CN115557470B - Production method and production device of electronic grade hydrogen peroxide - Google Patents
Production method and production device of electronic grade hydrogen peroxide Download PDFInfo
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- CN115557470B CN115557470B CN202211374536.0A CN202211374536A CN115557470B CN 115557470 B CN115557470 B CN 115557470B CN 202211374536 A CN202211374536 A CN 202211374536A CN 115557470 B CN115557470 B CN 115557470B
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B15/00—Peroxides; Peroxyhydrates; Peroxyacids or salts thereof; Superoxides; Ozonides
- C01B15/01—Hydrogen peroxide
- C01B15/013—Separation; Purification; Concentration
- C01B15/0135—Purification by solid ion-exchangers or solid chelating agents
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B15/00—Peroxides; Peroxyhydrates; Peroxyacids or salts thereof; Superoxides; Ozonides
- C01B15/01—Hydrogen peroxide
- C01B15/013—Separation; Purification; Concentration
Abstract
The production method and the production device of the electronic grade hydrogen peroxide are characterized in that the hydrogen peroxide is prepared by concentrating, cooling by a heat exchanger, membrane separation of a first-stage reverse osmosis mechanism (1), membrane separation of a second-stage reverse osmosis mechanism (2) and ion exchange of an ion exchange mechanism (3); high-salt water generated by the first-stage reverse osmosis mechanism (1) and the second-stage reverse osmosis mechanism (2) is mixed with oxidation liquid of the oxidation liquid tank (4) and then is sent to the extraction tower (5), the extraction tower (5) is internally subjected to countercurrent extraction by pure water and phosphoric acid mixed liquid, raffinate enters the raffinate treatment system, extract is sent to the purification tower (6), the purification tower (6) is internally subjected to countercurrent extraction by heavy aromatic hydrocarbon, the heavy aromatic hydrocarbon coming out from the top of the purification tower (6) is sent to the heavy aromatic hydrocarbon recovery system, and hydrogen peroxide coming out from the bottom of the purification tower (6) is sent to the hydrogen peroxide storage tank (7). Can effectively remove charged ions, inorganic matters, colloid particles and organic matters in reverse osmosis high-salt water, and improve the quality of the hydrogen peroxide sold outside.
Description
Technical Field
The application relates to the technical field of hydrogen peroxide storage, in particular to a production method of electronic grade hydrogen peroxide, and also relates to a production device of electronic grade hydrogen peroxide.
Background
The aqueous solution of hydrogen peroxide, also called hydrogen peroxide, is an important raw material for producing peroxyacetic acid, thiourea peroxide and other peroxides, and is widely used in the industries of medicine, textile printing and dyeing, papermaking bleaching and the like. The high-concentration hydrogen peroxide has strong oxidability and instability, is transparent and colorless liquid at normal temperature, has pungent smell and viscosity slightly higher than that of water, and belongs to a class A fire hazard product.
Electronic grade hydrogen peroxide directly affects integrated circuit performance and continuity and stability of its production. The electronic grade hydrogen peroxide aqueous solution is generally prepared by taking industrial grade hydrogen peroxide aqueous solution as a raw material and purifying the raw material through a series of refining. Common methods include distillation, adsorption, extraction, reverse osmosis membrane separation, freeze crystallization, resin and ultrafiltration. The industrial aqueous hydrogen peroxide solution is purified by adopting a single unit operation, and the quality of the aqueous hydrogen peroxide solution can be improved, but the single method has high energy consumption, high cost and low efficiency.
CN 112062096A discloses a production device and a production method of electronic grade hydrogen peroxide aqueous solution. The production device of the electronic grade hydrogen peroxide aqueous solution comprises a rectifying device, a first delivery pump, a reverse osmosis device, a second delivery pump, an ion exchange device, a third delivery pump, an ultrapure filtering device, a fourth delivery pump and a filling device which are sequentially connected by pipelines. And (3) rectifying, reverse osmosis and ion exchange are carried out on the industrial hydrogen peroxide, and finally, an electronic grade hydrogen peroxide aqueous solution is obtained through ultrafiltration membrane filtration.
CN113912019a discloses a method for producing electronic grade hydrogen peroxide aqueous solution, a part of hydrogen peroxide aqueous solution enters from the top of an evaporator, enters a concentrated solution storage area of the evaporator after being heated by the evaporator, gas generated in the concentrated solution storage area enters a rectifying tower, the rest part of hydrogen peroxide aqueous solution enters the rectifying tower from a second feed inlet of the rectifying tower, a part of hydrogen peroxide aqueous solution which is concentrated by the evaporator and the rectifying tower and then combined is pumped into a heat exchanger, cooled to normal temperature and enters a first-stage reverse osmosis mechanism, reverse osmosis liquid obtained after reverse osmosis by the first-stage reverse osmosis mechanism enters a second-stage reverse osmosis mechanism, and the reverse osmosis liquid obtained after reverse osmosis by the second-stage reverse osmosis mechanism is subjected to ion exchange by an ion exchange device to obtain the electronic grade hydrogen peroxide aqueous solution.
In the production process of the electronic grade hydrogen peroxide, the reverse osmosis membrane separation technology is applied, so that charged ions, inorganic matters, colloid particles and the like in the industrial grade hydrogen peroxide aqueous solution can be effectively removed, and the hydrogen peroxide aqueous solution with the conductivity reaching the electronic grade hydrogen peroxide requirement can be obtained. In the reverse osmosis production process, charged ions, inorganic matters, colloid particles, organic matters and the like are enriched in the high-concentration liquid to generate reverse osmosis high-salt water. In the prior art, the reverse osmosis high-salt water is mixed into finished hydrogen peroxide for sale, and the quality of the hydrogen peroxide is affected due to the fact that the high-salt water contains more impurities.
Disclosure of Invention
Aiming at the defects of the prior art, the application aims to provide a production method of electronic grade hydrogen peroxide and a production device of electronic grade hydrogen peroxide, which can effectively remove charged ions, inorganic matters, colloid particles and the like in reverse osmosis high-salt water and improve the quality of the sold hydrogen peroxide.
In order to solve the technical problems, in one aspect, the application provides a method for producing electronic grade hydrogen peroxide, which comprises the following steps: concentrating industrial grade hydrogen peroxide by a hydrogen peroxide concentration device, cooling by a heat exchanger, separating by a first-stage reverse osmosis mechanism membrane, separating by a second-stage reverse osmosis mechanism membrane, and performing ion exchange by an ion exchange mechanism; the high-salt water generated by the first-stage reverse osmosis mechanism and the second-stage reverse osmosis mechanism is mixed with the oxidation liquid in the oxidation liquid tank and then sent to the extraction tower, the extraction tower is internally subjected to countercurrent extraction by using the mixed liquid of pure water and phosphoric acid, the raffinate enters the raffinate treatment system, the extraction liquid is sent to the purification tower, the purification tower is internally subjected to countercurrent extraction by using heavy aromatic hydrocarbon, the heavy aromatic hydrocarbon coming out of the top of the purification tower is sent to the heavy aromatic hydrocarbon recovery system, and the hydrogen peroxide coming out of the bottom of the purification tower is sent to the hydrogen peroxide storage tank.
As a further improved technical scheme, the method for producing electronic grade hydrogen peroxide provided by the application comprises the steps of feeding a part of 27.5-33wt% of hydrogen peroxide aqueous solution from the top of an evaporator during concentration, heating the hydrogen peroxide aqueous solution by the evaporator, feeding the heated hydrogen peroxide aqueous solution into a concentrated solution storage area of the evaporator, feeding gas generated in the concentrated solution storage area into a rectifying tower, feeding the rest 27.5-33wt% of hydrogen peroxide aqueous solution into the rectifying tower from a second feed inlet of the rectifying tower, feeding the concentrated and combined hydrogen peroxide aqueous solution into the rectifying tower, pumping the concentrated and combined hydrogen peroxide aqueous solution into a heat exchanger, cooling the concentrated and combined hydrogen peroxide aqueous solution to normal temperature, feeding the concentrated and combined hydrogen peroxide aqueous solution into a first-stage reverse osmosis mechanism, and separating the concentrated and combined hydrogen peroxide aqueous solution by a membrane of the first-stage reverse osmosis mechanism to obtain the hydrogen peroxide aqueous solution with total organic carbon concentration of less than 10ppm and PO 4 3- The reverse osmosis liquid with the ion concentration lower than 10ppm enters a secondary reverse osmosis mechanism, and the total organic carbon concentration lower than 5ppm and PO are obtained after membrane separation by the secondary reverse osmosis mechanism 4 3- The reverse osmosis liquid with the ion concentration lower than 5ppm is subjected to ion exchange by an ion exchange mechanism to prepare the electronic grade hydrogen peroxide water solution.
In order to solve the technical problems, on the other hand, the application provides a production device of electronic grade hydrogen peroxide, which comprises an evaporator, a rectifying tower, a condenser communicated with a gas phase outlet of the rectifying tower, and a vacuum pump connected with the condenser; the concentrated solution storage area of the evaporator is communicated with a first feed inlet of the rectifying tower, the dilute hydrogen peroxide feed pipe is communicated with a feed inlet of the evaporator and is communicated with a second feed inlet of the rectifying tower, a steam ejector is arranged on a steam inlet pipe of the evaporator, and a suction cavity of the steam ejector is communicated with the top of the rectifying tower through a pipeline; the production device of the electronic grade hydrogen peroxide also comprises a heat exchanger, a first medium inlet, a first-stage reverse osmosis mechanism, a second-stage reverse osmosis mechanism and an ion exchange mechanism, wherein the first medium inlet is connected with a concentrated solution outlet pipeline of the evaporator and a concentrated solution outlet pipeline of the rectifying tower, the first-stage reverse osmosis mechanism is communicated with a first medium outlet of the heat exchanger, a liquid inlet is communicated with a reverse osmosis liquid outlet of the first-stage reverse osmosis mechanism, and the liquid inlet is communicated with a reverse osmosis liquid outlet of the second-stage reverse osmosis mechanism; the production device of the electronic grade hydrogen peroxide also comprises an oxidation liquid tank, an oxidation liquid pump, an extraction tower and a purification tower; the high brine outlet of the first-stage reverse osmosis mechanism, the high brine outlet of the second-stage reverse osmosis mechanism and the oxidation liquid outlet of the oxidation liquid tank are connected with the inlet of the oxidation liquid pump through pipelines, the outlet of the oxidation liquid pump is connected with the bottom liquid inlet of the extraction tower through pipelines, the top liquid inlet of the extraction tower is connected with the pure water supply device, the bottom liquid outlet of the extraction tower is connected with the top liquid inlet of the purification tower through pipelines, the top raffinate outlet of the extraction tower is connected with the raffinate treatment system through pipelines, the bottom liquid inlet of the purification tower is connected with the heavy aromatic hydrocarbon supply pipe, the top liquid outlet of the purification tower is connected with the heavy aromatic hydrocarbon recovery system through pipelines, and the bottom liquid outlet of the purification tower is connected with the hydrogen peroxide storage tank through pipelines.
As a further improved technical scheme, the electronic grade hydrogen peroxide production device provided by the application comprises a tank body, a hydrogen peroxide outlet connected with the top of the tank body, a hydrogen peroxide inlet connected with the bottom of the tank body, and an exhaust mechanism connected with the top of the tank body; the exhaust mechanism comprises a valve body connected with the top of the tank body, a valve seat arranged at the lower part of the valve body and a valve core arranged above the valve seat.
On the basis of the improvement scheme, as a further improvement technical scheme, the electronic grade hydrogen peroxide production device provided by the application has the advantages that the contact surface of the valve seat and the valve core is lined with the ethylene propylene diene monomer rubber sealing strip.
On the basis of the improved scheme, as a further improved technical scheme, the electronic grade hydrogen peroxide production device provided by the application is also provided with a shield connected with the top of the valve body.
As a further improved technical scheme, the electronic grade hydrogen peroxide production device provided by the application is characterized in that the extraction tower is a sieve plate tower; the purifying tower is a packed tower.
The foregoing improvements may be implemented alone or in combination without conflict.
According to the technical scheme provided by the application, charged ions, inorganic matters, colloid particles and the like in reverse osmosis high-salt water enter raffinate in the extraction process, so that the ions, the inorganic matters, the colloid particles and the like are removed; the organic matters in the reverse osmosis high-salt water are removed. Can effectively remove charged ions, inorganic matters, colloid particles and organic matters in reverse osmosis high-salt water, and improve the quality of the hydrogen peroxide sold outside.
Drawings
The accompanying drawings are included to provide a further understanding of the application, and are incorporated in and constitute a part of this specification, and are included to illustrate and practice the application and are not to be construed as limiting the application. In the drawings:
FIG. 1 is a schematic diagram of the structural principle of an embodiment of an electronic grade hydrogen peroxide production device;
FIG. 2 is a schematic diagram of the structural principle of the ion exchange mechanism in the embodiment;
fig. 3 is an enlarged view of a portion a in fig. 2.
Detailed Description
The following describes the embodiments of the present application in further detail with reference to the drawings.
The device for producing the electronic grade hydrogen peroxide as shown in fig. 1 comprises an evaporator 8, a rectifying tower 10, a condenser 12 communicated with a gas phase outlet of the rectifying tower 10, and a vacuum pump 13 connected with the condenser 12. The concentrated solution storage area 9 of the evaporator 8 is communicated with a first feed inlet of the rectifying tower 10, the dilute hydrogen peroxide feed pipe 14 is communicated with the feed inlet of the evaporator 8 and is communicated with a second feed inlet of the rectifying tower 10, a steam ejector 16 is arranged on a steam inlet pipe 15 of the evaporator 8, and a suction cavity of the steam ejector 16 is communicated with the top of the rectifying tower 10 through a pipeline; the production device of electronic grade hydrogen peroxide also comprises a heat exchanger 11, wherein a first medium inlet is connected with the evaporator 8 and a concentrated solution outlet pipeline of the rectifying tower 10, a first-stage reverse osmosis mechanism 1 is communicated with a first medium outlet of the heat exchanger 11, a liquid inlet is communicated with a reverse osmosis liquid outlet of the first-stage reverse osmosis mechanism 1, a second-stage reverse osmosis mechanism 2 is communicated with a liquid inlet, and a liquid inlet is communicated with a reverse osmosis liquid outlet of the second-stage reverse osmosis mechanism 2, and an ion exchange mechanism 3 is communicated with the reverse osmosis liquid outlet of the second-stage reverse osmosis mechanism 2. The electronic grade hydrogen peroxide production device also comprises an oxidation liquid tank 4, an oxidation liquid pump 17, an extraction tower 5 and a purification tower 6; the high brine outlet of the first-stage reverse osmosis mechanism 1, the high brine outlet of the second-stage reverse osmosis mechanism 2 and the oxidation liquid outlet of the oxidation liquid tank 4 are connected with the inlet of the oxidation liquid pump 17 through pipelines, the outlet of the oxidation liquid pump 17 is connected with the bottom liquid inlet of the extraction tower 5 through pipelines, the top liquid inlet of the extraction tower 5 is connected with the pure water supply device, the bottom liquid outlet of the extraction tower 5 is connected with the top liquid inlet of the purification tower 6 through pipelines, the top raffinate outlet of the extraction tower 5 is connected with the raffinate treatment system through pipelines, the bottom liquid inlet of the purification tower 6 is connected with the heavy aromatic hydrocarbon feed pipe, the top liquid outlet of the purification tower 6 is connected with the heavy aromatic hydrocarbon recovery system through pipelines, and the bottom liquid outlet of the purification tower 6 is connected with the hydrogen peroxide storage tank 7 through pipelines. The extraction tower 5 is a sieve plate tower. The purifying tower 6 is a packed tower. The heavy aromatics are C9 and C10 aromatics.
The hydrogen peroxide water solution with the concentration of 27.5-33 wt% in the hydrogen peroxide storage tank 7 enters from the top of the evaporator 8 through one part of the pump, enters the concentrated solution storage area 9 of the evaporator 8 after being heated by the evaporator 8, and the gas generated in the concentrated solution storage area 9 enters the rectifying tower 10, and the other part of the concentrated solution storage area enters 27.5wt% to the outsideThe hydrogen peroxide aqueous solution with the concentration of 33 weight percent enters the rectifying tower 10 from the second feed inlet of the rectifying tower 10, the concentration of the combined hydrogen peroxide aqueous solution after being concentrated by the evaporator 8 and the rectifying tower 10 is not lower than 50 weight percent, the hydrogen peroxide aqueous solution after being concentrated by the evaporator 8 and the rectifying tower 10 is pumped into the heat exchanger 11, cooled to normal temperature and enters the first-stage reverse osmosis mechanism 1 for membrane separation, and the total organic carbon concentration is lower than 10ppm and PO is obtained after the membrane separation by the first-stage reverse osmosis mechanism 1 4 3- The reverse osmosis liquid with the ion concentration lower than 10ppm enters a secondary reverse osmosis mechanism 2, and the total organic carbon concentration lower than 5ppm and PO are obtained after membrane separation by the secondary reverse osmosis mechanism 2 4 3- The reverse osmosis liquid with the ion concentration lower than 5ppm is subjected to ion exchange by an ion exchange mechanism 3 to prepare the electronic grade hydrogen peroxide water solution. The high-salt water generated by the first-stage reverse osmosis mechanism 1 and the second-stage reverse osmosis mechanism 2 is mixed with the oxidizing liquid in the oxidizing liquid tank 4 and then sent to the extraction tower 5, the mixed liquid of pure water and phosphoric acid is used for countercurrent extraction in the extraction tower 5, the raffinate enters the raffinate treatment system, the extract is sent to the purification tower 6, the C9 and C10 heavy aromatics are used for countercurrent extraction in the purification tower 6, the heavy aromatics from the top of the purification tower 6 are sent to the heavy aromatics recovery system, and the hydrogen peroxide from the bottom of the purification tower 6 is sent to the hydrogen peroxide storage tank 7.
According to the technical scheme provided by the application, the low-concentration hydrogen peroxide water solution is added into the rectifying tower 10, the water content of the hydrogen peroxide water solution is evaporated by flash evaporation and utilizing the heat of secondary steam generated by the evaporator, and the secondary steam generated by the steam ejector suction rectifying tower 10 is doped into heating steam entering the evaporator 8, so that the purpose of energy saving is achieved. The condensing amount of the secondary steam is reduced, so that the cooling water consumption of the condenser can be reduced. The method adopts a membrane separation technology and an ion exchange technology, and adopts a secondary reverse osmosis mechanism to effectively remove charged ions, inorganic matters, colloid particles and the like in the hydrogen peroxide aqueous solution, so as to obtain the hydrogen peroxide aqueous solution with the conductivity reaching the electronic grade hydrogen peroxide requirement.
The oxidizing liquid in the oxidizing liquid tank 4 and the high-brine of the first-stage reverse osmosis mechanism 1 and the high-brine of the second-stage reverse osmosis mechanism 2 are sent to the bottom of the extraction tower 5 through the oxidizing liquid pump 17. The extraction tower 5 is a sieve plate tower, and each layer of sieve plate is provided with a downcomer and a plurality of sieve holes. The oxidation liquid containing hydrogen peroxide and high-salt water enter from the bottom of the extraction tower 4 and are dispersed into countless small oil droplets by the sieve plate to float to the top of the tower, meanwhile, the pure water supply device mixes pure water and phosphoric acid solution and then sends extraction water to the top of the extraction tower 5, and the extraction water is continuously downwards flowed through the upper and lower water phases in the downcomer tower of each layer of sieve plate to carry out countercurrent extraction with the upward floating oxidation liquid and high-salt water. In the extraction process, water is the continuous phase, and the oxidizing liquid and the high-salt water are the dispersed phases. During the flow of the extract water from the top to the bottom, in which the hydrogen peroxide content gradually increases, the final flow from the bottom, called extract (crude hydrogen peroxide), enters the top of the purification column 6 by means of a head. The oxidation liquid and high-salt water entering from the bottom of the extraction tower 5 gradually reduce the hydrogen peroxide content in the process of dispersing and floating upwards, finally flow out from the top of the tower, namely raffinate, and the separated raffinate enters a raffinate treatment system. Charged ions, inorganic matters, colloid particles and the like in the reverse osmosis high-salt water enter the raffinate to be removed.
The extract contains a small amount of working fluid, and a purification treatment is required to remove these impurities. The purifying tower 6 is a packed tower, the purifying tower 6 is filled with C9 and C10 heavy aromatics, an extracting solution entering from the tower top flows downwards in the tower, and the C9 and C10 heavy aromatics are pumped by the aromatics to form countercurrent extraction with the extracting solution at the bottom of the purifying tower 6 so as to remove organic impurities in hydrogen peroxide. Organic matters in reverse osmosis high-salt water are removed. In this process, the heavy aromatics are the continuous phase and the extract is the disperse phase. The purified hydrogen peroxide flows out from the bottom of the purifying tower 6 and enters the hydrogen peroxide storage tank 7.
As an embodiment, as shown in fig. 2 and 3, the ion exchange mechanism 3 of the electronic grade hydrogen peroxide production device includes a tank 18, a hydrogen peroxide outlet 19 connected to the top of the tank 18, a hydrogen peroxide inlet 20 connected to the bottom of the tank 18, and an exhaust mechanism connected to the top of the tank 18; the exhaust mechanism comprises a valve body 21 connected with the top of the tank body 18, a valve seat 22 arranged at the lower part of the valve body 21, and a valve core 23 arranged above the valve seat.
As one example, as shown in fig. 3, the contact surface between the valve seat 22 and the valve core 23 is lined with an ethylene propylene diene monomer rubber sealing strip 24; there is also a shroud 25 attached to the top of the valve body 21.
In the improved technical scheme of the application, the ion exchange mechanism 3 can timely discharge the hydrogen peroxide decomposed gas, which is beneficial to maintaining the normal production of the resin adsorption tank.
The foregoing is merely a preferred embodiment of the present application and is not intended to limit the present application in any way, and various modifications and variations may be made by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.
Claims (7)
1. The production method of the electronic grade hydrogen peroxide comprises the following steps: concentrating industrial grade hydrogen peroxide by a hydrogen peroxide concentration device, cooling by a heat exchanger, separating a first-stage reverse osmosis mechanism (1) by a membrane, separating a second-stage reverse osmosis mechanism (2) by a membrane, and performing ion exchange by an ion exchange mechanism (3); the device is characterized in that high-salt water generated by the first-stage reverse osmosis mechanism (1) and the second-stage reverse osmosis mechanism (2) is mixed with oxidation liquid of the oxidation liquid tank (4) and then sent to the extraction tower (5), the extraction tower (5) is internally subjected to countercurrent extraction by pure water and phosphoric acid mixed liquid, raffinate enters the raffinate treatment system, extract is sent to the purification tower (6), the purification tower (6) is internally subjected to countercurrent extraction by heavy aromatic hydrocarbon, the heavy aromatic hydrocarbon from the top of the purification tower (6) is sent to the heavy aromatic hydrocarbon recovery system, and hydrogen peroxide from the bottom of the purification tower (6) is sent to the hydrogen peroxide storage tank (7).
2. The method for producing electronic grade hydrogen peroxide according to claim 1, wherein a part of 27.5wt% -33 wt% of hydrogen peroxide aqueous solution is fed from the top of the evaporator (8) during concentration, heated by the evaporator (8) and fed into the concentrated solution storage area (9) of the evaporator (8), the gas generated in the concentrated solution storage area (9) is fed into the rectifying column (10), and the remaining part of 27.5wt%The hydrogen peroxide aqueous solution with the concentration of 33 weight percent enters a rectifying tower (10) from a second feed inlet of the rectifying tower (10), the concentration of the hydrogen peroxide aqueous solution which is concentrated by the evaporator (8) and the rectifying tower (10) and combined is not lower than 50 weight percent, the hydrogen peroxide aqueous solution which is concentrated by the evaporator (8) and the rectifying tower (10) is pumped into a heat exchanger (11), cooled to normal temperature and enters a first-stage reverse osmosis mechanism (1), and the total organic carbon concentration is lower than 10ppm and PO is obtained after membrane separation by the first-stage reverse osmosis mechanism (1) 4 3- The reverse osmosis liquid with the ion concentration lower than 10ppm enters a secondary reverse osmosis mechanism (2), and the total organic carbon concentration lower than 5ppm and PO are obtained after membrane separation by the secondary reverse osmosis mechanism (2) 4 3- The reverse osmosis liquid with the ion concentration lower than 5ppm is subjected to ion exchange by an ion exchange mechanism (3) to prepare the electronic grade hydrogen peroxide water solution.
3. The production device of the electronic grade hydrogen peroxide comprises an evaporator (8), a rectifying tower (10), a condenser (12) communicated with a gas phase outlet of the rectifying tower (10), and a vacuum pump (13) connected with the condenser (12); the concentrated solution storage area (9) of the evaporator (8) is communicated with a first feed inlet of the rectifying tower (10), a dilute hydrogen peroxide feed pipe (14) is communicated with the feed inlet of the evaporator (8) and is communicated with a second feed inlet of the rectifying tower (10), a steam ejector (16) is arranged on a steam inlet pipe (15) of the evaporator (8), and a suction cavity of the steam ejector (16) is communicated with the top of the rectifying tower (10) through a pipeline; the production device of the electronic grade hydrogen peroxide also comprises a heat exchanger (11) with a first medium inlet connected with a concentrated solution outlet pipeline of the evaporator (8) and a concentrated solution outlet pipeline of the rectifying tower (10), a first-stage reverse osmosis mechanism (1) communicated with a first medium outlet of the heat exchanger (11), a second-stage reverse osmosis mechanism (2) with a liquid inlet communicated with a reverse osmosis liquid outlet of the first-stage reverse osmosis mechanism (1), and an ion exchange mechanism (3) with a liquid inlet communicated with a reverse osmosis liquid outlet of the second-stage reverse osmosis mechanism (2); the electronic grade hydrogen peroxide production device is characterized by further comprising an oxidation liquid tank (4), an oxidation liquid pump (17), an extraction tower (5) and a purification tower (6); the high-salinity water outlet of the first-stage reverse osmosis mechanism (1), the high-salinity water outlet of the second-stage reverse osmosis mechanism (2) and the oxidation liquid outlet of the oxidation liquid tank (4) are connected with the inlet of the oxidation liquid pump (17) through pipelines, the outlet of the oxidation liquid pump (17) is connected with the bottom liquid inlet of the extraction tower (5) through pipelines, the top liquid inlet of the extraction tower (5) is connected with the pure water supply device, the bottom liquid outlet of the extraction tower (5) is connected with the top liquid inlet of the purification tower (6) through pipelines, the top raffinate outlet of the extraction tower (5) is connected with the raffinate treatment system through pipelines, the bottom liquid inlet of the purification tower (6) is connected with the heavy aromatic hydrocarbon feed pipe, the top liquid outlet of the purification tower (6) is connected with the heavy aromatic hydrocarbon recovery system through pipelines, and the bottom liquid outlet of the purification tower (6) is connected with the hydrogen peroxide storage tank (7) through pipelines.
4. The electronic grade hydrogen peroxide production device according to claim 3, wherein the ion exchange mechanism (3) comprises a tank body (18), a hydrogen peroxide outlet (19) connected with the top of the tank body (18), a hydrogen peroxide inlet (20) connected with the bottom of the tank body (18), and an exhaust mechanism connected with the top of the tank body (18); the exhaust mechanism comprises a valve body (21) connected with the top of the tank body (18), a valve seat (22) arranged at the lower part of the valve body (21), and a valve core (23) arranged above the valve seat.
5. The electronic grade hydrogen peroxide production device according to claim 4, wherein the contact surface of the valve seat (22) and the valve core (23) is lined with an ethylene propylene diene monomer rubber sealing strip (24).
6. The electronic grade hydrogen peroxide production apparatus of claim 4, further comprising a shield (25) attached to the top of the valve body (21).
7. The production device of electronic grade hydrogen peroxide according to claim 3, characterized in that the extraction tower (5) is a sieve plate tower; the purifying tower (6) is a packed tower.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109053424A (en) * | 2018-10-31 | 2018-12-21 | 天津中福环保科技股份有限公司 | System and method of the field of new materials from multiple types acetic acid devil liquor recovery purification acetic acid |
| CN211283731U (en) * | 2019-12-20 | 2020-08-18 | 扬州荣祥科技发展有限公司 | Extraction purification water inlet and outlet system in hydrogen peroxide production |
| CN112830457A (en) * | 2020-12-31 | 2021-05-25 | 安瑞森(宁夏)电子材料有限公司 | Novel purification process of hydrogen peroxide |
| CN113912019A (en) * | 2021-11-29 | 2022-01-11 | 湖南双阳高科化工有限公司 | Production method of electronic grade hydrogen peroxide aqueous solution |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109053424A (en) * | 2018-10-31 | 2018-12-21 | 天津中福环保科技股份有限公司 | System and method of the field of new materials from multiple types acetic acid devil liquor recovery purification acetic acid |
| CN211283731U (en) * | 2019-12-20 | 2020-08-18 | 扬州荣祥科技发展有限公司 | Extraction purification water inlet and outlet system in hydrogen peroxide production |
| CN112830457A (en) * | 2020-12-31 | 2021-05-25 | 安瑞森(宁夏)电子材料有限公司 | Novel purification process of hydrogen peroxide |
| CN113912019A (en) * | 2021-11-29 | 2022-01-11 | 湖南双阳高科化工有限公司 | Production method of electronic grade hydrogen peroxide aqueous solution |
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