CN115558893B - Color gradient coating equipment based on physical vapor deposition technology - Google Patents

Color gradient coating equipment based on physical vapor deposition technology Download PDF

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Publication number
CN115558893B
CN115558893B CN202211565406.5A CN202211565406A CN115558893B CN 115558893 B CN115558893 B CN 115558893B CN 202211565406 A CN202211565406 A CN 202211565406A CN 115558893 B CN115558893 B CN 115558893B
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coating
assembly
magnetic field
negative pressure
fixedly connected
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CN115558893A (en
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王贵生
曾德洪
陈浩
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Taizhou Guangli Photoelectric Technology Co ltd
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Taizhou Guangli Photoelectric Technology Co ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention discloses a color gradient coating device based on a physical vapor deposition technology, which relates to the technical field of vapor deposition coating and comprises a pretreatment assembly, a coating assembly, a gradient regulation and control assembly, a conveying unit and a machine table, wherein the pretreatment assembly, the coating assembly and the upper surface of the machine table are fixedly connected, the conveying unit sequentially penetrates through the pretreatment assembly and the coating assembly, and the gradient regulation and control assembly is arranged in the coating assembly. The pretreatment assembly preliminarily removes stains on the surface of the workpiece, coating is started after removal, and the conveying unit outputs the workpiece after coating is finished. According to the invention, the two-way decreasing type mixed distribution of two kinds of particles is realized in a magnetic field deflection mode, the two kinds of color particles fall synchronously, the mutual coverage among different color particles is avoided, the two-way decreasing type arrangement does not need additional structure guidance, a gradient color coating film can be directly generated on the surface of a workpiece, and the coating efficiency and the coating attractiveness are greatly improved.

Description

Color gradient coating equipment based on physical vapor deposition technology
Technical Field
The invention relates to the technical field of vapor deposition coating, in particular to a color gradient coating device based on a physical vapor deposition technology.
Background
PVD refers to a thin film fabrication technique that physically deposits material on a workpiece to be plated under vacuum. With the development of modern construction and emerging industry, the physical vapor deposition technology is developed more and more mature, and the conventional PVD coating technology mainly comprises decoration coating and tool coating, but the existing decoration coating equipment has more defects and cannot meet the use requirement.
The conventional vapor deposition coating equipment can only change color in a section mode when the color of the surface of a workpiece changes, gradual color change cannot be generated, and the condition of harsh color change is easily caused.
The existing vapor deposition coating equipment cannot effectively treat the surface of a workpiece before coating, impurities on the surface of the workpiece are easily mixed in a coating, so that the condition that a local coating falls off in the use process of the workpiece is caused, part of the surface of the workpiece is locally protruded, and the surface of the workpiece after coating is in an uneven state, so that the product quality is influenced.
Disclosure of Invention
The invention aims to provide a color gradient coating device based on a physical vapor deposition technology, so as to solve the problems in the background technology.
In order to solve the technical problems, the invention provides the following technical scheme: a color gradient coating device based on a physical vapor deposition technology comprises a pretreatment assembly, a coating assembly, a gradient regulation assembly, a conveying unit and a machine platform, wherein the pretreatment assembly, the coating assembly and the upper surface of the machine platform are fixedly connected, the conveying unit sequentially penetrates through the pretreatment assembly and the coating assembly, and the gradient regulation assembly is arranged inside the coating assembly;
the coating component comprises a negative pressure bin, a vacuum pump, a central shaft, an annular sleeve, a branch frame, a first electric cylinder, a first motor, a lifting sleeve, the negative pressure bin is in fastening connection with a machine table, the central shaft is in fastening connection with the upper end and the lower end of the inner wall of the negative pressure bin, the annular sleeve is sleeved on the outer side of the central shaft, the annular sleeve is in fastening connection with the upper side of the inner wall of the negative pressure bin, the first electric cylinder is in fastening connection with the central shaft, the output shaft of the first electric cylinder is in fastening connection with the lifting sleeve, the lifting sleeve is in sliding connection with the central shaft, the first motor is in fastening connection with the lifting sleeve, the branch frame is in rotating connection with the lifting sleeve, a first gear is arranged on the output shaft of the first motor, a second gear is arranged on the branch frame, the first gear is meshed with the second gear, the vacuum pump is in fastening connection with the machine table, and the vacuum pump is connected with the negative pressure bin through a pipeline. The pretreatment component primarily removes stains on the surface of a workpiece, the removed workpiece is driven by the conveying unit to move towards the negative pressure bin, the workpiece is placed on the branch frame, the branch frame is provided with a plurality of fixing discs, the first motor can drive the branch frame to rotate, and the workpiece is sequentially placed on each fixing disc. After the placing is finished, the first electric cylinder drives the lifting sleeve to move upwards, the branch frame is inserted into the annular sleeve, the workpiece starts to be coated, the vacuum pump vacuumizes the interior of the negative pressure bin before the coating is started, the coating film with gradually changed colors is generated on the workpiece under the action of the gradually-changed regulating and controlling assembly, and the conveying unit outputs the workpiece after the coating is finished. According to the invention, the two-way decreasing type mixed distribution of two kinds of particles is realized in a magnetic field deflection mode, the two kinds of color particles fall synchronously, the mutual coverage among different color particles is avoided, the two-way decreasing type arrangement does not need additional structure guidance, a gradient color coating film can be directly generated on the surface of a workpiece, and the coating efficiency and the coating attractiveness are greatly improved.
Further, the pretreatment assembly comprises a pretreatment box, a cleaning sprayer and a drying air pipe, the pretreatment box is fixedly connected with the machine table, the cleaning sprayer and the drying air pipe are arranged inside the pretreatment box, the cleaning sprayer is fixedly connected with the top of the pretreatment box, and the drying air pipe is arranged on two sides of the pretreatment box. The cleaning spray head washes the workpiece, and after washing, hot air flow is sprayed out of the drying air pipe to rapidly dry the workpiece. The time of the washing process corresponds to that of the feeding process at the negative pressure bin, the time of the drying process corresponds to that of the coating process of the workpiece, the gradual-change coating equipment keeps rhythm synchronization, and the running efficiency is improved.
Further, the inside inverse hanging chamber that is provided with of annular cover, the inverse hanging chamber is provided with the multiunit, multiunit inverse hanging chamber centers on annular cover evenly distributed, the inside evaporation source that still is provided with of inverse hanging chamber, the argon gas pipe, the anode end, the negative pole end, alternating current power source end, the evaporation source has two sets ofly, evaporation source and negative pressure storehouse inner wall top fastening connection, the argon gas pipe sets up at two sets of evaporation source intermediate positions, the argon gas pipe imbeds inside the negative pressure storehouse, alternating current power source end passes from the evaporation source is inside, anode end and evaporation source link to each other, the negative pole end sets up on the bifurcation frame, when the work piece was placed on the bifurcation frame, negative pole end and work piece intercommunication. The workpiece extends into the annular sleeve under the driving of the branch frame, the evaporation source is connected with the anode end at the moment, the workpiece is connected with the cathode end, glow discharge is generated between the evaporation source and the workpiece after high-voltage direct current passes through, argon is input into the annular sleeve from the argon pipe, and the input of the argon is used as protective gas on one hand and is used for improving the discharge condition of the target during vacuum plating on the other hand. In the glow discharge process, argon is input from the discharge center, part of the argon is ionized, a cathode dark space is formed around the cathode workpiece at the moment, the argon ions carrying positive charges are adsorbed by negative high voltage of the cathode, and the argon ions accelerate impact on the surface of the workpiece. On the other hand, the work piece is located the inverse hanging chamber inside, and when argon gas was imported, the atmospheric pressure of inverse hanging intracavity side can promote, can appear pressure difference in inverse hanging intracavity side and outside, and the opening setting in inverse hanging chamber is in the downside, and pressure difference can drive argon gas and carry to inverse hanging chamber bottom. Electric field force and air current direction help argon ion to strike to the workpiece surface jointly, and the top layer particle of work piece is strikeed, especially the surperficial protruding department of work piece, and the most advanced gathering of negative charge can appear in this position, can receive the impact of more argon ions, and argon ion is clear away, is level and smooth to the workpiece surface, and the top layer particle and the argon ion of clearing away receive the direction of air current, toward the work piece diffusion all around, finally discharge to the overhead suspension chamber outside.
Furthermore, the gradual change regulation and control subassembly includes balanced magnetic field, increases progressively the magnetic field, balanced magnetic field, it is provided with two sets ofly to increase progressively the magnetic field, balanced magnetic field links to each other with increasing progressively the magnetic field, two sets of balanced magnetic fields, increase progressively the magnetic field and set up respectively in two sets of evaporation sources below, balanced magnetic field, increase progressively the magnetic field and hang the chamber lateral wall fastening connection inversely, two sets ofly increase progressively the magnetic field and set up in the one side that is close to each other, two sets of balanced magnetic field set up in the one side that the evaporation source kept away from each other, two sets ofly balanced magnetic field, the magnetic field direction that increases progressively the magnetic field sets up to opposite. When the AC power supply end is connected, the particles at the evaporation source are melted and evaporated, enter the glow discharge area and are ionized, the evaporated particles with positive charges are guided by the cathode to wash the workpiece, and when the throwing plating ions exceed the splashing ions, a deposition film is generated on the surface of the workpiece. The evaporation particles with positive charges can be subjected to a deflection force when passing through the magnetic field area, the direction of the magnetic field is set, so that the evaporation particles are deflected to the center, the falling positions of the evaporation particles are controlled in the workpiece area, two groups of evaporation sources deposit coatings with different colors, the particles in the balanced magnetic field area are subjected to constant deflection force and fall on two sides of the workpiece, and a stable color area is formed. And at the position of the increasing magnetic field, the magnetic field shows an increasing trend towards the central position, the deviation amount of the falling particles is increased gradually as the deviation force increasing amount of the falling particles is larger at the position closer to the position, the particles are evaporated at equal intervals at the evaporation source position, the falling intervals are increased continuously, the particle content in a unit area is reduced continuously, the two different colors of particles fall in a superposed manner in the area, the color is A, B, the more the particles are in the A color area, the more the particles are in the B color area, and the more the particles are in the B color area, the two are mixed and deposited between A, B to form a gradient color band. According to the invention, the two-way decreasing type mixed distribution of two kinds of particles is realized in a magnetic field deflection mode, the two kinds of color particles fall synchronously, the mutual coverage among different color particles is avoided, the two-way decreasing type arrangement does not need additional structure guidance, a gradient color coating film can be directly generated on the surface of a workpiece, and the coating efficiency and the coating attractiveness are greatly improved.
Furthermore, a movable door, a rotating shaft, a control motor, a driving wheel and a driven wheel are arranged on the negative pressure bin, the rotating shaft is rotatably connected with the top of the negative pressure bin, the movable door is fixedly connected with the rotating shaft, the control motor is fixedly connected with the top of the negative pressure bin, an output shaft of the control motor is fixedly connected with the driving wheel, the driven wheel is fixedly connected with the rotating shaft, and the driving wheel is meshed with the driven wheel. When a workpiece is machined, the motor is controlled to drive the driving wheel to rotate, the driving wheel drives the driven wheel to rotate, the driven wheel drives the rotating shaft to rotate, the movable door is lifted, the conveying unit conveys the workpiece into the negative pressure bin, and the rotating shaft rotates again to close the movable door.
Furthermore, the conveying unit comprises a flowing conveying line, a carrying mechanical arm and an exchange part, the flowing conveying line is fixedly connected with the ground, the flowing conveying line sequentially penetrates through the pretreatment assembly and the coating assembly, the carrying mechanical arm is fixedly connected with the machine table, the carrying mechanical arm is arranged between the pretreatment assembly and the coating assembly, one end of the exchange part is connected with the pretreatment assembly, and the other end of the exchange part is connected with the coating assembly. The mobile conveying line drives the workpiece to move, the conveying mechanical arm conveys the workpiece into the negative pressure cabin for film coating, and the workpiece is taken out from the negative pressure cabin after the film coating is finished.
Further, the exchange part includes the heat conduction piece, the circulating pipe, the delivery pump, the blast pipe, the fan, the exchange piece, the heat conduction piece embedding is in the negative pressure storehouse inner wall, heat conduction piece and evaporation source fastening connection, the circulating pipe passes from the heat conduction piece is inside, the circulating pipe both ends are connected with the exchange piece, the delivery pump concatenates on the circulating pipe, blast pipe and exchange piece both ends are connected, the one end and the fan that the exchange piece was kept away from to the blast pipe are connected, the other end and the dry trachea UNICOM of exchange piece are kept away from to the blast pipe, the delivery pump, one side fastening connection that the dodge gate was kept away from to fan and negative pressure storehouse. The conveying pump conveys cooling water, the cooling water constantly cools down the heat conduction piece, and the heat conduction piece absorbs the temperature of evaporation source department, keeps the evaporation source to be close to the one side temperature in negative pressure storehouse and maintains more stable state to guarantee going on that vapor deposition's process can be stable to last. The cooling water flows into the exchange block through the circulating pipe after being heated, and flows back to the position of the heat conducting block again after heat exchange. The fan continuously belongs to air flow and enters the blast pipe, and the air flow enters the exchange block to be heated and then is sprayed out from the drying air pipe.
Further, the exchange block comprises a spiral coil and a heat exchange tube, the spiral coil is arranged inside the heat exchange tube, the heat exchange tube and one side, far away from the movable door, of the negative pressure bin are fixedly connected, two ends of the spiral coil are communicated with the air supply pipe, and two ends of the heat exchange tube are communicated with the circulating pipe. The cooling water passes through the heat exchange tube, the air flow passes through the spiral coil tube, and the cooling water and the air flow are in reverse convection to fully exchange heat. The waste heat of the cooling water radiating for the evaporation source is used for heating the air flow of the dry workpiece, so that the energy is recycled in the equipment, and the energy conversion efficiency of the equipment is greatly improved.
Compared with the prior art, the invention has the following beneficial effects: in the glow discharge process, argon is input from the discharge center, part of the argon is ionized, a cathode dark space is formed around the cathode workpiece at the moment, the argon ions carrying positive charges are adsorbed by negative high voltage of the cathode, and the argon ions accelerate impact on the surface of the workpiece. On the other hand, the input of argon forms pressure difference between the inner side and the outer side of the inverted cavity, electric field force and airflow guidance jointly assist argon ions to impact the surface of the workpiece, the surface charge tip at the end of the workpiece is gathered to guide the impact ions, and airflow also clears away surface layer particles and argon ions after impact, so that a stable environment is provided for subsequent coating. According to the invention, the bidirectional decreasing type mixed distribution of two kinds of particles is realized in a magnetic field deflection mode, the two kinds of color particles fall synchronously, the mutual coverage among different color particles is avoided, the bidirectional decreasing type arrangement does not need additional structure guidance, a gradient color coating can be directly generated on the surface of a workpiece, and the coating efficiency and the coating attractiveness are greatly improved. The waste heat of the cooling water radiating for the evaporation source is used for heating the air flow of the dry workpiece, so that the energy is recycled in the equipment, and the energy conversion efficiency of the equipment is greatly improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a cross-sectional view of the overall construction of the pre-treatment assembly of the present invention;
FIG. 3 is a schematic view of the overall configuration of the exchange component of the present invention;
FIG. 4 is an external schematic view of a coating assembly of the present invention;
FIG. 5 is a schematic diagram of the operation of the gradient coating of the present invention;
FIG. 6 is a schematic view of the internal structure of the pretreatment tank of the present invention;
FIG. 7 is a perspective view of the collar of the present invention;
FIG. 8 is a schematic view of the internal structure of the inverted hanging chamber of the present invention;
in the figure: 1-pretreatment component, 11-pretreatment box, 12-cleaning spray head, 13-drying air pipe, 2-coating component, 21-negative pressure bin, 211-movable door, 212-rotating shaft, 213-control motor, 214-driving wheel, 215-driven wheel, 22-vacuum pump, 23-central shaft, 24-annular sleeve, 241-inverted hanging cavity, 242-evaporation source, 243-argon pipe, 244-anode end, 246-alternating current power supply end, 25-branch frame, 26-first electric cylinder, 27-first motor, 28-lifting sleeve, 3-gradient regulation component, 31-balanced magnetic field, 32-incremental magnetic field, 4-conveying unit, 41-flow conveying line, 42-conveying mechanical arm, 43-exchange component, 431-heat conducting block, 432-circulating pipe, 433-conveying pump, 434-air supply pipe, 435-fan, 436-exchange block, 4361-spiral coil pipe, 4362-heat exchange pipe and 5-machine table.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, 5 and 6, a color gradient coating device based on a physical vapor deposition technology comprises a pretreatment assembly 1, a coating assembly 2, a gradient regulation and control assembly 3, a conveying unit 4 and a machine table 5, wherein the pretreatment assembly 1, the coating assembly 2 and the upper surface of the machine table 5 are fixedly connected, the conveying unit 4 sequentially penetrates through the pretreatment assembly 1 and the coating assembly 2, and the gradient regulation and control assembly 3 is arranged inside the coating assembly 2;
the coating component 2 comprises a negative pressure bin 21, a vacuum pump 22, a central shaft 23, an annular sleeve 24, a branch frame 25, a first electric cylinder 26, a first motor 27 and a lifting sleeve 28, wherein the negative pressure bin 21 is fixedly connected with the machine table 5, the central shaft 23 is fixedly connected with the upper end and the lower end of the inner wall of the negative pressure bin 21, the annular sleeve 24 is sleeved on the outer side of the central shaft 23, the annular sleeve 24 is fixedly connected with the upper side of the inner wall of the negative pressure bin 21, the first electric cylinder 26 is fixedly connected with the central shaft 23, an output shaft of the first electric cylinder 26 is fixedly connected with the lifting sleeve 28, the lifting sleeve 28 is slidably connected with the central shaft 23, the first motor 27 is fixedly connected with the lifting sleeve 28, the branch frame 25 is rotatably connected with the lifting sleeve 28, a first gear is arranged on an output shaft of the first motor 27, a second gear is arranged on the branch frame 25, the first gear is meshed with the second gear, the vacuum pump 22 is fixedly connected with the machine table 5, and the vacuum pump 22 is connected with the negative pressure bin 21 through a pipeline. The pretreatment component 1 primarily removes stains on the surface of a workpiece, the removed workpiece is driven by the conveying unit 4 to move to the negative pressure bin 21, the workpiece is placed on the branch frame 25, the branch frame 25 is provided with a plurality of fixed disks, the first motor 27 drives the branch frame 25 to rotate, and the workpiece is sequentially placed on each fixed disk. After the film is completely placed, the first electric cylinder 26 drives the lifting sleeve 28 to move upwards, the branch frame 25 is inserted into the annular sleeve 24, the workpiece starts to be coated, the vacuum pump 22 vacuumizes the interior of the negative pressure bin 21 before the coating is started, the coating film with gradually changed colors is generated on the workpiece under the action of the gradually changing regulation and control assembly 3, and the conveying unit 4 outputs the workpiece after the coating is completed. According to the invention, the two-way decreasing type mixed distribution of two kinds of particles is realized in a magnetic field deflection mode, the two kinds of color particles fall synchronously, the mutual coverage among different color particles is avoided, the two-way decreasing type arrangement does not need additional structure guidance, a gradient color coating film can be directly generated on the surface of a workpiece, and the coating efficiency and the coating attractiveness are greatly improved.
As shown in fig. 1 and 2, the pretreatment module 1 includes a pretreatment tank 11, a cleaning nozzle 12, and a drying air pipe 13, the pretreatment tank 11 is fastened to the machine 5, the cleaning nozzle 12 and the drying air pipe 13 are disposed inside the pretreatment tank 11, the cleaning nozzle 12 is fastened to the top of the pretreatment tank 11, and the drying air pipe 13 is disposed on both sides of the pretreatment tank 11. The cleaning nozzle 12 washes the workpiece, and after washing, hot air flow is sprayed from the drying air pipe 13 to rapidly dry the workpiece. The time of the washing process corresponds to that of the feeding process at the negative pressure bin 21, the time of the drying process corresponds to that of the coating process of the workpiece, the gradual-change coating equipment keeps rhythm synchronization, and the running efficiency is improved.
As shown in fig. 5, 7 and 8, an inverted cavity 241 is arranged inside the annular sleeve 24, a plurality of groups of inverted cavities 241 are arranged, the plurality of groups of inverted cavities 241 are uniformly distributed around the annular sleeve 24, an evaporation source 242, an argon pipe 243, an anode end 244, a cathode end and an alternating current power supply end 246 are further arranged inside the inverted cavity 241, two groups of evaporation sources 242 are arranged, the evaporation source 242 and the top of the inner wall of the negative pressure bin 21 are fixedly connected, the argon pipe 243 is arranged at the middle position of the two groups of evaporation sources 242, the argon pipe 243 is embedded inside the negative pressure bin 21, the alternating current power supply end 246 penetrates through the evaporation source 242, the anode end 244 is connected with the evaporation source 242, the cathode end is arranged on the branch frame 25, and when a workpiece is placed on the branch frame 25, the cathode end is communicated with the workpiece. The workpiece is driven by the branch frame 25 to extend into the annular sleeve 24, the evaporation source 242 is connected with the anode end 244 at the moment, the workpiece is connected with the cathode end, after high-voltage direct current is passed, glow discharge is generated between the evaporation source 242 and the workpiece, argon is input into the annular sleeve 24 from an argon pipe, and the input of the argon is used as protective gas on one hand and is used for improving the discharge condition of the target during vacuum plating on the other hand. In the glow discharge process, argon is input from the discharge center, part of the argon is ionized, a cathode dark space is formed around the cathode workpiece at the moment, the argon ions carrying positive charges are adsorbed by negative high voltage of the cathode, and the argon ions accelerate impact on the surface of the workpiece. On the other hand, the work piece is located the cavity of hanging upside down 241 inside, when argon gas input, the atmospheric pressure of the cavity of hanging upside down 241 inboard can promote, can appear pressure difference in the cavity of hanging upside down 241 inboard and outside, and the opening setting of the cavity of hanging upside down 241 is in the downside, and pressure difference can drive argon gas and carry to the cavity of hanging upside down 241 bottom. Electric field force and air current direction help argon ion to assault the work piece surface jointly, and the top layer particle of work piece is impacted, especially the protruding department in top layer of work piece, and the most advanced gathering of negative charge can appear in this position, can receive the impact of more argon ions, and argon ion is clear away, level and smooth to the work piece surface, and the top layer particle and the argon ion of clearing away receive the direction of air current, and toward work piece diffusion all around, finally discharge to hanging the chamber 241 outside upside down.
As shown in fig. 5, the gradient control assembly 3 includes two groups of balanced magnetic fields 31 and incremental magnetic fields 32, the balanced magnetic fields 31 and the incremental magnetic fields 32 are connected, the two groups of balanced magnetic fields 31 and incremental magnetic fields 32 are respectively disposed below the two groups of evaporation sources 242, the balanced magnetic fields 31, the incremental magnetic fields 32 and the sidewalls of the inverted cavities 241 are fastened, the two groups of incremental magnetic fields 32 are disposed on sides close to each other, the two groups of balanced magnetic fields 31 are disposed on sides far away from each other of the evaporation sources 242, and the magnetic field directions of the two groups of balanced magnetic fields 31 and incremental magnetic fields 32 are opposite. When the AC power supply is connected, particles in the evaporation source 242 are melted and evaporated, enter the glow discharge region and are ionized, the evaporated particles with positive charges are guided by the cathode to flush the workpiece, and when the throwing plating ions exceed the splashing ions, a deposition film is generated on the surface of the workpiece. The positively charged evaporation particles are subjected to a deflection force when passing through the magnetic field area, the magnetic field direction is set, so that the evaporation particles are deflected to the center, the falling positions of the evaporation particles are controlled in the workpiece area, two groups of evaporation sources 242 deposit coatings with different colors, and the particles in the balanced magnetic field 31 area are subjected to a constant deflection force and fall on two sides of the workpiece to form a stable color area. In the position of the gradually-increased magnetic field, the magnetic field has an increasing trend towards the central position, the deviation amount of the falling particles is gradually increased as the deviation force increasing amount of the falling particles at the position closer to the position is larger, the particles at the position of the evaporation source 242 are evaporated at equal intervals, the falling intervals are continuously increased, the content of the particles in a unit area is continuously reduced, the particles of two different colors are overlapped and fall in the area, and the color is A, B, so that the more the particles of the A color area are close to the A color area, the more the particles of the B color area are close to the B color area, and the mixed deposition of the particles and the B color area forms a gradient color band between A, B colors. According to the invention, the two-way decreasing type mixed distribution of two kinds of particles is realized in a magnetic field deflection mode, the two kinds of color particles fall synchronously, the mutual coverage among different color particles is avoided, the two-way decreasing type arrangement does not need additional structure guidance, a gradient color coating film can be directly generated on the surface of a workpiece, and the coating efficiency and the coating attractiveness are greatly improved.
As shown in fig. 4, the negative pressure chamber 21 is provided with a movable door 211, a rotating shaft 212, a control motor 213, a driving wheel 214 and a driven wheel 215, the rotating shaft 212 is rotatably connected with the top of the negative pressure chamber 21, the movable door 211 is fixedly connected with the rotating shaft 212, the control motor 213 is fixedly connected with the top of the negative pressure chamber 21, an output shaft of the control motor 213 is fixedly connected with the driving wheel 214, the driven wheel 215 is fixedly connected with the rotating shaft 212, and the driving wheel 214 is engaged with the driven wheel 215. When a workpiece is machined, the control motor 213 drives the driving wheel 214 to rotate, the driving wheel 214 drives the driven wheel 215 to rotate, the driven wheel 215 drives the rotating shaft 212 to rotate, the movable door 211 is lifted, the conveying unit 4 conveys the workpiece into the negative pressure bin 21, and the rotating shaft 212 rotates again to close the movable door 211.
As shown in fig. 1 and 3, the conveying unit 4 includes a flow conveying line 41, a conveying robot 42, and an exchanging member 43, the flow conveying line 41 is fastened to the ground, the flow conveying line 41 sequentially passes through the pretreatment module 1 and the coating module 2, the conveying robot 42 is fastened to the machine base 5, the conveying robot 42 is disposed between the pretreatment module 1 and the coating module 2, one end of the exchanging member 43 is connected to the pretreatment module 1, and the other end of the exchanging member 43 is connected to the coating module 2. The mobile conveying line 41 drives the workpiece to move, the conveying manipulator 42 conveys the workpiece into the negative pressure cabin for coating, and the workpiece is taken out from the negative pressure cabin 21 after coating is finished.
As shown in fig. 3, the exchanging part 43 includes a heat conducting block 431, a circulating pipe 432, a delivery pump 433, a blast pipe 434, a blower 435, and an exchanging block 436, the heat conducting block 431 is embedded in the inner wall of the negative pressure chamber 21, the heat conducting block 431 is tightly connected with the evaporation source 242, the circulating pipe 432 passes through the heat conducting block 431, both ends of the circulating pipe 432 are connected with the exchanging block 436, the delivery pump 433 is connected in series with the circulating pipe 432, the blast pipe 434 is connected with both ends of the exchanging block 436, one end of the blast pipe 434 away from the exchanging block 436 is connected with the blower 435, the other end of the blast pipe 434 away from the exchanging block 436 is communicated with the dry air pipe 13, and the delivery pump 433, the blower 435 and one side of the negative pressure chamber 21 away from the movable door 211 are tightly connected. The delivery pump 433 delivers cooling water, the cooling water continuously cools the heat conduction block 431, the heat conduction block 431 absorbs the temperature of the evaporation source 242, and the temperature of one side of the evaporation source 242 close to the negative pressure bin 21 is kept in a stable state, so that the vapor deposition process can be stably and continuously performed. The cooling water flows into the exchanging block 436 through the circulating pipe 432 after being heated, and flows back to the position of the heat conducting block 431 again after exchanging heat. The fan 435 continuously receives air flow into the air supply pipe 434, and the air flow enters the exchange block 436 to be heated and then is ejected from the drying air pipe 13.
As shown in fig. 3, the exchanging block 436 comprises a spiral coil 4361 and a heat exchanging pipe 4362, the spiral coil 4361 is arranged inside the heat exchanging pipe 4362, the heat exchanging pipe 4362 is tightly connected with one side of the negative pressure bin 21 away from the movable door 211, two ends of the spiral coil 4361 are communicated with the blast pipe 434, and two ends of the heat exchanging pipe 4362 are communicated with the circulating pipe 432. The cooling water passes through the heat exchange tube 4362, the air flow passes through the spiral coil 4361, and the two are in counter-convection to fully exchange heat. The waste heat of the cooling water radiating for the evaporation source is used for heating the air flow of the dry workpiece, so that the energy is recycled in the equipment, and the energy conversion efficiency of the equipment is greatly improved.
The working principle of the invention is as follows: the cleaning spray head 12 washes the workpiece, after washing, hot air flow sprayed out from the drying air pipe 13 quickly dries the workpiece, the cleaned workpiece moves towards the negative pressure bin 21 under the driving of the conveying unit 4, the workpiece is placed on the branch frame 25, the branch frame 25 is provided with a plurality of fixed discs, the first motor 27 can drive the branch frame 25 to rotate, and the workpiece is sequentially placed on each fixed disc. After the placing is finished, the first electric cylinder 26 drives the lifting sleeve 28 to move upwards, the branch frame 25 is inserted into the annular sleeve 24, the workpiece starts to be coated, the vacuum pump 22 vacuumizes the interior of the negative pressure bin 21 before the coating is started, glow discharge is generated between the evaporation source 242 and the workpiece after high-voltage direct current passes through, argon is input into the annular sleeve 24 from the argon pipe, part of the argon is ionized, a cathode dark space is formed around the cathode workpiece at the moment, the argon ions carrying positive charges are adsorbed by negative high voltage of the cathode, and the argon ions accelerate impact on the surface of the workpiece. When the alternating current power supply end is connected, the particles at the evaporation source 242 are melted and evaporated, the particles enter the glow discharge area to be ionized, the evaporated particles with positive charges are guided by the cathode to wash the workpiece, and when the throwing plating ions exceed the splashing ions, a deposition film is generated on the surface of the workpiece. After the coating is completed, the inside of the negative pressure bin 21 is filled with gas, the movable door 211 is opened, and the conveying robot 42 conveys the workpieces to the flow conveying line 41 in sequence and sends out the workpieces.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (6)

1. A color gradient coating equipment based on physical vapor deposition technology is characterized in that: the equipment comprises a pretreatment assembly (1), a coating assembly (2), a gradual change regulation and control assembly (3), a conveying unit (4) and a machine table (5), wherein the upper surfaces of the pretreatment assembly (1), the coating assembly (2) and the machine table (5) are fixedly connected, the conveying unit (4) sequentially penetrates through the pretreatment assembly (1) and the coating assembly (2), and the gradual change regulation and control assembly (3) is arranged inside the coating assembly (2);
the coating assembly (2) comprises a negative pressure bin (21), a vacuum pump (22), a central shaft (23), an annular sleeve (24), a branch frame (25), a first electric cylinder (26), a first motor (27) and a lifting sleeve (28), wherein the negative pressure bin (21) is fixedly connected with a machine table (5), the central shaft (23) is fixedly connected with the upper end and the lower end of the inner wall of the negative pressure bin (21), the annular sleeve (24) is sleeved on the outer side of the central shaft (23), the annular sleeve (24) is fixedly connected with the upper side of the inner wall of the negative pressure bin (21), the first electric cylinder (26) is fixedly connected with the central shaft (23), an output shaft of the first electric cylinder (26) is fixedly connected with the lifting sleeve (28), the lifting sleeve (28) is slidably connected with the central shaft (23), the first motor (27) is fixedly connected with the lifting sleeve (28), the branch frame (25) is rotatably connected with the lifting sleeve (28), a first gear is arranged on the output shaft of the first motor (27), a second gear is arranged on the machine table (25), the first gear is meshed with the second gear, the first gear is connected with the vacuum pump table (22), and the vacuum pump (21) is connected with the vacuum pump (21);
the inner part of the annular sleeve (24) is provided with a plurality of groups of inverted cavities (241), the groups of inverted cavities (241) are uniformly distributed around the annular sleeve (24), the inner part of the inverted cavity (241) is also provided with an evaporation source (242), an argon pipe (243), an anode end (244), a cathode end and an alternating current power end (246), the two groups of evaporation sources (242) are fixedly connected with the top of the inner wall of the negative pressure bin (21), the argon pipe (243) is arranged in the middle of the two groups of evaporation sources (242), the argon pipe (243) is embedded into the negative pressure bin (21), the alternating current power end (246) penetrates through the evaporation source (242), the anode end (244) is connected with the evaporation source (242), the cathode end is arranged on the branch frame (25), and when a workpiece is placed on the branch frame (25), the cathode end is communicated with the workpiece;
the gradual change regulation and control assembly (3) comprises a balanced magnetic field (31) and an incremental magnetic field (32), the balanced magnetic field (31) and the incremental magnetic field (32) are arranged in two groups, the balanced magnetic field (31) is connected with the incremental magnetic field (32), the two groups of balanced magnetic field (31) and the incremental magnetic field (32) are respectively arranged below the two groups of evaporation sources (242), the balanced magnetic field (31), the incremental magnetic field (32) and the side wall of the inverted hanging cavity (241) are fixedly connected, the two groups of incremental magnetic field (32) are arranged on one side close to each other, the two groups of balanced magnetic field (31) are arranged on one side far away from the evaporation sources (242), the magnetic field directions of the two groups of balanced magnetic field (31) and the incremental magnetic field (32) are opposite, and the incremental magnetic field (32) presents an incremental trend to the central position of the two groups of incremental magnetic field (32).
2. The apparatus for coating a film with a graded color based on physical vapor deposition technology as claimed in claim 1, wherein: pretreatment assembly (1) is including pretreatment case (11), washing shower nozzle (12), dry trachea (13), pretreatment case (11) and board (5) fastening connection, wash shower nozzle (12), dry trachea (13) and set up inside pretreatment case (11), wash shower nozzle (12) and pretreatment case (11) top fastening connection, dry trachea (13) set up in pretreatment case (11) both sides.
3. The color-gradient coating equipment based on the physical vapor deposition technology as claimed in claim 2, wherein: be provided with dodge gate (211), axis of rotation (212), control motor (213), action wheel (214), follow driving wheel (215) on negative pressure storehouse (21), axis of rotation (212) and negative pressure storehouse (21) top are rotated and are connected, dodge gate (211) and axis of rotation (212) fastening connection, control motor (213) and negative pressure storehouse (21) top fastening connection, the output shaft and action wheel (214) fastening connection of control motor (213), follow driving wheel (215) and axis of rotation (212) fastening connection, action wheel (214) and follow driving wheel (215) meshing.
4. The apparatus of claim 3, wherein the apparatus comprises: the conveying unit (4) comprises a flowing conveying line (41), a conveying manipulator (42) and an exchange part (43), the flowing conveying line (41) is fixedly connected with the ground, the flowing conveying line (41) sequentially penetrates through the pretreatment assembly (1) and the coating assembly (2), the conveying manipulator (42) is fixedly connected with the machine table (5), the conveying manipulator (42) is arranged between the pretreatment assembly (1) and the coating assembly (2), one end of the exchange part (43) is connected with the pretreatment assembly (1), and the other end of the exchange part (43) is connected with the coating assembly (2).
5. The apparatus of claim 4, wherein the apparatus comprises: the exchange component (43) comprises a heat conduction block (431), a circulation pipe (432), a delivery pump (433), a blast pipe (434), a fan (435) and an exchange block (436), wherein the heat conduction block (431) is embedded in the inner wall of the negative pressure bin (21), the heat conduction block (431) is fixedly connected with the evaporation source (242), the circulation pipe (432) penetrates through the heat conduction block (431), two ends of the circulation pipe (432) are connected with the exchange block (436), the delivery pump (433) is connected in series on the circulation pipe (432), the blast pipe (434) is connected with two ends of the exchange block (436), one end, far away from the exchange block (436), of the blast pipe (434) is connected with the fan (435), the other end, far away from the exchange block (436), of the blast pipe (434) is communicated with the drying air pipe (13), and the delivery pump (433), the fan (435) and one side, far away from the movable door (211), of the negative pressure bin (21) are fixedly connected.
6. The apparatus of claim 5, wherein the apparatus comprises: the exchange block (436) comprises a spiral coil (4361) and a heat exchange tube (4362), the spiral coil (4361) is arranged inside the heat exchange tube (4362), the heat exchange tube (4362) is fixedly connected with one side, far away from the movable door (211), of the negative pressure bin (21), two ends of the spiral coil (4361) are communicated with the blast pipe (434), and two ends of the heat exchange tube (4362) are communicated with the circulating pipe (432).
CN202211565406.5A 2022-12-07 2022-12-07 Color gradient coating equipment based on physical vapor deposition technology Active CN115558893B (en)

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CN211595777U (en) * 2019-09-07 2020-09-29 伯恩创盛技术研发(惠州)有限公司 Gradient-color sputtering coating device
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Denomination of invention: A Color Gradient Coating Equipment Based on Physical Vapor Deposition Technology

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