heat insulation frame (310), wherein a plurality of mounting openings (311) are formed in the heat insulation frame (310) in an array mode; a radiation plate (320) and a convection assembly (330) are respectively arranged in different mounting openings (311); the radiation plates (320) and the convection assemblies (330) are arranged in a staggered mode at intervals.
3. The multimode composite ultra-precise temperature control device according to claim 2, wherein: the convection assembly (330) comprises a convection heat exchanger (331) detachably connected to the mounting port (311) and a convection fan (332) mounted on one side of the convection heat exchanger (331); the convection heat exchanger (331) comprises a mounting frame (331 a) detachably connected at the mounting port (311); a plurality of water cooling pipelines (331 b) are formed at intervals inside the mounting frame (331 a), a convection medium outflow pipe (331 c) is arranged at the upper end of the mounting frame (331 a), and a convection medium inflow pipe (331 d) is arranged at the lower end of the mounting frame (331 a); the convection medium inflow pipe (331 d) and the convection medium outflow pipe (331 c) are respectively communicated with the water cooling pipe (331 b).
4. The multimode composite ultra-precise temperature control device according to claim 1, wherein: a dehumidifying mechanism (500) and a filtering and purifying mechanism (600) are arranged on the inner side of the sealing box (100); the dehumidifying mechanism (500) comprises a dehumidifier and a dehumidifying drainage pipeline which are arranged on the inner side of the sealing box (100), one end of the dehumidifying drainage pipeline is connected with the dehumidifier, and the other end of the dehumidifying drainage pipeline is connected with the outside of the sealing box (100); the filtering and purifying mechanism (600) comprises a filtering and purifying host and a dust discharging pipeline which are arranged on the inner side of the seal box (100), one end of the dust discharging pipeline is connected with the filtering and purifying host, and the other end of the dust discharging pipeline is connected with the outside of the seal box (100).
5. The multimode composite ultra-precise temperature control device according to claim 1, wherein: the monitoring assembly (400) comprises a temperature sensor, a humidity sensor, a pressure sensor and an environment cleanliness sensor.
6. The multimode composite ultra-precise temperature control device according to claim 1, wherein: a cooling unit (700) for cooling the core heat generating component (200) is provided in the sealed case (100); the cooling assembly (700) comprises a cooling medium inlet pipe (710), a cooling medium outlet pipe (720) and a circulating coil for cooling the core heat generating component (200); the two ends of the circulating coil are respectively connected with the cooling medium inlet pipe (710) and the cooling medium outlet pipe (720); the other ends of the cooling medium inlet pipe (710) and the cooling medium outlet pipe (720) are respectively positioned outside the seal box (100); a temperature monitoring sensor (730) for monitoring the temperature of the cooling medium is provided on the cooling medium outflow pipe (720).
7. The multimode composite ultra-precise temperature control device according to claim 1, wherein: the outer side of the sealing box (100) is wrapped with an insulating layer (120).
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| CN202211218942.8A CN115629635B (en) | 2022-10-07 | 2022-10-07 | Multimode composite ultra-precise temperature control device |
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| CN202211218942.8A CN115629635B (en) | 2022-10-07 | 2022-10-07 | Multimode composite ultra-precise temperature control device |
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| CN115629635A true CN115629635A (en) | 2023-01-20 |
| CN115629635B CN115629635B (en) | 2024-03-22 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115629635B (en) | 2024-03-22 |
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