CN115483603A - Near-infrared laser based on silver selenide nanocrystals and its preparation method - Google Patents

Near-infrared laser based on silver selenide nanocrystals and its preparation method Download PDF

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CN115483603A
CN115483603A CN202211287904.8A CN202211287904A CN115483603A CN 115483603 A CN115483603 A CN 115483603A CN 202211287904 A CN202211287904 A CN 202211287904A CN 115483603 A CN115483603 A CN 115483603A
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silver selenide
nanocrystals
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silver
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刘桂芝
罗卫国
马丙乾
蒋小强
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Wuxi Linli Technology Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • H01S3/0675Resonators including a grating structure, e.g. distributed Bragg reflectors [DBR] or distributed feedback [DFB] fibre lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16Solid materials
    • H01S3/169Nanoparticles, e.g. doped nanoparticles acting as a gain material

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Abstract

The invention provides a near-infrared laser based on silver selenide nanocrystalline and a preparation method thereof, wherein the near-infrared laser based on the silver selenide nanocrystalline sequentially comprises the following components: the device comprises a substrate, a distributed feedback grating layer and a silver selenide nanocrystalline layer; the silver selenide nanocrystalline layer is composed of silver selenide nanocrystals, and the silver selenide nanocrystals are in a tetragonal phase with the diameter range of 6-10 nm. The silver selenide nanocrystal is used as an optical gain medium of the laser, so that the band-edge state optical gain with zero threshold is realized; the relative position of the conduction band bottom of the silver selenide nanocrystal and the Fermi level of the environment is adjusted by adjusting the size of the silver selenide nanocrystal by utilizing the quantum confinement effect, so that the band edge electronic state 1S is obtained e The silver selenide nanocrystalline occupied by electrons has adjustable near-infrared emission wavelength, does not need to be added with a hole trapping agent which is easy to oxidize, is stable in atmospheric environment, and has a crystal structure and a surface state which cannot be damaged; the silver selenide material of the inventionThe material is a low-toxicity environment-friendly material and is environment-friendly.

Description

基于硒化银纳米晶的近红外激光器及其制备方法Near-infrared laser based on silver selenide nanocrystals and its preparation method

技术领域technical field

本发明涉及半导体光电子器件的技术领域,特别是涉及一种基于硒化银纳米晶的近红外激光器及其制备方法。The invention relates to the technical field of semiconductor optoelectronic devices, in particular to a near-infrared laser based on silver selenide nanocrystals and a preparation method thereof.

背景技术Background technique

激光技术在通信、医疗、科研等领域有着广泛的应用,具有极大的市场需求。激光阈值是激光领域研究的核心问题之一,如何降低激光阈值以及寻找低阈值的新材料,是激光技术重点关注的课题。Laser technology has a wide range of applications in communication, medical treatment, scientific research and other fields, and has great market demand. Laser threshold is one of the core issues in the field of laser research. How to reduce the laser threshold and find new materials with low threshold is the focus of laser technology.

近年来,半导体纳米晶由于具有波长连续可调、窄带发射以及高光致发光量子产率等优异的发光性能,成为了光增益材料的研究热点。得益于量子限域效应,半导体纳米晶作为光增益材料展现出了多种优越的性能,例如随半导体纳米晶尺寸可调的发射波长和温度不敏感的光增益阈值。然而,由于带边态的多重简并,要实现带边态的光增益,半导体纳米晶所含激子数必须大于带边态简并度的一半,也即能容纳的电子数的一半。例如,带边态8重简并的PbSe纳米晶要实现光增益,半导体纳米晶内的激子必须大于4。这严重限制了半导体纳米晶的光增益阈值,使其难以实现连续光泵浦或电泵浦的激发发射,只能用脉冲激光泵浦。In recent years, semiconductor nanocrystals have become a research hotspot of optical gain materials due to their excellent luminescent properties such as continuously tunable wavelength, narrow-band emission, and high photoluminescence quantum yield. Thanks to the quantum confinement effect, semiconductor nanocrystals exhibit a variety of superior properties as optical gain materials, such as tunable emission wavelength and temperature-insensitive optical gain threshold with the size of semiconductor nanocrystals. However, due to the multiple degeneracy of the band-edge states, to achieve the optical gain of the band-edge states, the number of excitons contained in the semiconductor nanocrystal must be greater than half of the degeneracy of the band-edge states, that is, half of the number of electrons that can be accommodated. For example, to achieve optical gain in PbSe nanocrystals with 8-fold degenerate band-edge states, the number of excitons in semiconductor nanocrystals must be greater than 4. This severely limits the optical gain threshold of semiconductor nanocrystals, making it difficult to achieve excitation and emission of continuous optical pumping or electrical pumping, and can only be pumped with pulsed lasers.

鉴于以上,有必要提供一种基于硒化银纳米晶的近红外激光器及其制备方法,以获得零阈值、高稳定性、发射波长在近红外范围内可调及环保的激光器。In view of the above, it is necessary to provide a near-infrared laser based on silver selenide nanocrystals and its preparation method to obtain a laser with zero threshold, high stability, adjustable emission wavelength in the near-infrared range and environmental protection.

发明内容Contents of the invention

鉴于以上所述现有技术的缺点,本发明的目的在于提供一种基于硒化银纳米晶的近红外激光器及其制备方法,以获得零阈值、高稳定性、发射波长在近红外范围内可调及环保的激光器。In view of the shortcomings of the prior art described above, the object of the present invention is to provide a near-infrared laser based on silver selenide nanocrystals and a preparation method thereof, so as to obtain zero threshold, high stability, and emission wavelengths that can be used in the near-infrared range. Tuning and environmentally friendly lasers.

为实现上述目的及其他相关目的,本发明提供一种基于硒化银纳米晶的近红外激光器,所述基于硒化银纳米晶的近红外激光器依次包括:In order to achieve the above purpose and other related purposes, the invention provides a near-infrared laser based on silver selenide nanocrystals, said near-infrared laser based on silver selenide nanocrystals comprises in turn:

基板、分布反馈光栅层及硒化银纳米晶层;Substrate, distributed feedback grating layer and silver selenide nanocrystalline layer;

所述硒化银纳米晶层由硒化银纳米晶组成,所述硒化银纳米晶为正方晶相,直径范围为6nm~10nm。The silver selenide nanocrystal layer is composed of silver selenide nanocrystals, the silver selenide nanocrystals are in a tetragonal crystal phase, and the diameter ranges from 6nm to 10nm.

可选地,所述硒化银纳米晶层由密堆的所述硒化银纳米晶组成。Optionally, the silver selenide nanocrystal layer is composed of closely packed silver selenide nanocrystals.

可选地,所述分布反馈光栅的光栅周期与有效折射率的乘积等于所述硒化银纳米晶的带边发射峰波长。Optionally, the product of the grating period of the distributed feedback grating and the effective refractive index is equal to the band-edge emission peak wavelength of the silver selenide nanocrystal.

可选地,所述基于硒化银纳米晶的近红外激光器还包括封装层,所述封装层位于所述硒化银纳米晶层上方。Optionally, the silver selenide nanocrystal-based near-infrared laser further includes an encapsulation layer, and the encapsulation layer is located above the silver selenide nanocrystal layer.

可选地,所述基板的材料为硅、云母、三氧化二铝及二氧化硅中的一种;所述分布反馈光栅层的材料为二氧化硅、三氧化二铝、二氟化镁及氟化锂中的一种;所述封装层的材料为二氧化硅、三氧化二铝、二氟化镁及氟化锂中的一种。Optionally, the material of the substrate is one of silicon, mica, aluminum oxide and silicon dioxide; the material of the distributed feedback grating layer is silicon dioxide, aluminum oxide, magnesium difluoride and One of lithium fluoride; the material of the encapsulation layer is one of silicon dioxide, aluminum oxide, magnesium difluoride and lithium fluoride.

本发明还提供一种基于硒化银纳米晶的近红外激光器的制备方法,用于制备上述基于硒化银纳米晶的近红外激光器,所述制备方法包括:The present invention also provides a method for preparing a near-infrared laser based on silver selenide nanocrystals, which is used to prepare the above-mentioned near-infrared laser based on silver selenide nanocrystals. The preparation method includes:

S1:提供基板,并制备直径范围为6nm~10nm,且为正方晶相的硒化银纳米晶,再将所述硒化银纳米晶分散于甲苯溶液中,得到硒化银纳米晶甲苯分散液;S1: Provide a substrate, and prepare silver selenide nanocrystals with a diameter ranging from 6nm to 10nm and a tetragonal crystal phase, and then disperse the silver selenide nanocrystals in a toluene solution to obtain a toluene dispersion of silver selenide nanocrystals ;

S2:于所述基板上形成分布反馈光栅层;S2: forming a distributed feedback grating layer on the substrate;

S3:将步骤S1中得到的所述硒化银纳米晶甲苯分散液旋涂于所述分布反馈光栅层上,获得硒化银纳米晶层。S3: Spin-coat the toluene dispersion of silver selenide nanocrystals obtained in step S1 on the distribution feedback grating layer to obtain a silver selenide nanocrystal layer.

可选地,在步骤S3中,将所述硒化银纳米晶甲苯分散液旋涂于所述分布反馈光栅层后,还包括在惰性气体保护下退火的步骤。Optionally, in step S3, after the toluene dispersion of silver selenide nanocrystals is spin-coated on the distributed feedback grating layer, the step of annealing under the protection of an inert gas is also included.

可选地,在步骤S3中,获得所述硒化银纳米晶层后,还包括于所述硒化银纳米晶层上形成封装层的步骤。Optionally, in step S3, after obtaining the silver selenide nanocrystal layer, a step of forming an encapsulation layer on the silver selenide nanocrystal layer is also included.

如上所述,本发明的基于硒化银纳米晶的近红外激光器及其制备方法,具有以下有益效果:As mentioned above, the silver selenide nanocrystal-based near-infrared laser and its preparation method of the present invention have the following beneficial effects:

本发明利用直径为6nm~10nm的正方晶相的硒化银纳米晶作为光增益介质,正方晶相的体材料硒化银纳米晶11的禁带宽度只有0.07eV时,环境费米能级60高于导带底(如图3(a)及图3(b)所示),导带底被电子占据。由于量子限域效应,硒化银纳米晶呈现出类似于原子的分立能级,禁带宽度随硒化银纳米晶尺寸的减小而增加。当正方晶相的硒化银纳米晶的直径减少到6nm时(如图4(a)及图4(b)所示),直径为6nm的硒化银纳米晶12的环境费米能级60仍高于带边电子态1Se,带边电子态1Se在未激发状态下被电子占据(如图6(a)所示),此时,带边吸收被漂白,也即激子从1Sh态到1Se态的跃迁被禁止,同时,带边发射也是禁止的,也就是说,在未激发状态下,硒化银纳米晶群体对能量与禁带宽度相同的光子是透明的,既不吸收也不能产生增益,只要硒化银纳米晶层40中有一个硒化银纳米晶被一个能量大于或等于1Sh态和1Pe态间的能量间隙的光子激发(如图6(b)所示),带边空穴态1Sh上的电子被激发到1Pe态或激发到更高能级然后弛豫到1Pe态,在1Sh态留下一个空穴,此硒化银纳米晶则实现了带边态的粒子数反转,整个硒化银纳米晶层40在带边发射波长形成了光增益,因此利用直径大于6nm的正方晶相硒化银纳米晶可实现零阈值的带边态光增益。当硒化银纳米晶的直径小于6nm时,例如直径为3nm的硒化银纳米晶13的环境费米能级60则低于带边电子态1Se,带边电子态1Se未被电子占据(如图5(a)及图5(b)所示),此时,带边吸收未被漂白,也即电子从1Sh到1Se的跃迁未被禁止,也就是说,在未激发状态下,硒化银纳米晶群体对能量与禁带宽度相同的光子呈现吸收。因为硒化银带边态为2重简并,只有硒化银纳米晶群体中平均每个硒化银纳米晶中的激子数也即吸收的光子数大于1,才能获得粒子数反转。限制硒化银纳米晶的直径大于10nm,是为了增强量子限域效应,获得纳米晶作为光增益材料的普遍优势,即随硒化银纳米晶尺寸可调的近红外发射波长和温度不敏感的光增益阈值。The present invention utilizes silver selenide nanocrystals with a diameter of 6nm to 10nm in a square crystal phase as an optical gain medium, and when the band gap width of the bulk material silver selenide nanocrystals 11 in a tetragonal crystal phase is only 0.07eV, the environmental Fermi level is 60 Above the bottom of the conduction band (as shown in Figure 3(a) and Figure 3(b)), the bottom of the conduction band is occupied by electrons. Due to the quantum confinement effect, silver selenide nanocrystals exhibit discrete energy levels similar to atoms, and the forbidden band width increases with the decrease of the size of silver selenide nanocrystals. When the diameter of the silver selenide nanocrystal of the tetragonal crystal phase is reduced to 6nm (as shown in Figure 4 (a) and Figure 4 (b)), the environmental Fermi level of the silver selenide nanocrystal 12 with a diameter of 6nm is 60 is still higher than the band-edge electronic state 1S e , which is occupied by electrons in the unexcited state ( as shown in Figure 6(a)), at this time, the band-edge absorption is bleached, that is, the excitons from The transition from the h state to the 1S e state is forbidden, and at the same time, the band-edge emission is also forbidden, that is to say, in the unexcited state, the silver selenide nanocrystal population is transparent to photons with the same energy as the forbidden band width, both Neither absorption nor gain can be produced, as long as there is a silver selenide nanocrystal in the silver selenide nanocrystal layer 40 excited by a photon with an energy greater than or equal to the energy gap between the 1S h state and the 1P e state (as shown in Figure 6(b) shown), the electrons on the band-edge hole state 1S h are excited to the 1P e state or to a higher energy level and then relax to the 1P e state, leaving a hole in the 1S h state. This silver selenide nanocrystal Then the inversion of the number of particles in the band-edge state is realized, and the entire silver selenide nanocrystal layer 40 forms an optical gain at the band-edge emission wavelength. Edge state light gain. When the diameter of silver selenide nanocrystals is less than 6 nm, for example, the ambient Fermi level 60 of silver selenide nanocrystals 13 with a diameter of 3 nm is lower than the band-edge electronic state 1S e , which is not occupied by electrons (As shown in Figure 5(a) and Figure 5(b)), at this time, the band edge absorption is not bleached, that is, the transition of electrons from 1S h to 1S e is not prohibited, that is, in the unexcited state In this case, the silver selenide nanocrystal population exhibits absorption for photons with the same energy as the forbidden band width. Because the silver selenide band edge state is double-degenerate, only when the average number of excitons in each silver selenide nanocrystal in the silver selenide nanocrystal population, that is, the number of absorbed photons, is greater than 1, the population inversion can be obtained. Restricting the diameter of silver selenide nanocrystals to be greater than 10nm is to enhance the quantum confinement effect and obtain the general advantages of nanocrystals as optical gain materials, that is, the near-infrared emission wavelength and temperature insensitivity that can be adjusted with the size of silver selenide nanocrystals Optical gain threshold.

本发明利用直径为6nm~10nm的正方晶相的硒化银纳米晶作为激光器的光增益介质,实现了零阈值的带边态光增益;本发明利用量子限域效应,通过调节硒化银纳米晶的尺寸来调节正方晶相硒化银纳米晶导带底和环境费米能级的相对位置,从而获得带边电子态1Se被电子占据的硒化银纳米晶,发射波长在近红外波段内可调,无须添加易被氧化的空穴捕获剂,且带边电子态1Se被电子占据的硒化银纳米晶在大气环境下是稳定的,晶体结构和表面状态也不会被破坏;本发明的硒化银材料为低毒的环保型材料,对环境友好。The present invention uses silver selenide nanocrystals with a diameter of 6nm to 10nm in a square crystal phase as the optical gain medium of the laser, and realizes a zero-threshold band edge state optical gain; the present invention uses the quantum confinement effect to adjust the silver selenide nanocrystal The size of the crystal can be used to adjust the relative position of the conduction band bottom of the tetragonal silver selenide nanocrystal and the environmental Fermi level, so as to obtain the silver selenide nanocrystal whose band-edge electronic state 1S e is occupied by electrons, and the emission wavelength is in the near-infrared band Internally adjustable, no need to add easily oxidized hole scavengers, and the silver selenide nanocrystals whose band-edge electronic state 1S e is occupied by electrons are stable in the atmospheric environment, and the crystal structure and surface state will not be destroyed; The silver selenide material of the invention is a low-toxic, environment-friendly material and is environmentally friendly.

附图说明Description of drawings

图1显示为本发明的硒化银纳米晶结构示意图。Fig. 1 is a schematic diagram showing the structure of silver selenide nanocrystals of the present invention.

图2显示为本发明的基于硒化银纳米晶的近红外激光器结构示意图。Fig. 2 is a schematic diagram showing the structure of a near-infrared laser based on silver selenide nanocrystals of the present invention.

图3(a)显示为本发明的体材料硒化银纳米晶的结构示意图,图3(b)显示为本发明的体材料硒化银纳米晶的能级结构示意图。Fig. 3(a) is a schematic diagram showing the structure of the bulk material silver selenide nanocrystal of the present invention, and Fig. 3(b) is a schematic diagram showing the energy level structure of the bulk material silver selenide nanocrystal of the present invention.

图4(a)显示为本发明直径为6nm的硒化银纳米晶的结构示意图,图4(b)显示为本发明直径为6nm的硒化银纳米晶的能级结构示意图。Figure 4(a) shows a schematic diagram of the structure of silver selenide nanocrystals with a diameter of 6nm in the present invention, and Figure 4(b) shows a schematic diagram of the energy level structure of silver selenide nanocrystals with a diameter of 6nm in the present invention.

图5(a)显示为本发明直径为3nm的硒化银纳米晶的结构示意图,图5(b)显示为本发明直径为3nm的硒化银纳米晶的能级结构示意图。Figure 5(a) shows a schematic diagram of the structure of the silver selenide nanocrystal with a diameter of 3nm in the present invention, and Figure 5(b) shows a schematic diagram of the energy level structure of the silver selenide nanocrystal with a diameter of 3nm in the present invention.

图6(a)显示为本发明直径为6nm的硒化银纳米晶在未激发的激子状态和能级结构示意图,图6(b)显示为本发明直径为6nm的硒化银纳米晶在激发后的激子状态和能级结构示意图。Fig. 6 (a) shows that the silver selenide nanocrystal with a diameter of 6nm of the present invention is in the unexcited excitonic state and the energy level structure schematic diagram, and Fig. 6 (b) shows that the silver selenide nanocrystal with a diameter of 6nm of the present invention is in Schematic diagram of the excitonic state and energy level structure after excitation.

图7显示为本发明的基于硒化银纳米晶的近红外激光器制备方法的流程示意图。FIG. 7 is a schematic flow chart of the method for preparing a near-infrared laser based on silver selenide nanocrystals of the present invention.

图8至图11显示为本发明的基于硒化银纳米晶的近红外激光器制备方法的各步骤所呈现的结构示意图。FIG. 8 to FIG. 11 show the structural schematic diagrams presented in each step of the preparation method of the silver selenide nanocrystal-based near-infrared laser according to the present invention.

元件标号说明Component designation description

10,硒化银纳米晶;11,体材料硒化银纳米晶;12,直径为6nm的硒化银纳米晶;13,直径为3nm的硒化银纳米晶;20,基板;30,分布反馈光栅;40,硒化银纳米晶层;50,封装层;60,环境费米能级。10, silver selenide nanocrystals; 11, bulk material silver selenide nanocrystals; 12, silver selenide nanocrystals with a diameter of 6nm; 13, silver selenide nanocrystals with a diameter of 3nm; 20, substrate; 30, distributed feedback Grating; 40, silver selenide nanocrystalline layer; 50, encapsulation layer; 60, ambient Fermi level.

具体实施方式detailed description

以下通过特定的具体实例说明本发明的实施方式,本领域技术人员可由本说明书所揭露的内容轻易地了解本发明的其他优点与功效。本发明还可以通过另外不同的具体实施方式加以实施或应用,本说明书中的各项细节也可以基于不同观点与应用,在没有背离本发明的精神下进行各种修饰或改变。Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.

请参阅图1至图11。需要说明的是,本实施例中所提供的图示仅以示意方式说明本发明的基本构想,遂图示中仅显示与本发明中有关的组件而非按照实际实施时的组件数目、形状及尺寸绘制,其实际实施时各组件的型态、数量及比例可为一种随意的改变,且其组件布局型态也可能更为复杂。See Figures 1 through 11. It should be noted that the diagrams provided in this embodiment are only schematically illustrating the basic idea of the present invention, so that only the components related to the present invention are shown in the diagrams rather than the number, shape and Dimensional drawing, the type, quantity and proportion of each component can be changed arbitrarily during actual implementation, and the component layout type may also be more complicated.

实施例一Embodiment one

如图1至图2所示,本发明提供一种基于硒化银纳米晶的近红外激光器,所述基于硒化银纳米晶的近红外激光器依次包括:As shown in Figures 1 to 2, the present invention provides a near-infrared laser based on silver selenide nanocrystals, the near-infrared laser based on silver selenide nanocrystals includes in turn:

基板20、分布反馈光栅层30及硒化银纳米晶层40(如图2所示);Substrate 20, distributed feedback grating layer 30 and silver selenide nanocrystalline layer 40 (as shown in Figure 2);

所述硒化银纳米晶层40由硒化银纳米晶10组成,所述硒化银纳米晶10为正方晶相,直径范围为6nm~10nm(如图1所示)。The silver selenide nanocrystal layer 40 is composed of silver selenide nanocrystals 10, and the silver selenide nanocrystals 10 are in a tetragonal crystal phase with a diameter ranging from 6 nm to 10 nm (as shown in FIG. 1 ).

本实施例的工作原理为:所述基于硒化银纳米晶的近红外激光器受到的激发光子能量大于或等于硒化银纳米晶1Sh态和1Pe态间的能量间隙,所述硒化银纳米晶10的带边电子态1Se在未激发的状态下被电子占据时,所述基于硒化银纳米晶的近红外激光器的激光发射可从所述硒化银纳米晶层40上表面或所述基板20下表面输出。The working principle of this embodiment is: the excited photon energy received by the near-infrared laser based on silver selenide nanocrystals is greater than or equal to the energy gap between the 1S h state and the 1P e state of the silver selenide nanocrystals, and the silver selenide When the band-edge electronic state 1S e of the nanocrystal 10 is occupied by electrons in an unexcited state, the laser emission of the near-infrared laser based on the silver selenide nanocrystal can be emitted from the upper surface of the silver selenide nanocrystal layer 40 or The lower surface of the substrate 20 is output.

本实施例利用直径为6nm~10nm的正方晶相的硒化银纳米晶作为光增益介质,正方晶相的体材料硒化银纳米晶11的禁带宽度只有0.07eV时,环境费米能级60高于导带底(如图3(a)及图3(b)所示),导带底被电子占据。由于量子限域效应,硒化银纳米晶呈现出类似于原子的分立能级,禁带宽度随硒化银纳米晶尺寸的减小而增加。当正方晶相的硒化银纳米晶的直径减少到6nm时(如图4(a)及图4(b)所示),直径为6nm的硒化银纳米晶12的环境费米能级60仍高于带边电子态1Se,带边电子态1Se在未激发状态下被电子占据(如图6(a)所示),此时,带边吸收被漂白,也即激子从1Sh态到1Se态的跃迁被禁止,同时,带边发射也是禁止的,也就是说,在未激发状态下,硒化银纳米晶群体对能量与禁带宽度相同的光子是透明的,既不吸收也不能产生增益,只要硒化银纳米晶层中有一个硒化银纳米晶被一个能量大于或等于1Sh态和1Pe态间的能量间隙的光子激发(如图6(b)所示),带边空穴态1Sh上的电子被激发到1Pe态或激发到更高能级然后弛豫到1Pe态,在1Sh态留下一个空穴,此硒化银纳米晶则实现了带边态的粒子数反转,整个硒化银纳米晶层在带边发射波长形成了光增益,因此利用直径大于6nm的正方晶相硒化银纳米晶可实现零阈值的带边态光增益。当硒化银纳米晶的直径小于6nm时,例如直径为3nm的硒化银纳米晶13的环境费米能级60则低于带边电子态1Se,带边电子态1Se未被电子占据(如图5(a)及图5(b)所示),此时,带边吸收未被漂白,也即电子从1Sh到1Se的跃迁未被禁止,也就是说,在未激发状态下,硒化银纳米晶群体对能量与禁带宽度相同的光子呈现吸收。因为硒化银带边态为2重简并,只有硒化银纳米晶群体中平均每个硒化银纳米晶中的激子数也即吸收的光子数大于1,才能获得粒子数反转。限制硒化银纳米晶的直径大于10nm,是为了增强量子限域效应,获得纳米晶作为光增益材料的普遍优势,即随硒化银纳米晶尺寸可调的近红外发射波长和温度不敏感的光增益阈值。This embodiment utilizes silver selenide nanocrystals with a diameter of 6nm to 10nm in the tetragonal crystal phase as the optical gain medium. When the band gap of the bulk material silver selenide nanocrystals 11 in the tetragonal crystal phase is only 0.07eV, the environmental Fermi level 60 is higher than the bottom of the conduction band (as shown in Figure 3(a) and Figure 3(b)), and the bottom of the conduction band is occupied by electrons. Due to the quantum confinement effect, silver selenide nanocrystals exhibit discrete energy levels similar to atoms, and the forbidden band width increases with the decrease of the size of silver selenide nanocrystals. When the diameter of the silver selenide nanocrystal of the tetragonal crystal phase is reduced to 6nm (as shown in Figure 4 (a) and Figure 4 (b)), the environmental Fermi level of the silver selenide nanocrystal 12 with a diameter of 6nm is 60 is still higher than the band-edge electronic state 1S e , which is occupied by electrons in the unexcited state ( as shown in Figure 6(a)), at this time, the band-edge absorption is bleached, that is, the excitons from The transition from the h state to the 1S e state is forbidden, and at the same time, the band-edge emission is also forbidden, that is to say, in the unexcited state, the silver selenide nanocrystal population is transparent to photons with the same energy as the forbidden band width, both No absorption and no gain, as long as one silver selenide nanocrystal in the silver selenide nanocrystal layer is excited by a photon whose energy is greater than or equal to the energy gap between the 1S h state and the 1P e state (as shown in Figure 6(b) shown), the electrons on the band-edge hole state 1S h are excited to the 1P e state or to a higher energy level and then relax to the 1P e state, leaving a hole in the 1S h state, and the silver selenide nanocrystal The particle number inversion of the band-edge state is realized, and the entire silver selenide nanocrystal layer forms an optical gain at the band-edge emission wavelength, so the use of a tetragonal silver selenide nanocrystal with a diameter greater than 6nm can achieve a zero-threshold band-edge state light gain. When the diameter of silver selenide nanocrystals is less than 6 nm, for example, the ambient Fermi level 60 of silver selenide nanocrystals 13 with a diameter of 3 nm is lower than the band-edge electronic state 1S e , which is not occupied by electrons (As shown in Figure 5(a) and Figure 5(b)), at this time, the band edge absorption is not bleached, that is, the transition of electrons from 1S h to 1S e is not prohibited, that is, in the unexcited state In this case, the silver selenide nanocrystal population exhibits absorption for photons with the same energy as the forbidden band width. Because the silver selenide band edge state is double-degenerate, only when the average number of excitons in each silver selenide nanocrystal in the silver selenide nanocrystal population, that is, the number of absorbed photons, is greater than 1, the population inversion can be obtained. Restricting the diameter of silver selenide nanocrystals to be greater than 10nm is to enhance the quantum confinement effect and obtain the general advantages of nanocrystals as optical gain materials, that is, the near-infrared emission wavelength and temperature insensitivity that can be adjusted with the size of silver selenide nanocrystals Optical gain threshold.

本实施例利用直径为6nm~10nm的正方晶相的硒化银纳米晶作为激光器的光增益介质,实现了零阈值的带边态光增益;本实施例利用量子限域效应,通过调节硒化银纳米晶的尺寸来调节正方晶相硒化银纳米晶导带底和环境费米能级60的相对位置,从而获得带边电子态1Se被电子占据的硒化银纳米晶,发射波长在近红外波段内可调,无须添加易被氧化的空穴捕获剂,且带边电子态1Se被电子占据的硒化银纳米晶在大气环境下是稳定的,晶体结构和表面状态也不会被破坏;本实施例的硒化银材料为低毒的环保型材料,对环境友好。This embodiment uses silver selenide nanocrystals with a diameter of 6nm to 10nm in a square crystal phase as the optical gain medium of the laser, and realizes a zero-threshold band edge state optical gain; this embodiment utilizes the quantum confinement effect to adjust the selenide The size of the silver nanocrystals is used to adjust the relative position of the conduction band bottom of the tetragonal silver selenide nanocrystals and the environmental Fermi level 60, so as to obtain the silver selenide nanocrystals whose band-edge electronic state 1S e is occupied by electrons, and the emission wavelength is at It is adjustable in the near-infrared band, without adding easily oxidized hole trapping agents, and the silver selenide nanocrystals whose band-edge electronic state 1S e is occupied by electrons are stable in the atmospheric environment, and the crystal structure and surface state will not change. Destroyed; the silver selenide material of this embodiment is a low-toxic, environmentally friendly material that is environmentally friendly.

作为示例,所述硒化银纳米晶层40由密堆的所述硒化银纳米晶10组成。As an example, the silver selenide nanocrystal layer 40 is composed of the silver selenide nanocrystals 10 closely packed.

将所述硒化银纳米晶10密堆,可提高所述硒化银纳米晶层40的净模式增益,有利于提高激光发射强度。Packing the silver selenide nanocrystals 10 closely can increase the net mode gain of the silver selenide nanocrystal layer 40, which is beneficial to increase the laser emission intensity.

作为示例,所述分布反馈光栅30的光栅周期与有效折射率的乘积等于所述硒化银纳米晶10的带边发射峰波长。As an example, the product of the grating period of the distributed feedback grating 30 and the effective refractive index is equal to the band-edge emission peak wavelength of the silver selenide nanocrystal 10 .

这样的设置,可为激光器的增益介质,也即所述硒化银纳米晶层40提供光反馈,从而获得激光发射。Such an arrangement can provide optical feedback for the gain medium of the laser, that is, the silver selenide nanocrystal layer 40 , so as to obtain laser emission.

作为示例,所述基于硒化银纳米晶的近红外激光器还包括封装层50,所述封装层50位于所述硒化银纳米晶层40上方。As an example, the near-infrared laser based on silver selenide nanocrystals further includes an encapsulation layer 50 , and the encapsulation layer 50 is located above the silver selenide nanocrystal layer 40 .

在所述硒化银纳米晶层40上形成所述封装层50,可进一步提高所述基于硒化银纳米晶的近红外激光器的稳定性,延长其寿命。Forming the encapsulation layer 50 on the silver selenide nanocrystal layer 40 can further improve the stability of the silver selenide nanocrystal-based near-infrared laser and prolong its service life.

作为示例,所述分布反馈光栅30的光栅为周期性排布,形状可根据实际情况进行设置,在此不做限制,例如为规则周期的凸起的矩形体、圆柱或多边形柱体。As an example, the gratings of the distributed feedback grating 30 are arranged periodically, and the shape can be set according to the actual situation, and there is no limitation here, such as regular periodic raised rectangles, cylinders or polygonal cylinders.

作为示例,所述基板20的材料为硅、云母、三氧化二铝及二氧化硅中的一种;所述分布反馈光栅层30的材料为二氧化硅、三氧化二铝、二氟化镁及氟化锂中的一种;所述封装层50的材料为二氧化硅、三氧化二铝、二氟化镁及氟化锂中的一种。As an example, the material of the substrate 20 is one of silicon, mica, aluminum oxide and silicon dioxide; the material of the distributed feedback grating layer 30 is silicon dioxide, aluminum oxide, magnesium difluoride and one of lithium fluoride; the material of the encapsulation layer 50 is one of silicon dioxide, aluminum oxide, magnesium difluoride and lithium fluoride.

所述基于硒化银纳米晶的近红外激光器的器件结构所用的材料可相同也可不同,只要满足器件散热性好,性能稳定即可,在此不做限制,可根据实际需要进行设置。The materials used in the device structure of the silver selenide nanocrystal-based near-infrared laser can be the same or different, as long as the device has good heat dissipation and stable performance. There is no limit here, and it can be set according to actual needs.

在本实施例中,所述基板20的材料优选为三氧化二铝,所述分布反馈光栅层30的材料优选为三氧化二铝,所述封装层50的材料优选为三氧化二铝。In this embodiment, the material of the substrate 20 is preferably aluminum oxide, the material of the distributed feedback grating layer 30 is preferably aluminum oxide, and the material of the packaging layer 50 is preferably aluminum oxide.

三氧化二铝材料因其成本低廉,散热性好,稳定性好,被优选为所述基于硒化银纳米晶的近红外激光器的器件结构的材料。The aluminum oxide material is preferred as the material for the device structure of the near-infrared laser based on silver selenide nanocrystals because of its low cost, good heat dissipation and good stability.

作为示例,所述基于硒化银纳米晶的近红外激光器还包括泵浦源,用于对所述硒化银纳米晶层40进行激励。As an example, the near-infrared laser based on silver selenide nanocrystals further includes a pump source for exciting the silver selenide nanocrystal layer 40 .

所述泵浦源的发射光子能量大于或等于所述硒化银纳米晶10 1Sh态和1Pe态间的能量间隙,泵浦光子从所述封装层50上表面或所述基板20下表面注入,对所述基于硒化银纳米晶的近红外激光器进行激励,使得所述激光器的激光发射从所述封装层50上表面或所述基板20下表面输出。The emission photon energy of the pump source is greater than or equal to the energy gap between the silver selenide nanocrystal 10 1S h state and the 1P e state, and the pump photons are emitted from the upper surface of the packaging layer 50 or the lower surface of the substrate 20 The injection is to excite the near-infrared laser based on silver selenide nanocrystals, so that the laser emission of the laser is output from the upper surface of the encapsulation layer 50 or the lower surface of the substrate 20 .

这里需要说明的是,因为激光发射从所述封装层50上表面或所述基板20下表面沿器件垂直方向输出,所述泵浦光子需要从所述封装层50上表面或所述基板20下表面倾斜注入,避免与激光发射重合,所述泵浦光子倾斜注入的倾斜角度可根据实际情况设置,在此不做限制。It should be noted here that since the laser emission is output from the upper surface of the encapsulation layer 50 or the lower surface of the substrate 20 along the vertical direction of the device, the pump photons need to be emitted from the upper surface of the encapsulation layer 50 or the lower surface of the substrate 20 The oblique implantation on the surface avoids coincidence with the laser emission, and the inclination angle of the oblique injection of pump photons can be set according to the actual situation, which is not limited here.

实施例二Embodiment two

本实施例提供一种基于硒化银纳米晶的近红外激光器制备方法,用于制备上述实施例一中的所述基于硒化银纳米晶的近红外激光器,所述制备方法包括:This embodiment provides a method for preparing a near-infrared laser based on silver selenide nanocrystals, which is used to prepare the near-infrared laser based on silver selenide nanocrystals in the first embodiment. The preparation method includes:

S1:提供基板,并制备直径范围为6nm~10nm,且为正方晶相的硒化银纳米晶10,再将所述硒化银纳米晶10分散于甲苯溶液中,得到硒化银纳米晶甲苯分散液;S1: Provide a substrate, prepare silver selenide nanocrystals 10 with a diameter ranging from 6nm to 10nm and a tetragonal crystal phase, and then disperse the silver selenide nanocrystals 10 in a toluene solution to obtain silver selenide nanocrystals in toluene Dispersions;

S2:于所述基板20上形成分布反馈光栅层30;S2: forming a distributed feedback grating layer 30 on the substrate 20;

S3:将步骤S1中得到的所述硒化银纳米晶甲苯分散液旋涂于所述分布反馈光栅层30上,获得硒化银纳米晶层40。S3: Spin-coat the toluene dispersion of silver selenide nanocrystals obtained in step S1 on the distributed feedback grating layer 30 to obtain a silver selenide nanocrystal layer 40 .

如图7至图11所示,以下结合附图对本实施例进行进一步的介绍。As shown in FIG. 7 to FIG. 11 , this embodiment will be further described below in conjunction with the accompanying drawings.

如图7及图8所示,作为示例,首先进行步骤S1,提供基板20,并制备直径范围为6nm~10nm,且为正方晶相的硒化银纳米晶10,再将所述硒化银纳米晶10分散于甲苯溶液中,得到硒化银纳米晶甲苯分散液。As shown in Figures 7 and 8, as an example, step S1 is first performed to provide a substrate 20, and to prepare a silver selenide nanocrystal 10 with a diameter ranging from 6nm to 10nm and a tetragonal crystal phase, and then the silver selenide The nanocrystal 10 is dispersed in the toluene solution to obtain the silver selenide nanocrystal toluene dispersion.

利用金属有机法,并通过控制反应时间制备直径为6nm~10nm的正方晶相所述硒化银纳米晶10,将所述硒化银纳米晶10分散于甲苯溶液中,其中所述甲苯溶液的浓度需要调节至20mg/ml。所述基板20的材料为硅、云母、三氧化二铝及二氧化硅中的一种,在本实施例中,三氧化二铝材料因成本低廉,散热性好,稳定性好,被优选采用。The silver selenide nanocrystal 10 in the tetragonal crystal phase with a diameter of 6nm to 10nm is prepared by using a metal-organic method and controlling the reaction time, and the silver selenide nanocrystal 10 is dispersed in a toluene solution, wherein the toluene solution The concentration needs to be adjusted to 20mg/ml. The material of the substrate 20 is one of silicon, mica, aluminum oxide and silicon dioxide. In this embodiment, the aluminum oxide material is preferably used because of its low cost, good heat dissipation, and good stability. .

如图7及图9所示,作为示例,接着进行步骤S2,于所述基板20上形成分布反馈光栅层30。As shown in FIG. 7 and FIG. 9 , as an example, step S2 is followed to form a distributed feedback grating layer 30 on the substrate 20 .

本实施例的所述分布反馈光栅30的材料为二氧化硅、三氧化二铝、二氟化镁及氟化锂中的一种,在本实施例中,三氧化二铝材料因成本低廉,散热性好,稳定性好,被优选采用。所述分布反馈光栅30为周期性排布,形状可根据实际情况进行设置,在此不做限制,例如为规则周期的凸起的矩形体、圆柱或多边形柱体,因工艺的简易性,优选采用规则周期的凸起的矩形体。这里需要说明的是,所述分布反馈光栅30的光栅周期与有效折射率的乘积等于所述硒化银纳米晶10的带边发射峰波长,为所述硒化银纳米晶层40提供光反馈,从而获得激光发射。在本实施例中,先于所述基板20上形成一层三氧化二铝,再利用反应离子刻蚀法,于三氧化二铝表面刻蚀出三氧化二铝分布反馈光栅。The material of the distributed feedback grating 30 in this embodiment is one of silicon dioxide, aluminum oxide, magnesium difluoride and lithium fluoride. In this embodiment, the material of aluminum oxide is low in cost. Good heat dissipation and good stability are preferred. The distributed feedback grating 30 is periodically arranged, and the shape can be set according to the actual situation, and there is no limitation here. For example, it is a regular periodic raised rectangle, cylinder or polygon cylinder. A raised rectangular body with regular periodicity. It should be noted here that the product of the grating period of the distributed feedback grating 30 and the effective refractive index is equal to the band-edge emission peak wavelength of the silver selenide nanocrystal 10, providing optical feedback for the silver selenide nanocrystal layer 40 , so as to obtain laser emission. In this embodiment, a layer of Al2O3 is formed on the substrate 20 first, and then a reactive ion etching method is used to etch the Al2O3 distributed feedback grating on the surface of the Al2O3.

在另一优选实施例中,所述基板20与分布反馈光栅层30同为三氧化二铝材料,可为一体设置,可直接提供厚的三氧化二铝基板,利用反应离子刻蚀法,于三氧化二铝基板表面刻蚀出三氧化二铝分布反馈光栅。In another preferred embodiment, the substrate 20 and the distributed feedback grating layer 30 are made of Al2O3 material, which can be set as one body, and a thick Al2O3 substrate can be directly provided, and the reactive ion etching method can be used in the The aluminum oxide distributed feedback grating is etched on the surface of the aluminum oxide substrate.

如图7及图10所示,作为示例,接着进行步骤S3,将步骤S1中得到的所述硒化银纳米晶甲苯分散液旋涂于所述分布反馈光栅层30上,获得硒化银纳米晶层40。As shown in Figure 7 and Figure 10, as an example, then proceed to step S3, spin-coat the silver selenide nanocrystalline toluene dispersion liquid obtained in step S1 on the distribution feedback grating layer 30 to obtain silver selenide nanocrystals crystal layer 40.

将步骤S1得到的硒化银纳米晶甲苯分散液以2500转/分钟的转速,旋涂于所述分布反馈光栅30上。本实施例中,将硒化银纳米晶甲苯分散液以2500转/分钟的转速旋涂于三氧化二铝分布反馈光栅上。Spin-coat the toluene dispersion of silver selenide nanocrystals obtained in step S1 on the distribution feedback grating 30 at a speed of 2500 rpm. In this embodiment, the toluene dispersion of silver selenide nanocrystals is spin-coated on the aluminum oxide distribution feedback grating at a speed of 2500 rpm.

作为优选示例,在步骤S3中,将所述硒化银纳米晶甲苯分散液旋涂于所述分布反馈光栅层40后,还包括在惰性气体保护下退火的步骤。As a preferred example, in step S3, after the toluene dispersion of silver selenide nanocrystals is spin-coated on the distributed feedback grating layer 40, annealing under the protection of an inert gas is also included.

将旋涂所述硒化银纳米晶甲苯分散液的所述分布反馈光栅层30在惰性气体保护下60℃退火半小时来提高堆积所述硒化银纳米晶密度,来获得所述硒化银纳米晶层40。退火处理的所述硒化银纳米晶10可提高所述硒化银纳米晶层40的净模式增益,有利于提高激光发射强度。Annealing the distributed feedback grating layer 30 spin-coated with the toluene dispersion of silver selenide nanocrystals under the protection of an inert gas at 60° C. for half an hour to increase the density of the stacked silver selenide nanocrystals to obtain the silver selenide nanocrystalline layer 40 . The annealed silver selenide nanocrystal 10 can increase the net mode gain of the silver selenide nanocrystal layer 40 , which is beneficial to increase the laser emission intensity.

如图11所示,作为优选示例,在步骤S3中,获得所述硒化银纳米晶层40后,还包括于所述硒化银纳米晶层40上形成封装层50的步骤。As shown in FIG. 11 , as a preferred example, in step S3 , after obtaining the silver selenide nanocrystal layer 40 , a step of forming an encapsulation layer 50 on the silver selenide nanocrystal layer 40 is also included.

利用原子层沉积法于所述硒化银纳米晶层40上沉积所述封装层50,本实施例中,所述封装层50的材料为三氧化二铝,也即利用原子层沉积法于所述硒化银纳米晶层40上沉积一层三氧化二铝形成所述封装层50。The encapsulation layer 50 is deposited on the silver selenide nanocrystalline layer 40 by atomic layer deposition. A layer of aluminum oxide is deposited on the silver selenide nanocrystalline layer 40 to form the encapsulation layer 50 .

于所述硒化银纳米晶层40上沉积所述封装层50,可进一步提高激光器器件的稳定性,延长激光器的寿命。Depositing the encapsulation layer 50 on the silver selenide nanocrystalline layer 40 can further improve the stability of the laser device and prolong the service life of the laser.

综上所述,本发明提供一种基于硒化银纳米晶的近红外激光器及其制备方法,所述基于硒化银纳米晶的近红外激光器依次包括:基板、分布反馈光栅层及硒化银纳米晶层;所述硒化银纳米晶层由硒化银纳米晶组成,所述硒化银纳米晶为正方晶相,直径范围为6nm~10nm。本发明利用直径为6nm~10nm的正方晶相的硒化银纳米晶作为激光器的光增益介质,实现了零阈值的带边态光增益;本发明利用量子限域效应,通过调节硒化银纳米晶的尺寸来调节正方晶相硒化银纳米晶导带底和环境费米能级的相对位置,从而获得带边电子态1Se被电子占据的硒化银纳米晶,发射波长可调,无须添加易被氧化的空穴捕获剂,且带边电子态1Se被电子占据的硒化银纳米晶在大气环境下是稳定的,晶体结构和表面状态也不会被破坏;本发明的硒化银材料为低毒的环保型材料,对环境友好。所以,本发明有效克服了现有技术中的种种缺点而具高度产业利用价值。In summary, the present invention provides a near-infrared laser based on silver selenide nanocrystals and a preparation method thereof. The near-infrared laser based on silver selenide nanocrystals comprises in turn: a substrate, a distributed feedback grating layer, and a silver selenide Nanocrystalline layer: the silver selenide nanocrystalline layer is composed of silver selenide nanocrystals, the silver selenide nanocrystals are in a tetragonal crystal phase, and the diameter ranges from 6nm to 10nm. The present invention uses silver selenide nanocrystals with a diameter of 6nm to 10nm in a square crystal phase as the optical gain medium of the laser, and realizes a zero-threshold band edge state optical gain; the present invention utilizes the quantum confinement effect to adjust the crystallite size to adjust the relative position of the conduction band bottom of the tetragonal silver selenide nanocrystals and the ambient Fermi level, so as to obtain the silver selenide nanocrystals whose band-edge electronic state 1S e is occupied by electrons, the emission wavelength is adjustable, and no need Add the hole trapping agent that is easily oxidized, and the silver selenide nanocrystal that band edge electronic state 1S e is occupied by electron is stable under atmospheric environment, and crystal structure and surface state also can not be destroyed; Selenization of the present invention The silver material is an environmentally friendly material with low toxicity and is friendly to the environment. Therefore, the present invention effectively overcomes various shortcomings in the prior art and has high industrial application value.

上述实施例仅例示性说明本发明的原理及其功效,而非用于限制本发明。任何熟悉此技术的人士皆可在不违背本发明的精神及范畴下,对上述实施例进行修饰或改变。因此,举凡所属技术领域中具有通常知识者在未脱离本发明所揭示的精神与技术思想下所完成的一切等效修饰或改变,仍应由本发明的权利要求所涵盖。The above-mentioned embodiments only illustrate the principles and effects of the present invention, but are not intended to limit the present invention. Anyone skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by those skilled in the art without departing from the spirit and technical ideas disclosed in the present invention shall still be covered by the claims of the present invention.

Claims (9)

1.一种基于硒化银纳米晶的近红外激光器,其特征在于,所述基于硒化银纳米晶的近红外激光器依次包括:1. a near-infrared laser based on silver selenide nanocrystals, characterized in that, said near-infrared laser based on silver selenide nanocrystals comprises successively: 基板、分布反馈光栅层及硒化银纳米晶层;Substrate, distributed feedback grating layer and silver selenide nanocrystalline layer; 所述硒化银纳米晶层由硒化银纳米晶组成,所述硒化银纳米晶为正方晶相,直径范围为6nm~10nm。The silver selenide nanocrystal layer is composed of silver selenide nanocrystals, the silver selenide nanocrystals are in a tetragonal crystal phase, and the diameter ranges from 6nm to 10nm. 2.根据权利要求1所述的基于硒化银纳米晶的近红外激光器,其特征在于:所述硒化银纳米晶层由密堆的所述硒化银纳米晶组成。2. The near-infrared laser based on silver selenide nanocrystals according to claim 1, characterized in that: the silver selenide nanocrystal layer is composed of closely packed silver selenide nanocrystals. 3.根据权利要求1所述的基于硒化银纳米晶的近红外激光器,其特征在于:所述分布反馈光栅的光栅周期与有效折射率的乘积等于所述硒化银纳米晶的带边发射峰波长。3. the near-infrared laser based on silver selenide nanocrystals according to claim 1, is characterized in that: the grating period of described distributed feedback grating and the product of effective refractive index are equal to the band edge emission of described silver selenide nanocrystals peak wavelength. 4.根据权利要求1所述的基于硒化银纳米晶的近红外激光器,其特征在于:所述基于硒化银纳米晶的近红外激光器还包括封装层,所述封装层位于所述硒化银纳米晶层上方。4. The near-infrared laser based on silver selenide nanocrystals according to claim 1, characterized in that: the near-infrared laser based on silver selenide nanocrystals also includes an encapsulation layer, and the encapsulation layer is located on the selenide above the silver nanocrystal layer. 5.根据权利要求4所述的基于硒化银纳米晶的近红外激光器,其特征在于:所述基板的材料为硅、云母、三氧化二铝及二氧化硅中的一种;所述分布反馈光栅层的材料为二氧化硅、三氧化二铝、二氟化镁及氟化锂中的一种;所述封装层的材料为二氧化硅、三氧化二铝、二氟化镁及氟化锂中的一种。5. the near-infrared laser based on silver selenide nanocrystal according to claim 4, is characterized in that: the material of described substrate is the one in silicon, mica, aluminum oxide and silicon dioxide; The material of the feedback grating layer is one of silicon dioxide, aluminum oxide, magnesium difluoride and lithium fluoride; the material of the packaging layer is silicon dioxide, aluminum oxide, magnesium difluoride and fluorine One of the lithium oxides. 6.根据权利要求1所述的基于硒化银纳米晶的近红外激光器,其特征在于:所述基于硒化银纳米晶的近红外激光器还包括泵浦源,用于对所述硒化银纳米晶层进行激励。6. the near-infrared laser based on silver selenide nanocrystals according to claim 1, is characterized in that: the near-infrared laser based on silver selenide nanocrystals also includes a pumping source, for the silver selenide The nanocrystalline layer is excited. 7.一种基于硒化银纳米晶的近红外激光器的制备方法,用于制备如权利要求1~6中任意一项所述的基于硒化银纳米晶的近红外激光器,其特征在于,所述制备方法包括:7. A method for preparing a near-infrared laser based on silver selenide nanocrystals, used to prepare the near-infrared laser based on silver selenide nanocrystals as described in any one of claims 1 to 6, wherein the Said preparation method comprises: S1:提供基板,并制备直径范围为6nm~10nm,且为正方晶相的硒化银纳米晶,再将所述硒化银纳米晶分散于甲苯溶液中,得到硒化银纳米晶甲苯分散液;S1: Provide a substrate, and prepare silver selenide nanocrystals with a diameter ranging from 6nm to 10nm and a tetragonal crystal phase, and then disperse the silver selenide nanocrystals in a toluene solution to obtain a toluene dispersion of silver selenide nanocrystals ; S2:于所述基板上形成分布反馈光栅层;S2: forming a distributed feedback grating layer on the substrate; S3:将步骤S1中得到的所述硒化银纳米晶甲苯分散液旋涂于所述分布反馈光栅层上,获得硒化银纳米晶层。S3: Spin-coat the toluene dispersion of silver selenide nanocrystals obtained in step S1 on the distribution feedback grating layer to obtain a silver selenide nanocrystal layer. 8.根据权利要求7所述的基于硒化银纳米晶的近红外激光器的制备方法,其特征在于:在步骤S3中,将所述硒化银纳米晶甲苯分散液旋涂于所述分布反馈光栅层后,还包括在惰性气体保护下退火的步骤。8. the preparation method based on the near-infrared laser of silver selenide nanocrystal according to claim 7 is characterized in that: in step S3, described silver selenide nanocrystal toluene dispersion liquid is spin-coated on described distribution feedback After the grating layer, an annealing step under the protection of inert gas is also included. 9.根据权利要求7所述的基于硒化银纳米晶的近红外激光器的制备方法,其特征在于:在步骤S3中,获得所述硒化银纳米晶层后,还包括于所述硒化银纳米晶层上形成封装层的步骤。9. the preparation method of the near-infrared laser based on silver selenide nanocrystal according to claim 7, it is characterized in that: in step S3, after obtaining described silver selenide nanocrystal layer, also include in described selenide A step of forming an encapsulation layer on the silver nanocrystal layer.
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