CN115494283A - Switch type integrated Hall current sensor - Google Patents

Switch type integrated Hall current sensor Download PDF

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Publication number
CN115494283A
CN115494283A CN202211245824.6A CN202211245824A CN115494283A CN 115494283 A CN115494283 A CN 115494283A CN 202211245824 A CN202211245824 A CN 202211245824A CN 115494283 A CN115494283 A CN 115494283A
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CN
China
Prior art keywords
current sensor
hall current
annular
shell
casing
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Withdrawn
Application number
CN202211245824.6A
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Chinese (zh)
Inventor
梁飞
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Individual
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Individual
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Priority to CN202211245824.6A priority Critical patent/CN115494283A/en
Publication of CN115494283A publication Critical patent/CN115494283A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/20Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices
    • G01R15/202Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices using Hall-effect devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D46/00Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0002Casings; Housings; Frame constructions
    • B01D46/0013Modules
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/0092Arrangements for measuring currents or voltages or for indicating presence or sign thereof measuring current only
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/20009Modifications to facilitate cooling, ventilating, or heating using a gaseous coolant in electronic enclosures
    • H05K7/20136Forced ventilation, e.g. by fans
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/20009Modifications to facilitate cooling, ventilating, or heating using a gaseous coolant in electronic enclosures
    • H05K7/20209Thermal management, e.g. fan control
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2279/00Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses
    • B01D2279/45Filters adapted for separating dispersed particles from gases or vapours specially modified for specific uses for electronic devices, e.g. computers, hard-discs, mobile phones

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Thermal Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)

Abstract

The invention provides a switch type integrated Hall current sensor, and belongs to the technical field of sensors. This integrated hall current sensor of switch type includes the casing, annular installation department is installed to the left side inner bottom of casing, install annular iron core on the annular installation department, annular iron core is outer around the coil and is equipped with a breach, be equipped with hall element in the breach, it is equipped with radiating fin to lie in the annular iron core outside in the casing, the right side wall of casing is inlayed and is installed the toper cover, fixed mounting has radiator fan in the toper cover, the little open end that evenly seted up louvre toper cover on the left side wall of casing is connected with dust adsorption device, be connected with the tuber pipe on the dust adsorption device, radiating fin is aimed at so that blow cold wind to radiating fin to the end of tuber pipe. According to the invention, cold air is input into the shell through the cooling fan, and the cold air can take away hot air in the shell, so that the temperature in the shell is rapidly reduced, and the Hall element and the annular iron core in the shell work in a low-temperature environment.

Description

Switch type integrated Hall current sensor
Technical Field
The invention relates to the technical field of sensors, in particular to a switch type integrated Hall current sensor.
Background
A hall sensor is a magnetic field sensor made according to the hall effect. The Hall current sensor has the characteristics of good linearity, strong anti-interference capability, high response speed, simple installation and the like, and later, the Hall effect of the semiconductor and the conductive fluid is found to be stronger than that of metal, so that various Hall elements manufactured by utilizing the phenomenon are widely applied to the aspects of industrial automation technology, detection technology, information processing and the like. The hall effect is a fundamental method for studying the properties of semiconductor materials. The Hall coefficient determined by a Hall effect experiment can be used for judging important parameters such as the conductivity type, the carrier concentration, the carrier mobility and the like of a semiconductor material, and the Hall current sensor is used as a novel tool for detecting current, so that the popularization rate in the industry is gradually increased by virtue of the excellent performance and the access-free detection mode.
The traditional Hall current sensor is extremely easy to be influenced by temperature, so that the error of detected data is large, and the service efficiency and the service life of the traditional Hall current sensor are greatly reduced under the environment with higher temperature, so that the switch type integrated Hall current sensor is designed and produced to solve the problems.
Disclosure of Invention
In order to remedy the above-mentioned deficiencies, the present invention provides a switched-type integrated hall current sensor which overcomes or at least partially solves the above-mentioned technical problems.
The invention is realized by the following steps:
the invention provides a switch type integrated Hall current sensor, which comprises a shell, wherein an annular installation part is installed at the inner bottom of the left side of the shell, an annular iron core is installed on the annular installation part, a coil is wound outside the annular iron core, a gap is formed in the annular iron core, and a Hall element is arranged in the gap;
radiating fins are arranged on the outer side of the annular iron core in the shell, a conical cover is embedded in the right side wall of the shell, a radiating fan is fixedly installed in the conical cover, and radiating holes are uniformly formed in the left side wall of the shell;
the small opening end of the conical cover is connected with a dust adsorption mechanism, the dust adsorption mechanism is connected with an air pipe, and the tail end of the air pipe is aligned to the heat dissipation fins so as to blow cold air to the heat dissipation fins.
In a preferred scheme, dust adsorption device includes rectangle box body and baffle, the mounting hole has all been seted up to the left and right sides wall of rectangle box body, the right side the mounting hole is connected with the toper cover, and the left side the mounting hole is connected with the tuber pipe, the inside intermediate position of rectangle box body is equipped with the baffle, the through-hole has been seted up on the baffle, slide rail piece is all installed to the lateral wall around being located the cavity on baffle right side in the rectangle box body, two around the slide rail piece installs filtering component.
In a preferred scheme, the filtering component includes mounting panel and filter, be equipped with on the mounting panel with slide rail piece assorted lug, two three group's joint subassemblies are all installed to the side that the mounting panel is close to each other, the joint subassembly comprises two strip shaped plates, two the card is equipped with the filter between the joint subassembly that corresponds around between the mounting panel.
In a preferred scheme, the filter holes in the three filter plates are gradually enlarged from left to right, and when cold air is filtered, particles with larger particle sizes in the cold air are filtered firstly, and then small particle dust in the cold air is sequentially filtered, so that the filtering effect is better.
In a preferred scheme, semiconductor refrigeration pieces are installed in a cavity on the left side of the partition plate in the rectangular box body, the number of the semiconductor refrigeration pieces is two, and the semiconductor refrigeration pieces are inclined and symmetrically arranged.
In a preferred scheme, be equipped with the lid on the rectangle box body, the lateral wall of rectangle box body is close to open position department and bonds and has the joint sand grip, the inboard of lid is seted up with joint sand grip assorted draw-in groove.
In a preferred scheme, an annular fan cover is arranged inside the shell and positioned on the outer side of the radiating fins, a gap is formed in the left side of the annular fan cover, and the right side of the annular fan cover is connected with the air pipe.
In a preferred scheme, the front side of the shell is provided with a terminal, and the terminal is electrically connected with the Hall element.
In a preferred scheme, a temperature sensor is installed on the annular installation part at a position corresponding to the Hall element.
In a preferred scheme, the upper end of the shell is provided with a sealing cover, and the sealing cover is connected with the shell through screws.
The invention provides a switch type integrated Hall current sensor, which has the advantages that:
1. through radiator fan to the interior input cold wind of casing, cold wind alright take away the hot-air in the casing, make the inside temperature of casing reduce fast, thereby make hall element and the annular iron core in the casing work under the low temperature environment, when the inside temperature of casing is very high, accessible treater starts the work of semiconductor refrigeration piece, can cool off the cold wind that gets into rectangle box body left side cavity once more through the semiconductor refrigeration piece, make the temperature of cold wind air current lower, thereby more fast effectual cooling to the casing is inside, avoid hall motor sensor to be in under the high temperature environment, lead to it to detect data and have the error, lead to its availability factor and life also to discount greatly.
2. The toper in the radiator fan outside covers and is connected with dust adsorption mechanism, through the inside filtering component of dust adsorption mechanism, can filter the inside cold wind that gets into the casing, contains dust impurity in avoiding cold wind, leads to when cooling to the casing is inside, has the dust to enter into in the casing to on storing up annular iron core and the hall element inside the casing, influence hall current sensor and normally work.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a perspective view provided by an embodiment of the present invention;
FIG. 2 is an enlarged view of A of FIG. 1 according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of an external structure provided by an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a dust adsorbing mechanism according to an embodiment of the present invention.
In the figure: 1. a housing; 2. an annular mounting portion; 3. an annular iron core; 4. a Hall element; 5. a heat dissipating fin; 6. a temperature sensor; 7. a conical cover; 8. a heat radiation fan; 9. a dust adsorption mechanism; 91. a rectangular box body; 92. a box cover; 93. a partition plate; 94. a slide rail block; 95. mounting a plate; 96. a clamping assembly; 97. a filter plate; 98. a semiconductor refrigerating sheet; 99. clamping the convex strips; 910. a card slot; 10. an air duct; 11. an annular fan housing; 12. heat dissipation holes; 13. a terminal; 14. a sealing cover; 15. and (4) screws.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings of the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
Examples
Referring to fig. 1-4, the present invention provides a technical solution: the utility model provides an integrated hall current sensor of switch type, includes casing 1, and annular installation department 2 is installed to casing 1's left side inner bottom, installs annular iron core 3 on the annular installation department 2, and annular iron core 3 is outer around the coil and be equipped with a breach, is equipped with hall element 4 in the breach.
Lie in the annular iron core 3 outside in casing 1 and be equipped with radiating fin 5, the right side wall of casing 1 is inlayed and is installed conical cover 7, fixed mounting has radiator fan 8 in the conical cover 7, louvre 12 has evenly been seted up on the left side wall of casing 1, when the inside temperature of casing 1 is higher, can be to the inside cold wind of carrying of casing 1 through radiator fan 8, cold wind alright take away the hot-air in casing 1, make the inside temperature of casing 1 reduce fast, thereby make hall element 4 and the annular iron core 3 in the casing 1 be in work under the low temperature environment.
The little open end of conical cover 7 is connected with dust adsorption apparatus structure 9, can filter the cold wind that blows to casing 1 in through dust adsorption apparatus structure 9, contain dust impurity in avoiding cold wind, lead to when cooling casing 1 is inside, there is the dust to enter into casing 1 in, and deposit on annular iron core 3 and the hall element 4 of casing 1 inside, influence hall current sensor and normally work, be connected with tuber pipe 10 on the dust adsorption apparatus structure 9, radiating fin 5 is aimed at so that blow cold wind to radiating fin 5 to the end of tuber pipe 10.
Referring to fig. 4, in a preferred embodiment, the dust adsorbing mechanism 9 includes a rectangular box 91 and a partition 93, mounting holes have been all opened on the left and right side walls of the rectangular box 91, the right mounting hole is connected with the conical cover 7, the left mounting hole is connected with the air duct 10, the partition 93 is arranged at the inside middle position of the rectangular box 91, a through hole has been opened on the partition 93, cool air can enter into the right cavity from the left cavity of the rectangular box 91 conveniently, the slide rail blocks 94 are all installed on the front and rear side walls in the cavity on the right side of the partition 93 in the rectangular box 91, a filter assembly is installed on the front and rear slide rail blocks 94, cool air entering the rectangular box 91 can be filtered through the filter assembly, dust and impurities in the cool air can be removed, and the filter assembly can be detachably installed in the rectangular box 91, when more dust exists on the filter assembly, the filter assembly can be taken out from the rectangular box 91 for cleaning.
The filter assembly includes mounting panel 95 and filter 97, be equipped with on the mounting panel 95 with slide rail piece 94 assorted lug, three group's joint subassemblies 96 are all installed to the side that two mounting panels 95 are close to each other, joint subassembly 96 comprises two strip shaped plates, the card is equipped with filter 97 between the joint subassembly 96 that corresponds around between two mounting panels 95, two joint subassemblies 96 that correspond around can be to filter 97 can fixed mounting, and leave the space between controlling two filter 97, can filter cold wind when filtering in proper order, make filter 97 exert different filter effects, the filtration pore on three filter 97 increases gradually from left to right, can filter cold wind, get off the granule of great particle size in the cold wind earlier, then filter the tiny particle dust in the cold wind in proper order, the filter effect is better.
Referring to fig. 4, in a preferred embodiment, the semiconductor refrigeration pieces 98 are installed in the cavity on the left side of the partition plate 93 in the rectangular box body 91, the number of the semiconductor refrigeration pieces 98 is two, the two semiconductor refrigeration pieces 98 are all inclined and symmetrically arranged, and cold air entering the cavity on the left side of the rectangular box body 91 can be cooled again through the semiconductor refrigeration pieces 98, so that the temperature of air flow is lower, and the interior of the shell 1 can be cooled more quickly and effectively.
Be equipped with lid 92 on the rectangle box body 91, the lateral wall of rectangle box body 91 is close to open position department and bonds and has joint sand grip 99, the inboard of lid 92 seted up with joint sand grip 99 assorted draw-in groove 910, through lid 92 alright seal the rectangle box body 91 upper end, so that filter and cooling treatment to cold wind, when using lid 92, place lid 92 on the rectangle box body 91 and press down, make joint sand grip 99 block into in the draw-in groove 910, lid 92 alright be in the same place with rectangle box body 91 fixed connection.
Referring to fig. 1, in a preferred embodiment, an annular fan housing 11 is arranged inside the housing 1 and outside the heat dissipation fins 5, a gap is formed in the left side of the annular fan housing 11, the right side of the annular fan housing 11 is connected to the air duct 10, and by arranging the annular fan housing 11, cold air can be collected in the annular fan housing 11, so that the cold air is in full contact with the annular iron core 3 and the hall element 4, and the cooling effect is better.
Referring to fig. 1, in a preferred embodiment, a terminal 13 is disposed on the front side of the housing 1, the terminal 13 is electrically connected to the hall element 4, a temperature sensor 6 is mounted on the annular mounting portion 2 at a position corresponding to the hall element 4, and the temperature of the environment where the annular iron core 3 and the hall element 4 are located can be detected by the temperature sensor 6, so that when the temperature rises, a signal is sent to the processor, and the processor can turn on the cooling fan 8 to input cold air into the housing 1.
Referring to fig. 1, in a preferred embodiment, a sealing cover 14 is provided at an upper end of a housing 1, the sealing cover 14 is connected to the housing 1 by screws 15, and the housing 1 is closed by mounting the sealing cover 14 on the housing 1, so that electric components inside the housing 1 can be protected from being damaged.
Specifically, the working process or working principle of the switch type integrated hall current sensor is as follows: during the use, after hall current sensor uses for a long time, can detect the temperature of the environment that annular iron core 3 and hall element 4 are located through temperature sensor 6, when the inside high temperature of casing 1, temperature sensor 6 signals to the treater, the treater alright open radiator fan 8, to importing cold wind in casing 1, cold wind alright take away the hot-air in casing 1, make the inside temperature of casing 1 reduce fast, thereby make hall element 4 and the annular iron core 3 in the casing 1 work under the low temperature environment, be connected with dust adsorption apparatus 9 on the conical cover 7 in the radiator fan 8 outside, through the inside filter assembly of dust adsorption apparatus 9, can filter the cold wind that gets into casing 1 inside, contain dust impurity in the cold wind, lead to when cooling to casing 1 inside, have the dust to get into casing 1 in, and deposit on annular iron core 3 and the hall element 4 inside casing 1, influence hall current sensor normal work, and filter assembly detachable installs in rectangle box 91, when there is the dust on the filter assembly, can take out the filter assembly from the rectangle box 91 and clear up the temperature more.
When the temperature in the shell 1 is very high, the semiconductor refrigerating piece 98 can be started by the processor to work, cold air entering the cavity on the left side of the rectangular box body 91 can be cooled again through the semiconductor refrigerating piece 98, the temperature of cold air flow is lower, the temperature in the shell 1 is cooled more quickly and effectively, the Hall motor sensor is prevented from being in a high-temperature environment, errors exist in detection data, and the service efficiency and the service life of the Hall motor sensor are greatly reduced.
It should be noted that the temperature sensor 6, the cooling fan 8 and the semiconductor cooling plate 98 are devices or apparatuses existing in the prior art or devices or apparatuses that can be realized in the prior art, and the temperature sensor 6, the cooling fan 8 and the semiconductor cooling plate 98 are all electrically connected to the processor, and the power supply, the specific composition and the principle thereof are clear to those skilled in the art, and therefore, detailed descriptions thereof are omitted.

Claims (10)

1. A switch type integrated Hall current sensor comprises a shell (1) and is characterized in that an annular installation part (2) is installed at the inner bottom of the left side of the shell (1), an annular iron core (3) is installed on the annular installation part (2), a coil is wound outside the annular iron core (3) and a gap is formed in the annular iron core, and a Hall element (4) is arranged in the gap;
radiating fins (5) are arranged on the outer side of the annular iron core (3) in the shell (1), a conical cover (7) is embedded in the right side wall of the shell (1), a radiating fan (8) is fixedly arranged in the conical cover (7), and radiating holes (12) are uniformly formed in the left side wall of the shell (1);
the small opening end of the conical cover (7) is connected with a dust adsorption mechanism (9), the dust adsorption mechanism (9) is connected with an air pipe (10), and the tail end of the air pipe (10) is aligned to the heat dissipation fins (5) so as to blow cold air to the heat dissipation fins (5).
2. The switch type integrated hall current sensor according to claim 1, wherein the dust adsorption mechanism (9) comprises a rectangular box body (91) and a partition plate (93), the left and right side walls of the rectangular box body (91) are provided with mounting holes, the right side mounting hole is connected with the conical cover (7), the left side mounting hole is connected with the air pipe (10), the partition plate (93) is arranged in the middle of the inside of the rectangular box body (91), the partition plate (93) is provided with a through hole, the front side wall and the rear side wall of the cavity on the right side of the partition plate (93) in the rectangular box body (91) are provided with slide rail blocks (94), and a filter assembly is arranged on the front slide rail block (94) and the rear slide rail block (94).
3. The switch-type integrated hall current sensor according to claim 2, wherein said filter assembly comprises a mounting plate (95) and a filter plate (97), said mounting plate (95) is provided with a projection matching with the slide rail block (94), three sets of clamping assemblies (96) are mounted on the side surfaces of two said mounting plates (95) close to each other, said clamping assemblies (96) are composed of two strip-shaped plates, and the filter plate (97) is clamped between the clamping assemblies (96) corresponding to each other in the front and back direction between the two said mounting plates (95).
4. A switched-type integrated hall current sensor according to claim 3, characterised in that the filter holes in three of said filter plates (97) are gradually increasing from left to right.
5. The switch type integrated Hall current sensor according to claim 4, wherein two semiconductor chilling plates (98) are installed in a cavity on the left side of the partition plate (93) in the rectangular box body (91), and the two semiconductor chilling plates (98) are inclined and symmetrically arranged.
6. The switch type integrated Hall current sensor according to claim 5, wherein a box cover (92) is arranged on the rectangular box body (91), a clamping convex strip (99) is bonded to a position, close to the opening, of the outer side wall of the rectangular box body (91), and a clamping groove (910) matched with the clamping convex strip (99) is formed in the inner side of the box cover (92).
7. The switch type integrated hall current sensor according to claim 1, wherein an annular wind shield (11) is arranged inside the housing (1) and outside the heat dissipation fins (5), a gap is arranged on the left side of the annular wind shield (11), and the right side of the annular wind shield (11) is connected with the air pipe (10).
8. A switched-mode integrated hall current sensor according to claim 1, characterised in that the front side of the housing (1) is provided with terminals (13), which terminals (13) are electrically connected to the hall element (4).
9. The switched integrated hall current sensor according to claim 1 wherein a temperature sensor (6) is mounted on the annular mounting portion (2) at a location corresponding to the hall element (4).
10. A switched-mode integrated hall current sensor according to claim 1, characterised in that the upper end of the housing (1) is provided with a sealing cover (14), the sealing cover (14) being connected to the housing (1) by means of screws (15).
CN202211245824.6A 2022-10-12 2022-10-12 Switch type integrated Hall current sensor Withdrawn CN115494283A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211245824.6A CN115494283A (en) 2022-10-12 2022-10-12 Switch type integrated Hall current sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202211245824.6A CN115494283A (en) 2022-10-12 2022-10-12 Switch type integrated Hall current sensor

Publications (1)

Publication Number Publication Date
CN115494283A true CN115494283A (en) 2022-12-20

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CN202211245824.6A Withdrawn CN115494283A (en) 2022-10-12 2022-10-12 Switch type integrated Hall current sensor

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116718826A (en) * 2023-08-09 2023-09-08 保德汇智科技(深圳)有限公司 Electroplating direct current fluctuation detection system, detection method and electroplating equipment
CN117452037A (en) * 2023-12-25 2024-01-26 南京中旭电子科技有限公司 Detachable Hall current sensor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116718826A (en) * 2023-08-09 2023-09-08 保德汇智科技(深圳)有限公司 Electroplating direct current fluctuation detection system, detection method and electroplating equipment
CN116718826B (en) * 2023-08-09 2023-11-17 保德汇智科技(深圳)有限公司 Electroplating direct current fluctuation detection system, detection method and electroplating equipment
CN117452037A (en) * 2023-12-25 2024-01-26 南京中旭电子科技有限公司 Detachable Hall current sensor
CN117452037B (en) * 2023-12-25 2024-03-15 南京中旭电子科技有限公司 Detachable Hall current sensor

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Application publication date: 20221220

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