CN115480077A - Atomic force microscope control method with cooperative work of non-contact mode and contact mode - Google Patents
Atomic force microscope control method with cooperative work of non-contact mode and contact mode Download PDFInfo
- Publication number
- CN115480077A CN115480077A CN202211165715.3A CN202211165715A CN115480077A CN 115480077 A CN115480077 A CN 115480077A CN 202211165715 A CN202211165715 A CN 202211165715A CN 115480077 A CN115480077 A CN 115480077A
- Authority
- CN
- China
- Prior art keywords
- sample
- contact mode
- probe
- atomic force
- force microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 33
- 239000000523 sample Substances 0.000 claims abstract description 250
- 230000005284 excitation Effects 0.000 claims abstract description 91
- 238000012360 testing method Methods 0.000 claims abstract description 49
- 239000000126 substance Substances 0.000 claims abstract description 14
- 238000003384 imaging method Methods 0.000 claims description 19
- 230000003287 optical effect Effects 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 8
- 238000011065 in-situ storage Methods 0.000 abstract description 5
- 238000012512 characterization method Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000012876 topography Methods 0.000 description 6
- 238000003795 desorption Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000012625 in-situ measurement Methods 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 108010076504 Protein Sorting Signals Proteins 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004630 atomic force microscopy Methods 0.000 description 1
- 238000000594 atomic force spectroscopy Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000013101 initial test Methods 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
An atomic force microscope control method with cooperative work of a non-contact mode and a contact mode solves the problem that the existing two working mode combination mode cannot be characterized in situ, and belongs to the atomic force microscope technology. The cantilever beam of the atomic force microscope drives the probe above the sample, and the method comprises the following steps: s1, a cantilever beam of an atomic force microscope drives a probe to be arranged at a set distance above a sample, a sensor is excited to excite the cantilever beam to drive the probe to resonate, and long-range performance is tested; s2, stopping excitation of the excitation sensor, driving the sample to move upwards or the probe to move downwards so as to enable the surface of the sample to be tightly attached to the probe above, and enabling the excitation sensor to generate an excitation signal to act on the sample and/or the probe so as to test the physical and chemical characteristics of the sample; and S3, stopping generating the excitation signal by the excitation sensor, simultaneously returning the sample or the probe to the original position, driving the sample or the probe to move, driving the probe to move to the next test position point by the cantilever beam of the atomic force microscope, and switching to S1.
Description
Technical Field
The invention relates to an atomic force microscope control method with cooperative work of a non-contact mode and a contact mode, belonging to the atomic force microscope technology.
Background
The atomic force microscope is an important device for surface characterization of nano-scale materials, and is widely applied to the fields of materials, chemistry, biology, medicine, semiconductors and the like. Atomic force microscopes are largely classified into contact mode and non-contact mode according to their operation mode. The contact mode is the most typical static mode, the probe is tightly attached to the surface of the sample in the scanning process, and the attractive force or the repulsive force acts on the cantilever beam directly, so that the surface physical and chemical properties are measured. The non-contact mode may be classified into an amplitude modulation mode, a frequency modulation mode, a force modulation mode, a higher harmonic modulation mode, a dissipative signal mode, and the like according to the kind of physical signal used.
The contact mode is the simplest and most convenient way for the atomic force microscope to acquire the surface topography of a sample, the Z-axis scanner ensures that the deflection of the cantilever on the surface of the sample is constant all the time, the topography signal is generated according to the position signal of the cantilever, and the conductive atomic force microscope, the piezoelectric force microscope, the stress-strain testing technology and the like in the contact mode become indispensable important characterization technologies in the field of scanning probe microscopes.
The non-contact mode is that the needle point of the probe is not contacted with the surface of the sample all the time, the probe resonates within a certain distance from the surface of the sample, the physical signal of the sensor resonance corresponds to the distance between the sample and the probe, and the parameter is brought into a specific physical model to obtain the corresponding physical property.
The atomic force microscope can already realize excellent performance characterization in a contact mode or a non-contact mode in any single working mode, but the effective combination of the two working modes still faces many challenges, the non-contact mode is firstly adopted in the prior art, the corresponding physical properties of all test position points on a sample surface are obtained, a probe is contacted with a sample after returning to an initial test position point, the contact mode test is carried out according to the sequence of the test position points in the non-contact mode, other physical properties of the sample are continuously obtained, and the surface property test of the sample is completed; for the same test position point, the two modes of scanning respectively generate drift, secondary scanning or intervention of various external devices, so that multi-field performance representation of a fixed test position point on the space cannot be determined. Therefore, the existing two working mode combination modes have the problems that in-situ characterization cannot be inevitably caused due to mechanical operation and the like in space and representation of various physical and chemical properties cannot be instantaneity in time, so that the real relation of interaction between physical fields at the same moment cannot be objectively reflected.
Disclosure of Invention
Aiming at the problems that the existing two working mode combination modes cannot be characterized in situ and cannot objectively reflect the real relation of interaction between physical fields at the same moment, the invention provides an atomic force microscope control method with cooperative working of a non-contact mode and a contact mode.
The invention relates to a control method of an atomic force microscope with cooperative work of a non-contact mode and a contact mode, wherein a cantilever beam of the atomic force microscope drives a probe to be above a sample, and the method comprises the following steps:
s1, a cantilever beam of an atomic force microscope drives a probe to be arranged at a set distance above a sample, a sensor is excited to excite the cantilever beam to drive the probe to resonate, and long-range performance is tested; the long-range performance can also be tested by switching from one non-contact mode to another, causing the sensor to be excited in the other non-contact mode.
S2, stopping excitation of the excitation sensor, driving the sample to move upwards or the probe to move downwards so as to enable the surface of the sample to be tightly attached to the probe above, and enabling the excitation sensor to generate an excitation signal to act on the sample and/or the probe so as to test the physical and chemical characteristics of the sample; it is also possible to switch from one contact mode to another contact mode, so that the excitation sensor of the other contact mode generates an excitation signal, which tests the physicochemical properties of the sample.
And S3, stopping generating an excitation signal by the excitation sensor, returning the sample or the probe to the original position, driving the sample or the probe to move, driving the probe to move to a next test position point by a cantilever beam of the atomic force microscope, and switching to S1.
The invention can also be in a contact mode firstly and then in a non-contact mode, and specifically comprises the following steps:
s1, a cantilever beam of an atomic force microscope drives a probe to move upwards or downwards at a set distance above a sample, so that the surface of the sample is attached to the probe above the sample, an excitation sensor generates an excitation signal to act on the sample and/or the probe, and the physical and chemical characteristics of the sample are tested; it is also possible to switch from one contact mode to another contact mode, so that the excitation sensor of the other contact mode generates an excitation signal, which tests the physicochemical properties of the sample.
S2, the excitation sensor stops generating an excitation signal, and meanwhile, the sample or the probe returns to the original position, the excitation sensor excites the cantilever beam to drive the probe to resonate, and long-range performance is tested; it is also possible to switch from one non-contact mode to another, causing the other non-contact mode sensor to excite and image the sample surface.
And S3, exciting the sensor to stop exciting, driving the sample or the probe to move, driving the cantilever beam of the atomic force microscope to drive the probe to move to the next test position point, and switching to S1.
Preferably, the physicochemical properties include morphology, mechanical properties, thermal properties, electrical properties, optical properties, magnetic properties, piezoelectric properties, and electrochemical properties of the sample.
Preferably, the excitation signal includes an electrical signal, a magnetic signal, a thermal signal, an optical signal, and a mechanical signal.
Preferably, the testing of long-range performance includes: and (3) imaging the appearance of the sample, imaging the magnetic field force and imaging the electrostatic force.
The invention has the advantages that the in-situ fast switching method is adopted, the vertical distance between the probe and the sample is adjusted at the same position point, and the in-situ measurement of the short-range performance and the long-range performance is sequentially realized, so that the atomic force microscope can scan in a non-contact mode and simultaneously measure the physical and chemical characteristics of the sample in a contact mode. The invention has instantaneity on the representation of various physical and chemical properties, and the obtained test performance can objectively reflect the real relation of interaction between various physical fields at the same time. The invention can solve the problem that the non-contact mode and the contact mode of the atomic force microscope are incompatible.
Drawings
FIG. 1 is a schematic signal timing diagram of a time-sharing excitation control system;
fig. 2 is a schematic diagram of a hardware structure of an atomic force microscope for testing performance according to a first embodiment of the present invention, in which 1 represents a position of a probe in a non-contact mode, and 2 represents a position of the probe in a contact mode; 3 represents a sample; 4, a piezoelectric scanning tube;
fig. 3 is a real-time signal for performing non-contact mode-non-contact mode switching in embodiment 1. The signal 1 is a real-time position signal of the cantilever beam driven by a time-sharing excitation control system, and the signal 2 is a contact conductive current signal between the probe and the sample;
FIG. 4 is a graph of stress-strain relationship between the probe and the sample in example 2;
FIG. 5 is a graph of the topography of the Atomic Force Microscope (AFM) scanned HOPG sample of example 3;
fig. 6 is a current graph of atomic force microscopy scanning of a HOPG sample in example 3.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict.
The invention is further described with reference to the following drawings and specific examples, which are not intended to be limiting.
The utility model provides an atomic force microscope control method of non-contact mode and contact mode collaborative work, atomic force microscope's cantilever beam drives the probe above the sample, includes:
and 3, stopping generating the excitation signal by the excitation sensor, returning the sample or the probe to the original position, driving the sample or the probe to move, driving the probe to move to a next test position point by a cantilever beam of the atomic force microscope, and turning to the step 1.
According to the method, when the same test position point is tested, a time-sharing excitation control method is utilized, firstly, non-contact mode test is conducted, then, the non-contact mode test is executed after the non-contact mode test is conducted when the non-contact mode test is conducted, the vertical distance between the probe and a sample is adjusted on the same test position point, in-situ measurement of long-range performance and short-range performance is achieved sequentially, and the atomic force microscope can be enabled to scan in a non-contact mode and simultaneously use a contact mode to measure physical and chemical characteristics of the sample. The embodiment collects parameters of a non-contact mode and a contact mode and characterizes the performance of the parameters of the non-contact mode and the contact mode on a determined test position point, so that the performance of force, heat, electricity, light, magnetism and the like of a sample at the same test position point can be truly characterized.
In the application, when the same test position point is tested, a time-sharing excitation control method is utilized, firstly, a contact mode test is executed, then, a non-contact mode test is executed, then, the contact mode test is executed after the contact mode test is moved to the next test position point, in-situ measurement of process and remote performance is sequentially realized by adjusting the vertical distance between the probe and the sample on the same test position point, and the atomic force microscope can be enabled to use the non-contact mode to measure the physical and chemical characteristics of the sample while scanning in the contact mode.
The switching of the operation mode in this application includes switching from the non-contact mode to the contact mode, switching from the contact mode to the non-contact mode, and also switching from the non-contact mode to another non-contact mode or switching from the contact mode to another contact mode. The combined application of the two scanning techniques of the non-contact mode and the contact mode is any permutation and combination of any number of non-contact modes and any number of contact modes. For example, non-contact mode-non-contact mode, or contact mode-non-contact mode, etc. After the specific functions are assigned to the atomic force microscope operating mode, a specific switching scheme is exemplified: imaging mode (non-contact mode) -conductive force mode (contact mode) -electrostatic force mode (non-contact mode) -imaging mode (non-contact mode).
The physicochemical properties in this application include the morphology, mechanical properties, thermal properties, electrical properties, optical properties, magnetic properties, piezoelectric properties, and electrochemical properties of the sample.
The excitation signal in this application includes an electrical signal, a magnetic signal, a thermal signal, an optical signal, and a mechanical signal.
Testing long-range performance in this application includes: and imaging the appearance of the sample, imaging the magnetic field force and imaging the electrostatic force.
The first embodiment is as follows:
the hardware structure of the embodiment is as shown in fig. 2, a cantilever beam of an atomic force microscope drives a probe above a sample 3, and the sample 3 is placed on a piezoelectric scanning tube 4; the hardware structure of the embodiment also comprises an excitation sensor for exciting the cantilever beam to drive the probe to resonate, a position sensor for driving the piezoelectric scanning tube to move upwards, an excitation sensor in a contact mode, an excitation sensor in a non-contact mode and a sensor for driving the piezoelectric scanning tube to move horizontally;
the specific control process comprises the following steps: firstly, parameters to be set are transmitted to a time-sharing excitation control system through an upper computer, and the time-sharing excitation control system is loaded to a corresponding sensor through corresponding signal generation and digital-to-analog conversion. Meanwhile, the hardware structure transmits a feedback signal back to the time-sharing excitation control system through the analog-to-digital conversion module in work, and then realizes the time-sharing collaborative excitation technology of the non-contact mode and the contact mode under the action of control methods such as a phase-locked loop, negative feedback and the like.
When the working mode is set to be the non-contact mode, the contact mode, and the non-contact mode, the time-sharing excitation control system acts on the hardware structure through the digital-to-analog conversion of the excitation signals sent by the sensors, taking fig. 2 as an example, when the atomic force microscope is in the non-contact mode, the cantilever beam drives the probe to keep a certain distance from the sample 3 at the position 1, the sensor is excited to resonate, the probe and the sample keep the non-contact state in cooperation with a negative feedback loop, the feedback parameter signals can be respectively set to be various physical parameters such as frequency, amplitude, phase, current, and the like according to the specific physicochemical characteristics to be characterized, the atomic force microscope in the amplitude modulation mode realizes the imaging of the sample surface, and the long-range performance of the sample is characterized in the non-contact mode, for example: sample topography imaging, magnetic field force imaging and electrostatic force imaging; when the atomic force microscope is switched to the contact mode after the operation step of the non-contact mode is finished, the piezoelectric scanning tube 4 is subjected to the displacement generated by the driving signal of the position signal sensor to enable the sample to move upwards, so that the cantilever beam drives the probe to be positioned at the position 2 to be contacted with the sample 3, the excitation sensor can perform corresponding contact mode representation on the sample 3, and at the moment, a negative feedback loop with amplitude as a set parameter is in a closed state;
finally, after the test task in the contact mode is executed, when the atomic force microscope is switched to the non-contact mode, the piezoelectric scanning tube 4 generates reverse displacement, the belt sample 3 moves downwards and returns to the original position, the cantilever beam is restored to the position 1 and is far away from the sample 3, the non-contact mode operation is kept, and at the moment, the negative feedback loop is opened again to maintain the dynamic non-contact state between the probe and the sample.
In the above-described operating mode, it is assumed that the additionally determined property is characterized as a conductivity property. When the clock signal reaches the switching time set by the time-sharing excitation control system, the excitation signal for driving the cantilever beam to resonate in the non-contact mode is immediately closed, and the system drives the piezoelectric scanning tube to advance so that the probe is in contact with the sample, so that an obvious current signal can be seen. After the current signal is tested, the atomic force microscope is switched to a non-contact mode, the probe leaves the surface of the sample to enable the current to disappear, and the excitation signal of the excitation sensor is restored to excite the cantilever beam to keep a resonance state. At two mode switches, the change of the excitation signal and the current signal can be clearly corresponding.
The signal sequence diagram of the time-sharing excitation control system is shown in FIG. 1, and the atomic force microscope is at t 0 Operating in a non-contact mode before the moment, exciting the sensor excitation signal at t 0 Closing at any moment, simultaneously sending a driving signal to the piezoelectric scanning tube 4 by the position sensor to drive the sample to move upwards to enable the probe and the sample to be in a contact state, applying an additional excitation signal to the probe and/or the sample by the excitation sensor to start detection of specific parameters, and after finishing a relevant detection instruction of a contact mode, at t 1 And starting the excitation signal of the excitation sensor again at any moment, adjusting the driving signal of the position sensor to the piezoelectric scanning tube 4 at the same time, driving the sample to move downwards by the piezoelectric scanning tube 4, returning the surface of the sample to the original position, and closing the excitation signal of the excitation sensor in the contact mode. I.e. atomic force microscope at t 0 The switching from the non-contact mode to the contact mode is completed at time t 0 To t 1 Maintaining contact for a period of time, and then at t 1 The time is returned to the non-contact mode.
The second embodiment is as follows: the difference between the hardware structure of this embodiment and fig. 2 is that the sample is fixed, the cantilever of the afm drives the probe above the sample 3, the piezoelectric scanning tube is fixed to the cantilever, and the cantilever drives the probe to move vertically and horizontally above the sample 3 by driving the piezoelectric scanning tube. The sensors in the hardware structure comprise an excitation sensor for exciting the cantilever beam to drive the probe to resonate, a position sensor for driving the piezoelectric scanning tube to move downwards, an excitation sensor in a contact mode, an excitation sensor in a non-contact mode and a sensor for driving the piezoelectric scanning tube to move horizontally;
the specific process comprises the following steps: firstly, parameters to be set are transmitted to a time-sharing excitation control system through an upper computer, and the time-sharing excitation control system is loaded into a corresponding sensor through corresponding signal generation and digital-to-analog conversion. Meanwhile, the hardware structure transmits a feedback signal back to the time-sharing excitation control system through the analog-to-digital conversion module during working, and then realizes the time-sharing cooperative excitation technology of a non-contact mode and a contact mode under the action of control methods such as a phase-locked loop, negative feedback and the like.
When the working mode is set to be a non-contact mode, a contact mode and a non-contact mode, the time-sharing excitation control system acts on a hardware structure after the excitation signals sent by the sensors are subjected to digital-to-analog conversion, when the atomic force microscope is in the non-contact mode, the cantilever beam drives the probe to keep a certain distance from a sample, the sensor is excited to excite the cantilever beam to resonate, the probe and the sample are kept in the non-contact state by cooperating with a negative feedback loop, feedback parameter signals can be respectively set to be various physical parameters such as frequency, amplitude, phase, current and the like according to specific physical and chemical characteristics to be characterized, the atomic force microscope in the amplitude modulation mode realizes the imaging of the surface of the sample, and the long-range performance of the sample is represented by the non-contact mode, for example: imaging the appearance of the sample, imaging the magnetic field force and imaging the electrostatic force; when the atomic force microscope is switched to the contact mode after the operation step of the non-contact mode is finished, the piezoelectric scanning tube is subjected to the displacement generated by the driving signal of the position signal sensor to enable the cantilever beam to drive the probe to move downwards, so that the probe is contacted with the sample, the excitation sensor can perform corresponding contact mode representation on the sample, and at the moment, a negative feedback loop with amplitude as a set parameter is in a closed state;
and finally, after the test task in the contact mode is executed, when the atomic force microscope is switched to the non-contact mode, the piezoelectric scanning tube 4 generates reverse displacement, so that the cantilever beam is restored to the position 1 and returns to the original position away from the sample 3, the non-contact mode operation is kept, and at the moment, the negative feedback loop is restarted to maintain the dynamic non-contact state between the probe and the sample.
The time sequence of the signal of the time-sharing excitation control system is the same as that of the figure 1, and the atomic force microscope is at t 0 Operating in a non-contact mode before the moment, exciting the sensor excitation signal at t 0 Is closed at any time, and simultaneously, the position sensor sends out a driving signal to the piezoelectric scanning tube 4 to ensure that the probe is detectedThe needle moves downwards to contact with the sample, and an excitation sensor is adopted to apply an additional excitation signal to the probe and/or the sample to start the detection of specific parameters, and after the relevant detection instruction of the contact mode is completed, at t 1 And (4) starting excitation signals of the excitation sensor again at a moment, simultaneously adjusting driving signals of the position sensor to enable the probe to leave the surface of the sample to return to the original position, and closing the excitation signals of the excitation sensor in a contact mode. I.e. atomic force microscope at t 0 The switching from the non-contact mode to the contact mode is completed at time t 0 To t 1 The contact state is maintained for a period of time and then at t 1 The moment returns to the non-contact mode. Specific examples are given below:
example 1:
the atomic force microscope performs a design scheme of non-contact mode-non-contact mode switching at a test position on the HOPG sample. The morphology of the sample was characterized in the non-contact mode and the conductivity of the sample in the contact mode.
As shown in fig. 3, signal 1 is a real-time position signal of the cantilever beam when the time-sharing excitation control system controls the position sensor to send out a driving signal, and signal 2 is a current signal of the contact conduction between the probe and the sample.
The front end of the signal 1 corresponds to a vibration signal of the cantilever beam maintaining a resonance state in a non-contact mode, when t =0 moment, the piezoelectric scanning tube drives the cantilever beam to press the surface of the sample, the amplitude of the signal 1 is greatly reduced at the moment, and the resonance actively excited by the probe stops in the contact mode. In addition, the horizontal position of the signal 1 is translated upwards, and the voltage is increased, so that the Z-axis position change of the piezoelectric scanning tube is reflected. At time t =0, a significant contact current was generated between the probe and the sample, with a signal intensity of 40 mv.
After approximately 3 milliseconds of contact current between the collection probe and the sample, the system executes a contact mode to non-contact mode switch command. At the moment, the probe is far away from the surface of the HOPG sample at the initial position of the voltage drop of the Z axis of the piezoelectric scanning tube, and the excitation signal of the excitation sensor restarts to maintain the resonance state of the cantilever beam. At the same time, the contact current signal disappears.
To this end, the command for measuring the contact current at a test position by switching the contactless mode-the contact mode-the contactless mode takes about 4 milliseconds to be executed.
Example 2:
the atomic force microscope performs a design scheme of non-contact mode-non-contact mode switching at a test position on the HOPG sample. The morphology of the samples was characterized in the non-contact mode and the stress-strain performance of the samples in the contact mode.
The non-contact mode-non-contact mode switching procedure is substantially the same as in example 1 above, except that the performance characterization function of on-switching to the contact mode is a stress strain test.
As shown in fig. 4, the curve composed of square data points is a contact stress curve when the probe and the sample are switched from the non-contact state to the contact state, and the curve composed of circular data points is a desorption stress curve when the probe and the sample are switched from the contact state to the non-contact state. According to international practice, the contact stress curves are symmetrically processed about the Y-axis at the zero point in the figure, facilitating the simultaneous observation and comparison of the two stress-strain curves in the figure.
After the system is switched to the contact mode, the piezoelectric scanning tube pushes the sample to be continuously close to the probe. As can be seen from the contact stress curve in fig. 4, an attractive force of about 8 newtons is generated between the sample and the probe when the distance between the sample and the probe is within 3 nm, the repulsive force starts to increase significantly when the distance between the sample and the probe is less than 2.5 nm, and the repulsive force and the attractive force between the probe and the sample reach an equilibrium state at a distance of 2 nm. Thereafter, as the probe approaches the sample, a maximum repulsive force of about 50 newtons is generated between the two.
When the system switches to non-contact mode, the piezoelectric scanner tube drives the sample away from the probe. At this time, the repulsive force between the probe and the sample gradually decreased, and as a result of observing the desorption stress curve, the maximum attractive force of 18 newtons was generated at the time of desorption, which was significantly larger than the maximum attractive force at the time of contact, since the probe was pressed into the sample. In addition, the equilibrium point of the repulsive force of the attraction force and the initial point of the attraction force between the sample and the probe in the desorption stage are respectively shifted backward by about 2 nm and 7 nm.
Example 3:
the atomic force microscope performs a design scheme of non-contact mode-non-contact mode switching on a 1 micron by 1 micron area on the HOPG sample. The morphology of the sample is characterized in the non-contact mode and the conductivity of the sample is characterized in the contact mode.
This embodiment is a set in which the single test site operation in embodiment 1 is performed at X-axis 512 by Y-axis 512 points within the scanning area, respectively, and the control command at each test site is the same as that in embodiment 1. In addition, the basic parameters of the operation of the scanning probe microscope, i.e. the scanning position, the number of scanning points, the scanning speed, the scanning slope, etc., need to be set additionally.
Fig. 5 is a topography of a specific region of the HOPG sample scanned by the afm, and fig. 6 is a contact current graph of the same region of the HOPG sample scanned by the afm. Comparing the two images shows that the appearance image of the sample and the contact current image have accurate corresponding relation, and the contact current of the sample and the probe at the height fluctuation position of the appearance has size change according with the appearance rule.
Therefore, the non-contact mode and contact mode cooperative work technology can really realize multi-field coupling in-situ characterization of the material, and the problem that a topography map and a current map cannot be accurately corresponding due to intrinsic defects of mechanical equipment in the traditional secondary scanning technology is solved.
Although the invention herein has been described with reference to particular embodiments, it is to be understood that these embodiments are merely illustrative of the principles and applications of the present invention. It is therefore to be understood that numerous modifications may be made to the illustrative embodiments and that other arrangements may be devised without departing from the spirit and scope of the present invention as defined by the appended claims. It should be understood that various dependent claims and the features described herein may be combined in ways different from those described in the original claims. It is also to be understood that features described in connection with individual embodiments may be used in other described embodiments.
Claims (10)
1. The atomic force microscope control method with cooperative work of a non-contact mode and a contact mode is characterized in that a cantilever beam of the atomic force microscope drives a probe to be above a sample, and the method comprises the following steps:
s1, a cantilever beam of an atomic force microscope drives a probe to be arranged at a set distance above a sample, a sensor is excited to excite the cantilever beam to drive the probe to resonate, and long-range performance is tested;
s2, stopping excitation of the excitation sensor, driving the sample to move upwards or the probe to move downwards so as to enable the surface of the sample to be tightly attached to the probe above, and enabling the excitation sensor to generate an excitation signal to act on the sample and/or the probe so as to test the physical and chemical characteristics of the sample;
and S3, stopping generating an excitation signal by the excitation sensor, returning the sample or the probe to the original position, driving the sample or the probe to move, driving the probe to move to a next test position point by a cantilever beam of the atomic force microscope, and switching to S1.
2. The method as claimed in claim 1, wherein the step S1 further comprises switching from one non-contact mode to another non-contact mode, so as to excite another non-contact mode sensor and test long-range performance.
3. The method for controlling an atomic force microscope according to the non-contact mode and the contact mode in cooperation, wherein the step S2 further comprises switching from one contact mode to another contact mode, so that an excitation signal is generated by an excitation sensor of the other contact mode, and the physicochemical characteristic of the sample is tested.
4. The atomic force microscope control method of the cooperative work of the non-contact mode and the contact mode is characterized in that a cantilever beam of the atomic force microscope drives a probe to be above a sample, and the method comprises the following steps:
s1, a cantilever beam of an atomic force microscope drives a probe to move upwards or downwards at a set distance above a sample, so that the surface of the sample is attached to the probe above the sample, an excitation sensor generates an excitation signal to act on the sample and/or the probe, and the physical and chemical characteristics of the sample are tested;
s2, the excitation sensor stops generating an excitation signal, and meanwhile, the sample or the probe returns to the original position, the excitation sensor excites the cantilever beam to drive the probe to resonate, and long-range performance is tested;
and S3, exciting the sensor to stop exciting, driving the sample or the probe to move, driving the cantilever beam of the atomic force microscope to drive the probe to move to the next test position point, and switching to S1.
5. The method as claimed in claim 4, wherein the step S1 further comprises switching from one contact mode to another contact mode, so that the excitation sensor of the other contact mode generates the excitation signal to test the physicochemical characteristic of the sample.
6. The method for controlling an atomic force microscope according to the cooperative working of the non-contact mode and the contact mode of the claim 4 or 5, wherein the step S2 further comprises switching from one non-contact mode to another non-contact mode, so that the sensor in the other non-contact mode is excited to image the surface of the sample.
7. The method for controlling an atomic force microscope according to the claims 1 or 4, wherein in the steps S2 and S3, a piezoelectric ceramic device is used to drive the sample or the probe to move.
8. The method for controlling an atomic force microscope according to claim 1 or 4, wherein the physical and chemical properties include morphology, mechanical properties, thermal properties, electrical properties, optical properties, magnetic properties, piezoelectric properties, and electrochemical properties of the sample.
9. The method for controlling an atomic force microscope according to claim 1 or 4, wherein the excitation signal includes an electrical signal, a magnetic signal, a thermal signal, an optical signal and a mechanical signal.
10. The method for controlling an atomic force microscope according to claim 1 or 4, wherein the testing the long-range performance comprises: and (3) imaging the appearance of the sample, imaging the magnetic field force and imaging the electrostatic force.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211165715.3A CN115480077A (en) | 2022-09-23 | 2022-09-23 | Atomic force microscope control method with cooperative work of non-contact mode and contact mode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211165715.3A CN115480077A (en) | 2022-09-23 | 2022-09-23 | Atomic force microscope control method with cooperative work of non-contact mode and contact mode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115480077A true CN115480077A (en) | 2022-12-16 |
Family
ID=84393489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211165715.3A Pending CN115480077A (en) | 2022-09-23 | 2022-09-23 | Atomic force microscope control method with cooperative work of non-contact mode and contact mode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115480077A (en) |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10282126A (en) * | 1997-04-04 | 1998-10-23 | Nikon Corp | Scanning probe microscope and its sample observation method |
| US5918274A (en) * | 1997-06-02 | 1999-06-29 | International Business Machines Corporation | Detecting fields with a single-pass, dual-amplitude-mode scanning force microscope |
| JPH11352135A (en) * | 1998-06-04 | 1999-12-24 | Seiko Instruments Inc | Interatomic force microscope |
| US20050140387A1 (en) * | 2002-08-26 | 2005-06-30 | Takuya Matsumoto | Probe device and method of controlling the same |
| JP2008281550A (en) * | 2007-04-10 | 2008-11-20 | Hitachi Ltd | Scanning probe microscope |
| JP2012167928A (en) * | 2011-02-09 | 2012-09-06 | Sii Nanotechnology Inc | Surface property measurement device and scanning method thereof |
| CN108802431A (en) * | 2017-05-04 | 2018-11-13 | 中国科学院宁波材料技术与工程研究所 | A kind of detection method of the scanning probe microscopy with magnetic-electric signal detecting function |
| US20190353681A1 (en) * | 2016-11-10 | 2019-11-21 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | Method of modifying a surface of a sample, and a scanning probe microscopy system |
| CN111721750A (en) * | 2020-06-23 | 2020-09-29 | 深圳大学 | Method and device for improving non-contact mode TERS signal of atomic force microscope |
| US20210003608A1 (en) * | 2018-03-21 | 2021-01-07 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | Method and system for at least subsurface characterization of a sample |
| CN112964910A (en) * | 2020-09-16 | 2021-06-15 | 中国科学院沈阳自动化研究所 | Atomic force microscope integrated double-probe rapid in-situ switching measurement method and device |
-
2022
- 2022-09-23 CN CN202211165715.3A patent/CN115480077A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10282126A (en) * | 1997-04-04 | 1998-10-23 | Nikon Corp | Scanning probe microscope and its sample observation method |
| US5918274A (en) * | 1997-06-02 | 1999-06-29 | International Business Machines Corporation | Detecting fields with a single-pass, dual-amplitude-mode scanning force microscope |
| JPH11352135A (en) * | 1998-06-04 | 1999-12-24 | Seiko Instruments Inc | Interatomic force microscope |
| US20050140387A1 (en) * | 2002-08-26 | 2005-06-30 | Takuya Matsumoto | Probe device and method of controlling the same |
| JP2008281550A (en) * | 2007-04-10 | 2008-11-20 | Hitachi Ltd | Scanning probe microscope |
| JP2012167928A (en) * | 2011-02-09 | 2012-09-06 | Sii Nanotechnology Inc | Surface property measurement device and scanning method thereof |
| US20190353681A1 (en) * | 2016-11-10 | 2019-11-21 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | Method of modifying a surface of a sample, and a scanning probe microscopy system |
| CN108802431A (en) * | 2017-05-04 | 2018-11-13 | 中国科学院宁波材料技术与工程研究所 | A kind of detection method of the scanning probe microscopy with magnetic-electric signal detecting function |
| US20210003608A1 (en) * | 2018-03-21 | 2021-01-07 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | Method and system for at least subsurface characterization of a sample |
| CN111721750A (en) * | 2020-06-23 | 2020-09-29 | 深圳大学 | Method and device for improving non-contact mode TERS signal of atomic force microscope |
| CN112964910A (en) * | 2020-09-16 | 2021-06-15 | 中国科学院沈阳自动化研究所 | Atomic force microscope integrated double-probe rapid in-situ switching measurement method and device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11002757B2 (en) | Method and apparatus of operating a scanning probe microscope | |
| CN107449939B (en) | Multi-parameter synchronous measurement method by adopting magnetic drive peak force modulation atomic force microscope | |
| US9995765B2 (en) | Method and apparatus of using peak force tapping mode to measure physical properties of a sample | |
| US20050034512A1 (en) | System for wide frequency dynamic nanomechanical analysis | |
| KR20050043885A (en) | Scanning probe microscope | |
| EP2646838B1 (en) | Method of using peak force tapping mode to measure physical properties of a sample | |
| EP2932277B1 (en) | Method and device for controlling a scanning probe microscope | |
| JP5340119B2 (en) | Proximity method of probe and sample in scanning probe microscope | |
| JPWO2007072706A1 (en) | Scanning probe microscope | |
| US20140283228A1 (en) | Dual-Probe Scanning Probe Microscope | |
| US20160109477A1 (en) | Method and Apparatus of Tuning a Scanning Probe Microscope | |
| CN115480077A (en) | Atomic force microscope control method with cooperative work of non-contact mode and contact mode | |
| JP5662041B2 (en) | A program for causing a computer to scan a scanning probe microscope | |
| CN113109342A (en) | Scanning probe microscopic imaging method and device for obtaining multidimensional physical properties | |
| KR20160049148A (en) | Topography signal and option signal acquisition apparatus, method and atomic force microscope having the same | |
| CN102393474A (en) | Method for scanning nano-scale sharp sample | |
| CN215985760U (en) | High-flux scanning probe microscopic imaging system | |
| El Rifai et al. | Dynamics of atomic force microscopes: Experiments and simulations | |
| Cinar et al. | A system of systems analysis of a multi-probe SPM system | |
| Cinar et al. | New approach for nanoindentation using multiprobe AFM system | |
| KR20240004958A (en) | AFM imaging with creep compensation | |
| Wang et al. | An integrated hinged dual-probe for co-target fast switching imaging | |
| Горбенко et al. | COMPACT SCANNING PROBE MICROSCOPE HEAD BASED ON INERTIAL THRUSTERS USING PIEZOPACKETS | |
| CN118130532A (en) | Method for testing thermal expansion response of solid material based on atomic force microscope | |
| JP2011209072A (en) | Scanning type probe microscope and scanning method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |