CN115594168A - Device for preparing graphene - Google Patents
Device for preparing graphene Download PDFInfo
- Publication number
- CN115594168A CN115594168A CN202211340777.3A CN202211340777A CN115594168A CN 115594168 A CN115594168 A CN 115594168A CN 202211340777 A CN202211340777 A CN 202211340777A CN 115594168 A CN115594168 A CN 115594168A
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- heating chamber
- boundary
- frame
- preparing graphene
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 39
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 38
- 238000010438 heat treatment Methods 0.000 claims abstract description 66
- 239000000758 substrate Substances 0.000 claims abstract description 38
- 230000007797 corrosion Effects 0.000 claims description 22
- 238000005260 corrosion Methods 0.000 claims description 22
- 238000007789 sealing Methods 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 48
- 239000010931 gold Substances 0.000 abstract description 48
- 229910052737 gold Inorganic materials 0.000 abstract description 48
- 238000002360 preparation method Methods 0.000 abstract description 9
- 238000001816 cooling Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000003825 pressing Methods 0.000 description 15
- 238000005530 etching Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000003486 chemical etching Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- -1 graphite alkene Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/182—Graphene
- C01B32/184—Preparation
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Nanotechnology (AREA)
- Inorganic Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
The invention relates to the field of graphene manufacturing, in particular to a device for preparing graphene, which comprises a rack, a lifting frame, a lifting block, a gold boundary frame, a gold boundary base, a lower pressure plate, a telescopic rod, a spring I and a heating chamber, wherein the lifting frame and the heating chamber are fixedly connected to the rack; the upper end surface of the gold boundary frame is provided with a stud, and the lower end surface of the gold boundary substrate is provided with a threaded hole matched with the stud; according to the invention, graphene generated on the gold substrate can be automatically moved out of the equipment for cooling, so that the preparation efficiency is improved.
Description
Technical Field
The invention relates to the field of graphene manufacturing, in particular to a device for preparing graphene.
Background
Graphene is separated from graphite for the first time in 2004, and is considered to be a revolutionary material in the future by virtue of excellent optical, electrical and mechanical characteristics, the graphene preparation becomes an interest in material preparation research of various countries, siC can be sublimated in an ultrahigh vacuum high-temperature environment, the remaining C atoms generate graphene on a gold substrate, the existing equipment needs the gold substrate to be naturally cooled in the equipment and then taken out, the cooling time is long, and the preparation efficiency is influenced.
Disclosure of Invention
The invention aims to provide a device for preparing graphene, which can be automatically moved out of equipment for cooling after graphene is generated on a gold boundary substrate, so that the preparation efficiency is improved.
The purpose of the invention is realized by the following technical scheme:
a device for preparing graphene comprises a rack, a lifting frame, a lifting block, a metal boundary frame, a metal boundary base, a lower pressing plate, a telescopic rod, a spring I and a heating chamber, wherein the lifting frame and the heating chamber are fixedly connected to the rack;
the upper end surface of the gold boundary frame is provided with a stud, and the lower end surface of the gold boundary substrate is provided with a threaded hole matched with the stud;
the corrosion bin slides on the rack and is arranged below the metal boundary base, and the rack is fixedly connected to the side face of the lifting frame, and the side face of the rack facing the metal boundary frame is provided with meshing teeth.
Drawings
FIG. 1 is a schematic diagram of the overall structure of an apparatus for preparing graphene;
FIG. 2 is a schematic view of a partial structure of an apparatus for preparing graphene;
FIG. 3 is a first structural schematic diagram of the lifting frame;
FIG. 4 is a structural schematic diagram II of the lifting frame;
FIG. 5 is a first schematic structural diagram of a golden frame;
FIG. 6 is a second schematic structural view of a golden frame;
FIG. 7 is a third schematic structural view of a golden frame;
FIG. 8 is a first schematic structural view of the sliding cover;
FIG. 9 is a second schematic view of the sliding cover;
FIG. 10 is a schematic view of the structure of the sealing plate;
FIG. 11 is a schematic view of the screw structure;
FIG. 12 is a schematic view of a longitudinally moving plate;
FIG. 13 is a schematic view of the construction of the traverse plate.
In the figure:
a frame 101; a crane 102; a lifting block 103; a golden frame 104; a gold boundary substrate 105; a lower platen 106; a telescopic rod I107; a corrosion bin 108; a rack 109; a spring I110; a heating chamber 111;
a telescopic rod II 201; a slide cover 202; a slide rod 203;
a sealing plate 301; a support bar 302; a spring II 303;
a telescopic rod III 401; a screw 402; a fixing plate 403; a holding box 404; a telescopic rod IV 405; a moving plate 406; a traverse plate 407; a telescopic rod V408; a longitudinal movement plate 409; a motor 410; a gear 411.
Detailed Description
As shown in fig. 1-5:
the lifting frame 102 and the heating chamber 111 are both fixedly connected on the frame 101, the lower end surface of the heating chamber 111 is provided with a round through hole, a vertically placed sliding rod is arranged in the lifting frame 102, three surfaces of the lifting frame 102 are respectively provided with a limit long hole, the lifting block 103 slides on the sliding rod in the lifting frame 102, three surfaces of the lifting block 103 are respectively provided with a limit rod, the three limit rods slide in the three limit long holes, wherein the limit rod positioned at the rear part is longer, one end of a spring I110 is fixed on the lower end surface of the lifting block 103, the other end of the spring I110 is fixed in the lifting frame 102, the spring I110 is wound on the sliding rod in the lifting frame 102, one surface of the lifting block 103 without the limit rod is rotatably connected with a gold boundary frame 104, one section of the gold boundary frame 104, which is close to the lifting block 103, is provided with engaging teeth, the upper end of the golden boundary frame 104 is provided with a circular ring baffle, a golden boundary substrate 105 is arranged in the circular ring baffle of the golden boundary frame 104, the golden boundary substrate 105 is circular, the outer diameter of the golden boundary substrate is the same as the inner diameter of the circular ring baffle, the outer diameter of the circular ring baffle is the same as the inner diameter of a circular through hole in the lower end face of the heating chamber 111, a sliding lower pressing plate 106 is arranged on the side face of the heating chamber 111, the lower pressing plate 106 is arranged above the lifting block 103, an arc-shaped groove is formed in the lower end face of the lower pressing plate 106, the radius of the arc-shaped groove is the same as the radius of a longer limiting rod of the lifting block 103, two slopes are arranged on the lower pressing plate 106, one end of an expansion rod I107 is fixed on the upper end face of the lower pressing plate 106, and the other end of the expansion rod I107 is fixed on the heating chamber 111.
After the SiC in the heating chamber 111 is converted into graphene on the gold boundary substrate 105, the telescopic rod i 107 is started, the lower pressing plate 106 is driven to move downwards by the extension of the telescopic rod i 107, and then the longer limiting rod on the lifting block 103 is pressed downwards by the lower pressing plate 106, so that the lifting block 103 moves downwards in the lifting frame 102, and further the gold boundary frame 104 is driven to move downwards, so that the gold boundary substrate 105 moves out of the heating chamber 111 along with the gold boundary frame 104, and the telescopic rod i 107 is stopped, at this time, the gold boundary frame 104 and the gold boundary substrate 105 are still in a high-temperature state, and the gold boundary frame 104 and the gold boundary substrate 105 can rapidly descend through the huge temperature difference between the gold boundary frame 104 and the gold boundary substrate 105 and the outside air, so that the preparation efficiency of graphene is improved compared with the case that the gold boundary frame 104 and the gold boundary substrate 105 are naturally cooled in the heating chamber 111.
The arc-shaped groove formed in the lower end face of the lower pressing plate 106 enables the lower pressing plate 106 to press the longer limiting rod of the lifting block 103 more stably.
As shown in fig. 6 and 7:
the stud is arranged on the upper end face of the golden boundary frame 104, the lower end face of the golden boundary substrate 105 is provided with a threaded hole, the threaded hole is matched with the stud, and the golden boundary substrate 105 is in threaded connection with the golden boundary substrate 105 through the threaded hole and the stud.
The stud of the golden boundary frame 104 and the threaded hole of the golden boundary substrate 105 can firmly fix the golden boundary substrate 105 on the golden boundary frame 104, so that the golden boundary substrate 105 is not easy to separate, and the new golden boundary substrate 105 can be conveniently replaced or added.
As shown in fig. 1-5:
the corrosion bin 108 is arranged below the gold boundary base 105 and slides on the crane 101, the side surface of the crane 102 is fixedly connected with a rack 109, the rack 109 is arranged below the gold boundary frame 104, one surface of the rack 109 facing the gold boundary frame 104 is provided with meshing teeth, and the meshing teeth on the rack 109 are matched with the meshing teeth on the gold boundary frame 104.
After the gold boundary frame 104 and the gold boundary base 105 are cooled, the telescopic rod I107 is started, the lower pressing plate 106 is driven to move downwards through the extension of the telescopic rod I107, the gold boundary frame 104 is further driven to move downwards, in the process that the gold boundary frame 104 moves downwards, the part with the meshing teeth on the gold boundary frame 104 is meshed with the rack 109, the gold boundary frame 104 is further driven to move downwards and rotate on the lifting block 103, when the gold boundary frame 104 is overturned for 180 degrees, the gold boundary base 105 is completely immersed into the chemical corrosion liquid in the corrosion bin 108 at the moment, the gold boundary base 105 is subjected to chemical corrosion, graphene on the gold boundary base 105 is reserved, and the preparation of the graphene is completed by collecting the graphene in the corrosion bin 108.
After the golden boundary substrate 105 is in the corrosion bin 108 for a period of time, the threaded hole part of the golden boundary substrate 105 will be corroded and disappear, so that the golden boundary frame 104 is separated from the golden boundary frame 104, and at this time, the golden boundary frame 104 can be lifted to be separated from the corrosion bin 108, and cleaning and new golden boundary substrate 105 can be added for the next cycle.
As shown in fig. 8 and 9:
the rack 101 is provided with a first sliding rail, a sliding rod 203 slides in the first sliding rail, a sliding cover 202 is fixedly connected to the lower end face of the sliding rod 203, the sliding cover 202 is arranged below the first sliding rail, the lower end face of the sliding cover 202 is aligned with the upper end face of the corrosion bin 108, the width of the sliding cover 202 is larger than that of the corrosion bin 108, a handle is arranged on the upper end face of the sliding cover 202, and the edge of the handle is chamfered.
A second sliding rail is arranged on the rack 101, the second sliding rail is perpendicular to the first sliding rail, the corrosion bin 108 slides in the second sliding rail, the length of the second sliding rail is equal to that of the sliding cover 202, one end of the telescopic rod II 201 is fixed on the rack 101, and the other end of the telescopic rod II 201 is fixed on the side face, far away from the handle on the sliding cover 202, of the corrosion bin 108.
When the metal substrate 105 is in the heating chamber 111 to generate graphene, the sliding cover 202 is slid over the etching chamber 108, and the upper opening of the etching chamber 108 is completely covered by the sliding cover 202, so that the chemical etching solution in the etching chamber 108 is not volatilized outwards, and the chemical etching solution is reduced.
After the graphene is produced in the heating chamber 111, the operator moves the slide cover 202 by the handle to separate the slide cover 202 from the etching chamber 108, so that the slide cover 202 does not hinder the downward movement of the gold-bonded substrate 105.
After the metal-bound substrate 105 is separated from the metal-bound frame 104, the sliding cover 202 is moved to the position above the etching chamber 108, so that the volatilization of the chemical etching solution can be prevented to the maximum extent.
After the gold boundary substrate 105 is corroded, the telescopic rod II 201 is started, the corrosion bin 108 is driven to move on the rack 101 through the extension of the telescopic rod II 201, the part, below the heating chamber 111, of the corrosion bin is moved out, and operators can take out graphene at a preparation position conveniently.
When II 201 control of telescopic link corrodes storehouse 108 and removes, operating personnel will slide lid 202 and remove and corrode storehouse 108 top for corrode storehouse 108 and remove the in-process and be in slide lid 202 below all the time, make the chemical corrosion liquid among the storehouse 108 of corroding can not spill corrosion storehouse 108 because of inertia, guaranteed equipment and operating personnel's safety.
Control through telescopic link II 201 and corrode the removal in storehouse 108, can make the removal of corroding storehouse 108 more steady, thereby prevent to corrode the great ripple of the chemical corrosion liquid production in the storehouse 108 and damage inside graphite alkene.
As shown in fig. 10:
two bracing pieces 302 of heating chamber 111 lower extreme fixedly connected with, the width between two bracing pieces 302 is greater than the diameter of the round through-hole that the terminal surface set up under heating chamber 111, two bracing pieces 302 all slide with two sealing plate 301, the round through-hole that the terminal surface set up under heating chamber 111 when two sealing plate 301 merge together covers completely, there are two semicircular groove with the same radius on two sealing plate 301, semicircular groove's diameter equals golden boundary frame 104 and the cylindrical diameter of golden boundary base 105 vertical part, two semicircular groove can merge and produce the round hole together when two sealing plate 301 contact, two sealing plate 301 stretch out two stock respectively to the direction of holding down plate 106, be provided with the slope on two stock, II 303 one end of a plurality of springs are all fixed on heating chamber 111, II 303 other end of a plurality of springs are all fixed in two sealing plate 301 sides, II of a plurality of springs set up in two bracing pieces 302 outsides.
When the gold-bonded substrate 105 is in the heating chamber 111 to produce graphene, the two sealing plates 301 are combined by continuously pushing the two sealing plates 301 against the tension of the plurality of springs ii 303, and the two sealing plates 301 can ensure that the vacuum environment in the heating chamber 111 is not damaged.
After the graphene is generated in the heating chamber 111, the expansion link I107 is started, the extension of the expansion link I107 drives the lower pressing plate 106 to move downwards, the lower pressing plate 106 can firstly contact with two long rods of the two sealing plates 301 in the moving process, the slope on the lower pressing plate 106 is contacted with the slopes on the two long rods, the two sealing plates 301 slide outwards on the supporting rod 302 when the lower pressing plate 106 descends, the circular through hole formed in the lower end face of the heating chamber 111 is completely exposed, and the gold boundary frame 104 cannot be hindered by the two sealing plates 301 when moving downwards.
As shown in fig. 11:
the inside fixedly connected with telescopic link III 401 of heating chamber 111, screw rod 402 rotate to be connected at the III 401 other end of telescopic link, and splendid attire box 404 fixed connection is at the screw rod 402 other end, and fixed plate 403 sets up inside heating chamber 111, and fixed plate 403 sets up in golden boundary basement 105 top, is equipped with the screw hole on the fixed plate 403, and telescopic link III 401 passes the screw hole, screw hole and the screw thread fit on the screw rod 402.
Preparing graphene, starting a telescopic rod III 401, driving a containing box 404 to move towards the outside of a heating chamber 111 through the extension of the telescopic rod III 401, stopping the telescopic rod III 401 when the containing box 404 moves to the outside of the heating chamber 111, placing SiC for preparing graphene in the containing box 404 by an operator at the moment, starting the telescopic rod III 401 again, retracting the telescopic rod III 401 to drive the containing box 404 to return to the heating chamber 111, driving a screw rod 402 to rotate in a threaded hole of a fixing plate 403 in the retracting process of the telescopic rod III 401, and further overturning the containing box 404 to enable the SiC in the containing box 404 to fall onto a gold substrate 105.
As shown in fig. 11-13:
the heating chamber 111 is fixedly connected with an expansion link IV 405, the lower end face of the inside of the heating chamber 111 is provided with two long rods, the moving plate 406 is fixedly connected to the other end of the expansion link IV 405, the moving plate 406 slides on the upper end faces of the two long rods, and the area of the moving plate 406 is larger than that of a circular through hole formed in the lower end face of the heating chamber 111.
When the containing box 404 moves outwards from the heating chamber 111, the telescopic rod IV 405 is started, the telescopic rod IV 405 is shortened to drive the moving plate 406 to move on the two long bars, and the upper part of the gold boundary frame 104 is vacated; when SiC is placed on the gold boundary substrate 105, the telescopic rod IV 405 is started, the telescopic rod IV 405 extends to drive the moving plate 406 to move on the two long rods, so that the moving plate 406 returns to the position above the gold boundary substrate 105 and completely covers the gold boundary substrate 105, siC on the gold boundary substrate 105 can be heated more uniformly, and sublimated Si atoms cannot be dispersed to other positions in the heating chamber 111, and the environment in the heating chamber 111 is further guaranteed.
As shown in fig. 11-13:
two transverse moving plates 407 slide in the heating chamber 111, one ends of two telescopic rods V408 are fixed on the two transverse moving plates 407, the other ends of the two telescopic rods V408 are fixed on the heating chamber 111, the two transverse moving plates 407 are combined together to form two through holes, the diameter of the large through hole is the same as that of the telescopic rod III 401, and the diameter of the small through hole is the same as that of the telescopic rod IV 405.
The heating chamber 111 is provided with a longitudinal moving plate 409 in a sliding manner, two transmission teeth are arranged on the two sides of the longitudinal moving plate 409, which exceed the heating chamber 111, two gears 411 are respectively engaged with the two transmission teeth, the two gears 411 are fixedly connected with an output shaft of the motor 410, and the motor 410 is arranged on the upper end surface of the heating chamber 111.
The two traverse plates 407 and the longitudinal moving plate 409 are both in an open state, the heating chamber 111 is divided into two parts by the two traverse plates 407, the interior of the heating chamber 111 is separated from the outside by the longitudinal moving plate 409, when the heating chamber 111 is heated, only the first part where the fixing plate 403 is located is heated, when SiC is placed on the gold-bound substrate 105, the motor 410 is started firstly, the motor 410 drives the two gears 411 to rotate, the longitudinal moving plate 409 is further driven to move downwards until the heating chamber 111 is closed, the telescopic rod III 401 is started, the containing box 404 is moved to the second part without the fixing plate 403, and the SiC remained in the containing box 404 can be prevented from being consumed; simultaneously, the inside of the heating chamber 111 is vacuumized, then the two telescopic rods V408 are started, the two telescopic rods V408 shrink to drive the two transverse moving plates 407 to move towards the inside of the heating chamber 111, the first part and the second part of the heating chamber 111 are isolated, the first part of the heating chamber 111 is measured to start to prepare graphene, the first part is heated independently, so that the heating of the heating chamber 111 is faster, and the preparation efficiency is further improved.
Claims (10)
1. An apparatus for preparing graphene, comprising: including frame (101), crane (102), elevator (103), golden boundary frame (104), golden boundary base (105), holding down plate (106), telescopic link I (107), spring I (110) and heating chamber (111), fixedly connected with crane (102) and heating chamber (111) on frame (101), elevator (103) slide in crane (102), the both ends of spring I (110) are fixed respectively in elevator (103) lower extreme face and crane (102), golden boundary frame (104) rotate to be connected in elevator (103) side, golden boundary base (105) set up on golden boundary frame (104), holding down plate (106) slide in heating chamber (111) side and set up in elevator (103) top, the both ends of telescopic link I (107) are fixed respectively on holding down plate (106) up end and heating chamber (111).
2. The apparatus for preparing graphene according to claim 1, wherein: the upper end face of the golden boundary frame (104) is provided with a stud, and the lower end face of the golden boundary substrate (105) is provided with a threaded hole matched with the stud.
3. The apparatus for preparing graphene according to claim 2, wherein: the metal boundary detection device is characterized by further comprising a corrosion bin (108) and a rack (109), wherein the corrosion bin (108) slides on the rack (101) and is arranged below the metal boundary base (105), and the rack (109) is fixedly connected to the side face of the lifting frame (102) and is provided with meshing teeth facing the metal boundary frame (104).
4. The apparatus for preparing graphene according to claim 3, wherein: the device also comprises a sliding cover (202) and a sliding rod (203), wherein the sliding rod (203) slides on the rack (101), and the sliding cover (202) is fixedly connected to the lower end face of the sliding rod (203).
5. The apparatus for preparing graphene according to claim 4, wherein: the corrosion-resistant device is characterized by further comprising a telescopic rod II (201), wherein two ends of the telescopic rod II (201) are respectively fixed on the rack (101) and the corrosion bin (108).
6. The apparatus for preparing graphene according to claim 5, wherein: still include sealing plate (301), bracing piece (302) and spring II (303), two bracing pieces (302) fixed connection are at heating chamber (111) lower extreme, and two sealing plate (301) all slide on two bracing pieces (302), and a plurality of springs II (303) are all fixed between heating chamber (111) and two sealing plate (301), and a plurality of springs II (303) are all established in two bracing pieces (302) outsides.
7. The apparatus for preparing graphene according to claim 6, wherein: still include telescopic link III (401), screw rod (402), fixed plate (403) and splendid attire box (404), telescopic link III (401) one end fixed connection is inside heating chamber (111), and telescopic link III (401) other end rotates has screw rod (402), and screw rod (402) other end is fixed with splendid attire box (404), and heating chamber (111) inside is provided with fixed plate (403), and telescopic link III (401) passes the screw hole on fixed plate (403).
8. The apparatus for preparing graphene according to claim 7, wherein: the heating device is characterized by further comprising an expansion link IV (405) and a moving plate (406), wherein one end of the expansion link IV (405) is fixedly connected inside the heating chamber (111), and the other end of the expansion link IV (405) is fixedly connected with the moving plate (406).
9. The apparatus for preparing graphene according to claim 8, wherein: the heating device is characterized by further comprising transverse moving plates (407) and telescopic rods V (408), wherein the two transverse moving plates (407) slide in the heating chamber (111), and two ends of each telescopic rod V (408) are fixed on the two transverse moving plates (407) and the heating chamber (111).
10. The apparatus for preparing graphene according to claim 9, wherein: the heating device is characterized by further comprising a longitudinal moving plate (409), a motor (410) and a gear (411), wherein the longitudinal moving plate (409) slides in the heating chamber (111), two transmission teeth are arranged on the longitudinal moving plate (409), the two gears (411) are respectively meshed with the two transmission teeth, the two gears (411) are fixed on an output shaft of the motor (410), and the motor (410) is installed on the upper end face of the heating chamber (111).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211340777.3A CN115594168A (en) | 2022-10-29 | 2022-10-29 | Device for preparing graphene |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211340777.3A CN115594168A (en) | 2022-10-29 | 2022-10-29 | Device for preparing graphene |
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| Publication Number | Publication Date |
|---|---|
| CN115594168A true CN115594168A (en) | 2023-01-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211340777.3A Pending CN115594168A (en) | 2022-10-29 | 2022-10-29 | Device for preparing graphene |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0427914U (en) * | 1990-06-29 | 1992-03-05 | ||
| KR20010036322A (en) * | 1999-10-07 | 2001-05-07 | 윤종용 | Wafer lifter for semiconductor manufacturing apparatus |
| KR20120090296A (en) * | 2011-02-07 | 2012-08-17 | 라경배 | Apparatus for lining the part of a hydraulic pump with copper alloy |
| KR20160043486A (en) * | 2014-10-13 | 2016-04-21 | 주식회사 테스 | Apparatus for mocvd |
| CN107364846A (en) * | 2017-09-06 | 2017-11-21 | 蚌埠玻璃工业设计研究院 | A kind of device in substrate surface growth graphene film |
| CN108046245A (en) * | 2018-01-10 | 2018-05-18 | 德化利鑫新材料科技有限公司 | A kind of chemical gas phase reaction precipitation equipment for being suitable for batch and preparing graphene |
| CN108821273A (en) * | 2018-09-21 | 2018-11-16 | 北京石墨烯研究院 | Vacuum graphite alkene transfer device and vacuum graphite alkene transfer method |
-
2022
- 2022-10-29 CN CN202211340777.3A patent/CN115594168A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0427914U (en) * | 1990-06-29 | 1992-03-05 | ||
| KR20010036322A (en) * | 1999-10-07 | 2001-05-07 | 윤종용 | Wafer lifter for semiconductor manufacturing apparatus |
| KR20120090296A (en) * | 2011-02-07 | 2012-08-17 | 라경배 | Apparatus for lining the part of a hydraulic pump with copper alloy |
| KR20160043486A (en) * | 2014-10-13 | 2016-04-21 | 주식회사 테스 | Apparatus for mocvd |
| CN107364846A (en) * | 2017-09-06 | 2017-11-21 | 蚌埠玻璃工业设计研究院 | A kind of device in substrate surface growth graphene film |
| CN108046245A (en) * | 2018-01-10 | 2018-05-18 | 德化利鑫新材料科技有限公司 | A kind of chemical gas phase reaction precipitation equipment for being suitable for batch and preparing graphene |
| CN108821273A (en) * | 2018-09-21 | 2018-11-16 | 北京石墨烯研究院 | Vacuum graphite alkene transfer device and vacuum graphite alkene transfer method |
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