CN115469448A - Moving mirror system of Michelson interferometer based on magnetic suspension positioning technology - Google Patents

Moving mirror system of Michelson interferometer based on magnetic suspension positioning technology Download PDF

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Publication number
CN115469448A
CN115469448A CN202210989317.7A CN202210989317A CN115469448A CN 115469448 A CN115469448 A CN 115469448A CN 202210989317 A CN202210989317 A CN 202210989317A CN 115469448 A CN115469448 A CN 115469448A
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CN
China
Prior art keywords
electro
magnetic pole
moving mirror
magnet
electromagnet
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Pending
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CN202210989317.7A
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Chinese (zh)
Inventor
王祥福
李家燕
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Yunnan Celaifu Technology Co ltd
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Yunnan Celaifu Technology Co ltd
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Priority to CN202210989317.7A priority Critical patent/CN115469448A/en
Publication of CN115469448A publication Critical patent/CN115469448A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

The invention discloses a moving mirror system of a Michelson interferometer based on a magnetic suspension positioning technology, which comprises a moving mirror main body and three electromagnet groups, wherein the moving mirror main body comprises a lens base, three metal reflectors, connecting rods and three magnetic pole balls, the three connecting rods are distributed on the side edge of the lens base, the three magnetic pole balls are respectively arranged at the other ends of the three connecting rods, each electromagnet group comprises an electromagnet support, a coil and a magnetic pole head, each electromagnet support is formed by combining three wedges, the three coils are respectively fixed on the three wedges through electromagnet bolts, the moving mirror system has the advantages of no abrasion, simplicity in realization, easiness in control and easiness in manufacturing, and meanwhile, the precision loss caused by the increase of the use frequency and the use time is avoided.

Description

Moving mirror system of Michelson interferometer based on magnetic suspension positioning technology
Technical Field
The invention relates to an optical reflector with high-precision space positioning. Designed for use with a moving mirror in a michelson interferometer. Belongs to a precise optical instrument. The Michelson interferometer using the invention can be used in a spectrum analyzer, a teaching experiment instrument and other optical instruments.
Background
At present, the moving mirror system of the michelson interferometer on the market mainly has two working modes. One is a mechanical moving mirror system realized by matching a precise screw rod with a precise nut. The mechanical moving mirror system is limited by mechanical processing precision and processing technology, so that the manufacturing and processing of mechanical parts of the mechanical moving mirror system are difficult. While also increasing the manufacturing cost. Moreover, since the mechanical parts are made of metal materials, the mechanical parts are oxidized, rusted, changed in size, and worn mechanically, which affects the accuracy of the interferometer, as time goes by, or maintenance is not in place. Meanwhile, since the metal material has a certain thermal expansion coefficient, when the metal material is subjected to the change of the external environment temperature, the error influence which is difficult to eliminate is also caused to the measurement system. Therefore, the mechanical moving mirror system is subjected to various interferences caused by the ambient temperature, the ambient humidity, the processing conditions and the processing materials, so that a series of comprehensive influence factors are caused, and the measurement error of the instrument is influenced. Therefore, the moving mirror system with the mechanical structure is only used on some teaching demonstration instruments at present and cannot be used in actual scientific research and medical equipment due to various defects.
At present, the moving mirror system in the michelson interferometer adopted in actual scientific research instruments or medical equipment mostly adopts an air bearing technology. This technical requirement places extremely high demands on the material and grinding accuracy of the bearings. The air bearing is more accurate and has no mechanical contact. Typically, the air spindle is capable of achieving a rotational accuracy of less than 0.1 μm in the axial direction. Since there is no mechanical contact between the rotor and the static support part, no wear occurs either. But the air bearings must require absolutely clean space for the environment. Otherwise all accuracies will be broken. In a michelson interferometer, which typically employs air bearings, there is a relatively sealed clean room, inside which is an absolutely clean environment. This also causes great difficulties in the maintenance of such equipment. It is usually straightforward to replace the assembly. But also extremely demanding on the production environment. The workshop for producing the air bearing is also required to be in an absolutely dust-free environment. Otherwise the accuracy of the air bearing will not be guaranteed.
In summary, no matter which existing technical scheme is used, the equipment and process with sufficient processing precision are needed to manufacture the moving mirror system of the michelson interferometer. And also places stringent requirements on the manufacturing environment. And the manufactured movable mirror system is also influenced by the use frequency and time. This results in a relatively high technical threshold for making moving mirror systems. But also requires a large investment of site and equipment at an earlier stage.
Disclosure of Invention
To solve the above problems. The invention is based on the magnetic suspension technology, and realizes the accurate positioning control of the movable mirror by a metal reflector through 3 electromagnet groups, each group is provided with 3 electromagnets, and 9 electromagnets are used in total. The space position of the moving mirror is controlled by electromagnetic force. At the moment, the moving mirror system of the Michelson interferometer does not need any mechanical precision machining technology or air bearing technology, and can be changed into the size of the magnetic field in the electromagnet through the size of the current signal, so that the position of the metal moving mirror in the space is controlled. The invention reduces the technical threshold for manufacturing the Michelson interferometer and adds a brand new technical implementation scheme for the moving mirror system of the Michelson interferometer.
The technical scheme provided by the invention is as follows: the utility model provides a moving mirror system of michelson interferometer based on magnetic suspension location technique, includes moving mirror main part and three electro-magnet group, it includes lens base, metal reflector, connecting rod and magnetic pole ball to move the mirror main part, the fixed lens base that locates of metal reflector is positive, connecting rod quantity is three, three connecting rod distributes and locates the side of lens base and the contained angle between two adjacent connecting rods and be 120, magnetic pole ball quantity is three and locates the other end of three connecting rod respectively, electro-magnet group includes electro-magnet support, coil and magnetic pole head, the electro-magnet support is formed by three wedge combination, coil quantity is three and fixes respectively on locating three wedge through the electro-magnet bolt, magnetic pole head quantity is three and fixes respectively and locate the three coil other end.
Furthermore, the number of the electromagnet groups is three and the electromagnet groups are distributed and arranged corresponding to the three magnetic pole balls respectively.
Furthermore, the center of the electromagnet support is provided with a mounting hole.
Furthermore, one coil and one magnetic pole head form an electromagnet, each electromagnet group comprises three electromagnets, each magnetic pole ball is attracted by the three electromagnets, and the three electromagnets are attracted by three forces which are staggered by 120 degrees in space.
Compared with the prior art, the invention has the advantages that: the metal reflector is used as the movable mirror of the Michelson interferometer, the movable mirror floats in the space in an electromagnetic mode, the space position of the movable mirror is controlled at the same time, the magnetic suspension technology is adopted, 3 electromagnet groups are adopted, each group consists of 3 electromagnets, and 9 electromagnets are used in total, a current control magnetic field is adopted, the generated magnetic field controls the space position of the movable mirror, and the movable mirror system in the Michelson interferometer is adopted, so that the measurement precision is not influenced by the limitation of a mechanical processing process, and the measurement precision is not influenced by the limitation of materials. And the position of the movable mirror is required to be precisely controlled by only regulating the current introduced into the electromagnet. The invention has the advantages of no abrasion, simple realization, easy control and easy manufacture. And meanwhile, the loss of precision caused by the increase of the use frequency and the use time is avoided. The core part only adopts the electromagnet, so the processing and the manufacturing are very simple and easy. The technical threshold of production design and manufacture is reduced.
Drawings
Fig. 1 is a schematic view of a moving mirror system of a michelson interferometer based on a magnetic levitation positioning technology.
Fig. 2 is a schematic left-view structural diagram of a moving mirror system of a michelson interferometer based on a magnetic suspension positioning technology.
Fig. 3 is a schematic diagram of a right-view structure of a moving mirror system of a michelson interferometer based on a magnetic suspension positioning technology.
Fig. 4 is a schematic top view structure diagram of a moving mirror system of a michelson interferometer based on a magnetic levitation positioning technology.
Fig. 5 is a schematic bottom view of a moving mirror system of a michelson interferometer based on a magnetic levitation positioning technology.
Fig. 6 is a schematic perspective structure diagram of a moving mirror system of a michelson interferometer based on a magnetic suspension positioning technology.
As shown in the figure: 1. a magnetic pole ball; 2. a connecting rod; 3. a lens base; 4. a metal reflective mirror; 5. a coil; 6. a magnetic pole head; 7. an electromagnet bolt; 8. an electromagnet support; 9. and (7) installing holes.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
As shown in the figure, a moving mirror system of michelson interferometer based on magnetic suspension location technique, including moving mirror main part and three electro-magnet group, it includes lens base 3, metal reflector 4, connecting rod 2 and magnetic pole ball 1 to move the mirror main part, metal reflector 4 is fixed to be located lens base 3 openly, connecting rod 2 quantity is three, the contained angle that lens base 3 was located in three connecting rod 2 distribution and between two adjacent connecting rods 2 is 120, magnetic pole ball 1 quantity is three and locates three connecting rod 2's the other end respectively, electro-magnet group includes electro-magnet support 8, coil 5 and magnetic pole head 6, electro-magnet support 8 is formed by three wedge combination, coil 5 quantity is three and fixes respectively on three wedge through electro-magnet bolt 7, magnetic pole head 6 quantity is three and fixes respectively and locates the three 5 other ends of coil.
Electromagnet group quantity is three and corresponds three magnetic pole ball 1 distribution setting respectively, 8 centers of electromagnet support are equipped with mounting hole 9, one coil 5 and one an electro-magnet, every are contained in the electromagnet group threely the electro-magnet, each magnetic pole ball 1 all receives the appeal of three electro-magnet, and is three the appeal of electro-magnet is the three power of 120 directions that stagger in space.
The assembly process of the invention is as follows: firstly, the electromagnet bolt 7 is arranged in the electromagnet bracket 8; then the magnetic pole head 6 is loaded into the coil 5; then the magnetic pole head 6 and the electromagnet bolt 7 are installed together; then fixing the mounting hole 9 to the machine housing; then the pole ball 1 and the connecting rod 2 are mounted together; then the connecting rod 2 is arranged on the lens base 3; the metal mirror 4 is then also fitted onto the lens holder 3. The assembly is thus complete.
The working principle of the invention is as follows: firstly, a coil 5 and a magnetic pole head 6 form an electromagnet, each electromagnet group comprises three electromagnets, three magnetic pole balls 1 are arranged on the movable mirror main body, the three magnetic pole balls are metal and do not contain magnetism, but are made of metal which can be conducted with magnetism, such as stainless steel or iron balls, then each magnetic pole ball 1 receives the attraction tension of the three electromagnets, and the attraction forces of the three electromagnets are three forces which are staggered by 120 degrees in space. Thus, the magnitude of the magnetic field generated by one electromagnet can be changed by only changing the magnitude of the current in one electromagnet, so that the magnitude of the force in the direction of the electromagnet can be changed, and the position of the magnetic pole ball in the space is changed. Because the magnetic pole balls 1 and the movable mirror main body are fixed together, the spatial position of the movable mirror can be accurately controlled only by changing the current of the electromagnets in three directions on the three magnetic pole balls 1, and nine electromagnets in total.
The present invention and its embodiments have been described, without limitation, and the embodiments shown in the drawings are only one embodiment of the present invention and the actual configuration is not limited thereto. In summary, those skilled in the art should appreciate that they can readily use the disclosed conception and specific embodiments as a basis for designing or modifying other structures for carrying out the same purposes of the present invention without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (4)

1. The utility model provides a moving mirror system of michelson interferometer based on magnetic suspension location technique which characterized in that: including moving mirror body and three electro-magnet group, it includes lens base (3), metal reflector (4), connecting rod (2) and magnetic pole ball (1) to move mirror body, metal reflector (4) are fixed to be located lens base (3) openly, connecting rod (2) quantity is three, three connecting rod (2) distribute and locate the side of lens base (3) and the contained angle between two adjacent connecting rods (2) be 120, magnetic pole ball (1) quantity is three and locates the other end of three connecting rod (2) respectively, electro-magnet group includes electro-magnet support (8), coil (5) and magnetic pole head (6), electro-magnet support (8) are formed by three wedge combination, coil (5) quantity is three and fixes respectively on three wedge through electro-magnet bolt (7), magnetic pole head (6) quantity is three and fix respectively and locate three coil (5) the other end.
2. The moving mirror system of the michelson interferometer based on magnetic levitation positioning technology according to claim 1, wherein: the number of the electromagnet groups is three, and the electromagnet groups are distributed and arranged corresponding to the three magnetic pole balls (1) respectively.
3. The moving mirror system of the michelson interferometer based on magnetic levitation positioning technology as recited in claim 1, wherein: the center of the electromagnet support (8) is provided with a mounting hole (9).
4. The moving mirror system of the michelson interferometer based on magnetic levitation positioning technology according to claim 1, wherein: one coil (5) and one an electro-magnet is constituteed to magnetic pole head (6), every include in the electro-magnet group three the electro-magnet, each magnetic pole ball (1) all receives the appeal of three electro-magnet, and three the appeal of electro-magnet is the power of three 120 directions of staggering in space.
CN202210989317.7A 2022-08-17 2022-08-17 Moving mirror system of Michelson interferometer based on magnetic suspension positioning technology Pending CN115469448A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210989317.7A CN115469448A (en) 2022-08-17 2022-08-17 Moving mirror system of Michelson interferometer based on magnetic suspension positioning technology

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210989317.7A CN115469448A (en) 2022-08-17 2022-08-17 Moving mirror system of Michelson interferometer based on magnetic suspension positioning technology

Publications (1)

Publication Number Publication Date
CN115469448A true CN115469448A (en) 2022-12-13

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Application Number Title Priority Date Filing Date
CN202210989317.7A Pending CN115469448A (en) 2022-08-17 2022-08-17 Moving mirror system of Michelson interferometer based on magnetic suspension positioning technology

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