CN115514336A - Impedance matching circuit, test device, and quantum computer - Google Patents

Impedance matching circuit, test device, and quantum computer Download PDF

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Publication number
CN115514336A
CN115514336A CN202211220053.5A CN202211220053A CN115514336A CN 115514336 A CN115514336 A CN 115514336A CN 202211220053 A CN202211220053 A CN 202211220053A CN 115514336 A CN115514336 A CN 115514336A
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capacitor
resistor
signal
impedance matching
capacitance
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不公告发明人
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Origin Quantum Computing Technology Co Ltd
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Origin Quantum Computing Technology Co Ltd
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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H7/00Multiple-port networks comprising only passive electrical elements as network components
    • H03H7/38Impedance-matching networks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2601Apparatus or methods therefor
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N10/00Quantum computing, i.e. information processing based on quantum-mechanical phenomena
    • G06N10/40Physical realisations or architectures of quantum processors or components for manipulating qubits, e.g. qubit coupling or qubit control

Abstract

The application belongs to the quantum field, and discloses an impedance matching circuit, which is used for a test circuit of a semiconductor quantum processor and is characterized by comprising a first resistor, a first inductor and a first capacitance adjusting unit which are connected through a first end; the second end of the first inductor is used for receiving a measurement signal and outputting a measurement feedback signal, wherein the measurement feedback signal is a feedback signal output by the semiconductor quantum processor based on the measurement signal; a second end of the first capacitance adjusting unit is configured to receive a first direct current signal, where the first direct current signal is used to adjust a capacitance value of the first capacitance adjusting unit; the second end of the first resistor is grounded, and the first resistor is the equivalent resistor of the semiconductor quantum processor. The method and the device improve the impedance matching degree among the semiconductor quantum processor, the test circuit and the signal source, and further improve the measurement sensitivity of the spin qubit integrated on the semiconductor quantum processor.

Description

Impedance matching circuit, test device, and quantum computer
Technical Field
The application belongs to the quantum field, and particularly relates to an impedance matching circuit, a testing device and a quantum computer.
Background
Quantum processors are core components that perform quantum computation, on which a plurality of qubits, for example spin qubits on semiconductor quantum processors, are integrated. The spin qubit is controlled by a direct current signal, and is measured by a radio frequency signal, and a radio frequency reflection reading technology is usually adopted during measurement. Specifically, the rf reflection reading technique is to apply an rf measurement signal to a semiconductor quantum processor, and acquire a feedback signal output by the semiconductor quantum processor to perform demodulation processing to obtain a measurement result.
When a radio frequency measurement signal output by a radio frequency source is transmitted to a semiconductor quantum processor through a test line, if the impedance of the semiconductor quantum processor is the same as the impedance of the radio frequency source and the test line, the radio frequency measurement signal generated by the radio frequency source is completely absorbed by the semiconductor quantum processor, the voltage reflection coefficient of the radio frequency measurement signal is 0, the change of the voltage reflection coefficient of the radio frequency measurement signal is large, and the measurement sensitivity to spin qubits is highest. If the impedance of the semiconductor quantum processor is not matched with the impedance of the test line and the radio frequency source, the radio frequency measurement signal transmitted to the semiconductor quantum processor is reflected, so that the change of the voltage reflection coefficient of the radio frequency measurement signal is small, and the measurement sensitivity of the spin qubit on the semiconductor quantum processor is directly influenced.
Specifically, the semiconductor quantum processor is usually connected to the test line by wire bonding, wherein the impedance of the semiconductor quantum processor is affected by the lead, the two-dimensional electron gas in the semiconductor quantum processor, the ohmic contact electrode, and the like, so that the impedance of the semiconductor quantum processor to be measured changes when the semiconductor quantum processor is replaced, and the impedance of the test line also changes slightly under the influence of the measurement environment, and the impedance of the semiconductor quantum processor is mismatched with the impedance of the radio frequency source and the test line due to the impedance changes, so that the measurement sensitivity of the spin qubit on the semiconductor quantum processor is directly affected.
Therefore, how to improve the impedance matching degree among the semiconductor quantum processor, the test line and the signal source becomes an urgent problem to be solved in the field of semiconductor quantum processor measurement.
Disclosure of Invention
The invention aims to provide an impedance matching circuit, a testing device and a quantum computer, which make up the defect of poor impedance matching degree among a semiconductor quantum processor, a testing circuit and a signal source in the prior art, enable impedance matching to be always in an optimal state and further improve the measurement sensitivity of spin qubits integrated on the semiconductor quantum processor.
The technical scheme of the application is as follows:
an aspect of the present application provides an impedance matching circuit for a test line of a semiconductor quantum processor, including a first resistor, a first inductor, and a first capacitance adjusting unit connected through a first terminal;
the second end of the first inductor is used for receiving a measurement signal and outputting a measurement feedback signal, and the measurement feedback signal is a feedback signal output by the semiconductor quantum processor based on the measurement signal;
the second end of the first capacitance adjusting unit is used for receiving a first direct current signal, and the first direct current signal is used for adjusting the capacitance value of the first capacitance adjusting unit;
the second end of the first resistor is grounded, and the first resistor is the equivalent resistor of the semiconductor quantum processor.
In the impedance matching circuit, it is preferable that the first capacitance adjusting unit includes a first capacitor, a second capacitor, and a third capacitor;
the first end of the first capacitor is connected with the first end of the first resistor, and the second end of the first capacitor is grounded;
the first end of the second capacitor is connected with the first end of the first inductor, and the second end of the second capacitor is used for receiving the first direct current signal;
the first end of the third capacitor is connected with the second end of the second capacitor, and the second end of the third capacitor is grounded;
the first capacitor is an equivalent capacitor of the semiconductor quantum processor and a grid lead, and the first direct current signal is used for adjusting the capacitance value of the third capacitor.
In the impedance matching circuit, preferably, the first capacitance adjusting unit further includes a second resistor, a first end of the second resistor is connected to a first end of the third capacitor, and a second end of the second resistor is configured to receive the first dc signal.
The impedance matching circuit as described above preferably further includes a first filtering unit, a first end of the first filtering unit is connected to a second end of the second resistor, and a second end of the first filtering unit is configured to receive the first dc signal.
In the impedance matching circuit as described above, preferably, the first filtering unit includes a third resistor and a fourth capacitor;
the first end of the third resistor is connected with the second end of the second resistor, and the second end of the third resistor is used for receiving the first direct current signal;
and the first end of the fourth capacitor is connected with the second end of the second resistor, and the second end of the fourth capacitor is grounded.
The impedance matching circuit as described above preferably further includes a signal synthesizing unit, a first end of the signal synthesizing unit is connected to the second end of the first inductor, a second end of the signal synthesizing unit is configured to receive a direct current driving signal, and a third end of the signal synthesizing unit is configured to receive the measurement signal or output the measurement feedback signal.
In the impedance matching circuit as described above, preferably, the signal synthesizing unit includes a fourth resistor, a fifth capacitor, and a sixth capacitor;
a first end of the fourth resistor is connected with a second end of the first inductor, and the second end of the fourth resistor is used for receiving a measurement signal;
a first end of the fifth capacitor is connected with a second end of the fourth resistor, and a second end of the fifth capacitor is grounded;
and the first end of the sixth capacitor is connected with the second end of the first inductor, and the second end of the sixth capacitor is used for receiving the measurement signal or outputting the measurement feedback signal.
The impedance matching circuit as described above preferably further includes a second capacitance adjusting unit, a first end of the second capacitance adjusting unit is connected to the third end of the signal synthesizing unit, and a second end of the second capacitance adjusting unit is configured to receive the measurement signal or output the measurement feedback signal.
In the impedance matching circuit as described above, preferably, the second capacitance adjusting unit includes a seventh capacitance and an eighth capacitance;
a first end of the seventh capacitor is connected with a third end of the signal synthesis unit, and a second end of the seventh capacitor is used for receiving the measurement signal or outputting the measurement feedback signal;
the first end of the eighth capacitor is connected with the third end of the signal synthesis unit, and the second end of the eighth capacitor is grounded;
the first end of the eighth capacitor is further configured to receive a second direct current signal, and the second direct current signal is used to adjust a capacitance value of the eighth capacitor.
In the impedance matching circuit, preferably, the second capacitance adjusting unit further includes a fifth resistor, a first end of the fifth resistor is connected to a first end of the eighth capacitor, and a second end of the fifth resistor is configured to receive the second dc signal.
The impedance matching circuit as described above preferably further includes a second filtering unit, a first end of the second filtering unit is connected to a second end of the fifth resistor, and a second end of the second filtering unit is configured to receive the second direct current signal.
In the impedance matching circuit, preferably, the second filtering unit includes a sixth resistor and a ninth capacitor;
a first end of the sixth resistor is connected to a second end of the fifth resistor, and the second end of the sixth resistor is used for receiving the second direct current signal;
and the first end of the ninth capacitor is connected with the second end of the fifth resistor, and the second end of the ninth capacitor is grounded.
In another aspect, the present application provides a testing apparatus for a semiconductor quantum processor, including a PCB board, on which any one of the impedance matching circuits described above is integrated.
In another aspect, the present application provides a quantum computer, which includes a semiconductor quantum processor, the above-mentioned test apparatus, and a measuring instrument, which are connected in sequence.
Compared with the prior art, the method has the following beneficial effects:
the impedance matching circuit is used for a test circuit of a semiconductor quantum processor and comprises a first resistor, a first inductor and a first capacitance adjusting unit; the second end of the first inductor is used for receiving a measurement signal and outputting a measurement feedback signal, the second end of the first resistor is grounded, and the first resistor is the equivalent resistor of the semiconductor quantum processor; the second end of the first capacitance adjusting unit is used for receiving a first direct current signal, and the first direct current signal is used for adjusting the capacitance value of the first capacitance adjusting unit. The LCR resonant circuit is formed by the first resistor, the first inductor and the first capacitance adjusting unit, the first resistor represents the equivalent resistance of the semiconductor quantum processor, the parameter of the first inductor is fixed, and the capacitance value of the first capacitance adjusting unit can be adjusted through the first direct current signal. Conceivably, when different semiconductor quantum processors are tested, the impedance of the semiconductor quantum processors changes, the impedance change of the semiconductor quantum processors is represented by corresponding first resistors, and the capacitance value of the first capacitance adjusting unit is adjusted by the first direct current signal, so that the impedance matching of the LCR resonant circuit is always in an optimal state, and the measurement sensitivity of spin qubits on the semiconductor quantum processors is improved.
Drawings
Fig. 1 is a schematic diagram of circuit elements of an impedance matching circuit according to an embodiment of the present disclosure;
fig. 2 is a schematic diagram 1 illustrating components of a first capacitance adjusting unit according to an embodiment of the present disclosure;
fig. 3 is a schematic diagram of components of a first capacitance adjusting unit according to an embodiment of the present disclosure;
fig. 4 is a schematic diagram of an impedance matching circuit including a first filtering unit according to an embodiment of the present disclosure;
fig. 5 is a schematic diagram of circuit elements of a first filtering unit according to an embodiment of the present disclosure;
fig. 6 is a schematic diagram of an impedance matching circuit including a signal synthesis unit according to an embodiment of the present disclosure;
fig. 7 is a schematic circuit component diagram of a signal synthesizing unit according to an embodiment of the present disclosure;
fig. 8 is a schematic diagram of an impedance matching circuit including a second capacitance adjusting unit according to an embodiment of the present application;
fig. 9 is a schematic circuit component diagram 1 of a second capacitance adjusting unit according to an embodiment of the present disclosure;
fig. 10 is a schematic circuit component diagram 2 of a second capacitance adjusting unit according to an embodiment of the present disclosure;
fig. 11 is a schematic diagram of an impedance matching circuit including a second filtering unit according to an embodiment of the present disclosure;
fig. 12 is a schematic circuit component diagram of a second filtering unit according to an embodiment of the present disclosure;
fig. 13 is a schematic structural diagram of a quantum computer according to an embodiment of the present disclosure.
Description of the reference numerals:
1-a first resistor, 2-a first inductor, 3-a first capacitance adjusting unit, 4-a radio frequency source, 5-a direct current source, 6-a first filtering unit, 7-a signal synthesizing unit, 8-a second capacitance adjusting unit, 9-a second filtering unit,
31-first capacitor, 32-second capacitor, 33-third capacitor, 34-second resistor, 61-third resistor, 62-fourth capacitor, 71-fourth resistor, 72-fifth capacitor, 73-sixth capacitor, 81-seventh capacitor, 82-eighth capacitor, 83-fifth resistor, 91-sixth resistor, 92-ninth capacitor.
Detailed Description
The following detailed description is merely illustrative and is not intended to limit the embodiments and/or the application or uses of the embodiments. Furthermore, there is no intention to be bound by any expressed or implied information presented in the preceding "background" or "summary" sections or "detailed description" sections.
To further clarify the objects, aspects and advantages of embodiments of the present application, one or more embodiments are now described with reference to the drawings, wherein like reference numerals are used to refer to like elements throughout. In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a more thorough understanding of one or more embodiments. It may be evident, however, that one or more embodiments may be practiced without these specific details in various instances, and that the various embodiments are incorporated by reference into each other without departing from the scope of the present disclosure.
It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are capable of operation in sequences other than those illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Radio-frequency reflection Reading (RF) is the mainstream and critical technology of the spin qubit reading method. The RF measurement technology is to utilize an equivalent impedance transformer (LCR) circuit structure to establish an impedance matching network between a measurement point of a semiconductor quantum processor and a measurement line, and to measure a feedback signal in real time, thereby measuring the signal change at the measurement point in real time and realizing the measurement of the semiconductor quantum processor.
During the propagation of the electromagnetic wave of the radio frequency circuit, if the impedance of the load is the same as the impedance of the radio frequency source and the transmission line, the power of the radio frequency signal generated by the radio frequency source is completely absorbed by the load. For example: the radio frequency signal generated by the radio frequency source with the impedance of 50 omega is transmitted by the coaxial line with the impedance of 50 omega, and the power is completely transmittedIs absorbed by the load of impedance 50 omega. When the impedances are mismatched, the signal transmitted to the load will reflect back to the rf source, and its voltage reflection coefficient can be expressed as Γ = (Z) load -Z 0 )/(Z load +Z 0 ) Wherein Z is load Is the impedance of the load side, Z 0 Characteristic impedance of the RF source and transmission line connected to the load, when Z load About equal to Z 0 When the rf signal is completely absorbed, the voltage reflection coefficient | Γ | =0, since in the vicinity of | Γ | =0, a change in the contact resistance of the quantum dot (i.e., spin qubit) can result in a significant change in the voltage reflection coefficient. Therefore, the operating position of the quantum dot contact is usually adjusted to a position relatively close to impedance matching, and maximum reflection-type detection sensitivity is obtained.
In the RF reflective reading technology, the semiconductor quantum processor is usually connected to the test circuit by wire bonding, wherein the parasitic capacitance effect is generated by the wire, the two-dimensional electron gas in the semiconductor quantum processor, and the ohmic contact electrode. In addition to small precision fluctuation caused by the temperature dependence of circuit parameters, due to the small property difference between different semiconductor quantum processors, a certain equivalent parasitic capacitance change can be caused, and the position of an optimal impedance matching working point is greatly influenced by the difference of the equivalent parasitic capacitance, so that the voltage reflection coefficient is obviously deviated from the vicinity of | Γ | =0, and the signal detection sensitivity of the semiconductor quantum processor is further reduced.
In this embodiment, an impedance matching circuit for a test line of a semiconductor quantum processor is provided, in which the operating point position of an LCR resonant circuit can be adjusted in situ in real time to a state with an optimal impedance matching degree, i.e., a position with a maximum radio frequency reflection detection sensitivity, by adjusting the impedance matching of the test line so that the voltage reflection coefficient | Γ | =0, so that the measurement sensitivity of the semiconductor quantum processor can be always in an optimal state. As shown in fig. 1, the present embodiment provides an impedance matching circuit for a test circuit of a semiconductor quantum processor, including a first resistor 1, a first inductor 2, and a first capacitance adjusting unit 3 connected through a first terminal; the second end of the first inductor 2 is used for receiving a measurement signal and outputting a measurement feedback signal, and the measurement feedback signal is a feedback signal output by the semiconductor quantum processor based on the measurement signal; a second end of the first capacitance adjusting unit 3 is configured to receive a first dc signal, where the first dc signal is used to adjust a capacitance value of the first capacitance adjusting unit 3; the second end of the first resistor 1 is grounded, and the first resistor 1 is the equivalent resistor of the semiconductor quantum processor.
Specifically, the capacitance value of the first capacitance adjusting unit 3 is adjusted by a first direct current signal applied by a direct current source 5, the radio frequency source 4 outputs a measurement signal for measuring the semiconductor quantum processor, the measurement signal is matched by an impedance matching circuit and then transmitted to the semiconductor quantum processor, and the impedance matching degree of the impedance matching circuit directly influences the voltage reflection coefficient, so that the measurement sensitivity of the semiconductor quantum processor is influenced. An LCR resonance circuit is formed by a first resistor 1, a first inductor 2 and a first capacitance adjusting unit 3, the first resistor 1 represents an equivalent resistor of a semiconductor quantum processor, parameters of the first inductor 2 are fixed, and a capacitance value of the first capacitance adjusting unit 3 can be adjusted through a first direct current signal. The impedance of the LCR resonant circuit is:
Figure BDA0003873939590000081
Figure BDA0003873939590000082
wherein, L is an inductance of the first inductor 2, C is a capacitance of the first capacitance adjusting unit 3, and R is a resistance of the first resistor 1. It is conceivable that when different semiconductor quantum processors are tested, the impedance of the semiconductor quantum processors changes, the impedance change of the semiconductor quantum processors is represented by the corresponding first resistors 1, and the capacitance value of the first capacitance adjusting unit 3 is adjusted by the first direct-current signal, so that the impedance matching of the LCR resonant circuit is always in an optimal state, and the measurement sensitivity of spin qubits on the semiconductor quantum processors is improved.
As shown in fig. 2, as an implementation manner of the embodiment of the present application, the first capacitance adjusting unit 3 includes a first capacitor 31, a second capacitor 32, and a third capacitor 33; a first end of the first capacitor 31 is connected to a first end of the first resistor 1, and a second end of the first capacitor 31 is grounded; a first end of the second capacitor 32 is connected to a first end of the first inductor 2, and a second end of the second capacitor 32 is configured to receive the first dc signal; a first end of the third capacitor 33 is connected to a second end of the second capacitor 32, and a second end of the third capacitor 33 is grounded; the first capacitor 31 is an equivalent capacitor of the semiconductor quantum processor and the gate lead, and the first dc signal is used to adjust a capacitance value of the third capacitor 33.
Specifically, the semiconductor quantum processor is usually connected to the test line by wire bonding, wherein parasitic capacitance is generated by the wire, the two-dimensional electron gas in the semiconductor quantum processor, the ohmic contact electrode, and the like, and the parasitic capacitance is represented by the first capacitor 31. The capacitance value of the third capacitor 33 is adjusted by the first dc signal output by the dc source 5, and the third capacitor 33 is preferably a varactor diode with controllable voltage. In addition, a second capacitor 32 is provided to block the first dc signal output from the dc source 5, so as to prevent the first dc signal from being transmitted to the semiconductor quantum processor.
Wherein the capacitance value C = C of the first capacitance adjusting unit 3 1 +C 3, C 1 Is the capacitance value, C, of the first capacitor 31 3 Is the capacitance value of the third capacitor 33. For an impedance matching circuit, the impedance of the LCR resonant circuit is:
Figure BDA0003873939590000091
Figure BDA0003873939590000092
regulating C by a first DC signal 3, The capacitance value of the first capacitance adjusting unit 3 is adjusted, so that the impedance matching of the LCR resonant circuit is adjusted, the working point of the resonant circuit is adjusted to the optimal position of impedance matching, and the influence of the change of a semiconductor quantum processor to be measured or environmental factors on the impedance matching degree between the radio frequency source 4 and the semiconductor quantum processor is avoided.
As shown in fig. 3, as an implementation manner of the embodiment of the present application, the first capacitance adjusting unit 3 further includes a second resistor 34, a first end of the second resistor 34 is connected to a first end of the third capacitor 33, and a second end of the second resistor 34 is configured to receive the first dc signal. A second resistor 34 is provided in the line in which the dc source 5 applies the first dc signal, for isolating leakage and loss of the measurement signal caused by the transmission of the measurement signal to the dc source 5.
As shown in fig. 4 and fig. 5, as an implementation manner of the embodiment of the present application, the impedance matching circuit further includes a first filtering unit 6, a first end of the first filtering unit 6 is connected to a second end of the second resistor 34, and a second end of the first filtering unit 6 is configured to receive the first direct current signal. Specifically, the first filtering unit 6 includes a third resistor 61 and a fourth capacitor 62; a first end of the third resistor 61 is connected to a second end of the second resistor 34, and a second end of the third resistor 61 is configured to receive the first dc signal; the fourth capacitor 62 is connected to the second end of the second resistor 34, and the second end of the fourth capacitor 62 is grounded. An RC filter circuit is constructed by the third resistor 61 and the fourth capacitor 62 and is connected with the direct current source 5, so that noise of the first direct current signal output by the direct current source 5 is suppressed, and the influence of the noise signal on the control and measurement fidelity of the spin qubit is avoided.
As shown in fig. 6, as an implementation manner of the embodiment of the present application, the impedance matching circuit further includes a signal synthesizing unit 7, a first end of the signal synthesizing unit 7 is connected to the second end of the first inductor 2, a second end of the signal synthesizing unit 7 is used for receiving a direct current driving signal, and a third end of the signal synthesizing unit 7 is used for receiving a measurement signal or outputting a measurement feedback signal. Spin qubits on semiconductor quantum processors, also known as quantum dots, are particle structures formed by binding of several direct current drive signals in a multidimensional spatial direction.
The second end of the signal synthesis unit 7 is used for receiving the direct current driving signal and transmitting the direct current driving signal to the semiconductor quantum processor for forming the quantum dots, and the third end of the signal synthesis unit 7 is used for receiving the measuring signal and outputting the measuring signal to the semiconductor quantum processor for measurement. The measurement feedback signal reflected and output by the semiconductor quantum processor is also output through the third end of the signal synthesis unit 7. The signals of different types are synthesized by the signal synthesis unit 7 and transmitted to the semiconductor quantum processor, so that the complexity of a test circuit is simplified.
As shown in fig. 7, in this embodiment of the present application, the signal synthesizing unit 7 includes a fourth resistor 71, a fifth capacitor 72, and a sixth capacitor 73; a first end of the fourth resistor 71 is connected to a second end of the first inductor 2, and a second end of the fourth resistor 71 is used for receiving a measurement signal; a first end of the fifth capacitor 72 is connected to the second end of the fourth resistor 71, and a second end of the fifth capacitor 72 is grounded; a first end of the sixth capacitor 73 is connected to the second end of the first inductor 2, and a second end of the sixth capacitor 73 is used for receiving a measurement signal or outputting a measurement feedback signal.
The fourth resistor 71 is used for isolating the measurement signal and the measurement feedback signal and avoiding transmitting the measurement signal and the measurement feedback signal to the direct current source 5; the fifth capacitor 72 is connected with the direct current source 5 for filtering, so that the influence of noise signals on the control and measurement fidelity of the spin qubit is avoided. The sixth capacitor 73 is not only used for isolating the dc driving signal from being transmitted to the rf source 4, but also used for measuring signals of a specific frequency band outputted by the rf source 4. And the RC circuit is adopted to ensure that the direct current driving signal, the measuring signal and the measuring feedback signal are transmitted according to a preset line path, so that the semiconductor quantum processor is driven and measured.
As shown in fig. 8, as an implementation manner of the embodiment of the present application, the impedance matching circuit further includes a second capacitance adjusting unit 8, a first end of the second capacitance adjusting unit 8 is connected to the third end of the signal synthesizing unit 7, and a second end of the second capacitance adjusting unit 8 is configured to receive a measurement signal or output a measurement feedback signal. A signal synthesis unit 7 is arranged on a test line and connected with a direct current source 5 and a radio frequency source 4, the impedance matching between the radio frequency source 4 and the signal synthesis unit 7 directly influences the precision of a measurement signal transmitted to a semiconductor quantum processor, the impedance between the signal synthesis unit 7 and the radio frequency source 4 is matched through a second capacitance adjusting unit 8, the impedance between the signal synthesis unit 7 and the semiconductor quantum processor is matched through a first capacitance adjusting unit 3, and the overall impedance matching degree of a line between the radio frequency source 4 and the semiconductor quantum processor is ensured.
As shown in fig. 9, as an implementation manner of the embodiment of the present application, the second capacitance adjusting unit 8 includes a seventh capacitor 81 and an eighth capacitor 82; a first end of the seventh capacitor 81 is connected to a third end of the signal synthesizing unit 7, and a second end of the seventh capacitor 81 is used for receiving a measurement signal or outputting a measurement feedback signal; a first end of the eighth capacitor 82 is connected to the third end of the signal synthesis unit 7, and a second end of the eighth capacitor 82 is grounded; the first end of the eighth capacitor 82 is further configured to receive a second dc signal, and the second dc signal is used to adjust the capacitance value of the eighth capacitor 82. The capacitance value of the eighth capacitor 82 is adjusted by outputting a second direct current signal through the direct current source 5, the eighth capacitor 82 preferably adopts a variable capacitance diode with controllable voltage, and the second direct current signal is isolated by the seventh capacitor 81 to avoid being transmitted to the radio frequency source 4.
The impedance matching circuit comprises a first capacitance adjusting unit 3 and a second capacitance adjusting unit 8, the resonance capacitors participating in impedance matching comprise a first capacitor 31, a third capacitor 33 and an eighth capacitor 82, and other capacitors are used for DC blocking or power supply filtering. Capacitance value C = C of resonance capacitance 1 +C 3 ,C 1 Is the capacitance value, C, of the first capacitor 31 3 Is the capacitance value, C, of the third capacitor 33 8 Is the capacitance value of the eighth capacitor 82 for impedance matchingFor the circuit, the impedance of the LCR resonant circuit is:
Figure BDA0003873939590000111
C=C 1 +C 3
when C is 8 Is much larger than C 1 +C 3 When the capacitance value of (A) is greater than (B),
Figure BDA0003873939590000112
adjusting C by a first DC signal 3 And/or adjusting C by a second DC signal 8 The impedance matching of the whole circuit can be adjusted, so that the impedance matching of the LCR resonant circuit is adjusted, the working point of the resonant circuit is adjusted to the optimal position of impedance matching, and the influence of the replacement of a semiconductor quantum processor to be measured or environmental factors on the impedance matching is avoided.
As shown in fig. 10, as an implementation manner of the embodiment of the present application, the second capacitance adjusting unit 8 further includes a fifth resistor 83, a first end of the fifth resistor 83 is connected to a first end of the eighth capacitor 82, and a second end of the fifth resistor 83 is configured to receive the second direct current signal. A fifth resistor 83 is provided in the line of the dc source 5 carrying the second dc signal, for isolating the transmission of the measurement signal to the dc source 5 from leakage and loss of the measurement signal.
As shown in fig. 11 and fig. 12, as an implementation manner of the embodiment of the present application, the impedance matching circuit further includes a second filtering unit 9, a first end of the second filtering unit 9 is connected to a second end of the fifth resistor 83, and a second end of the second filtering unit 9 is configured to receive the second direct current signal. Specifically, the second filtering unit 9 includes a sixth resistor 91 and a ninth capacitor 92; a first end of the sixth resistor 91 is connected to a second end of the fifth resistor 83, and the second end of the sixth resistor 91 is configured to receive the second direct current signal; the ninth capacitor 92 is connected to the second terminal of the fifth resistor 83, and the second terminal of the ninth capacitor 92 is grounded. An RC filter circuit is constructed by the sixth resistor 91 and the ninth capacitor 92 and is connected to the dc source 5, so as to suppress noise of the second dc signal output by the dc source 5, and avoid influence of the noise signal on the control and measurement fidelity of the spin qubit.
Based on the same application concept, the embodiment of the application also provides a testing device of the semiconductor quantum processor, which comprises a PCB board, wherein the PCB board is integrated with any impedance matching circuit. An impedance matching circuit is integrated on a PCB, two ends of the impedance matching circuit are respectively connected with a semiconductor quantum processor and a signal source, and the working point of the impedance matching circuit is adjusted to the optimal position of impedance matching by adjusting and matching the voltage of a variable capacitor in the impedance matching circuit, so that the impedance matching degree between the signal source and the semiconductor quantum processor is high, and the testing sensitivity of the semiconductor quantum processor is improved.
As shown in fig. 13, based on the same application concept, a quantum computer according to an embodiment of the present application includes a semiconductor quantum processor, a testing apparatus as described above, and a measuring instrument, which are connected in sequence. The testing device is used for outputting a direct current driving signal and a radio frequency measuring signal to the semiconductor quantum processor, driving and measuring the self-selected quantum bit, receiving a measuring feedback signal reflected by the semiconductor quantum processor by the measuring instrument, and analyzing the measuring feedback signal to obtain a measuring result.
The construction, features and functions of the present application have been described in detail and illustrated in the drawings, the present application is not limited to the embodiments, but rather the invention is intended to cover all modifications, equivalents and equivalents falling within the spirit and scope of the present application.

Claims (14)

1. An impedance matching circuit is used for a test circuit of a semiconductor quantum processor, and is characterized by comprising a first resistor, a first inductor and a first capacitance adjusting unit which are connected through a first end;
the second end of the first inductor is used for receiving a measurement signal and outputting a measurement feedback signal, and the measurement feedback signal is a feedback signal output by the semiconductor quantum processor based on the measurement signal;
the second end of the first capacitance adjusting unit is used for receiving a first direct current signal, and the first direct current signal is used for adjusting the capacitance value of the first capacitance adjusting unit;
the second end of the first resistor is grounded, and the first resistor is the equivalent resistor of the semiconductor quantum processor.
2. The impedance matching circuit of claim 1, wherein the first capacitance adjustment unit comprises a first capacitance, a second capacitance, and a third capacitance;
the first end of the first capacitor is connected with the first end of the first resistor, and the second end of the first capacitor is grounded;
the first end of the second capacitor is connected with the first end of the first inductor, and the second end of the second capacitor is used for receiving the first direct current signal;
the first end of the third capacitor is connected with the second end of the second capacitor, and the second end of the third capacitor is grounded;
the first capacitor is an equivalent capacitor of the semiconductor quantum processor and a grid lead, and the first direct current signal is used for adjusting the capacitance value of the third capacitor.
3. The impedance matching circuit of claim 2, wherein the first capacitance adjusting unit further comprises a second resistor, a first end of the second resistor is connected to a first end of the third capacitor, and a second end of the second resistor is configured to receive the first dc signal.
4. The impedance matching circuit of claim 3, further comprising a first filtering unit, wherein a first end of the first filtering unit is connected to a second end of the second resistor, and a second end of the first filtering unit is configured to receive the first direct current signal.
5. The impedance matching circuit of claim 4, wherein the first filtering unit comprises a third resistor and a fourth capacitor;
the first end of the third resistor is connected with the second end of the second resistor, and the second end of the third resistor is used for receiving the first direct current signal;
and the first end of the fourth capacitor is connected with the second end of the second resistor, and the second end of the fourth capacitor is grounded.
6. The impedance matching circuit of claim 1, further comprising a signal synthesis unit, wherein a first terminal of the signal synthesis unit is connected to a second terminal of the first inductor, the second terminal of the signal synthesis unit is configured to receive a dc driving signal, and a third terminal of the signal synthesis unit is configured to receive the measurement signal or output the measurement feedback signal.
7. The impedance matching circuit of claim 6, wherein the signal synthesizing unit comprises a fourth resistor, a fifth capacitor and a sixth capacitor;
the first end of the fourth resistor is connected with the second end of the first inductor, and the second end of the fourth resistor is used for receiving a measurement signal;
a first end of the fifth capacitor is connected with a second end of the fourth resistor, and a second end of the fifth capacitor is grounded;
and the first end of the sixth capacitor is connected with the second end of the first inductor, and the second end of the sixth capacitor is used for receiving the measurement signal or outputting the measurement feedback signal.
8. The impedance matching circuit of claim 6, further comprising a second capacitance adjusting unit, wherein a first end of the second capacitance adjusting unit is connected to the third end of the signal synthesizing unit, and a second end of the second capacitance adjusting unit is configured to receive the measurement signal or output the measurement feedback signal.
9. The impedance matching circuit of claim 8, wherein the second capacitance adjusting unit includes a seventh capacitance and an eighth capacitance;
a first end of the seventh capacitor is connected with a third end of the signal synthesis unit, and a second end of the seventh capacitor is used for receiving the measurement signal or outputting the measurement feedback signal;
the first end of the eighth capacitor is connected with the third end of the signal synthesis unit, and the second end of the eighth capacitor is grounded;
the first end of the eighth capacitor is further configured to receive a second direct current signal, and the second direct current signal is used to adjust a capacitance value of the eighth capacitor.
10. The impedance matching circuit of claim 9, wherein the second capacitance adjusting unit further comprises a fifth resistor, a first end of the fifth resistor is connected to a first end of the eighth capacitor, and a second end of the fifth resistor is configured to receive the second dc signal.
11. The impedance matching circuit of claim 10, further comprising a second filtering unit, wherein a first terminal of the second filtering unit is connected to a second terminal of the fifth resistor, and a second terminal of the second filtering unit is configured to receive the second dc signal.
12. The impedance matching circuit of claim 11, wherein the second filtering unit comprises a sixth resistor and a ninth capacitor;
a first end of the sixth resistor is connected to a second end of the fifth resistor, and the second end of the sixth resistor is used for receiving the second direct current signal;
and the first end of the ninth capacitor is connected with the second end of the fifth resistor, and the second end of the ninth capacitor is grounded.
13. A semiconductor quantum processor testing apparatus comprising a PCB board having integrated thereon an impedance matching circuit according to any one of claims 1 to 12.
14. A quantum computer comprising a semiconductor quantum processor, the test apparatus according to claim 13, and a measuring instrument, which are connected in this order.
CN202211220053.5A 2022-09-30 2022-09-30 Impedance matching circuit, test device, and quantum computer Pending CN115514336A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115829046A (en) * 2023-02-15 2023-03-21 苏州浪潮智能科技有限公司 Quantum signal determination method and related device
CN117538616A (en) * 2024-01-09 2024-02-09 深圳市瀚强科技股份有限公司 Impedance detection method, impedance detection circuit and impedance detection device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115829046A (en) * 2023-02-15 2023-03-21 苏州浪潮智能科技有限公司 Quantum signal determination method and related device
CN117538616A (en) * 2024-01-09 2024-02-09 深圳市瀚强科技股份有限公司 Impedance detection method, impedance detection circuit and impedance detection device
CN117538616B (en) * 2024-01-09 2024-04-23 深圳市瀚强科技股份有限公司 Impedance detection method, impedance detection circuit and impedance detection device

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