CN115508947A - Silicon-based integrated high-performance polarization beam splitter - Google Patents
Silicon-based integrated high-performance polarization beam splitter Download PDFInfo
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- CN115508947A CN115508947A CN202211155672.0A CN202211155672A CN115508947A CN 115508947 A CN115508947 A CN 115508947A CN 202211155672 A CN202211155672 A CN 202211155672A CN 115508947 A CN115508947 A CN 115508947A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/126—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind using polarisation effects
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
Abstract
The invention relates to a silicon-based integrated high-performance polarization beam splitter, which comprises an input waveguide, a coupling waveguide and three anisotropic waveguides, wherein the input waveguide, the coupling waveguide and the anisotropic waveguides are arranged in a silica cladding layer side by side in the same plane, and the input waveguide and the coupling waveguide are embedded into two slits formed by the three anisotropic waveguides in a one-to-one correspondence manner; the anisotropic waveguide positioned at the outer side is used for limiting an evanescent field of incident light and enabling the incident light to propagate along the input waveguide or the coupling waveguide; the anisotropic waveguide in the middle is used for coupling TM polarized light in incident light into the coupling waveguide; the output end of the input waveguide outputs TE polarized light, and the output end of the coupling waveguide outputs TM polarized light. The polarization beam splitter has the advantages of simple structure, high beam splitting efficiency and high polarization extinction ratio, and the performance of the polarization diversity system is improved.
Description
Technical Field
The invention relates to the technical field of optical communication, in particular to the technical field of integrated photonic devices, and particularly relates to a silicon-based integrated high-performance polarization beam splitter.
Background
The polarization beam splitter is a key device in an integrated optical system, and due to the polarization dependence of the integrated waveguide, incident light with different polarization states has different losses and phase shifts, so that an optical signal cannot be stably transmitted or processed. To solve this problem, a polarization diversity method is proposed, which first splits incident light into two mutually orthogonal polarized lights, called TE polarized light and TM polarized light, and then processes them separately. The core device in the polarization diversity system is a polarization beam splitter. The current polarization beam splitter scheme mainly comprises a directional coupling type and a mode evolution type, wherein the former has a simple structure but larger polarization crosstalk, and the latter has a larger bandwidth but larger size. The prior art also provides a tapered polarization beam splitter based on a slit waveguide, and the scheme needs to adopt a Plasma Enhanced Chemical Vapor Deposition (PECVD) process to grow a plurality of layers of different materials, and the structure is complex, so that the manufacturing process requirement is high, and the control is difficult.
Therefore, it is necessary to develop a polarization splitter with a simple structure and a high polarization extinction ratio to improve the performance of the polarization diversity system.
Disclosure of Invention
Aiming at the technical problems in the prior art, the invention provides a silicon-based integrated high-performance polarization beam splitter, which solves the problems of complex structure and low polarization extinction ratio of the existing polarization beam splitter and improves the performance of a polarization diversity system.
The technical scheme for solving the technical problems is as follows:
a silicon-based integrated high-performance polarization beam splitter comprises an input waveguide, a coupling waveguide and three anisotropic waveguides which are arranged in a silica cladding, wherein the input waveguide, the coupling waveguide and the anisotropic waveguides are arranged side by side in the same plane, the three anisotropic waveguides form two slits, the input waveguide is embedded in one slit, and the coupling waveguide is embedded in the other slit; (ii) a
The anisotropic waveguide positioned at the outer side is used for limiting an evanescent field of incident light so that the incident light can propagate along the input waveguide or the coupling waveguide; the anisotropic waveguide in the middle is used for coupling TM polarized light in incident light into the coupling waveguide;
the output end of the input waveguide outputs TE polarized light, and the output end of the coupling waveguide outputs TM polarized light.
On the basis of the technical scheme, the invention can be further improved as follows.
Preferably, the device further comprises a TE light output waveguide and a TM light output waveguide, wherein the TE light output waveguide is in butt joint with the output end of the input waveguide, and the TM light output waveguide is in butt joint with the output end of the coupling waveguide.
Preferably, the TE light output waveguide and/or the TM light output waveguide are arc-shaped, and the output end of the TE light output waveguide and the output end of the TM light output waveguide tend to be far away.
Preferably, the TE light output waveguide and/or the TM light output waveguide have a bending radius in a range of 15 μm to 25 μm.
Preferably, the height direction is a direction perpendicular to the plane of the input waveguide, the coupling waveguide and the anisotropic waveguide, and the heights of the input waveguide, the coupling waveguide and the anisotropic waveguide are equal.
Preferably, the anisotropic waveguide comprises a plurality of slit waveguides arranged side by side and at equal intervals periodically, and the period is the distance between the central lines of the adjacent slit waveguides.
Preferably, the duty ratio of the slit waveguide ranges from 0.4 to 0.6, and the duty ratio is the size ratio of the slit waveguide in a single period.
Preferably, the input waveguide and the coupling waveguide have the same cross-sectional dimension perpendicular to the optical axis.
Preferably, the material of the input waveguide, the coupling waveguide, the anisotropic waveguide, the TE light output waveguide and the TM light output waveguide is silicon.
Preferably, the length of the anisotropic waveguide in the optical axis direction is in a range of 13 to 15 μm.
The beneficial effects of the invention are: according to the silicon-based integrated high-performance polarization beam splitter, the strong double refraction effect of the anisotropic waveguide is utilized, the anisotropic waveguide positioned between the input waveguide and the coupling waveguide divides the incident light into TE polarized light and TM polarized light, the TE polarized light continues to propagate along the input waveguide, the TM polarized light is coupled into the coupling waveguide for propagation after passing through the anisotropic waveguide at the middle position, and the high-efficiency beam splitting of the incident light is realized; meanwhile, the anisotropic waveguide positioned outside the input waveguide limits an evanescent field of the incident light, so that the incident light is transmitted along the input waveguide or transmitted to the coupling waveguide along the anisotropic waveguide at the middle position; the anisotropic waveguide positioned at the outer side of the coupling waveguide is used for ensuring the symmetry of the waveguide structure and preventing other modes from being excited to generate crosstalk when the shape of the section of the waveguide is suddenly changed. The polarization beam splitter effectively reduces the optical power loss and improves the polarization extinction ratio of the polarization beam splitter; the device has a silica cladding and is more compatible with other silicon-based waveguide devices.
Drawings
FIG. 1 is a top view of the internal structure of a silicon-based integrated high performance polarization beam splitter of the present invention;
FIG. 2 is a schematic diagram of the optical path propagation of a silicon-based integrated high performance polarization beam splitter of the present invention;
FIG. 3 is a cross-sectional view of a coupling region of a silicon-based integrated high performance polarizing beam splitter of the present invention taken perpendicular to the optical axis;
FIG. 4 (a) is a simulation diagram of TE polarized light propagation in accordance with a preferred embodiment of the present invention; fig. 4 (b) is a simulation diagram of TM polarized light propagation in accordance with a preferred embodiment of the present invention.
In the drawings, the reference numbers indicate the following list of parts:
1. silica cladding, 2, input waveguide, 3, coupling waveguide, 4, anisotropic waveguide, 401, first anisotropic waveguide, 402, second anisotropic waveguide, 403, third anisotropic waveguide, 5, output waveguide, 501, TE light output waveguide, 502, TM light output waveguide.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.
Fig. 1 is a top view of an internal structure of a silicon-based integrated high-performance polarization beam splitter according to this embodiment. As shown in fig. 1, the silicon-based integrated high-performance polarization beam splitter provided in this embodiment includes an input waveguide 2, a coupling waveguide 3, and three anisotropic waveguides 4 disposed in a silica cladding 1, where the input waveguide 2, the coupling waveguide 3, and the anisotropic waveguides 4 are disposed side by side in the same plane, the three anisotropic waveguides 4 form two slits, the input waveguide 2 is embedded in one of the slits, and the coupling waveguide 3 is embedded in the other slit;
the anisotropic waveguide 4 positioned outside the input waveguide 2 is used for limiting an evanescent field of the TE polarized light in the incident light, so that the TE polarized light in the incident light is transmitted along the input waveguide 2; the anisotropic waveguide 4 in the middle is used to couple TM polarized light in the incident light into the coupling waveguide 3; the anisotropic waveguide 4 positioned outside the coupling waveguide 3 is used for ensuring the symmetry of the waveguide section structure and preventing other modes from being excited when the shape of the waveguide section is suddenly changed to generate crosstalk;
the output end of the input waveguide 2 outputs TE polarized light, and the output end of the coupling waveguide 3 outputs TM polarized light.
It can be understood that the silicon-based integrated high-performance polarization beam splitter provided by the invention utilizes the strong birefringence effect of the anisotropic waveguide 4 to split incident light into the mutually orthogonal TE polarized light and TM polarized light, the TE polarized light continues to propagate along the input waveguide 2, and the TM polarized light is coupled into the coupling waveguide 3 for propagation after passing through the anisotropic waveguide 4 at the middle position, thereby realizing high-efficiency beam splitting of the incident light.
More specifically, as shown in fig. 1, the three anisotropic waveguides 4 include a first anisotropic waveguide 401, a second anisotropic waveguide 402, and a third anisotropic waveguide 403 arranged in parallel side by side, the input waveguide 2 is disposed in a slit formed between the first anisotropic waveguide 401 and the second anisotropic waveguide 402, and the coupling waveguide 3 is disposed in a slit formed between the second anisotropic waveguide 402 and the third anisotropic waveguide 403. The two ends (a end and B end) of the first anisotropic waveguide 401, the second anisotropic waveguide 402, and the third anisotropic waveguide 403 are flush, and the region between the a end and the B end in fig. 1 is the coupling region of the polarization beam splitter.
As shown in fig. 2, when TE polarized light in incident light enters a coupling region from an input waveguide 2, because a first anisotropic waveguide 401 and a second anisotropic waveguide 402 exist on two sides of the input waveguide 2, an evanescent field of the TE polarized light is limited to a small range, and total reflection occurs during the propagation process, the TE polarized light is not coupled to a nearby coupling waveguide 3 and is directly output from a connected curved waveguide; when the coupling region between the a end and the B end is long enough, the TM polarized light can be completely coupled into the coupling waveguide 3 on the other side of the second anisotropic waveguide 402, thereby realizing polarized light beam splitting. As shown in the cross-sectional view of fig. 3, the third anisotropic waveguide 403 is symmetrically disposed with respect to the first anisotropic waveguide 401, and is further for ensuring the symmetry of the waveguide cross-sectional structure to prevent other modes from being excited when the waveguide cross-sectional shape changes abruptly, thereby generating crosstalk. The polarization beam splitter of the embodiment effectively reduces the optical power loss and improves the polarization extinction ratio of the polarization beam splitter. And because the polarization beam splitter has the silica cladding 1, the polarization beam splitter has better compatibility with other silicon-based waveguide devices.
In one possible embodiment, the polarization beam splitter further includes a TE light output waveguide 501 and a TM light output waveguide 502, the TE light output waveguide 501 is interfaced with the output end of the input waveguide 2, and the TM light output waveguide 502 is interfaced with the output end of the coupling waveguide 3.
It can be understood that the TE light output waveguide 501 is used to output the TE polarized light that continues to propagate along the input waveguide 2 after being split to the outside of the polarization beam splitter, and the TM light output waveguide 502 is used to output the TM polarized light that propagates along the coupling waveguide 3 after being split to the outside of the polarization beam splitter, and is interfaced with the rest of the components of the polarization diversity system through the TE light output waveguide 501 and the TM light output waveguide 502.
In one possible embodiment, the TE light output waveguide 501 and/or the TM light output waveguide 502 are curved, and the output end of the TE light output waveguide 501 and the output end of the TM light output waveguide 502 tend to be far away.
Due to the size limitation of the polarization beam splitter, the input waveguide 2 and the coupling waveguide 3 are arranged in parallel, the gap size between the output ends of the two is very small, two beams of polarized light need to be respectively led out to the connecting ends of the other optical devices of the polarization diversity system for butt joint through the curved TE light output waveguide 501 and/or TM light output waveguide 502 with radians, so that the output end of the TE light output waveguide 501 and the output end of the TM light output waveguide 502 tend to be far away, so as to be respectively butt joint with the optical devices of subsequent optical paths.
In one possible embodiment, the TE light output waveguide 501 and/or the TM light output waveguide 502 have a bend radius in the range of 15 μm to 25 μm.
It is understood that if the bending radian of the TM light output waveguide 502 is too large, the loss may be large during propagation of TM polarized light, and the smaller the bending radius, the larger the bending radian, and the larger the TM polarized light loss, the bending radius of the TM light output waveguide 502 is preferably set to be in the range of 15 μm to 25 μm. In order to keep the symmetry of the output end structure of the polarization beam splitter, and facilitate the butt joint with the components of the subsequent optical path, the TE light output waveguide 501 and the TM light output waveguide 502 may be arranged to be symmetrical, i.e. the bending radius range of the TE light output waveguide 501 is set to be 15 μm to 25 μm.
In one possible embodiment, as shown in the cross-sectional view of the coupling region in fig. 3, the height direction is the direction perpendicular to the plane of the input waveguide 2, the coupling waveguide 3, and the anisotropic waveguide 4, and the heights of the input waveguide 2, the coupling waveguide 3, and the anisotropic waveguide 4 are equal, so as to achieve efficient coupling of TM polarized light and improve the performance of the polarization beam splitter. Meanwhile, as the waveguide height of the whole device is uniform, all waveguide structures can be formed by only one-step etching process, the production process flow of the polarization beam splitter is simplified, and the production process difficulty is reduced.
In one possible embodiment, as shown in fig. 3, the cross-sectional dimensions of the input waveguide 2 and the coupling waveguide 3 perpendicular to the optical axis are the same, so as to implement efficient coupling of TM polarized light, improve the performance of the polarization beam splitter, simplify the production process flow of the polarization beam splitter, and reduce the production process difficulty.
In one possible embodiment, the anisotropic waveguide 4 comprises a plurality of slit waveguides arranged side by side and at equal intervals in a periodic manner, wherein the period is the distance between the center lines of the adjacent slit waveguides.
It will be appreciated that the plurality of slit waveguides are arranged periodically to confine the TE polarized light to propagate in the input waveguide 2 and to couple the TM polarized light into the coupling waveguide 3. If the plurality of slit waveguides are arranged at unequal intervals, the refractive index distribution may be uneven, and the optical field transmission may be affected. In the embodiment, the plurality of slit waveguides are arranged at equal intervals, so that the refractive index of the anisotropic waveguide 4 is uniformly distributed, and the optical field transmission is not affected. Regarding the overall dimension of the anisotropic waveguide 4, the width direction is perpendicular to the optical axis direction in the input waveguide 2 and the coupling waveguide 3, and perpendicular to the height direction, and the width direction is the width direction, so the width dimension of the anisotropic waveguide 4 is smaller than the wavelength of the TE polarized light. The number of slot waveguides in the anisotropic waveguide 4 is set, and the number of cycles, that is, the number of slot waveguides, if the number of cycles of the slot waveguides is too small, the slot waveguides cannot isolate the TE polarized light (that is, limit the evanescent field of the TE polarized light), and cannot be well limited to propagate in the input waveguide 2; if the periodicity of the slit waveguide is too large, the coupling efficiency of TM polarized light may be reduced. Therefore, after experimental verification, the preferred range of the number of slit waveguides in the single anisotropic waveguide 4 is set to 3 to 7 in the present embodiment. As shown in the cross-sectional view of fig. 3, this embodiment preferably adopts 5 slit waveguides as one anisotropic waveguide 4, and these 5 slit waveguides are arranged side by side and periodically at equal intervals to form a metamaterial structure for the anisotropic waveguide 4. More specifically, the 5 slit waveguides are a set of periodic narrow waveguides parallel to the input waveguide 2 and the coupling waveguide 3, and have a waveguide width of about 1/4 of the height, which is in the sub-wavelength range, and thus are called a metamaterial structure. The structure has large structural difference in the horizontal direction and the vertical direction, so that the structure has strong structural birefringence.
In one possible embodiment, the duty cycle of the slit waveguide ranges from 0.4 to 0.6, and the duty cycle is the size ratio of the slit waveguide in a single period.
It will be appreciated that, as previously described with respect to the definition of the width direction, the duty cycle is defined herein as the ratio of the width dimension of the slot waveguide in a single period, i.e., the ratio of the width dimension of the slot waveguide in a full period length. By setting a better duty ratio, for example, the duty ratio of 0.5 is adopted in the present embodiment, the slit waveguide can have a good optical field confinement capability.
In one possible embodiment, the material of the input waveguide 2, the coupling waveguide 3, the anisotropic waveguide 4, the TE light output waveguide 501 and the TM light output waveguide 502 is silicon. These waveguides are fabricated On the Silicon layer of an SOI (Silicon-On-Insulator) wafer. The optical waveguide device manufactured based on the SOI material has the advantages of miniaturization and low loss, is compatible with a microelectronic process, can realize monolithic integration of an OEIC (silicon-based optoelectronic integrated circuit), and the like, and can improve the overall performance of a polarization diversity system.
In one possible embodiment, the length of the anisotropic waveguide 4 in the direction of the TE optical axis is in the range of 13 μm to 15 μm. Theoretically, the length of the anisotropic waveguide 4 determines the length of the coupling region, and in case the coupling region is long enough, TM polarized light can be completely coupled into the coupling waveguide 3 beside, thereby achieving the desired polarized light splitting. However, due to the requirement of miniaturization of the device, a preferable length range is obtained through experiments under the requirement of comprehensively considering the splitting performance of the polarized light and the size of the device, for example, the length of the anisotropic waveguide 4 is preferably set to be 14 μm in the embodiment, that is, the length of the coupling region is set to be 14 μm.
The polarization beam splitter provided by the embodiment has a simple structure, a regular shape and consistent height of each waveguide, so that the production process is simple, and the polarization beam splitter can be prepared and obtained by adopting a conventional etching method. Specifically, the production method comprises the following steps:
cleaning an SOI wafer, and then spin-coating photoresist on the surface to be processed of the SOI wafer;
exposing the photoresist by an electron beam to form a waveguide pattern;
and after photoresist removal, depositing a silica cladding layer 1, filling the gaps of the waveguides with the silica cladding layer 1, and cladding the waveguides.
In the process method, because the waveguide height of the whole device is uniform, all waveguide structures can be formed by only one-step etching process, the manufacturing process does not need multilayer material growth, the production process is simplified, and the process difficulty is reduced. During the process of depositing the silica cladding layer 1, the input end of the input waveguide 2 and the output end of the output waveguide 5 are kept exposed out of the silica cladding layer 1, so as to be convenient for butt joint with other external devices.
Fig. 4 is a simulation diagram of polarized light splitting using the preferred embodiment of the silicon-based integrated high-performance polarization beam splitter provided by the present invention. The specific scenarios of the preferred embodiment are as follows:
the polarization beam splitter of the present implementation scenario includes a silica cladding 1, and an input waveguide 2, a coupling waveguide 3, a first anisotropic waveguide 401, a second anisotropic waveguide 402, a third anisotropic waveguide 403, and two curved output waveguides 5 provided in the silica cladding 1. The thickness of the silicon dioxide cladding layer 1 is between 2 mu m and 5 mu m, the preferred value is 4 mu m, and the silicon dioxide cladding layer completely wraps other structures. The input waveguide 2 and the coupling waveguide 3 are made of silicon-based on SOI, the cross sections of the input waveguide and the coupling waveguide are the same in size, the width is 400 nm-500 nm, and the optimal value is 450nm; the height is between 200nm and 240nm, and the preferred value is 220nm. The first anisotropic waveguide 401, the second anisotropic waveguide 402, and the third anisotropic waveguide 403 are made of silicon-based on SOI, and have the same structure, and are distributed on both sides of the input waveguide 2 and the coupling waveguide 3 and between the input waveguide 2 and the coupling waveguide 3, and have the same cross-sectional height as the input waveguide 22 and the coupling waveguide 33. Each anisotropic waveguide 4 comprises a group of periodic slit waveguide structures, the period number is 3-7, and the optimal value is 5; the period is between 90nm and 110nm, and the preferred value is 100nm; the duty cycle is between 0.4 and 0.6, with a preferred value of 0.5. As shown in FIG. 1, the length of the coupling region between the points A and B, i.e., the distance between the points A and B, is in the range of 13 μm to 15 μm, preferably 14 μm. The two curved output waveguides 5 are made of silicon-based on SOI and comprise a TE optical output waveguide 501 and a TM optical output waveguide 502, wherein the TE optical output waveguide 501 is connected with the input waveguide 2, and the TM optical output waveguide 502 is connected with the coupling waveguide 3. The bending radius of the two curved output waveguides 5 is between 15 μm and 25 μm, preferably 20 μm.
In fig. 4 (a), darker colored light represents TE polarized light, and darker gray scale indicates more TE polarized light energy is distributed. As can be seen from the simulation diagram of fig. 4 (a), when the light in the TE polarization state enters from the input waveguide 2, since the first anisotropic waveguide 401 and the second anisotropic waveguide 402 exist on both sides of the input waveguide 2, the evanescent field of the TE polarized light is limited to a small range, and total reflection occurs during propagation, and the TE polarized light is not coupled into the nearby coupling waveguide 3 and is directly output from the curved TE light output waveguide 501. In fig. 4 (b), darker colored light indicates TM polarized light, and darker gray scale indicates that TM polarized light energy is distributed more. As can be seen from the simulation diagram of fig. 4 (B), when light in the TM polarization state is incident from the input waveguide 2, the birefringent effect of the second anisotropic waveguide 402 reduces the confinement effect of the input waveguide 2 on the TM polarization light, and ideally, when the coupling region between the points a and B is long enough, the TM polarization light can be completely coupled into the nearby coupling waveguide 3, so as to realize polarization splitting.
According to the silicon-based integrated high-performance polarization beam splitter provided by the invention, the strong birefringence effect of the anisotropic waveguide 4 is utilized, the anisotropic waveguide 4 positioned between the input waveguide 2 and the coupling waveguide 3 divides incident light into TE polarized light and TM polarized light, the TE polarized light is continuously transmitted along the input waveguide 2, the TM polarized light is coupled into the coupling waveguide 3 for transmission after passing through the second anisotropic waveguide 402 positioned at the middle position, and the high-efficiency light splitting of the incident light is realized; meanwhile, the first anisotropic waveguide 401 located outside the input waveguide 2 limits the evanescent field of the incident light, so that the TE polarized light of the incident light propagates along the input waveguide 2, and the TM polarized light of the incident light propagates to the coupling waveguide 3 along the second anisotropic waveguide 402 at the middle position; the anisotropic waveguide 4 positioned outside the coupling waveguide 3 is used for ensuring the symmetry of the waveguide structure and preventing other modes from being excited to generate crosstalk when the shape of the section of the waveguide is suddenly changed. The polarization beam splitter effectively reduces the optical power loss and improves the polarization extinction ratio of the polarization beam splitter; the device has a silica cladding 1 and is more compatible with other silicon-based waveguide devices. And because the height of each waveguide of the polarization beam splitter is consistent, the production process is simplified, all waveguides can be prepared by etching only, and the production difficulty is reduced.
Like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
It should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings or orientations or positional relationships that are conventionally placed when the products of the art are used, and are used only for convenience in describing the technology and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the technology. Furthermore, "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate a number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. Thus, the terms "first," "second," "third," and the like are used solely to distinguish one from another without necessarily indicating or implying relative importance. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
Furthermore, the terms "horizontal", "vertical", "overhang" and the like do not imply that the components are required to be absolutely horizontal or overhang, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present technology, it should also be noted that, unless explicitly stated or limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present technology can be understood in a specific case to those of ordinary skill in the art.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. A silicon-based integrated high-performance polarization beam splitter is characterized by comprising an input waveguide (2), a coupling waveguide (3) and three anisotropic waveguides (4) which are arranged in a silica cladding (1), wherein the input waveguide (2), the coupling waveguide (3) and the anisotropic waveguides (4) are arranged side by side in the same plane, the three anisotropic waveguides (4) form two slits, the input waveguide (2) is embedded in one slit, and the coupling waveguide (3) is embedded in the other slit;
the anisotropic waveguide (4) positioned at the outer side is used for limiting an evanescent field of incident light so that the incident light can propagate along the input waveguide (2) or the coupling waveguide (3); the anisotropic waveguide (4) located in the middle is used for coupling TM polarized light in incident light into the coupling waveguide (3);
the output end of the input waveguide (2) outputs TE polarized light, and the output end of the coupling waveguide (3) outputs TM polarized light.
2. A silicon-based integrated high performance polarization beam splitter according to claim 1, further comprising a TE light output waveguide (501) and a TM light output waveguide (502), wherein the TE light output waveguide (501) is interfaced with the output end of the input waveguide (2) and the TM light output waveguide (502) is interfaced with the output end of the coupling waveguide (3).
3. The silicon-based integrated high-performance polarization beam splitter of claim 2, wherein the TE light output waveguide (501) and/or the TM light output waveguide (502) are arc-shaped, and the output end of the TE light output waveguide (501) and the output end of the TM light output waveguide (502) tend to be far away.
4. A silicon-based integrated high performance polarization beam splitter according to claim 3, wherein the TE light output waveguide (501) and/or the TM light output waveguide (502) have a bending radius in the range of 15 μm to 25 μm.
5. The silicon-based integrated high-performance polarization beam splitter according to claim 1, wherein the height directions of the input waveguide (2), the coupling waveguide (3) and the anisotropic waveguide (4) are equal to each other with the direction perpendicular to the plane of the input waveguide (2), the coupling waveguide (3) and the anisotropic waveguide (4) as the height direction.
6. The silicon-based integrated high-performance polarization beam splitter according to claim 1, wherein each of the anisotropic waveguides (4) comprises a plurality of slit waveguides arranged side by side and at equal intervals periodically.
7. The silicon-based integrated high-performance polarization beam splitter of claim 6, wherein the slit waveguide has a duty cycle in a range of 0.4 to 0.6, and the duty cycle is a ratio of the size of the slit waveguide in a single period.
8. A silicon-based integrated high performance polarizing beam splitter according to claim 1, characterized in that the input waveguide (2) and the coupling waveguide (3) have the same cross-sectional dimensions perpendicular to the optical axis.
9. A silicon-based integrated high performance polarization beam splitter according to claim 2, wherein the material of the input waveguide (2), the coupling waveguide (3), the anisotropic waveguide (4), the TE light output waveguide (501) and the TM light output waveguide (502) is silicon.
10. A silicon-based integrated high performance polarizing beam splitter according to claim 1, wherein the length of the anisotropic waveguide (4) in the direction of the optical axis is in the range of 13 μm to 15 μm.
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